CN116300035A - Multi-band image edge gray gradient focusing device and method based on three cameras - Google Patents
Multi-band image edge gray gradient focusing device and method based on three cameras Download PDFInfo
- Publication number
- CN116300035A CN116300035A CN202310279420.7A CN202310279420A CN116300035A CN 116300035 A CN116300035 A CN 116300035A CN 202310279420 A CN202310279420 A CN 202310279420A CN 116300035 A CN116300035 A CN 116300035A
- Authority
- CN
- China
- Prior art keywords
- camera
- wave bands
- imaging
- sample
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000003384 imaging method Methods 0.000 claims abstract description 60
- 238000005286 illumination Methods 0.000 claims abstract description 21
- 238000010191 image analysis Methods 0.000 claims abstract description 12
- 238000013329 compounding Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/244—Devices for focusing using image analysis techniques
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/245—Devices for focusing using auxiliary sources, detectors
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
The invention discloses a multi-band image edge gray gradient focusing device and a multi-band image edge gray gradient focusing method based on three cameras, and relates to the field of focusing; the illumination light is projected to a sample to be detected on the object stage through the microscope objective, and reflected light reflected by the sample to be detected enters the imaging module; the imaging module obtains images of different wave bands according to the reflected light rays; the image analysis and control module is respectively connected with the illumination module and the imaging module; the image analysis and control module is used for extracting edge gradients of images in different wave bands, determining defocusing distances of corresponding wave bands according to the edge gradients of the images in different wave bands, further determining object distances between the microscope objective and a sample to be detected according to the defocusing distances in different wave bands, and moving the microscope objective to focus according to the object distances. The invention can realize fast and high-precision automatic focusing.
Description
Technical Field
The invention relates to the field of focusing, in particular to a multi-band image edge gray gradient focusing device and method based on three cameras.
Background
When measuring an object exceeding a measuring range, the micro-nano detection often needs to perform a large number of axial and horizontal scanning, and defocused images often appear in the scanning process due to the uneven object and other reasons. Traditional manual focusing consumes long time, has low efficiency and can not meet the requirements on precision and stability. The automatic focusing at the present stage basically needs to perform axial scanning to acquire a large number of pictures before use, and the difference between the acquired pictures and the pictures meeting the requirements is compared during use to perform axial movement, and when the difference is smaller than a threshold value, the automatic focusing is completed, and the method also has the defect of long time consumption.
Accordingly, there is a need for a fast auto-focus device or method that solves the problems of the prior art.
Disclosure of Invention
The invention aims to provide a multi-band image edge gray gradient focusing device and method based on three cameras, which can be used for fast and high-precision automatic focusing.
In order to achieve the above object, the present invention provides the following solutions:
a three-camera based multi-band image edge gray scale gradient focusing device, comprising: the system comprises an illumination module, an imaging module and an image analysis and control module;
the lighting module is used for emitting lighting rays of the polychromatic light; the illumination light is projected to a sample to be detected on the object stage through the microscope objective, and reflected light reflected by the sample to be detected enters the imaging module; the imaging module obtains images of different wave bands according to the reflected light rays;
the image analysis and control module is respectively connected with the illumination module and the imaging module; the image analysis and control module is used for extracting edge gradients of images in different wave bands, determining defocusing distances of corresponding wave bands according to the edge gradients of the images in different wave bands, further determining object distances between the microscope objective and a sample to be detected according to the defocusing distances in different wave bands, and moving the microscope objective to focus according to the object distances.
Optionally, the lighting module comprises: a multi-color illumination source and a lens L1; the multi-color illumination light source is a multi-color light source formed by compounding monochromatic lights with the wave band number more than or equal to 3.
Optionally, the imaging module includes: the device comprises a camera imaging unit, a beam splitter prism BS, a motor PI, a microscope objective and an objective table;
the illumination light is projected to a sample to be detected on the objective table downwards through the micro objective through the beam splitting prism BS; and the reflected light reflected by the sample to be measured enters the camera imaging unit upwards through the beam splitter prism BS.
Optionally, the camera imaging unit includes: 3 camera imaging subunits and 2 dichroic mirrors;
the first dichroic mirror reflects the reflected light to the first camera imaging subunit and the second dichroic mirror, respectively; the second dichroic mirror reflects the reflected light to the second and third camera imaging subunits, respectively;
the camera imaging subunit performs imaging of corresponding wave bands according to the reflected light.
Optionally, each of the camera imaging subunits comprises: a filter, a converging lens and a black-and-white camera.
Optionally, the camera targets of the black and white cameras in the three camera imaging subunits are identical.
Optionally, the black and white cameras in the three camera imaging subunits are the same distance from the converging lens.
The multi-band image edge gray gradient focusing method based on the three cameras is applied to the multi-band image edge gray gradient focusing device based on the three cameras, and comprises the following steps:
illuminating light rays of the polychromatic light are utilized to irradiate on a plane mirror, black and white addition is respectively opened, and the focal length of a wave band corresponding to a corresponding camera imaging subunit is calibrated;
placing a sample to be detected on an objective table, and simultaneously acquiring images of corresponding wave bands by utilizing three camera imaging subunits;
extracting edge gradients of images of different wave bands, and determining defocusing distances of corresponding wave bands according to the edge gradients of the images of the different wave bands;
and determining object distances between the microscope objective and the sample to be detected according to the defocusing distances of different wave bands, and moving the microscope objective to focus according to the object distances.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
according to the multi-band image edge gray gradient focusing device and method based on the three cameras, the imaging module obtains images of different bands according to reflected light, the image analysis and control module extracts edge gradients of the images of different bands, determines defocusing distances of corresponding bands according to the edge gradients of the images of different bands, further determines object distances between the microscope objective and a sample to be detected according to the defocusing distances of different bands, and moves the microscope objective to focus according to the object distances. And realizing rapid automatic focusing according to the multi-band image edge gray gradient.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a multi-band image edge gray gradient focusing device based on three cameras.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide a multi-band image edge gray gradient focusing device and method based on three cameras, which can be used for fast and high-precision automatic focusing.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
As shown in fig. 1, the multiband image edge gray gradient focusing device based on three cameras provided by the invention comprises: the system comprises an illumination module, an imaging module and an image analysis and control module;
the lighting module is used for emitting lighting rays of the polychromatic light; the illumination light is projected to a sample to be detected on the object stage through the microscope objective, and reflected light reflected by the sample to be detected enters the imaging module; the imaging module obtains images of different wave bands according to the reflected light rays;
the image analysis and control module is respectively connected with the illumination module and the imaging module; the image analysis and control module is used for extracting edge gradients of images in different wave bands, determining defocusing distances of corresponding wave bands according to the edge gradients of the images in different wave bands, further determining object distances between the microscope objective and a sample to be detected according to the defocusing distances in different wave bands, and moving the microscope objective to focus according to the object distances.
Determining blurred image edges using the formula i (x) =f (x) ×g (x, σ);
where i (x) is the blurred image f (x) is the original image g (x, σ) is the point spread function of the microscope system;
detection is carried out by utilizing edge extraction and a canny operator, and a formula is utilized
Determining an image gradient; wherein (1)>
For horizontal gradient +.>
Is a vertical gradient.
Normalization is adopted to eliminate the inconsistency of gradient amplitude values of different wave bands, and then the gradient division of the edges of different channels is obtained:
wherein, the liquid crystal display device comprises a liquid crystal display device,
representing image gradients of two different wavebands; sigma (sigma) j 、σ i Is the ambiguity of images in different wave bands;
at the edge center according to the imaging formula:
determining ambiguity;
where K is a constant, D is the lens diameter, s is the distance of the image plane from the system, D f Is the focal plane distance, d is the object distance,
dj. di is the distance of the different bands from the focal plane.
The lighting module includes: a multi-color illumination source and a lens L1; the multi-color illumination light source is a multi-color light source formed by compounding monochromatic lights with the wave band number more than or equal to 3.
The imaging module includes: the device comprises a camera imaging unit, a beam splitter prism BS, a motor PI, a microscope objective and an objective table;
the illumination light is projected to a sample to be detected on the objective table downwards through the micro objective through the beam splitting prism BS; and the reflected light reflected by the sample to be measured enters the camera imaging unit upwards through the beam splitter prism BS.
The camera imaging unit includes: 3 camera imaging subunits and 2 dichroic mirrors;
the first dichroic mirror reflects the reflected light to the first camera imaging subunit and the second dichroic mirror, respectively; the second dichroic mirror reflects the reflected light to the second and third camera imaging subunits, respectively;
the camera imaging subunit performs imaging of corresponding wave bands according to the reflected light.
Each of the camera imaging subunits comprises: a filter, a converging lens and a black-and-white camera. The filter is used for transmitting light of a required wave band, filtering light of other wave bands, the converging lens is used for focusing light, and the black-and-white camera is used for imaging. The filter is a narrow-band filter.
The camera targets of the black and white cameras in the three camera imaging subunits are identical.
The black and white cameras in the three camera imaging subunits are the same distance from the converging lens.
As a specific embodiment, the invention further provides a multi-band image edge gray gradient focusing method based on three cameras, which is applied to the multi-band image edge gray gradient focusing device based on three cameras, and the focusing method comprises the following steps:
s101, illuminating light rays of polychromatic light are utilized to irradiate a plane mirror, black and white addition is respectively opened, and the focal length of a wave band corresponding to a corresponding camera imaging subunit is calibrated;
and (3) irradiating the plane mirror with multi-color light, opening one of the cameras, collecting an axial light intensity curve of light rays of a certain wave band, recording the distance from the plane mirror when scanning begins, and performing defocusing-focusing-defocusing in the scanning process. The focal length of the band is the distance of the maximum light intensity value on the light intensity curve, and the distance of the movement is subtracted from the initial distance to obtain the focal length of the band.
S102, placing a sample to be detected on an objective table, and simultaneously acquiring images of corresponding wave bands by utilizing three camera imaging subunits;
s103, extracting edge gradients of images of different wave bands, and determining defocusing distances of corresponding wave bands according to the edge gradients of the images of the different wave bands;
s104, determining object distances between the microscope objective and the sample to be detected according to the defocusing distances of different wave bands, and moving the microscope objective to focus according to the object distances.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the system disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present invention and the core ideas thereof; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (8)
1. A three-camera-based multi-band image edge gray scale gradient focusing device, comprising: the system comprises an illumination module, an imaging module and an image analysis and control module;
the lighting module is used for emitting lighting rays of the polychromatic light; the illumination light is projected to a sample to be detected on the object stage through the microscope objective, and reflected light reflected by the sample to be detected enters the imaging module; the imaging module obtains images of different wave bands according to the reflected light rays;
the image analysis and control module is respectively connected with the illumination module and the imaging module; the image analysis and control module is used for extracting edge gradients of images in different wave bands, determining defocusing distances of corresponding wave bands according to the edge gradients of the images in different wave bands, further determining object distances between the microscope objective and a sample to be detected according to the defocusing distances in different wave bands, and moving the microscope objective to focus according to the object distances.
2. The three-camera based multiband image edge gray scale gradient focusing device of claim 1, wherein the illumination module comprises: a multi-color illumination source and a lens L1; the multi-color illumination light source is a multi-color light source formed by compounding monochromatic lights with the wave band number more than or equal to 3.
3. The three-camera based multiband image edge gray scale gradient focusing device of claim 1, wherein the imaging module comprises: the device comprises a camera imaging unit, a beam splitter prism BS, a motor PI, a microscope objective and an objective table;
the illumination light is projected to a sample to be detected on the objective table downwards through the micro objective through the beam splitting prism BS; and the reflected light reflected by the sample to be measured enters the camera imaging unit upwards through the beam splitter prism BS.
4. The three-camera based multiband image edge gray scale gradient focusing device according to claim 2, wherein the camera imaging unit comprises: 3 camera imaging subunits and 2 dichroic mirrors;
the first dichroic mirror reflects the reflected light to the first camera imaging subunit and the second dichroic mirror, respectively; the second dichroic mirror reflects the reflected light to the second and third camera imaging subunits, respectively;
the camera imaging subunit performs imaging of corresponding wave bands according to the reflected light.
5. The three-camera based multiband image edge gray scale gradient focusing device of claim 4, wherein each of said camera imaging subunits comprises: a filter, a converging lens and a black-and-white camera.
6. The three-camera based multi-band image edge gray scale gradient focusing device of claim 5, wherein the camera targets of the black and white cameras in the three camera imaging subunits are identical.
7. The three-camera based multi-band image edge gray scale gradient focusing device of claim 5, wherein the black and white cameras in the three camera imaging subunits are equidistant from the converging lens.
8. A three-camera-based multiband image edge gray scale gradient focusing method applied to the multiband image edge gray scale gradient focusing device based on any one of claims 1 to 7, characterized in that the focusing method comprises the following steps:
illuminating light rays of the polychromatic light are utilized to irradiate on a plane mirror, black and white addition is respectively opened, and the focal length of a wave band corresponding to a corresponding camera imaging subunit is calibrated;
placing a sample to be detected on an objective table, and simultaneously acquiring images of corresponding wave bands by utilizing three camera imaging subunits;
extracting edge gradients of images of different wave bands, and determining defocusing distances of corresponding wave bands according to the edge gradients of the images of the different wave bands;
and determining object distances between the microscope objective and the sample to be detected according to the defocusing distances of different wave bands, and moving the microscope objective to focus according to the object distances.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310279420.7A CN116300035A (en) | 2023-03-21 | 2023-03-21 | Multi-band image edge gray gradient focusing device and method based on three cameras |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310279420.7A CN116300035A (en) | 2023-03-21 | 2023-03-21 | Multi-band image edge gray gradient focusing device and method based on three cameras |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116300035A true CN116300035A (en) | 2023-06-23 |
Family
ID=86823771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310279420.7A Pending CN116300035A (en) | 2023-03-21 | 2023-03-21 | Multi-band image edge gray gradient focusing device and method based on three cameras |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116300035A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117908219A (en) * | 2024-03-06 | 2024-04-19 | 东莞市沃德普自动化科技有限公司 | Focusing module, automatic focusing microscopic imaging system and method |
-
2023
- 2023-03-21 CN CN202310279420.7A patent/CN116300035A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117908219A (en) * | 2024-03-06 | 2024-04-19 | 东莞市沃德普自动化科技有限公司 | Focusing module, automatic focusing microscopic imaging system and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10477097B2 (en) | Single-frame autofocusing using multi-LED illumination | |
| US8908026B2 (en) | Imaging method and microscope device | |
| CN205562431U (en) | Wafer test equipment with auto focus function | |
| EP3401721A1 (en) | Apparatus and method for scanning microscope slides | |
| DE60023156D1 (en) | METHOD AND DEVICE FOR REDUCING THE TRAPEZER DISTORTION AND IMPROVING THE IMAGE DYE IN AN OPTICAL IMAGE ASSEMBLY SYSTEM | |
| CN109714535A (en) | A kind of auto-focusing machine vision metrology device and method based on color difference | |
| CN116300035A (en) | Multi-band image edge gray gradient focusing device and method based on three cameras | |
| CN110727093A (en) | Multispectral microscopic automatic focusing device and method | |
| JP2018530823A (en) | Automatic staining detection in pathological bright field images | |
| US20180157022A1 (en) | Systems and methods for calibrating a structured illumination imaging system and for capturing a structured illumination image | |
| CN110400281B (en) | Image enhancement method in digital slice scanner | |
| CN110363734B (en) | Thick sample microscopic fluorescence image reconstruction method and system | |
| CN109003228B (en) | Dark field microscopic large-view-field automatic stitching imaging method | |
| CN210639338U (en) | Multispectral microscopic automatic focusing device | |
| US11356593B2 (en) | Methods and systems for single frame autofocusing based on color- multiplexed illumination | |
| CN117571744A (en) | Optical detection method for defects on double surfaces of cover plate glass | |
| CN112595497A (en) | Machine vision-based digital knife edge instrument inspection method and system | |
| CN114387387A (en) | High-reflectivity surface color three-dimensional reconstruction method, system, terminal and medium | |
| CN113483692A (en) | Hole detection optical system | |
| CN106950222B (en) | Large-depth-of-field imaging method | |
| KR102278395B1 (en) | Multi focus control unit and vision test device comprising thereof | |
| WO2023178721A1 (en) | Optical inspection method and system for semiconductor | |
| CN115128762B (en) | Automatic focusing measurement method based on light intensity gradient number | |
| Ge et al. | Event-based automatic focusing under photon-limited conditions | |
| US7164470B2 (en) | Depth of field enhancement for optical comparator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |