CN116373135A - Crystal ingot overturning mechanism with lifting function - Google Patents
Crystal ingot overturning mechanism with lifting function Download PDFInfo
- Publication number
- CN116373135A CN116373135A CN202310290539.4A CN202310290539A CN116373135A CN 116373135 A CN116373135 A CN 116373135A CN 202310290539 A CN202310290539 A CN 202310290539A CN 116373135 A CN116373135 A CN 116373135A
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- lifting
- turnover
- shaft
- bearing seat
- ingot
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- 230000007246 mechanism Effects 0.000 title claims abstract description 18
- 239000013078 crystal Substances 0.000 title claims description 7
- 239000000919 ceramic Substances 0.000 claims abstract description 21
- 230000007306 turnover Effects 0.000 claims description 28
- 230000001360 synchronised effect Effects 0.000 claims description 26
- 239000003638 chemical reducing agent Substances 0.000 claims description 16
- 241000252254 Catostomidae Species 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 abstract description 2
- 230000003028 elevating effect Effects 0.000 abstract 3
- 230000000694 effects Effects 0.000 abstract 1
- 238000007514 turning Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 12
- 238000005520 cutting process Methods 0.000 description 9
- 230000009471 action Effects 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000003698 laser cutting Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 231100000989 no adverse effect Toxicity 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
The invention discloses an ingot overturning mechanism with an elevating function, which consists of an overturning part and an elevating shaft part, wherein the elevating shaft part provides a proper height position for the overturning part, when a product is placed on a porous ceramic sucker, the vacuum state between the porous ceramic sucker and the product is generated through negative pressure provided by equipment to realize adsorption operation, and meanwhile, a clamping jaw is closed, so that after safety protection is realized on the product, the lifting adjustment and small-range overturning can be performed. The double-shaft structure that the upset combines the lift is adopted, overturns after the lift axle removes the assigned position, has greatly compressed the whole space of equipment, reduces area, and the porous ceramic sucking disc of recycle adsorbs the operation to the ingot, brings safe and stable transportation effect for ingot splitter structure.
Description
Technical Field
The invention relates to an ingot overturning mechanism with a lifting function, and belongs to the technical field of ingot separation processing.
Background
As is well known, ingot cutting is a method of making wafer slices, including saw blade cutting, diamond cutting, laser cutting, and the like. The wafer is easy to crack by cutting with a saw blade, and the method requires that the thickness of the wafer is more than 2mm and the wafer smaller than 2mm is easy to crack, so that great material waste is caused; the loss rate of cutting by the multi-wire cutting machine adopting the diamond cutting wire is up to more than 50%, and when the diamond wire saw is used for cutting the ingot, not only is up to 40% of the ingot turned into waste materials in the form of dust, but also the wafer yield is directly caused to be low, the cutting process of a single wafer can be completed in nearly several hours, and the time cost is seriously increased. Therefore, the problems existing in other methods can be effectively avoided by adopting the laser cutting, and the corresponding mechanical method is adopted after the ingot is cut by the laser, so that not only can the stress still existing in the ingot be eliminated, but also the wafer slices can be rapidly separated. However, the processing technology related to laser cutting has certain specific requirements, the vertical position relationship of the ingot after being separated into a wafer sheet and a secondary thick ingot needs to be accurately adjusted, and the occupied area of equipment is not too large, so that the space utilization rate of the equipment can be improved, the research and development cost is reduced, and the use and maintenance convenience is improved.
Therefore, we provide an ingot turning mechanism with a lifting function, which can realize the turning of an ingot in a very small range space, and can enable the position of the ingot to be moved to a material waiting position of a next working procedure step, thereby meeting the requirement of equipment on the laser processing working procedure step, reducing the occupied area of the equipment and improving the space utilization rate and the use convenience.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides an ingot overturning mechanism with a lifting function.
The aim of the invention is achieved by the following technical scheme: the ingot turning mechanism with the lifting function consists of a turning part and a lifting shaft part, wherein the main function of the lifting shaft part is to provide a proper height position for the turning part.
On the one hand, the turnover part comprises a driving synchronous wheel, a right-angle output type speed reducer, a first servo motor, a turnover bottom plate and a turnover main shaft, wherein the driving synchronous wheel is pressed on an output shaft of the right-angle output type speed reducer through bolts, a driven synchronous wheel is arranged on the shaft side of the turnover main shaft, the driven synchronous wheel and the driving synchronous wheel are arranged on the same plane, the driven synchronous wheel and the driving synchronous wheel realize transmission operation through synchronous belts, the right-angle output type speed reducer is connected with the first servo motor, a support side bearing seat and a fixed side bearing seat which are fixed by bolts are sequentially arranged on the turnover bottom plate, the support side bearing seat and the fixed side bearing seat are respectively supported and fixed at the left end and the right end of the turnover main shaft, and clamping jaws and porous ceramic suckers are arranged on the turnover main shaft through external connecting parts.
On the other hand, the lifting shaft part comprises a lifting bottom plate, a ball screw, a lifting shaft sliding plate and a second servo motor, a screw supporting side bearing seat and a screw fixing side bearing seat are fixedly arranged on the lifting bottom plate through bolts, the upper end and the lower end of the ball screw are respectively supported and installed through the screw supporting side bearing seat and the screw fixing side bearing seat, the ball screw is connected with a screw nut in a threaded pair mode, the ball screw is connected with the second servo motor through a coupler serving as a power transmission bridge, the coupler is connected with the ball screw and a second servo motor shaft in a bolt holding mode, and the lifting shaft sliding plate is in transitional connection with the screw nut through a nut connecting seat and further locks the nut connecting seat through a fastening bolt.
Further, the ingot turning mechanism with lifting function described above, wherein: after the first servo motor is fixedly connected with the right-angle output type speed reducer through bolts, the right-angle output type speed reducer is vertically arranged on the outer side of the lifting shaft sliding plate.
Further, the ingot turning mechanism with lifting function described above, wherein: the lifting bottom plate is fixed on the fixed side bearing seat through bolts, is in a vertical installation structure with the overturning bottom plate, and is provided with a linear guide rail on the inner side.
Further, the ingot turning mechanism with lifting function described above, wherein: one side of the turnover bottom plate is connected with the turnover shaft side fixing plate through a straight nail, and the turnover shaft side fixing plate is fixedly arranged on the inner side of the lifting shaft sliding plate through a bolt.
Still further, the ingot turning mechanism with lifting function described above, wherein: the number of the porous ceramic suckers is three, and the three groups of porous ceramic suckers are distributed on the edge of the clamping jaw of the annular structure at equal angles.
Compared with the prior art, the invention has remarkable advantages and beneficial effects, and is specifically embodied in the following aspects:
(1) according to the invention, the porous ceramic sucker is utilized to absorb and transfer the crystal ingot, the absorption surface of the porous ceramic sucker is smooth and smooth, the absorption performance is reliable, no adverse effect is caused on products, the absorption surface is stressed more uniformly in the overturning process of the crystal ingot under the auxiliary action of the clamping jaw, the safety protection of the clamping jaw is realized, the accidental loss of the products is reduced to the minimum, and the loss rate in the production and processing processes of the products is greatly reduced.
(2) According to the invention, a double-shaft structure combining overturning and lifting is adopted, and small-range overturning of the crystal ingot can be performed after the lifting shaft moves the porous ceramic sucker to a designated position, so that the whole space of the equipment is greatly compressed, the occupied area is reduced, the use cost is reduced, and a safe and stable transportation foundation is provided for the crystal ingot separation equipment structure.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1: the invention comprises a left side view of a partial cross-sectional structure;
fig. 2: the invention comprises a right side view of a partial cross-sectional structure;
fig. 3: the invention is a top view.
The meaning of the reference numerals in the figures is given in the following table:
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present invention, directional terms, order terms, etc. are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
The invention provides an ingot overturning mechanism with a lifting function, which consists of an overturning part and a lifting shaft part, wherein the height of the overturning part is mainly adjusted by the lifting shaft part.
As shown in fig. 1 and 3, the turnover part comprises a driving synchronous wheel 4, a right-angle output type speed reducer 5, a first servo motor 6, a turnover bottom plate 8 and a turnover main shaft 10, the driving synchronous wheel 4 is pressed on the output shaft of the right-angle output type speed reducer 5 through bolts, the driven synchronous wheel 1 is arranged on the shaft side of the turnover main shaft 10, the driven synchronous wheel 1 and the driving synchronous wheel 4 are installed on the same plane, the driving operation is realized through a synchronous belt 3, the right-angle output type speed reducer 5 is fixedly connected with the first servo motor 6 through bolts, the right-angle output type speed reducer 5 is vertically installed on the outer side of a lifting shaft sliding plate 17, a supporting side bearing seat 9 and a fixing side bearing seat 11 which are fixedly arranged on the turnover bottom plate 8 are respectively supported and fixed on the left end and the right end of the turnover main shaft 10, a clamping jaw 21 and a porous ceramic sucker 22 and 21 are installed on the turnover main shaft 10 through external connecting parts, when the porous ceramic sucker 22 is used for adsorbing and the ingot is turned over, the stress of an adsorption surface is more uniform, and unexpected loss of a product is reduced to the minimum in the production and machining process of the product.
As shown in fig. 2, the lifting shaft portion includes a lifting base plate 2, a ball screw 16, a lifting shaft sliding plate 17 and a second servo motor 20, one side of the turning base plate 8 is connected with a turning shaft side fixing plate 13 by a straight nail, the turning shaft side fixing plate 13 is fixedly mounted on the inner side of the lifting shaft sliding plate 17 by a bolt, the lifting base plate 2 is fixed on a fixing side bearing seat 11 by a bolt and is in a vertical mounting structure with the turning base plate 8, and the inner side of the lifting base plate 2 is provided with a linear guide rail 7. The lifting bottom plate 2 is fixedly provided with a screw supporting side bearing seat 12 and a screw fixing side bearing seat 18 through bolts, the upper end and the lower end of a ball screw 16 are respectively supported and installed through the screw supporting side bearing seat 12 and the screw fixing side bearing seat 18, the ball screw 16 is connected with a screw nut 15 through a screw pair, the ball screw 16 provides driving force for the lifting bottom plate through a second servo motor 20, and a lifting shaft sliding plate 17 is in transitional connection with the screw nut 15 through a nut connecting seat 14.
The ball screw 16 and the second servo motor 20 serve as power transmission bridges through the coupler 19, and the coupler 19 is connected with the ball screw 16 and the second servo motor 20 in a shaft mode in a bolt holding mode, so that stable power transmission is guaranteed.
The number of the porous ceramic suckers 22 is three, and the three groups of porous ceramic suckers 22 are distributed on the edge of the clamping jaw 21 of the annular structure at equal angles, the porous ceramic suckers are utilized to absorb and transfer the ingot, the absorption surface of the porous ceramic sucker is smooth and flat, the absorption performance is reliable, and no adverse effect is caused on the product.
When a product is placed on the porous ceramic sucker 22, vacuum between the porous ceramic sucker 22 and the product is generated through negative pressure provided by equipment, meanwhile, the clamping jaw 21 is closed, protection is realized on the product, when the second servo motor 20 is used for power transmission through the coupler 19, the ball screw 16 is driven to perform rotary motion, the rotary motion is converted into linear motion of the screw nut 15 through a threaded pair relationship between the screw nut 15 and the ball screw 16, the screw nut 15 drives the nut connecting seat 14 to realize linear motion of the lifting shaft sliding plate 17, the whole rotating shaft part (comprising other power components) connected to the lifting shaft sliding plate 17 realizes linear motion of the rotating shaft part, and after the whole height is adjusted to a proper position, the second servo motor 20 stops acting; next, the first servo motor 6 for providing power for the turning shaft starts to operate, the angle of power output is bent to 90 degrees through the right-angle output type speed reducer 5, meanwhile, the precision of the rotation angle is improved on the basis of increasing torque, when the right-angle output type speed reducer 5 drives the driving synchronous wheel 4 to move, the synchronous belt 3 continuously drives the driven synchronous wheel 1 to realize the rotation motion, so that the driven synchronous wheel 1 drives the turning main shaft 10 to rotate, the whole turning assembly realizes the rotation motion, the turning function is realized, and after the turning angle reaches 180 degrees, the first servo motor 6 stops moving, the clamping jaw 21 and the porous ceramic sucker 22 are sequentially opened to move a product to the next working position. After the action flow is finished, all the power components of the invention perform the inverse motion of the motion until all the working components return to the initial positions, a group of action cycles are finished, and then the same action flow is performed to enter the next action cycle.
In summary, the invention adopts the double-shaft structure of turning combined with lifting, can turn after the lifting shaft moves to the designated position, greatly compresses the whole space of the equipment, reduces the use area and the whole cost, and also provides a safe and stable operation foundation for the structure of the ingot separating equipment.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily appreciate variations or alternatives within the scope of the present invention.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Claims (6)
1. Crystal ingot tilting mechanism with lift function comprises turnover part and lift axle part, its characterized in that: the turnover part comprises a driving synchronous wheel (4), a right-angle output type speed reducer (5), a first servo motor (6), a turnover bottom plate (8) and a turnover main shaft (10), wherein the driving synchronous wheel (4) is pressed on an output shaft of the right-angle output type speed reducer (5) through bolts, a driven synchronous wheel (1) is arranged on the shaft side of the turnover main shaft (10), the driven synchronous wheel (1) and the driving synchronous wheel (4) are arranged on the same plane, the driving operation of the driven synchronous wheel and the driving synchronous wheel is realized through a synchronous belt (3), the right-angle output type speed reducer (5) is connected with the first servo motor (6), a supporting side bearing seat (9) and a fixing side bearing seat (11) which are fixed through bolts are sequentially arranged on the turnover bottom plate (8), the supporting side bearing seat (9) and the fixing side bearing seat (11) are respectively supported and fixed on the left end and the right end of the turnover main shaft (10), and clamping jaws (21) and porous ceramic suckers (22) are arranged on the turnover main shaft (10) through external connecting parts; the lifting shaft part comprises a lifting bottom plate (2), a ball screw (16), a lifting shaft sliding plate (17) and a second servo motor (20), a screw rod supporting side bearing seat (12) and a screw rod fixing side bearing seat (18) are fixedly arranged on the lifting bottom plate (2) through bolts, the upper end and the lower end of the ball screw (16) are respectively supported and arranged through the screw rod supporting side bearing seat (12) and the screw rod fixing side bearing seat (18), the ball screw (16) is connected with a screw nut (15) through a screw thread pair, the ball screw (16) provides driving force for the ball screw through the second servo motor (20), and the lifting shaft sliding plate (17) and the screw nut (15) are connected in a transitional mode through a nut connecting seat (14) and further lock the nut connecting seat (14) through fastening bolts.
2. An ingot tilting mechanism with lifting function as set forth in claim 1, wherein: after the first servo motor (6) is fixedly connected with the right-angle output type speed reducer (5) through bolts, the right-angle output type speed reducer (5) is vertically arranged on the outer side of the lifting shaft sliding plate (17).
3. An ingot tilting mechanism with lifting function as set forth in claim 1, wherein: one side of the turnover bottom plate (8) is connected with the turnover shaft side fixing plate (13) through straight nails, and the turnover shaft side fixing plate (13) is fixedly arranged on the inner side of the lifting shaft sliding plate (17) through bolts.
4. An ingot tilting mechanism with lifting function as set forth in claim 1, wherein: the lifting bottom plate (2) is fixed on the fixed side bearing seat (11) through bolts, is in a vertical installation structure with the overturning bottom plate (8), and the inner side of the lifting bottom plate (2) is provided with a linear guide rail (7).
5. An ingot tilting mechanism with lifting function as set forth in claim 1, wherein: the ball screw (16) and the second servo motor (20) are used as power transmission bridges through a coupler (19), and the coupler (19) is respectively connected with the ball screw (16) and the second servo motor (20) in a shaft mode by adopting a bolt enclasping mode.
6. An ingot tilting mechanism with lifting function as set forth in claim 1, wherein: the number of the porous ceramic suckers (22) is three, and the three groups of porous ceramic suckers (22) are distributed on the edge of the clamping jaw (21) of the annular structure at equal angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310290539.4A CN116373135A (en) | 2023-03-23 | 2023-03-23 | Crystal ingot overturning mechanism with lifting function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310290539.4A CN116373135A (en) | 2023-03-23 | 2023-03-23 | Crystal ingot overturning mechanism with lifting function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116373135A true CN116373135A (en) | 2023-07-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310290539.4A Pending CN116373135A (en) | 2023-03-23 | 2023-03-23 | Crystal ingot overturning mechanism with lifting function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116373135A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117604598A (en) * | 2024-01-23 | 2024-02-27 | 苏州智程半导体科技股份有限公司 | Wafer overturning mechanism and method for wafer electroplating machine |
-
2023
- 2023-03-23 CN CN202310290539.4A patent/CN116373135A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117604598A (en) * | 2024-01-23 | 2024-02-27 | 苏州智程半导体科技股份有限公司 | Wafer overturning mechanism and method for wafer electroplating machine |
| CN117604598B (en) * | 2024-01-23 | 2024-04-05 | 苏州智程半导体科技股份有限公司 | Wafer blanking mechanism of wafer electroplating machine |
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