CN116374437B - Semiconductor ultrapure chemical storage tank - Google Patents
Semiconductor ultrapure chemical storage tank Download PDFInfo
- Publication number
- CN116374437B CN116374437B CN202310662804.7A CN202310662804A CN116374437B CN 116374437 B CN116374437 B CN 116374437B CN 202310662804 A CN202310662804 A CN 202310662804A CN 116374437 B CN116374437 B CN 116374437B
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- seat
- pipe
- pressure
- tank body
- top cover
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- 239000000126 substance Substances 0.000 title claims abstract description 54
- 238000003860 storage Methods 0.000 title claims abstract description 31
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 238000007789 sealing Methods 0.000 claims abstract description 32
- 210000001503 joint Anatomy 0.000 claims abstract description 26
- 230000000149 penetrating effect Effects 0.000 claims abstract 2
- 238000005260 corrosion Methods 0.000 claims description 9
- 230000003014 reinforcing effect Effects 0.000 claims description 8
- 238000003032 molecular docking Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 238000003780 insertion Methods 0.000 claims 2
- 230000037431 insertion Effects 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 abstract description 31
- 238000009434 installation Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 5
- 230000008961 swelling Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 4
- 241000309551 Arthraxon hispidus Species 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 210000000438 stratum basale Anatomy 0.000 description 2
- 208000012260 Accidental injury Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D90/00—Component parts, details or accessories for large containers
- B65D90/02—Wall construction
- B65D90/022—Laminated structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D90/00—Component parts, details or accessories for large containers
- B65D90/22—Safety features
- B65D90/32—Arrangements for preventing, or minimising the effect of, excessive or insufficient pressure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/50—Reuse, recycling or recovery technologies
- Y02W30/80—Packaging reuse or recycling, e.g. of multilayer packaging
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Abstract
The invention relates to the field of storage tanks, in particular to a semiconductor ultrapure chemical storage tank which comprises a tank body, wherein the tank body is of a three-layer structure, the top of the tank body is connected with a top cover in a sealing way, an installation seat with a sealing ring is arranged on the top cover, an absorption pipe is arranged on the installation seat, a pressure relief pipe is arranged on the absorption pipe, a channel structure which is pushed to open is arranged on the pressure relief pipe, a guide rail is arranged on the absorption pipe, a lifting seat is connected on the guide rail in a sliding way, a middle swivel seat is fixedly arranged on the lifting seat, a butt joint is arranged on the middle swivel seat, a movable rod is arranged on the butt joint in a penetrating way in a sliding way, a pushing block is fixedly connected on the movable rod, a butt joint ring is movably arranged on the pressure relief pipe, a pressure valve structure with a threshold value opening adjusting function is arranged on the inlet pipe, an inserting block is arranged on the installation seat, and the inserting block is connected in a quick locking structure of the top cover; the invention can achieve the purpose of effectively preventing the tank body from swelling and deforming in the process of storing chemicals.
Description
Technical Field
The invention relates to the technical field of storage tanks, in particular to a semiconductor ultrapure chemical storage tank.
Background
In the semiconductor industry, there is an increasing demand for ultrapure chemicals. These chemicals play a critical role in the semiconductor manufacturing process, including cleaning, etching, deposition, and other critical process steps in the manufacture. The requirement of ultra-purity places stringent demands on the equipment for storing and transporting these chemicals to ensure their purity and safety.
At present, the storage tank generally has high purity, excellent sealing performance and corrosion resistance so as to ensure the quality and safety of chemicals in the storage and transportation processes. However, most of the existing semiconductor chemicals are liquid or gas, the volume change can be caused by the temperature during daily storage, the liquid expanding in the storage tank can generate pressure from inside to outside on the storage tank, if the pressure is not released in time, the chemical can be sprayed out during opening the tank, the environment can be polluted, and accidental injury can be caused to a user.
Disclosure of Invention
The invention aims to provide a semiconductor ultrapure chemical storage tank so as to achieve the purpose of effectively preventing the tank body from expanding and deforming in the chemical storage process and solve the problems in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a semiconductor ultrapure chemicals storage tank, includes the jar body, the jar body is three layer construction, including stratum basale, reinforcement layer and anticorrosive coating, and the top sealing connection of jar body has the top cap, be provided with the mount pad that has the sealing washer on the top cap, and be provided with the absorption pipe on the mount pad, arrange on the absorption pipe and be provided with the pressure release pipe, and be provided with the channel structure that is pushed open on the pressure release pipe, be provided with the guide rail on the absorption pipe, and sliding connection has the elevating socket on the guide rail, the lift of elevating socket is controlled through the lead screw that sets up on the mount pad, and fixedly mounted has well swivel mount on the elevating socket, and is provided with the butt joint head on the swivel mount, run-through slidable mounting has the movable rod on the butt joint head, and fixedly connected with ejector pad on the movable rod, and fixedly connected with second spring on the ejector pad, the tip of movable rod is provided with the fillet, and the last butt joint ring that is provided with of pressure release pipe, and advance to be provided with on the pipe and open the pressure valve structure that threshold value adjusted function has on the installation seat, be provided with the plug-in the quick lock structure in the plug-in the quick lock structure.
Preferably, the tank body is a round tank, the reinforcing layer is arranged on the outer wall of the basal layer, the anti-corrosion layer is arranged on the inner wall of the basal layer, and the top cover is provided with a feed inlet.
Preferably, the top cover is provided with a mounting groove, the mounting seat is arranged in the mounting groove, the sealing ring is tightly connected with the top surface of the top cover, the absorption pipe is vertically connected to the bottom of the mounting seat, and the pressure relief pipes are arranged along the direction of the absorption pipe at equal intervals.
Preferably, the port of pressure release pipe seals the setting, and is provided with through-hole and locating part on it, slidable mounting has the baffle in the locating part, and fixedly connected with first spring on the baffle, be provided with connecting hole and center piece on the baffle.
Preferably, the through holes and the connecting holes are both arranged in two, initial positions of the through holes and the connecting holes are staggered, the first springs are connected to two sides of the baffle, and the center block is arranged in the middle of the side wall of the baffle.
Preferably, the lead screw is vertically connected to the bottom of the mounting seat, and the lead screw is controlled by the stepping motor, the guide rail is vertically arranged, the lifting seat adopts a nut structure, and a limiting foot is arranged on the lifting seat and is connected with the guide rail.
Preferably, the transfer seat sets up the side at the elevating seat, the ejector pad is connected perpendicularly on the movable rod, be provided with the internal thread in the butt joint circle, and pressure release pipe and butt joint are last all to be provided with the external screw thread.
Preferably, advance pipe and butt joint all and transit seat intercommunication, and the pressure valve structure is including setting up the retaining ring at advancing the pipe port, slidable mounting has the closing plate in advancing the pipe, and fixedly connected with pressure plate on the closing plate, advance to rotate on the pipe and install the adjusting ring, and annular is provided with adjustable spring on the adjusting ring, and is provided with the breach on the pressure plate.
Preferably, the external diameter of the closing plate is smaller than the internal diameter of the inlet pipe, the external diameter of the closing plate is larger than the internal diameter of the check ring, the closing plate is arranged in the inlet pipe in a limiting sliding manner, four adjustable springs are arranged, the elastic coefficients of the four adjustable springs are different, and the end parts of the adjustable springs are in contact connection with the side surfaces of the pressure plate.
Preferably, the insert block is provided with a positioning hole, the quick locking structure comprises a locking seat arranged on the top cover, the insert block is inserted into the locking seat, a spring insert rod is arranged on the locking seat, a back plate is fixedly connected to the spring insert rod, an inclined surface rod is arranged on the back plate, and the inclined surface of the inclined surface rod is in contact connection with the top surface of the mounting seat.
Compared with the prior art, the invention has the beneficial effects that:
1. the semiconductor ultrapure chemical storage tank can effectively prevent the problem of expansion deformation in the chemical storage process, ensures the purity and quality of chemicals, improves the reliability and safety of the storage tank, firstly, the storage tank body is designed by a multi-layer structure, comprises a basal layer, a reinforcing layer and an anti-corrosion layer, effectively prevents the storage tank from expansion deformation under the action of the internal pressure of the chemicals, keeps the stability and the integrity of the storage tank, secondly, an automatic absorption and decompression type expansion prevention structure is arranged in the storage tank body, and pressure release pipes are arranged at different heights of the absorption pipes, when the internal pressure of the storage tank exceeds the limit, the pressure valve structure can be automatically opened, so that the chemicals are transposed into the absorption pipes from the absorption pipes, the pressure in the storage tank is reduced, and the expansion deformation of the storage tank is avoided.
2. According to the invention, the inlet pipe with the pressure valve structure is arranged on the middle rotary seat, when the pressure in the storage tank exceeds the limit, the pressure valve structure is opened, chemicals are guided into the inlet pipe and the absorption pipe, the amount of the chemicals in the storage tank is reduced, the pressure is relieved, the opening threshold value of the pressure valve structure can be changed by adjusting the height of the middle rotary seat and the internal resistance of the pressure valve structure, the practical use is more flexible, and the selection and adjustment can be performed according to the types of the chemicals.
3. The anti-expansion structure is easy to adjust and maintain, the mounting seat is convenient to detach, the anti-expansion structure can be quickly installed and detached, adjustment and cleaning work are convenient, and meanwhile, the tightness of the mounting seat and the storage tank is ensured.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention.
FIG. 2 is a schematic view of the structure of the tank of the present invention.
FIG. 3 is a schematic view of an expansion preventing structure according to the present invention.
Fig. 4 is a schematic view of the absorber tube and mount structure of the present invention.
Fig. 5 is a schematic view of the mounting structure of the present invention.
Fig. 6 is a schematic view showing the mounting structure of the present invention in a disassembled state.
Fig. 7 is a schematic view of the absorber tube structure of the present invention.
Fig. 8 is an exploded view of the structure of the pressure relief tube of the present invention.
Fig. 9 is an exploded view of the movable transfer seat structure of the present invention.
Fig. 10 is an exploded view of the structure of the pressure valve of the present invention.
In the figure: the tank body 1, the base layer 101, the reinforcing layer 102, the anti-corrosion layer 103, the top cover 2, the mounting seat 3, the sealing ring 4, the absorption tube 5, the pressure relief tube 6, the through hole 7, the limiting piece 8, the baffle 9, the first spring 10, the connecting hole 11, the central block 12, the guide rail 13, the lifting seat 14, the limiting foot 15, the screw rod 16, the middle rotating seat 17, the pushing block 18, the second spring 19, the movable rod 20, the butt joint ring 21, the inlet tube 22, the retainer ring 23, the sealing plate 24, the pressure plate 25, the adjusting ring 26, the adjustable spring 27, the notch 28, the plug 29, the positioning hole 30, the locking seat 31, the spring plug 32, the back plate 33 and the inclined surface rod 34.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and detailed description, wherein it is to be understood that, under the precondition of no conflict, new embodiments can be formed by any combination of the embodiments or technical features described below, and it should be understood that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 to 10, the present invention provides a technical solution: the utility model provides a semiconductor ultrapure chemicals storage tank, including jar body 1, jar body 1 is three layer construction, including stratum basale 101, stiffening layer 102 and anticorrosive coating 103, and jar body 1's top sealing connection has top cap 2, be provided with the mount pad 3 that has sealing washer 4 on the top cap 2, and be provided with absorption pipe 5 on the mount pad 3, be provided with pressure release pipe 6 on the absorption pipe 5, and be provided with the channel structure that receives the push open on the pressure release pipe 6, be provided with guide rail 13 on the absorption pipe 5, and sliding connection has lifting seat 14 on the guide rail 13, lifting of lifting seat 14 is controlled through the lead screw 16 that sets up on mount pad 3, and fixed mounting has well swivel mount 17 on lifting seat 14, and be provided with the butt joint on the swivel mount 17, run-through slidable mounting has movable rod 20 on the butt joint, and fixedly connected with push block 18 on the movable rod 20, and fixedly connected with second spring 19 on the push block 18, the tip of movable rod 20 is provided with the fillet, and the movable being provided with docking collar 21 on the pressure release pipe 6, be provided with on the transfer seat 17 and advance pipe 22, and advance and be provided with on the pipe 22 and have the pressure adjusting valve 29 on the quick-release structure and have the threshold value locking structure 29 in the quick-release structure.
The tank body 1 is a round tank, the reinforcing layer 102 is arranged on the outer wall of the base layer 101, the anti-corrosion layer 103 is arranged on the inner wall of the base layer 101, and the top cover 2 is provided with a feed inlet.
The chemical storage tank has expansion resistance, the tank body 1 adopts a multilayer structure, the main body is a basal layer 101 with high strength, the anti-corrosion layer 103 is arranged inside to contain chemicals, the reinforcing layer 102 is arranged outside to further improve the strength of the tank body 1, and the tank body 1 is effectively prevented from expanding and deforming under the action of internal pressure.
The top cover 2 is provided with a mounting groove, the mounting seat 3 is arranged in the mounting groove, the sealing ring 4 is tightly connected with the top surface of the top cover 2, the absorbing pipe 5 is vertically connected to the bottom of the mounting seat 3, and the pressure relief pipes 6 are arranged at equal intervals along the direction of the absorbing pipe 5.
Meanwhile, an automatic absorption and decompression type expansion preventing structure is arranged on the tank body 1 by means of the top cover 2, the expansion preventing structure takes the installation seat 3 as an installation basis, the absorption pipe 5 is inserted into the tank body 1, and the tank body is sealed by the sealing ring 4, so that the cleanliness of chemicals is ensured.
The port of pressure release pipe 6 seals the setting, and is provided with through-hole 7 and locating part 8 on it, slidable mounting has baffle 9 in the locating part 8, and fixedly connected with first spring 10 on the baffle 9, the other end of first spring 10 and the inner wall fixed connection of pressure release pipe 6 are provided with connecting hole 11 and center piece 12 on the baffle 9.
According to the invention, the pressure relief pipe 6 is arranged at different heights of the absorption pipe 5, and when the pressure of chemicals in the tank body 1 exceeds the limit, the chemicals can enter the absorption pipe 5 from the pressure relief pipe 6, so that the space of the absorption pipe 5 is utilized, the pressure in the tank body 1 is effectively reduced, and the expansion deformation of the tank body 1 is prevented.
The through holes 7 and the connecting holes 11 are both arranged in two, initial positions of the through holes and the connecting holes are staggered, the first springs 10 are connected to two sides of the baffle 9, and the center block 12 is arranged in the middle of the side wall of the baffle 9.
The pressure release pipe 6 sets up on different heights, and under the general circumstances, pressure release pipe 6 is the closed state, and baffle 9 fixed position under the restriction of first spring 10, and connecting hole 11 and through-hole 7 on it stagger, and the chemical can not directly enter into pressure release pipe 6, only when center piece 12 is driven by the top, drives baffle 9 and removes for on connecting hole 11 and through-hole 7 are right, pressure release pipe 6 can be opened the passageway.
The lead screw 16 is vertically connected to the bottom of the mounting seat 3, the lead screw 16 is controlled by a stepping motor, the guide rail 13 is vertically arranged, the lifting seat 14 adopts a nut structure, and the lifting seat 14 is provided with a limiting foot 15, and the limiting foot 15 is connected with the guide rail 13.
If the chemicals are high-density liquid, the positions with different heights have pressures with different magnitudes, and the lifting seat 14 can be driven to adjust the height by the rotation of the screw rod 16 according to actual conditions, the middle rotary seat 17 is driven to different heights to be communicated with the pressure relief pipe 6 at the position, and the pressure relief work is completed by the pressure relief pipe 6 at the position.
The middle swivel mount 17 is arranged on the side surface of the lifting seat 14, the push block 18 is vertically connected to the movable rod 20, an internal thread is arranged in the butt joint ring 21, and external threads are arranged on the pressure release pipe 6 and the butt joint.
When the middle rotary seat 17 is moved to the pressure relief pipe 6 with a certain height through the lifting seat 14, the butt joint of the middle rotary seat 17 is connected with the end face of the pressure relief pipe 6, the push block 18 is moved to the center block 12, the butt joint ring 21 can be used for sealing connection of the middle rotary seat 17 and the pressure relief pipe, when the butt joint ring 21 is moved to the butt joint, the movable rod 20 can be internally pressed along the round angle, the movable rod 20 drives the push block 18 to move, pressure is slowly applied, the center block 12 drives the baffle 9 to move, the connecting hole 11 and the through hole 7 are arranged in pairs, and the pressure relief pipe 6 is communicated with the middle rotary seat 17 through the butt joint.
The inlet pipe 22 and the butt joint are both communicated with the transfer seat 17, the pressure valve structure comprises a check ring 23 arranged at the port of the inlet pipe 22, a sealing plate 24 is slidably arranged in the inlet pipe 22, the sealing plate 24 is positioned in a cavity formed by the inlet pipe 22 and the check ring 23, a pressure plate 25 is fixedly connected to the sealing plate 24, an adjusting ring 26 is rotatably arranged on the inlet pipe 22, an adjustable spring 27 is annularly arranged on the adjusting ring 26, and a notch 28 is arranged on the pressure plate 25.
The transfer seat 17 is provided with the inlet pipe 22, and the pressure valve structure is arranged on the inlet pipe, so that when the internal pressure of the tank body 1 exceeds the limit, the pressure valve structure can be opened, chemicals enter the inlet pipe 22 and the transfer seat 17, and then enter the absorption pipe 5 from the pressure release pipe 6, the pressure is relieved by reducing the amount of the chemicals in the tank body 1, and the expansion of the tank body 1 is effectively prevented.
The external diameter of the closing plate 24 is smaller than the internal diameter of the inlet pipe 22, the external diameter of the closing plate 24 is larger than the internal diameter of the check ring 23, the closing plate 24 is arranged in the inlet pipe 22 in a limiting sliding manner, four adjustable springs 27 are arranged, the elastic coefficients of the four adjustable springs 27 are different, and the end parts of the adjustable springs 27 are in contact connection with the side surfaces of the pressure plate 25.
Normally, the elasticity of the adjustable spring 27 acts on the pressure plate 25, so that the pressure plate 25 drives the sealing plate 24 to be tightly connected with the check ring 23 to seal the inlet pipe 22, and when the internal pressure exceeds the limit, the pressure of the chemical acts on the pressure plate 25, so that the pressure plate 25 drives the sealing plate 24 to move inwards in the inlet pipe 22, the sealing plate 24 is separated from the check ring 23, and the external chemical can enter the inlet pipe 22 and finally enter the absorption pipe 5 to complete the pressure relief work.
The position of the adjustable spring 27 can be changed through the rotation of the adjusting ring 26, so that the springs with different elasticity act on the pressure plate 25 or enter the notch 28 to achieve the effect of adjusting the opening threshold value of the channel, so that the internal pressure required by the movement of the sealing plate 24 is changed, a worker can adjust according to the requirement, and meanwhile, the lifting seat 14 drives the middle rotary seat 17 to be connected with the pressure relief pipe 6 with different heights to achieve the effect of adjusting the threshold value, because the pressure applied to the pressure plate 25 is different in liquid chemicals with different depths.
The insert block 29 is provided with a positioning hole 30, the quick locking structure comprises a locking seat 31 arranged on the top cover 2, the insert block 29 is inserted into the locking seat 31, a spring insert rod 32 is arranged on the locking seat 31, a back plate 33 is fixedly connected to the spring insert rod 32, a bevel rod 34 is arranged on the back plate 33, and the bevel of the bevel rod 34 is in contact connection with the top surface of the mounting seat 3.
The mount pad 3 and the pressure release formula expansion preventing structure of bottom thereof can be convenient take out from jar body 1, on the one hand be convenient for clean, on the other hand be convenient for adjust the pressure release threshold value, during the mount pad 3 installation, insert the locking seat 31 with the inserted block 29 in, utilize spring inserted bar 32 to carry out the fixed of inserted block 29, and the inclined plane pole 34 of connecting on the spring inserted bar 32 can press on mount pad 3, guarantee the quick stable installation of mount pad 3, make sealing washer 4 zonulae occludens play sealed effect, protect jar internal chemical product, otherwise, also can dismantle the quick dismantlement of expansion preventing structure of mount pad 3 intercommunication, accomplish preconditioning and cleaning work in the outside.
The invention is used when in use: firstly, the chemical storage tank of the invention has expansion preventing capability, the tank body 1 adopts a multilayer structure, the main body is a substrate layer 101 with larger strength, the inside is provided with an anti-corrosion layer 103 for containing chemicals, the outside is provided with a reinforcing layer 102 for further improving the strength of the tank body 1, and effectively preventing the tank body 1 from expanding and deforming under the internal pressure, meanwhile, the tank body 1 is provided with an automatic absorption type expansion preventing structure by means of a top cover 2, the expansion preventing structure takes a mounting seat 3 as a mounting base, an absorption pipe 5 is inserted into the tank body 1, and the tank body is sealed by a sealing ring 4, so as to ensure the cleanliness of chemicals, the invention sets a pressure relief pipe 6 on different heights of the absorption pipe 5, and when the internal chemical pressure of the tank body 1 exceeds the limit, the chemicals can enter the absorption pipe 5 from the pressure relief pipe 6, the space of the absorption tube 5 is utilized, the pressure in the tank body 1 is effectively reduced, the expansion deformation of the tank body 1 is prevented, the pressure relief tube 6 is arranged at different heights, in general, the pressure relief tube 6 is in a closed state, the baffle plate 9 is fixed at a position under the limit of the first spring 10, the connecting hole 11 and the through hole 7 are staggered, chemicals cannot directly enter the pressure relief tube 6, the pressure relief tube 6 is opened only when the center block 12 is pushed to drive the baffle plate 9 to move, the connecting hole 11 and the through hole 7 are opposite, if the chemicals are high-density liquid, the pressure of different heights has obvious different pressures, the height can be adjusted by driving the lifting seat 14 through the rotation of the screw rod 16 according to actual conditions, the middle rotary seat 17 is driven to be communicated with the pressure relief tube 6 at different heights, the pressure relief tube 6 at the position is used for completing pressure relief work, when the middle swivel seat 17 is moved to the pressure relief pipe 6 with a certain height through the lifting seat 14, the butt joint of the middle swivel seat 17 is connected with the end face of the pressure relief pipe 6, the push block 18 is moved to the center block 12, the butt joint ring 21 can be used for carrying out sealing connection of the two, when the butt joint ring 21 is moved to the butt joint, the movable rod 20 can be internally pressed along the round angle, the movable rod 20 drives the push block 18 to move, pressure is slowly applied, the center block 12 drives the baffle 9 to move, the connecting hole 11 and the through hole 7 are arranged oppositely, the pressure relief pipe 6 is communicated with the transit seat 17 through the butt joint, the transit seat 17 is provided with the inlet pipe 22, the pressure valve structure is arranged on the transit seat 17, when the internal pressure of the tank body 1 exceeds the limit, the pressure valve structure can be opened, chemicals can enter the pressure relief inlet pipe 22 and the transit seat 17, and then enter the absorption pipe 5 from the tank body 6, the pressure is relieved by reducing the amount of the chemicals in the tank body 1, the tank body 1 is effectively prevented from expanding, under normal conditions, the elastic force of the adjustable spring 27 acts on the pressure plate 25, so that the pressure plate 25 drives the sealing plate 24 to be tightly connected with the check ring 23 to seal the inlet pipe 22, when the internal pressure exceeds the limit, the pressure of chemicals acts on the pressure plate 25, so that the pressure plate 25 drives the sealing plate 24 to move in the inlet pipe 22, the sealing plate 24 is separated from the check ring 23, external chemicals can enter the inlet pipe 22 and finally enter the absorption pipe 5 to complete pressure release work, the position of the adjustable spring 27 can be changed through the rotation of the adjusting ring 26, the springs with different elastic forces act on the pressure plate 25 or enter the notch 28 to achieve the effect of adjusting the opening threshold value of the channel, so that the internal pressure required by the movement of the sealing plate 24 is changed, and staff can adjust according to requirements, meanwhile, the lifting seat 14 drives the middle rotary seat 17 to be connected with the pressure relief pipe 6 with different heights to achieve the effect of adjusting the threshold value, because in liquid chemicals with different depths, the pressure plate 25 is different in pressure, the mounting seat 3 and the pressure relief type expansion preventing structure at the bottom of the mounting seat can be conveniently taken out of the tank body 1, on one hand, cleaning is convenient, on the other hand, the pressure relief threshold value is convenient to adjust, when the mounting seat 3 is mounted, the insert 29 is inserted into the locking seat 31, the spring insert rod 32 is utilized for fixing the insert 29, the inclined plane rod 34 connected with the spring insert rod 32 can be pressed on the mounting seat 3, the quick and stable mounting of the mounting seat 3 is ensured, the sealing ring 4 is tightly connected to achieve the sealing effect, the chemicals in the tank body 1 are protected, on the contrary, the mounting seat 3 is communicated with the expansion preventing structure to be quickly detached, and the pre-adjustment and cleaning work is completed outside.
The above embodiments are only preferred embodiments of the present invention, and the scope of the present invention is not limited thereto, but various modifications can be made by those skilled in the art without inventive effort from the above concepts, and all modifications are within the scope of the present invention.
Claims (5)
1. A semiconductor ultrapure chemical storage tank comprising a tank body (1), characterized in that: the tank body (1) is of a three-layer structure and comprises a basal layer (101), a reinforcing layer (102) and an anti-corrosion layer (103), a top cover (2) is connected to the top of the tank body (1) in a sealing way, a mounting seat (3) with a sealing ring (4) is arranged on the top cover (2), an absorbing pipe (5) is arranged on the mounting seat (3), a pressure release pipe (6) is arranged on the absorbing pipe (5), the absorbing pipe (5) is vertically connected to the bottom of the mounting seat (3), the pressure release pipes (6) are arranged at equal intervals along the direction of the absorbing pipe (5), ports of the pressure release pipe (6) are closed, through holes (7) and limiting pieces (8) are arranged on the pressure release pipe, a baffle (9) are slidably arranged in the limiting pieces (8), a first spring (10) is fixedly connected to the baffle (9), connecting holes (11) and a center block (12) are arranged on the baffle (9), the through holes (7) and the connecting holes (11) are provided with two initial positions, the two initial positions of the connecting holes (5) are arranged on the first spring (10) and the two sides of the baffle (9) are arranged on the middle part (13), the lifting seat (14) is slidably connected to the guide rail (13), lifting of the lifting seat (14) is controlled through a screw rod (16) arranged on the mounting seat (3), a middle rotary seat (17) is fixedly arranged on the lifting seat (14), a butt joint is arranged on the middle rotary seat (17), a movable rod (20) is arranged on the butt joint in a penetrating sliding manner, a push block (18) is fixedly connected to the movable rod (20), a second spring (19) is fixedly connected to the push block (18), a round angle is arranged at the end part of the movable rod (20), a butt joint ring (21) is movably arranged on the pressure relief pipe (6), a pressure valve structure with a threshold value opening adjusting function is arranged on the middle rotary seat (17), an insertion block (29) is arranged on the mounting seat (3), the insertion block (29) is connected to a quick locking structure of the top cover (2), and the quick locking structure has a falling preventing function;
the utility model provides a pressure regulating device, including lifting seat (14), transfer seat (17) sets up the side at lifting seat (14), ejector pad (18) connect perpendicularly on movable rod (20), be provided with the internal thread in docking collar (21), and all be provided with the external screw thread on pressure release pipe (6) and the docking head, advance pipe (22) and docking head all communicate with transfer seat (17), and the pressure valve structure is including setting up retaining ring (23) in advancing pipe (22) port, slidable mounting has closure plate (24) in advancing pipe (22), and fixedly connected with pressure plate (25) on closure plate (24), rotate on advancing pipe (22) and install adjusting ring (26), and annular on adjusting ring (26) is provided with adjustable spring (27), and be provided with breach (28) on pressure plate (25), the external diameter of closure plate (24) is less than the internal diameter of advancing pipe (22), and the external diameter of closure plate (24) is greater than retaining ring (23), closure plate (24) spacing slidable mounting is in advancing pipe (22), and four adjustable spring coupling (27) and four adjustable spring coupling end portions (27).
2. A semiconductor ultrapure chemical tank as recited in claim 1, wherein: the tank body (1) is a round tank, the reinforcing layer (102) is arranged on the outer wall of the base layer (101), the anti-corrosion layer (103) is arranged on the inner wall of the base layer (101), and the top cover (2) is provided with a feed inlet.
3. A semiconductor ultrapure chemical tank as recited in claim 1, wherein: the top cover (2) is provided with a mounting groove, the mounting seat (3) is arranged in the mounting groove, and the sealing ring (4) is tightly connected with the top surface of the top cover (2).
4. A semiconductor ultrapure chemical tank as recited in claim 1, wherein: the screw rod (16) is vertically connected to the bottom of the mounting seat (3), the screw rod (16) is controlled by the stepping motor, the guide rail (13) is vertically arranged, the lifting seat (14) adopts a nut structure, the lifting seat (14) is provided with a limiting foot (15), and the limiting foot (15) is connected with the guide rail (13).
5. A semiconductor ultrapure chemical tank as recited in claim 1, wherein: be provided with locating hole (30) on inserted block (29), and quick locking structure is including setting up locking seat (31) on top cap (2), and inserted block (29) are pegged graft in locking seat (31), be provided with spring inserted bar (32) on locking seat (31), and fixedly connected with backplate (33) on spring inserted bar (32), be provided with inclined plane pole (34) on backplate (33), and the inclined plane of inclined plane pole (34) is connected with the top surface contact of mount pad (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310662804.7A CN116374437B (en) | 2023-06-06 | 2023-06-06 | Semiconductor ultrapure chemical storage tank |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310662804.7A CN116374437B (en) | 2023-06-06 | 2023-06-06 | Semiconductor ultrapure chemical storage tank |
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| CN116374437A CN116374437A (en) | 2023-07-04 |
| CN116374437B true CN116374437B (en) | 2023-08-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202310662804.7A Active CN116374437B (en) | 2023-06-06 | 2023-06-06 | Semiconductor ultrapure chemical storage tank |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116538710B (en) * | 2023-07-06 | 2023-09-29 | 江苏达达节能科技有限公司 | Sleeve evaporation type condenser |
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| CN215445215U (en) * | 2021-08-24 | 2022-01-07 | 无锡英佛环保资源综合利用有限公司 | Automatic pressure relief and exhaust normal pressure tank |
| CN218494283U (en) * | 2022-10-21 | 2023-02-17 | 浙江凯爱汽配制造有限公司 | Pressure relief valve with adjustable pressure relief threshold |
| CN219116263U (en) * | 2022-12-27 | 2023-06-02 | 辽宁新兴药业股份有限公司 | Storage tank electric control nitrogen sealing device |
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2023
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1272164A (en) * | 1969-11-28 | 1972-04-26 | Bosch Gmbh Robert | Improvements in and relating to a relief valve for a multi-circuit compressed air brake system |
| CN208916538U (en) * | 2018-08-30 | 2019-05-31 | 楼沈嘉 | Used during elevator falling multistage hydraulic buffer |
| CN209291192U (en) * | 2019-01-09 | 2019-08-23 | 山东理工职业学院 | A kind of chemical industry accumulating tank with decompression function |
| CN210527378U (en) * | 2019-08-06 | 2020-05-15 | 无锡氟士德防腐科技有限公司 | Anti-expansion storage tank for storing semiconductor super-chemicals |
| CN212899943U (en) * | 2020-08-03 | 2021-04-06 | 江苏海枫达生物科技有限公司 | Decompression valve of fermentation culture tank body for feed production |
| CN112197953A (en) * | 2020-09-30 | 2021-01-08 | 北京润世安能科技开发有限公司 | Pressure reducing valve off-line adjusting device |
| CN215445215U (en) * | 2021-08-24 | 2022-01-07 | 无锡英佛环保资源综合利用有限公司 | Automatic pressure relief and exhaust normal pressure tank |
| CN218494283U (en) * | 2022-10-21 | 2023-02-17 | 浙江凯爱汽配制造有限公司 | Pressure relief valve with adjustable pressure relief threshold |
| CN219116263U (en) * | 2022-12-27 | 2023-06-02 | 辽宁新兴药业股份有限公司 | Storage tank electric control nitrogen sealing device |
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|---|---|
| CN116374437A (en) | 2023-07-04 |
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