CN116278066A

CN116278066A - Full-automatic multi-temperature-zone continuous annealing furnace

Info

Publication number: CN116278066A
Application number: CN202211425111.8A
Authority: CN
Inventors: 陈雪; 虞洋; 孟相鹏; 颜欢
Original assignee: Guilin University of Electronic Technology
Current assignee: Guilin University of Electronic Technology
Priority date: 2022-11-15
Filing date: 2022-11-15
Publication date: 2023-06-23

Abstract

The invention discloses a full-automatic multi-temperature-zone continuous annealing furnace, which relates to the technical field of annealing furnace equipment and comprises a furnace tube assembly, a mesh belt conveying assembly, a furnace body opening mechanism and a charging tray, wherein a heating part in the furnace tube assembly is divided into three annealing temperature zones, the temperatures of the three annealing temperature zones are respectively set to 350 ℃, 550 ℃ and 750 ℃, and each annealing temperature zone is separated by a heat preservation layer.

Description

Full-automatic multi-temperature-zone continuous annealing furnace

Technical Field

The invention relates to the technical field of annealing furnace equipment, in particular to a full-automatic multi-temperature-zone continuous annealing furnace.

Background

With the rapid development of electronic components toward miniaturization, multifunctionality, and greenization, thin film fabrication materials are becoming an integral part of the irreplacements of various micro-drivers and sensors. In the production process of preparing the film by using the sol-gel method, annealing treatment is an important process link, and residual stress generated in the film can be eliminated by annealing treatment, so that the probability of generating cracks in the film can be effectively reduced, and better film quality can be obtained.

The annealing furnace applied to film preparation in the current market has low automation degree and poor stability, and cannot accurately control and adjust the environmental temperature and annealing time of rapid annealing of samples. Most annealing furnaces have large hearth, poor heat preservation performance and overlarge volume and shape, so that a large amount of heat energy is consumed when the whole space in the hearth reaches or falls to a specified temperature. The process requirement of multi-temperature section annealing during film heat treatment cannot be met. At present, a full-automatic multi-temperature-zone continuous annealing furnace which can accurately control the annealing temperature and the annealing time, has a plurality of annealing chambers and can continuously perform annealing work is still lacking.

Disclosure of Invention

Aiming at the defects, the invention provides the full-automatic multi-temperature-zone continuous annealing furnace, which can accurately control the annealing temperature and the annealing time, and solve the defects of annealing process technology in the process of preparing the film by a sol-gel method by utilizing a multi-temperature-zone automatic continuous annealing mode, thereby greatly improving the quality of the film.

In order to achieve the above purpose, the invention adopts the following technical scheme:

a fully automatic multi-temperature zone continuous annealing furnace comprising:

a frame;

the furnace tube assembly is erected on the frame and comprises an inner furnace shell, an outer furnace shell, a flange mounting seat and a heating part, wherein the flange mounting seat is arranged on the frame, the flange is arranged on the flange mounting seat, the outer furnace shell is sleeved outside the inner furnace shell, the flange is arranged on two opposite ends of the inner furnace shell, the heating part is arranged on the inner wall of the inner furnace shell, the heating part is in three annealing temperature intervals, the temperature of the three annealing temperature intervals is respectively 350 ℃, 550 ℃ and 750 ℃, and each annealing temperature interval is separated by a heat preservation layer;

the net belt conveying assembly comprises a conveying part and a mounting part, the mounting part comprises a large carrier roller and a small carrier roller, the large carrier roller is mounted on two opposite ends of the frame, and the small carrier roller is arranged on the frame body of the frame;

the furnace body opening mechanism is erected and installed above the furnace tube assembly;

and the material tray is arranged on the net belt conveying assembly.

In a further preferred embodiment of the invention, the inner furnace shell comprises a first inner furnace half shell and a second inner furnace half shell, the outer furnace shell comprises a first outer furnace half shell and a second outer furnace half shell, the first outer furnace half shell is connected with the second outer furnace half shell through a joint, the first inner furnace half shell is fixedly arranged in the first outer furnace half shell through bolts, the second inner furnace half shell is fixedly arranged in the second outer furnace half shell through bolts, and the second outer furnace half shell is arranged on the rack through bolts.

According to a further preferred scheme of the invention, the heating part comprises a quartz tube, a heating element, a temperature measuring element and a tube plug, wherein two ends of the quartz tube are nested in the flange, the tube body of the quartz tube is positioned at the central position of the inner furnace shell, the tube plug is arranged on the flange, a groove is formed in the direction of the tube plug towards the inner furnace shell, a net belt bracket is arranged on the groove, heat preservation layers and a furnace chamber are arranged on the inner wall of the inner furnace shell up and down, the heat preservation layers and the furnace chamber are arranged in a staggered mode, the heating element is arranged in the furnace chamber, and the temperature measuring element is arranged in the middle of the furnace chamber.

In a further preferred embodiment of the present invention, the hearth and the heat insulation layer are of two-half split type.

In a further preferred embodiment of the invention, the heating element is wound in a spiral form and is semi-exposed and embedded in the burner hearth.

In a further preferred scheme of the invention, the conveying part comprises a variable frequency motor, a chain, a driving roller, a gear, a net belt tensioning part and a metal net belt, wherein the variable frequency motor is arranged on the frame, the gear is rotatably arranged on the frame, the driving roller and the gear are coaxially arranged, the chain is used for linking the variable frequency motor and the gear to indirectly drive the driving roller to rotate, the net belt tensioning part is arranged on the frame and adjacent to the driving roller, the metal net belt is used for linking the large carrier roller, the small carrier roller and the driving roller, and the metal net belt is driven by the variable frequency motor to do transmission motion.

In a further preferred scheme of the invention, the mesh belt tensioning part comprises a tensioning wheel, a sliding rail, a spring, a rotary table and a sliding seat, wherein the sliding rail is arranged on the rack, the tensioning wheel is arranged on the sliding seat, the sliding seat is arranged on the sliding rail in a sliding manner, the rotary table is arranged on the rack, a telescopic rod at the tail end of the rotary table is connected with the sliding seat through the spring, and the rotary table is rotated to drive the tensioning wheel to move up and down so as to adjust the tensioning state of the mesh belt.

In a further preferred embodiment of the invention, the belt tensioning device is mounted in a vertical direction.

According to a further preferred scheme of the invention, the furnace body opening mechanism comprises a pulley, a portal frame, a movable cross beam, an electric push rod and a guide rod, wherein the portal frame is arranged on the frame, the pulley is respectively arranged at two opposite ends of the portal frame, a steel wire rope is further arranged on the pulley and connected to the first outer furnace half shell and the movable cross beam through the pulley, the guide rod is vertically arranged between the portal frame and the frame, the electric push rod is vertically arranged at the center of the bottom surface of the portal frame, one end of the electric push rod is connected with the portal frame, the other end of the electric push rod is connected with the movable cross beam, the movable cross beam is sleeved on the guide rod, and driven by the electric push rod, the movable cross beam slides up and down along the guide rod, and in the process that the movable cross beam moves downwards, the steel wire rope pulls the first outer furnace half shell through the pulley, and the first outer furnace half shell rotates around a hinge to realize the opening of the first outer furnace half shell.

According to a further preferred scheme, the tray comprises a silicon wafer, a tray, a limiting card and a bottom support, wherein a rotary buckle is arranged on the tray or the bottom support, the tray is connected with the bottom support through the rotary buckle, a sliding groove is formed in the bottom support, the limiting card is arranged on the sliding groove in a sliding mode, the silicon wafer is placed on the tray, and the edge of the silicon wafer abuts against the limiting card.

In a further preferred embodiment of the present invention, a cooling fan is provided on the rack, and the cooling fan is positioned to be aligned with the three annealing temperature ranges, respectively.

Compared with the prior art, the invention has the beneficial effects that:

1. according to the full-automatic multi-temperature-zone continuous annealing furnace provided by the invention, through the arrangement and division of the temperature zones, the film can be continuously subjected to the annealing process of three heating stages, the annealing process requirement of film heat treatment is met, and the annealing time and the annealing temperature of the film can be further controlled more accurately;

2. according to the invention, the furnace body opening device is arranged, so that the furnace shell and the hearth can be conveniently opened, and the installation and replacement of the quartz tube and the later inspection and maintenance of equipment are facilitated;

3. through the charging tray that has detachable spacing card and tray structure of design, accessible adjustment spacing card position and tray size make the charging tray can load the silicon chip of equidimension.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the description of the embodiments will be briefly described below.

FIG. 1 is a schematic view of the overall structure of an annealing furnace in the invention;

FIG. 2 is a schematic view of the overall structure of the furnace tube assembly according to the present invention;

FIG. 3 is a longitudinal cross-sectional view of a furnace tube assembly according to the present invention;

FIG. 4 is a schematic view of a belt installation structure according to the present invention;

FIG. 5 is a schematic view of a belt tensioner according to the present invention;

FIG. 6 is a schematic view of a furnace opening mechanism according to the present invention;

FIG. 7 is a schematic diagram showing the structure of a tray according to the present invention.

Wherein the symbols shown in the figures are: 1. a furnace tube assembly; 101. an inner furnace shell; 102. an outer furnace shell; 103. a flange; 104. a flange mounting seat; 105. a quartz tube; 106. a heating element; 107. a mesh belt bracket; 108. a temperature measuring element; 109. a heat preservation layer; 110. plugging a pipe; 111. a furnace; 2. a large carrier roller; 3. a frame; 4. a variable frequency motor; 5. a chain; 6. a driving roller; 7. a gear; 8. a mesh belt tensioning section; 81. a tensioning wheel; 82. a slide rail; 83. a spring; 84. a turntable; 85. a slide; 9. a small carrier roller; 10. the method comprises the steps of carrying out a first treatment on the surface of the 11. A metal mesh belt; 12. a material tray; 121. a silicon wafer; 122. a tray; 123. a limit clamp; 124. a bottom support; 13. a furnace body opening mechanism; 131. a pulley; 132. a portal frame; 133. a movable cross beam; 134. an electric push rod; 135. a guide rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

In the description of the present invention, it should be noted that, the azimuth or positional relationship indicated by the term "inner" or the like is based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship that is commonly put when the inventive product is used, only for convenience of describing the present invention and simplifying the description, and does not indicate or imply that the apparatus or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed", "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

Examples

Referring to fig. 1 and 2, a preferred embodiment of the present invention provides a full-automatic multi-temperature zone continuous annealing furnace, comprising:

a frame 3;

the furnace tube assembly 1 is erected on the frame 3, the furnace tube assembly 1 comprises an inner furnace shell 101, an outer furnace shell 102, a flange 103, a flange mounting seat 104 and a heating part, the flange mounting seat 104 is mounted on the frame 3, the flange 103 is mounted on the flange mounting seat 104, the outer furnace shell 102 is sleeved outside the inner furnace shell 101, the flange 103 is mounted on two opposite ends of the inner furnace shell 101, the heating part is arranged on the inner wall of the inner furnace shell 101, the heating part is provided with three annealing temperature intervals, the temperature of the three annealing temperature intervals is respectively set to 350 ℃, 550 ℃ and 750 ℃, and each annealing temperature interval is separated by a heat preservation layer 109;

wherein, the surface of the furnace shell is subjected to baking varnish rust prevention treatment, and the shell is formed by processing 2mm high-quality carbon steel sheet metal, so that the strength of the furnace shell is ensured and the weight of equipment is reduced;

the net belt conveying assembly comprises a conveying part and an installation part, wherein the installation part comprises a large carrier roller 2 and a small carrier roller 9, the large carrier roller 2 is installed at two opposite ends of the frame 3, and the small carrier roller 9 is arranged on the frame body of the frame 3;

the frame 3 is provided with a cooling fan 10, the positions of the cooling fan 10 are respectively aligned with three annealing temperature intervals, wherein the temperatures of the three annealing temperature intervals are respectively set to be 350 ℃, 550 ℃ and 750 ℃, and the aim of improving the film annealing heat treatment process is fulfilled;

the furnace body opening mechanism 13 is erected and installed above the furnace tube assembly 1;

a plurality of trays 12 are arranged on the net belt conveying assembly.

In a preferred embodiment of the present invention, the inner furnace shell 101 comprises a first inner furnace half shell and a second inner furnace half shell, the outer furnace shell 102 comprises a first outer furnace half shell and a second outer furnace half shell, the first outer furnace half shell is connected with the second outer furnace half shell through a joint, the first inner furnace half shell is fixedly installed in the first outer furnace half shell through bolts, the second inner furnace half shell is fixedly installed in the second outer furnace half shell through bolts, and the second outer furnace half shell is installed on the rack 3 through bolts.

In the preferred embodiment of the invention, the heating part comprises a quartz tube 105, a heating element 106, a temperature measuring element 108 and a tube plug 110, (wherein the tube plug 110 comprises an inlet tube plug and an outlet tube plug, the two tube plugs have the same shape and structure and are arranged to reduce heat loss and ensure uniformity of temperature in a tank), two ends of the quartz tube 105 are nested in the flange 103, the quartz tube 105 has the size of phi 380 x phi 368 x 2500mm, the size is used to prevent dust of a hearth 111 from falling onto a silicon wafer and polluting the film, the tube body of the quartz tube 105 is positioned on the central position of the inner furnace shell 101, the neck of the tube plug 110 is provided with a boss, the tube plug 110 is arranged on the flange 103, the tube plug 110 is provided with a groove towards the direction of the inner furnace shell 101, the groove is provided with a mesh belt bracket 107, the joint of the mesh belt bracket 107 and the inlet pipe plug is provided with a space for the bracket to stretch due to high temperature, the time for the ferroelectric/piezoelectric film to move from the middle of the previous temperature area to the middle of the next temperature area must be controlled to be about 3 minutes due to the requirement of a treatment process, the inner wall of the inner furnace shell 101 is provided with an insulating layer 109 and a hearth 111 up and down, the insulating layer 109 is formed by combining an alumina polycrystalline fiber plate and a fiber blanket, the density is small, the weight is light, the heat conductivity coefficient is small, the shrinkage ratio at high temperature is small, the chemical property is stable, the insulating layer 109 and the hearth 111 are arranged in a staggered manner, the hearth 111 is manufactured by adopting an alumina polycrystalline fiber vacuum adsorption molding process, and the size is phi 400 multiplied by 250mm (inner diameter multiplied by length). Six sections of hearths are included in the annealing furnace, each section of hearths can be independently heated by temperature control, every two sections of hearths are combined together to form a temperature interval, three temperature intervals of 350 ℃, 550 ℃ and 750 ℃ are arranged in total, the heating element 106 is arranged in the hearth 111, the heating element 106 adopts an iron-chromium-aluminum resistance wire, and the highest design temperature can reach 900 ℃. The heating element 106 and the hearth 111 are combined to form an independent temperature-controlled electrothermal module. The temperature measuring elements 108 are all K-shaped thermocouples, so that the temperature uniformity can be effectively ensured, the temperature measuring elements 108 are kept in a completely opened state, the heating temperature in the hearth 111 is fed back in real time and adjusted in time, the temperature measuring elements 108 are arranged in the middle of the hearth 111, and the hearth 111 and the heat preservation layer 109 are designed in a two-half split type structure.

Referring to fig. 3, more specifically, the heating element 106 is wound in a spiral shape, and is semi-exposed and embedded in the hearth 111, so as to enable uniform heating during annealing of the thin film.

The working principle of the furnace tube assembly is as follows: when the annealing furnace starts to work, the heating element 106 in the furnace tube starts to heat, and when the temperature measuring element 108 measures that the annealing temperature in each annealing interval reaches the specified requirement, the heating element 106 stops heating and keeps the temperature constant. The tray 12 enters the furnace tube through the opening at the inlet pipe plug, and is conveyed out through the opening at the outlet pipe plug after three-stage annealing treatment.

Referring to fig. 4, in the preferred embodiment of the present invention, the conveying portion includes a variable frequency motor 4, a chain 5, a driving roller 6, a gear 7, a mesh belt tensioning portion 8 and a metal mesh belt 11, where the variable frequency motor 4 is installed on the frame 3, the gear 7 is rotatably installed on the frame 3, the driving roller 6 and the gear 7 are coaxially disposed, the chain 5 links the variable frequency motor 4 and the gear 7, indirectly drives the driving roller 6 to rotate, the mesh belt tensioning portion 8 is installed on the frame 3 along a vertical direction and is adjacent to the driving roller 6, the metal mesh belt 11 links the large carrier roller 2, the small carrier roller 9 and the driving roller 6, the metal mesh belt 11 is driven by the variable frequency motor 4 to perform a transmission motion, the metal mesh belt 11 is 11400mm long, 320mm wide, the material is AISI314 stainless steel, a plurality of limit strips are welded on the outer side of the metal mesh belt 11, and the limit strips are used for preventing a material disc on the mesh belt from moving in a fast driving process or stopping the metal mesh belt 11 in a fast driving process. The limit strip is welded, so that the problem of movement of the material tray is solved, and the driving of the net belt is not influenced. The belt tensioner 8 is provided because the metal belt 11 is thermally expanded when it is operated in a high temperature environment, so that the belt length elongation affects the belt drive.

Referring to fig. 5, in a preferred embodiment of the present invention, the belt tensioning portion 8 includes a tensioning wheel 81, a sliding rail 82, a spring 83, a turntable 84 and a sliding seat 85, the sliding rail 82 is disposed on the frame 3, the tensioning wheel 81 is mounted on the sliding seat 85, the sliding seat 85 is slidably disposed on the sliding rail 82, the turntable 84 is mounted on the frame 3, a telescopic rod at an end of the turntable 84 is connected with the sliding seat 85 through the spring 83, and the turntable 84 is rotated to drive the tensioning wheel 81 to move up and down, so as to adjust the tensioning state of the belt.

The operating principle of the net belt conveying component is as follows: rotating the turntable 84 to enable the tensioning wheel 81 to move up and down along the sliding rail 85, starting the variable frequency motor 4 after the tension degree of the net belt is adjusted moderately, enabling the variable frequency motor 4 to enable the driving roller 6 to rotate at a certain speed through the transmission of the chain 5 and the gear 7, continuously conveying the tray 12 filled with silicon wafers into the furnace tube for heating treatment at a set speed under the action of the driving roller 6 and each large and small carrier roller, enabling the tray 12 to enter the annealing furnace through an opening at an inlet pipe plug, and conveying out through an opening at an outlet pipe plug after the annealing process is completed.

Referring to fig. 6, in a preferred embodiment of the present invention, the furnace opening mechanism 13 includes a pulley 131, a gantry 132, a movable beam 133, an electric push rod 134 and a guide rod 135, wherein the gantry 132 is mounted on the frame 3, the pulley 131 is respectively mounted on two opposite ends of the gantry 132, the pulley 131 is further provided with a wire rope, the wire rope is connected to the first outer furnace half shell and the movable beam 133 through the pulley 131, the guide rod 135 is vertically mounted between the gantry 132 and the frame 3, the electric push rod 134 is vertically disposed at the center of the bottom surface of the gantry 132, one end of the electric push rod 134 is connected to the gantry 132, the other end is connected to the movable beam 133, and the movable beam 133 is sleeved on the guide rod 135;

the working principle of the furnace body opening device is as follows: by driving the electric push rod 134, the movable cross beam 133 slides up and down along the guide rod 135, and in the process that the movable cross beam 133 moves down, the steel wire rope pulls the first outer furnace half shell through the pulley 131, and the first outer furnace half shell rotates around the hinge, so that the opening of the first outer furnace half shell is realized, that is, the opening angle is 60 ° at most.

Referring to fig. 7, in a preferred embodiment of the present invention, the tray 12 includes a silicon wafer 121, a tray 122, a limiting card 123 and a collet 124, a rotating buckle is disposed on the tray 122 or the collet 124, the tray 122 is connected with the collet 124 through the rotating buckle, 4 sliding grooves are disposed on the collet 124, the limiting card 123 is slidably disposed on the sliding grooves, when the silicon wafer 121 is placed on the tray 122, the silicon wafer 121 can just contact with the four limiting cards 123, and the tray 122 and the limiting card 123 both play a role of protecting the silicon wafer 121, and the size of the tray 122 is smaller than that of the silicon wafer 121, so as to facilitate the clamping of the mechanical claw, when the tray 12 is sent onto the metal mesh belt 11 via the conveyor belt, the tray 122 can just be placed between every two limiting strips on the mesh belt; the tray 12 is made of high-purity quartz, has smooth and clean surface and good thermal shock resistance, is used for accommodating silicon wafers, has the same outline size and the same internal silicon wafer positioning structure, has the outline size of 300 multiplied by 210mm, has the internal size which is specifically set according to the different sizes of the silicon wafers, and is provided with a number or a number and letter combined mark, thereby facilitating the visual identification of a manipulator and being beneficial to the accurate positioning of the silicon wafer grabbing process;

the invention designs a tray with a detachable limit card 123 and tray 122 structure, and silicon wafers 121 with different sizes can be loaded on the tray 12 by adjusting the position of the limit card 123 and the size of the tray 122.

The main technology of the invention is to complete the annealing process of the film by utilizing three annealing intervals, and the specific working procedures are as follows: the tray 12 enters the furnace tube through the opening at the inlet pipe plug, and the heating element 106 wound into a spiral inside the hearth 111 continuously releases heat. When the tray 12 completely passes through the inlet pipe plug, the tray enters a first annealing zone, the temperature is set to be 350 ℃ in the zone, and the time for the tray 12 to pass through the zone under the transmission of the mesh belt 19 is 3 minutes; the ferroelectric/piezoelectric film enters a second annealing interval after being annealed in the first stage, the temperature set in the second annealing interval is 550 ℃, and the time for the tray 12 to pass through the second annealing interval is 3 minutes; when the film is annealed in the second stage, it is transferred into a third annealing zone set at 750 ℃ and the tray 12 is annealed for 3 minutes in this zone. After the film has been annealed in all three stages, it is continuously conveyed out of the furnace by the mesh belt 19, so that a complete annealing process is completed.

In summary, the description of the embodiment is provided by the invention, the full-automatic multi-temperature-zone continuous annealing furnace can accurately control the annealing temperature and the annealing time, can realize uniform heating and multi-temperature-zone annealing, improves the heat treatment process of annealing the silicon wafer, and solves the problems of single annealing temperature control, nonuniform annealing heating, low automation degree and the like in the prior art.

The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A fully automatic multi-temperature zone continuous annealing furnace, comprising:

a frame (3);

the furnace tube assembly (1) is erected on the frame (3), the furnace tube assembly (1) comprises an inner furnace shell (101), an outer furnace shell (102), a flange (103), a flange mounting seat (104) and a heating part, the flange mounting seat (104) is mounted on the frame (3), the flange (103) is mounted on the flange mounting seat (104), the outer furnace shell (102) is sleeved outside the inner furnace shell (101), the flange (103) is mounted on two opposite ends of the inner furnace shell (101), the heating part is arranged on the inner wall of the inner furnace shell (101), the heating part is provided with three annealing temperature intervals, the temperatures of the three annealing temperature intervals are respectively set to 350 ℃, 550 ℃ and 750 ℃, and each annealing temperature interval is separated by a heat preservation layer (109);

the net belt conveying assembly comprises a conveying part and an installation part, wherein the installation part comprises a large carrier roller (2) and a small carrier roller (9), the large carrier roller (2) is installed at two opposite ends of the frame (3), and the small carrier roller (9) is arranged on a frame body of the frame (3);

the furnace body opening mechanism (13) is erected and installed above the furnace tube assembly (1);

and the material tray (12) is arranged on the mesh belt conveying assembly.

2. The full-automatic multi-temperature zone continuous annealing furnace according to claim 1, wherein said inner furnace shell (101) comprises a first inner furnace half shell and a second inner furnace half shell, said outer furnace shell (102) comprises a first outer furnace half shell and a second outer furnace half shell, said first outer furnace half shell is connected with said second outer furnace half shell by a hinge, said first inner furnace half shell is fixedly mounted in said first outer furnace half shell by bolts, said second inner furnace half shell is fixedly mounted in said second outer furnace half shell by bolts, said second outer furnace half shell is mounted on said frame (3) by bolts.

3. The full-automatic multi-temperature-zone continuous annealing furnace according to claim 2, wherein the heating part comprises a quartz tube (105), a heating element (106), a temperature measuring element (108) and a tube plug (110), two ends of the quartz tube (105) are nested inside the flange (103), a tube body of the quartz tube (105) is positioned on the central position of the inner furnace shell (101), the tube plug (110) is arranged on the flange (103), a groove is formed in the tube plug (110) towards the direction of the inner furnace shell (101), a net belt bracket (107) is arranged on the groove, a heat preservation layer (109) and a furnace chamber (111) are arranged on the inner wall of the inner furnace shell (101), the heat preservation layer (109) and the furnace chamber (111) are arranged in a staggered mode, the heating element (106) is arranged inside the furnace chamber (111), and the temperature measuring element (108) is arranged in the middle of the furnace chamber (111).

4. A fully automatic multi-temperature zone continuous annealing furnace according to claim 3, characterized in that said hearth (111) and said insulating layer (109) are of a two-half split structure.

5. A fully automatic multi-temperature zone continuous annealing furnace according to claim 3, characterized in that said heating element (106) is wound in a spiral form, semi-exposed embedded on said hearth (111).

6. The full-automatic multi-temperature-zone continuous annealing furnace according to claim 1, wherein the conveying part comprises a variable frequency motor (4), a chain (5), a driving roller (6), a gear (7), a mesh belt tensioning part (8) and a metal mesh belt (11), the variable frequency motor (4) is installed on the frame (3), the gear (7) is rotatably installed on the frame (3), the driving roller (6) and the gear (7) are coaxially arranged, the chain (5) is linked with the variable frequency motor (4) and the gear (7) to indirectly drive the driving roller (6) to rotate, the mesh belt tensioning part (8) is installed on the frame (3) and adjacent to the driving roller (6), the metal mesh belt (11) is linked with the large carrier roller (2), the small carrier roller (9) and the driving roller (6), and the metal mesh belt (11) is driven by the variable frequency motor (4) to perform transmission motion.

7. The full-automatic multi-temperature-zone continuous annealing furnace according to claim 6, wherein the mesh belt tensioning part (8) comprises a tensioning wheel (81), a sliding rail (82), a spring (83), a rotary table (84) and a sliding seat (85), the sliding rail (82) is arranged on the frame (3), the tensioning wheel (81) is arranged on the sliding seat (85), the sliding seat (85) is arranged on the sliding rail (82) in a sliding manner, the rotary table (84) is arranged on the frame (3), a telescopic rod at the tail end of the rotary table (84) is connected with the sliding seat (85) through the spring (83), and the rotary table (84) is rotated to drive the tensioning wheel (81) to move up and down, so that the tensioning state of the mesh belt is adjusted.

8. A fully automatic multi-temperature zone continuous annealing furnace according to claim 6, characterized in that said belt tensioning section (8) is installed in a vertical direction.

9. The full-automatic multi-temperature zone continuous annealing furnace according to claim 2, wherein the furnace body opening mechanism (13) comprises a pulley (131), a portal frame (132), a movable cross beam (133), an electric push rod (134) and a guide rod (135), wherein the portal frame (132) is installed on the frame (3), the pulley (131) is installed on two opposite ends of the portal frame (132) respectively, a steel wire rope is further arranged on the pulley (131), the steel wire rope is connected to the first outer furnace half shell and the movable cross beam (133) through the pulley (131), the guide rod (135) is vertically installed between the portal frame (132) and the frame (3), the electric push rod (134) is vertically arranged at the center of the bottom surface of the portal frame (132), one end of the electric push rod (134) is connected with the portal frame (132), the other end of the electric push rod is connected with the movable cross beam (133), the movable cross beam (133) is sleeved on the guide rod (135), the electric push rod (134) is driven by the electric push rod (135) to move the first outer furnace half shell through the hinge (133), the steel wire rope is driven by the first outer furnace half shell (133) to rotate along the first hinge, opening of the first outer furnace half shell is achieved.

10. The full-automatic multi-temperature-zone continuous annealing furnace according to claim 1, wherein the tray (12) comprises a silicon wafer (121), a tray (122), a limiting clamp (123) and a bottom support (124), a rotary buckle is arranged on the tray (122) or the bottom support (124), the tray (122) is connected with the bottom support (124) through the rotary buckle, a chute is arranged on the bottom support (124), the limiting clamp (123) is slidably arranged on the chute, the silicon wafer (121) is placed on the tray (122), and the edge of the silicon wafer (121) is abutted against the limiting clamp (123).

11. The full-automatic multi-temperature-zone continuous annealing furnace according to claim 2, wherein a cooling fan (10) is arranged on the frame (3), and the positions of the cooling fans (10) are respectively aligned with three annealing temperature zones.