CN116222199A - Optimizing device for solving particle pollution caused by vibration of marangoni drying module - Google Patents
Optimizing device for solving particle pollution caused by vibration of marangoni drying module Download PDFInfo
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- CN116222199A CN116222199A CN202310198534.9A CN202310198534A CN116222199A CN 116222199 A CN116222199 A CN 116222199A CN 202310198534 A CN202310198534 A CN 202310198534A CN 116222199 A CN116222199 A CN 116222199A
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- 238000001035 drying Methods 0.000 title claims abstract description 204
- 239000013618 particulate matter Substances 0.000 title claims abstract description 46
- 230000008093 supporting effect Effects 0.000 claims abstract description 36
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- 230000009471 action Effects 0.000 claims description 12
- 230000035939 shock Effects 0.000 claims description 12
- 238000010521 absorption reaction Methods 0.000 claims description 5
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- 238000000429 assembly Methods 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
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- 230000011218 segmentation Effects 0.000 claims description 2
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- 235000012431 wafers Nutrition 0.000 description 12
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- 230000001276 controlling effect Effects 0.000 description 2
- 239000008358 core component Substances 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
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- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
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- 239000004065 semiconductor Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 231100000719 pollutant Toxicity 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/02—Applications of driving mechanisms, not covered by another subclass
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/06—Chambers, containers, or receptacles
- F26B25/14—Chambers, containers, receptacles of simple construction
- F26B25/16—Chambers, containers, receptacles of simple construction mainly closed, e.g. drum
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- Drying Of Solid Materials (AREA)
Abstract
The invention relates to an optimizing device for solving particle pollution caused by vibration of a marangoni drying module, which comprises an overall stability control system and a movement control system of a drying cavity (1), wherein the overall stability control system comprises two groups of combining blocks arranged at the bottom of a dewatering tank (3), the two groups of combining blocks are adjustably fixed on a framework (001) of a machine table (0) by using giant bolts, and fulcrums of the corresponding combining blocks are arranged on the framework (001); the mobile control system comprises a cover opening mechanism (2) and an adjusting rod combination (4), wherein the cover opening mechanism (2) is arranged between the drying cavity (1) and the dewatering tank (3) to realize phase movement, and the adjusting rod combination (4) is arranged between the cover opening mechanism (2) and the drying cavity (1). The optimizing device improves the supporting stability of the large-sized heavy drying cavity, ensures the stability of horizontal movement, and can prevent pollution particles from entering the drying module.
Description
Technical Field
The invention relates to the field of semiconductor equipment, in particular to an optimizing device for solving particle pollution caused by vibration of a marangoni drying module.
Background
In the field of semiconductor devices, cleaning and drying of wafers are the last key element. Conventionally, a marangoni drying technology is adopted to design and manufacture wafer drying equipment, a specific drying module is used as a core component on a wafer drying machine, and the drying module is used for realizing the cleaning and drying operation of the wafer. As shown in fig. 1, for one machine, a complete dry cell module must be included. The drying module is generally manufactured in a split manner, and can be regarded as a complete drying tank module formed by a drying cavity of the drying area on the upper layer and a dewatering tank area on the lower half. When drying is performed, the drying area cavity in the upper part needs to be opened and closed, and the cavity is often moved horizontally to open and close in the normal use situation.
However, when the drying chamber performs the opening and closing operation, it is necessary to ensure the linear motion so that the long axis cylinder does not generate a large vibration during the motion. However, for a 12 inch wafer, the diameter of the wafer reaches 30 cm, the size of the drying cavity needs to be 50 cm, the size and weight of the drying cavity easily cause shaking or even levelness change when moving left and right, and the problems of misalignment or dust in the moving process and the like are also easily caused, so that the problem of excessive vibration or re-pollution of particles of the whole drying module is caused.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides an optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module. The optimizing device aims at improving the supporting stability of a large-sized heavy drying cavity, ensuring the stability of horizontal movement, reducing the possibility of polluting particles entering the drying module and avoiding air leakage or liquid leakage in the drying process of the drying module.
In order to achieve the above object, the present invention provides the following technical solutions:
an optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module comprises a drying cavity and a dewatering tank, the optimizing device comprises an integral stability control system and a movement control system of the drying cavity,
the integral stability control system comprises two groups of combining blocks arranged at the bottom of the dewatering tank, the two groups of combining blocks are adjustably fixed on a framework of the machine table by using giant bolts, and fulcrums of the corresponding combining blocks are arranged on the framework;
the mobile control system comprises a cover opening mechanism and an adjusting rod combination, wherein the cover opening mechanism is arranged between the drying cavity and the dewatering tank to realize phase movement, and the adjusting rod combination is arranged between the cover opening mechanism and the drying cavity.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, the left side and the right side of the dewatering tank are respectively provided with the overflow tanks, and the bottom of each overflow tank is respectively provided with a pair of combining blocks.
In the optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module, further, the bottom of the dewatering tank is a slow-descending slope, a pair of front combining blocks and a pair of rear combining blocks are respectively arranged on two sides of the slow-descending slope, two front supporting points corresponding to the two front combining blocks and two rear supporting points corresponding to the two rear combining blocks are arranged on the framework, a height-adjustable giant bolt is arranged between the front combining blocks and the front supporting points, and a height-adjustable giant bolt is arranged between the rear combining blocks and the rear supporting points.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, further, the T-shaped sleeve and the rigid spring for shock absorption are embedded in the front combining block and the rear combining block.
In the optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module, the cover opening mechanism comprises a horizontal supporting beam, a sliding rail, a sliding table, an air cylinder and a mounting plate, wherein the sliding rail is fixed on the mounting plate, the sliding rail is provided with the sliding table capable of moving left and right, the sliding table is connected with the air cylinder, the horizontal supporting beam is fixed on the sliding table, the horizontal supporting beam is provided with a plurality of adjusting rod combinations for connecting the drying cavity, and the bottom of the mounting plate is fixed on the side wall of a dewatering tank.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, further, the horizontal supporting beam is of a cantilever structure which is U-shaped as a whole, two cantilevers extending out of the cantilever structure are respectively arranged on two sides of the drying cavity, and each cantilever is provided with two adjusting rod combinations.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, further, the connecting part of the horizontal supporting beam and the drying cavity is positioned above the gravity center of the drying cavity, and the stability is improved by improving the supporting height.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, the adjusting rod assembly further comprises an adjusting rod, an upper combining block and a lower combining block, the adjusting rod penetrates through the cantilever, one end of the adjusting rod at the upper part of the cantilever is connected with the upper combining block, and one end of the adjusting rod at the lower part of the cantilever is connected with the lower combining block.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, further, the upper combining block is of a split structure, the upper part of the split structure is fixed on the side wall of the drying cavity, the lower part of the split structure is fixed in the upper part of the split structure through a fixing bolt, a fixing bolt mounting position is arranged on the upper part of the split structure, a gasket is sleeved on the fixing bolt between the upper part and the lower part of the split structure, an adjusting rod mounting deep hole is arranged in the central position of the upper part of the split structure, and an adjusting rod through hole is arranged in the central position of the lower part of the split structure.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, the adjusting rod is of a composite structure comprising a rigid inner bolt, a low-elasticity outer bolt, a low-elasticity rigid spring and a rigid outer bolt, the low-elasticity outer bolt is of a hollow tubular structure, the rigid inner bolt is sleeved with the low-elasticity rigid spring and is arranged in a hollow tube of the low-elasticity outer bolt, one end of the rigid inner bolt is provided with an inner bolt cap and is embedded into an adjusting rod mounting deep hole of an upper combining block, the other end of the rigid inner bolt is coaxially fixed with the rigid outer bolt, and a cantilever through which the rigid outer bolt passes is connected with the lower combining block.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, the sliding table is a T-shaped standard sliding table for connecting the air cylinder and the sliding rail, the lower part of the sliding table is a standard sliding table for connecting the air cylinder, and the upper part of the sliding table is a standard sliding table for connecting the sliding rail.
The invention discloses an optimizing device for solving particle pollution caused by vibration of a marangoni drying module, which further comprises an upper dust-proof plate, wherein the upper dust-proof plate is vertically fixed at the top of a mounting plate so as to cover a sliding rail and a sliding table, and two sides of a cylinder on the mounting plate are respectively provided with side dust-proof plates.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, further, a sensor is arranged at the cylinder and aligned with the sliding table to detect the position of the sliding table, so that the stroke segmented execution of the sliding table is realized.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, further, the horizontal movement of the sliding table on the sliding rail is defined as the horizontal phase movement of the X axis, and the position of the sliding table on the sliding rail is divided into seven position points of X0, X1, X2, X3, X4, X5 and X6, which correspond to the following positions respectively:
x0 is the initial limit position of the drying cavity;
x1 is the initial position of the drying cavity leaving the right negative pressure cavity on the dewatering tank, the right negative pressure cavity is positioned in the overflow tank on the right side, the center line of the drying cavity is coincident with the center line of the dewatering tank and is in a closed state of the drying module;
x2 is the initial position of the drying cavity leaving the dewatering tank and is also the end position of the drying cavity leaving the right negative pressure cavity;
x3 is the end position of the drying cavity leaving the dewatering tank;
x4 is the initial position of the drying cavity leaving the right negative pressure cavity, and the left negative pressure cavity is positioned in the left overflow groove;
x5 is the end position of the drying cavity leaving the left negative pressure cavity, and is the position of the dewatering tank completely separated from the drying cavity;
x6 is the final limit position of the drying chamber.
In the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, further, the action of realizing up-and-down adjustment of the drying cavity relative to the horizontal supporting beam by utilizing the combination of four adjusting rods is defined as the lifting action of the drying cavity in the Z-axis direction.
Based on the technical scheme, the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module is applied to wafer drying equipment, and has the following technical effects:
1. the optimizing device of the invention uses different jackscrew adjusting bolts as supporting points to enable the adjusting bolts to absorb vibration with embedded cushioning devices in combining blocks at two sides of a groove body, the groove body is provided with the adjusting giant bolts to be supported on frameworks at two sides of a drying module, so that the effective support of the drying module is formed, the height and the levelness can be adjusted, a T-shaped sleeve for absorbing vibration and a low-resilience high-rigidity spring are embedded in the combining blocks, and when vibration generated by the movement of a cavity at the upper part of the drying module or vibration caused by other parts of components arranged on the frameworks is absorbed and dissipated.
2. The optimization device is provided with four fixed adjustment positions on the groove body, the adopted cushioning structure can have more tolerance for horizontal adjustment, the sleeve and the rigid spring are combined to be sleeved on the adjustment rod, and under the action of the rigid spring and the sleeve, the adjustment device can automatically recover to an adjustment plane corresponding to the correct levelness only by the basic level.
3. The four sides of the tank cover cavity of the drying area at the upper part of the optimizing device are provided with the adjustable combination blocks which can be supported, the drying cavity can be horizontally adjusted and stably supported on the moving device, the left end and the right end of the drying cavity of the drying area are respectively provided with the adjustable combination blocks, the adjustable combination blocks are respectively different from the combination blocks of the tank body, the combination blocks are divided into an upper block and a lower block, the upper block and the lower block are combined, the spacing space is allowed to be embedded into a thick polyurethane shock absorbing ring, blind holes are tapped in the combination blocks to allow an adjusting rod in the form of a giant threaded rod to be screwed in, the combination of the combination blocks on the supporting beam assembled with the moving device is used for fixing and adjusting the level, the adjustable combination blocks and the level are mutually propped against each other by a rigid spring, when vibration can be axially carried out, the thick polyurethane shock absorbing ring and the supporting beam are reversely relieved by the rigid spring, and the whole moving device is provided with a metal shell which is provided with dust-proof particles preventing the dust from being directly regulated to be in gaps between the dewatering tank and the drying cavity, so that the whole moving device has the function of completely preventing dust particles.
4. The sealing effect of the upper cover cavity and the dewatering tank of the optimizing device can be achieved by carrying out micro exhaust system operation at the position of the upper cover cavity to the central axis, so that the inner pressure can be kept tight, the upper cover cavity and the dewatering tank are tightly combined, and the upper cover cavity and the dewatering tank are provided with the embedded groove tracks which are mutually matched and connected, so that the problems of particle run-out and the like can be completely prevented when the upper cover cavity and the sealing process are carried out.
5. In the optimizing device, a special movement control system is designed for a drying module consisting of a heavier drying cavity and a dewatering tank, so that the purpose of realizing phase movement of the drying cavity and the dewatering tank is to ensure that a long-axis cylinder with a longer stroke realizes stable movement when a cover opening mechanism is utilized to realize phase movement, and a special sensor is designed for monitoring the position of the drying cavity, so that 6 pause positions are arranged relative to the dewatering tank according to the requirement of a drying process, and five movement actions are designed, thereby realizing stable and smooth control in the movement process, avoiding dislocation and vibration in the movement process, and avoiding the generation of pollution particles and secondary pollution caused by entering the drying module.
Drawings
FIG. 1 is a schematic diagram of the location of a Marangoni drying module on a wafer drying apparatus.
Fig. 2 is a schematic view of the arrangement of the machine and the frame on the wafer drying apparatus.
FIG. 3 is a schematic diagram of the skeleton positioning points on an optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module.
Fig. 4 is a schematic perspective view of a drying chamber, a cover opening mechanism and a dewatering tank in an optimizing device for solving particle pollution caused by vibration of a marangoni drying module.
Fig. 5 is a schematic side view of the components of the drying chamber, the cover opening mechanism and the dewatering tank in the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module.
Fig. 6 is another perspective view of a drying chamber, a cover opening mechanism and a dewatering tank in an optimizing device for solving particle pollution caused by vibration of a marangoni drying module.
Fig. 7 is a schematic structural view of a cover opening mechanism in an optimizing device for solving particle pollution caused by vibration of a marangoni drying module.
FIG. 8 is a schematic view of the combination structure of the adjusting rod in the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module.
Fig. 9 is a schematic cross-sectional structure of an adjusting rod in an optimizing device for solving particle pollution caused by vibration of a marangoni drying module.
FIG. 10 is a schematic diagram of the phase shift movement point of the drying chamber relative to the dewatering tank in an optimizing apparatus for solving particle contamination caused by vibration of the marangoni drying module according to the present invention.
Wherein, 0-machine 001-framework 002-front fulcrum 003-rear fulcrum 1-drying cavity 2-uncovering mechanism 201-horizontal support beam 202-slide rail 203-slipway 204-cylinder 205-air supply valve 206-mounting plate 207-upper dust-proof plate 208-sensor 209-side dust-proof plate 3-dewatering tank 4-adjusting rod combination 5-upper combining block 6-lower combining block 7-front combining block 70-adjusting rod 71-rigid inner bolt 72-low elasticity outer bolt 73-low elasticity rigid spring 74-inner bolt cap 75-rigid outer bolt 76-adjusting rod lower part 77-adjusting rod upper part 8-rear combining block 81-fixing bolt position 82-fixing bolt 9-gasket
Detailed Description
The following describes in further detail an optimizing apparatus for solving particle pollution caused by vibration of marangoni drying module in order to understand the structural composition and working process more clearly, but the scope of the present invention is not limited thereto.
As shown in fig. 1 and fig. 2, the invention is an optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, which can directly improve the problem that vibration of the marangoni drying integral drying module in use cannot be controlled and is difficult to effectively maintain horizontally, so as to avoid the problem of recontamination of flying dust. In the wafer drying equipment, the marangoni drying module comprises a drying cavity 1 and a dewatering tank 3. The optimizing device comprises an integral stability control system and a movement control system of the drying cavity, and the aim of the invention is achieved by controlling the integral stability and the movement stability. The overall stability control system comprises two groups of combining blocks arranged at the bottom of the dewatering tank 3, the two groups of combining blocks are adjustably fixed on a framework 001 of the machine 0 by using giant bolts, and fulcrums of the corresponding combining blocks are arranged on the framework 001. The mobile control system comprises a cover opening mechanism 2 and an adjusting rod combination 4, wherein the cover opening mechanism 2 is arranged between the drying cavity 1 and the dewatering tank 3 to realize phase movement, and the adjusting rod combination 4 is arranged between the cover opening mechanism 2 and the drying cavity 1. The optimizing device of the invention solves the vibration problem and the pollution problem by keeping the cavity module of the drying area of the upper half part and the dewatering tank module of the lower half part in the integral stable keeping and positioning and effectively controlling the moving device.
As shown in fig. 3, in order to improve the stability of the whole of the drying chamber 1 and the dehydration tank 3, an overall stability control system is designed between the bottom of the dehydration tank 3 and the frame 001 of the machine 0. Specifically, since the overflow tanks are provided on the left and right sides of the dewatering tank 3, a pair of joint blocks are provided at the bottom of each overflow tank. The bottom of the dewatering tank 3 is a slow-falling slope, a pair of front combining blocks 7 and a pair of rear combining blocks 8 are respectively arranged on two sides of the slow-falling slope in a targeted manner, as shown in fig. 3 and 5, two front supporting points 002 corresponding to the two front combining blocks 7 are arranged on the framework 001, two rear supporting points 003 corresponding to the two rear combining blocks 8 are arranged on the framework 001, a height-adjustable giant bolt is arranged between the front combining blocks 7 and the front supporting points 002, and a height-adjustable giant bolt is arranged between the rear combining blocks 8 and the rear supporting points 003. Aiming at the giant bolts, the giant bolts are matched with the front combining block 7 and the rear combining block 8, and T-shaped sleeves and rigid springs for shock absorption are embedded in the front combining block 7 and the rear combining block 8.
And when the fluid moves downwards corresponding to the power line, two corresponding groups of combining blocks, namely a front combining block 7 and a rear combining block 8, are manufactured at the bottoms of the left side and the right side of the groove body of the slow descent slope. The front joint block at the front end is longer and the rear joint block at the rear end is shorter because the bottom of the joint block at the front end is identical to the bottom of the joint block at the rear end in a mode of combining the giant bolt with the tapping threads. The stainless steel 304 or the aluminum alloy 8101 is selected according to the requirements of the drying process on cleanliness, strength, rigidity, resistance to corresponding reactive gases and surface evenness without affecting the air flow, or according to other plastics such as PVDF PVC PTFE.
The overall stability control system utilizes a stable module frame to generate a supporting effect, the bottoms of overflow trough areas on the left side and the right side of the module of the dewatering trough on the lower half are of a slope type design, and then the combination blocks of jackscrews with different relative heights are established to effectively adapt to the installation of the trough body configuration of the slope. And then, the embedded shock absorbers in the combining blocks at two sides of the groove body and the huge bolts are adjusted by using different jackscrews to absorb shock, the huge bolts are adjusted to be supported on the frameworks at two sides of the drying module, the drying module is supported, the height and the levelness can be adjusted, the annular T-shaped sleeve formed by the polyurethane rubber for shock absorption and the low-resilience high-rigidity spring are embedded in the combining blocks, and the shock can be absorbed and dissipated when the cavity at the upper part of the drying module moves or other shock caused by other factors is generated.
As shown in fig. 4, 5 and 6, the present invention specially designs a movement control system of a drying chamber 1, so that the drying chamber 1 can controllably move in phase relative to a dewatering tank 3 by using a cover opening mechanism 2, and an adjusting rod combination 4 is arranged between the drying chamber 1 and the cover opening mechanism 2, wherein the adjusting rod combination 4 comprises an adjusting rod 70, an upper combining block 5 and a lower combining block 6, the adjusting rod 70 penetrates through a horizontal supporting beam 201 serving as a cantilever on the cover opening mechanism 2, one end of the adjusting rod 70 at the upper part of the cantilever is connected with the upper combining block 5, one end of the adjusting rod 70 at the lower part of the cantilever is connected with the lower combining block 6, and the structure of the adjusting rod combination 4 can be clearly shown in fig. 8.
As shown in fig. 7, as core components of the present invention, the door opening mechanism 2 includes a horizontal support beam 201, a slide rail 202, a slide table 203, an air cylinder 204, and a mounting plate 206. The mounting plate 206 is fixed with a sliding rail 202 horizontally arranged, the sliding rail 202 is provided with a sliding table 203 capable of realizing phase change at a left-right moving position, the sliding table 203 is connected with the air cylinder 204, one side of the air cylinder 204 is provided with an air supply valve 205, the air cylinder 204 is a long-axis air cylinder, and the travel of the long-axis air cylinder is divided into multiple sections for the overall operation stability. The sliding table 203 is a T-shaped standard sliding table for connecting the air cylinder 204 and the sliding rail 202, the lower part of the sliding table is a standard sliding table for connecting the air cylinder 204, and the upper part of the sliding table is a standard sliding table for connecting the sliding rail 202.
The horizontal supporting beam 201 is vertically fixed on the upper part of the sliding table 203, two sides of the horizontal supporting beam 201 extend forward to form two cantilevers to hold the drying cavity 1, a plurality of adjusting rod assemblies 4 are arranged on the horizontal supporting beam 201 in pairs to connect the drying cavity 1, and the bottom of the mounting plate 206 is fixed on the side wall of the drying groove 3, so that the bottom of the cover opening mechanism 2 is fixed with the drying groove 3. Specifically, the horizontal support beam 201 is a cantilever structure with a U-shape, two cantilevers extending from the cantilever structure are respectively disposed at two sides of the drying chamber 1, two adjusting rod assemblies 4 are disposed on each cantilever, and the back of the horizontal support beam 201 is fixed on the sliding table 203.
Further, the connection portion of the horizontal support beam 201 and the drying chamber 1 is located above the center of gravity of the drying chamber 1, and stability is improved by increasing the support height.
As shown in fig. 8, the connection between the drying chamber 1 and the cover opening mechanism 2 is achieved by adjusting the lever assembly 4, and the drying chamber 1 occupies a large space and a large height because the whole wafer needs to be accommodated therein, if a stable moving design is not adopted to maintain stability and maintain the rigidity of clamping, impact caused by dislocation interference is easy to occur when the phase is changed, particles are generated to pollute again, or the atmosphere coming from the outside causes pollution. So that the left and right ends of the drying chamber 1 are respectively provided with adjustable combining blocks, namely an upper combining block 5, which is different from the other combining blocks in structural form. The upper combining block 5 is of a split structure, the upper part of the split structure is fixed on the side wall of the drying cavity 1, the lower part of the split structure is connected with the upper part of the split structure through a fixing bolt 81, a fixing bolt installation position 82 is arranged on the upper part of the split structure so as to accommodate screwing of the front end of a screw rod of the fixing bolt 81, and a gasket 9 is sleeved on the fixing bolt 81 between the upper part and the lower part of the split structure. The gasket 9 is here embedded between the upper and lower part and is a thick polyurethane shock absorbing ring. In order to match the adjusting rod 70, an adjusting rod mounting deep hole is formed in the upper center of the split structure, the adjusting rod mounting deep hole is a blind hole, and an adjusting rod through hole is formed in the lower center of the split structure, and the adjusting rod through hole is a through hole.
Further, as shown in fig. 9, the adjusting rod 70 has a composite structure including a rigid inner bolt 71, a low elastic outer bolt 72, a low elastic rigid spring 73 and a rigid outer bolt 75, and is aimed at achieving vibration reduction and smooth operation by using elastic buffering, and balancing of the drying chamber 1 can be achieved by adjusting four adjusting rods 70 respectively. In order to realize the function similar to a damping arm, the low-elasticity outer bolt 72 is of a hollow tubular structure, the low-elasticity rigid spring 73 is sleeved on the rigid inner bolt 71 and is arranged in the hollow tube of the low-elasticity outer bolt 72, one end of the rigid inner bolt 71 is provided with an inner bolt cap 74 and is embedded into the adjusting rod installation deep hole of the upper combining block 5, the other end of the rigid inner bolt 71 is coaxially fixed with the rigid outer bolt 75, the cantilever through which the rigid outer bolt 75 passes is connected with the lower combining block 6, wherein the upper part of the elastic rigid spring 73 is propped against the inner side of the inner bolt cap 74, the bottom of the elastic rigid spring 73 is in contact with the horizontal supporting beam 201, and the thick polyurethane damping ring and the elastic rigid spring 73 serving as a gasket 9 in the axial direction can realize reverse relief when vibration occurs. The whole of the adjusting rod 70 is formed as a huge bolt in the present invention, the upper portion 77 of the adjusting rod is connected to the upper combining block 5 to achieve the adjusting and buffering, and the lower portion 76 of the adjusting rod passes through the horizontal supporting beam 201 and is connected to the lower combining block 6 to achieve the adjusting and buffering function.
The invention designs a dustproof structure on the cover opening mechanism 2 to avoid particle problems, wherein the dustproof structure comprises an upper dustproof plate 207 and a side dustproof plate 208, the upper dustproof plate 207 is vertically fixed on the top of the mounting plate 206, and the upper dustproof plate covers the sliding rail 202 and the sliding table 203 downwards from the upper part. On the mounting plate 206, side dustproof plates 209 are provided on the left and right sides of the cylinder 204, respectively. In addition, holes are provided in the side dustproof plate 209 to accommodate passage of circuits or pipes of the cylinder 204. Dust-proof metal shells are arranged on the cover opening mechanism 2 to prevent dust particles from directly falling into a gap between the dewatering tank 3 and the drying cavity 1 in the moving process, so that the complete dust-proof particle function is achieved. The dustproof design of the cover opening mechanism 2 is formed by the upper dustproof plate 207 and the two side dustproof plates 209, so that generated particles are prevented from falling into the drying cavity 1, and secondary pollution to the cleaned wafer is avoided.
Further, aiming at the long-axis cylinder, the brushless cylinder is adopted to realize dust-free movement and stable X-axis movement. In order to avoid dislocation or deformation caused by long travel, the device is divided into a plurality of sections. The operating position of the multi-stage forming operation needs to be monitored in real time when the multi-stage forming operation is realized, and therefore, a sensor 208 needs to be arranged near the cylinder 204. The sensor 208 is arranged to align the slide 203 to detect the position of the slide 203, thereby realizing the stroke segmentation execution of the slide 203. Based on the above-described long-stroke segment control, the horizontal movement of the slide table 203 on the slide rail 202 is defined as the X-axis horizontal direction phase movement. As shown in fig. 4, overflow grooves are respectively arranged on the left side and the right side of the top end of the dewatering groove 3, a negative pressure cavity is arranged on one side in the overflow groove, a left negative pressure cavity and a right negative pressure cavity are correspondingly arranged on the left side and the right side of the dewatering groove 3, and the left negative pressure cavity and the right negative pressure cavity are used for providing a negative pressure environment, so that negative pressure is generated by air suction when the drying cavity 1 moves relative to the dewatering groove 3, and pollution caused by particles in the external environment entering the dewatering groove 3 is avoided.
As shown in fig. 10, the sliding table 203 is divided into seven positions X0, X1, X2, X3, X4, X5 and X6 on the slide rail 202 based on the travel of the long axis cylinder 204, and corresponds to the following:
x0 is the initial limit position of the drying cavity;
x1 is the initial position of the drying cavity leaving the right negative pressure cavity on the dewatering tank, the right negative pressure cavity is positioned in the overflow tank on the right side, the center line of the drying cavity is coincident with the center line of the dewatering tank and is in a closed state of the drying module;
x2 is the initial position of the drying cavity leaving the dewatering tank and is also the end position of the drying cavity leaving the right negative pressure cavity;
x3 is the end position of the drying cavity leaving the dewatering tank;
x4 is the initial position of the drying cavity leaving the left negative pressure cavity, and the left negative pressure cavity is positioned in the left overflow groove;
x5 is the end position of the drying cavity leaving the left negative pressure cavity, and is the position of the dewatering tank completely separated from the drying cavity;
x6 is the final limit position of the drying chamber.
For the travel and control on the X-axis we devised the control steps as follows:
the first action: the center line of the dewatering tank is overlapped with the center line of the drying cavity, and is in a state that the drying module is tightly closed, and corresponds to a first positioning point X1 on the long-axis air cylinder 204, and at the moment, the long-axis air cylinder 204 does not supply air;
the second action: the drying cavity starts to be driven to move by the long-axis air cylinder 204, from X1 to X2, the tight closing state is released for the movement of the drying module, and a small-amplitude air supply quantity VA is used corresponding to the air supply on the long-axis air cylinder 204, because the small-amplitude air supply is provided to enable the drying cavity 1 to slowly separate from the dewatering tank 3, so that the pressure of the negative pressure cavity gradually contacts with external atmospheric pressure;
third action: after the drying cavity leaves the position of the negative pressure cavity, the drying cavity is driven to move by the long-axis air cylinder 204, and from X2 to X3, the drying cavity 1 can leave the position of the dewatering tank 3 at the stage by providing a large amount of air supply to enable the drying cavity 1 to leave the main body range of the dewatering tank 3 in a state that the drying module moves greatly and corresponds to the air supply quantity VB of normal air flux used for air supply on the long-axis air cylinder 204;
fourth action: the drying cavity 1 is driven to move by the long-axis air cylinder 204, from X3 to X4, the drying module moves out of the range of the main tank body 3, the negative pressure cavity position on the other side needs to be contacted, in order to achieve the same state of releasing the tight closure as the second action, a small-amplitude air supply quantity VA is used corresponding to the air supply on the long-axis air cylinder 204, the drying cavity 1 is slowly separated from the dewatering tank 3 for providing a small amount of air supply, and the pressure of the left negative pressure cavity is gradually contacted with external atmospheric pressure;
a fifth action: after the drying chamber 1 leaves the left side negative pressure chamber, the drying chamber is driven to move by the long shaft air cylinder 204, and from X4 to X5, the drying module is in a state of moving greatly, the drying chamber 1 can be completely separated from the dewatering tank 3 by providing a large amount of air supply according to the air supply quantity VB of normal air flux used for air supply on the long shaft air cylinder 204, so that the drying chamber 1 can be completely separated from all positions of the main body of the dewatering tank 1 and the left side negative pressure chamber at the stage, and can be regarded as the end position of the whole moving process.
Through the long-stroke sectional control in the X-axis direction, the rigid support of the horizontal supporting beam 201 is combined and utilized, and then the buffer support of the drying cavity 1 is matched with the adjusting rod combination 4, so that the accurate control and buffer shock absorption in the operation process are realized, and particle pollutants caused by dislocation or collision are avoided. In addition to the travel and control in the X-axis direction, control in the Z-axis direction is also designed, specifically, the four adjustment lever combinations 4 are used to realize the up-and-down adjustment of the drying chamber 1 with respect to the horizontal support beam 201, so that the motion in the vertical direction is defined as the lifting motion of the drying chamber 1 in the Z-axis direction.
The above is, of course, only a limited implementation of the optimizing device for solving the problem of particle pollution caused by vibration of the marangoni drying module, and other variations and alternatives obvious to a person skilled in the art are included. In summary, the scope of the optimization device of the present invention also includes other variations and alternatives that will be apparent to those skilled in the art.
Claims (15)
1. An optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module, wherein the marangoni drying module comprises a drying cavity (1) and a dewatering tank (3), and is characterized in that the optimizing device comprises an integral stability control system and a movement control system of the drying cavity (1),
the integral stability control system comprises two groups of combining blocks arranged at the bottom of the dewatering tank (3), wherein the two groups of combining blocks are adjustably fixed on a framework (001) of a machine table (0) by using giant bolts, and fulcrums of the corresponding combining blocks are arranged on the framework (001);
the mobile control system comprises a cover opening mechanism (2) and an adjusting rod combination (4), wherein the cover opening mechanism (2) is arranged between the drying cavity (1) and the dewatering tank (3) to realize phase movement, and the adjusting rod combination (4) is arranged between the cover opening mechanism (2) and the drying cavity (1).
2. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 1, wherein overflow grooves are respectively arranged on the left side and the right side of the dewatering groove (3), and a pair of combining blocks are respectively arranged at the bottom of each overflow groove.
3. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 2, wherein the bottom of the dewatering tank (3) is a slow-descending slope, a pair of front combining blocks (7) and a pair of rear combining blocks (8) are respectively arranged on two sides of the slow-descending slope, two front supporting points (002) corresponding to the two front combining blocks (7) and two rear supporting points (003) corresponding to the two rear combining blocks (8) are arranged on the framework (001), a height-adjustable giant bolt is arranged between the front combining blocks (7) and the front supporting points (002), and a height-adjustable giant bolt is arranged between the rear combining blocks (8) and the rear supporting points (003).
4. An optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 3, wherein the inside of the front combining block (7) and the inside of the rear combining block (8) are embedded with a T-shaped sleeve and a rigid spring for shock absorption.
5. The optimizing device for solving particle pollution caused by vibration of a marangoni drying module according to claim 2, wherein the cover opening mechanism (2) comprises a horizontal support beam (201), a sliding rail (202), a sliding table (203), an air cylinder (204) and a mounting plate (206), wherein the sliding rail (202) is fixed on the mounting plate (206), the sliding table (203) capable of moving left and right is arranged on the sliding rail (202), the sliding table (203) is connected with the air cylinder (204), the horizontal support beam (201) is fixed above the sliding table (203), the horizontal support beam (201) is provided with a plurality of adjusting rod combinations (4) to connect the drying cavity (1), and the bottom of the mounting plate (206) is fixed on the side wall of a dewatering tank (3).
6. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 5, wherein the horizontal supporting beam (201) is of a cantilever structure which is integrally U-shaped, two cantilevers extending out of the cantilever structure are respectively arranged at two sides of the drying cavity (1), and each cantilever is provided with two adjusting rod assemblies (4).
7. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 6, wherein the adjusting rod assembly (4) comprises an adjusting rod (70), an upper combining block (5) and a lower combining block (6), the adjusting rod (70) penetrates through the horizontal supporting beam (201), one end of the adjusting rod (70) positioned at the upper part of the horizontal supporting beam (201) is connected with the upper combining block (5), and one end of the adjusting rod (70) positioned at the lower part of the horizontal supporting beam (201) is connected with the lower combining block (6).
8. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 7, wherein the upper combining block (5) is of a split structure, the upper part of the split structure is fixed on the side wall of the drying cavity (1), the lower part of the split structure is fixed on the upper part of the split structure through a fixing bolt (81), a fixing bolt mounting position (82) is arranged on the upper part of the split structure, a gasket (9) is sleeved on the fixing bolt (81) between the upper part and the lower part of the split structure, an adjusting rod mounting deep hole is formed in the central position of the upper part of the split structure, and an adjusting rod through hole is formed in the central position of the lower part of the split structure.
9. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 7, wherein the adjusting rod (70) is a composite structure comprising a rigid inner bolt (71), a low-elasticity outer bolt (72), a low-elasticity rigid spring (73) and a rigid outer bolt (75), the low-elasticity outer bolt (72) is of a hollow tubular structure, the rigid inner bolt (71) is sleeved with the low-elasticity rigid spring (73) and is arranged in a hollow tube of the low-elasticity outer bolt (72), one end of the rigid inner bolt (71) is provided with an inner bolt cap (74) and is embedded into an adjusting rod mounting deep hole of the upper bonding block (5), the other end of the rigid inner bolt (71) is coaxially fixed with the rigid outer bolt (75), and the rigid outer bolt (75) penetrates through a horizontal support beam (201) and is connected with the lower bonding block (6).
10. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 5, wherein the sliding table (203) is a T-shaped standard sliding table for connecting an air cylinder (204) with a sliding rail (202), the lower part of the sliding table (203) is connected with the air cylinder (204), and the upper part of the sliding table (203) is connected with the sliding rail (202).
11. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 5, wherein the cover opening mechanism (2) further comprises an upper dust-proof plate (207), the upper dust-proof plate (207) is vertically fixed to the top of the mounting plate (206) to cover the sliding rail (202) and the sliding table (203), and side dust-proof plates (209) are respectively arranged on two sides of the cylinder (204) on the mounting plate (206).
12. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 5, wherein a sensor (208) is further arranged at the cylinder (204), and the sensor (208) is aligned with the sliding table (203) to detect the position of the sliding table, so that the stroke segmentation execution of the sliding table (203) is realized.
13. The optimizing device for solving the problem of particle pollution caused by vibration of a marangoni drying module according to claim 12, wherein the horizontal movement of the sliding table (203) on the sliding rail (202) is defined as the horizontal phase movement of the X-axis, and the position of the sliding table (203) on the sliding rail (202) is divided into seven positions of X0, X1, X2, X3, X4, X5 and X6, which correspond to the following positions:
x0 is the initial limit position of the drying cavity;
x1 is the initial position of the drying cavity leaving the right negative pressure cavity on the dewatering tank, the right negative pressure cavity is positioned in the overflow tank on the right side, the center line of the drying cavity is coincident with the center line of the dewatering tank and is in a closed state of the drying module;
x2 is the initial position of the drying cavity leaving the dewatering tank and is also the end position of the drying cavity leaving the right negative pressure cavity;
x3 is the end position of the drying cavity leaving the dewatering tank;
x4 is the initial position of the drying cavity leaving the right negative pressure cavity, and the left negative pressure cavity is positioned in the left overflow groove;
x5 is the end position of the drying cavity leaving the left negative pressure cavity, and is the position of the dewatering tank completely separated from the drying cavity;
x6 is the final limit position of the drying chamber.
14. An optimizing apparatus for solving particle pollution caused by vibration of marangoni drying module according to claim 12 or 13, wherein the action of adjusting the drying chamber up and down with respect to the horizontal support beam by using four adjusting bars is defined as a lifting action of the drying chamber in the Z-axis direction.
15. An optimizing device for solving particle pollution caused by vibration of marangoni drying module according to claim 12 or 13, characterized in that the connection part of the horizontal support beam (201) and the drying chamber (1) is located above the gravity center of the drying chamber (1). .
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