CN116224575A - Beam drift correction device and method with filtering function - Google Patents
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Abstract
The invention discloses a light beam drift correction device with a filtering function and a method thereof.A light beam incident on the device is filtered by a first piezoelectric reflector frame, a reflecting mirror on a second piezoelectric reflector frame and a first lens, a pinhole and a second lens which are sequentially arranged, then a part of the light beam is transmitted to an energy detection PD by a reflecting mirror on a first fixed reflector frame, and a part of the light beam is emitted to a detection surface of a position detection CCD by a reflecting mirror on a second fixed reflector frame; the energy detection PD keeps the maximum value of the light intensity by adjusting the first piezoelectric reflector frame so as to correct the position drift amount of the light beam; and the second fixed reflector frame is adjusted to enable the spot centroid coordinates of the position detection CCD to be the same as the initial spot centroid coordinates, so that the light beam drift correction is realized. The device can not only finish the correction of the wide-range position drift and the angle drift of the light beam, but also filter the light beam to provide the light beam quality, and provide technical support for the real-time correction of the light beam in a high-precision optical system.
Description
Technical Field
The invention belongs to the field of ultra-precise optical measurement, and particularly relates to a light beam drift correction device with a filtering function and a method thereof.
Background
With the continuous development of laser technology, the precision requirement of an optical system is also continuously improved, the problem of beam pointing drift caused by the comprehensive superposition of various factors gradually becomes the obstruction of the laser technology to the high-precision development, wherein the problems include translational drift, angular drift and random drift, and the final drift effect of the beam is the superposition effect of all the factors. The factors that cause the beam drift are complex and numerous, such as outside mechanical drift, turbulence of the air in the system, changes in ambient temperature, drift of the light source itself, etc. In order to improve the stability of the light beam, the optical system is generally placed in a relatively ideal environment, such as passive vibration reduction by using an optical platform, so as to reduce the influence of external vibration. Or the temperature and humidity control is carried out integrally, so that errors caused by temperature change are reduced, and the influence of air flow and dust is reduced by adopting a space sealing mode. However, on the one hand, the high-precision environmental control cost is very high, on the other hand, since the development of technologies in all the fields is approaching the limit, the further development of all the technical fields is gradually hindered by the negligible small drift before, the requirement is difficult to meet by the simple environmental control, and the drift of the light beam is an urgent problem to be solved.
In order to solve the problem of beam drift, students at home and abroad propose a plurality of beam stabilization methods. The most commonly used detection method is a combination of a lens and a position detector, wherein the angle information is converted into position information by utilizing the focusing effect of the lens to measure, and the position drift is focused on the same point, so that the influence of the position drift is removed; secondly, the telescope system can be used for carrying out angle amplification for measurement, but according to the Helmholtz formula, the light beam is reduced by the same multiple while the angle is amplified, so that the improvement of measurement accuracy is affected, and the method has larger influence on energy distribution and contains a systematic error which is difficult to overcome; in addition, the interference effect of laser is utilized by a learner to convert the angle change of an incident light beam into the change of the grating fringe position, but the method can only measure the angle drift information of one dimension, two sets of systems with perpendicular directions are needed to be used for detection in the light beam angle drift detection, and the scheme only measures two fringes to judge the period change and is easy to be influenced by external interference.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a light beam drift correction device with a filtering function and a method thereof.
The aim of the invention is realized by the following technical scheme:
according to a first aspect of the embodiment of the present invention, there is provided a beam drift correction device with a filtering function, an incident beam is filtered by a first piezoelectric mirror frame, a mirror on a second piezoelectric mirror frame, and then a first lens, a pinhole, and a second lens which are sequentially arranged, and then a part of the beam is transmitted to an energy detection PD by a mirror on a first fixed mirror frame, and a part of the beam is emitted to a detection surface of a position detection CCD by a mirror on a second fixed mirror frame; the energy detection PD keeps the maximum value of the light intensity by adjusting the first piezoelectric reflector frame so as to correct the position drift amount of the light beam; and the second fixed reflector frame is adjusted to enable the spot centroid coordinates of the position detection CCD to be the same as the initial spot centroid coordinates, so that the light beam drift correction is realized.
Further, the focal lengths of the first lens and the second lens are the same.
Further, the first lens and the second lens are lenses with focal lengths of 30 mm.
Further, the reflection mirrors mounted on the first piezoelectric reflector frame and the second piezoelectric reflector frame adopt reflection mirrors with the reflectivity of 99% and the transmittance of 1%.
Further, the pinhole has a diameter of 35 μm.
According to a second aspect of the embodiments of the present invention, there is provided a beam drift correction method with a filtering function, which is applied to the beam drift correction device with a filtering function, and the method includes the following steps:
s1, calibrating an optical beam: making the light beam vertically enter a pinhole, making the beam waist position pass through the center of the pinhole, recording that the light intensity on the energy detection PD is the maximum light intensity Imax at the moment, and the initial value of the centroid coordinates of the light spot on the position detection CCD is (X0, Y0);
s2, when the light beam drifts, the X axis and the Y axis of the first piezoelectric reflector frame are adjusted, so that the beam waist position passes through the center of the pinhole, and the light intensity on the energy detection PD is kept at the light intensity maximum value Imax point.
Further, the step S2 further includes:
and detecting the light spot centroid coordinates (X, Y) on the CCD at the read-out position, calculating the difference value between the light spot centroid coordinates (X, Y) and the initial light spot centroid coordinates (X0, Y0), adjusting the X axis and the Y axis of the second piezoelectric reflector frame to change the difference value, and simultaneously adjusting the first piezoelectric reflector frame to ensure that the light intensity of the energy detector PD always keeps the maximum light intensity Imax until the light spot centroid coordinates (X, Y) are equal to the initial light spot centroid coordinates (X0, Y0), and finishing drift correction.
Further, the process of adjusting the X-axis and the Y-axis of the first piezoelectric reflector mount includes:
acquiring real-time light intensity I on the energy detection PD, and setting a light intensity threshold value in a self-defined manner;
and setting a piezoelectric increment delta, and adjusting the movement amount of the first piezoelectric reflector frame in the X-axis direction and the movement amount of the first piezoelectric reflector frame in the Y-axis direction so that the difference value between the maximum light intensity Imax and the real-time light intensity I is smaller than the light intensity threshold value.
Further, adjusting the X-axis of the second piezoelectric reflector mount includes:
acquiring a real-time spot centroid and abscissa X, and setting a spot centroid and abscissa threshold value in a self-defined manner;
setting a piezoelectric increment delta, and adjusting the movement amount of the second piezoelectric reflector frame in the X-axis direction to enable the real-time spot centroid X and the initial spot centroid X0 to be smaller than a spot centroid abscissa threshold value;
the process of adjusting the Y-axis of the second piezoelectric reflector mount includes;
acquiring a real-time spot centroid ordinate Y, and setting a spot centroid ordinate threshold value in a self-defined manner;
and setting a piezoelectric increment delta, and adjusting the movement amount of the second piezoelectric reflector frame in the Y-axis direction to enable the real-time light spot centroid ordinate Y and the initial light spot centroid ordinate Y0 to be smaller than a light spot centroid ordinate threshold value.
According to a third aspect of the embodiment of the invention, an application of a beam drift correction device with a filtering function in super-resolution microscopic imaging equipment and high-precision laser direct writing lithography equipment is provided.
Compared with the prior art, the invention has the beneficial effects that: the invention discloses a light beam drift correction device with a filtering function, which takes reflecting mirrors on a first piezoelectric reflector frame and a second piezoelectric reflector frame as an actuator for correcting light beams, and adjusts the first piezoelectric reflector frame to enable the light intensity on an energy detection PD to be kept at a maximum value so as to correct the position drift amount of the light beams, and adjusts a second fixed reflector frame to enable the centroid coordinates of light spots of a position detection CCD to be the same as the centroid coordinates of initial light spots, so that the light beam drift correction is realized.
Meanwhile, the device can not only finish the correction of the wide-range position drift and the angle drift of the light beam, but also filter the light beam through the first lens, the pinhole and the small-hole filter formed by the first lens, thereby providing the light beam quality and providing technical support for the real-time correction of the light beam in the high-precision optical system.
In addition, the device has no requirement on the optical path of the peripheral system, does not influence the trend of the optical path, and can be widely applied to high-precision laser technologies such as super-resolution microscopic imaging, high-precision laser direct writing lithography and the like.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort to a person skilled in the art.
FIG. 1 is a schematic diagram of the apparatus of the present invention;
FIG. 2 is a schematic diagram of the change of light intensity with offset on the energy detecting PD according to the present invention;
FIG. 3 is a schematic diagram of the centroid coordinates of a position detection CCD light spot according to the present invention;
FIG. 4 is a schematic view of the state of beam angle drift with beam waist position in the center of the pinhole;
FIG. 5 is a block diagram of a corrective flow for the X-axis and Y-axis of the first piezoelectric reflector mount;
FIG. 6 is a block diagram of a corrective flow for the X-axis of the second piezoelectric reflector mount;
fig. 7 is a block diagram of a correction flow for the Y-axis of the second piezoelectric reflector mount.
In the figure, 1-first piezoreflector holder, 2-second piezoreflector holder, 3-first lens, 4-pinhole, 5-second lens, 6-first fixed reflector holder, 7-energy detection PD, 8-second fixed reflector holder, 9-position detection CCD.
Detailed Description
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the invention. Rather, they are merely examples of apparatus and methods consistent with aspects of the invention as detailed in the accompanying claims.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.
It should be understood that although the terms first, second, third, etc. may be used herein to describe various information, these information should not be limited by these terms. These terms are only used to distinguish one type of information from another. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the invention. The word "if" as used herein may be interpreted as "at … …" or "at … …" or "responsive to a determination", depending on the context.
The present invention will be described in detail with reference to the accompanying drawings. The features of the examples and embodiments described below may be combined with each other without conflict.
The embodiment of the invention provides a light beam drift correction device with a filtering function, which is shown in fig. 1 and comprises two piezoelectric reflector frames, two equal-focal-length lenses, a pinhole, two fixed reflector frames, an energy detection PD, a position detection CCD and other components. The incident beam is first filtered by two piezoelectric mirror holders, then filtered by a filter composed of two isofocal lenses and a pinhole, and then transmitted by two fixed mirror holders, wherein a part of the light is transmitted to the energy detection PD and the position detection CCD, respectively. The first piezoelectric reflector frame is used for enabling the light intensity on the energy detection PD to be kept at the maximum value, the position drift amount of the light beam is corrected, the position of the beam waist always passes through the center of the small hole, meanwhile, the position is combined with the spot centroid coordinates of the position detection CCD, and the second piezoelectric reflector frame is used for correcting the angle drift amount at the moment.
Specifically, the device includes a first piezoreflector holder 1, a second piezoreflector holder 2, a first lens 3, a pinhole 4, a second lens 5, a first fixed reflector holder 6, an energy detection PD7, a second fixed reflector holder 8, and a position detection CCD9. The first piezoelectric reflector frame 1, the second piezoelectric reflector frame 2, the first fixed reflector frame 6 and the second fixed reflector frame 8 are all provided with reflectors.
In this example, the reflection mirror plates used for the first piezoelectric mirror holder 1 and the second piezoelectric mirror holder 2 are reflection mirrors having a reflectance of 99% and a transmittance of 1%. The first lens 3 and the second lens 5 are lenses with focal lengths of 30mm, and the diameter of the pinhole 4 is 35 mu m.
In the example, a femtosecond laser with a beam diameter of 1mm and a wavelength of 517nm is used as an incident light source, an incident light beam firstly enters the device and passes through the reflectors on the first piezoelectric reflector bracket 1 and the second piezoelectric reflector bracket 2 to be used as an actuator for correcting the light beam; then passing through a small-hole filter composed of a first lens 3, a pinhole 4 and a second lens 5, wherein the small-hole filter is used for improving the quality of the light beam, the first lens 3 focuses the light beam, the waist of the light beam is positioned at the pinhole 4, and the first lens 5 converts the light beam with the focal length into a parallel light beam again; then, 1% of the light beam is projected onto the detection surface of the energy detection PD7 through the mirror on the first fixed mirror frame 6 for detecting the light intensity variation of the light beam, and finally, 1% of the light beam is emitted to the outside of the device through the mirror on the second fixed mirror frame 8, where it is transmitted onto the detection surface of the position detection CCD9 for detecting the angle drift amount of the light beam.
The embodiment of the invention provides a light beam drift correction method with a filtering function, which is applied to the light beam drift correction device with the filtering function, and comprises the following steps:
step S1, firstly, calibrating a light beam: the incident beam is made to perpendicularly enter the pinhole 4, and the beam waist position is made to pass through the center of the pinhole 4, the light intensity on the energy detection PD7 at this time is recorded as the light intensity maximum value Imax, and the spot centroid coordinates on the position detection CCD9 at this time are recorded as (X0, Y0), as shown in fig. 3.
In step S2, when the beam drifts, the X axis and the Y axis of the first piezoelectric reflector holder 1 are adjusted first, so that the beam waist position passes through the center of the pinhole 4, and the light intensity on the energy detection PD7 is at the maximum value Imax point, as shown in fig. 2, where the horizontal axis represents the deviation from the center of the pinhole, and the vertical axis represents the light intensity.
However, at this time, the beam may still have an angular drift, the beam state is shown in fig. 4 (2) to fig. 4 (3), at this time, the beam waist position is at the center of the pinhole but has an angular drift, the spot centroid coordinates (X, Y) on the position detection CCD9 at this time are read out, the difference value between the beam waist position and the initial spot centroid coordinates (X0, Y0) is calculated, the X axis and the Y axis of the second piezoelectric mirror frame 2 are adjusted to change the difference value, and simultaneously the first piezoelectric mirror frame 1 is adjusted to keep the light intensity of the energy detector PD7 Imax all the time, and iterative coupling is performed for a plurality of times until the spot centroid coordinates (X, Y) are equal to the initial spot centroid coordinates (X0, Y0), so that drift correction is completed. The state of the beam after the completion of the drift correction is as shown in (1) of fig. 4, and the beam waist position is at the center of the pinhole and there is no angular drift.
Further, flow block diagrams concerning the adjustment of the X axis and the Y axis of the first piezoelectric reflector holder 1 and the second piezoelectric reflector holder 2 in this example are shown in fig. 5 to 7.
As shown in fig. 5, the process of adjusting the X-axis and the Y-axis of the first piezoelectric reflector mount includes;
acquiring real-time light intensity I on the energy detection PD7, and setting a light intensity threshold value in a self-defining way;
judging whether the difference value between the maximum light intensity Imax on the energy detection PD7 and the real-time light intensity I is larger than a light intensity threshold value or not;
setting piezoelectric increment delta, and adjusting movement quantity ax of the first piezoelectric reflector frame in X-axis direction 1 And a movement amount ay of the first piezoelectric reflector frame in the Y-axis direction 1 So that the difference between the maximum light intensity Imax and the real-time light intensity I is smaller than the light intensity threshold.
As shown in fig. 6, the process of adjusting the X-axis of the second piezoelectric reflector mount includes;
acquiring a real-time spot centroid and abscissa X, and setting a spot centroid and abscissa threshold value in a self-defined manner;
setting the piezoelectric increment delta and adjusting the movement bx of the second piezoelectric reflector frame in the X-axis direction 2 And enabling the real-time spot centroid X and the initial spot centroid X0 to be smaller than the spot centroid abscissa threshold value.
As shown in fig. 7, the process of adjusting the Y-axis of the second piezoelectric reflector mount includes;
acquiring a real-time spot centroid ordinate Y, and setting a spot centroid ordinate threshold value in a self-defined manner;
setting piezoelectric increment delta, and adjusting the second piezoelectric reflector frame to be on the Y axisThe amount of movement in the direction is by 2 The real-time light spot centroid ordinate Y and the initial light spot centroid ordinate Y0 are made smaller than the light spot centroid ordinate threshold value.
The piezoelectric increment δ may be subdivided according to the magnitude of the deviation from the set threshold, the smaller the deviation,
the settings may also be reduced appropriately to optimize the corrective procedure.
In summary, the invention discloses a light beam drift correction device with a filtering function, which uses a reflecting mirror on a first piezoelectric reflecting mirror frame and a second piezoelectric reflecting mirror frame as an actuator for correcting light beams, and adjusts the first piezoelectric reflecting mirror frame to enable the light intensity on an energy detection PD to be kept at a maximum value so as to correct the position drift amount of the light beams, and adjusts the second fixed reflecting mirror frame to enable the centroid coordinates of light spots of a position detection CCD to be the same as the centroid coordinates of initial light spots, so that the light beam drift correction is realized.
Meanwhile, the device can not only finish the correction of the wide-range position drift and the angle drift of the light beam, but also filter the light beam through the first lens, the pinhole and the small-hole filter formed by the first lens, thereby providing the light beam quality and providing technical support for the real-time correction of the light beam in the high-precision optical system.
In addition, the device has no requirement on the optical path of the peripheral system, does not influence the trend of the optical path, and can be widely applied to high-precision laser technologies such as super-resolution microscopic imaging, high-precision laser direct writing lithography and the like.
Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of the application following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the application pertains. The specification and examples are to be regarded in an illustrative manner only.
It is to be understood that the present application is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof.
Claims (10)
1. The light beam drift correcting device with the filtering function is characterized in that an incident light beam is filtered through a first lens (3), a pinhole (4) and a second lens (5) which are sequentially arranged through a first piezoelectric reflector frame (1) and a reflecting mirror on a second piezoelectric reflector frame (2), then a part of the light beam is transmitted to an energy detection PD (7) through a reflecting mirror on a first fixed reflector frame (6), and a part of the light beam is emitted to a detection surface of a position detection CCD (9) through a reflecting mirror on a second fixed reflector frame (8); the energy detection PD (7) keeps the maximum value of the light intensity by adjusting the first piezoelectric reflector frame (1) so as to correct the position drift amount of the light beam; and the second fixed reflector frame (8) is adjusted to enable the spot centroid coordinates of the position detection CCD (9) to be the same as the initial spot centroid coordinates, so that the light beam drift correction is realized.
2. The beam drift correction device with filtering function according to claim 1, characterized in that the focal lengths of the first lens (3) and the second lens (5) are the same.
3. The beam drift correction device with filtering function according to claim 2, characterized in that the first lens (3) and the second lens (5) are lenses with a focal length of 30 mm.
4. The beam drift correction device with filtering function according to claim 1, wherein the reflection mirrors mounted on the first piezoelectric mirror holder (1) and the second piezoelectric mirror holder (2) are reflection mirrors with a reflectivity of 99% and a transmittance of 1%.
5. The beam drift correction device with filtering function according to claim 1, characterized in that the pinhole (4) has a diameter of 35 μm.
6. The method for correcting the beam drift with the filtering function is applied to the device for correcting the beam drift with the filtering function according to any one of claims 1 to 5, and is characterized by comprising the following steps:
s1, calibrating an optical beam: making the light beam vertically enter the pinhole (4), making the beam waist position pass through the center of the pinhole (4), recording that the light intensity on the energy detection PD (7) is the maximum light intensity Imax at the moment, and the initial value of the centroid coordinates of the light spot on the position detection CCD (9) is (X0, Y0);
s2, when the light beam drifts, the X axis and the Y axis of the first piezoelectric reflector frame (1) are adjusted, so that the beam waist position passes through the center of the pinhole (4), and the light intensity on the energy detection PD (7) is kept at the point of the maximum light intensity Imax.
7. The method for correcting beam drift with filtering according to claim 6, wherein said step S2 further comprises:
the reading position detects the light spot centroid coordinates (X, Y) on the CCD (9), calculates the difference value between the light spot centroid coordinates (X, Y) and the initial light spot centroid coordinates (X0, Y0), adjusts the X axis and the Y axis of the second piezoelectric reflector frame (2) to change the difference value, and simultaneously adjusts the first piezoelectric reflector frame (1) to ensure that the light intensity of the energy detector PD (7) always keeps the light intensity maximum value Imax until the light spot centroid coordinates (X, Y) are equal to the initial light spot centroid coordinates (X0, Y0), and completes drift correction.
8. A method for correcting beam drift with filtering according to claim 6, characterized in that the process of adjusting the X-axis and the Y-axis of the first piezoelectric reflector holder (1) comprises:
acquiring real-time light intensity I on an energy detection PD (7), and setting a light intensity threshold value in a self-defining way;
and setting a piezoelectric increment delta, and adjusting the movement amount of the first piezoelectric reflector frame in the X-axis direction and the movement amount of the first piezoelectric reflector frame in the Y-axis direction so that the difference value between the maximum light intensity Imax and the real-time light intensity I is smaller than the light intensity threshold value.
9. A method of correcting beam drift with filtering according to claim 6, characterized in that adjusting the X-axis of the second piezoelectric reflector holder (2) comprises:
acquiring a real-time spot centroid and abscissa X, and setting a spot centroid and abscissa threshold value in a self-defined manner;
setting a piezoelectric increment delta, and adjusting the movement amount of the second piezoelectric reflector frame in the X-axis direction to enable the real-time spot centroid X and the initial spot centroid X0 to be smaller than a spot centroid abscissa threshold value;
the process of adjusting the Y axis of the second piezoelectric reflector mount (2) comprises;
acquiring a real-time spot centroid ordinate Y, and setting a spot centroid ordinate threshold value in a self-defined manner;
and setting a piezoelectric increment delta, and adjusting the movement amount of the second piezoelectric reflector frame in the Y-axis direction to enable the real-time light spot centroid ordinate Y and the initial light spot centroid ordinate Y0 to be smaller than a light spot centroid ordinate threshold value.
10. The light beam drift correction device with the filtering function is applied to super-resolution microscopic imaging equipment and high-precision laser direct writing lithography equipment.
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| CN104714297A (en) * | 2013-12-11 | 2015-06-17 | 清华大学 | Free surface reflection-type scanning system |
| US20160320290A1 (en) * | 2015-04-28 | 2016-11-03 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Apparatus for generating two-dimensional illumination patterns |
| CN116068751A (en) * | 2023-01-28 | 2023-05-05 | 深圳赛陆医疗科技有限公司 | Beam directivity stabilizing system, sequencer and debugging method |
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