CN116371164A - Low-temperature plasma waste gas treatment system and method - Google Patents
Low-temperature plasma waste gas treatment system and method Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 20
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- 238000004458 analytical method Methods 0.000 claims abstract description 37
- 238000011156 evaluation Methods 0.000 claims abstract description 23
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- 239000002699 waste material Substances 0.000 abstract description 5
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- 238000007781 pre-processing Methods 0.000 description 3
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- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
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Abstract
The invention discloses a low-temperature plasma waste gas treatment system and a method, which relate to the technical field of waste gas purification and comprise a waste gas monitoring module, a waste gas analysis module, a power analysis module and an equipment evaluation module; the waste gas analysis module is used for carrying out waste gas treatment grade analysis according to the waste gas component data and the waste gas flow data, and the control center is used for determining the power threshold value of the low-temperature plasma equipment according to the waste gas treatment grade and adjusting the running power of the equipment according to the power threshold value, so that the resource waste is avoided; the waste gas treatment efficiency is improved; the power analysis module is used for carrying out safety deviation coefficient analysis on the periodic power value of the low-temperature plasma equipment and judging whether the low-temperature plasma equipment needs to be subjected to power compensation or not; the equipment evaluation module is used for monitoring the power compensation signal and evaluating equipment protection coefficient FH according to the power compensation signal; to remind the manager to repair and update the low-temperature plasma equipment, and improve the service life and the working efficiency of the low-temperature plasma equipment.
Description
Technical Field
The invention relates to the technical field of waste gas purification, in particular to a low-temperature plasma waste gas treatment system and a low-temperature plasma waste gas treatment method.
Background
Industrial waste gas refers to the generic term for various pollutant-containing gases discharged into the air during the fuel combustion and production processes in the factory of the enterprise. The plasma industrial waste gas treatment technology is used as a new environment pollution treatment technology, and opens up a new idea for the treatment of industrial waste gas due to the characteristics of high-efficiency decomposition of pollutant molecules, low treatment energy consumption and the like. The plasma reaction zone is rich in extremely high matters such as high-energy electrons, ions, free radicals, excited molecules and the like, and pollutants in the waste gas can react with the matters with higher energy, so that the pollutants are decomposed in extremely short time, and various subsequent reactions occur to achieve the aim of degrading the pollutants.
The existing low-temperature plasma equipment is complex in structure, the low-temperature plasma equipment in partial scenes is insufficient in power supply, voltage fluctuation is large, power factors are particularly low, the problems that the power supply condition cannot be improved in time and the electric energy utilization rate is improved exist, and the waste gas treatment efficiency is seriously affected; based on the defects, the invention provides a low-temperature plasma waste gas treatment system and a low-temperature plasma waste gas treatment method.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the invention provides a low-temperature plasma waste gas treatment system and a method.
To achieve the above object, an embodiment according to a first aspect of the present invention provides a low-temperature plasma exhaust gas treatment system, including an exhaust gas monitoring module, an exhaust gas analysis module, a control center, a power monitoring module, a power analysis module, and an equipment evaluation module;
the exhaust gas monitoring module is used for monitoring exhaust gas component data and exhaust gas flow data at the inlet of the low-temperature plasma equipment and transmitting the monitored exhaust gas component data and exhaust gas flow data to the exhaust gas analysis module for analysis of an exhaust gas treatment grade ZL;
the control center is used for determining the power threshold value Gt of the low-temperature plasma equipment according to the waste gas treatment grade ZL and adjusting the operation power of the low-temperature plasma equipment according to the power threshold value Gt; the method comprises the following steps: the database stores a mapping relation table of the exhaust gas treatment grade range and the power threshold value;
the power monitoring module is used for monitoring the periodic power value of the low-temperature plasma equipment, transmitting the monitored periodic power value to the power analysis module for analysis of the safety deviation coefficient Cs, and judging whether the low-temperature plasma equipment needs power compensation or not;
the equipment evaluation module is used for monitoring the power compensation signal and performing equipment protection coefficient FH evaluation according to the power compensation signal; if FH is greater than a preset protection threshold, generating an early warning signal; to remind the manager to repair and update the low-temperature plasma equipment.
Further, the specific analysis steps of the exhaust gas analysis module are as follows:
acquiring exhaust gas component data and exhaust gas flow data; the exhaust gas composition data includes molecular weight information, temperature information, pressure information, and volume concentration information of each gas;
counting the number of gas types in the waste gas as Z1; molecular weight information, temperature information, pressure information and volume concentration information of each gas are marked as PMi, PTi, PPi and PNi in sequence;
the gas mass concentration PRi is calculated by using the formula PRi= (PMi/22.4) × [ 273/(273+PTi) ]× [ PPi/101325 ]. Times.PNi; marking the exhaust gas flow as Lt;
the exhaust gas treatment grade ZL is calculated by using the formula zl=ηχlt× (z1×a1+d1×pr1+d2×pr2+ … +dn×prn), where η is a preset equalization factor, a1 is a coefficient factor, PRn is the mass concentration of the n-th gas, and D1, D2, and Dn are regression parameters of the corresponding gas.
Further, the specific analysis steps of the power analysis module are as follows:
acquiring a periodic power value of low-temperature plasma equipment, and comparing the periodic power value with a power threshold Gt to obtain a power difference CZ; establishing a graph of the power difference CZ changing along with time;
comparing the power difference CZ with a preset difference threshold; if CZ is larger than the preset difference threshold, corresponding curve segments are intercepted in the corresponding curve graph for marking, and the curve segments are marked as deviating curve segments;
in a preset time period, counting the number of deviating curve segments to be P1; integrating all the deviated curve sections with time to obtain a deviated reference area M1; calculating a safety deviation coefficient Cs by using a formula Cs=C1×a3+M1×a4, wherein a3 and a4 are coefficient factors;
comparing the safety deviation coefficient Cs with a preset deviation threshold value; if Cs is larger than the preset deviation threshold, judging that the low-temperature plasma equipment is abnormal in power at the moment, and generating a power compensation signal to a control center.
Further, the specific evaluation steps of the equipment evaluation module are as follows:
in one working cycle of the low-temperature plasma equipment, when a power compensation signal is monitored, automatically counting down, wherein the counting down time is G2 time, and G2 is a preset value;
if a new power compensation signal is monitored in the countdown stage, the countdown is automatically returned to an original value, and the countdown is performed again according to G2; otherwise, the countdown returns to zero, and the timing is stopped;
counting the total frequency of occurrence of the power compensation signal in the countdown stage and marking the total frequency as a compensation frequency CP; counting the duration of the countdown stage as monitoring duration HT; calculating the time difference of the occurrence time of the adjacent power compensation signals to obtain a compensation interval KTi;
comparing the compensation interval KTi with a preset interval threshold; counting the frequency of the KTi being smaller than a preset interval threshold as Zb, and when the KTi is smaller than the preset interval threshold, obtaining the difference value of the KTi and the preset interval threshold and summing to obtain a difference total value GZ; calculating by using a formula cf=zb×g1+gz×g2 to obtain a differential attraction coefficient CF, wherein g1 and g2 are both scale factors;
counting the power consumption of the low-temperature plasma equipment in the countdown stage as E1; the equipment protection coefficient FH of the low-temperature plasma equipment is calculated by using a formula FH= (CP×g3+CF×g4+E1×g5)/(HT×g6), wherein g3, g4, g5 and g6 are coefficient factors.
Further, the control center is used for driving the power compensation module to carry out power compensation on the low-temperature plasma equipment after receiving the power compensation signal, and adjusting the ratio of the power of the low-temperature plasma equipment to the voltage or the current to enable the power to be matched with the voltage or the current so as to reach an equilibrium point.
Further, the period power value refers to a value obtained by accumulating and averaging the power of the collected continuous plurality of voltage signals and current signals.
Further, the low-temperature plasma waste gas treatment method comprises the following steps:
step one: the waste gas analysis module is used for carrying out waste gas treatment grade ZL analysis according to the waste gas component data and the waste gas flow data monitored by the waste gas monitoring module, and the control center is used for determining that the power threshold value of the low-temperature plasma equipment is Gt according to the waste gas treatment grade ZL;
step two: the control center is used for adjusting the operation power of the low-temperature plasma equipment according to the power threshold value Gt; monitoring a periodic power value of the low-temperature plasma equipment through a power monitoring module;
step three: the method comprises the steps of carrying out safety deviation coefficient analysis on a periodic power value of low-temperature plasma equipment through a power analysis module, and judging whether power compensation is needed to be carried out on the low-temperature plasma equipment or not;
step four: monitoring a power compensation signal through an equipment evaluation module and performing equipment protection coefficient FH evaluation according to the power compensation signal; if FH is greater than a preset protection threshold, generating an early warning signal; to remind the manager to repair and update the low-temperature plasma equipment.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, an exhaust gas analysis module analyzes an exhaust gas treatment grade ZL according to the exhaust gas component data and the exhaust gas flow data monitored by an exhaust gas monitoring module, and a control center is used for determining that the power threshold value of low-temperature plasma equipment is Gt according to the exhaust gas treatment grade ZL and adjusting the operation power of the low-temperature plasma equipment according to the power threshold value Gt; resource waste is avoided; the waste gas treatment efficiency is improved;
2. the power monitoring module is used for monitoring the period power value of the low-temperature plasma equipment and transmitting the period power value of the low-temperature plasma equipment to the power analysis module for safety deviation coefficient analysis, and judging whether the low-temperature plasma equipment needs power compensation or not; the equipment evaluation module is used for monitoring the power compensation signal and evaluating equipment protection coefficient FH according to the power compensation signal; if FH is greater than a preset protection threshold, generating an early warning signal; to remind the manager to repair and update the low-temperature plasma equipment; the service life and the working efficiency of the low-temperature plasma equipment are improved; the power factor of the air compression station is improved from the source, the idle work is reduced, the resource waste is avoided, and the waste gas treatment efficiency is further improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a system block diagram of a low temperature plasma exhaust treatment system of the present invention.
FIG. 2 is a schematic block diagram of the low temperature plasma exhaust treatment method of the present invention.
Detailed Description
The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1 to 2, the low-temperature plasma exhaust gas treatment system is applied to low-temperature plasma equipment and comprises an exhaust gas monitoring module, an exhaust gas analysis module, a control center, a database, a power monitoring module, a power analysis module, a power compensation module, an equipment evaluation module and an alarm module;
the exhaust gas monitoring module is used for monitoring exhaust gas component data and exhaust gas flow data at the inlet of the low-temperature plasma equipment and transmitting the monitored exhaust gas component data and exhaust gas flow data to the exhaust gas analysis module; the exhaust gas composition data includes molecular weight information, temperature information, pressure information, and volume concentration information of each gas;
in this embodiment, the exhaust gas comprises one or more of carbon dioxide, carbon disulfide, hydrogen sulfide, fluoride, nitrogen oxides, chlorine, hydrogen chloride, carbon monoxide, lead mercury sulfate, beryllium, soot, and production dust;
the exhaust gas analysis module is used for carrying out exhaust gas treatment grade analysis according to the exhaust gas component data and the exhaust gas flow data, and the specific analysis steps are as follows:
acquiring exhaust gas component data and exhaust gas flow data; counting the number of gas types in the waste gas as Z1; molecular weight information, temperature information, pressure information and volume concentration information of each gas are marked as PMi, PTi, PPi and PNi in sequence; wherein i represents an i-th gas;
obtaining the gas mass concentration according to the calculation type of the gas mass concentration; the gas mass concentration is calculated as: pri= (PMi/22.4) × [ 273/(273+pti) ]× [ PPi/101325] ×pni; wherein PRi is the gas mass concentration;
marking the exhaust gas flow as Lt; calculating to obtain an exhaust gas treatment grade ZL by using a formula ZL=eta×Lt× (Z1×a1+D1×PR1+D2×PR2+ … +Dn×PRn), wherein eta is a preset equalization factor, and a1 is a coefficient factor; PR1, PR2,..prn is the mass concentration of the n-th gas, D1, D2,..and Dn are the corresponding regression parameters;
the waste gas analysis module is used for feeding the waste gas treatment grade ZL back to the control center; the control center is used for determining that the power threshold value of the low-temperature plasma equipment is Gt according to the waste gas treatment grade ZL; the method comprises the following steps:
the database stores a mapping relation table of the exhaust gas treatment grade range and the power threshold value; determining an exhaust gas treatment grade range corresponding to the exhaust gas treatment grade ZL according to the mapping relation table; determining a corresponding power threshold according to the exhaust gas treatment grade range, and marking the power threshold as Gt;
the control center is used for adjusting the running power of the low-temperature plasma equipment according to the power threshold Gt, so that resource waste is avoided; the waste gas treatment efficiency is improved;
the power monitoring module is used for monitoring the periodic power value of the low-temperature plasma equipment and transmitting the monitored periodic power value to the power analysis module; the power monitoring module comprises a plurality of voltage-current transformers, an A/D converter and a preprocessing unit, and comprises the following specific steps:
the voltage-current transformer is used for collecting voltage signals and current signals after the low-temperature plasma equipment is electrified; the voltage-current transformer is connected with the A/D converter, and the digital signal after A/D conversion can correctly reflect the original analog signal, so that the measurement accuracy is improved;
the A/D converter is connected with the preprocessing unit, and the preprocessing unit is used for calculating and obtaining a periodic power value of the low-temperature plasma equipment according to the voltage signals and the current signals, wherein the periodic power value is obtained by accumulating and averaging the power of the collected continuous multiple voltage signals and current signals;
the power analysis module is used for receiving the period power value of the low-temperature plasma equipment and carrying out safety deviation coefficient analysis on the period power value to judge whether the low-temperature plasma equipment needs to be subjected to power compensation or not; the specific analysis steps are as follows:
acquiring a periodic power value of low-temperature plasma equipment, and comparing the periodic power value with a power threshold Gt to obtain a power difference CZ; establishing a graph of the power difference CZ changing along with time;
comparing the power difference CZ with a preset difference threshold; if CZ is larger than the preset difference threshold, corresponding curve segments are intercepted in the corresponding curve graph for marking, and the curve segments are marked as deviating curve segments;
in a preset time period, counting the number of deviating curve segments to be P1; integrating all the deviated curve sections with time to obtain a deviated reference area M1; calculating a safety deviation coefficient Cs by using a formula Cs=C1×a3+M1×a4, wherein a3 and a4 are coefficient factors;
comparing the safety deviation coefficient Cs with a preset deviation threshold value; if Cs is larger than a preset deviation threshold, judging that the low-temperature plasma equipment is abnormal in power at the moment, and generating a power compensation signal;
the power analysis module is used for feeding back a power compensation signal to the control center, and the control center is used for driving the power compensation module to carry out power compensation on the low-temperature plasma equipment after receiving the power compensation signal, and adjusting the ratio of the power of the low-temperature plasma equipment to the voltage or the current so that the power is matched with the voltage or the current to reach an equilibrium point; the service life and the working efficiency of the low-temperature plasma equipment are improved;
the equipment evaluation module is connected with the control center and is used for monitoring the power compensation signal and evaluating the equipment protection coefficient according to the power compensation signal, and the specific evaluation steps are as follows:
in one working cycle of the low-temperature plasma equipment, when a power compensation signal is monitored, automatically counting down, wherein the counting down time is G2 time, and G2 is a preset value;
if a new power compensation signal is monitored in the countdown stage, the countdown is automatically returned to an original value, and the countdown is performed again according to G2; otherwise, the countdown returns to zero, and the timing is stopped;
counting the total frequency of occurrence of the power compensation signal in the countdown stage and marking the total frequency as a compensation frequency CP; counting the duration of the countdown stage as monitoring duration HT; calculating the time difference of the occurrence time of the adjacent power compensation signals to obtain a compensation interval KTi;
comparing the compensation interval KTi with a preset interval threshold; counting the frequency of the KTi being smaller than a preset interval threshold as Zb, and when the KTi is smaller than the preset interval threshold, obtaining the difference value of the KTi and the preset interval threshold and summing to obtain a difference total value GZ; calculating by using a formula cf=zb×g1+gz×g2 to obtain a differential attraction coefficient CF, wherein g1 and g2 are both scale factors;
counting the power consumption of the low-temperature plasma equipment in the countdown stage as E1; normalizing the compensation frequency, the monitoring time length, the difference suction coefficient and the power consumption and taking the numerical value; calculating to obtain the equipment protection coefficient FH of the low-temperature plasma equipment by using a formula FH= (CP×g3+CF×g4+E1×g5)/(HT×g6), wherein g3, g4, g5 and g6 are coefficient factors;
comparing the equipment protection coefficient FH with a preset protection threshold value, and if the FH is larger than the preset protection threshold value, generating an early warning signal; the equipment evaluation module is used for transmitting the early warning signal to the control center;
after receiving the early warning signal, the control center controls the alarm module to give an alarm so as to remind a manager to change the configuration of the low-temperature plasma equipment or maintain and update the low-temperature plasma equipment, so that the power factor of the air compression station is improved from the source, the idle work is reduced, the resource waste is avoided, and the waste gas treatment efficiency is further improved.
The low temperature plasma waste gas treatment method comprises the following steps:
step one: the waste gas analysis module is used for analyzing waste gas treatment grade ZL according to the waste gas component data and the waste gas flow data monitored by the waste gas monitoring module, and the control center is used for determining that the power threshold of the low-temperature plasma equipment is Gt according to the waste gas treatment grade ZL;
step two: the control center is used for adjusting the operation power of the low-temperature plasma equipment according to the power threshold value Gt; monitoring a periodic power value of the low-temperature plasma equipment through a power monitoring module;
step three: the method comprises the steps of carrying out safety deviation coefficient analysis on a periodic power value of low-temperature plasma equipment through a power analysis module, and judging whether power compensation is needed to be carried out on the low-temperature plasma equipment or not;
step four: monitoring the power compensation signal through the equipment evaluation module and performing equipment protection coefficient FH evaluation according to the power compensation signal; if FH is greater than a preset protection threshold, generating an early warning signal; to alert the manager to change the configuration of the low temperature plasma equipment or to repair and update the low temperature plasma equipment.
The above formulas are all formulas with dimensions removed and numerical values calculated, the formulas are formulas which are obtained by acquiring a large amount of data and performing software simulation to obtain the closest actual situation, and preset parameters and preset thresholds in the formulas are set by a person skilled in the art according to the actual situation or are obtained by simulating a large amount of data.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the invention disclosed above are intended only to assist in the explanation of the invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention. The invention is limited only by the claims and the full scope and equivalents thereof.
Claims (7)
1. The low-temperature plasma waste gas treatment system is characterized by comprising a waste gas monitoring module, a waste gas analysis module, a control center, a power monitoring module, a power analysis module and an equipment evaluation module;
the exhaust gas monitoring module is used for monitoring exhaust gas component data and exhaust gas flow data at the inlet of the low-temperature plasma equipment and transmitting the monitored exhaust gas component data and exhaust gas flow data to the exhaust gas analysis module for analysis of an exhaust gas treatment grade ZL;
the control center is used for determining the power threshold value Gt of the low-temperature plasma equipment according to the waste gas treatment grade ZL and adjusting the operation power of the low-temperature plasma equipment according to the power threshold value Gt; the method comprises the following steps: the database stores a mapping relation table of the exhaust gas treatment grade range and the power threshold value;
the power monitoring module is used for monitoring the periodic power value of the low-temperature plasma equipment, transmitting the monitored periodic power value to the power analysis module for analysis of the safety deviation coefficient Cs, and judging whether the low-temperature plasma equipment needs power compensation or not;
the equipment evaluation module is used for monitoring the power compensation signal and performing equipment protection coefficient FH evaluation according to the power compensation signal; if FH is greater than a preset protection threshold, generating an early warning signal; to remind the manager to repair and update the low-temperature plasma equipment.
2. The low temperature plasma exhaust treatment system of claim 1, wherein the specific analysis steps of the exhaust analysis module are:
acquiring exhaust gas component data and exhaust gas flow data; the exhaust gas composition data includes molecular weight information, temperature information, pressure information, and volume concentration information of each gas;
counting the number of gas types in the waste gas as Z1; molecular weight information, temperature information, pressure information and volume concentration information of each gas are marked as PMi, PTi, PPi and PNi in sequence;
the gas mass concentration PRi is calculated by using the formula PRi= (PMi/22.4) × [ 273/(273+PTi) ]× [ PPi/101325 ]. Times.PNi; marking the exhaust gas flow as Lt;
the exhaust gas treatment grade ZL is calculated by using the formula zl=ηχlt× (z1×a1+d1×pr1+d2×pr2+ … +dn×prn), where η is a preset equalization factor, a1 is a coefficient factor, PRn is the mass concentration of the n-th gas, and D1, D2, and Dn are regression parameters of the corresponding gas.
3. The system and method for low temperature plasma exhaust treatment according to claim 1, wherein the specific analysis steps of the power analysis module are:
acquiring a periodic power value of low-temperature plasma equipment, and comparing the periodic power value with a power threshold Gt to obtain a power difference CZ; establishing a graph of the power difference CZ changing along with time;
comparing the power difference CZ with a preset difference threshold; if CZ is larger than the preset difference threshold, corresponding curve segments are intercepted in the corresponding curve graph for marking, and the curve segments are marked as deviating curve segments;
in a preset time period, counting the number of deviating curve segments to be P1; integrating all the deviated curve sections with time to obtain a deviated reference area M1; calculating a safety deviation coefficient Cs by using a formula Cs=C1×a3+M1×a4, wherein a3 and a4 are coefficient factors;
comparing the safety deviation coefficient Cs with a preset deviation threshold value; if Cs is larger than the preset deviation threshold, judging that the low-temperature plasma equipment is abnormal in power at the moment, and generating a power compensation signal to a control center.
4. The system and method for low temperature plasma exhaust treatment of claim 3, wherein the specific evaluation steps of the equipment evaluation module are:
in one working cycle of the low-temperature plasma equipment, when a power compensation signal is monitored, automatically counting down, wherein the counting down time is G2 time, and G2 is a preset value;
if a new power compensation signal is monitored in the countdown stage, the countdown is automatically returned to an original value, and the countdown is performed again according to G2; otherwise, the countdown returns to zero, and the timing is stopped;
counting the total frequency of occurrence of the power compensation signal in the countdown stage and marking the total frequency as a compensation frequency CP; counting the duration of the countdown stage as monitoring duration HT; calculating the time difference of the occurrence time of the adjacent power compensation signals to obtain a compensation interval KTi;
comparing the compensation interval KTi with a preset interval threshold; counting the frequency of the KTi being smaller than a preset interval threshold as Zb, and when the KTi is smaller than the preset interval threshold, obtaining the difference value of the KTi and the preset interval threshold and summing to obtain a difference total value GZ; calculating by using a formula cf=zb×g1+gz×g2 to obtain a differential attraction coefficient CF, wherein g1 and g2 are both scale factors;
counting the power consumption of the low-temperature plasma equipment in the countdown stage as E1; the equipment protection coefficient FH of the low-temperature plasma equipment is calculated by using a formula FH= (CP×g3+CF×g4+E1×g5)/(HT×g6), wherein g3, g4, g5 and g6 are coefficient factors.
5. The system and method for low temperature plasma waste gas treatment according to claim 3, wherein the control center is configured to receive the power compensation signal and then drive the power compensation module to perform power compensation on the low temperature plasma device, and adjust the ratio of the power of the low temperature plasma device to the voltage or the current so that the power matches with the voltage or the current to reach the balance point.
6. The system and method for treating a low temperature plasma exhaust gas according to claim 3, wherein the periodic power value is a value obtained by accumulating and averaging powers of the collected continuous plurality of voltage signals and current signals.
7. A low temperature plasma exhaust gas treatment method applied to the low temperature plasma exhaust gas treatment system as claimed in any one of claims 1 to 6, comprising the steps of:
step one: the waste gas analysis module is used for carrying out waste gas treatment grade ZL analysis according to the waste gas component data and the waste gas flow data monitored by the waste gas monitoring module, and the control center is used for determining that the power threshold value of the low-temperature plasma equipment is Gt according to the waste gas treatment grade ZL;
step two: the control center is used for adjusting the operation power of the low-temperature plasma equipment according to the power threshold value Gt; monitoring a periodic power value of the low-temperature plasma equipment through a power monitoring module;
step three: the method comprises the steps of carrying out safety deviation coefficient analysis on a periodic power value of low-temperature plasma equipment through a power analysis module, and judging whether power compensation is needed to be carried out on the low-temperature plasma equipment or not;
step four: monitoring a power compensation signal through an equipment evaluation module and performing equipment protection coefficient FH evaluation according to the power compensation signal; if FH is greater than a preset protection threshold, generating an early warning signal; to remind the manager to repair and update the low-temperature plasma equipment.
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