CN116338410B - Needle card control device, control system and control method for testing core particles - Google Patents
Needle card control device, control system and control method for testing core particles Download PDFInfo
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- CN116338410B CN116338410B CN202310602435.2A CN202310602435A CN116338410B CN 116338410 B CN116338410 B CN 116338410B CN 202310602435 A CN202310602435 A CN 202310602435A CN 116338410 B CN116338410 B CN 116338410B
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- 239000007771 core particle Substances 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000012360 testing method Methods 0.000 title claims abstract description 27
- 230000033001 locomotion Effects 0.000 claims abstract description 47
- 238000009434 installation Methods 0.000 claims abstract description 23
- 238000013459 approach Methods 0.000 claims description 17
- 238000005070 sampling Methods 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 4
- 230000001186 cumulative effect Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 abstract description 5
- 210000002230 centromere Anatomy 0.000 abstract 1
- 238000009825 accumulation Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention relates to the technical field of core particle testing, in particular to a needle card control device, a control system and a control method for testing core particles. The device comprises: the device comprises a frame, a core particle mounting part, a needle card mounting part, a driving part, an absolute encoder and a control part; the input end of the control part is connected with the absolute encoder, the output end of the control part is connected with the driving part, the control part is used for enabling the driving part to start driving the needle card installation part to move according to the target position and the movement speed provided by the upper computer, and the approaching interval is calculated according to the target position and the movement speed, so that when the real-time position of the needle card installation part fed back by the absolute encoder reaches the approaching interval, the position of the needle card installation part is predicted, and the driving part is controlled to stop driving until the needle card installation part is predicted to reach the target position. The control accuracy of needle card position can be improved to this scheme to make the probe on the needle card can support the needle to test the centromere accurately and prick.
Description
Technical Field
The invention relates to the technical field of core particle testing, in particular to a needle card control device, a control system and a control method for testing core particles.
Background
When the core particles are tested, the core particles are usually required to be abutted and needled by using the probes on the needle card, and as the structure of each core particle is very small and exquisite, the control precision requirement on the position of the needle card is higher, but the control precision of the existing needle card control method cannot meet the requirement.
Thus, there is a need for a needle card control device for testing pellets.
Disclosure of Invention
In order to solve the problem of low control precision of the existing needle card control method, the embodiment of the invention provides a needle card control device, a control system and a control method for testing core particles.
In a first aspect, an embodiment of the present invention provides a card control device for testing a core, including: the device comprises a frame, a core particle mounting part, a needle card mounting part, a driving part, an absolute encoder and a control part; the needle card mounting part and the core particle mounting part are respectively mounted on the frame, the core particle mounting part is used for fixing the test core particle, and the needle card mounting part is used for mounting the needle card;
the output end of the driving part is connected with the needle card mounting part and is used for controlling the movement of the needle card mounting part;
the absolute encoder is arranged on the needle card installation part, the output end of the absolute encoder is connected with the control part, and the absolute encoder is used for collecting the real-time position of the needle card installation part;
the output end of the control part is connected with the driving part, the control part is used for enabling the driving part to start driving the needle card installation part to move according to the target position and the movement speed provided by the upper computer, and calculating the approaching interval according to the target position and the movement speed, so that when the real-time position reaches the approaching interval, the position of the needle card installation part is predicted, and until the predicted needle card installation part reaches the target position, the driving part is controlled to stop driving.
In a second aspect, embodiments of the present invention further provide a needle card control system for testing a core, comprising: the upper computer, the power supply and the control device according to any embodiment of the specification;
the upper computer is electrically connected with the control device and is used for communicating with the control device;
the power supply is electrically connected with the control device and is used for supplying power to the control device.
In a third aspect, an embodiment of the present invention further provides a control method based on the control device according to any one embodiment of the present specification, including:
the control part receives the target position and the movement speed sent by the upper computer, and controls the driving part to start driving the needle card mounting part to move; wherein the target position is determined by the position of the core particle mounting part and the initial position of the needle card mounting part;
the control part calculates an approaching section according to the target position and the movement speed;
the control part receives the real-time positions of the needle card installation part sent by the absolute encoder and judges whether each real-time position is positioned in a close section or not;
when the current real-time position is located in the approach section, the control part predicts the position of the needle card mounting part, and when the predicted needle card mounting part reaches the target position, the control driving part stops driving.
The embodiment of the invention provides a needle card control device, a control system and a control method for testing core particles, wherein the control device comprises a frame, a core particle mounting part, a needle card mounting part, a driving part, an absolute encoder and a control part, wherein the driving part starts to drive the needle card mounting part to move according to a target position and a movement speed provided by an upper computer by using the control part, and then an approaching interval is calculated according to the target position and the movement speed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a card control device for testing pellets according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a control unit according to an embodiment of the present invention;
fig. 3 is a flowchart of a method for controlling a pin card for testing a core particle according to an embodiment of the present invention.
Reference numerals: 1. a frame; 2. a core particle mounting section; 3. a needle card mounting portion; 4. a driving section; 5. an absolute encoder; 6. and a control unit.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments, and all other embodiments obtained by those skilled in the art without making any inventive effort based on the embodiments of the present invention are within the scope of protection of the present invention.
As described above, when testing the core, it is generally necessary to use the probe on the card to perform the abutting and needling on the core, and since the structure of each core is very small and fine, the control accuracy of the card position will be higher, but the control accuracy of the existing card control method cannot meet the requirement.
In order to solve the above technical problems, the inventor can consider that the position measurement of the needle card mounting portion is realized by using an absolute encoder, and the incremental encoder adopts a counting mode because the encoder is divided into the absolute encoder and the incremental encoder, so that the incremental encoder can accumulate to any position, but the incremental encoder needs to perform zero searching after each movement, otherwise, the position error generated by each movement is accumulated all the time, and for the case that sequential needle punching test is required for a plurality of core particles, the zero searching is required for many times, otherwise, the position accuracy is affected.
Therefore, the inventor selects an absolute encoder, which does not need to find zero and does not accumulate errors, but the absolute encoder only receives a sampling command once and returns a real-time position signal, and the absolute encoder has a set sampling interval, so that a target position may be between two samplings, so that in order to send a pulse when reaching the target position, to stop the movement of the needle card mounting part, when the real-time position returned by the absolute encoder reaches a near interval of the target position, the position of the needle card mounting part needs to be predicted by using the control part, until the needle card mounting part is predicted to reach the target position, the driving part is controlled to stop driving, so that the needle card mounting part can accurately reach the target position, the control precision is improved, and further, a probe on the needle card can accurately abut against a test core particle.
Specific implementations of the above concepts are described below.
Referring to fig. 1, an embodiment of the present invention provides a needle card control device for testing a core, the device including: a frame 1, a core particle mounting part 2, a needle card mounting part 3, a driving part 4, an absolute encoder 5 and a control part 6; the needle card mounting part 3 and the core particle mounting part 2 are respectively mounted on the frame 1, the core particle mounting part 2 is used for fixing the test core particle, and the needle card mounting part 3 is used for mounting the needle card;
the output end of the driving part 4 is connected with the needle card mounting part 3 and is used for controlling the movement of the needle card mounting part 3;
the absolute encoder 5 is arranged on the needle card mounting part 3, the output end of the absolute encoder 5 is connected with the control part 6, and the absolute encoder 5 is used for collecting the real-time position of the needle card mounting part 3;
the output end of the control part 6 is connected with the driving part 4, the control part 6 is used for enabling the driving part 4 to start driving the needle card mounting part 3 to move according to the target position and the movement speed provided by the upper computer, and calculating the approaching interval according to the target position and the movement speed, so that when the real-time position reaches the approaching interval, the position of the needle card mounting part 3 is predicted, and when the predicted needle card mounting part 3 reaches the target position, the driving part 4 is controlled to stop driving.
In the embodiment of the invention, the control device comprises a frame 1, a core particle mounting part 2, a needle card mounting part 3, a driving part 4, an absolute encoder 5 and a control part 6, wherein the driving part 4 starts to drive the needle card mounting part 3 to move according to a target position and a movement speed provided by an upper computer by using the control part 6, and then an approaching interval is calculated according to the target position and the movement speed, so that when the real-time position of the needle card mounting part 3 acquired by the absolute encoder 5 reaches the approaching interval, the position of the needle card mounting part 3 is predicted, and the driving part 4 is controlled to stop driving until the predicted needle card mounting part 3 reaches the target position, thereby improving the control precision of the needle card position, and enabling a probe on the needle card to accurately abut against a test core particle.
It should be noted that, the target position is determined based on the initial position of the needle card mounting portion 3 and the position of the core particle mounting portion 2, and the position of the core particle mounting portion 2 is generally fixed, and the flatness of the wafer is affected by moving the core particle mounting portion 2 to abut against the needle card as the wafer increases, so in this embodiment, the needle card mounting portion 3 is brought close to the core particle mounting portion 2 for the needle punching test. However, when testing a core particle, the target position is not necessarily a position where the needle can be inserted into the core particle, and it may be necessary to move the needle mount 3 a plurality of times, for example, first rotating the needle mount 3 by an angle from the initial position and then moving the needle from the rotated position to a position where the needle abuts against the core particle, that is, the target position may be an angular position or a linear position.
It will be appreciated that the card mounting portion 3 may be rotated or moved up and down, and the specific composition of the card mounting portion 3 is not limited thereto. The absolute encoder 5 may measure angular displacement, and may measure linear displacement when combined with a gear rack or a screw, and the connection between the absolute encoder 5 and the needle card mounting portion 3 is not limited.
Referring to fig. 2, the control section 6 includes a hardware circuit, a control chip, and a differential pulse transmission chip; the hardware circuit comprises a power supply circuit, an encoder receiving circuit, a serial port receiving and transmitting circuit and a configuration circuit;
the input end of the power supply circuit is connected with an external power supply, and the output end of the power supply circuit is respectively connected with the power supply ends of the encoder receiving circuit, the serial port receiving and transmitting circuit, the configuration circuit and the differential pulse transmitting chip;
the input end of the encoder receiving circuit is electrically connected with the output end of the absolute encoder 5, the output end of the encoder receiving circuit is electrically connected with the input end of the control chip, and the encoder receiving circuit is used for converting the voltage of the real-time position acquired by the absolute encoder and then transmitting the voltage to the control chip;
the serial port receiving and transmitting circuit is connected between the communication end of the control chip and an external upper computer and is used for converting the voltage of the communication signal of the control chip and the serial port signal sent by the upper computer and then respectively sending the converted voltage to the upper computer and the control chip; the serial port signal contains a target position and the movement speed of the needle card mounting part;
the output end of the control chip is connected to the differential pulse transmitting chip, the control chip is used for calculating an approaching interval according to the target position and the movement speed, when the received current real-time position reaches the approaching interval, the position of the needle card mounting part 3 is predicted based on the current real-time position, the target position and the movement speed, until the needle card mounting part 3 is predicted to reach the target position, a first pulse signal is transmitted to the differential pulse transmitting chip, so that the differential pulse transmitting chip transmits the target pulse signal, and the driving part 4 is controlled to stop driving.
In some embodiments, the control chip may predict the position of the card mounting portion 3 by the following formula:
in the method, in the process of the invention,time required for the current real-time position to reach the target position,/-for the current real-time position>For the target position +.>For the current real-time position->Is the movement speed of the card mounting part 3.
It will be appreciated that the target locationAnd the movement speed of the needle card mounting part 3 +.>For the upper computer to send in advance, when the current real-time position sent by the absolute encoder 5 +.>When the approach section is reached, the time required to reach the target position from the current real-time position can be predicted by the above formula +.>Then in the past time->After that, the differential pulse transmitting chip can be controlled to emit the target pulse signal, thereby controlling the driving section 4 to stop driving.
However, the hardware logic occupies more resources to complete the division operation between the two variables in the above formula, and the circuit structure is also complicated. Therefore, the control chip can realize division operation without a "/" number, and needs to design division operation by itself, so that the control chip can be realized by calling an IP Core in a conventional manner, and can select delay of division.
Therefore, the control chip is complex in realizing the calculation mode and occupies more resources, so that the calculation speed of the control chip is increased in order to reduce the resource occupation. With continued reference to fig. 2, the control chip may include: the device comprises a clock unit, an encoder analysis unit, a serial port receiving and transmitting unit, a prediction unit and a pulse transmitting unit;
the clock unit is used for sending a second pulse signal once every interval set time;
the encoder analysis unit is used for decoding the position signal sent by the encoder receiving circuit to obtain the real-time position of the needle card installation part;
the serial port receiving and transmitting unit is used for analyzing the serial port signal to obtain a target position and a movement speed;
the input end of the prediction unit is respectively connected with the clock unit, the encoder analysis unit and the serial port receiving and transmitting unit, the output end of the prediction unit is connected with the pulse transmitting unit, the prediction unit is used for calculating an approaching interval according to the target position and the movement speed, judging whether the current real-time position of the needle card mounting part 3 reaches the approaching interval, if so, starting to receive a second pulse signal, and predicting the position of the needle card mounting part 3 based on the number, the set time, the current real-time position, the target position and the movement speed of the received second pulse signal until the predicted needle card mounting part 3 reaches the target position, transmitting a signal to the pulse transmitting unit so that the pulse transmitting unit transmits a first pulse signal to the differential pulse transmitting chip; if not, the real-time position of the card attachment 3 is continuously received.
In some embodiments, the prediction unit predicts the position of the card mounting portion 3 by:
when the current real-time position of the needle card mounting part 3 is located in the proximity zone, starting counting the number of the second pulse signals;
calculating the difference between the target position and the current real-time position;
calculating accumulated positions based on the number of the second pulse signals, the set time and the movement speed, and judging whether each accumulated position is equal to the difference value;
when the two are equal, the card attachment 3 is predicted to reach the target position.
In the embodiment of the invention, the accumulated position is calculated by the following formula:
in the method, in the process of the invention,for accumulating position +.>For the number of second pulse signals, +.>For the set time +.>Is the speed of movement.
For example, the target position is 1.55m, the approach interval is set asAssuming that the last position transmitted from the absolute encoder 5 is 1.525m and the position transmitted from the absolute encoder at this time is 1.535m, the second pulse signal transmitted to the clock unit is startedCounting the number, calculating the difference between the target position and the current real-time position to be 0.015m, and calculating the accumulated angle by the formula when the clock unit sends the first and second pulse signalsAnd judge->If the pulse signal is equal to 0.015m, sending a signal to the pulse sending unit so that the pulse sending unit sends a first pulse signal to the differential pulse sending chip, and the differential pulse sending chip sends a target pulse signal to control the driving part 4 to stop driving; if not, when receiving the second pulse signal from the clock unit, the accumulated position is calculated as +.>And judge->And if equal to 0.015m, and the like until the accumulated position is equal to the difference value. Therefore, the control chip does not need division operation, and the position prediction of the needle card mounting part 3 is realized by utilizing position accumulation, so that occupied resources can be reduced, and the operation speed can be improved.
It will be appreciated that the set time for the clock unit to transmit the interval between two adjacent second pulse signals is less than the sampling interval of the absolute encoder 5.
In some embodiments, the upper interval limit of the approach interval is the target position, and the lower interval limit of the approach interval is calculated by the following formula:
in the method, in the process of the invention,to approach the lower limit of the interval, +.>For the target position +.>For the speed of movement +.>For the sampling frequency of the encoder parsing unit, +.>Is a preset precision parameter.
In some embodiments, the interval of the precision parameter is。
In the present embodiment of the present invention, in the present embodiment,for the highest sampling frequency of the encoder analysis unit, the value interval of the precision parameter can be +.>When the precision parameter is smaller, the interval between the approach intervals is also smaller, so when the motion speed of the needle card mounting part 3 is in error due to external resistance or other reasons, the real-time position transmitted by the absolute encoder 5 at the preset time interval can greatly skip the approach interval, when the precision parameter is larger, the interval between the approach intervals is also larger, and when the current real-time position reaches the approach interval, whether the needle card mounting part 3 reaches the target position is predicted by position accumulation, and the position error accumulation for a longer time can influence the transmitting precision of the target pulse signal. Therefore, the present embodiment defines the value interval of the precision parameter to be +.>。
The embodiment of the invention also provides a needle card control system for testing the core particle, which comprises the following steps: the upper computer, the power supply and the control device according to any embodiment of the specification;
the upper computer is electrically connected with the control device and is used for communicating with the control device;
the power supply is electrically connected with the control device and is used for supplying power to the control device.
The content of the above system, which is based on the same concept as the embodiment of the control device of the present invention, may be referred to in the description of the embodiment of the control device of the present invention, and will not be described herein again.
As shown in fig. 3, the embodiment of the present invention further provides a control method based on the control device according to any embodiment of the present disclosure, including:
step 300, the control part receives the target position and the movement speed sent by the upper computer, and controls the driving part to start driving the needle card mounting part to move; wherein the target position is determined by the position of the core particle mounting part and the initial position of the needle card mounting part;
step 302, the control part calculates the approach interval according to the target position and the movement speed;
step 304, the control part receives the real-time positions of the needle card installation part sent by the absolute encoder and judges whether each real-time position is located in a proximity zone;
and 306, when the current real-time position is located in the approaching zone, predicting the position of the needle card mounting part by using the control part, and controlling the driving part to stop driving until the predicted needle card mounting part reaches the target position.
In some embodiments, the "predicting, by the control portion, the position of the card mounting portion until the predicted card mounting portion reaches the target position, the control driving portion stops driving" in step 306 may include:
predicting the position of the needle card mounting part based on the current real-time position, the target position and the movement speed;
and sending a target pulse signal to the driving part to control the driving part to stop driving until the predicted needle card mounting part reaches the target position.
The content of the control method is based on the same concept as the embodiment of the control device of the present invention, and specific content can be referred to the description in the embodiment of the control device of the present invention, which is not repeated here.
It is noted that relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. A pin card control device for testing a core particle, comprising: the device comprises a frame, a core particle mounting part, a needle card mounting part, a driving part, an absolute encoder and a control part; the needle card mounting part and the core particle mounting part are respectively mounted on the frame, the core particle mounting part is used for fixing the test core particle, and the needle card mounting part is used for mounting a needle card;
the output end of the driving part is connected with the needle card mounting part and is used for controlling the movement of the needle card mounting part;
the absolute encoder is arranged on the needle card installation part, the output end of the absolute encoder is connected with the control part, and the absolute encoder is used for collecting the real-time position of the needle card installation part;
the output end of the control part is connected with the driving part, the control part is used for enabling the driving part to start driving the needle card installation part to move according to a target position and a movement speed provided by an upper computer, and calculating a proximity interval according to the target position and the movement speed, so that when the real-time position reaches the proximity interval, the position of the needle card installation part is predicted, and until the needle card installation part is predicted to reach the target position, the driving part is controlled to stop driving;
the control part comprises a hardware circuit, a control chip and a differential pulse transmitting chip; the hardware circuit comprises a power supply circuit, an encoder receiving circuit, a serial port receiving and transmitting circuit and a configuration circuit;
the input end of the power supply circuit is connected with an external power supply, and the output end of the power supply circuit is respectively connected with the power supply ends of the encoder receiving circuit, the serial port receiving and transmitting circuit, the configuration circuit and the differential pulse transmitting chip;
the input end of the encoder receiving circuit is electrically connected with the output end of the absolute encoder, the output end of the encoder receiving circuit is electrically connected with the input end of the control chip, and the encoder receiving circuit is used for converting the voltage of the real-time position acquired by the absolute encoder and then sending the voltage to the control chip;
the serial port receiving and transmitting circuit is connected between the communication end of the control chip and an external upper computer, and is used for converting the voltage of the communication signal of the control chip and the serial port signal sent by the upper computer and then respectively sending the converted voltage to the upper computer and the control chip; the serial port signal contains a target position and a movement speed;
the output end of the control chip is connected to the differential pulse sending chip, the control chip is used for calculating an approaching interval according to the target position and the movement speed, and when the received current real-time position reaches the approaching interval, the position of the needle card mounting part is predicted based on the current real-time position, the target position and the movement speed until the needle card mounting part is predicted to reach the target position, a first pulse signal is sent to the differential pulse sending chip, so that the differential pulse sending chip sends out a target pulse signal to control the driving part to stop driving.
2. The apparatus of claim 1, wherein the control chip comprises: the device comprises a clock unit, an encoder analysis unit, a serial port receiving and transmitting unit, a prediction unit and a pulse transmitting unit;
the clock unit is used for sending a second pulse signal once every set time;
the encoder analysis unit is used for decoding the position signal sent by the encoder receiving circuit to obtain the real-time position of the needle card installation part;
the serial port receiving and transmitting unit is used for analyzing the serial port signal to obtain the target position and the movement speed;
the input end of the prediction unit is respectively connected with the clock unit, the encoder analysis unit and the serial port receiving and transmitting unit, the output end of the prediction unit is connected with the pulse sending unit, the prediction unit is used for calculating an approaching interval according to the target position and the movement speed, judging whether the current real-time position of the needle card installation part reaches the approaching interval, if yes, starting to receive the second pulse signal, and predicting the position of the needle card installation part based on the number of the received second pulse signals, the set time, the current real-time position, the target position and the movement speed, and sending a signal to the pulse sending unit until the needle card installation part is predicted to reach the target position, so that the pulse sending unit sends the first pulse signal to the differential pulse sending chip; if not, continuously receiving the real-time position of the needle card installation part.
3. The apparatus of claim 2, wherein an upper interval limit of the approach interval is the target position, and a lower interval limit of the approach interval is calculated by the following formula:
in the method, in the process of the invention,for the lower limit of the approach interval, < > for>For the target position, ++>For the movement speed, +.>For the sampling frequency of the encoder parsing unit, < >>Is a preset precision parameter.
4. A device according to claim 3, wherein the precision parameter has a value interval of。
5. The apparatus according to claim 2, wherein the prediction unit predicts the position of the card mounting portion by:
when the current real-time position of the needle card mounting part is located in the approach section, starting counting the number of the second pulse signals;
calculating the difference between the target position and the current real-time position;
calculating accumulated positions based on the number of the second pulse signals, the set time and the movement speed, and judging whether each accumulated position is equal to the difference value;
when the two are equal, the card mounting portion is predicted to reach the target position.
6. The apparatus of claim 5, wherein the cumulative position is calculated by the formula:
in the method, in the process of the invention,for the accumulated position +.>For the number of said second pulse signals, < >>For the set time, +_>Is the movement speed.
7. A needle card control system for testing a core particle, comprising: a host computer, a power supply and a control device according to any one of claims 1 to 6;
the upper computer is electrically connected with the control device and is used for communicating with the control device;
the power supply is electrically connected with the control device and is used for supplying power to the control device.
8. A control method based on the control device according to any one of claims 1 to 6, characterized by comprising:
the control part receives the target position and the movement speed sent by the upper computer, and controls the driving part to start driving the needle card mounting part to move; wherein the target position is determined by the position of the core particle mounting part and the initial position of the needle card mounting part;
the control unit calculates a proximity section from the target position and the movement speed;
the control part receives the real-time positions of the needle card installation part sent by the absolute encoder and judges whether each real-time position is positioned in the approach section or not;
when the current real-time position is located in the approach section, the control part predicts the position of the needle card mounting part, and controls the driving part to stop driving until the needle card mounting part is predicted to reach the target position.
9. The control method according to claim 8, wherein the predicting, by the control section, the position of the card attachment section until the card attachment section is predicted to reach the target position, controlling the driving section to stop driving, includes:
predicting a position of the needle card mounting portion based on the current real-time position, the target position, and the movement speed;
and sending a target pulse signal to the driving part to control the driving part to stop driving until the needle card mounting part is predicted to reach the target position.
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| KR100863114B1 (en) * | 2001-06-18 | 2008-10-13 | 가부시키가이샤 어드밴티스트 | Probe contact system having plane adjusting mechanism |
| CN202385050U (en) * | 2012-01-04 | 2012-08-15 | 上海大学 | Motion control card based on FPGA (field programmable gate array) |
| CN106019125A (en) * | 2016-07-18 | 2016-10-12 | 南通大学 | 32-channel low-frequency RFID wafer test system and method |
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| CN212060494U (en) * | 2020-05-06 | 2020-12-01 | 杭州长川科技股份有限公司 | TFT product testing device |
| CN213240278U (en) * | 2020-09-10 | 2021-05-18 | 矽电半导体设备(深圳)股份有限公司 | Needle card adjusting device and probe station |
| CN112636660B (en) * | 2020-12-23 | 2022-08-30 | 浙江禾川科技股份有限公司 | Servo drive control system and absolute position signal processing method, device and equipment |
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