CN116387339A

CN116387339A - Micro LED mixed light-emitting structure and preparation method thereof

Info

Publication number: CN116387339A
Application number: CN202310617834.6A
Authority: CN
Inventors: 谢峰; 张羽; 岳大川; 蔡世星; 李小磊; 伍德民
Original assignee: Ji Hua Laboratory; Shenzhen Aoshi Micro Technology Co Ltd
Current assignee: Ji Hua Laboratory; Shenzhen Aoshi Micro Technology Co Ltd
Priority date: 2023-05-30
Filing date: 2023-05-30
Publication date: 2023-07-04
Anticipated expiration: 2043-05-30
Also published as: CN116387339B

Abstract

The disclosure relates to a Micro LED mixed light emitting structure and a preparation method thereof, and belongs to the technical field of Micro LED display; the electro-optical modulation element is arranged on one side of the light emitting surface of the second light emitting element; the first light-emitting element and the third light-emitting element are arranged on one side of the electro-optical modulation element, which is away from the second light-emitting element; and the vertical projections of the first light-emitting element, the second light-emitting element and the third light-emitting element on the plane of the light-emitting surface are staggered. Thus, the mixed light emitting of the first light emitting element or the third light emitting element is realized, so that the perception of the true color by human eyes is facilitated.

Description

Micro LED mixed light-emitting structure and preparation method thereof

Technical Field

The disclosure relates to the technical field of Micro LED display, in particular to a Micro LED mixed light emitting structure and a preparation method thereof.

Background

At present, in the existing Micro LED display technology, red (Red, R), green (Green, G) and Blue (Blue, B), that is, RGB three-color pixels are mostly transferred to a driving substrate respectively through a mass transfer technology, so that the RGB three-color pixels are sequentially arranged on the same plane, and based on each pixel, the back panel can be driven to emit light by means of driving, and then the RGB three-color pixels are combined into a pixel structure capable of displaying all colors, that is, the RGB three-color pixels are made into a group of pixel structures for full-color display.

Based on the principle of full-color display, human eyes have three different viewing cone cells for sensing red light, green light and blue light, and the three different viewing cone cells respectively receive light rays with different wavelengths, namely 560nm, 530nm and 440nm. Specifically, an electromagnetic wave with a wavelength of 570nm is generally defined as yellow light, and when three monochromatic pixels of RGB are used to emit light, for example, red light and green light are emitted to eyes together, cone cells for sensing the red light and the green light generate the same sensation as receiving the yellow light, and the brain determines that the red light and the green light are currently yellow light, so that human eye deceptive colors are formed by parallel pixels, which is unfavorable for human eyes to sense real colors.

Disclosure of Invention

In order to solve the technical problems described above or at least partially solve the technical problems described above, the present disclosure provides a Micro LED hybrid light emitting structure and a method for manufacturing the same.

The present disclosure provides a Micro LED hybrid light emitting structure, the structure comprising: a first light emitting element, a second light emitting element, a third light emitting element, and an electro-optical modulation element;

the electro-optical modulation element is arranged on one side of the light emitting surface of the second light emitting element; the first light-emitting element and the third light-emitting element are arranged on one side of the electro-optical modulation element, which is away from the second light-emitting element; the vertical projections of the first light-emitting element, the second light-emitting element and the third light-emitting element on the plane where the light-emitting surface is located are staggered;

The second light-emitting element is used for emitting blue light, and the first light-emitting element and the third light-emitting element are respectively used for emitting one of green light and red light and have different light-emitting colors; the electro-optical modulation element is at least used for adjusting a blue light transmission path based on electric control, and guiding blue light to the first light-emitting element or the third light-emitting element to emit light by blue-green or blue-red mixture.

Optionally, the electro-optic modulation element includes a first electro-refractive body, a second electro-refractive body, a third electro-refractive body, and a fourth electro-refractive body;

the first electro-refraction body is arranged in alignment with the first light-emitting element and is positioned on the backlight side of the first light-emitting element;

the second electro-refraction body and the fourth electro-refraction body are arranged in alignment with the second light-emitting element and are positioned at the light-emitting side of the second light-emitting element, and the second electro-refraction body is positioned at one side of the fourth electro-refraction body, which is away from the second light-emitting element;

the third electro-refractive body is arranged in alignment with the third light-emitting element and is positioned at the backlight side of the third light-emitting element;

the first electro-refractive body and the fourth electro-refractive body are used for transmitting blue light, and the second electro-refractive body and the third electro-refractive body are used for reflecting the blue light; alternatively, the first and second electro-refractors are used for reflecting blue light, and the third and fourth electro-refractors are used for transmitting blue light.

Optionally, the first electro-refractive body, the second electro-refractive body, and the third electro-refractive body are disposed at the same level;

wherein, for blue light output, the second electro-refractive body and the fourth electro-refractive body are used for transmitting blue light together; for green light emission, the first electro-refractive body is configured to block green light transmission; for red light extraction, the third electro-refractive body is used for blocking red light transmission.

Optionally, the first, second, third, and fourth electro-refractors include:

the first electrode layer, the electrorefractive index layer and the second electrode layer are sequentially stacked along the light transmission direction;

wherein the first electrode layer is an anode, and the second electrode layer is a cathode.

Optionally, the fourth electro-refractive body is co-cathode with the second light emitting element;

and/or the two ends of the anode of the fourth electro-refractive body are provided with side walls for leading out the anode.

Optionally, the electro-optical modulation element further comprises a light splitting structure;

the light splitting structure is arranged between the plane where the fourth electro-refractive body is located and the plane where the second electro-refractive body is located, and the light splitting structure is at least used for guiding blue light to the first electro-refractive body or the third electro-refractive body through reflection and/or transmission.

Optionally, the light splitting structure includes a first reflecting element, a second reflecting element, a third reflecting element, and a fourth reflecting element;

the first reflecting element is obliquely arranged on one side, away from the first light-emitting element, of the first electro-refractive body;

the second reflecting element and the third reflecting element are arranged between the second electro-refractive body and the fourth electro-refractive body in a crossing way;

the fourth reflecting element is obliquely arranged on one side, away from the third light-emitting element, of the third electro-refractive body;

the first reflecting element and the fourth reflecting element are used for carrying out total reflection on the passing light; the second and third reflective elements are respectively used for reflecting at least one of green light and red light and are different in color.

Optionally, the first reflective element and the second reflective element are disposed in parallel, and the third reflective element and the fourth reflective element are disposed in parallel;

the second reflective element and the third reflective element are also at least for reflecting and transmitting blue light.

Optionally, the structure further comprises a reflective structure; the reflective structure is disposed around the second light emitting element.

Optionally, the reflective structure includes a first blue light reflective layer surrounding at least a portion of a side of the second light emitting element;

the first blue light reflecting layer is used for reflecting the blue light of the side face to the light emitting side.

Optionally, the reflecting structure further includes a blue light collimation layer disposed on a light emitting side of the second light emitting element and embedded inside the common cathode;

the blue light collimation layer is used for carrying out collimation of a preset angle on blue light based on reflection and transmission.

Optionally, the reflective structure further includes a second blue light reflective layer disposed on a backlight side of the second light emitting element;

the second blue light reflecting layer is used for reflecting blue light of the backlight side to the light emitting side.

Optionally, the light-emitting device further comprises a light-emitting substrate and a driving substrate;

the light-emitting substrate is arranged on one side of the driving substrate; the light-emitting substrate is a gallium nitride substrate, and the second light-emitting element is arranged inside the gallium nitride substrate;

the driving substrate is used for driving and lighting the light-emitting substrate.

Optionally, the first light emitting element and the third light emitting element are self-luminescent devices or photoluminescent devices.

The disclosure also provides a preparation method of the Micro LED mixed light-emitting structure, which is used for preparing any one of the Micro LED mixed light-emitting structures; the method comprises the following steps:

Preparing a second light emitting element, and providing a first light emitting element and a third light emitting element;

forming an electro-optical modulation element on the light-emitting surface side of the second light-emitting element;

forming the first light emitting element and the third light emitting element on a side of the electro-optical modulation element facing away from the second light emitting element;

Optionally, the forming the electro-optical modulation element includes:

preparing a fourth electro-refractive body on the light-emitting side of the second light-emitting element;

forming a light splitting structure on one side of the fourth electro-refractive body away from the second light-emitting element;

and forming a first electro-refractive body, a second electro-refractive body and a third electro-refractive body on one side of the light splitting structure, which is away from the fourth electro-refractive body.

Optionally, the forming the light splitting structure includes:

And forming a first reflecting element, a second reflecting element, a third reflecting element and a fourth reflecting element on one side of the fourth electro-refractive body, which is away from the second light-emitting element.

Optionally, the method further comprises:

providing a light-emitting substrate and a driving substrate;

and forming electrical connection between the light-emitting substrate and the driving substrate by using a hybrid bonding mode.

Compared with the prior art, the technical scheme provided by the embodiment of the disclosure has the following advantages:

the Micro LED mixed light emitting structure provided by the embodiment of the disclosure comprises a first light emitting element, a second light emitting element, a third light emitting element and an electro-optic modulation element; the electro-optical modulation element is arranged on one side of the light emitting surface of the second light emitting element; the first light-emitting element and the third light-emitting element are arranged on one side of the electro-optical modulation element, which is away from the second light-emitting element; the vertical projections of the first light-emitting element, the second light-emitting element and the third light-emitting element on the plane of the light-emitting surface are staggered; the second light-emitting element is used for emitting blue light, and the first light-emitting element and the third light-emitting element are respectively used for emitting one of green light and red light and have different light-emitting colors; the electro-optical modulation element is at least used for adjusting a blue light transmission path based on electric control, and guiding the blue light to the first light-emitting element or the third light-emitting element to emit light by blue-green or blue-red mixture. Thus, the mixed light emitting of the first light emitting element or the third light emitting element is realized, so that the perception of the true color by human eyes is facilitated.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure.

In order to more clearly illustrate the embodiments of the present disclosure or the solutions in the prior art, the drawings that are required for the description of the embodiments or the prior art will be briefly described below, and it will be obvious to those skilled in the art that other drawings can be obtained from these drawings without inventive effort.

Fig. 1 is a schematic structural diagram of a Micro LED hybrid light emitting structure according to an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of another Micro LED hybrid light emitting structure according to an embodiment of the present disclosure;

FIG. 3 is a schematic diagram of an equivalent refractive index as a function of voltage according to an embodiment of the present disclosure;

fig. 4 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the present disclosure;

fig. 5 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the present disclosure;

fig. 6 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the present disclosure;

Fig. 7 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the present disclosure;

fig. 8 is a schematic flow chart of a method for preparing a Micro LED hybrid light emitting structure according to an embodiment of the present disclosure;

fig. 9 is a schematic layout diagram of a first light emitting element, a second light emitting element, and a third light emitting element according to an embodiment of the disclosure.

Wherein 110, the first light-emitting component; 120. a second light emitting element; 130. a third light emitting element; 140. an electro-optic modulation element; 141. a first electro-refractive body; 142. a second electro-refractive body; 143. a third electro-refractive body; 144. a fourth electro-refractive body; 145. a light splitting structure; 01. a first electrode layer; 02. an electrically induced refractive index layer; 03. a second electrode layer; 04. a first reflective element; 05. a second reflective element; 06. a third reflective element; 07. a fourth reflective element; 150. a reflective structure; 151. a first blue light reflecting layer; 152. a blue light collimation layer; 153. a second blue light reflecting layer; 160. internal wiring; 170. a light-emitting substrate; 180. the substrate is driven.

Detailed Description

In order that the above objects, features and advantages of the present disclosure may be more clearly understood, a further description of aspects of the present disclosure will be provided below. It should be noted that, without conflict, the embodiments of the present disclosure and features in the embodiments may be combined with each other.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure, but the present disclosure may be practiced otherwise than as described herein; it will be apparent that the embodiments in the specification are only some, but not all, embodiments of the disclosure.

The Micro LED hybrid light emitting structure and the preparation method thereof provided by the embodiment of the disclosure are exemplified below with reference to the accompanying drawings.

Illustratively, in some embodiments, fig. 1 is a schematic structural diagram of a Micro LED hybrid light emitting structure according to an embodiment of the disclosure. Referring to fig. 1, the structure includes a first light emitting element 110, a second light emitting element 120, a third light emitting element 130, and an electro-optical modulating element 140; the electro-optical modulation element 140 is disposed on the light-emitting surface side of the second light-emitting element 120; the first light emitting element 110 and the third light emitting element 130 are both disposed on a side of the electro-optical modulation element 140 facing away from the second light emitting element 120; the vertical projections of the first light-emitting element 110, the second light-emitting element 120 and the third light-emitting element 130 on the plane of the light-emitting surface are staggered; the second light emitting element 120 is configured to emit blue light, and the first light emitting element 110 and the third light emitting element 130 are each configured to emit one of green light and red light and have different emission colors; the electro-optical modulation element 140 is at least used for adjusting the blue light transmission path based on the electrical control, and guiding the blue light to the first light emitting element 110 or the third light emitting element 130 to be emitted as blue-green or blue-red mixed light.

The first light emitting element 110, the second light emitting element 120, and the third light emitting element 130 are light emitting elements that emit light of different colors, respectively. Illustratively, the second light emitting element 120 is an element that emits blue light, the first light emitting element 110 may be an element that emits green light, and the third light emitting element 130 may be an element that emits red light; alternatively, the first light emitting element 110 may be an element that emits red light, and the third light emitting element 130 may be an element that emits green light, so long as the second light emitting element 120 emits blue light, and the light emission colors of the first light emitting element 110 and the third light emitting element 130 are not limited herein.

The electro-optical modulation element 140 is an element for realizing mixed light emission by adjusting a transmission path of blue light, for example, the electro-optical modulation element 140 may change its refractive index by an externally applied electric field to reflect or transmit corresponding light such as blue light, and a specific operation principle of the electro-optical modulation element 140 will be described as an example.

Specifically, the electro-optical modulation element 140 can adjust whether the transmission medium on the light emitting surface side of the second light emitting element 120 transmits the blue light based on the electrical control, so as to change the transmission path of the blue light; illustratively, for a blue-green mixed light: the second light-emitting element 120 emits blue light, the first light-emitting element 110 emits green light, the third light-emitting element 130 emits red light, and the electro-optical modulation element 140 selectively transmits the blue light through the transmission medium corresponding to the first light-emitting element 110, so that blue-green mixed light emission is realized at the first light-emitting element 110; alternatively, for blue-red mixed light: on this basis, the electro-optical modulation element 140 may also be used to selectively transmit blue light through the transmission medium corresponding to the third light emitting element 130, so as to realize blue-red mixed light emission at the third light emitting element 130. Note that, when the first light emitting element 110 emits red light and the third light emitting element 130 emits green light, the principle of the above mixed light emission is consistent, and will not be described herein.

It should be understood that, the first light emitting element 110 and the third light emitting element 130 are disposed above the electro-optical modulating element 140, that is, on the side of the electro-optical modulating element 140 facing away from the second light emitting element 120, the transmission path of the blue light can be correspondingly adjusted by using the electro-optical modulating element 140, so that the blue light is emitted from the target light emitting element, such as the first light emitting element 110 or the third light emitting element 130, and the mixed light with the corresponding color is formed.

It should be noted that, based on the display principle and the display requirement of the Micro LED, an array of pixel areas is generally disposed above the driving substrate, and the first light emitting element 110, the second light emitting element 120, and the third light emitting element 130 respectively correspond to one independent pixel area, so that the vertical projections of the first light emitting element 110, the second light emitting element 120, and the third light emitting element 130 on the plane where the light emitting surface is located are staggered, so as to better realize the full-color display of the Micro LED.

The Micro LED hybrid light emitting structure provided by the embodiments of the present disclosure includes a first light emitting element 110, a second light emitting element 120, a third light emitting element 130, and an electro-optical modulating element 140; the electro-optical modulation element 140 is disposed on the light-emitting surface side of the second light-emitting element 120; the first light emitting element 110 and the third light emitting element 130 are both disposed on a side of the electro-optical modulation element 140 facing away from the second light emitting element 120; the vertical projections of the first light-emitting element 110, the second light-emitting element 120 and the third light-emitting element 130 on the plane of the light-emitting surface are staggered; the second light emitting element 120 is configured to emit blue light, and the first light emitting element 110 and the third light emitting element 130 are each configured to emit one of green light and red light and have different emission colors; the electro-optical modulation element 140 is at least used for adjusting the blue light transmission path based on the electrical control, and guiding the blue light to the first light emitting element 110 or the third light emitting element 130 to be emitted as blue-green or blue-red mixed light. In this way, the mixed light output of the first light emitting element 110 or the third light emitting element 130 is realized, thereby facilitating the perception of the true color by the human eye.

In some embodiments, fig. 2 is a schematic structural diagram of another Micro LED hybrid light emitting structure according to an embodiment of the disclosure. Referring to fig. 2 in addition to fig. 1, the electro-optical modulation element 140 includes a first electro-refractive body 141, a second electro-refractive body 142, a third electro-refractive body 143, and a fourth electro-refractive body 144; the first electro-refractive body 141 is disposed opposite to the first light emitting element 110 and is located at the backlight side of the first light emitting element 110; the second electro-refractive body 142 and the fourth electro-refractive body 144 are arranged in alignment with the second light-emitting element 120 and are positioned on the light-emitting side of the second light-emitting element 120, and the second electro-refractive body 142 is positioned on the side of the fourth electro-refractive body 144 facing away from the second light-emitting element 120; the third electro-refractive body 143 is disposed opposite to the third light emitting element 130, and is located at the backlight side of the third light emitting element 130.

Wherein, for the mixed light emission, the first and fourth electro-refractors 141 and 144 are used for transmitting blue light, and the second and third electro-

refractors

142 and 143 are used for reflecting blue light; alternatively, the first and second electro-refractors 141 and 142 are used to reflect blue light, and the third and fourth electro-

refractors

143 and 144 are used to transmit blue light.

The first, second, third and fourth electro-

refractive bodies

141, 142, 143 and 144 are each composed of an electrode and an electro-refractive layer, and the electro-optical modulation element 140 further adjusts the refractive index of the electro-refractive layer by applying an electric field to the electrode connected to the electro-refractive layer, so that it is possible to selectively reflect or transmit the corresponding light, such as blue light, and specific structures of the first, second, third and fourth electro-

refractive bodies

141, 142, 143 and 144 will be described later.

Specifically, the first electro-refractive body 141 is disposed directly below the first light emitting element (corresponding to the backlight side), the second electro-refractive body 142 and the fourth electro-refractive body 144 are both disposed directly above the second light emitting element (corresponding to the light emitting side), and the third electro-refractive body 143 is disposed directly below the third light emitting element (corresponding to the backlight side). The second electro-refractive body 142 is disposed directly above the fourth electro-refractive body 144, and is disposed at the same height as the first and third electro-refractive bodies 141 and 143.

Wherein, when the first light emitting element is used for emitting green light and the third light emitting element is used for emitting red light, the first and fourth electro-refractors 141 and 144 transmit blue light, and the second and third electro-

refractors

142 and 143 reflect blue light for the case of blue-green mixed light; thus, blue light is finally emitted through the fourth electro-refractor 144 through the first electro-refractor 141 by the transmission effect of the first and fourth electro-refractors 141 and the reflection effect of the second and third electro-

refractors

142 and 143.

For the case of blue-red mixed light emission, the first and second electro-refractors 141 and 142 reflect blue light, and the third and fourth electro-

refractors

143 and 144 transmit blue light; thus, blue light is finally emitted into blue red light through the third electro-refractor 143 via the fourth electro-refractor 144 by the reflection of the first and second electro-refractors 141 and 142 and the transmission of the third and fourth electro-

refractors

143 and 144.

In some embodiments, with continued reference to fig. 2, the first, second, and third electro-

refractive bodies

141, 142, 143 are disposed at the same level; wherein, for blue light, the second and fourth electro-

refractors

142 and 144 are used to transmit blue light together; for green light extraction, the first electro-refractive body 141 is for blocking green light transmission; for red light out, the third electro-refractive body 143 serves to block red light transmission.

In the case where the first light emitting element 110, the second light emitting element 120, and the third light emitting element 130 each emit light individually, the refractive indices of the first electro-refractive body 141, the second electro-refractive body 142, the third electro-refractive body 143, and the fourth electro-refractive body 144 are adjusted so that the green light, the blue light, and the red light are emitted directly in the vertical direction, that is, all the light of the colors are composed in common by the three light emitting elements that emit the monochromatic light, not by the mixture of the monochromatic light.

In combination with the above case of each of the individual light emission, illustratively, by adjusting the respective refractive indexes of the first electro-refractive body 141, the second electro-refractive body 142, the third electro-refractive body 143, and the fourth electro-refractive body 144, including the respective refractive indexes of the second electro-refractive body 142 and the fourth electro-refractive body 144 formed by distributing voltages, the second electro-refractive body 142 and the fourth electro-refractive body 144 can transmit blue light, the first electro-refractive body 141 can block transmission of green light, the fourth electro-refractive body 144 can block transmission of red light, further, green light emitted from the first light emitting element 110 is directly emitted along the light emitting side above, blue light emitted from the second light emitting element 120 reaches the second electro-refractive body 142 via the fourth electro-refractive body 144 and is emitted, and red light emitted from the third light emitting element 130 is directly emitted along the light emitting side above, so as to form a normalized color display.

It should be understood that, by setting the first electro-refractive body 141, the second electro-refractive body 142, and the third electro-refractive body 143 at the same level, blue light can be better guided to the first light emitting element 110 or the third light emitting element 130, which is beneficial to adjusting the transmission path of the blue light and facilitating the realization of mixed light extraction.

In some embodiments, with continued reference to fig. 2, the first, second, third, and fourth electro-

refractors

141, 142, 143, and 144 comprise: a first electrode layer 01, an electrorefractive index layer 02 and a second electrode layer 03 which are sequentially stacked in the light transmission direction; the first electrode layer 01 is an anode, and the second electrode layer 03 is a cathode.

The electrorefractive index layer 02 is an electrorefractive index change layer (KDP) and changes its refractive index by an electric field (e.g., voltage), and selectively transmits or reflects corresponding light.

Wherein the first electrode layer 01 and the second electrode layer 03 are electrode structures for providing an electric field effect to the electro-refractive index layer 02; specifically, by applying an electric field to the first electrode layer 01 (anode) and the second electrode layer 03 (cathode), the refractive index of the electro-refractive index layer 02 of the first electro-refractive body 141, the second electro-refractive body 142, the third electro-refractive body 143, or the fourth electro-refractive body 144 can be adjusted, and selectively transmits blue light or reflects blue light to further change the transmission path of the blue light, and finally, mixed light emission or only single color light emission is formed, and in other embodiments, a preset voltage can be applied according to different light emission conditions to form a corresponding refractive index, and the specific contents regarding the light emission conditions can be understood with reference to the above.

Illustratively, fig. 3 is a schematic diagram of an equivalent refractive index versus voltage provided by an embodiment of the present disclosure. Referring to FIG. 3, wherein the horizontal axis X1 represents voltage in volts (V); the vertical axis Y1 represents the equivalent refractive index of the electro-refractive index layer 02; as can be seen from fig. 3, when an electric field is applied to the electrorefractive index layer 02, the equivalent refractive index of the electrorefractive index layer 02 is changed, and the reflection or transmission of the corresponding light, such as red light, green light or blue light, can be selected based on the difference of the equivalent refractive indexes of the electrorefractive index layer 02.

Illustratively, the materials of the first electrode layer 01 and the second electrode layer 03 may be Indium Tin Oxide (ITO) or other metal materials, and the materials of the electrorefractive index layer 02 may be ITO or liquid crystal, etc., in other embodiments, the first electrode layer 01, the second electrode layer 03 and the electrorefractive index layer 02 may be formed of other materials known to those skilled in the art, which is not limited herein.

In some embodiments, fig. 4 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the disclosure. Referring to fig. 4, the fourth electro-refractive body 144 is common to the cathode of the second light emitting element 120; and/or, the two ends of the anode of the fourth electro-refractive body 144 are provided with side walls for leading out the anode.

The common cathode is the cathode of the light emitting substrate where the second light emitting element 120 is located, and the fourth electro-refractive body 144 and the second light emitting element 120 share the cathode, so that the steps of separately manufacturing the second electrode layer 03 in the fourth electro-refractive body 144 are reduced, the subsequent electrode preparation process is simplified, the miniaturization of the Micro LED mixed light emitting structure is facilitated, and the utilization rate of the internal space structure is improved.

It should be noted that, since the thickness of the anode is generally smaller, sidewalls may be formed at both ends of the anode of the fourth electro-refractive body 144 to lead out the anode, so as to facilitate connection with other related circuits, thereby further expanding the functions of the internal circuit (such as the driving circuit). In addition, if the side wall of the anode of the fourth electro-refractive body 144 is to be prepared, although the side wall of the anode is of a transparent structure, the loss of light is very small (negligible), but in order to avoid other interference during the reflection, the side wall needs to be set away from the path region of the reflected light in the beam-splitting structure during the subsequent preparation.

In some embodiments, fig. 5 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the disclosure. Referring to fig. 5 on the basis of fig. 4, the electro-optical modulation element 140 further comprises a light splitting structure 145; the light splitting structure 145 is disposed between the plane of the fourth electro-refractive body 144 and the plane of the second electro-refractive body 142, and the light splitting structure 145 is at least used for guiding the blue light to the first electro-refractive body 141 or the third electro-refractive body 143 through reflection and/or transmission.

Illustratively, when the first light emitting element 110 is configured to emit green light and the third light emitting element 130 is configured to emit red light, the light splitting structure 145 directs most of the blue light to the first electro-refractive body 141 by reflection and transmission for the case of mixing out blue-green light; for the case of mixing out blue red light, the light splitting structure 145 guides most of the blue light to the third electro-refractive body 143 by reflection and transmission. It should be noted that, due to the spectral characteristics of the light-splitting structure 145, in an ideal state, the blue light emitted by the second light-emitting element 120 can be all transmitted to the first light-emitting element 110 or the third light-emitting element 130, so as to achieve a higher-efficiency mixed light-emitting, and the spectral characteristics of the light-splitting structure 145 will be exemplified below.

It will be appreciated that, for the case of only monochromatic light, the light splitting structure 145 may also guide the blue light from the fourth electro-refractive body 144 to the second electro-refractive body 142 by transmission, while the second electro-refractive body 142 transmits the blue light, and finally emits the blue light.

In some embodiments, with continued reference to fig. 5, the light splitting structure 145 includes a first reflective element 04, a second reflective element 05, a third reflective element 06, and a fourth reflective element 07; the first reflecting element 04 is obliquely arranged at one side of the first electro-refractive body 141, which faces away from the first light-emitting element 110; the second reflecting element 05 and the third reflecting element 06 are disposed between the second electro-refractive body 142 and the fourth electro-refractive body 144 in a crossing manner; the fourth reflecting element 07 is obliquely arranged at a side of the third electro-refractive body 143 facing away from the third light emitting element 130; the first reflecting element 04 and the fourth reflecting element 07 are used for total reflection of the passing light; the second and third reflecting

elements

05 and 06 are respectively for reflecting at least one of green light and red light and are different in color.

Illustratively, the horizontal inclination angles of the first, second, third and fourth reflecting

elements

04, 05, 06, 07 may be 45 °, and in other embodiments, the desired inclination angles may be set according to the spectroscopic requirements, which is not limited herein.

In addition, since the first reflecting element 04 and the fourth reflecting element 07 are capable of totally reflecting the passing light, the first reflecting element 04 and the fourth reflecting element 07 may be total reflecting elements; since the second and third

reflective elements

05 and 06 are capable of reflecting one of green light and red light, respectively, the second and third

reflective elements

05 and 06 may be one of green light and red light reflective elements.

Illustratively, for the case of a blue-green mixed light output: when the first light emitting element 110 is configured to emit green light and the third light emitting element 130 is configured to emit red light, correspondingly, the second reflecting element 05 reflects the green light and the third reflecting element 06 reflects the red light, wherein, in the process that blue light is continuously reflected by the first reflecting element 04 to pass through the first electro-refractive body 141, in order to avoid the loss of green light caused by that the green light emitted by the first light emitting element 110 passes through the first electro-refractive body 141, the second reflecting element 05 can reflect the transmitted green light, thereby improving the green light utilization rate of the first light emitting element 110 and further improving the efficiency of blue-green mixed light emission. Accordingly, for the case of the mixed light emission of blue and red, the principle is similar to the above process, and only the third reflecting element 06 needs to reflect the red light transmitted by the third electro-refractive body 143, thereby improving the efficiency of the mixed light emission of blue and red, which is not described herein again.

In some embodiments, with continued reference to fig. 5, the first reflective element 04 and the second reflective element 05 are disposed in parallel, and the third reflective element 06 and the fourth reflective element 07 are disposed in parallel; the second and third

reflective elements

05 and 06 also serve at least to reflect and transmit blue light.

It will be understood that, based on the parallel arrangement, the horizontal inclination angles of the first reflecting element 04 and the second reflecting element 05 are identical, and the horizontal inclination angles of the third reflecting element 06 and the fourth reflecting element 07 are identical, and the size of the specific inclination angle is not limited.

The proportion of the second reflecting element 05 and the third reflecting element 06 reflecting and transmitting blue light can be the same, namely, the blue light is subjected to half-reflection and half-transmission. For example, for the blue light transmitted through the fourth electro-refractor 144, the second reflecting element 05 and the third reflecting element 06 can each transmit 50% of the blue light and reflect the other 50% of the blue light, and the ratio of reflection and transmission of the blue light can be set according to the actual light splitting requirement, which is not limited herein.

Illustratively, when the second reflecting element 05 is a green reflecting element, the third reflecting element 06 is a red reflecting element, the first light emitting element 110 is configured to emit green light and the third light emitting element 130 is configured to emit red light, the following is specific for the case of blue-green mixed light: for the blue light transmitted through the fourth electro-refractive body 144, firstly, 50% of the blue light is reflected by the second and third reflection elements 05 and 06 to the first reflection element 04, and then transmitted through the first electro-refractive body 141, and the remaining 50% of the blue light is transmitted to the second and third reflection elements 142 and 06 above, so as to be reflected and transmitted again, for example, a part of the reflected light is transmitted to the first reflection element 04, and a part of the transmitted light may reach the second and fourth reflection elements 120 and 07, and as a result of the reflection of the respective reflection structures and fourth reflection elements 07 provided around the second and third reflection elements 120, it continues to the second and third reflection elements 05 and 06, and the above process is repeated until most of the blue light is reflected to the first reflection element 04 to form blue-green mixed light through the first electro-refractive body 141 and the first reflection element 110, as will be exemplified hereinafter with respect to the specific arrangement position of the reflection structures.

Accordingly, the blue-red mixed light emitting situation is similar to the blue-green mixed light emitting situation, only the blue light needs to be reflected at the first electro-refraction body 141 and the second electro-refraction body 142, and the blue light is continuously reflected to the fourth reflection element 07 and transmitted through the third electro-refraction body 143 on the basis that the blue light is transmitted at the third electro-refraction body 143 and the fourth electro-refraction body 144, and finally the red light of the third light emitting element 130 is mixed and emitted to form the blue-red mixed light emitting, which can be understood with reference to the process of forming the blue-green mixed light emitting and will not be repeated herein.

In some embodiments, fig. 6 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the disclosure. Referring to fig. 6 on the basis of fig. 5, the Micro LED hybrid light extraction structure further includes a reflective structure 150; the reflective structure 150 is disposed around the second light emitting element 120.

Wherein the reflecting structure 150 is a structure for reflecting and collimating blue light; illustratively, the reflective structure 150 may be disposed at the sides and bottom of the second light emitting element 120 to reflect blue light, and/or the reflective structure 150 may be disposed above, i.e., on the light emitting side, of the second light emitting element 120 to collimate the blue light on the light emitting side; in this way, a surrounding arrangement of the reflective structure 150 to the second light emitting element 120 is achieved, the specific principle of the reflective structure 150 being exemplarily explained hereinafter.

In some embodiments, referring to fig. 6, the reflective structure 150 includes a first blue light reflective layer 151 surrounding at least a portion of the sides of the second light emitting element 120; the first blue light reflecting layer 151 is used for reflecting the blue light of the side surface to the light emitting side.

Wherein, the partial side surface comprises the whole or partial side surface of the side of the second light emitting element 120; for example, the first blue light reflecting layer 151 may be disposed on the entire side of the second light emitting element 120, so that the side blue light is reflected to the light emitting side with the largest area, thereby improving the utilization rate of the side blue light of the second light emitting element 120, and simultaneously forming an insulating effect on the side of the second light emitting element 120, and further avoiding the interference of other circuit components on the light emitting state of the second light emitting element 120.

The first blue light reflecting layer 151 may be a distributed bragg reflector (distributed Bragg reflection, DBR) which is an optical multi-film structure with high reflection efficiency, and in other embodiments, other types of structures may be provided according to the reflection requirement of the side of the second light emitting element 120, which is not limited herein.

In some embodiments, referring to fig. 6, the reflective structure 150 further includes a blue light collimating layer 152 disposed on the light emitting side of the second light emitting element 120 and embedded inside the common cathode; the blue light collimation layer 152 is used for collimating blue light at a preset angle based on reflection and transmission.

The preset angle may be an angle at which blue light on the light emitting side is collected. For example, the preset angle may be an angle of 5 degrees, 10 degrees, 15 degrees or other angles deviating from the light emitting side in the vertical direction, which is only required to ensure that more blue light is collected, and is not limited herein.

Illustratively, the blue light collimation layer 152 may be a distributed Bragg reflector or other reflective structure; specifically, the blue light is reflected and transmitted by the blue light collimating layer 152, for example, 50% of the blue light is transmitted, and the other 50% of the blue light is reflected, that is, the blue light is semi-reflected and semi-transmitted, so that the blue light in the blue light collimating layer 152 can be collimated according to a preset angle, and most of the blue light is finally emitted from the blue light collimating layer 152, thereby realizing the blue light focusing.

It should be noted that, the blue light collimating layer 152 is disposed in a middle position inside the common cathode of the fourth electro-refractive body 144 and the second light emitting element 120, so as to be aligned with the second light emitting element 120, so that blue light is collected and emitted by the blue light collimating layer 152, and further, the collected blue light is reflected and/or transmitted through the light splitting structure, so that the subsequent mixed light emission or monochromatic light emission is better realized. In addition, it will be understood that by embedding the blue light collimating layer 152 in the common cathode, the space utilization rate of the light emitting side of the second light emitting element 120 can be improved, and the optical path of the blue light reaching the electro-refractive index layer 02 of the fourth electro-refractive body 144 can be reduced, so that the excessive loss of the blue light in the optical path can be reduced, and the transmission efficiency of the blue light can be further improved.

In some embodiments, referring to fig. 6, the reflective structure 150 further includes a second blue light reflective layer 153 disposed on the backlight side of the second light emitting element 120; the second blue light reflecting layer 153 is used for reflecting blue light on the backlight side to the light emitting side.

Wherein the second blue light reflecting layer 153 is disposed at the bottom of the second light emitting element 120. Illustratively, the second blue light reflecting layer 153 may be an omni-directional mirror (omni-directional reflection, ODR) or other total reflection structure, and the blue light under the second light emitting element 120 is totally reflected to the light emitting side by the second blue light reflecting layer 153 at the bottom, so that the utilization rate of the blue light by the second light emitting element 120 is improved, and at the same time, the anode (not shown in the figure) of the second light emitting element 120 can be insulated, so as to form an insulating layer for the anode of the second light emitting element 120.

In some embodiments, fig. 7 is a schematic structural diagram of still another Micro LED hybrid light emitting structure according to an embodiment of the disclosure. Referring to fig. 7, the Micro LED hybrid light emitting structure further includes a light emitting substrate 170 and a driving substrate 180; the light emitting substrate 170 is disposed at one side of the driving substrate 180; the light emitting substrate 170 is a gallium nitride substrate, and the second light emitting device 120 is disposed inside the gallium nitride substrate; the driving substrate 180 is used to drive and light the light emitting substrate 170.

The gallium nitride substrate is a light emitting substrate used for forming the second light emitting element 120, for example, the second light emitting element 120 may be formed as a desired light emitting element by using a gallium nitride material in the gallium nitride substrate. As an example, fig. 7 also shows the internal wiring 160, since the gallium nitride substrate is disposed above the driving substrate 180, the driving substrate 180 is electrically connected to the second light emitting element 120 through the internal wiring 160, so that the driving substrate 180 can further control whether the second light emitting element 120 in the light emitting substrate 170 is lighted up or not, and the lighting intensity and time of the second light emitting element 120 by using the corresponding driving circuit and the internal wiring 160.

On the basis of realizing blue-green or blue-red mixed light emission, the light emitting brightness of the light emitting elements can be changed by controlling the light emitting intensities of the first light emitting element, the second light emitting element 120 and the third light emitting element, so that mixed light emission with more colors can be realized, and the mixed light emission structure of the Micro LED can be facilitated to form true color image display.

It will be appreciated that the driving substrate 180 is used to provide the circuit logic of the internal light emitting element, such as the second light emitting element 120, to drive the internal light emitting element in a circuit manner, thereby allowing the internal light emitting element to emit light. Illustratively, the drive substrate 180 may be a complementary metal oxide semiconductor (Complementary Metal Oxide Semiconductor, CMOS) drive substrate, a thin film field effect transistor (Thin Film Transistor, TFT) drive substrate, or other type of drive substrate, without limitation.

In some embodiments, the first light emitting element 110 and the third light emitting element 130 are self-luminescent devices or photoluminescent devices.

The self-light emitting device is a light emitting element that emits light when driven by the drive substrate 180, and the photoluminescent device is a light emitting element that emits light when excited by light. It is to be understood that the second light emitting element 120 is a self-light emitting device, that is, the self-light emitting device is electrically connected with the driving substrate 180 by using the light emitting substrate 170 where the self-light emitting device is located, and is driven by the circuit of the driving substrate 180 to emit light; the photoluminescent device generally utilizes a quantum dot material to prepare a light-emitting element, and a corresponding light-emitting chip (such as a second light-emitting element 120) is disposed on the backlight side of the light-emitting element prepared by quantum dots, so that the quantum dots in the light-emitting element are excited by light emitted by the light-emitting chip, and light with a desired color is further emitted.

Illustratively, when the first light emitting element 110 and the third light emitting element 130 are self-luminous devices, they may be connected to the driving substrate 180 by the internal wiring 160, and when the first light emitting element 110 and the third light emitting element 130 need to be turned on, the driving circuit of the driving substrate 180 is used to control the first light emitting element 110 and the third light emitting element 130 to be turned on, thereby realizing self-luminescence for the first light emitting element 110 and the third light emitting element 130; alternatively, when the first light emitting element 110 and the third light emitting element 130 are photoluminescent devices, quantum dots of corresponding colors may be filled in the first light emitting element 110 and the third light emitting element 130, for example, green or red quantum dots may be filled according to different light emitting requirements of the first light emitting element 110 and the third light emitting element 130, and when the first light emitting element 110 and the third light emitting element 130 need to be lit, light emitted by the light emitting chip excites the quantum dots of corresponding types (green or red quantum dots) to realize green light emission or red light emission, and specific device types of the first light emitting element 110 and the third light emitting element 130 are not limited herein.

It should be noted that, in the case of mixed light emission, when the first light emitting element 110 and the third light emitting element 130 are self-light emitting devices or photoluminescent devices, the principle of realizing mixed light emission with the second light emitting element 120 can be understood, and will not be described herein.

On the basis of the above embodiment, the embodiment of the present disclosure further provides a method for preparing a Micro LED hybrid light emitting structure, which is used for preparing any one of the Micro LED hybrid light emitting structures provided in the above embodiment, and has a corresponding beneficial effect.

Fig. 8 is a schematic flow chart of a preparation method of a Micro LED hybrid light emitting structure according to an embodiment of the disclosure. Referring to fig. 8, the method includes:

s210, preparing a second light emitting element and providing a first light emitting element and a third light emitting element.

Specifically, on the basis of the provided first light-emitting element and third light-emitting element, the second light-emitting element may be prepared from the material of the light-emitting substrate (gallium nitride substrate), and further the reflective structure surrounding the second light-emitting element may be formed by a process such as photolithography or etching.

For example, a patterned structure is formed by photolithography and etching at the position of the second light emitting element, then a lateral first blue light reflective layer (such as DBR) and an upper blue light collimating layer (such as DBR) are formed by chemical vapor deposition (Chemical Vapor Deposition, CVD), photolithography and etching, and finally a bottom second blue light reflective layer (such as ODR) is formed by chemical vapor deposition, photolithography and etching, thereby forming the second light emitting element and a reflective structure surrounding the second light emitting element.

S220, forming an electro-optical modulation element on the light-emitting surface side of the second light-emitting element.

Specifically, on the basis of the second light emitting element that has been formed, the fourth electro-refractive body on the light emitting side of the second light emitting element may be first prepared, then the spectroscopic structure above the fourth electro-refractive body is prepared, and finally the first electro-refractive body, the second electro-refractive body, and the third electro-refractive body above the spectroscopic structure are prepared, thereby forming the electro-optical modulating element on the light emitting side of the second light emitting element, and the specific process for forming the electro-optical modulating element will be exemplified later.

S230, forming a first light emitting element and a third light emitting element on one side of the electro-optical modulation element away from the second light emitting element.

The first light-emitting element and the third light-emitting element are respectively used for emitting one of green light and red light and have different light-emitting colors; the electro-optical modulation element is at least used for adjusting a blue light transmission path based on electric control, and guiding the blue light to the first light-emitting element or the third light-emitting element to emit light by blue-green or blue-red mixture.

On the basis of the formed electro-optical modulation element, a first light-emitting element and a third light-emitting element are respectively formed above the electro-optical modulation element, and the first light-emitting element and the second light-emitting element correspond to independent pixel areas respectively, so that vertical projections of the first light-emitting element, the second light-emitting element and the third light-emitting element on a plane where a light-emitting surface is located are staggered, and the subsequent realization of mixed light-emitting of different colors is facilitated.

It should be noted that, for the luminous efficiency of green light, blue light and red light, the luminous efficiency of blue light, green light and red light is known to decrease in sequence, correspondingly, the energy of blue light, green light and red light decrease in sequence, in order to ensure the better luminous efficiency of green light, blue light and red light in the Micro LED mixed light emitting structure, so as to avoid excessive loss of energy, corresponding luminous elements can be set according to different heights. For example, when the first light emitting element is used to emit green light and the third light emitting element is used to emit red light, the first light emitting element may be disposed at a lower height position than the third light emitting element in the same vertical light emitting direction and for different pixel regions.

As the green light, the blue light and the red light have different luminous efficiencies, and the Micro LED mixed light emitting structure is combined, the second reflecting element correspondingly reflects the green light, and the third reflecting element correspondingly reflects the red light, the reflectivity of the third reflecting element is larger than that of the second reflecting element, so that the better red light reflecting effect can be realized.

Fig. 9 is a schematic diagram of an arrangement structure of a first light emitting element, a second light emitting element, and a third light emitting element according to an embodiment of the disclosure. Referring to fig. 9, fig. 9 shows a schematic top view of a Micro LED hybrid light emitting structure, and in combination with fig. 9, it can be seen that, due to the characteristics of lowest energy of red light and highest energy of blue light, in order to achieve balanced matching of energy, when a first light emitting element is used for emitting green light and a third light emitting element is used for emitting red light, one first light emitting element 110, one second light emitting element 120 and three third light emitting elements 130 are disposed in a preset area. In fig. 9, the anode of the fourth electro-refractive body corresponding to the second light emitting element 120 has a sidewall, and the anode has a transparent ring structure surrounding the second light emitting element 120 in a plan view, because the anode has a transparent electrode structure.

In other embodiments, two first light emitting elements, one second light emitting element and two third light emitting elements may be provided, and the number of light emitting elements with the lowest light emitting efficiency is only required to be greater than the number of light emitting elements with the highest light emitting efficiency, and the number and arrangement manner of the first light emitting elements, the second light emitting elements and the third light emitting elements are not particularly limited.

In some embodiments, in combination with S220 above, forming the electro-optical modulation element may specifically include the steps of:

step one: a fourth electro-refractive body is prepared on the light-emitting side of the second light-emitting element.

Wherein the fourth electro-refractive body is prepared by physical vapor deposition (Physical Vapor Deposition, PVD), photolithography, etching, and the like on the light emitting side of the second light emitting element, i.e., above. Illustratively, based on the formed second light emitting element, the common cathode may be prepared by physical vapor deposition, photolithography, and etching, the electro-refractive index layer may be prepared by photolithography and etching, and the anode may be prepared by physical vapor deposition, photolithography, and etching, thereby forming the fourth electro-refractive body.

Step two: a light splitting structure is formed on a side of the fourth electro-refractive body facing away from the second light emitting element.

Wherein, above the fourth electro-refractive body, the spectroscopic structure is formed by using processes such as chemical vapor deposition, photolithography, etching, etc. of the spectroscopic structure, and a specific preparation process of the spectroscopic structure is exemplified hereinafter.

Step three: the first electro-refraction body, the second electro-refraction body and the third electro-refraction body are formed on one side of the light-splitting structure, which is away from the fourth electro-refraction body.

Wherein, the first electro-refractive body, the second electro-refractive body and the third electro-refractive body are prepared above the light splitting structure by utilizing the processes of physical vapor deposition (Physical Vapor Deposition, PVD), photoetching, etching and the like.

Illustratively, a second electro-refractive body may be first prepared in alignment with a fourth electro-refractive body, specifically as follows: preparing a cathode by using physical vapor deposition, photoetching and etching processes, preparing an electro-refractive index layer by using photoetching and etching processes, and preparing an anode by using physical vapor deposition, photoetching and etching processes to form a second electro-refractive body; accordingly, the first and third electro-refractors may be prepared according to the above steps, respectively, and will not be described herein.

In other embodiments, the order of preparation of the first, second, and third electro-refractive bodies may be adjusted according to the actual preparation requirements, which is not limited herein.

In some embodiments, in combination with the above steps, forming the spectroscopic structure in the second step may specifically include: the first reflecting element, the second reflecting element, the third reflecting element and the fourth reflecting element are formed on one side of the fourth electro-refractive body facing away from the second light emitting element.

Illustratively, a structure of silicon monoxide (SiOx) material may be prepared by a chemical vapor deposition process, and prepared into a triangular solid support structure by photolithography and etching processes, so as to plate a film above the support structure, i.e., at an inclined position, specifically, as follows: and forming a second reflecting element which is used for carrying out semi-reflection and semi-transmission on the blue light by utilizing a chemical vapor deposition process, and photoetching and etching redundant carrier structures to form a second reflecting element which is obliquely arranged, thereby repeating the preparation steps to obtain a third reflecting element which is arranged to be intersected with the second reflecting element.

It should be noted that the first reflective element and the fourth reflective element may be prepared during the process of preparing the second reflective element and the third reflective element. The first reflective element and the fourth reflective element may be prepared by the above coating process, and the preparation materials of the first reflective element and the fourth reflective element may be gold or silver, and the specific preparation materials and processes of the second reflective element and the third reflective element are not limited herein.

In some embodiments, the method of making further comprises the steps of:

step one: a light emitting substrate and a driving substrate are provided.

Wherein, with the provided light-emitting substrate, further, a second light-emitting element is formed in the light-emitting substrate, and an element such as an electro-optical modulation element associated with the second light-emitting element is subsequently prepared. For example, after the second light emitting element and the surrounding reflective structure are fabricated, the internal wiring of the light emitting substrate may be fabricated by using a damascene process, and then electrically connected to the driving substrate, which will be described later.

Step two: the light-emitting substrate and the driving substrate are electrically connected by using a hybrid bonding method.

After the second light-emitting element and the surrounding reflective structure in the light-emitting substrate are manufactured, the driving substrate can be electrically connected with the light-emitting substrate in a hybrid bonding manner, and then the blue light collimation layer above the second light-emitting element is ground and thinned by using chemical vapor deposition, photolithography and etching processes, so that the driving substrate and the light-emitting substrate can be arranged in association with the electro-optical modulation element. It should be understood that, when the first light emitting element and the third light emitting element are self-luminous devices, the light emitting substrates thereof may be electrically connected to the driving substrate by hybrid bonding.

Therefore, compared with mechanical transfer in the related art, such as transfer accuracy of mass transfer is generally affected by a mechanical motion device, so that the problems of larger distance between formed pixel areas, larger consumption of transfer used power and the like are caused, and the hybrid bonding has lower power consumption and smaller occupied area, thereby being beneficial to preparing the Micro LED hybrid light emitting structure with excellent performance.

It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The foregoing is merely a specific embodiment of the disclosure to enable one skilled in the art to understand or practice the disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the disclosure. Thus, the present disclosure is not intended to be limited to the embodiments shown and described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. Micro LED mixes light-emitting structure, its characterized in that includes: a first light emitting element, a second light emitting element, a third light emitting element, and an electro-optical modulation element;

2. The Micro LED hybrid light extraction structure of claim 1, wherein the electro-optic modulation element comprises a first electro-refractive body, a second electro-refractive body, a third electro-refractive body, and a fourth electro-refractive body;

3. The Micro LED hybrid light extraction structure of claim 2, wherein the first electro-refractive body, the second electro-refractive body, and the third electro-refractive body are disposed at the same level;

4. The Micro LED hybrid light extraction structure of claim 3, wherein the first, second, third and fourth electro-refractors comprise:

5. The Micro LED hybrid light extraction structure of claim 4, wherein the fourth electro-refractive body is co-cathode with the second light emitting element;

6. The Micro LED hybrid light extraction structure of claim 2, wherein the electro-optic modulation element further comprises a light splitting structure;

7. The Micro LED hybrid light extraction structure of claim 6, wherein the light splitting structure comprises a first reflective element, a second reflective element, a third reflective element, and a fourth reflective element;

8. The Micro LED hybrid light extraction structure of claim 7, wherein the first reflective element and the second reflective element are arranged in parallel, and the third reflective element and the fourth reflective element are arranged in parallel;

9. The Micro LED hybrid light extraction structure of claim 5, further comprising a reflective structure;

the reflective structure is disposed around the second light emitting element.

10. The Micro LED hybrid light extraction structure of claim 9, wherein the reflective structure comprises a first blue light reflective layer surrounding at least a portion of the sides of the second light emitting element;

11. The Micro LED hybrid light extraction structure of claim 9, wherein the reflective structure further comprises a blue light collimation layer disposed on the light extraction side of the second light emitting element and embedded inside the common cathode;

12. The Micro LED hybrid light extraction structure of claim 9, wherein the reflective structure further comprises a second blue light reflective layer disposed on the backlight side of the second light emitting element;

13. The Micro LED hybrid light emitting structure of claim 1, further comprising a light emitting substrate and a driving substrate;

14. The Micro LED hybrid light emitting structure of claim 13, wherein the first light emitting element and the third light emitting element are self-luminescent devices or photoluminescent devices.

15. A method for preparing a Micro LED hybrid light emitting structure, which is characterized by being used for preparing the Micro LED hybrid light emitting structure according to any one of claims 1 to 14; the method comprises the following steps:

16. The method of manufacturing according to claim 15, wherein the forming the electro-optical modulation element comprises:

17. The method of manufacturing according to claim 16, wherein the forming the spectroscopic structure comprises:

18. The method of manufacturing according to claim 15, further comprising:

providing a light-emitting substrate and a driving substrate;