CN116426880B - Vacuum coating equipment and using method thereof - Google Patents
Vacuum coating equipment and using method thereof Download PDFInfo
- Publication number
- CN116426880B CN116426880B CN202310474679.7A CN202310474679A CN116426880B CN 116426880 B CN116426880 B CN 116426880B CN 202310474679 A CN202310474679 A CN 202310474679A CN 116426880 B CN116426880 B CN 116426880B
- Authority
- CN
- China
- Prior art keywords
- fixed
- sealing plate
- plc
- driving
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000007789 sealing Methods 0.000 claims abstract description 292
- 230000005540 biological transmission Effects 0.000 claims abstract description 176
- 239000011248 coating agent Substances 0.000 claims abstract description 135
- 238000000576 coating method Methods 0.000 claims abstract description 135
- 239000000758 substrate Substances 0.000 claims abstract description 73
- 230000007246 mechanism Effects 0.000 claims description 117
- 230000008093 supporting effect Effects 0.000 claims description 45
- 230000006698 induction Effects 0.000 claims description 38
- 238000007747 plating Methods 0.000 claims description 25
- 230000000903 blocking effect Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 11
- 239000007888 film coating Substances 0.000 claims description 10
- 238000009501 film coating Methods 0.000 claims description 10
- 230000009471 action Effects 0.000 claims description 8
- 230000007723 transport mechanism Effects 0.000 claims description 5
- 238000000429 assembly Methods 0.000 claims description 4
- 230000000712 assembly Effects 0.000 claims description 4
- 238000007599 discharging Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 description 18
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Abstract
The invention provides vacuum coating equipment and a using method thereof, and belongs to the technical field of vacuum coating. According to the invention, the substrate is conveyed into the coating chamber through the feed port based on a rotary feeding mode, then the lateral sealing plate, the upper sealing plate and the lower sealing plate are synchronously realized through the screw-nut transmission part, the upper driving part and the lower driving part, then the substrate and the bearing part are completely sealed in the feed port, then vacuumizing and coating treatment are carried out, and after coating is finished, the substrate after coating is conveyed in a rotary mode again until discharging is finished, and finally a procedure is finished.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to vacuum coating equipment and a using method thereof.
Background
The vacuum coating machine mainly refers to a type of coating film which needs to be carried out under a higher vacuum degree, and particularly comprises various types including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like, and the main thinking is that the vacuum coating machine is divided into evaporation and sputtering.
Through searching, the Chinese patent with the publication number of CN106555158B discloses a vacuum coating box device, which comprises a coating box, an automatic door mechanism and an automatic door driving mechanism, wherein the front side of the coating box is opened, the automatic door mechanism is arranged on the opening side of the coating box, the automatic door driving mechanism is arranged on the right side of the coating box, and the automatic door driving mechanism is connected with the automatic door mechanism through gear rack meshing.
The substrate can be more conveniently placed in the vacuum coating box, and the opening side of the vacuum coating box is conveniently sealed;
however, the above patent suffers from the following drawbacks:
1. the patent firstly adopts a conveying mechanism to convey a substrate into a coating box, then takes the substrate out of the conveying mechanism to carry out blanking, then fixes the substrate, then closes a box door to carry out vacuum coating treatment, and takes materials after the vacuum coating is finished, and in the process, the process needs frequent operation and has low efficiency;
2. the above patents have low automation.
Disclosure of Invention
The invention aims to provide vacuum coating equipment and a using method thereof, and aims to solve the technical problems of frequent operation, low efficiency and low degree of automation in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a vacuum coating apparatus comprising:
a film plating chamber;
the vacuum pump is arranged on the coating chamber and is used for realizing vacuumizing;
the feed port is arranged on the coating chamber, the side surface of the feed port is U-shaped, and the feed port is used for realizing the entry of a substrate; and
the coating machine is detachably arranged in the coating chamber and is used for coating the substrate;
it also includes:
the rotary conveying mechanism is used for conveying the base material into the coating chamber through the feeding hole based on rotary feeding;
the sealing mechanism is arranged on the coating chamber and is used for sealing the feed inlet and the rotary conveying mechanism supporting part;
the substrate is coated and then conveyed to the upper side of the belt conveying mechanism through the rotary conveying mechanism, and then the coated substrate is conveyed to the belt conveying mechanism through the rotary conveying mechanism;
and the PLC is electrically connected with the rotary conveying mechanism, the sealing mechanism, the belt conveying mechanism, the vacuum pump and the film plating machine to realize control.
As a preferred embodiment of the present invention, the rotary transport mechanism includes:
a base;
the rotating assembly is in transfer fit with the base;
The substrate supporting assembly is arranged on the rotating assembly and is provided with three groups, and the included angle between each group of substrate supporting assemblies is 90 degrees; and
and the rotary driving assembly is arranged on the base and connected with the rotary assembly to drive the rotary assembly to rotate.
As a preferable scheme of the invention, the rotating assembly comprises a hollow rotating shaft and a connecting seat, wherein the hollow rotating shaft is rotatably arranged at the center of the top of the base, and the connecting seat is fixed on the top of the hollow rotating shaft;
each group of substrate bearing assemblies comprises a connecting rod, a bearing frame, connecting strips, L-shaped bearing strips, an electric cylinder and a protection cylinder, one end of each connecting rod is fixed with the circumferential outer wall of each connecting seat, an annular groove is formed in the circumferential outer wall of each connecting rod, the bearing frame is fixed to the other end of each connecting rod, the protection cylinder is fixed to the end part of each bearing frame, the electric cylinder is fixed to the end part of each bearing frame and is positioned in the corresponding protection cylinder, the output end of each electric cylinder extends to the outer side of the corresponding protection cylinder, the electric cylinder is electrically connected with the PLC, the connecting strips are fixed to the output ends of the electric cylinders, the L-shaped bearing strips are provided with a plurality of L-shaped bearing strips, and the L-shaped bearing strips are uniformly fixed to the bottoms of the connecting strips and are in sliding fit with the bottoms of the bearing frames;
The rotary driving assembly comprises a servo motor, a driving gear and a driven gear, wherein the servo motor is fixed at the top of the base, the driving gear is fixed at the output end of the servo motor, the driving gear is electrically connected with the PLC, the driven gear is fixed on the circumferential outer wall of the hollow rotating shaft, and the driving gear is meshed with the driven gear.
As a preferred aspect of the present invention, the sealing mechanism includes:
the lateral sealing plates are provided with two and symmetrically distributed, and are in sliding fit with the coating chamber and are used for sealing the lateral direction of the feed inlet;
an upper sealing plate in sliding fit with the coating chamber;
the lower sealing plate is in sliding fit with the coating chamber and matched with the upper sealing plate to seal the feed inlet in the forward direction, semicircular grooves matched with the annular grooves are formed in the centers of the end parts of the upper sealing plate, which are close to the lower sealing plate, when the upper sealing plate is closed with the semicircular grooves, the closing states of the two semicircular grooves are matched with the annular grooves, a slot is formed in the top of the lower sealing plate, two symmetrically distributed inserting blocks are fixed at the bottom of the upper sealing plate, and the inserting blocks are matched with the slot;
And the sealing driving assembly is arranged on the sealing mechanism and is also connected with the two groups of lateral sealing plates, the upper sealing plate and the lower sealing plate, and the sealing driving assembly is used for synchronously realizing the actions of the two groups of lateral sealing plates, the upper sealing plate and the lower sealing plate, so that the feeding inlet is sealed in the forward direction and the lateral direction.
As a preferable scheme of the invention, a group of first dovetail sliding grooves are formed in two lateral directions of the coating chamber, each group of first dovetail sliding grooves are provided with two first dovetail sliding grooves, the first dovetail sliding grooves are formed in a back direction from the coating chamber, two first dovetail sliding blocks matched with the first dovetail sliding grooves are fixed at the inner side end of each lateral sealing plate, and the first dovetail sliding blocks are in sliding fit with the first dovetail sliding grooves;
the positive upper side of the coating chamber is provided with two second dovetail sliding grooves from top to bottom, the inner side end of the upper sealing plate is fixedly provided with two second dovetail sliding blocks matched with the second dovetail sliding grooves, and the second dovetail sliding blocks are in sliding fit with the second dovetail sliding grooves;
two third dovetail sliding grooves are formed in the forward opening of the feeding hole from top to bottom, two third dovetail sliding blocks matched with the third dovetail sliding grooves are fixed at the inner side end of the lower sealing plate, and the third dovetail sliding blocks are in sliding fit with the third dovetail sliding grooves.
As a preferred aspect of the present invention, the seal driving assembly includes:
the screw rod nut transmission part is arranged on the coating chamber;
the first U-shaped frame is arranged on the screw nut transmission part and is connected with the two lateral sealing plates;
the upper driving part is connected with the lead screw nut transmission part and the upper sealing plate;
a lower driving part connecting the lower sealing plate and the two lateral sealing plates, wherein:
when the screw nut transmission part moves forward, the screw nut transmission part drives the two lateral sealing plates to move forward towards the film plating chamber, and simultaneously the screw nut transmission part is matched with the upper driving part to drive the upper sealing plate to move downwards, and the two lateral sealing plates are matched with the lower driving part to realize upward movement of the lower sealing plate, so that the feed inlet is sealed forward and laterally;
when the screw nut transmission part acts reversely, the screw nut transmission part drives the two lateral sealing plates to move back towards the film plating chamber, and meanwhile, the screw nut transmission part is matched with the upper driving part to drive the upper sealing plate to move upwards, and the two lateral sealing plates are matched with the lower driving part to realize the downward movement of the lower sealing plate.
As a preferable scheme of the invention, the screw-nut transmission part comprises a motor seat, a forward and reverse rotation motor, a screw rod and a nut, wherein the motor seat is fixed at the top of the film plating chamber, two screw rod seats are arranged, two screw rod seats are fixed at the top of the film plating chamber, the screw rod is rotationally arranged between the two screw rod seats, two ends of the screw rod respectively rotate to penetrate through the two screw rod seats and extend outwards, the nut is in threaded fit with the screw rod, the forward and reverse rotation motor is fixed at the top of the motor seat, the output end of the forward and reverse rotation motor is fixed at the end of the screw rod, and the forward and reverse rotation motor is electrically connected with the PLC;
the first U-shaped frame is fixed between the two lateral sealing plates, and the first U-shaped frame is connected with the nuts through bolts;
the upper driving part comprises a first transmission gear and a first transmission rack, the first transmission gear is fixed at the other end part of the screw rod, the first transmission rack is fixed at the top of the upper sealing plate, and the first transmission gear is meshed with the first transmission rack;
the lower driving part comprises rectangular strips, second transmission racks, shaft seats, a transmission shaft, second transmission gears, third transmission racks and a mounting plate, wherein the rectangular strips, the second transmission racks, the shaft seats and the second transmission gears are all provided with two, two rectangular strips are respectively fixed at the bottoms of the lateral sealing plates, two second transmission racks are respectively fixed at the bottoms of the rectangular strips, the second transmission racks face downwards, the two shaft seats are respectively fixed at the positive downside of the coating chamber, the transmission shaft is rotationally arranged between the two shaft seats, two ends of the transmission shaft respectively rotate to penetrate through the two shaft seats and outwards extend, the two second transmission gears are respectively fixed at the two ends of the transmission shaft, the second transmission racks are meshed with the second transmission gears, the third transmission gears are fixed at the center of the circumferential outer wall of the transmission shaft, the mounting plate is fixed at the positive direction of the lower sealing plate, the third transmission racks are fixed at the positive direction of the mounting plate, and the third transmission racks face outwards and are meshed with the mounting plate.
As a preferable scheme of the invention, the invention further comprises
The signal induction mechanism is in signal connection with the PLC controller and is used for automatically realizing the actions of the rotary conveying mechanism, the sealing mechanism and the belt conveying mechanism based on signal induction; and
the blocking mechanism is detachably matched with the film coating chamber in a sliding way and matched with the signal sensing mechanism to realize signal sensing;
the signal sensing mechanism comprises a lower U-shaped frame, a first infrared emission sensor, a vertical plate, a first infrared receiving sensor, an upper U-shaped frame, a second infrared emission sensor, an L-shaped vertical rod, a second infrared receiving sensor, a contact switch, a vibration sensor and a pressure strain gauge, wherein three lower U-shaped frames, the first infrared emission sensor, the upper U-shaped frame and the second infrared emission sensor are respectively arranged, the three lower U-shaped frames are respectively fixed at the bottom of the connecting seat, the central axis of each lower U-shaped frame is respectively parallel to the central axis of each connecting rod, the first infrared emission sensor is fixed on the inner wall of the lower U-shaped frame, infrared light emitted by the first infrared emission sensor is parallel to the outer side, the vertical plate is fixed on the top of the base, the vertical plate is oppositely arranged with a connecting rod positioned at the middle position, the first infrared receiving sensor is fixed on the outer side of the vertical plate, the height of the first infrared receiving sensor is consistent with the height of the lower U-shaped frame, and the first infrared receiving sensor is connected with a PLC signal;
The three upper U-shaped frames are all fixed at the top of the connecting seat, the three vertical plates are respectively positioned at the upper sides of the three lower U-shaped frames, the three second infrared emission sensors are all fixed at the top of the connecting seat, the three second infrared emission sensors are respectively positioned in the three upper U-shaped frames, infrared light emitted by the second infrared emission sensors faces to the upper side, a first hole site is formed in the center of the top of the connecting seat, the first hole site is communicated with the hollow part of the hollow rotating shaft, the L-shaped vertical rods are fixed at the center of the top of the base, extend outwards along the hollow part of the hollow rotating shaft and the first hole site, an included angle between an axis and a central axis of the vertical plates is 45 degrees, the second infrared receiving sensors are fixed at the inner wall of the top of the L-shaped vertical rods and are positioned at the upper sides of the second infrared emission sensors, and the second infrared receiving sensors are in signal connection with the PLC;
the contact switch is fixed at one side end of the coating chamber and is electrically connected with the PLC, and a rectangular notch matched with the contact switch is formed at the forward lower side of one of the lateral sealing plates;
The vibration sensors are uniformly embedded in the belt conveying mechanism and are in signal connection with the PLC;
the pressure strain gauge is fixed at the end part of one of the lateral sealing plates, which is close to the blocking mechanism;
the blocking mechanism comprises a second U-shaped frame, T-shaped sliding blocks and handles, T-shaped grooves are formed in two sides of the top of the coating chamber from top to bottom, the T-shaped grooves are staggered with the first dovetail sliding grooves, the depth of the T-shaped grooves is identical with that of the first dovetail sliding grooves, two T-shaped sliding blocks are symmetrically fixed on two inner walls of the two sides of the second U-shaped frame, the T-shaped sliding blocks are in sliding fit with the T-shaped grooves, and the handles are fixed on the top of the second U-shaped frame.
As a preferred embodiment of the present invention, the method further comprises:
the elastic mechanism comprises an upper elastic component and a lower elastic component, wherein the upper elastic component and the lower elastic component are respectively provided with two groups, the upper elastic component is arranged between the second dovetail sliding groove and the second dovetail sliding block, and the lower elastic component is arranged between the third dovetail sliding groove and the third dovetail sliding block.
The application method of the vacuum coating equipment comprises the following steps:
s1, rotary feeding: the method comprises the steps that a base material is sequentially placed in three supporting frames, the base material is supported by L-shaped supporting strips, a rotary driving assembly is started through a PLC controller, the rotary driving assembly drives the rotary assembly to rotate so as to achieve rotation of the base material supporting assembly, then the base material is rotationally conveyed into a feeding hole, when one of the first infrared emission sensors rotates to a position opposite to the first infrared emission sensor, the first infrared emission sensor receives induction signals and transmits the induction signals into the PLC controller, the PLC controller controls the rotary driving assembly to stop acting, at the moment, an annular groove is positioned at the center of two semicircular grooves, and meanwhile, the PLC controller automatically controls a screw nut transmission part to act positively;
s2, sealing: when the screw nut transmission part moves forwards, the screw nut transmission part drives the two lateral sealing plates to move forwards towards the coating chamber, meanwhile, the screw nut transmission part is matched with the upper driving part to drive the upper sealing plate to move downwards, the two lateral sealing plates are matched with the lower driving part to realize the upward movement of the lower sealing plate, when the rectangular notch is contacted with the contact switch, the contact switch receives an induction signal and transmits the induction signal to the PLC, the PLC automatically controls the screw nut transmission part to stop moving, at the moment, the two lateral sealing plates seal the two sides of the feed inlet, the upper sealing plate and the lower sealing plate are just closed, meanwhile, the inner wall of the two semicircular grooves are matched with the outer wall of the annular groove, the insertion block is completely inserted into the slot, and finally the feed inlet is sealed forwards and laterally;
S3, vacuumizing and coating: the PLC controller is used for starting the vacuum pump to realize vacuumizing, and then the PLC controller is used for starting the coating machine to realize coating;
s4, after film coating is finished, controlling a screw-nut transmission part to act reversely through a PLC (programmable logic controller), when the screw-nut transmission part acts reversely, driving two lateral sealing plates to move back towards a film coating chamber by the screw-nut transmission part, simultaneously driving the upper sealing plate to move upwards by matching with an upper driving part, enabling the lower sealing plate to move downwards by matching with a lower driving part by the two lateral sealing plates, and when a pressure strain gauge on one lateral sealing plate contacts with a second U-shaped frame to touch a pressure signal, transmitting the pressure signal to the PLC, and automatically controlling the screw-nut transmission part to stop acting by the PLC, and simultaneously automatically controlling a rotary driving assembly to start by the PLC;
s5, rotary blanking: the coated substrate continues to rotate, when a second infrared emission sensor corresponding to the coated substrate is opposite to the second infrared emission sensor, the second infrared emission sensor receives an induction signal and transmits the induction signal to the PLC, the PLC automatically controls the rotation driving assembly to stop acting, meanwhile, the PLC automatically controls the electric cylinder to extend, then the L-shaped supporting strip is completely separated from the coated substrate, the coated substrate falls onto the belt conveying mechanism, the vibration sensor on the belt conveying mechanism senses the vibration signal and transmits the vibration signal to the PLC, the PLC automatically controls the electric cylinder to shorten to realize resetting, meanwhile, the PLC automatically controls the rotation driving assembly to start, and when other lower first infrared emission sensors rotate to positions opposite to the first infrared emission sensors, actions similar to those in the step S1 are executed, and finally the step S2-the step S5 are executed.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the invention, the substrate is conveyed into the coating chamber through the feed port based on a rotary feeding mode, then the lateral sealing plate, the upper sealing plate and the lower sealing plate are synchronously realized through the screw-nut transmission part, the upper driving part and the lower driving part, then the substrate and the bearing part are completely sealed in the feed port, then vacuumizing and coating treatment are carried out, and after coating is finished, the substrate after coating is conveyed in a rotary mode again until discharging is finished, and finally a procedure is finished.
(2) According to the invention, automatic induction is realized through the signal induction mechanism, then corresponding automatic control is realized based on automatic induction, the automation degree is high, the rotary feeding process is ended based on induction between the first infrared emission sensor and the first infrared receiving sensor, the sealing process is started at the same time, the sealing process is ended based on contact between the contact switch and the contact, pressure deformation is generated based on contact between the pressure strain gauge and the second U-shaped frame, then the rotary blanking process is not realized, sealing and synchronous starting are not realized any more, the rotary feeding process is stopped based on induction between the second infrared emission sensor and the second infrared receiving sensor, the blanking process is realized, the electric cylinder is reset and the rotary feeding process is started again based on vibration between the vibration sensor and the substrate after coating, and the whole-course automation degree is high.
(3) According to the invention, the lateral sealing plate, the upper sealing plate and the lower sealing plate are synchronously realized through the screw-nut transmission part, the upper driving part and the lower driving part, the conception is ingenious, the application range is wide, and in particular, when the forward-reverse motor is started, the output end of the screw-nut transmission part drives the screw rod to rotate clockwise, the nut drives the two lateral sealing plates to move forward towards the coating chamber through the first U-shaped frame based on sliding fit between the first dovetail sliding block and the first dovetail sliding groove and threaded fit between the nut and the screw rod, when the two lateral sealing plates move forward towards the coating chamber, the rectangular strips drive the second transmission racks to move forward towards the coating chamber, and due to meshing transmission between the second transmission racks and the second transmission gears, the second transmission gears rotate anticlockwise, the third transmission gears rotate anticlockwise, and then drive the third transmission gears to move upwards based on meshing transmission between the third transmission gears and the mounting plate, finally, the rectangular strips move upwards, and the rectangular strips are contacted with the two sealing plates to be in contact with the sealing plate, and the two sealing plate is completely closed, and the two sealing plate is completely contacted with the sealing plate is closed, and the two sealing plate is completely contacted with the sealing plate is closed.
(4) The cross section of the convex groove is convex, so that the tightness of the convex sliding block and the coating chamber after being closed is improved, and the gas is effectively blocked due to the special structure of the convex groove, so that the gas is not easy to enter the coating chamber, the sealing performance of the convex sliding block is improved, and a good environment is created for vacuum coating.
(5) In the invention, the base material needs to be subjected to vacuum coating in the coating chamber, so that the electric cylinder is protected by arranging the protection cylinder.
(6) The invention is based on the sliding fit of the first dovetail sliding block and the first dovetail sliding groove, so that the lateral sealing plate and the coating chamber can not be separated, and meanwhile, when the lateral sealing plate seals the lateral direction of the feeding hole, the gas is effectively blocked in the entering path due to the sliding limit of the first dovetail sliding block and the first dovetail sliding groove, so that the sealing performance of the gas is improved, and meanwhile, the sliding limit fit of the first dovetail sliding block and the first dovetail sliding groove enables the screw nut transmission part to be free from an additional limit structure, so that the screw nut transmission part has multiple purposes.
(7) The invention protects the first infrared emission sensors through the lower U-shaped frame, simultaneously can avoid the mutual influence of the three first infrared emission sensors, further improves the sensing precision, protects the second infrared emission sensors through the upper U-shaped frame, simultaneously can avoid the mutual influence of the three second infrared emission sensors, further improves the sensing precision, and simultaneously has different emission directions of the first infrared emission sensors and the second infrared emission sensors, and can also avoid the mutual influence.
(8) According to the invention, the second dovetail sliding block is well supported by the elastic acting force of the first spring, then the upper sealing plate is hung and supported, and meanwhile, the third dovetail sliding block is well supported by the elastic acting force of the second spring, and then the lower sealing plate is supported.
(9) According to the invention, after the upper sealing plate and the lower sealing plate are closed, the insert blocks are correspondingly inserted into the slots, so that the air is effectively prevented from entering, the sealing performance is effectively improved, and a good environment is created for vacuum coating.
(10) The gas is not easy to enter the coating chamber from the upper side of the convex sliding block, but is easy to enter from the side direction of the convex sliding block, so that the invention is characterized in that the L-shaped sealing plate is positively fixed on the first U-shaped frame, and the L-shaped sealing plate is driven to move together when the side sealing plate moves towards the positive direction of the coating chamber, so that the side direction of the convex sliding block is coated, and good sealing is realized.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a perspective view of a vacuum coating apparatus according to a first aspect of the present invention;
FIG. 2 is a perspective view of a second view of a vacuum coating apparatus according to the present invention;
FIG. 3 is a perspective view of a third view of a vacuum coating apparatus according to the present invention;
FIG. 4 is a perspective view of a rotary transport mechanism in a vacuum coating apparatus according to the present invention;
FIG. 5 is an exploded view of a rotary transport mechanism in a vacuum coating apparatus according to the present invention at a first view;
FIG. 6 is an exploded view of a second view of the rotary transport mechanism of the vacuum coating apparatus of the present invention;
FIG. 7 is a perspective view of a coating chamber, sealing mechanism and blocking mechanism of a vacuum coating apparatus according to the present invention;
FIG. 8 is an exploded view of a first view of a coating chamber, a sealing mechanism, and a blocking mechanism of a vacuum coating apparatus according to the present invention;
FIG. 9 is a perspective view of a coating chamber of a vacuum coating apparatus according to the present invention;
FIG. 10 is a perspective view of a sealing mechanism in a vacuum coating apparatus according to the present invention;
FIG. 11 is an exploded view of a second view of the coating chamber, sealing mechanism and blocking mechanism of the vacuum coating apparatus of the present invention;
FIG. 12 is an exploded view of a third view of a coating chamber, a sealing mechanism, and a blocking mechanism in a vacuum coating apparatus according to the present invention;
FIG. 13 is an enlarged view of the vacuum coating apparatus of FIG. 12A according to the present invention;
FIG. 14 is a perspective view of a blocking mechanism in a vacuum coating apparatus according to the present invention;
FIG. 15 is a perspective view of a first view of a convex slide in a vacuum coating apparatus according to the present invention;
FIG. 16 is a perspective view of a second view at a convex slide in a vacuum coating apparatus according to the present invention;
FIG. 17 is a perspective view in section from a first perspective of a vacuum coating apparatus according to the present invention;
FIG. 18 is a second perspective cross-sectional view of a vacuum coating apparatus according to the present invention;
FIG. 19 is a third perspective cross-sectional view of a vacuum coating apparatus according to the present invention;
FIG. 20 is an enlarged view of the vacuum coating apparatus of the present invention at B in FIG. 19;
FIG. 21 is an enlarged view of the vacuum coating apparatus of the present invention at C in FIG. 19.
In the figure:
1. a rotary conveying mechanism; 101. a base; 102. a hollow rotating shaft; 103. a connecting seat; 104. a connecting rod; 105. an annular groove; 106. a bearing frame; 107. a connecting strip; 108. an L-shaped bearing strip; 109. an electric cylinder; 1010. a protective cylinder; 1011. a servo motor; 1012. a drive gear; 1013. a driven gear; 1014. a first hole site;
2. a film plating chamber; 201. a feed inlet; 202. the first dovetail chute; 203. a receiving groove; 204. a T-shaped groove; 205. a convex groove; 206. the second dovetail groove; 207. a third dovetail chute; 208. a convex slide block; 209. a handle groove; 2010. a negative pressure port;
3. A sealing mechanism; 301. a motor base; 302. a forward and reverse rotation motor; 303. a screw rod; 304. a nut; 305. a first U-shaped frame; 306. a bolt; 307. lateral sealing plates; 308. a first chute; 309. an L-shaped sealing plate; 3010. an upper sealing plate; 3011. a second dovetail slide; 3012. a first transmission gear; 3013. a first drive rack; 3014. a lower sealing plate; 3015. a rectangular bar; 3016. a second drive rack; 3017. a shaft seat; 3018. a transmission shaft; 3019. a second transmission gear; 3020. a third transmission gear; 3021. a third drive rack; 3022. a mounting plate; 3023. inserting blocks; 3024. a slot; 3025. a semicircular groove; 3026. a screw rod seat; 3027. a rectangular notch; 3028. a third dovetail slide;
4. a belt conveying mechanism;
5. a PLC controller;
6. a signal sensing mechanism; 601. a lower U-shaped frame; 602. a first infrared emission sensor; 603. a vertical plate; 604. a first infrared receiving sensor; 605. a U-shaped frame is arranged; 606. a second infrared emission sensor; 607. an L-shaped upright rod; 608. a second infrared receiving sensor; 609. a contact switch; 6010. a vibration sensor; 6011. a pressure strain gage;
7. a blocking mechanism; 701. a second U-shaped frame; 702. a T-shaped slider; 703. a handle;
8. A vacuum pump;
9. an elastic mechanism; 901. a first round bar; 902. a first spring; 903. a second round bar; 904. a second spring;
10. a film plating machine.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. It is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present invention are within the protection scope of the present invention.
Example 1:
referring to fig. 1-21, the present invention provides the following technical solutions:
the vacuum coating equipment consists of a coating chamber 2, a vacuum pump 8, a coating machine 10, a rotary conveying mechanism 1, a belt conveying mechanism 4 and a sealing mechanism 3, and is specifically described as follows:
referring to fig. 1, 2, 3 and 12, a feed port 201 is formed in a coating chamber 2, the side surface of the feed port 201 is in a shape of a U, in the invention, a substrate rotates into the coating chamber 2 from the side surface of the feed port 201, a negative pressure port 2010 is formed at the back of the coating chamber 2, a vacuum pump 8 is assembled at the back of the coating chamber 2, the negative pressure port faces the negative pressure port 2010, the vacuum pump 8 is electrically connected with a PLC (programmable logic controller) 5 and is controlled by the PLC 5, the vacuum pump 8 is used for vacuumizing the coating chamber 2, a corresponding digital display meter is arranged on the vacuum pump 8, and then the air pressure in the coating chamber 2 can be watched, so that whether vacuumizing is finished or not is convenient to judge finally;
Referring to fig. 1, 8, 15 and 16, the coating machine 10 is detachably disposed in the coating chamber 2 to realize coating of a substrate, specifically, a convex groove 205 is formed at the top of the coating chamber 2, the cross section of the convex groove 205 is of a convex shape, a convex sliding block 208 is slidably disposed in the convex groove 205, a handle groove 209 for conveniently drawing out the convex sliding block 208 is formed at the top of the convex sliding block 208, the cross section of the convex groove 205 is of a convex shape, so that the tightness between the convex sliding block 208 and the coating chamber 2 after being closed is improved, and in the state shown in fig. 9, due to the special structure of the convex shape, the gas is effectively blocked, so that the gas is not easy to enter the coating chamber 2, and the sealing performance of the vacuum coating is improved, thereby creating a good environment for vacuum coating;
referring to fig. 15 and 16, a receiving slot 203 for receiving the plating machine 10 is formed at the bottom of the convex sliding block 208, the plating machine 10 is fixed on the top inner wall of the receiving slot 203 by a screw, the orientation is as shown in fig. 15, and after the above arrangement, the assembly of the plating machine 10 can be realized;
referring to fig. 1, a rotary conveying mechanism 1 conveys a substrate into a coating chamber 2 through a feed port 201 based on a rotary feeding, wherein the rotary conveying mechanism 1 is disposed at one side of the coating chamber 2, and a base 101, a rotary assembly, a substrate supporting assembly and a rotary driving assembly of the rotary conveying mechanism 1 are described as follows:
Referring to fig. 4, 5 and 6, the rotating assembly is in adapting fit with the base 101, specifically, the rotating assembly includes a hollow rotating shaft 102 and a connecting seat 103, the hollow rotating shaft 102 is rotatably disposed at the center of the top of the base 101, the connecting seat 103 is fixed on the top of the hollow rotating shaft 102, and the connecting seat 103 can rotate along with the hollow rotating shaft 102;
with continued reference to fig. 4, 5 and 6, the substrate supporting members are disposed on the rotating member and are provided with three groups, the included angle between each group of substrate supporting members is 90 °, specifically, each group of substrate supporting members includes a connecting rod 104, a supporting frame 106, a connecting bar 107, an L-shaped supporting bar 108, an electric cylinder 109 and a protecting cylinder 1010, one end of the connecting rod 104 is fixed to the circumferential outer wall of the connecting seat 103, an annular groove 105 is formed on the circumferential outer wall of the connecting rod 104, the supporting frame 106 is fixed to the other end of the connecting rod 104, the protecting cylinder 1010 is fixed to the end of the supporting frame 106, the electric cylinder 109 is fixed to the end of the supporting frame 106 and is located in the protecting cylinder 1010, the output end of the electric cylinder 109 extends to the outer side of the protecting cylinder 1010, the electric cylinder 109 is electrically connected with the PLC controller 5, the connecting bar 107 is fixed to the output end of the electric cylinder 109, the L-shaped supporting bar 108 is provided with a plurality of L-shaped supporting bars 108, and the plurality of L-shaped supporting bars 108 are uniformly fixed to the bottom of the connecting bars 107 and are in sliding fit with the bottom of the supporting frame 106;
In this embodiment: the substrate is placed in the supporting frame 106 and supported by the L-shaped supporting strips 108, and then the substrate can be rotationally conveyed into the coating chamber 2, when the electric cylinder 109 is in an initial state, the L-shaped supporting strips 108 support the substrate, when the electric cylinder 109 stretches, the stretching end drives the L-shaped supporting strips 108 to slide through the connecting strips 107, so that the L-shaped supporting strips 108 do not support the substrate any more, the substrate can drop downwards from the supporting frame 106, and the substrate needs to be subjected to vacuum coating in the coating chamber 2, so that the electric cylinder 109 is protected by arranging the protecting cylinder 1010;
referring to fig. 4, 5 and 6, the rotary driving assembly is disposed on the base 101 and connected to the rotary assembly to drive the rotary assembly to rotate, the rotary driving assembly includes a servo motor 1011, a driving gear 1012 and a driven gear 1013, the servo motor 1011 is fixed on the top of the base 101, the driving gear 1012 is fixed on the output end of the servo motor 1011, the driving gear 1012 is electrically connected to the PLC controller 5, the driven gear 1013 is fixed on the circumferential outer wall of the hollow rotating shaft 102, and the driving gear 1012 is meshed with the driven gear 1013;
in this embodiment: the servo motor 1011 is started through the PLC 5, the output end of the servo motor rotates to drive the driving gear 1012 to rotate, the driving gear 1012 rotates to drive the driven gear 1013 to rotate, then the hollow rotating shaft 102 is realized to rotate, the hollow rotating shaft 102 rotates to drive the connecting seat 103 to rotate, then three connecting rods 104 are driven to rotate, finally the bearing frame 106 is driven to rotate, and then the substrate can be rotationally conveyed into the coating chamber 2;
Referring to fig. 1 and 8, a sealing mechanism 3 is disposed on the coating chamber 2, and is used for sealing the feed port 201 and the support portion of the rotary conveying mechanism 1, wherein the sealing mechanism 3 is composed of a lateral sealing plate 307, an upper sealing plate 3010, a lower sealing plate 3014 and a sealing driving assembly, and is specifically described as follows:
referring to fig. 8, 9 and 10, the lateral sealing plates 307 are provided with two symmetrical side sealing plates 307, and the lateral sealing plates 307 are slidably matched with the coating chamber 2, which are used for sealing the lateral direction of the feed inlet 201, specifically: a group of first dovetail sliding grooves 202 are formed in two lateral directions of the coating chamber 2, two first dovetail sliding grooves 202 are formed in each group, the first dovetail sliding grooves 202 are formed in a back direction from the coating chamber 2, two first dovetail sliding blocks 308 matched with the first dovetail sliding grooves 202 are fixed at the inner side end of each lateral sealing plate 307, and the first dovetail sliding blocks 308 are in sliding fit with the first dovetail sliding grooves 202;
in this embodiment: the side sealing plate 307 can be assembled from the back of the coating chamber 2, so that the first dovetail sliding block 308 is in sliding fit with the first dovetail sliding groove 202, based on the sliding fit of the first dovetail sliding block 308 and the first dovetail sliding groove 202, the side sealing plate 307 and the coating chamber 2 can not be separated, meanwhile, when the side sealing plate 307 seals the side direction of the feeding hole 201, the gas enters a path effectively blocked due to the sliding limit of the first dovetail sliding block 308 and the first dovetail sliding groove 202, and the sealing performance of the gas is improved, and meanwhile, the sliding limit fit of the first dovetail sliding block 308 and the first dovetail sliding groove 202 enables a screw-nut transmission part to be multi-purpose without arranging an additional limit structure;
With continued reference to fig. 8, 9 and 10, the upper sealing plate 3010 is slidably matched with the coating chamber 2, specifically, two second dovetail sliding grooves 206 are formed on the upper side of the coating chamber 2 from top to bottom, two second dovetail sliding blocks 3011 matched with the second dovetail sliding grooves 206 are fixed at the inner side end of the upper sealing plate 3010, and the second dovetail sliding blocks 3011 are slidably matched with the second dovetail sliding grooves 206;
in this embodiment: the upper sealing plate 3010 can stably move up and down through the sliding fit between the second dovetail slide 3011 and the second dovetail chute 206;
referring to fig. 8, 9 and 10, the lower sealing plate 3014 is slidably matched with the film plating chamber 2, and is matched with the upper sealing plate 3010 to seal the forward direction of the feed inlet 201, two third dovetail sliding grooves 207 are formed in the forward opening of the feed inlet 201 from top to bottom, two third dovetail sliding blocks 3028 matched with the third dovetail sliding grooves 207 are fixed at the inner side end of the lower sealing plate 3014, and the third dovetail sliding blocks 3028 are slidably matched with the third dovetail sliding grooves 207;
in this embodiment: by the sliding fit between the third dovetail slide 3028 and the third dovetail chute 207, the third dovetail slide 3028 can smoothly move up and down;
referring to fig. 8, 9 and 10, the seal driving assembly is disposed on the sealing mechanism 3, and is further connected to the two sets of side sealing plates 307, the upper sealing plate 3010 and the lower sealing plate 3014, and is configured to synchronously implement the actions of the two sets of side sealing plates 307, the upper sealing plate 3010 and the lower sealing plate 3014, and then seal the forward direction and the side direction of the feed inlet 201, where the seal driving assembly is specifically composed of a screw-nut transmission component, a first U-shaped frame 305, an upper driving component and a lower driving component, as described below:
Referring to fig. 9 and 10, a screw-nut transmission component is disposed on the film plating chamber 2, specifically, the screw-nut transmission component includes a motor base 301, a forward and reverse rotation motor 302, a screw rod 303 and a nut 304, the motor base 301 is fixed on the top of the film plating chamber 2, two screw rod bases 3026 are disposed on the screw rod base 3026, the screw rod 303 is rotatably disposed between the two screw rod bases 3026, two ends of the screw rod 303 respectively rotate to penetrate through the two screw rod bases 3026 and extend outwards, the nut 304 is in threaded fit with the screw rod 303, the forward and reverse rotation motor 302 is fixed on the top of the motor base 301, an output end of the forward and reverse rotation motor 302 is fixed on an end of the screw rod 303, and the forward and reverse rotation motor 302 is electrically connected with the PLC controller 5;
with continued reference to fig. 9 and 10, a first U-shaped frame 305 is disposed on the screw-nut transmission member and connected to two lateral sealing plates 307, the first U-shaped frame 305 is fixed between the two lateral sealing plates 307, and the first U-shaped frame 305 is connected to the nut 304 by a bolt 306;
in this embodiment: when the forward and reverse rotation motor 302 is started in the forward direction, namely the screw-nut transmission assembly acts in the forward direction, the output end of the forward and reverse rotation motor drives the screw rod 303 to rotate clockwise, and based on the sliding fit between the first dovetail sliding block 308 and the first dovetail sliding groove 202 and the threaded fit between the nut 304 and the screw rod 303, the nut 304 drives the two lateral sealing plates 307 to move forward towards the coating chamber 2 through the first U-shaped frame 305;
When the forward and reverse rotation motor 302 is reversely started, namely, when the screw-nut transmission assembly acts reversely, the output end of the forward and reverse rotation motor drives the screw rod 303 to rotate anticlockwise, so that the nut 304 drives the two lateral sealing plates 307 to move back towards the coating chamber 2 through the first U-shaped frame 305;
referring to fig. 9 and 10 again, the upper driving part connects the screw nut driving part and the upper sealing plate 3010, and specifically, the upper driving part includes a first driving gear 3012 and a first driving rack 3013, the first driving gear 3012 is fixed at the other end of the screw 303, the first driving rack 3013 is fixed at the top of the upper sealing plate 3010, and the first driving gear 3012 is meshed with the first driving rack 3013;
in this embodiment: based on the meshing transmission between the first transmission gear 3012 and the first transmission rack 3013, the screw rod 303 rotates clockwise to drive the first transmission rack 3013 to move downwards, so that the upper sealing plate 3010 moves downwards;
the screw rod 303 rotates anticlockwise to drive the first transmission rack 3013 to move upwards, so that the upper sealing plate 3010 moves upwards;
referring to fig. 9 and 10 finally, the lower driving part is connected to the lower sealing plate 3014 and the two side sealing plates 307, specifically, the lower driving part includes a rectangular bar 3015, a second driving rack 3016, an axle seat 3017, a driving shaft 3018, a second driving gear 3019, a third driving gear 3020, a third driving rack 3021 and a mounting plate 3022, two rectangular bars 3015, two rectangular bars 3016, two axle seats 3017 and two second driving gears 3019 are respectively fixed at the bottoms of the two side sealing plates 307, two second driving racks 3016 are respectively fixed at the bottoms of the two rectangular bars 3015, the second driving rack 3016 faces downwards, two axle seats 3017 are respectively fixed at the forward lower side of the film plating chamber 2, the driving shaft 3018 is rotatably arranged between the two axle seats 3017, two ends of the driving shaft 3018 respectively rotate to penetrate through the two axle seats 3017 and extend outwards, the two second driving gears 3019 are respectively fixed at two ends of the driving shaft 3018, the second driving rack 3016 is meshed with the second driving gear 3019, the third driving gear 3020 is fixed at the circumference of the mounting plate 3022, the driving rack 3020 is meshed with the third mounting plate 3022 faces towards the forward lower side, and the third mounting plate 3022 is meshed with the third driving rack 3022;
In this embodiment: when the two lateral sealing plates 307 move towards the forward direction of the coating chamber 2, the rectangular strips 3015 drive the second transmission racks 3016 to move towards the forward direction of the coating chamber 2, the second transmission racks 3016 are downwards in tooth direction, the second transmission gears 3019 are rotated anticlockwise based on meshing transmission between the second transmission racks 3016 and the second transmission gears 3019, the second transmission gears 3019 enable the transmission shafts 3018 to be rotated anticlockwise, the third transmission gears 3020 are driven to be rotated anticlockwise, the third transmission racks 3021 are driven upwards based on meshing transmission between the third transmission gears 3020 and the mounting plate 3022 in tooth direction of the third transmission racks 3021, and finally the lower sealing plates 3014 are moved upwards;
when the two side sealing plates 307 move back towards the coating chamber 2, the rectangular strips 3015 drive the second transmission racks 3016 to move back towards the coating chamber 2, the second transmission racks 3016 are downwards driven by the meshing transmission between the second transmission racks 3016 and the second transmission gears 3019, then the second transmission gears 3019 rotate clockwise, the second transmission gears 3019 rotate the transmission shafts 3018 clockwise, then the third transmission gears 3020 rotate clockwise, and the third transmission racks 3021 are downwards driven by the meshing transmission between the third transmission gears 3020 and the mounting plate 3022, and finally the lower sealing plates 3014 are downwards driven by the meshing transmission between the third transmission racks 3020 and the mounting plate 3022;
Wherein:
when the screw nut transmission part acts positively, the screw nut transmission part drives the two lateral sealing plates 307 to move positively towards the coating chamber 2, and simultaneously the screw nut transmission part is matched with the upper driving part to drive the upper sealing plate 3010 to move downwards, the two lateral sealing plates 307 are matched with the lower driving part to realize the upward movement of the lower sealing plate 3014, and finally the feed inlet 201 is sealed positively and laterally;
when the screw nut transmission part acts reversely, the screw nut transmission part drives the two lateral sealing plates 307 to move back towards the coating chamber 2, and simultaneously the screw nut transmission part is matched with the upper driving part to drive the upper sealing plate 3010 to move upwards, and the two lateral sealing plates 307 are matched with the lower driving part to realize the downward movement of the lower sealing plate 3014;
to sum up, when the two lateral sealing plates 307 move forward towards the coating chamber 2, the upper sealing plate 3010 moves downward, the lower sealing plate 3014 moves upward, and the three move synchronously, so that the feed inlet 201 is completely sealed laterally and forward, and when the lateral sealing plates 307 move to be flat with the coating chamber 2, the upper sealing plate 3010 and the lower sealing plate 3014 are just closed;
When the two lateral sealing plates 307 move back towards the coating chamber 2, the upper sealing plate 3010 moves upwards, the lower sealing plate 3014 moves downwards, and the three are performed synchronously, so that the lateral and forward complete sealing of the feed inlet 201 is finally not performed any more;
in the state shown in fig. 1, the forward direction refers to the front surface of the film plating chamber 2, and the reverse direction refers to the back surface of the film plating chamber 2;
referring to fig. 1 and 10, semicircular grooves 3025 matched with the annular grooves 105 are formed in the centers of the ends, close to the lower sealing plate 3014, of the upper sealing plate 3010, and when the upper sealing plate 3010 is closed with the semicircular grooves 3025, the closed states of the two semicircular grooves 3025 are matched with the annular grooves 105;
in this embodiment: when the base material enters the feeding hole 201, the central axes of the connecting rod 104 and the semicircular groove 3025 coincide, namely, the semicircular groove 3025 is positioned on the right upper side of the connecting rod 104, then the semicircular grooves 3025 on the upper sealing plate 3010 and the lower sealing plate 3014 are closed and then are attached to the inner wall of the annular groove 105, and then sealing can be achieved;
the bearing part in the invention refers to the annular groove 105 and a plurality of parts of the annular groove 105 facing one side of the coating chamber 2, namely the bearing part comprises the annular groove 105, a part of connecting rod 104, a bearing frame 106, a connecting strip 107, an L-shaped bearing strip 108, an electric cylinder 109 and a protection barrel 1010;
Referring to fig. 1, a belt conveying mechanism 4 is disposed at one side of a film plating chamber 2, a substrate is coated and then conveyed to the upper side of the belt conveying mechanism 4 by a rotary conveying mechanism 1, and then the coated substrate is conveyed to the belt conveying mechanism 4 by the rotary conveying mechanism 1, and the belt conveying mechanism 4 adopts a conventional belt transmission structure in the prior art, so that the description is omitted;
referring to fig. 1 finally, the PLC controller 5 is electrically connected to the rotary conveying mechanism 1, the sealing mechanism 3, the belt conveying mechanism 4, the vacuum pump 8 and the film plating machine 10 to realize control, and the PLC controller 5 has other functions of programming, algorithm identification, intelligent control, etc., and the PLC controller 5 can be simply, directly and unambiguously programmed based on the basic idea of the present invention by a person skilled in the art, and its internal circuit control is a conventional technical means for the person skilled in the art, so that the detailed description thereof will not be given;
according to the invention, a substrate is conveyed into the coating chamber 2 through the feed port 201 based on a rotary feeding mode, then the lateral sealing plate 307, the upper sealing plate 3010 and the lower sealing plate 3014 are synchronously realized through the screw-nut transmission part, the upper driving part and the lower driving part, then the substrate and the bearing part are completely sealed in the feed port 201, vacuumizing and coating treatment are carried out, and after coating, the substrate after coating is conveyed in a rotary mode again until the blanking is finished, and finally a procedure is finished;
What needs to be explained is: in this embodiment, the corresponding switch on the PLC controller 5 may be manually controlled to turn on or off the corresponding component.
Example 2:
in embodiment 1, the corresponding switches on the PLC controller 5 need to be manually controlled for multiple times to start or close the corresponding components, and the degree of automation is low, so that the embodiment is optimized on the basis of embodiment 1, and the embodiment is additionally provided with a signal sensing mechanism 6 and a blocking mechanism 7 to realize automatic control, which is specifically described as follows:
referring to fig. 1-21, a signal sensing mechanism 6 is in signal connection with a PLC controller 5, and based on signal sensing, the signal sensing mechanism 6 automatically implements actions of the rotary conveying mechanism 1, the sealing mechanism 3 and the belt conveying mechanism 4, and is composed of a lower U-shaped frame 601, a first infrared emission sensor 602, a vertical plate 603, a first infrared receiving sensor 604, an upper U-shaped frame 605, a second infrared emission sensor 606, an L-shaped vertical rod 607, a second infrared receiving sensor 608, a contact switch 609, a vibration sensor 6010 and a pressure strain gauge 6011, specifically as follows:
referring to fig. 4, 5 and 6, three lower U-shaped frames 601, a first infrared emission sensor 602, an upper U-shaped frame 605 and a second infrared emission sensor 606 are respectively provided, the three lower U-shaped frames 601 are all fixed at the bottom of the connecting seat 103, the central axis of each lower U-shaped frame 601 is parallel to the central axis of each connecting rod 104, the first infrared emission sensor 602 is fixed on the inner wall of the lower U-shaped frame 601, the infrared light emitted by the first infrared emission sensor 602 faces outwards in parallel, a vertical plate 603 is fixed on the top of the base 101 and is opposite to the connecting rod 104 positioned in the middle position, a first infrared receiving sensor 604 is fixed on the outer side of the vertical plate 603, the height of the first infrared receiving sensor 604 is parallel to the height of the lower U-shaped frame 601, and the first infrared receiving sensor 604 is in signal connection with the PLC controller 5;
In this embodiment: in the rotating process of the connecting seat 103, the first infrared emission sensor 602 rotates along with the first infrared emission sensor 602, when the first infrared emission sensor 602 rotates to a position opposite to the first infrared receiving sensor 604, the infrared signal emitted by the first infrared receiving sensor 604 is received, then a first infrared sensing signal is acquired and transmitted to the PLC controller 5, at the moment, the PLC controller 5 automatically controls the servo motor 1011 to stop acting and controls the forward starting of the forward-reverse motor 302, namely, the PLC controller 5 automatically controls the rotation driving assembly to stop acting and controls the screw nut transmission part to act forward, after the rotation feeding is completed, the substrate and the bearing part are sealed in the feeding hole 201, the three first infrared emission sensors 602 can be prevented from being influenced by each other while the first infrared emission sensor 602 is protected through the lower U-shaped frame 601, and then the sensing precision is improved;
with continued reference to fig. 4, 5 and 6, three upper U-shaped frames 605 are all fixed on the top of the connecting seat 103, three vertical plates 603 are respectively located on the upper sides of three lower U-shaped frames 601, three second infrared emission sensors 606 are all fixed on the top of the connecting seat 103, three second infrared emission sensors 606 are respectively located in the three upper U-shaped frames 605, infrared light emitted by the second infrared emission sensors 606 faces to the upper side, a first hole site 1014 is formed in the center of the top of the connecting seat 103, the first hole site 1014 is communicated with the hollow part of the hollow rotating shaft 102, an L-shaped vertical rod 607 is fixed on the center of the top of the base 101, extends outwards along the hollow part of the hollow rotating shaft 102 and the first hole site 1014, an included angle between an axis and the vertical plates 603 is 45 degrees, the second infrared receiving sensor 608 is fixed on the inner wall of the top of the L-shaped vertical rod 607, and is located on the upper side of the second infrared emission sensor 606, and the second infrared receiving sensor 608 is in signal connection with the PLC controller 5;
In this embodiment: in the rotating process of the connecting seat 103, the second infrared emission sensor 606 rotates along with the second infrared emission sensor 606, when the second infrared emission sensor 606 rotates to a position opposite to the second infrared emission sensor 608, the second infrared emission sensor 606 is positioned at the right lower side of the second infrared emission sensor 608, an infrared signal emitted by the second infrared emission sensor 608 is received by the second infrared emission sensor 608, the second infrared emission sensor 608 acquires a second infrared induction signal and transmits the second infrared induction signal to the PLC controller 5, the PLC controller 5 automatically controls the servo motor 1011 to stop acting and controls the electric cylinder 109 to extend, namely the PLC controller 5 automatically controls the rotary driving assembly to stop acting and controls the electric cylinder 109 to extend, so that a plurality of L-shaped supporting strips 108 no longer support a substrate after film coating, the substrate after film coating drops downwards, blanking is completed, the second infrared emission sensor 606 is protected by the upper U-shaped frame 605, meanwhile, the mutual influence of the three second infrared emission sensors 606 can be avoided, the induction precision is improved, and the mutual influence of the emitting directions of the first infrared emission sensor 602 and the second infrared emission sensor 606 can be avoided;
Referring to fig. 3 and 10, a contact switch 609 is fixed at one side end of the plating chamber 2, the contact switch 609 is electrically connected with the PLC controller 5, and a rectangular notch 3027 matched with the contact switch 609 is formed at the forward lower side of one side sealing plate 307;
in this embodiment: when the rectangular notch 3027 is completely contacted with the contact switch 609, at this time, the edge of the lateral sealing plate 307 is attached to the forward edge of the coating chamber 2, and the contact switch 609 acquires a contact signal and transmits the contact signal to the PLC controller 5, so as to control the forward and reverse rotation motor 302 to stop acting, namely, control the screw-nut transmission assembly to stop acting, and finally complete sealing;
referring to fig. 17, a plurality of vibration sensors 6010 are provided, the plurality of vibration sensors 6010 are uniformly embedded in the belt conveying mechanism 4, and the vibration sensors 6010 are in signal connection with the PLC controller 5;
in this embodiment: when the coated substrate falls onto the belt conveying mechanism 4, larger vibration is generated on the belt conveying mechanism 4, the vibration sensor 6010 acquires a vibration signal and transmits the vibration signal to the PLC controller 5, and at the moment, the PLC controller 5 automatically controls the servo motor 1011 to act and simultaneously controls the electric cylinder 109 to shorten, namely, the PLC controller 5 automatically controls the rotary driving assembly to act and controls the electric cylinder 109 to shorten;
Referring to fig. 3, a pressure strain gauge 6011 is fixed to an end of one of the side seal plates 307 near the blocking mechanism 7;
in this embodiment: when the lateral sealing plate 307 moves back towards the film plating chamber 2, the pressure strain gauge 6011 is eventually contacted with the blocking mechanism 7, and then the pressure strain gauge 6011 deforms to obtain a pressure deformation signal and transmit the pressure deformation signal to the PLC controller 5, the PLC controller 5 automatically controls the forward and reverse motor 302 to stop acting and controls the servo motor 1011 to act, namely the PLC controller 5 automatically controls the screw nut transmission part to stop acting reversely and controls the rotary driving assembly to act;
referring to fig. 1, 8 and 14, the blocking mechanism 7 is detachably slidably matched with the film plating chamber 2, and is matched with the signal sensing mechanism 6 to realize signal sensing, and the blocking mechanism 7 is composed of a second U-shaped frame 701, a T-shaped slider 702 and a handle 703, which is specifically described as follows:
with continued reference to fig. 1, 8 and 14, T-shaped grooves 204 are formed in two sides of the top of the film plating chamber 2 from top to bottom, the T-shaped grooves 204 are staggered with the first dovetail chute 202, the T-shaped grooves 204 and the first dovetail chute 202 are formed to have the same depth, two T-shaped sliders 702 are arranged, the two T-shaped sliders 702 are symmetrically fixed at two inner walls of two sides of the second U-shaped frame 701, the T-shaped sliders 702 are in sliding fit with the T-shaped grooves 204, and a handle 703 is fixed at the top of the second U-shaped frame 701;
In this embodiment: the pressure strain gauge 6011 and the second U-shaped frame 701 can finally achieve contact, then generate pressure deformation signals, and then achieve automatic control, meanwhile, the second U-shaped frame 701 can limit the lateral sealing plate 307 to enable the lateral sealing plate 307 not to slide out of the coating chamber 2, assembly is achieved through sliding of the lateral sealing plate 307 and the first dovetail chute 202, the lateral sealing plate 307 is not blocked during assembly, and therefore the assembly of the second U-shaped frame 701 can be achieved through sliding fit of the T-shaped sliding block 702 and the T-shaped groove 204, and the lifting handle 703 can be pulled.
According to the embodiment of the invention, automatic induction is realized through the signal induction mechanism 6, corresponding automatic control is realized based on automatic induction, the degree of automation is high, the rotary feeding process is ended based on induction between the first infrared emission sensor 602 and the first infrared receiving sensor 604, the sealing process is started simultaneously, the sealing process is ended after contact between the contact switch 609 and 3072, the pressure deformation is generated based on contact between the pressure strain gauge 6011 and the second U-shaped frame 701, the sealing and synchronous starting of the rotary discharging process are not realized any more, the rotary stopping and the discharging process are realized based on induction between the second infrared emission sensor 606 and the second infrared receiving sensor 608, the electric cylinder 109 is reset and the rotary feeding process is started again based on vibration of the base material after the vibration sensor 6010 and the film coating, and the whole-course degree of automation is high.
Example 3:
because the upper sealing plate 3010 and the lower sealing plate 3014 all have gravity, so the supporting effect is poor by simply relying on the meshing force between the gear and the rack, the embodiment additionally sets up an elastic mechanism 9 to support the upper sealing plate 3010 and the lower sealing plate 3014, the elastic mechanism 9 is composed of an upper elastic component and a lower elastic component, the upper elastic component and the lower elastic component are both provided with two groups, the upper elastic component is arranged between the second dovetail sliding groove 206 and the second dovetail sliding block 3011, and the lower elastic component is arranged between the third dovetail sliding groove 207 and the third dovetail sliding block 3028, which is specifically described as follows:
referring to fig. 19 and 20, each set of upper elastic components includes a first round bar 901 and a first spring 902, the first round bar 901 is fixed on the inner wall of the bottom of the second dovetail chute 206, the second dovetail slide 3011 movably penetrates through the first round bar 901, the first spring 902 is fixed between the bottom of the second dovetail slide 3011 and the inner wall of the bottom of the second dovetail chute 206, and the first spring 902 is sleeved outside the first round bar 901;
in this embodiment: the second dovetail slide block 3011 is well supported by the elastic acting force of the first spring 902, and then the upper sealing plate 3010 is hung and supported;
Referring to fig. 19 and 21, each lower elastic assembly includes a second round rod 903 and a second spring 904, the second round rod 903 is fixed on the bottom inner wall of the third dovetail chute 207, the third dovetail slider 3028 movably penetrates the second round rod 903, the second spring 904 is fixed between the bottom of the third dovetail slider 3028 and the bottom inner wall of the third dovetail chute 207, and the second spring 904 is sleeved outside the second round rod 903;
in this embodiment: the third dovetail block 3028 is well supported by the elastic force of the second spring 904, which in turn supports the lower sealing plate 3014.
Example 4:
in the embodiment 1 to the embodiment 3, when the supporting portion and the base material are sealed, after the upper sealing plate 3010 and the lower sealing plate 3014 are closed, gaps are easily generated in the middle, and then the sealing effect is poor, and finally the vacuumizing is affected, so that the embodiment optimizes the sealing effect;
referring to fig. 10, a slot 3024 is formed at the top of the lower sealing plate 3014, two symmetrically distributed insert blocks 3023 are fixed at the bottom of the upper sealing plate 3010, and the insert blocks 3023 are matched with the slot 3024;
after the upper sealing plate 3010 and the lower sealing plate 3014 are closed, the insert 3023 is inserted into the slot 3024 accordingly, so that the air is effectively blocked from entering, the sealing performance is effectively improved, and a good environment is created for vacuum coating.
Example 5:
in embodiments 1-4, the gas is not easy to enter the coating chamber 2 from the upper side of the convex sliding block 208, but is easy to enter from the side direction of the convex sliding block 208, so in this embodiment, the L-shaped sealing plate 309 is fixed in the forward direction of the first U-shaped frame 305, and when the side sealing plate 307 moves towards the forward direction of the coating chamber 2, the side sealing plate 307 moves together with the L-shaped sealing plate 309, so as to cover the side direction of the convex sliding block 208, and thus a good seal is achieved.
Example 6:
the application method of the vacuum coating equipment comprises the following steps:
s1, rotary feeding: placing the substrate in the three supporting frames 106 in sequence, supporting the substrate by the L-shaped supporting strips 108, starting a rotary driving assembly through the PLC 5, driving the rotary assembly to rotate by the rotary driving assembly to realize the rotation of the substrate supporting assembly, then conveying the substrate into the feed inlet 201 in a rotary manner, when one of the first infrared emission sensors 602 rotates to a position opposite to the first infrared emission sensor 604, the first infrared emission sensor 604 receives an induction signal and transmits the induction signal into the PLC 5, the PLC 5 controls the rotary driving assembly to stop acting, and at the moment, the annular groove 105 is positioned at the center of the two semicircular grooves 3025, and meanwhile, the PLC 5 automatically controls the screw-nut transmission part to act positively;
In the above steps: the substrate is placed in the supporting frame 106 and supported by the L-shaped supporting bars 108, then the servo motor 1011 is started through the PLC controller 5, the output end of the servo motor is rotated to drive the driving gear 1012 to rotate, the driving gear 1012 is rotated to drive the driven gear 1013 to rotate, the hollow rotating shaft 102 is rotated to drive the connecting seat 103 to rotate, the three connecting rods 104 are driven to rotate, finally the supporting frame 106 is driven to rotate, the substrate can be rotationally conveyed into the coating chamber 2, when one of the first infrared emission sensors 602 is rotated to a position opposite to the first infrared emission sensor 604, the first infrared emission sensor 604 receives an induction signal and transmits the induction signal into the PLC controller 5, and the PLC controller 5 automatically controls the servo motor 1011 to stop and simultaneously controls the forward and reverse rotation motor 302 to start positively;
s2, sealing: when the screw-nut transmission part moves forward, the screw-nut transmission part drives the two lateral sealing plates 307 to move forward towards the film plating chamber 2, meanwhile, the screw-nut transmission part is matched with the upper driving part and then drives the upper sealing plate 3010 to move downward, the two lateral sealing plates 307 are matched with the lower driving part to realize upward movement of the lower sealing plate 3014, when the rectangular notch 3027 is contacted with the contact switch 609, the contact switch 609 receives an induction signal and transmits the induction signal to the PLC 5, the PLC 5 automatically controls the screw-nut transmission part to stop moving, at the moment, the two lateral sealing plates 307 seal two sides of the feed inlet 201, the upper sealing plate 3010 and the lower sealing plate 3014 are just closed, meanwhile, the inner walls of the two semicircular grooves 3025 are attached to the outer wall of the annular groove 105, the insertion block 2023 is completely inserted into the insertion groove 3024, and finally the feed inlet 201 is sealed forward and laterally;
In this step: when the forward and reverse rotation motor 302 is started forward, the output end drives the screw rod 303 to rotate clockwise, based on the sliding fit between the first dovetail sliding block 308 and the first dovetail sliding groove 202 and the threaded fit between the nut 304 and the screw rod 303, the nut 304 drives the two lateral sealing plates 307 to move forward towards the coating chamber 2 through the first U-shaped frame 305, when the two lateral sealing plates 307 move forward towards the coating chamber 2, the two lateral sealing plates drive the second transmission rack 3016 to move forward towards the coating chamber 2 through the rectangular bar 3015, because the second transmission rack 3016 faces downwards, the second transmission gear 3019 rotates anticlockwise based on the meshing transmission between the second transmission rack 3016 and the second transmission gear 3019, the second transmission gear 3019 rotates the transmission shaft 3018 anticlockwise, then the third transmission gear 3020 is driven to rotate anticlockwise, as the teeth of the third transmission rack 3021 face outwards, based on meshing transmission between the third transmission gear 3020 and the mounting plate 3022, the third transmission rack 3021 is enabled to move upwards, finally the lower sealing plate 3014 is enabled to move upwards, when a rectangular notch 3027 formed in the lateral sealing plate 307 contacts with the contact switch 609, the contact switch 609 receives an induction signal and transmits the induction signal to the PLC controller 5, the PLC controller 5 automatically controls the forward and reverse motor 302 to stop, at the moment, the two lateral sealing plates 307 seal two sides of the feed inlet 201, the upper sealing plate 3010 and the lower sealing plate 3014 are just closed, meanwhile, the inner walls of the two semicircular grooves 3025 are attached to the outer wall of the annular groove 105, the plug 2023 is completely inserted into the slot 3024, and finally the feed inlet 201 is sealed positively and laterally;
S3, vacuumizing and coating: the PLC 5 is used for starting the vacuum pump 8 to realize vacuumizing, and then the PLC 5 is used for starting the coating machine 10 to realize coating;
s4, after film coating is finished, the screw-nut transmission part is controlled to act reversely through the PLC 5, when the screw-nut transmission part acts reversely, the screw-nut transmission part drives the two lateral sealing plates 307 to move reversely towards the film coating chamber 2, meanwhile, the screw-nut transmission part is matched with the upper driving part to drive the upper sealing plate 3010 to move upwards, the two lateral sealing plates 307 are matched with the lower driving part to realize the downward movement of the lower sealing plate 3014, when the pressure strain gauge 6011 on one of the lateral sealing plates 307 contacts with the second U-shaped frame 701 to sense a pressure signal, the pressure strain gauge 6011 transmits the pressure signal to the PLC 5, the PLC 5 automatically controls the screw-nut transmission part to stop acting, and meanwhile, the PLC 5 automatically controls the rotary driving assembly to start;
in this step: the forward and reverse rotation motor 302 is reversely started by the PLC 5, the output end of the forward and reverse rotation motor 302 drives the screw rod 303 to rotate anticlockwise, then the nut 304 drives the two lateral sealing plates 307 to move backwards towards the coating chamber 2 through the first U-shaped frame 305, when the two lateral sealing plates 307 move backwards towards the coating chamber 2, the two lateral sealing plates drive the second transmission rack 3016 to move backwards towards the coating chamber 2 through the rectangular strip 3015, because the second transmission rack 3016 faces downwards in a tooth direction, based on the meshing transmission between the second transmission rack 3016 and the second transmission gear 3019, the second transmission gear 3019 rotates clockwise, the second transmission gear 3018 rotates clockwise, then the third transmission gear 3020 is driven to rotate clockwise, as the teeth of the third transmission rack 3021 face outwards, based on the meshing transmission between the third transmission gear 3020 and the mounting plate 3022, the third transmission rack 3021 is then moved downwards, finally the lower sealing plate 3014 is moved downwards, then the feed inlet 201 is no longer sealed, when the lateral sealing plate 307 moves towards the back of the coating chamber 2, the pressure strain gauge 6011 is finally contacted with the blocking mechanism 7, then the pressure strain gauge 6011 deforms to obtain a pressure deformation signal and transmits the pressure deformation signal to the PLC controller 5, and the PLC controller 5 automatically controls the forward/reverse rotation motor 302 to stop and automatically starts the servo motor 1011;
S5, rotary blanking: the coated substrate continues to rotate, when the second infrared emission sensor 606 corresponding to the coated substrate is opposite to the second infrared emission sensor 608, the second infrared emission sensor 608 receives the sensing signal and transmits the sensing signal to the PLC controller 5, the PLC controller 5 automatically controls the rotation driving component to stop acting, meanwhile, the PLC controller 5 automatically controls the electric cylinder 109 to stretch, then the L-shaped supporting strip 108 is completely separated from the coated substrate, the coated substrate falls onto the belt conveying mechanism 4, the vibration sensor 6010 on the belt conveying mechanism 4 senses the vibration signal and transmits the vibration signal to the PLC controller 5, the PLC controller 5 automatically controls the electric cylinder 109 to shorten to realize resetting, meanwhile, the PLC controller 5 automatically controls the rotation driving component to start, when the other lower first infrared emission sensor 602 rotates to a position opposite to the first infrared emission sensor 604, then the same action as that of the step S1 is executed, and finally the step S2-step S5 is executed;
in this step: when the second infrared emission sensor 606 is opposite to the second infrared receiving sensor 608 in the rotating conveying process, the second infrared receiving sensor 608 receives the induction signal and transmits the induction signal to the PLC controller 5, the PLC controller 5 automatically controls the servo motor 1011 to stop and synchronously controls the cylinder 109 to extend, so that the L-shaped supporting strip 108 is completely separated from the coated substrate, the coated substrate falls onto the belt conveying mechanism 4, the vibration sensor 6010 on the belt conveying mechanism 4 senses the vibration signal and transmits the vibration signal to the PLC controller 5, the PLC controller 5 automatically controls the cylinder 109 to shorten to realize resetting, and meanwhile the PLC controller 5 automatically controls the servo motor 1011 to start, then continuously realizes the rotating feeding of the substrate, and finally steps S2-S5 are sequentially executed;
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A vacuum coating apparatus comprising:
a coating chamber (2);
the vacuum pump (8) is arranged on the coating chamber (2) and is used for realizing vacuumizing;
the feed inlet (201) is arranged on the coating chamber (2), and the side surface of the feed inlet is U-shaped and is used for realizing the entry of a base material; and
the coating machine (10) is detachably arranged in the coating chamber (2) and is used for coating the substrate;
characterized by further comprising:
a rotary conveying mechanism (1) for conveying the substrate into the coating chamber (2) through the feed port (201) based on rotary feeding;
the sealing mechanism (3) is arranged on the coating chamber (2) and is used for sealing the feed inlet (201) and the bearing part of the rotary conveying mechanism (1);
The substrate is coated and then conveyed to the upper side of the belt conveying mechanism (4) through the rotary conveying mechanism (1), and then the rotary conveying mechanism (1) conveys the coated substrate to the belt conveying mechanism (4);
the PLC (5) is electrically connected with the rotary conveying mechanism (1), the sealing mechanism (3), the belt conveying mechanism (4), the vacuum pump (8) and the coating machine (10) to realize control;
the rotary transport mechanism (1) includes:
a base (101);
the rotating assembly is in transfer fit with the base (101);
the substrate supporting assembly is arranged on the rotating assembly and is provided with three groups, and the included angle between each group of substrate supporting assemblies is 90 degrees; and
the rotary driving assembly is arranged on the base (101) and connected with the rotary assembly to drive the rotary assembly to rotate;
the rotating assembly comprises a hollow rotating shaft (102) and a connecting seat (103), the hollow rotating shaft (102) is rotatably arranged at the center of the top of the base (101), and the connecting seat (103) is fixed at the top of the hollow rotating shaft (102);
each group of substrate bearing assemblies comprises a connecting rod (104), a bearing frame (106), a connecting bar (107), L-shaped bearing bars (108), an electric cylinder (109) and a protection cylinder (1010), one end of the connecting rod (104) is fixed with the circumferential outer wall of the connecting seat (103), an annular groove (105) is formed in the circumferential outer wall of the connecting rod (104), the bearing frame (106) is fixed at the other end of the connecting rod (104), the protection cylinder (1010) is fixed at the end of the bearing frame (106), the electric cylinder (109) is fixed at the end of the bearing frame (106) and is positioned in the protection cylinder (1010), the output end of the electric cylinder (109) extends to the outer side of the protection cylinder (1010), the electric cylinder (109) is electrically connected with the PLC (5), the connecting bar (107) is fixed at the output end of the electric cylinder (109), and the L-shaped bearing bars (108) are provided with a plurality of L-shaped bearing bars (108) which are uniformly fixed at the bottom of the connecting bar (107) and are in sliding fit with the bottom of the bearing frame (106);
The rotary driving assembly comprises a servo motor (1011), a driving gear (1012) and a driven gear (1013), wherein the servo motor (1011) is fixed at the top of the base (101), the driving gear (1012) is fixed at the output end of the servo motor (1011), the driving gear (1012) is electrically connected with the PLC (5), the driven gear (1013) is fixed on the circumferential outer wall of the hollow rotating shaft (102), and the driving gear (1012) is meshed with the driven gear (1013);
the sealing mechanism (3) comprises:
the lateral sealing plates (307) are arranged in two and symmetrically distributed, and the lateral sealing plates (307) are in sliding fit with the coating chamber (2) and are used for sealing the lateral direction of the feed inlet (201);
an upper sealing plate (3010) which is in sliding fit with the coating chamber (2);
the lower sealing plate (3014) is in sliding fit with the coating chamber (2), the lower sealing plate (3010) is matched with the upper sealing plate (3010) to seal the feeding hole (201) in the forward direction, semicircular grooves (3025) matched with the annular grooves (105) are formed in the centers of the end parts, close to the lower sealing plate (3014), of the upper sealing plate (3010), when the upper sealing plate (3010) is closed with the semicircular grooves (3025), two semicircular grooves (3025) are in closed state and are matched with the annular grooves (105), slots (3024) are formed in the top of the lower sealing plate (3014), two symmetrically distributed inserting blocks (3023) are fixed at the bottom of the upper sealing plate (3010), and the inserting blocks (3023) are matched with the slots (3024).
And the sealing driving assembly is arranged on the sealing mechanism (3), is also connected with the two groups of lateral sealing plates (307), the upper sealing plate (3010) and the lower sealing plate (3014) and is used for synchronously realizing the actions of the two groups of lateral sealing plates (307), the upper sealing plate (3010) and the lower sealing plate (3014), and then sealing the feed inlet (201) forwards and sideways.
2. The vacuum coating equipment according to claim 1, wherein a group of first dovetail sliding grooves (202) are formed in two lateral directions of the coating chamber (2), each group of first dovetail sliding grooves (202) is provided with two first dovetail sliding grooves, the first dovetail sliding grooves (202) are formed in a back direction from the coating chamber (2), two first dovetail sliding blocks (308) matched with the first dovetail sliding grooves (202) are fixed at inner side ends of each lateral sealing plate (307), and the first dovetail sliding blocks (308) are in sliding fit with the first dovetail sliding grooves (202);
two second dovetail sliding grooves (206) are formed in the positive upper side of the coating chamber (2) from top to bottom, two second dovetail sliding blocks (3011) matched with the second dovetail sliding grooves (206) are fixed at the inner side end of the upper sealing plate (3010), and the second dovetail sliding blocks (3011) are in sliding fit with the second dovetail sliding grooves (206);
Two third dovetail sliding grooves (207) are formed in the forward opening of the feeding hole (201) from top to bottom, two third dovetail sliding blocks (3028) matched with the third dovetail sliding grooves (207) are fixed at the inner side end of the lower sealing plate (3014), and the third dovetail sliding blocks (3028) are in sliding fit with the third dovetail sliding grooves (207).
3. A vacuum coating apparatus according to claim 2, wherein the seal drive assembly comprises:
the screw-nut transmission part is arranged on the coating chamber (2);
the first U-shaped frame (305) is arranged on the screw nut transmission part and is connected with two lateral sealing plates (307);
an upper driving part connecting the lead screw nut transmission part and the upper sealing plate (3010);
a lower driving part connecting a lower sealing plate (3014) and two of said lateral sealing plates (307), wherein:
when the screw nut transmission part acts positively, the screw nut transmission part drives the two lateral sealing plates (307) to move positively towards the coating chamber (2), meanwhile, the screw nut transmission part is matched with the upper driving part to drive the upper sealing plate (3010) to move downwards, the two lateral sealing plates (307) are matched with the lower driving part to realize the upward movement of the lower sealing plate (3014), and finally, the feed inlet (201) is sealed positively and laterally;
When the screw nut transmission parts act reversely, the screw nut transmission parts drive the two lateral sealing plates (307) to move back towards the coating chamber (2), and simultaneously the screw nut transmission parts are matched with the upper driving parts to drive the upper sealing plates (3010) to move upwards, and the two lateral sealing plates (307) are matched with the lower driving parts to realize the downward movement of the lower sealing plates (3014).
4. A vacuum coating apparatus according to claim 3, wherein the screw-nut transmission component comprises a motor base (301), a forward-reverse rotation motor (302), a screw (303) and a nut (304), the motor base (301) is fixed at the top of the coating chamber (2), two screw bases (3026) are arranged at the top of the coating chamber (2), the screw (303) is rotatably arranged between the two screw bases (3026), two ends of the screw (303) respectively rotate to penetrate through the two screw bases (3026) and extend outwards, the nut (304) is in threaded fit with the screw (303), the forward-reverse rotation motor (302) is fixed at the top of the motor base (301), the output end of the forward-reverse rotation motor (302) is fixed with the end of the screw (303), and the forward-reverse rotation motor (302) is electrically connected with the PLC controller (5);
The first U-shaped frame (305) is fixed between the two lateral sealing plates (307), and the first U-shaped frame (305) is connected with the nuts (304) through bolts (306);
the upper driving part comprises a first transmission gear (3012) and a first transmission rack (3013), the first transmission gear (3012) is fixed at the other end part of the screw rod (303), the first transmission rack (3013) is fixed at the top of the upper sealing plate (3010), and the first transmission gear (3012) is meshed with the first transmission rack (3013);
the lower driving part comprises a rectangular bar (3015), a second driving rack (3016), shaft seats (3017), a driving shaft (3018), a second driving gear (3019), a third driving gear (3020), a third driving rack (3021) and a mounting plate (3022), wherein two rectangular bars (3015), the second driving rack (3016), the shaft seats (3017) and the second driving gear (3019) are respectively arranged, the two rectangular bars (3015) are respectively fixed at the bottoms of the two side sealing plates (307), the two second driving racks (3016) are respectively fixed at the bottoms of the two rectangular bars (3015), the teeth of the second driving rack (3016) face downwards, the two shaft seats (3017) are respectively fixed at the positive lower side of the coating chamber (2), the driving shaft (3018) is rotationally arranged between the two shaft seats (3017), two ends of the driving shaft (3018) respectively rotate to penetrate through the two shaft seats (3017) and extend outwards, the two driving gears (3016) are respectively fixed at the periphery of the two driving gear (3016) and are respectively meshed with the second driving gear (3014) which is fixed at the positive lower end of the mounting plate (3014), the third transmission rack (3021) is fixed on the mounting plate (3022) in the forward direction, the third transmission rack (3021) faces outwards, and the third transmission gear (3020) is meshed with the mounting plate (3022).
5. The vacuum coating apparatus according to claim 4, further comprising
The signal induction mechanism (6) is in signal connection with the PLC (5) and is used for automatically realizing the actions of the rotary conveying mechanism (1), the sealing mechanism (3) and the belt conveying mechanism (4) based on signal induction; and
the blocking mechanism (7) is detachably matched with the film plating chamber (2) in a sliding way, and is matched with the signal sensing mechanism (6) to realize signal sensing;
the signal induction mechanism (6) comprises a lower U-shaped frame (601), a first infrared emission sensor (602), a vertical plate (603), a first infrared receiving sensor (604), an upper U-shaped frame (605), a second infrared emission sensor (606), an L-shaped vertical rod (607), a second infrared receiving sensor (608), a contact switch (609), a vibration sensor (6010) and a pressure strain gauge (6011), wherein the lower U-shaped frame (601), the first infrared emission sensor (602), the upper U-shaped frame (605) and the second infrared emission sensor (606) are all provided with three, the three lower U-shaped frames (601) are all fixed at the bottom of the connecting seat (103), the central axis of each lower U-shaped frame (601) is parallel to the central axis of each connecting rod (104), the first infrared emission sensor (602) is fixed on the inner wall of the lower U-shaped frame (601), the infrared light emitted by the first infrared emission sensor (602) is parallel to the outer side, the vertical plate (603) is fixed on the middle of the connecting rod (101) and is fixed on the outer side of the connecting rod (104) at a position opposite to the upper end of the connecting rod (601), the first infrared receiving sensor (604) is in signal connection with the PLC (5);
The three upper U-shaped frames (605) are all fixed on the top of the connecting seat (103), the three vertical plates (603) are respectively positioned on the upper sides of the three lower U-shaped frames (601), the three second infrared emission sensors (606) are all fixed on the top of the connecting seat (103), the three second infrared emission sensors (606) are respectively positioned in the three upper U-shaped frames (605), infrared light emitted by the second infrared emission sensors (606) is directed to the upper side, a first hole site (1014) is formed in the center of the top of the connecting seat (103), the first hole site (1014) is communicated with the hollow part of the hollow rotating shaft (102), the L-shaped vertical rods (607) are fixed on the center of the top of the base (101), the infrared emission sensors (606) extend outwards along the hollow part of the hollow rotating shaft (102) and the first hole site, an included angle between the axes of the second infrared emission sensors (606) is 45 degrees, the second infrared emission sensors (608) are fixed on the second infrared emission sensors (608), and the second infrared emission sensors (608) are positioned on the second infrared emission sensors (608), and the second infrared emission sensors (608) are connected on the top of the second infrared emission sensors (5);
The contact switch (609) is fixed at one side end of the coating chamber (2), the contact switch (609) is electrically connected with the PLC (5), and a rectangular notch (3027) matched with the contact switch (609) is formed at the forward lower side of one side sealing plate (307);
the vibration sensors (6010) are provided with a plurality of vibration sensors (6010), the plurality of vibration sensors (6010) are uniformly embedded in the belt conveying mechanism (4), and the vibration sensors (6010) are in signal connection with the PLC (5);
the pressure strain gauge (6011) is fixed at the end part of one lateral sealing plate (307) close to the blocking mechanism (7);
the blocking mechanism (7) comprises a second U-shaped frame (701), T-shaped sliding blocks (702) and a lifting handle (703), T-shaped grooves (204) are formed in two sides of the top of the coating chamber (2) from top to bottom, the T-shaped grooves (204) are staggered with the first dovetail sliding grooves (202), the depth of each T-shaped groove (204) is identical to that of each first dovetail sliding groove (202), the T-shaped sliding blocks (702) are two, the two T-shaped sliding blocks (702) are symmetrically fixed at the inner wall parts of two sides of the second U-shaped frame (701), the T-shaped sliding blocks (702) are in sliding fit with the T-shaped grooves (204), and the lifting handle (703) is fixed at the top of the second U-shaped frame (701).
6. The vacuum coating apparatus according to claim 5, further comprising:
elastic mechanism (9), it includes elastic component and lower elastic component, go up elastic component with elastic component all is equipped with two sets of down, go up elastic component and locate between second forked tail spout (206) and second forked tail slider (3011), elastic component locates down between third forked tail spout (207) and third forked tail slider (3028).
7. A method of using a vacuum coating apparatus as recited in claim 6, comprising the steps of:
s1, rotary feeding: placing a substrate in three supporting frames (106) in sequence, supporting the substrate by an L-shaped supporting strip (108), starting a rotary driving assembly through a PLC (programmable logic controller) (5), driving the rotary assembly to rotate by the rotary driving assembly to realize rotation of the substrate supporting assembly, then conveying the substrate into a feeding hole (201) in a rotary mode, when one of the first infrared emission sensors (602) rotates to a position opposite to the first infrared emission sensor (604), receiving an induction signal by the first infrared emission sensor (604) and transmitting the induction signal into the PLC (5), controlling the rotary driving assembly to stop by the PLC (5), enabling the annular groove (105) to be positioned in the center of the two semicircular grooves (3025), and enabling the PLC (5) to automatically control a screw nut transmission part to act in the forward direction;
S2, sealing: when the screw nut transmission part acts positively, the screw nut transmission part drives the two lateral sealing plates (307) to move positively towards the coating chamber (2), meanwhile, the screw nut transmission part is matched with the upper driving part to drive the upper sealing plate (3010) to move downwards, the two lateral sealing plates (307) are matched with the lower driving part to realize the upward movement of the lower sealing plate (3014), when the rectangular notch (3027) is contacted with the contact switch (609), the contact switch (609) receives an induction signal and transmits the induction signal to the PLC (5), the PLC (5) automatically controls the screw nut transmission part to stop acting, at the moment, the two lateral sealing plates (307) seal two sides of the feed inlet (201), the upper sealing plate (3010) is just closed with the lower sealing plate (3014), meanwhile, the inner wall of the two semicircular grooves (3025) is matched with the outer wall of the annular groove (105), and the insert block (2023) is completely inserted into the slot (3024), so that the feed inlet (201) is completely sealed positively and laterally;
s3, vacuumizing and coating: the PLC (5) is used for starting the vacuum pump (8) to realize vacuumizing, and then the PLC (5) is used for starting the coating machine (10) to realize coating;
S4, after film coating is finished, a screw-nut transmission part is controlled to act reversely through a PLC (5), when the screw-nut transmission part acts reversely, the screw-nut transmission part drives two lateral sealing plates (307) to move back towards a film coating chamber (2), meanwhile, the screw-nut transmission part is matched with an upper driving part to drive an upper sealing plate (3010) to move upwards, the two lateral sealing plates (307) are matched with a lower driving part to realize downward movement of a lower sealing plate (3014), when a pressure strain gauge (6011) on one of the lateral sealing plates (307) contacts a second U-shaped frame (701) to sense a pressure signal, the pressure strain gauge (6011) transmits the pressure signal to the PLC (5), the PLC (5) automatically controls the screw-nut transmission part to stop acting, and meanwhile, the PLC (5) automatically controls a rotary driving assembly to start;
s5, rotary blanking: the coated substrate continues to rotate, when a second infrared transmitting sensor (606) corresponding to the coated substrate is opposite to a second infrared receiving sensor (608), the second infrared receiving sensor (608) receives the sensing signal and transmits the sensing signal to a PLC (5), the PLC (5) automatically controls the rotary driving assembly to stop acting, meanwhile, the PLC (5) automatically controls the cylinder (109) to stretch, then the L-shaped supporting strip (108) is completely separated from the coated substrate, the coated substrate falls onto a belt conveying mechanism (4), a vibration sensor (6010) on the belt conveying mechanism (4) senses the vibration signal and transmits the vibration signal to the PLC (5), the PLC (5) automatically controls the cylinder (109) to shorten to realize resetting, meanwhile, the PLC (5) automatically controls the rotary driving assembly to start, and when other lower first infrared transmitting sensors (602) rotate to positions opposite to the first infrared receiving sensors (604), the steps S1 and S2-S5 are executed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310474679.7A CN116426880B (en) | 2023-04-28 | 2023-04-28 | Vacuum coating equipment and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310474679.7A CN116426880B (en) | 2023-04-28 | 2023-04-28 | Vacuum coating equipment and using method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116426880A CN116426880A (en) | 2023-07-14 |
| CN116426880B true CN116426880B (en) | 2024-01-12 |
Family
ID=87084033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310474679.7A Active CN116426880B (en) | 2023-04-28 | 2023-04-28 | Vacuum coating equipment and using method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116426880B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117467969B (en) * | 2023-12-28 | 2024-04-16 | 湖南振添光学玻璃科技有限公司 | ITO coating equipment for optical glass lens and use method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6471837B1 (en) * | 1997-09-29 | 2002-10-29 | Unaxis Trading Ag | Vacuum coating installation and coupling device |
| CN106555158A (en) * | 2016-11-15 | 2017-04-05 | 东莞市秦智工业设计有限公司 | A kind of membrane cassette of vacuum evaporation equipment |
| CN108277468A (en) * | 2018-02-26 | 2018-07-13 | 沈阳中北真空技术有限公司 | A kind of magnetron sputtering optical coating apparatus and film plating process with vacuum machine arm |
| CN108315695A (en) * | 2018-05-04 | 2018-07-24 | 昆山木利机械设计有限公司 | A kind of intelligent vacuum film-coating mechanism |
| CN109518153A (en) * | 2018-12-07 | 2019-03-26 | 沈阳爱科斯科技有限公司 | Continuous vacuum coating device and coating system |
| CN212199408U (en) * | 2020-04-07 | 2020-12-22 | 常州翊迈新材料科技有限公司 | Continuous coating equipment conveyer |
| CN114635118A (en) * | 2022-03-18 | 2022-06-17 | 仝所岩 | Continuous vacuum coating equipment |
| CN217809639U (en) * | 2022-07-28 | 2022-11-15 | 光驰科技(上海)有限公司 | Vacuum coating machine |
-
2023
- 2023-04-28 CN CN202310474679.7A patent/CN116426880B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6471837B1 (en) * | 1997-09-29 | 2002-10-29 | Unaxis Trading Ag | Vacuum coating installation and coupling device |
| CN106555158A (en) * | 2016-11-15 | 2017-04-05 | 东莞市秦智工业设计有限公司 | A kind of membrane cassette of vacuum evaporation equipment |
| CN108277468A (en) * | 2018-02-26 | 2018-07-13 | 沈阳中北真空技术有限公司 | A kind of magnetron sputtering optical coating apparatus and film plating process with vacuum machine arm |
| CN108315695A (en) * | 2018-05-04 | 2018-07-24 | 昆山木利机械设计有限公司 | A kind of intelligent vacuum film-coating mechanism |
| CN109518153A (en) * | 2018-12-07 | 2019-03-26 | 沈阳爱科斯科技有限公司 | Continuous vacuum coating device and coating system |
| CN212199408U (en) * | 2020-04-07 | 2020-12-22 | 常州翊迈新材料科技有限公司 | Continuous coating equipment conveyer |
| CN114635118A (en) * | 2022-03-18 | 2022-06-17 | 仝所岩 | Continuous vacuum coating equipment |
| CN217809639U (en) * | 2022-07-28 | 2022-11-15 | 光驰科技(上海)有限公司 | Vacuum coating machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116426880A (en) | 2023-07-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN116426880B (en) | Vacuum coating equipment and using method thereof | |
| CN108179396B (en) | Annular circulation continuous vacuum coating device | |
| CN108190818B (en) | Vacuumizing nitrogen filling machine | |
| CN113785692A (en) | Pineapple picking device integrating clamping and cutting, picking method and picking robot | |
| CN111103300A (en) | Infusion bottle foreign matter and leak integral type check out test set | |
| CN104787565B (en) | Magnetic shoe feeding method | |
| CN212862064U (en) | Full-automatic dispensing equipment of traditional chinese medicine granule | |
| US4196511A (en) | Apparatus for assembling banks of battery electrodes | |
| CN113772933A (en) | Full-automatic intelligent pipe inserting machine | |
| CN113148617A (en) | Cake-shaped material preparation device and food processing equipment | |
| CN110116978B (en) | Equipment for automatically sealing spraying raw material | |
| CN205826683U (en) | Multi-example single channel automatic switchover sampling system | |
| CN108085647B (en) | A kind of screw transporter for vacuum coating | |
| CN106081217B (en) | Baked food suction drum device | |
| CN208360683U (en) | A kind of transfer mechanism of open the bag device | |
| CN211528239U (en) | Infusion bottle foreign matter and leak integral type check out test set | |
| CN210524399U (en) | Vehicle air conditioner air outlet assembly fixture | |
| CN113955461A (en) | Feeding device for machining sensor shell | |
| CN208360685U (en) | A kind of cutter mechanism of open the bag device | |
| CN208360684U (en) | A kind of open the bag device | |
| CN202513194U (en) | Substrate conveying system | |
| CN111776738A (en) | Domestic appliance plug fast assembly production line | |
| CN211194980U (en) | Discharging mechanism for automatic buckling processing of cover spoon | |
| CN216679105U (en) | Automatic sorting machine for diamond-shaped products | |
| CN114772213B (en) | Multistage unloader of filiform food |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |