CN116296123B - Automatic helium pressurization leakage detection system and leakage detection method thereof - Google Patents
Automatic helium pressurization leakage detection system and leakage detection method thereof Download PDFInfo
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- CN116296123B CN116296123B CN202310559834.5A CN202310559834A CN116296123B CN 116296123 B CN116296123 B CN 116296123B CN 202310559834 A CN202310559834 A CN 202310559834A CN 116296123 B CN116296123 B CN 116296123B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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Abstract
The invention discloses an automatic helium pressurization leakage detection system and a leakage detection method thereof, belonging to the field of scientific test instruments; the technical key points are as follows: when the switch door is in a closed state, the switch door inclined surface block of the steering mechanism is attached to the pressing block; on a horizontal plane projection diagram, the middle position point of the joint section of the steering mechanism and the inclined plane of the pressing block is called an O point, the inclined plane of the pressing block is called an A point at any point positioned on the inner side of the helium pressing container, and the horizontal plane projection point of the vertical hinging rod is called a B point; the method meets the following conditions: the angle AOB is smaller than 90 degrees. The invention aims to provide an automatic helium pressurization leakage detection system and a leakage detection method thereof, which meet the leakage detection requirement of a large-volume workpiece.
Description
Technical Field
The invention relates to the field of scientific test instruments, in particular to an automatic helium pressurization leakage detection system and a leakage detection method thereof.
Background
For leak detection of a workpiece, the location of helium inflation can be divided into two types:
first, helium external pressurization leak detection. Namely, the workpiece is placed in a high-pressure helium environment, stored for a certain time, and then placed in a vacuum environment for detection. For example: CN114608763 a.
Second, helium gas is pressurized for leak detection. That is, helium is filled into the inside of the workpiece, and whether or not there is leakage of helium is detected outside of the workpiece. For example: CN114018493A, CN114563135A, CN110940461a, etc.
The technical requirements faced by the present application are:
first, the detection of materials realizes the pipelining operation. The technical solutions of CN114608763A, CN114018493a and the like do not realize pipelining.
Second, CN114608763a is smaller in the volume of the workpiece to be inspected and is not suitable for large-volume workpieces. When a large-volume workpiece is detected, the volume of the required helium pressure container is correspondingly enlarged, and correspondingly, the opening and closing door of the helium pressure container is enlarged. When helium is pressed, the pressure born by the switch door of the helium pressing container is P Helium pressing ·S Door （P Helium pressing Represents the gas pressure when helium is pressed S Door Representing the area of the door). Due to the large area of the opening and closing door, how to seal the helium vessel during helium pressure is a difficult problem.
Third, leak detectors detect the leak rate of the entire system, which cannot directly measure the leak rate of a single workpiece. Leak rate of a single workpiece refers to: leakage rate of helium inside the workpiece. When helium gas in the workpiece leaks into the leak detection container, the concentration of the helium gas can be greatly reduced. The leak detector detects the leak rate of the leak detection container and the pipeline communicated during leak detection. How the threshold detected by the leak detector is coordinated with the leak rate threshold of an individual workpiece is a challenge.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide an automatic helium pressurization leakage detection system and a leakage detection method thereof.
The technical scheme of the invention is as follows:
an automated helium pressurization leak detection system, comprising: the system comprises a helium pressing system, a leakage detecting system, a grabbing system and a material inlet and outlet system;
wherein, the leak detection system includes: a leak detection container;
wherein, the helium pressing system includes: a helium pressing container;
wherein, the material business turn over system includes: the device comprises a material vehicle, a travel cylinder, a bracket and a guide rail slideway; the material trolley is used for placing a workpiece and is fixedly connected with the switch door of the helium pressing container; the material vehicle is arranged in the guide rail slideway; the fixed end of the stroke cylinder is connected in the helium pressing container, and the moving end of the stroke cylinder is fixedly connected with the switch door; the material car and the switch door can move along the guide rail slideway under the power traction of the travel cylinder;
the helium pressing container comprises a self-locking mechanism; the self-locking mechanism includes: the device comprises a telescopic mechanism, a vertical hinging rod, a steering mechanism and a door opening and closing inclined surface block;
the middle part of the steering mechanism is hinged on the vertical hinging rod, and the first end and the second end of the steering mechanism are respectively arranged at two sides of the vertical hinging rod;
the fixed end of the telescopic mechanism is fixed on the helium pressing container, and the movable end of the telescopic mechanism is connected with the first end of the steering mechanism;
wherein, the second end of the steering mechanism is provided with a pressing block, and the pressing block is provided with an inclined plane;
wherein the inclined surface of the switch door inclined surface block and the inclined surface of the pressing block are smooth surfaces;
when the switch door is in a closed state, the following conditions are satisfied: the inclined plane of the switch door inclined plane block of the steering mechanism is attached to the inclined plane of the pressing block, and the angle AOB is smaller than 90 degrees, wherein on a horizontal plane projection diagram, the middle position point of the attached section of the steering mechanism and the inclined plane of the pressing block is called an O point, the inclined plane of the pressing block is called an A point at any point positioned on the inner side of the helium pressing container, and the horizontal plane projection point of the vertical hinging rod is called B.
Further, the gripping system employs a six-axis robot.
Further, the leak detection system includes: the device comprises a leak detection container, a second nitrogen gas charging pipeline assembly, a second main pumping pipeline assembly, a second pre-pumping pipeline assembly, a primary pumping pipeline, a standby leak detection container leak detection pipeline assembly and a calibration pipeline assembly;
a second low gauge, a balance valve and a spare leakage detection container leakage detection pipeline component are arranged on the leakage detection container;
the second main pumping pipeline assembly, the second pre-pumping pipeline assembly and the calibration pipeline assembly are connected in parallel between the leak detection container and the primary pumping pipeline;
wherein, reserve leak hunting container leak hunting pipeline subassembly includes: one side of the leakage detection pipeline of the leakage detection container is connected with the leakage detection container, the other side of the leakage detection pipeline of the leakage detection container is connected with a second leakage detector, and a second leakage detection valve is also arranged on the leakage detection pipeline of the leakage detection container;
wherein the second nitrogen charge line assembly comprises: the nitrogen gas source, second nitrogen gas inflation line, from the direction of nitrogen gas source to leak hunting container, set gradually at second nitrogen gas inflation line: a third decompression gauge and a third inflation valve;
wherein, the one-level pipeline of bleeding includes: a first-stage air extraction pipeline, an electromagnetic differential pressure valve and a second front-stage pump; the second backing pump is arranged at the end part of the primary air extraction pipeline, and the electromagnetic pressure difference valve is arranged at the middle part of the primary air extraction pipeline;
wherein, the second main pumping pipeline assembly includes: the second main pumping pipeline, the second main pumping valve, the high gauge, the molecular pump, the third low gauge, the first leak detection valve, the first leak detector and the backing valve; from leak hunting container to the direction of one-level bleed pipeline, connect gradually: the second main pumping valve, the high gauge, the molecular pump, the third low gauge, the first leak detection valve and the backing valve; one side of the first leak detection valve is connected to the second main pumping pipeline, and the other side of the first leak detection valve is connected to the first leak detector;
wherein the second pre-pump line assembly comprises: a second pre-pumping pipe and a second pre-pumping valve installed on the second pre-pumping pipe;
wherein, calibration piping assembly includes: a single pass calibration line assembly, the single pass calibration line assembly comprising: the leakage detection device comprises a single-way leakage detection pipeline, a leakage hole calibration valve, a leakage hole pre-pumping valve and a standard leakage hole, wherein the standard leakage hole is arranged on the single-way leakage detection pipeline between the leakage hole calibration valve and the leakage hole pre-pumping valve.
Further, the calibration line assembly includes a multi-way variegated single-way calibration line assembly.
Further, the helium pressing system further comprises: the device comprises a first helium gas charging pipeline assembly, a nitrogen gas charging pipeline assembly, a deflation pipeline assembly, a first pre-pumping pipeline assembly and a first main pumping pipeline assembly;
the helium pressing container is connected with: the device comprises a first helium gas charging pipeline assembly, a nitrogen gas charging pipeline assembly, a deflation pipeline assembly, a first pre-pumping pipeline assembly and a first main pumping pipeline assembly;
wherein, helium gas charging line subassembly includes: the helium gas source and the helium gas charging pipeline are sequentially provided with: a first pressure reducing gauge and a first inflation valve;
wherein, first nitrogen charging line subassembly includes: the nitrogen gas source, first nitrogen gas inflation line, from the direction of nitrogen gas source to the pressure helium container, set gradually at first nitrogen gas inflation line: the second decompression meter and the second inflation valve;
wherein, the gassing circuit subassembly includes: the air release valve is arranged on the air release pipeline;
wherein, first pre-pump line assembly includes: the system comprises a first pre-pumping pipeline, a first pre-pumping valve, a first low gauge and a first backing pump; the first backing pump is arranged at the end part of the pre-pumping pipeline; in the direction from the first backing pump to the helium vessel, the first pre-pumping pipeline is provided with: a first pre-pump valve, a first low gauge;
the first main pumping pipeline assembly comprises a first main pumping pipeline and a first main pumping valve arranged on the first main pumping pipeline;
one end of the first main pumping pipeline is connected with the helium pressing container, and the other end of the first main pumping pipeline is connected with the second main pumping pipeline; the connection part of the first main pumping pipeline and the second main pumping pipeline is arranged between the second main pumping valve and the molecular pump.
A leak detection method of an automatic helium pressurization leak detection system comprises the following steps:
step1, placing a workpiece into a helium pressing container of a helium pressing system through a material inlet and outlet system;
step2, closing the helium vessel:
step3, pressing helium;
step4, after helium pressing is completed, transferring the workpiece on the material trolley into a leakage detection container by a grabbing system to detect leakage;
step5, after the leak detection is finished, opening a third inflation valve, replacing with nitrogen, and opening a balance valve to avoid that the nitrogen is inflated to become positive pressure;
step6, opening a sealing door of the leak detection container, and grabbing workpieces by a grabbing system to be placed in a qualified area or a unqualified area.
Further, step1 further comprises: the workpiece is placed on the material trolley, and the material trolley is placed into the helium pressing container through the stroke cylinder.
Further, step2 further comprises:
step2-1, controlling a stroke cylinder, retracting the material trolley into the helium vessel, and opening and closing a door to close the helium vessel;
step2-2, the self-locking mechanism is closed.
Further, step3 further comprises:
step3-1, vacuumizing: opening a first backing pump and a first pre-pumping valve, and pumping the helium vessel to vacuum; then, the second backing pump, the backing valve, the electromagnetic differential pressure valve, the molecular pump and the first main pumping valve are opened again to continuously pump vacuum to a higher degree;
step3-2, helium filling: closing all valves and pump bodies in Step3-1, then opening a first inflation valve, and waiting for the pressure in the helium vessel to reach preset air pressure P 1 And maintaining the pressure for a certain time; finally, closing the first inflation valve;
step3-3, opening a gas release valve after the helium is pressed, and discharging helium after the helium is pressed;
step3-4, opening a first inflation valve to inflate nitrogen, and purging the helium vessel and the workpiece inside the helium vessel;
step3-5, opening the sealing door after purging, pushing out the material trolley by the travel cylinder, and purging the material trolley again by compressed air when the material trolley reaches the designated limit position.
Further, step4 further comprises:
step4-1, rough drawing:
opening an electromagnetic differential pressure valve, a second backing pump and a second pre-pumping valve, wherein the second backing pump evacuates the leak detection container to a set target pressure (for example, within 10 pa);
step4-2, fine pumping:
closing the second pre-pumping valve, opening the second main pumping valve, the backing valve and the molecular pump, and evacuating the leak detection container to a set target pressure (for example, 5×10 -3 pa), closing the backing valve;
step4-3, leak detection:
and opening a first leak detection valve, and carrying out product leak detection by the first leak detector to obtain a specific helium leak rate, and judging whether the product is qualified or unqualified.
Further, to perform standard leak calibration prior to Step1, any one-way calibration tubing set is selected for calibration, which is referred to as: a target single-pass calibration line component; the leak rate of the standard leak hole of the target single-way calibration pipeline component is the same as the leak rate threshold value of the single workpiece;
the step of standard leak calibration includes:
opening an electromagnetic differential pressure valve, a second backing pump, a second pre-pumping valve and a leak pre-pumping valve of a target single-way calibration pipeline component, pre-pumping the leak detection container and a standard leak of the target single-way calibration pipeline component by the second backing pump, evacuating to a set target pressure after pre-pumping is achieved, and closing the second pre-pumping valve and the leak pre-pumping valve.
Step two, a second main pumping valve, a backing valve and a molecular pump are opened, the leak detection container is pumped out to a set target pressure, and then the backing valve is closed;
step three, opening the first leak detection valve and the leak calibration valve of the target single-way calibration pipeline component, wherein the second main pumping valve is still kept open, leak detection is started, and after the detection time is up, the first leak detection valve and the leak calibration valve of the target single-way calibration pipeline component are closed;
and step four, closing the second main pumping valve, opening the third inflation valve, deflating to a certain pressure, simultaneously opening the balance valve, and opening the box after the vacuum breaking is finished.
The beneficial effects of this application lie in:
(1) The method is suitable for detecting the large-volume workpiece.
When helium is pressed, the pressure born by the switch door of the helium pressing container is P Helium pressing ·S Door （P Helium pressing Represents the gas pressure when helium is pressed S Door Representing the area of the door). Because of the large area of the opening and closing door, how to seal the helium vessel during helium pressing is a difficult problem to be solved.
To this problem, this application designs a self-locking structure, and as conventional design, when pressing helium, the switch door can produce outside removal, and this moment can make the clockwise moment of steering mechanism that fig. 9 shows to can't realize the airtight of switch door.
To this problem, this application has broken the prejudice of conventional technique, and its core design main points lie in:
when the switch door is in a closed state, the inclined surface of the switch door inclined surface block of the steering mechanism is attached to the inclined surface of the pressing block; on a horizontal plane projection diagram, the middle position point of the joint section of the steering mechanism and the inclined plane of the pressing block is called an O point, the inclined plane of the pressing block is called an A point at any point positioned on the inner side of the helium pressing container, and the horizontal plane projection point of the vertical hinging rod is called a B point;
the method meets the following conditions: the angle AOB is smaller than 90 degrees.
(2) The application provides a gas circuit cooperation design of a helium pressing system and a leakage detecting system:
the leak detection system comprises: the device comprises a leak detection container, a second nitrogen gas charging pipeline assembly, a second main pumping pipeline assembly, a second pre-pumping pipeline assembly, a primary pumping pipeline, a standby leak detection container leak detection pipeline assembly and a calibration pipeline assembly; a second low gauge, a balance valve and a spare leakage detection container leakage detection pipeline component are arranged on the leakage detection container;
the second main pumping pipeline assembly, the second pre-pumping pipeline assembly and the calibration pipeline assembly are connected in parallel between the leak detection container and the primary pumping pipeline;
a helium pressing system, comprising: the device comprises a helium pressing container, a first helium gas charging pipeline assembly, a nitrogen gas charging pipeline assembly, a deflation pipeline assembly, a first pre-pumping pipeline assembly and a first main pumping pipeline assembly; the helium pressing container is connected with: the device comprises a first helium gas charging pipeline assembly, a nitrogen gas charging pipeline assembly, a deflation pipeline assembly, a first pre-pumping pipeline assembly and a first main pumping pipeline assembly; one end of the first main pumping pipeline is connected with the helium pressing container, and the other end of the first main pumping pipeline is connected with the second main pumping pipeline; the connection part of the first main pumping pipeline and the second main pumping pipeline is arranged between the second main pumping valve and the molecular pump.
(3) Calibration of the standard leak is a challenge for the present application. From the technical needs, the first leak detector detects the leak rate of the whole system, which cannot directly measure the leak rate of a single workpiece. Leak rate of a single workpiece refers to: leakage rate of helium inside the workpiece. When helium gas in the workpiece leaks into the leak detection container, the concentration of the helium gas can be greatly reduced. And the first leak detector detects the leak rate of the leak detection container and the pipeline communicated during leak detection. That is, given a leak rate threshold for a single workpiece (which is determined by the user), the first leak detector is erroneous if it is determined directly whether the workpiece is leaking according to the leak rate threshold for the single workpiece. It is a technical challenge to determine the leak rate threshold of the first leak detector based on the leak rate threshold of the individual workpieces. To this problem, the present application devised a calibrated tubing assembly; specifically, the calibration line assembly includes a plurality of parallel single pass calibration line components, the single pass calibration line components including: the leakage detection device comprises a single-way leakage detection pipeline, a leakage hole calibration valve, a leakage hole pre-pumping valve and a standard leakage hole, wherein the standard leakage hole is arranged on the single-way leakage detection pipeline between the leakage hole calibration valve and the leakage hole pre-pumping valve.
Drawings
The invention is described in further detail below in connection with the embodiments in the drawings, but is not to be construed as limiting the invention in any way.
FIG. 1 is a three-dimensional architectural design of an automated helium pressurization leak detection system of example 1.
FIG. 2 is a schematic diagram of the gas circuit connections of an automated helium pressurization leak detection system of example 1.
FIG. 3 is a schematic representation of the design of the first helium circuit assembly of example 1.
FIG. 4 is a schematic diagram of the nitrogen fill line assembly of example 1.
Fig. 5 is a schematic diagram of the design of the first pre-pump line assembly of embodiment 1.
Fig. 6 is a schematic design of a leak detection system of example 1.
Fig. 7 is a three-dimensional exploded schematic of the material access system of example 1.
Fig. 8 is a three-dimensional design schematic of the self-locking mechanism of embodiment 1.
Fig. 9 is a schematic plan view of the self-locking mechanism of embodiment 1.
Fig. 10 is a schematic diagram of the key design of the self-locking mechanism of embodiment 1.
Fig. 11 is an enlarged partial schematic view of fig. 10.
The reference numerals in fig. 1 to 11 are explained as follows:
automated helium pressurization leak detection system 100;
helium pressure system 200, helium pressure vessel 201, first helium gas charging line assembly 202, helium gas source 2021, helium gas charging line 2022, first pressure reducing gauge 2023, first charging valve 2024, nitrogen gas charging line assembly 203, nitrogen gas source 2031, first nitrogen gas charging line 2032, second pressure reducing gauge 2033, second charging valve 2034, gas bleed line assembly 204, first pre-pump line assembly 205, first pre-pump line 2051, first pre-pump valve 2052, first low gauge 2053, first backing pump 2054, first main pump line assembly 206, first main pump valve 2061;
leak detection system 300, leak detection vessel 301, second nitrogen charge line assembly 302, second low gauge 303, balance valve 304, second main pump line assembly 305, second main pump line 3051, second main pump valve 3052, high gauge 3053, molecular pump 3054, third low gauge 3055, first leak detection valve 3056, first leak detector 3057, foregate valve 3058, second pre-pump line assembly 306, second pre-pump line 3061, second pre-pump valve 3062, first-stage pump line 307, first-stage pump line 3071, electromagnetic pressure differential valve 3072, second pre-pump 3073, backup leak detection vessel leak detection line assembly 308, second leak detection valve 3081, second leak detector 3082, calibration line assembly 309, leak calibration valve 3091, leak pre-pump valve 3092, standard leak 3093;
the door opening and closing mechanism comprises a self-locking mechanism 3010, a telescopic mechanism 3011, a vertical hinging rod 3012, a steering mechanism 3013, a pressing block 3014 and a door opening and closing inclined surface block 3015;
a grasping system 400;
a material inlet and outlet system 500, a material vehicle 501, a travel cylinder 502, a bracket 503 and a guide rail slideway 504;
a material holder 600.
Detailed Description
The objects, technical solutions and advantages of the present invention will become more apparent by the following detailed description of the present invention with reference to the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the invention. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present invention.
Example 1
<1 hardware Structure >
As can be seen in fig. 1, an automated helium pressurization leak detection system 100 includes a helium pressurization system 200, a leak detection system 300, a grasping system 400, a material access system 500, and a material rack 600.
<1.1 airway design of helium pressure System 200 >
As can be seen from fig. 2-6, a helium pressure system 200 includes: a pressurized helium vessel 201, a first helium fill line assembly 202, a nitrogen fill line assembly 203, a bleed line assembly 204, a first pre-pump line assembly 205, and a first main pump line assembly 206.
The helium pressure vessel 201 is connected in parallel with: a first helium fill line assembly 202, a nitrogen fill line assembly 203, a bleed line assembly 204, a first pre-pump line assembly 205, and a first main pump line assembly 206.
Wherein, helium fill line assembly 202 comprises: a helium gas source 2021 and a helium gas filling pipe 2022, wherein the helium gas filling pipe 2022 is provided with: a first pressure reducing gauge 2023, and a first air charging valve 2024.
Wherein the first nitrogen charging line assembly 203 comprises: a nitrogen gas source 2031 and a first nitrogen gas charging pipe 2032, wherein the first nitrogen gas charging pipe 2032 is provided in this order in the direction from the nitrogen gas source 2031 to the helium pressure vessel 201: a second pressure reducing gauge 2033, and a second inflation valve 2034.
Wherein the bleed circuit assembly 204 comprises: the air release pipeline and an air release valve arranged on the air release pipeline.
Wherein the first pre-pump line assembly 205 comprises: a first pre-pump line 2051, a first pre-pump valve 2052, a first low gauge 2053, a first backing pump 2054; the first backing pump 2054 is disposed at an end of the pre-pump tube 2051; in the direction from the first backing pump 2054 to the helium pressure vessel 201, a first pre-pump pipe 2051 is provided with: a first pre-pump valve 2052, a first low gauge 2053.
Wherein the first main suction line assembly 206 includes a first main suction line and a first main suction valve 2061 disposed thereon;
one end of the first main pumping pipeline is connected with the helium pressing container 201, and the other end of the first main pumping pipeline is connected with the second main pumping pipeline 3051; the connection between the first main pumping pipe and the second main pumping pipe 3051 is between the second main pumping valve 3052 and the molecular pump 3054.
<1.2 airway design of leak detection System 300 >
As can be seen in fig. 2-6, leak detection system 300 includes: leak detection vessel 301, second nitrogen charge line assembly 302, second main pump line assembly 305, second pre-pump line assembly 306, primary pump line 307, backup leak detection vessel leak detection line assembly 308, calibration line assembly 309;
a second low gauge 303, a balance valve 304 and a spare leakage detection container leakage detection pipeline assembly 308 are arranged on the leakage detection container;
the second main pumping line assembly 305, the second pre-pumping line assembly 306, and the calibration line assembly 309 are connected in parallel between the leak detection vessel 301 and the primary pumping line 307.
Wherein, reserve leak hunting container leak hunting pipeline assembly 308 includes: the leak detection device comprises a leak detection container leak detection pipeline, wherein one side of the leak detection container leak detection pipeline is connected with the leak detection container, the other side of the leak detection container leak detection pipeline is connected with a second leak detector 3082, and a second leak detection valve 3081 is also arranged on the leak detection container leak detection pipeline;
wherein the second nitrogen charging line assembly 302 comprises: the nitrogen gas source, second nitrogen gas inflation line, from the direction of nitrogen gas source to leak hunting container 301, set gradually at the second nitrogen gas inflation line: and a third decompression meter and a third inflation valve.
Wherein the primary bleed line 307 comprises: a primary air extraction pipe 3071, an electromagnetic pressure difference valve 3072, and a second backing pump 3073; the second backing pump 3073 is disposed at an end of the primary air extraction duct 3071, and the electromagnetic pressure differential valve 3072 is mounted at a middle portion of the primary air extraction duct 3071.
Wherein the second main pumping circuit assembly 305 comprises: a second main pumping pipe 3051, a second main pumping valve 3052, a high gauge 3053, a molecular pump 3054, a third low gauge 3055, a first leak detection valve 3056, a first leak detector 3057, and a backing valve 3058; in the direction from the leak detection vessel 301 to the primary air extraction pipe 3071, there are sequentially connected: a second main pumping valve 3052, a high gauge 3053, a molecular pump 3054, a third low gauge 3055, a first leak detection valve 3056, and a backing valve 3058; first leak detection valve 3056 is connected on one side to second main pumping pipe 3051 and on the other side to first leak detector 3057.
Wherein the second pre-pump line assembly 306 comprises: a second pre-pump conduit 3061 and a second pre-pump valve 3062 mounted on the second pre-pump conduit 3061.
Wherein the calibration line assembly 309 comprises: two-way parallel single pass calibration pipeline components, the single pass calibration pipeline components include: the leak detection device comprises a single-way leak detection pipeline, a leak calibration valve 3091, a leak pre-pumping valve 3092 and a standard leak 3093, wherein the standard leak 3093 is arranged on the single-way leak detection pipeline between the leak calibration valve 3091 and the leak pre-pumping valve 3092.
<1.3 grabbing System 400>
The grabbing system 400 adopts a six-axis robot, and the grabbing tool is matched with a workpiece structure, so that automatic transfer and accurate positioning of workpiece materials are mainly realized, and the working procedures of a workpiece grabbing material vehicle, a leakage detection system, a qualified frame and an unqualified frame are covered.
<1.4 Material Inlet and Exit System 500>
As can be seen in fig. 7, the material inlet and outlet system 500 includes: a material car 501, a travel cylinder 502, a bracket 503 and a guide rail slideway 504.
The material cart 501 is used for placing a workpiece, and is fixedly connected with the switch door of the helium pressure container 201.
Wherein, the material car 501 is placed in the guide rail slideway 504, the fixed end of the travel cylinder 502 is connected in the helium container, and the moving end is fixedly connected with the switch door. The charge car 501 and the switch door can move along the rail runner 504 under the power of the travel cylinder 502.
<1.5 hardware design of helium vessel 201 >
The key problems of the application are as follows:
in order to detect a large-volume workpiece, when helium is pressed, the pressure born by the switch door of the helium pressing container 201 is P Helium pressing ·S Door （P Helium pressing Represents the gas pressure when helium is pressed S Door Representing the area of the door). Because of the large area of the opening and closing door, the helium vessel cannot be sealed when helium is pressed by the stroke cylinder 502 alone.
As shown in fig. 8-9, the helium vessel 201 includes a self-locking mechanism 3010; the self-locking mechanism 3010 includes: a telescopic mechanism 3011, a vertical hinging rod 3012, a steering mechanism 3013 and a door opening and closing inclined surface block 3015;
the middle part of the steering mechanism is hinged on the vertical hinging rod 3012, and the first end and the second end of the steering mechanism are respectively arranged at two sides of the vertical hinging rod 3012;
wherein, the fixed end of the telescopic mechanism 3011 is fixed on the helium pressure container 201, and the moving end is connected with the first end of the steering mechanism 3013;
wherein, the second end of the steering mechanism 3013 is provided with a pressing block 3014, and the pressing block is provided with an inclined plane;
wherein, the inclined plane of switch door inclined plane piece 3015, the inclined plane of briquetting 3014 are smooth surface.
As can be seen from fig. 9, when the self-locking mechanism 3010 of the present application is operated, the telescopic mechanism 3011 is extended, so that the inclined surface of the pressing block 3014 is matched with the inclined surface of the door opening and closing inclined surface block 3015, and the door opening and closing is fixed. The above is obviously based on the principle of a lever.
As a conventional design, when helium is pressed, the switch door moves outwards, and at this time, the steering mechanism shown in fig. 9 is caused to have a clockwise moment, so that the switch door cannot be sealed.
The research and development team breaks through the conventional understanding bias, and when the switch cabinet moves outwards, the steering mechanism generates anticlockwise moment, so that self-locking is realized. The key design is shown in fig. 10:
when the switch door is in a closed state (namely, the material trolley brings a workpiece into the helium container), a switch door inclined surface block 3015 of the steering mechanism is attached to the pressing block 3014;
the core requirement is that:
as shown in fig. 10 to 11, on a top plan view, a point at the middle position of a joint section (a thickened line section in fig. 11) of the inclined surface of the steering mechanism and the pressing block is referred to as an O point (an O point is schematically shown in fig. 11), the inclined surface of the pressing block is referred to as an a point at any point positioned on the inner side of the helium container, and a plane projection point of the vertical hinge rod 3012 is referred to as a B point;
the method meets the following conditions: the angle AOB (i.e. angle β in fig. 10) is less than 90 °.
The above practical requirements are: the position of the vertical hinging rod 3012, the inclination angle of the inclined plane of the pressing block and the joint range of the steering mechanism and the inclined plane of the pressing block.
<2 Process flow >
The overall flow is as follows:
step1, placing a workpiece into a helium vessel 201 of a helium pressure system 200 through a material inlet and outlet system: the workpiece is placed on a material carriage 501, and the material carriage 501 is placed into the helium pressure vessel 201 by a stroke cylinder 502.
Step2, closing the helium vessel 201:
step2-1, controlling a stroke cylinder 502, retracting the material vehicle 501 into the helium vessel 201, and closing the helium vessel by opening and closing a door;
step2-2, closing the self-locking mechanism;
step3, helium pressing:
step3-1, vacuumizing: opening the first backing pump 2054 and the first pre-pump valve 2052 to pump the helium vessel 201 to vacuum; then, the second backing pump 3073, the backing valve 3058, the electromagnetic pressure difference valve 3072, the molecular pump 3054, and the first main extraction valve 2061 are opened again to continue to extract vacuum to a higher degree;
step3-2, helium filling: all valves and pump bodies in Step3-1 are closed, and then the first inflation valve 2024 is opened, and the pressure in the helium vessel 201 is kept to reach the preset pressure P 1 (pressure helium vessel installation pressure sensor monitoring) and dwell for a certain time: when the pressure sensor acquires data after the air is inflated to the set pressure, the inflation valve is automatically closed; if the pressure drops the set value, the inflation valve is automatically opened again to supplement air; finally, the first inflation valve 2024 is closed;
step3-3, opening a gas release valve after the helium is pressed, and discharging helium after the helium is pressed;
step3-4, opening the first charging valve 2024 to charge nitrogen, and purging the helium vessel 201 and the workpiece inside the helium vessel 201;
step3-5, opening a sealing door after purging, pushing out the material trolley by a travel cylinder, and purging with compressed air again when the material trolley reaches a specified limit position: the secondary purging device is arranged on the inner side of the air nozzle outwards, so that helium which is possibly leaked can be blown off from the pain detection tank on the inner side to a certain extent, and the environmental background caused by helium pollution is avoided;
step4, after helium pressing is completed, the grabbing system 400 transfers the workpiece on the material trolley to the leak detection container 301 for leak detection:
step4-1, rough drawing:
opening the electromagnetic differential pressure valve 3072, the second backing pump 3073 and the second pre-pumping valve 3062, and evacuating the leak detection container 301 to within 10 pa;
step4-2, fine pumping:
closing the second pre-pumping valve 3062, opening the second main pumping valve 3052, the backing valve 3058 and the molecular pump 3054, and evacuating the leak detection container to 5×10 -3 pa (the pressure may be smaller), closing the backing valve 3058;
step4-3, leak detection:
closing the backing valve 3058, opening the first leak detection valve 3056, and carrying out product leak detection by the first leak detector 3057 to obtain a specific helium leak rate, and judging whether the product is qualified or not.
Step5, after the leak detection is finished, the first leak detection valve 3056 and the second main pumping valve 3052 are closed, the third inflation valve is opened, the third inflation valve is replaced by nitrogen, and the balance valve 304 is opened, so that the nitrogen is prevented from being inflated to be positive pressure.
Step6, opening the sealing door of the leak detection container, and grabbing the workpiece to a qualified area or a unqualified area on the material rack 600 by the grabbing system 400.
<3 calibration function >
After the equipment is started, the following steps are sequentially carried out:
1. the first leak detector self-calibrates; 2. calibrating an empty box; 3. calibrating a standard leak hole; after the steps have no problems, the method can perform normal production detection.
Function one: the first leak detector self-calibrates.
After the first leak detector is started up, the first leak detector can be operated to automatically calibrate the inside of the leak detector after the startup is completed (the leak detector has self-contained function).
And the function II: empty box calibration (measurement of the basic leak rate of the system) is carried out by the following specific methods:
without placing the workpiece, leak rate measurements were made:
step one, rough pumping:
opening the electromagnetic differential pressure valve 3072, the second backing pump 3073 and the second pre-pumping valve 3062, and evacuating the leak detection container 301 to within 10 pa;
step two, fine extraction:
closing the second pre-stageThe pumping valve 3062 opens the second main pumping valve 3052, the backing valve 3058 and the molecular pump 3054 to pump out the leak detection container to 5×10 -3 pa (the pressure may be smaller), closing the backing valve 3058;
step three, leak detection:
the backing valve 3058 is closed and the first leak detection valve 3056 is opened, and the first leak detector 3057 takes leak rate measurements of the environment of the system.
Step four, after the leak detection time of the empty box arrives (the leak detection time is calculated after waiting for the leak rate to be stable); closing the first leak detection valve 3056; and closing the second main pumping valve 3052, opening the third inflation valve, deflating to a certain pressure, simultaneously opening the balance valve 304, and opening the box after the vacuum breaking is finished.
And the third function: and (5) calibrating a standard leak.
Calibration of the standard leak is a challenge for the present application.
From the technical needs, the first leak detector 3057 detects the leak rate of the entire system, which cannot directly measure the leak rate of a single workpiece. Leak rate of a single workpiece refers to: leakage rate of helium inside the workpiece. While helium gas inside the workpiece leaks into the leak detection container 301, the concentration of helium gas is greatly reduced. While first leak detector 3057 detects the leak rate of leak detection vessel 301 and the tubing that it communicates with during leak detection. That is, given a leak rate threshold for a single workpiece (which is determined by the user), the first leak detector is erroneous if it is determined directly whether the workpiece is leaking according to the leak rate threshold for the single workpiece.
It is a technical challenge to determine the leak rate threshold of the first leak detector 3057 based on the leak rate threshold of the individual workpieces. And the third function: and (5) calibrating the standard leak hole to solve the problem.
The method for calibrating the standard leak hole comprises the following steps:
any one-way calibration pipeline component is selected for calibration, which is called: a target single-pass calibration line component; the leak rate of the standard leak orifice of the target single pass calibrated line component is the same as the leak rate threshold of the individual workpiece.
Step one, the electromagnetic differential pressure valve 3072, the second pre-pump 3073, the second pre-pump 3062 and the leak pre-pump 3092 of the target single-path calibration pipeline component are opened, the second pre-pump pre-pumps the leak detection container 301 and the standard leak of the target single-path calibration pipeline component, the pre-pump is pumped to within 10pa after the pre-pumping reaches, and the second pre-pump 3062 and the leak pre-pump 3092 are closed.
Step two, a second main pumping valve 3052, a backing valve 3058 and a molecular pump 3054 are opened, and the leak detection container is pumped down to 5 multiplied by 10 -3 pa (the pressure may be smaller) and then closing the backing valve 3058;
and thirdly, opening the first leak detection valve 3056 and the leak calibration valve 3091 of the target single-way calibration pipeline component, wherein the second main pumping valve 3052 is still kept open, starting leak detection, and closing the first leak detection valve 3056 and the leak calibration valve 3091 of the target single-way calibration pipeline component after the detection time (consistent with the empty box calibration detection time) is reached. In this process, helium in the standard leak enters the leak detection vessel and is then detected by the first leak detector, by which the leak rate threshold of the first leak detector 3057 can be determined.
And step four, closing the second main pumping valve 3052, opening the third inflation valve, deflating to a certain pressure, simultaneously opening the balance valve 304, and opening the box after the vacuum breaking is finished.
The leak rates of the standard leak holes corresponding to different single-way calibration pipeline components are different, so that the leak rate requirements of different workpieces are met. Because the leak detection vessel is at the far end of the leak detector, helium gas cannot fully enter the leak detector, a leak hole is required to be arranged on the vacuum box to correct the detection leak rate of the leak detector.
The above examples are provided for convenience of description of the present invention and are not to be construed as limiting the invention in any way, and any person skilled in the art will make partial changes or modifications to the invention by using the disclosed technical content without departing from the technical features of the invention.
Claims (10)
1. An automated helium pressurization leak detection system, comprising: the system comprises a helium pressing system, a leakage detecting system, a grabbing system and a material inlet and outlet system;
wherein, the leak detection system includes: a leak detection container;
wherein, the helium pressing system includes: a helium pressing container;
wherein, the material business turn over system includes: the device comprises a material vehicle, a travel cylinder, a bracket and a guide rail slideway; the material trolley is used for placing a workpiece and is fixedly connected with the switch door of the helium pressing container; the material vehicle is arranged in the guide rail slideway; the fixed end of the stroke cylinder is connected in the helium pressing container, and the moving end of the stroke cylinder is fixedly connected with the switch door; the material car and the switch door can move along the guide rail slideway under the power traction of the travel cylinder;
the helium pressing container comprises a self-locking mechanism; the self-locking mechanism includes: the device comprises a telescopic mechanism, a vertical hinging rod, a steering mechanism and a door opening and closing inclined surface block;
the middle part of the steering mechanism is hinged on the vertical hinging rod, and the first end and the second end of the steering mechanism are respectively arranged at two sides of the vertical hinging rod;
the fixed end of the telescopic mechanism is fixed on the helium pressing container, and the movable end of the telescopic mechanism is connected with the first end of the steering mechanism;
wherein, the second end of the steering mechanism is provided with a pressing block, and the pressing block is provided with an inclined plane;
wherein the inclined surface of the switch door inclined surface block and the inclined surface of the pressing block are smooth surfaces;
when the switch door is in a closed state, the following conditions are satisfied: the inclined plane of the switch door inclined plane block of the steering mechanism is attached to the inclined plane of the pressing block, and the angle AOB is smaller than 90 degrees, wherein on a horizontal plane projection diagram, the middle position point of the attached section of the steering mechanism and the inclined plane of the pressing block is called an O point, the inclined plane of the pressing block is called an A point at any point positioned on the inner side of the helium pressing container, and the horizontal plane projection point of the vertical hinging rod is called B.
2. An automated helium pressurized leak detection system as defined in claim 1 wherein the leak detection system comprises: the device comprises a leak detection container, a second nitrogen gas charging pipeline assembly, a second main pumping pipeline assembly, a second pre-pumping pipeline assembly, a primary pumping pipeline and a calibration pipeline assembly;
a second low-gauge and balance valve is arranged on the leak detection container;
the second main pumping pipeline assembly, the second pre-pumping pipeline assembly and the calibration pipeline assembly are connected in parallel between the leak detection container and the primary pumping pipeline;
wherein the second nitrogen charge line assembly comprises: the nitrogen gas source, second nitrogen gas inflation line, from the direction of nitrogen gas source to leak hunting container, set gradually at second nitrogen gas inflation line: a third decompression gauge and a third inflation valve;
wherein, the one-level pipeline of bleeding includes: a first-stage air extraction pipeline, an electromagnetic differential pressure valve and a second front-stage pump; the second backing pump is arranged at the end part of the primary air extraction pipeline, and the electromagnetic pressure difference valve is arranged at the middle part of the primary air extraction pipeline;
wherein, the second main pumping pipeline assembly includes: the second main pumping pipeline, the second main pumping valve, the high gauge, the molecular pump, the third low gauge, the first leak detection valve, the first leak detector and the backing valve; from leak hunting container to the direction of one-level bleed pipeline, connect gradually: the second main pumping valve, the high gauge, the molecular pump, the third low gauge, the first leak detection valve and the backing valve; one side of the first leak detection valve is connected to the second main pumping pipeline, and the other side of the first leak detection valve is connected to the first leak detector;
wherein the second pre-pump line assembly comprises: a second pre-pumping pipe and a second pre-pumping valve installed on the second pre-pumping pipe;
wherein, calibration piping assembly includes: a single pass calibration line assembly, the single pass calibration line assembly comprising: the leakage detection device comprises a single-way leakage detection pipeline, a leakage hole calibration valve, a leakage hole pre-pumping valve and a standard leakage hole, wherein the standard leakage hole is arranged on the single-way leakage detection pipeline between the leakage hole calibration valve and the leakage hole pre-pumping valve.
3. An automated helium pressurized leak detection system according to claim 2, wherein the calibration line assembly comprises a multi-way variational connected single-way calibration line assembly.
4. An automated helium pressurization leak detection system according to claim 2 or 3, wherein the helium pressurization system further comprises: the device comprises a first helium gas charging pipeline assembly, a nitrogen gas charging pipeline assembly, a deflation pipeline assembly, a first pre-pumping pipeline assembly and a first main pumping pipeline assembly;
the helium pressing container is connected with: the device comprises a first helium gas charging pipeline assembly, a nitrogen gas charging pipeline assembly, a deflation pipeline assembly, a first pre-pumping pipeline assembly and a first main pumping pipeline assembly;
wherein, helium gas charging line subassembly includes: the helium gas source and the helium gas charging pipeline are sequentially provided with: a first pressure reducing gauge and a first inflation valve;
wherein, first nitrogen charging line subassembly includes: the nitrogen gas source, first nitrogen gas inflation line, from the direction of nitrogen gas source to the pressure helium container, set gradually at first nitrogen gas inflation line: the second decompression meter and the second inflation valve;
wherein, the gassing circuit subassembly includes: the air release valve is arranged on the air release pipeline;
wherein, first pre-pump line assembly includes: the system comprises a first pre-pumping pipeline, a first pre-pumping valve, a first low gauge and a first backing pump; the first backing pump is arranged at the end part of the pre-pumping pipeline; in the direction from the first backing pump to the helium vessel, the first pre-pumping pipeline is provided with: a first pre-pump valve, a first low gauge;
the first main pumping pipeline assembly comprises a first main pumping pipeline and a first main pumping valve arranged on the first main pumping pipeline;
one end of the first main pumping pipeline is connected with the helium pressing container, and the other end of the first main pumping pipeline is connected with the second main pumping pipeline; the connection part of the first main pumping pipeline and the second main pumping pipeline is arranged between the second main pumping valve and the molecular pump.
5. A method for detecting a leak in an automated helium pressurized leak detection system, said automated helium pressurized leak detection system being in accordance with claim 4, comprising the steps of:
step1, placing a workpiece into a helium pressing container of a helium pressing system through a material inlet and outlet system;
step2, closing the helium vessel:
step3, pressing helium;
step4, after helium pressing is completed, transferring the workpiece on the material trolley into a leakage detection container by a grabbing system to detect leakage;
step5, after the leak detection is finished, opening a third inflation valve, replacing with nitrogen, and opening a balance valve to avoid that the nitrogen is inflated to become positive pressure;
step6, opening a sealing door of the leak detection container, and grabbing workpieces by a grabbing system to be placed in a qualified area or a unqualified area.
6. The method of leak detection of an automated helium pressurized leak detection system of claim 5, step1 further comprising: the workpiece is placed on the material trolley, and the material trolley is placed into the helium pressing container through the stroke cylinder.
7. The method of leak detection of an automated helium pressurized leak detection system of claim 5, step2 further comprising:
step2-1, controlling a stroke cylinder, retracting the material trolley into the helium vessel, and opening and closing a door to close the helium vessel;
step2-2, the self-locking mechanism is closed.
8. The method of leak detection of an automated helium pressurized leak detection system of claim 5, step3 further comprising:
step3-1, vacuumizing: opening a first backing pump and a first pre-pumping valve, and pumping the helium vessel to vacuum; then, the second backing pump, the backing valve, the electromagnetic differential pressure valve, the molecular pump and the first main pumping valve are opened again to continuously pump vacuum to a higher degree;
step3-2, helium filling: closing all valves and a pump body in Step3-1, then opening a first inflation valve, and maintaining the pressure in the helium container for a certain time when the pressure in the helium container reaches preset air pressure; finally, closing the first inflation valve;
step3-3, opening a gas release valve after the helium is pressed, and discharging helium after the helium is pressed;
step3-4, opening a first inflation valve to inflate nitrogen, and purging the helium vessel and the workpiece inside the helium vessel;
step3-5, opening the sealing door after purging, pushing out the material trolley by the travel cylinder, and purging the material trolley again by compressed air when the material trolley reaches the designated limit position.
9. The method of leak detection of an automated helium pressurized leak detection system of claim 5, step4 further comprising:
step4-1, rough drawing:
opening an electromagnetic differential pressure valve, a second backing pump and a second pre-pumping valve, wherein the second backing pump evacuates the leak detection container to a set target pressure;
step4-2, fine pumping:
closing the second pre-pumping valve, opening the second main pumping valve, the backing valve and the molecular pump, evacuating the leak detection container to the set target pressure, and closing the backing valve;
step4-3, leak detection:
closing a backing valve, opening a first leak detection valve, and carrying out product leak detection by a first leak detector to obtain a specific helium leak rate, and judging whether the product is qualified or not.
10. A method of leak detection for an automated helium pressurized leak detection system according to claim 5,
before Step1, standard leak calibration is performed, and any single-path calibration pipeline component is selected for calibration, which is called: a target single-pass calibration line component; the leak rate of the standard leak hole of the target single-way calibration pipeline component is the same as the leak rate threshold value of the single workpiece;
the step of standard leak calibration includes:
opening an electromagnetic differential pressure valve, a second backing pump, a second pre-pumping valve and a leak pre-pumping valve of a target single-way calibration pipeline component, pre-pumping the leak detection container and a standard leak of the target single-way calibration pipeline component by the second backing pump, evacuating to a set target pressure after pre-pumping is achieved, and closing the second pre-pumping valve and the leak pre-pumping valve;
step two, a second main pumping valve, a backing valve and a molecular pump are opened, the leak detection container is pumped out to a set target pressure, and then the backing valve is closed;
step three, opening the first leak detection valve and the leak calibration valve of the target single-way calibration pipeline component, wherein the second main pumping valve is still kept open, leak detection is started, and after the detection time is up, the first leak detection valve and the leak calibration valve of the target single-way calibration pipeline component are closed;
and step four, closing the second main pumping valve, opening the third inflation valve, deflating to a certain pressure, simultaneously opening the balance valve, and opening the box after the vacuum breaking is finished.
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| CN110940461A (en) * | 2019-12-26 | 2020-03-31 | 中国工程物理研究院材料研究所 | Leakage detecting system and method for large container part |
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