CN116221066B

CN116221066B - Cryopump, control system, and control method

Info

Publication number: CN116221066B
Application number: CN202310029623.0A
Authority: CN
Inventors: 邓家良; 杨杨; 武义锋; 程祥; 韩雨松; 冯欣宇; 王建勇; 曾环; 张海峰; 章学华
Original assignee: Vacree Technologies Co Ltd
Current assignee: Vacree Technologies Co Ltd
Priority date: 2023-01-09
Filing date: 2023-01-09
Publication date: 2024-07-09
Anticipated expiration: 2043-01-09
Also published as: CN116221066A

Abstract

The invention discloses a cryopump, a control system and a control method, wherein the cryopump comprises: a pump housing; the cold screen is arranged in the pump shell, an accommodating space is formed in the cold screen, a through hole is formed in the cold screen, and the through hole is communicated with the accommodating space; the first-stage cold accumulation component is arranged in the pump shell; the second-stage cold accumulation component is arranged in the accommodating space, and one end of the second-stage cold accumulation component extends out of the through hole and is connected with the first-stage cold accumulation component; one end of the connecting piece is connected with the first-stage cold accumulation component, and the other end of the connecting piece is connected with the cold screen; and the cold plate assembly is arranged in the accommodating space and is connected with the secondary cold accumulation component. The low-temperature pump provided by the embodiment of the invention can increase the length of the secondary cold storage part, reduce the length of the primary cold storage part, improve the energy storage capacity of the secondary cold storage part and meet the requirement of large cold quantity.

Description

Cryopump, control system, and control method

Technical Field

The invention relates to the technical field of cryopumps, in particular to a cryopump, a control system and a control method.

Background

The cryopump captures the gas in the enclosed space based on the principles of cryocondensation and cryoadsorption to create a vacuum environment. Has the outstanding advantages of high ultimate vacuum degree, high pumping speed, truly clean oil-free, and the like, and is widely applied to the Physical Vapor Deposition (PVD) and ion implantation process. In the related art, the refrigerating element of the low-temperature pump is generally a two-stage GM refrigerator, and because the space in the pump shell is limited, the structural designs of the cold screen, the first-stage cold accumulation part and the second-stage cold accumulation part are unreasonable, so that the first-stage cold accumulation part, the second-stage cold accumulation part and the thermal coupling degree are stronger, the cold accumulation capacity is limited, and the requirement of large cold quantity cannot be met.

Disclosure of Invention

The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present invention is to provide a cryopump, which can solve the problems that the structural design of the cold shield, the primary cold storage part and the secondary cold storage part is unreasonable, the cold storage capacity is limited, and the requirement of large cold capacity cannot be met.

The invention also aims to provide a control system of the cryopump, so as to apply the cryopump.

The invention also aims to provide a control method of the cryopump.

A cryopump according to an embodiment of the present invention includes: a pump housing; the cold screen is arranged in the pump shell, an accommodating space is formed in the cold screen, a through hole is formed in the cold screen, and the through hole is communicated with the accommodating space; the first-stage cold accumulation component is arranged in the pump shell; the secondary cold accumulation component is arranged in the accommodating space, and one end of the secondary cold accumulation component extends out of the through hole and is connected with the primary cold accumulation component; one end of the connecting piece is connected with the primary cold accumulation component, and the other end of the connecting piece is connected with the cold screen; and the cold plate assembly is arranged in the accommodating space and is connected with the secondary cold accumulation component.

According to the cryogenic pump provided by the embodiment of the invention, the length of the secondary cold accumulation component can be increased, the length of the primary cold accumulation component can be reduced, the energy storage capacity of the secondary cold accumulation component can be improved, and the requirement of large cold quantity can be met.

In some embodiments of the invention, the connector comprises: the secondary cold accumulation component penetrates through the cylinder; the first end plate is arranged at one end of the cylinder body and is connected with the secondary cold accumulation component; the second end plate is arranged at the other end of the cylinder body and is connected with the cold screen.

In some embodiments of the present invention, the primary cold storage component has a primary cold stage connected to the first end plate, and a projection of the first end plate is equal to or greater than a projection of the primary cold stage in an axial direction of the cylinder, and the projection of the first end plate and the projection of the second end plate overlap.

In some embodiments of the invention, the cryopump further comprises: a first pressure detector provided on the pump casing to detect a pressure within the pump casing; the pressure relief valve is arranged on the pump shell and is provided with a valve core, the valve core is configured to be actively opened, and when the first pressure detection part detects that the pressure in the pump shell reaches a first set value, the valve core is opened and keeps a set opening degree.

A control system of a cryopump according to an embodiment of the present invention includes: the cryogenic pump as described above, further comprising a motor for powering the primary cold storage means and the secondary cold storage means; a compressor having a low pressure line and a high pressure line for supplying working gas to the primary cold storage part and the secondary cold storage part; a second pressure detecting member for communicatively connecting the compressor and detecting a pressure of the low pressure line; a third pressure detecting member for communicatively connecting the compressor and detecting a pressure of the high pressure line; and the control device is used for being in communication connection with the motor and the compressor, and sending out warning information and/or remedial information according to the pressure value or the pressure difference value of the low-pressure pipeline and the high-pressure pipeline.

According to the control system of the cryopump, whether leakage occurs in a system pipeline or not can be detected through the second pressure detecting piece, the third pressure detecting piece and the control device, and warning information and remedial information can be given.

In some embodiments of the present invention, the control system further includes a cryopump controller, where the cryopump controller is communicatively connected to the motor and the operating device, the cryopump controller may obtain an operation state parameter of the motor, and the operating device evaluates a usage condition of the cryopump and the compressor and gives a maintenance recommendation according to the operation state parameter of the motor.

In some embodiments of the present invention, the operating state parameter of the motor includes a current, the cryopump controller obtains the current of the motor, and the control apparatus compares the current with a set current and adjusts the rotational speed of the motor through a PID control algorithm.

The control method of the cryopump comprises the following steps: acquiring the pressure of a low-pressure pipeline of the compressor; acquiring the pressure of a high-pressure pipeline of the compressor; and sending out warning information and/or remedial information according to the pressure value or the pressure difference value of the low-pressure pipeline and the high-pressure pipeline.

According to the control method of the cryopump, whether leakage occurs in the system pipeline or not can be detected, and warning information and remedy information can be given.

In some embodiments of the invention, the control method further comprises: and acquiring the running state parameters of the motor, evaluating the use conditions of the cryopump and the compressor according to the running state parameters of the motor, and giving maintenance suggestions.

In some embodiments of the invention, the operating state parameter of the motor comprises current, and the control method further comprises: and obtaining the current of the motor, comparing the current with the set current, and adjusting the rotating speed of the motor through a PID control algorithm.

Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic diagram of a cryopump in accordance with an embodiment of the present invention;

FIG. 2 is a schematic diagram showing the connection of the primary cold accumulation member, the secondary cold accumulation member and the connection member in the embodiment of the invention;

FIG. 3 is a schematic view of a connector according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of a control system of a cryopump in accordance with an embodiment of the present invention;

FIG. 5 is a flow chart of a method of controlling a cryopump in accordance with an embodiment of the present invention;

FIG. 6 is a logic diagram of a method of controlling a cryopump in accordance with an embodiment of the present invention;

Fig. 7 is a second flowchart of a control method of the cryopump in an embodiment of the present invention.

Reference numerals:

100. A control system;

10. A cryogenic pump;

101. A pump housing; 101a, open;

102. a cold screen; 102a, an accommodation space;

103. a first-stage cold accumulation member; 1031. a primary cooling stage; 1032. a first-stage cylinder; 1033. a primary piston;

104. a secondary cold storage member; 1041. a secondary cooling stage; 1042. a second-stage cylinder; 1043. a secondary piston;

105. A connecting piece; 1051. a cylinder; 1052. a first end plate; 1053. a second end plate;

106. A cold plate assembly; 107. a first pressure detecting member; 108. a pressure release valve; 109. a motor; 110. a shadow mask; 111. a second temperature detecting member; 112. a rough pumping valve; 113. a nitrogen purge valve; 114. a first temperature detecting member;

201. A host; 202. a communication controller; 203. a local operation panel;

30. A compressor; 301. a low pressure line; 302. a high pressure line; 40. a cryopump controller.

Detailed Description

Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly.

In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

Referring now to fig. 1-3, a cryopump 10 according to an embodiment of the present invention is described.

As shown in fig. 1, a cryopump 10 according to an embodiment of the present invention includes: pump housing 101, cold shield 102, primary cold storage component 103, secondary cold storage component 104, connector 105, cold plate assembly 106.

The cold shield 102 is provided in the pump housing 101, an accommodating space 102a is formed inside the cold shield 102, and a through hole (not shown) is provided in the cold shield 102, the through hole communicating with the accommodating space 102a. The primary cold storage member 103 is provided in the pump case 101. The secondary cold storage member 104 is disposed in the accommodation space 102a, and one end of the secondary cold storage member 104 extends out of the through hole and is connected to the primary cold storage member 103. One end of the connecting piece 105 is connected with the primary cold accumulation part 103, and the other end is connected with the cold screen 102. The cold plate assembly 106 is disposed in the accommodating space 102a and is connected to the secondary cold storage member 104.

It will be appreciated that the pump casing 101 has an opening 101a, and in the related art, when the cold shield is located in the pump casing, it is necessary to ensure that the cold shield is concentric with the opening 101a, and the space inside the pump casing is limited, so that the sum of the lengths of the primary cold storage member and the secondary cold storage member is determined. The primary cold accumulation part 103 of the cryogenic pump 10 is connected with the cold screen 102 through the connecting piece 105, one end of the secondary cold accumulation part 104 extends out of the through hole and is connected with the primary cold accumulation part 103, and in this way, the length of the primary cold accumulation part 103 can be reduced, and the length of the secondary cold accumulation part 104 can be increased.

As shown in fig. 2, the primary cold storage member 103 includes a primary cylinder 1032, a primary piston 1033, and a primary cold stage 1031. The secondary regenerator 104 includes a secondary cylinder 1042, a secondary piston 1043, and a secondary cold stage 1041, and the construction and operation of the primary regenerator 103 and the secondary regenerator 104 are known to those of ordinary skill in the art and will not be described in detail herein. As shown in fig. 2, the primary cylinder 1032 is spaced from the cold screen 102 by a distance L1, the connecting member 105 is spaced from the cold screen 102 by a distance L2, and the secondary stage 1041 is spaced from the cold screen 102 by a distance L1- Δl, so that the primary piston 1033 is spaced from the cold screen 102 by a distance l2+Δl. Therefore, when the total length of the primary cold storage member 103 and the secondary cold storage member 104 is unchanged, the length of the secondary cold storage member 104 is increased, and the length of the primary cold storage member 103 is reduced, so that the heat conduction from the higher temperature primary cold storage member 103 (with a temperature of 65-100K) to the lower temperature secondary cold storage member 104 is reduced (for example, the temperature of the secondary cold storage member 104 can be reduced from 14-18K to 8-15K before modification), thereby reducing the influence of the primary temperature control on the heat load conducted by the secondary temperature control, and being beneficial to maintaining the secondary cooling stage 1041 at a lower temperature.

On the other hand, the length of the secondary piston 1043 is increased, so that the interior of the secondary piston 1043 can be filled with more cold storage material, the cold storage capacity of the secondary piston 1043 is improved, and the requirement for large cold capacity of the secondary stage under the condition of large gas load in the working process of the cryopump 10 is met.

It should be noted that, a thermal connection manner may be adopted between the connection member 105 and the cold screen 102, and between the connection member 105 and the primary cold storage member 103, "thermal connection" may mean that two objects are in good contact and can transfer heat with each other with high efficiency. Other configurations and operations of the cryopump 10 of the embodiments of the present invention are known to those skilled in the art and will not be described in detail herein.

According to the cryopump 10 of the embodiment of the present invention, the cryopump 10 may increase the length of the secondary cold storage part 104 and reduce the length of the primary cold storage part 103, improve the energy storage capacity of the secondary cold storage part 104, and meet the requirement of large cold.

In some embodiments of the present invention, as shown in fig. 2 and 3, the connector 105 includes: a barrel 1051, a first end plate 1052, a second end plate 1053. The secondary cold accumulation component 104 penetrates through the cylinder 1051; the first end plate 1052 is arranged at one end of the cylinder 1051 and is connected with the first-stage cold accumulation component 103; a second end plate 1053 is provided at the other end of the barrel 1051 and is connected to the cold screen 102. The hollow inside of the cylinder 1051 can play a role of avoiding the secondary cold storage component 104, the first end plate 1052 and the primary cold table 1031 have larger contact surfaces, the second end plate 1053 and the cold screen 102 have larger contact surfaces, and the connection reliability between the connecting piece 105 and the primary cold storage component 103 and the cold screen 102 can be improved.

In some embodiments of the present invention, as shown in fig. 3, the first end plate 1052 is an annular plate disposed around the edge of the nozzle of the cylinder 1051, so that any position of the edge of the nozzle of the cylinder 1051 can be connected to the primary cold storage member 103, thereby further improving the connection reliability between the connection member 105 and the primary cold storage member 103.

In some embodiments of the present invention, as shown in fig. 3, the second end plate 1053 is an annular plate disposed around the rim of the nozzle of the cylinder 1051, so that any position of the rim of the nozzle of the cylinder 1051 can be connected to the cold screen 102, thereby further improving the connection reliability of the connection member 105 and the cold screen 102.

In some embodiments of the invention, the first end plate 1052 and the second end plate 1053 are annular or rectangular.

In some embodiments of the invention, the inner diameter of the cartridge 1051 is greater than the outer diameter of the secondary cold storage member 104.

In some embodiments of the invention, as shown in fig. 2, the primary cold storage component 103 has a primary cold stage 1031 connected to a first end plate 1052, the projection of the first end plate 1052 being equal to or greater than the projection of the primary cold stage 1031 in the direction along the axis of the barrel 1051, the projection of the first end plate 1052 and the projection of the second end plate 1053 coinciding. That is, the surface area of the first end plate 1052 connected to the primary cooling stage 1031 is larger than the surface area of the primary cooling stage 1031, or the surface area of the first end plate 1052 connected to the primary cooling stage 1031 is equal to the surface area of the primary cooling stage 1031, so that the connection between the first end plate 1052 and the primary cooling stage 1031 can be ensured to be reliable. The second end plate 1053 may be in communication with the shape and size of the first end plate 1052, which may simplify the manufacturing process of the connector 105 and reduce manufacturing difficulties.

For example, the first end plate 1052 and the second end plate 1053 may be annular in shape and size.

In some embodiments of the present invention, as shown in fig. 1, the cryopump 10 further includes a first pressure detecting member 107 and a relief valve 108, the first pressure detecting member 107 being provided on the pump casing 101 to detect the pressure inside the pump casing 101; a relief valve 108 is provided on the pump housing 101, the relief valve 108 having a spool (not shown) configured to be actively openable, the spool being opened and maintained at a set opening degree when the first pressure detecting member 107 detects that the pressure inside the pump housing 101 reaches a first set value.

As shown in FIG. 1, after the gas volume in the cryopump 10 is saturated, high purity dry nitrogen is typically purged through a nitrogen purge valve 113 and the temperature rise of the cold plate assembly 106, cold plate 102 and baffle 110 is accomplished in combination with a motor 109 reversing and/or a heater built into the primary cold stage 1031 or secondary cold stage 1041 or external heater. During the temperature rise process, a large amount of gas is desorbed from the cold plate assembly 106, and the desorbed gas is discharged from the pressure release valve 108. In the related art, the pressure release valve is designed to be passively opened, when the gas pressure in the cryogenic pump reaches the target pressure, the gas rushes out of the spring in the pressure release valve to open the pressure release valve, so that the flow resistance of the pipeline gas is relatively large in the regeneration process, the heat exchange effect is relatively poor, the regeneration time is relatively long, the acting force received by the spring is in a fluctuation state along with the gas discharge in the process, and the opening of the valve core is unstable and cannot be maintained.

The pressure relief valve 108 has an active opening function, when the first pressure detecting part 107 detects that the pressure in the pump shell 101 reaches a first set value, the valve core is opened and keeps the set opening, and as the pressure relief valve 108 is actively opened, a larger valve core opening can be selected, so that the flow resistance of pipeline gas in the regeneration process can be reduced, the heat exchange effect is increased, and the regeneration heating time is shortened. On the other hand, the pressure relief valve 108 can ensure that the valve core opening is stable, namely the pressure relief valve 108 always works in a stable state, so that the condition that the sealing ring of the pressure relief valve 108 fluctuates and even resonance phenomenon occurs due to instantaneous gasification of gas condensate during passive pressure relief is avoided, and the service life of the pressure relief valve 108 is prolonged.

For example, in the opening process of the passive pressure release valve in the related art, the opening degree of the valve core is maintained at 0.5-2 mm when the gas pressure reaches the target pressure due to the gas pressure in the opening process, and after the pressure release valve 108 is actively opened, the opening degree of the valve core can be maintained at 5-10 mm, and the opening degree is larger, so that the flow resistance of the gas in the pipeline can be reduced.

Specifically, the "first set value" described above may be specifically set according to circumstances, and for example, the first set value may be an atmospheric pressure value.

In some embodiments of the present invention, the first pressure detecting member 107 may be a vacuum gauge, a pressure detector, or other devices or elements capable of detecting pressure, which will not be described herein.

In some embodiments, as shown in fig. 1, the cryopump 10 further includes a first temperature detecting element 114 and a second temperature detecting element 111, where the first temperature detecting element 114 is disposed on the primary cold storage member 103 to detect a temperature of the primary cold storage member 103, and the second temperature detecting element 111 is disposed on the secondary cold storage member 104 to detect a temperature of the secondary cold storage member 104.

Specifically, the first temperature detecting member 114 is provided on the primary cooling stage 1031, and the second temperature detecting member 111 is provided on the secondary cooling stage 1041. Optionally, the first temperature detecting element 114 and the second temperature detecting element 111 are temperature sensors or other temperature detecting components.

In some embodiments of the present invention, as shown in FIG. 1, the cryopump 10 includes a rough pump valve 112, and the rough pump valve 112 is provided on the pump housing 101 to pump out the gas in the pump housing 101. The rough pump valve 112 can rapidly discharge the gas in the pump housing 101 to perform a rough pump function.

As shown in fig. 4, a control system 100 of the cryopump 10 according to an embodiment of the present invention includes: the cryogenic pump 10, the compressor 30, a second pressure sensing element (not shown), a third pressure sensing element (not shown), and a steering device.

The cryopump 10 also includes a motor 109 for powering the primary and secondary cold storage members 103 and 104. The compressor 30 has a low pressure line 301 and a high pressure line 302, and the low pressure line 301 and the high pressure line 302 are used to supply working gas to the primary cold storage member 103 and the secondary cold storage member 104. The second pressure sensing element is used to communicatively couple the compressor 30 and sense the pressure in the low pressure line 301. The third pressure sensing element is used to communicatively couple the compressor 30 and sense the pressure in the high pressure line 302. The control device is used for communicating the motor 109 and the compressor 30, and sending out warning information and/or remedial information according to the pressure value or the pressure difference between the low-pressure pipeline 301 and the high-pressure pipeline 302.

It can be understood that the mechanical system structure of the cryopump in the related art is complex, and a plurality of sealing connection structures exist, so that leakage in the operation process is difficult to be timely detected. The low-pressure pipeline 301 and the high-pressure pipeline 302 are used for providing helium to the low-temperature pump 10, the pressure of the low-pressure pipeline 301 is detected in real time through the second pressure detecting piece, the pressure of the high-pressure pipeline 302 is detected in real time by the third pressure detecting piece, and the control device can give out warning information and/or remedy information after acquiring the detected pressure value or pressure difference value, timely detect leakage and remedy.

For example, when the control system 100 is in operation, the compressor 30 after power-up may be in both an inactive and an active state.

When the compressor 30 is not in operation, the pressures of the low pressure line 301 and the high pressure line 302 should be kept equal, and when the pressures of the low pressure line 301 and the high pressure line 302 are less than a first target threshold, the control device sends out warning information and/or remedial information. When the compressor 30 is in an operation state, the pressure of the high-pressure pipeline 302 should be greater than the pressure of the low-pressure pipeline 301, and in order to maintain a stable refrigerant supply at the cold pump end, the pressure difference between the high-pressure pipeline 302 and the low-pressure pipeline 301 should be maintained at a constant value, and when the pressure difference between the high-pressure pipeline 302 and the low-pressure pipeline 301 is less than the second target threshold value, the control device sends out warning information and/or remedial information.

The warning information can be an alarm, and the remedy information can be a prompt for an operator to perform system leakage detection or refrigerant supplement. The "first target threshold" and the "second target threshold" may be specifically set as required, and will not be described herein.

The compressor 30 includes a mechanical structure such as a press pump and an electrical control unit, and the electrical control unit is communicatively connected to the second pressure detecting member and the third pressure detecting member. Other constructions and operations of the compressor 30 in embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.

As shown in fig. 4, the control device includes a host 201, a communication controller 202, and a local operation panel 203, where the communication controller 202 is communicatively connected to the host 201 and the local operation panel 203, and is communicatively connected to the compressor 30. The host 201 may be a computer to perform computing and control functions. The local operation panel 203 has a display screen in which warning information and remedy information can be displayed.

According to the control system 100 of the cryopump 10 of the embodiment of the present invention, whether leakage occurs in the system pipeline can be detected through the second pressure detecting member, the third pressure detecting member and the control device, and warning information and remedial information can be given.

In some embodiments of the present invention, as shown in fig. 4, the control system 100 further includes a cryopump controller 40, where the cryopump controller 40 is communicatively connected to the motor 109 and a control device, and the cryopump controller 40 may obtain an operation state parameter of the motor 109, and the control device evaluates a usage condition of the cryopump 10 and the compressor 30 and gives a maintenance recommendation according to the operation state parameter of the motor 109.

The reliability of the cryopump 10 is mainly affected by abrasion of piston rings and distribution valves of the primary and secondary cold storage parts 103 and 104 and attenuation of adsorption performance of the compressor 30, and a regular replacement (generally 1-3 years) mode is generally adopted in the industry, so that quantitative evaluation cannot be performed according to actual use conditions, a waste problem exists, and faults in a replacement period cannot be predicted in time. The invention obtains the running state parameters of the motor 109 through the cryogenic pump controller 40, and the control device can give quantitative evaluation according to the running state parameters of the motor 109, obtain the use conditions of the cryogenic pump 10 and the compressor 30, predict in advance, give maintenance advice, and maintain or replace in time.

In some embodiments of the present invention, the operating state parameters of the motor 109 include rotational speed, current, and temperature, and the motor 109 may incorporate a rotational speed detecting member and a temperature detecting member to detect the corresponding rotational speed and temperature. The cryogenic pump controller 40 acquires the rotation speed, current and temperature of the motor 109 in real time, and when the rotation speed of the motor 109 reaches a set rotation speed value, the control device evaluates the use condition of the cryogenic pump 10 and outputs a conclusion; when the current of the motor 109 reaches the set current, the control device evaluates the use condition of the cryopump 10 and outputs a conclusion; when the temperature of the motor 109 reaches the set temperature value, the operating device evaluates the operating condition of the cryopump 10 and outputs a maintenance recommendation.

The abrasion of the piston rings and the distribution valve of the primary and secondary cold storage components 103 and 104 and the degradation of the adsorption performance of the compressor 30 can reflect the working state of the system by analyzing the current, the rotation speed and the temperature of the motor 109 due to the influence on the current, the rotation speed and the temperature of the motor 109, for example, the condition that the external environment is unchanged but the rotation speed of the motor 109 is detected to rise, and the reduction of the cold storage capacity of the piston or the leakage fault of the piston ring can be reflected. When more powder is seriously generated by abrasion of the piston ring or the purity of the refrigerant gas is reduced due to performance degradation of the compressor adsorber, the running resistance of the corresponding pistons (the primary piston 1033 and the secondary piston 1043) is increased, so that the running current value of the motor 109 is increased, and the abrasion of the piston ring, the distribution valve and the adsorption performance degradation of the compressor 30 can be judged.

In some embodiments of the present invention, the operating state parameters of the motor 109 include current, the cryopump controller 40 obtains the current of the motor 109, and the operating device compares the current with a set current and adjusts the rotational speed of the motor 109 through a PID control algorithm. It can be understood that the temperature reduction process of the cryopump in the related art is continuously changed along with the temperature reduction and the motor load, the higher the motor rotating speed is, the lower the load capacity is, the more serious the heating is, and the longer the temperature reduction time is. In order to prevent overload operation of the motor in the working process of the low-temperature pump, the motor is generally cooled at a lower constant rotating speed, and the cooling time is longer. The invention obtains the current of the motor 109 in real time and feeds back the current to the cryopump controller 40, compares the obtained current with the set current (the set current can refer to a corresponding current reference value under the working condition of the maximum torque of the motor), dynamically adjusts the rotating speed of the motor 109 by adopting a PID control algorithm, ensures that the torque of the motor is suitable in the cooling process, and shortens the cooling time of the system.

As shown in fig. 5, the control method of the cryopump 10 according to the embodiment of the present invention includes:

Step S1: the pressure of the low pressure line 301 of the compressor 30 is obtained.

Step S2: the pressure of the high pressure line 302 of the compressor 30 is obtained.

Step S3: based on the pressure values or pressure differences between the low pressure line 301 and the high pressure line 302, warning information and/or remedial information is sent.

According to the control method of the cryopump 10 of the embodiment of the present invention, whether leakage occurs in a system pipeline can be detected by the control method, and warning information and remedial information can be given.

As shown in fig. 6, in some embodiments of the present invention, step S3 includes:

Judging whether the compressor 30 is in an operating state;

if so, a low pressure alarm is issued when the pressure differential between the low pressure line 301 and the high pressure line 302 is less than the second target threshold.

If not, a low pressure alarm is issued when the pressures in the low pressure line 301 and the high pressure line 302 are less than the first target threshold.

It can be understood that, as shown in fig. 6, the operation state of the compressor 30 is first self-checked, whether the compressor 30 is in the operation state is determined, if the compressor 30 is in the non-operation state, the pressures of the low-pressure pipeline 301 and the high-pressure pipeline 302 are obtained and marked as P, whether the pressure P is greater than or equal to the first target threshold Pt is determined, if yes, no operation is required, and if not, a low-pressure alarm is prompted; if the compressor 30 is in the running state, the pressure P1 of the low-pressure pipeline 301 and the pressure P2 of the high-pressure pipeline 302 are obtained, whether P2-P1 is greater than or equal to a second target threshold Δp0 is determined, if yes, no operation is required to be performed, and if not, a low-pressure alarm is prompted.

In some embodiments of the present invention, as shown in fig. 7, the control method further includes: step S4: the operation state parameters of the motor 109 are acquired, and the use conditions of the cryopump 10 and the compressor 30 are evaluated and maintenance advice is given according to the operation state parameters of the motor 109. By acquiring the operation state parameters of the motor 109, quantitative evaluation can be given according to the operation state parameters of the motor 109, the use conditions of the cryopump 10 and the compressor 30 can be acquired, prediction can be performed in advance, maintenance advice can be given, and maintenance or replacement can be performed in time.

In some embodiments of the invention, the operating state parameters of the motor 109 include current, and the control method further includes: step S5: the current of the motor 109 is obtained, the current is compared with the set current, and the rotation speed of the motor 109 is adjusted by a PID control algorithm. It can be understood that by acquiring the current of the motor 109 in real time, comparing the acquired current with a set current (the set current may refer to a corresponding current reference value under the maximum torque condition of the motor), dynamically adjusting the rotation speed of the motor 109 by adopting a PID control algorithm, so that the motor torque in the cooling process is suitable, and the cooling time of the system is shortened.

In the description of the present specification, reference to the terms "some embodiments," "optionally," "further," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A cryopump, comprising:

A pump housing;

The cold screen is arranged in the pump shell, an accommodating space is formed in the cold screen, a through hole is formed in the cold screen, and the through hole is communicated with the accommodating space;

the first-stage cold accumulation component is arranged in the pump shell;

the secondary cold accumulation component is arranged in the accommodating space;

one end of the connecting piece is connected with the primary cold accumulation component, and the other end of the connecting piece is connected with the cold screen;

The cold plate assembly is arranged in the accommodating space and is connected with the secondary cold accumulation component;

The connector includes:

The secondary cold accumulation component penetrates through the cylinder;

the first end plate is arranged at one end of the cylinder body and is connected with the first-stage cold accumulation component;

The second end plate is arranged at the other end of the cylinder body and is connected with the cold screen;

the first-stage cold accumulation part is connected with the cold screen through the connecting piece, one end of the second-stage cold accumulation part extends out of the through hole and is connected with the first-stage cold accumulation part, so that the length of the first-stage cold accumulation part is reduced, and the length of the second-stage cold accumulation part is increased.

2. The cryopump of claim 1, wherein the primary cold storage member has a primary cold stage connected to the first end plate, a projection of the first end plate being equal to or greater than a projection of the primary cold stage in an axial direction of the cylinder, the projection of the first end plate and the projection of the second end plate being coincident.

3. The cryopump of claim 1, further comprising:

a first pressure detector provided on the pump casing to detect a pressure within the pump casing;

The pressure relief valve is arranged on the pump shell and is provided with a valve core, the valve core is configured to be actively opened, and when the first pressure detection part detects that the pressure in the pump shell reaches a first set value, the valve core is opened and keeps a set opening degree.

4. A control system for a cryopump, comprising:

A cryopump as claimed in any one of claims 1 to 3 further comprising

The motor is used for providing power for the primary cold accumulation component and the secondary cold accumulation component;

A compressor having a low pressure line and a high pressure line for supplying working gas to the primary cold storage part and the secondary cold storage part;

a second pressure detecting member for communicatively connecting the compressor and detecting a pressure of the low pressure line;

A third pressure detecting member for communicatively connecting the compressor and detecting a pressure of the high pressure line;

And the control device is used for being in communication connection with the motor and the compressor, and sending out warning information and/or remedial information according to the pressure value or the pressure difference value of the low-pressure pipeline and the high-pressure pipeline.

5. The cryopump control system of claim 4, further comprising:

the low-temperature pump controller is in communication connection with the motor and the control device, the low-temperature pump controller can acquire the running state parameters of the motor, and the control device evaluates the using conditions of the low-temperature pump and the compressor and gives maintenance suggestions according to the running state parameters of the motor.

6. The cryopump control system of claim 5, wherein the operating state parameter of the motor includes a current, the cryopump controller obtains the current of the motor, and the operating device compares the current with a set current and adjusts a rotational speed of the motor through a PID control algorithm.

7. A control method applied to the cryopump of any one of claims 1 to 3, comprising:

providing power to the primary cold storage component and the secondary cold storage component;

providing working gas for the primary cold accumulation component and the secondary cold accumulation component by utilizing a low-pressure pipeline and a high-pressure pipeline of a compressor;

Acquiring the pressure of a low-pressure pipeline of the compressor;

Acquiring the pressure of a high-pressure pipeline of the compressor;

And sending out warning information and/or remedial information according to the pressure value or the pressure difference value of the low-pressure pipeline and the high-pressure pipeline.

8. The control method of a cryopump according to claim 7, characterized in that the control method further includes:

And acquiring the running state parameters of the motor, evaluating the use conditions of the cryopump and the compressor according to the running state parameters of the motor, and giving maintenance suggestions.

9. The control method of a cryopump of claim 8, wherein the operating state parameter of the motor includes current, the control method further comprising: and obtaining the current of the motor, comparing the current with the set current, and adjusting the rotating speed of the motor through a PID control algorithm.