CN116216769B - Method for preparing high-purity gallium oxide by metal gallium hydrolysis method - Google Patents
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- 229910052733 gallium Inorganic materials 0.000 title claims abstract description 51
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 37
- 239000002184 metal Substances 0.000 title claims abstract description 37
- 238000006460 hydrolysis reaction Methods 0.000 title claims abstract description 28
- 230000007062 hydrolysis Effects 0.000 title claims abstract description 21
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910001195 gallium oxide Inorganic materials 0.000 title claims abstract description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 239000013078 crystal Substances 0.000 claims abstract description 34
- 239000004094 surface-active agent Substances 0.000 claims abstract description 26
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 239000006260 foam Substances 0.000 claims abstract description 17
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 230000009467 reduction Effects 0.000 claims abstract description 7
- 238000001035 drying Methods 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 6
- 239000000126 substance Substances 0.000 claims abstract description 5
- 238000004140 cleaning Methods 0.000 claims abstract 2
- 238000003756 stirring Methods 0.000 claims abstract 2
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 claims description 6
- 238000009835 boiling Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 4
- 238000009775 high-speed stirring Methods 0.000 claims description 2
- 230000000630 rising effect Effects 0.000 claims 1
- 238000002360 preparation method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 9
- 239000002994 raw material Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 238000010924 continuous production Methods 0.000 abstract description 3
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 2
- 150000004706 metal oxides Chemical class 0.000 abstract description 2
- 239000010419 fine particle Substances 0.000 abstract 1
- CKHJYUSOUQDYEN-UHFFFAOYSA-N gallium(3+) Chemical compound [Ga+3] CKHJYUSOUQDYEN-UHFFFAOYSA-N 0.000 abstract 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 70
- 238000001354 calcination Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 9
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 7
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 7
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 7
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 101000827703 Homo sapiens Polyphosphoinositide phosphatase Proteins 0.000 description 4
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 4
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 3
- 150000002258 gallium Chemical class 0.000 description 3
- 229910000373 gallium sulfate Inorganic materials 0.000 description 3
- SBDRYJMIQMDXRH-UHFFFAOYSA-N gallium;sulfuric acid Chemical compound [Ga].OS(O)(=O)=O SBDRYJMIQMDXRH-UHFFFAOYSA-N 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 125000005233 alkylalcohol group Chemical group 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- -1 gallium halide Chemical class 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000004088 foaming agent Substances 0.000 description 1
- VYNJXUWQBOFNDH-UHFFFAOYSA-K gallium;azane;hydrogen sulfate;sulfate Chemical compound N.[Ga+3].OS([O-])(=O)=O.[O-]S([O-])(=O)=O VYNJXUWQBOFNDH-UHFFFAOYSA-K 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
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- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G15/00—Compounds of gallium, indium or thallium
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- C—CHEMISTRY; METALLURGY
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- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/03—Particle morphology depicted by an image obtained by SEM
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
技术领域Technical Field
本发明涉及一种金属镓水解法制备高纯氧化镓(Ga2O3)的方法,属于金属氧化物材料制备技术领域。The invention relates to a method for preparing high-purity gallium oxide (Ga 2 O 3 ) by hydrolyzing metal gallium, and belongs to the technical field of metal oxide material preparation.
背景技术Background technique
Ga2O3作为一种宽带隙半导体材料,其禁带宽度高达4.8eV~4.9eV;加之Ga2O3在极端环境下的高稳定性,使其成为第四代半导体的备选材料。另外,Ga2O3还可用于制备功率器件、紫外探测器、高能射线探测器等;同时也可作为GaN、ZnO等半导体的衬底材料。As a wide bandgap semiconductor material, Ga 2 O 3 has a bandgap width of up to 4.8eV to 4.9eV. In addition, Ga 2 O 3 has high stability in extreme environments, making it a candidate material for the fourth generation of semiconductors. In addition, Ga 2 O 3 can also be used to prepare power devices, ultraviolet detectors, high-energy ray detectors, etc. It can also be used as a substrate material for semiconductors such as GaN and ZnO.
目前,Ga2O3制备的方法有:At present, the methods for preparing Ga2O3 are :
硫酸镓铵法,首先利用金属镓和硫酸反应生成硫酸镓,再用硫酸镓与硫酸铵在水溶液中聚合结晶析出硫酸镓铵晶体,最后再进行焙烧得到Ga2O3。这种方法的优点是对原材料的纯度要求低,但缺点是金属镓与酸反应速率较慢,生产效率低。The gallium ammonium sulfate method first uses metal gallium and sulfuric acid to react to generate gallium sulfate, then uses gallium sulfate and ammonium sulfate to polymerize and crystallize in an aqueous solution to precipitate ammonium gallium sulfate crystals, and finally roasts them to obtain Ga 2 O 3. The advantage of this method is that it has low requirements for the purity of raw materials, but the disadvantage is that the reaction rate of metal gallium and acid is slow, and the production efficiency is low.
烷基醇镓法,利用金属镓与烷基醇反应生成烷基醇镓盐;再将得到的烷基醇镓盐在含烷基醇的水溶液中水解生成GaOOH,再焙烧得到Ga2O3。这种方法的优点是绿色环保,但缺点是工艺繁杂。The gallium alkyl alcohol method uses metal gallium to react with alkyl alcohol to generate gallium alkyl alcohol salt; the obtained gallium alkyl alcohol salt is then hydrolyzed in an aqueous solution containing alkyl alcohol to generate GaOOH, which is then calcined to obtain Ga 2 O 3 . The advantage of this method is that it is green and environmentally friendly, but the disadvantage is that the process is complicated.
溶胶凝胶法,利用镓盐(卤化镓等)水解反应制备GaOOH,再焙烧得到Ga2O3。这种方法的优点是生产效率高,但缺点是原料难储存(镓盐易潮解,需真空下保存)、易失效且成本较高。Sol-gel method uses gallium salt (gallium halide, etc.) hydrolysis reaction to prepare GaOOH, and then roasts to obtain Ga 2 O 3. The advantage of this method is high production efficiency, but the disadvantage is that the raw materials are difficult to store (gallium salt is easy to deliquesce and needs to be stored under vacuum), easy to fail and high cost.
水热法,利用镓离子与碱在水热条件下制备GaOOH,再焙烧得到Ga2O3。这种方法的优点是产品纯度高,但缺点是水热法为间歇式的分批次操作,无法做到连续式生产,生产效率低,另外高压环境存在安全隐患。The hydrothermal method uses gallium ions and alkali to prepare GaOOH under hydrothermal conditions, and then roasts it to obtain Ga 2 O 3. The advantage of this method is that the product purity is high, but the disadvantage is that the hydrothermal method is an intermittent batch operation, which cannot achieve continuous production, has low production efficiency, and there are safety hazards in the high-pressure environment.
发明内容Summary of the invention
本发明针对现有技术中原料易失效,工艺繁杂和生产效率低下等问题,提出了一种金属镓水解法制备高纯氧化镓Ga2O3的方法,即利用金属镓在高速搅拌条件下和电解还原水反应生成GaOOH;GaOOH随表面活性剂浮沫上浮,实现GaOOH与反应体系的分离。最后对GaOOH清洗、焙烧后得到高纯Ga2O3。In view of the problems of raw materials being easily invalid, complicated processes and low production efficiency in the prior art, the present invention proposes a method for preparing high-purity gallium oxide Ga2O3 by hydrolysis of metal gallium, that is, using metal gallium to react with electrolytic reduced water under high-speed stirring conditions to generate GaOOH; GaOOH floats with the foam of a surfactant to separate GaOOH from the reaction system. Finally, the GaOOH is cleaned and roasted to obtain high- purity Ga2O3 .
本发明金属镓水解法制备高纯Ga2O3的原理为:The principle of preparing high- purity Ga2O3 by the gallium metal hydrolysis method of the present invention is:
金属镓和水的反应为氧化还原反应,水将金属镓氧化成Ga3+,Ga3+遇到电解还原水中的OH-立刻生成GaOOH沉淀;同时,金属镓将水还原成H2;The reaction between metal gallium and water is a redox reaction. Water oxidizes metal gallium into Ga 3+ . When Ga 3+ encounters OH- in electrolytically reduced water, GaOOH precipitation is immediately generated. At the same time, metal gallium reduces water into H 2 .
反应式为The reaction formula is
金属镓被氧化成Ga3+Ga-3e-→Ga3+ Gallium metal is oxidized to Ga 3+ Ga-3e - →Ga 3+
Ga3+生成GaOOH沉淀Ga3++2OH-→GaOOH↓+H+ Ga 3+ generates GaOOH precipitation Ga 3+ +2OH - →GaOOH↓+H +
水被还原成H2 2H2O+2e-→H2↑+2OH- Water is reduced to H 2 2H 2 O+2e - →H 2 ↑+2OH -
总反应式 2Ga+4H2O→2GaOOH+3H2↑Overall reaction formula 2Ga+4H 2 O→2GaOOH+3H 2 ↑
一种金属镓水解法制备高纯氧化镓的方法,具体步骤如下:A method for preparing high-purity gallium oxide by hydrolysis of metallic gallium, the specific steps are as follows:
(1)将金属镓单质和表面活性剂加入到电解还原水中混合均匀得到反应体系;(1) adding metal gallium and a surfactant into electrolytic reduction water and mixing them evenly to obtain a reaction system;
(2)反应体系加热至沸腾产生H2气泡,表面活性剂在H2气泡下产生浮沫;(2) The reaction system is heated to boiling to generate H2 bubbles, and the surfactant produces foam under the H2 bubbles;
(3)在温度70~100℃、转速4000~8000rpm下,金属镓分散形成微粒并与电解还原水发生水解反应生成水解产物GaOOH,水解产物GaOOH裹挟于表面活性剂产生的浮沫中排至液体上层;(3) At a temperature of 70-100°C and a rotation speed of 4000-8000 rpm, the metal gallium is dispersed to form microparticles and undergoes a hydrolysis reaction with the electrolytic reduced water to generate a hydrolysis product GaOOH, which is entrained in the foam generated by the surfactant and discharged to the upper layer of the liquid;
(4)收集液体上层的浮沫,采用纯水清洗,干燥即得GaOOH晶体;(4) collecting the foam on the upper layer of the liquid, washing it with pure water, and drying it to obtain GaOOH crystals;
(5)GaOOH晶体匀速升温至焙烧温度,再焙烧2~5h得到高纯Ga2O3。(5) The GaOOH crystal is heated to the calcination temperature at a uniform rate and then calcined for 2 to 5 hours to obtain high-purity Ga 2 O 3 .
所述步骤(1)表面活性剂为PVP或CTAB,电解还原水的pH值为8.5~11,所述电解还原水经质子交换膜电解槽制备而得。电解还原水是指利用质子膜电解槽电解超纯水后,在阴极槽中得到的产物。由于OH-不断聚集在阴极所以制备电解还原水的pH要求大于8.5。The surfactant in step (1) is PVP or CTAB, and the pH value of the electrolytic reduced water is 8.5 to 11. The electrolytic reduced water is prepared by a proton exchange membrane electrolyzer. The electrolytic reduced water refers to the product obtained in the cathode tank after the ultrapure water is electrolyzed by a proton membrane electrolyzer. Since OH- continuously accumulates at the cathode, the pH value of the electrolytic reduced water is required to be greater than 8.5.
所述的电解还原水制备机理为:The electrolytic reduced water preparation mechanism is:
在电场作用下,水被电离为H+和OH-;带正电的H+通过质子交换膜移动到阴极后得电子变为H2排出。随着水不断被电离,阴极区的H-不断被消耗,导致OH-在阴极区堆积,故而在阴极区得到电解还原水。Under the action of the electric field, water is ionized into H + and OH - ; the positively charged H + moves to the cathode through the proton exchange membrane and obtains electrons to become H 2 and is discharged. As water is continuously ionized, the H - in the cathode area is continuously consumed, causing OH - to accumulate in the cathode area, so electrolytic reduced water is obtained in the cathode area.
上述反应式为The above reaction formula is
阴极:2H2O+2e-=2OH-+H2↑;Cathode: 2H 2 O+2e - =2OH - +H 2 ↑;
阳极:2H2O-4e-=4H++O2↑Anode: 2H 2 O-4e - =4H + +O 2 ↑
所述制备的电解还原水中无其他阳离子杂质,不影响产品最终纯度。The prepared electrolytic reduced water contains no other cationic impurities and does not affect the final purity of the product.
所述原料金属镓的纯度为99.999%。The purity of the raw material metal gallium is 99.999%.
所述产物高纯Ga2O3的纯度可达99.99%。The purity of the product high-purity Ga 2 O 3 can reach 99.99%.
所述步骤(1)金属镓、表面活性剂和电解还原水的固液比g:g:mL为30~50:1:1000~2000。In the step (1), the solid-to-liquid ratio of the metal gallium, the surfactant and the electrolytic reduced water is g:g:mL 30-50:1:1000-2000.
所述步骤(5)匀速升温速率为2~8℃/min,焙烧温度为300~1000℃,焙烧时间为2~5h。The uniform heating rate of step (5) is 2-8°C/min, the calcination temperature is 300-1000°C, and the calcination time is 2-5h.
优选的,所述焙烧温度为300~500℃,高纯Ga2O3为α-Ga2O3;焙烧为500~1000℃且不包含500℃,高纯Ga2O3为β-Ga2O3。Preferably, the calcination temperature is 300-500°C, and the high-purity Ga 2 O 3 is α-Ga 2 O 3 ; the calcination temperature is 500-1000°C but does not include 500°C, and the high-purity Ga 2 O 3 is β-Ga 2 O 3 .
所述步骤(5)中GaOOH晶体中残留的活性剂在焙烧过程中分解成CO2气体溢出,不影响产品最终纯度。In the step (5), the residual active agent in the GaOOH crystal is decomposed into CO2 gas during the roasting process and overflows, which does not affect the final purity of the product.
本发明的有益效果是:The beneficial effects of the present invention are:
(1)本发明使用的原料为金属镓单质,易储存且成本较低;可解决传统工艺中镓盐易潮解失效的问题。(1) The raw material used in the present invention is metallic gallium, which is easy to store and has low cost; it can solve the problem of gallium salt being easily deliquesced and ineffective in traditional processes.
(2)表面活性剂在反应中起到分散剂作用和起泡剂作用;产物GaOOH随表面活性剂浮沫上浮,实现GaOOH与反应体系的分离。(2) The surfactant acts as a dispersant and a foaming agent in the reaction; the product GaOOH floats up with the surfactant foam, thereby separating GaOOH from the reaction system.
(3)本发明在常压下进行,装置简单;可在生产过程在随时补充原料,以实现高效连续式生产GaOOH,GaOOH再经焙烧得到高纯α-Ga2O3或β-Ga2O3。(3) The present invention is carried out under normal pressure and has a simple device. The raw materials can be replenished at any time during the production process to achieve efficient and continuous production of GaOOH, which is then calcined to obtain high-purity α-Ga 2 O 3 or β-Ga 2 O 3 .
(3)本发明金属镓水解工艺中采用电解还原水,无其他阳离子等杂质引入,省略提纯工艺;并且电解还原水可自我降解,不产生有害物质。(3) The gallium metal hydrolysis process of the present invention uses electrolytically reduced water, without the introduction of other impurities such as cations, and omitting the purification process; and the electrolytically reduced water can self-degrade and does not produce harmful substances.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为实施例1~3中产物GaOOH的XRD图;FIG1 is an XRD diagram of the product GaOOH in Examples 1 to 3;
图2为实施例1~3中产物GaOOH的SEM图;FIG2 is a SEM image of the GaOOH product in Examples 1 to 3;
图3为实施例1~3中产物α-Ga2O3的XRD图;FIG3 is an XRD diagram of the product α-Ga 2 O 3 in Examples 1 to 3;
图4为实施例1~3中产物α-Ga2O3的SEM图;FIG4 is a SEM image of the product α-Ga 2 O 3 in Examples 1 to 3;
图5为实施例4~6中产物β-Ga2O3的XRD图;FIG5 is an XRD diagram of the product β-Ga 2 O 3 in Examples 4 to 6;
图6为实施例4~6中产物β-Ga2O3的SEM图。FIG. 6 is a SEM image of the β-Ga 2 O 3 product in Examples 4 to 6.
具体实施方式Detailed ways
下面结合具体实施方式对本发明作进一步详细说明,但本发明的保护范围并不限于所述内容。The present invention is further described in detail below in conjunction with specific implementation modes, but the protection scope of the present invention is not limited to the described contents.
实施例1:一种金属镓水解法制备高纯氧化镓的方法,具体步骤如下:Example 1: A method for preparing high-purity gallium oxide by hydrolysis of metallic gallium, the specific steps are as follows:
(1)将金属镓和表面活性剂(PVP)加入到电解还原水中混合均匀得到反应体系;其中电解还原水经质子交换膜电解槽制备而得,电解还原水的pH值为8.5,金属镓、表面活性剂(PVP)和电解还原水的固液比g:g:mL为30:1:1000;(1) adding metal gallium and surfactant (PVP) to electrolytic reduced water and mixing them uniformly to obtain a reaction system; wherein the electrolytic reduced water is prepared by a proton exchange membrane electrolyzer, the pH value of the electrolytic reduced water is 8.5, and the solid-liquid ratio of metal gallium, surfactant (PVP) and electrolytic reduced water is 30:1:1000 g:g:mL;
(2)反应体系加热至沸腾产生H2气泡,表面活性剂(PVP)在H2气泡下产生浮沫;(2) The reaction system is heated to boiling to generate H 2 bubbles, and the surfactant (PVP) generates foam under the H 2 bubbles;
(3)在温度70℃、转速4000rpm下,金属镓被分散形成直径<10μm的微粒并与电解还原水发生水解反应生成水解产物GaOOH,水解产物GaOOH裹挟于表面活性剂(PVP)产生的浮沫中排至液体上层;(3) At a temperature of 70°C and a rotation speed of 4000 rpm, metal gallium is dispersed to form particles with a diameter of less than 10 μm and undergoes a hydrolysis reaction with electrolytic reduced water to generate a hydrolysis product GaOOH, which is entrained in the foam generated by the surfactant (PVP) and discharged to the upper layer of the liquid;
(4)收集液体上层的浮沫,采用纯水清洗,干燥即得GaOOH晶体;(4) collecting the foam on the upper layer of the liquid, washing it with pure water, and drying it to obtain GaOOH crystals;
本实施例中产物GaOOH的XRD图见图1,产物GaOOH的SEM图见图2;从图1和图2可知,产物GaOOH成功制备,GaOOH为单斜晶体团簇,通过计算,产物GaOOH的产率约86.2%;The XRD pattern of the product GaOOH in this embodiment is shown in FIG1 , and the SEM pattern of the product GaOOH is shown in FIG2 ; it can be seen from FIG1 and FIG2 that the product GaOOH is successfully prepared, and GaOOH is a monoclinic crystal cluster. By calculation, the yield of the product GaOOH is about 86.2%;
(5)GaOOH晶体以8℃/min的升温速率匀速升温至焙烧温度320℃,再恒温焙烧2h得到高纯Ga2O3;(5) The GaOOH crystal is heated uniformly at a heating rate of 8°C/min to a calcination temperature of 320°C, and then calcined at a constant temperature for 2h to obtain high-purity Ga 2 O 3 ;
本实施例产物高纯Ga2O3经XRD检测,高纯Ga2O3为α-Ga2O3,α-Ga2O3为单斜晶体;本实施例中产物α-Ga2O3的XRD图见图3,产物α-Ga2O3的SEM图见图4,The high-purity Ga 2 O 3 product of this embodiment is detected by XRD, and the high-purity Ga 2 O 3 is α-Ga 2 O 3 , and α-Ga 2 O 3 is a monoclinic crystal; the XRD diagram of the product α-Ga 2 O 3 in this embodiment is shown in FIG3, and the SEM diagram of the product α-Ga 2 O 3 is shown in FIG4.
本实施例高纯α-Ga2O3的纯度为99.991%。The purity of the high-purity α-Ga 2 O 3 in this embodiment is 99.991%.
实施例2:一种金属镓水解法制备高纯氧化镓的方法,具体步骤如下:Example 2: A method for preparing high-purity gallium oxide by hydrolysis of metallic gallium, the specific steps are as follows:
(1)将金属镓和表面活性剂(CTAB)加入到电解还原水中混合均匀得到反应体系;其中电解还原水经质子交换膜电解槽制备而得,电解还原水的pH值为9,金属镓、表面活性剂(CTAB)和电解还原水的固液比g:g:mL为40:1:1500;(1) adding metal gallium and a surfactant (CTAB) to electrolytically reduced water and mixing them uniformly to obtain a reaction system; wherein the electrolytically reduced water is prepared by a proton exchange membrane electrolyzer, the pH value of the electrolytically reduced water is 9, and the solid-liquid ratio of the metal gallium, the surfactant (CTAB) and the electrolytically reduced water is 40:1:1500 g:g:mL;
(2)反应体系加热至沸腾产生H2气泡,表面活性剂(CTAB)在H2气泡下产生浮沫;(2) The reaction system is heated to boiling to generate H 2 bubbles, and the surfactant (CTAB) produces foam under the H 2 bubbles;
(3)在温度85℃、转速6000rpm下,金属镓被分散成直径<5μm的微粒并与电解还原水发生水解反应生成水解产物GaOOH,水解产物GaOOH裹挟于表面活性剂(CTAB)产生的浮沫中排至液体上层;(3) At a temperature of 85°C and a rotation speed of 6000 rpm, the metal gallium is dispersed into particles with a diameter of less than 5 μm and undergoes a hydrolysis reaction with electrolytic reduced water to generate a hydrolysis product GaOOH, which is entrained in the foam generated by the surfactant (CTAB) and discharged to the upper layer of the liquid;
(4)收集液体上层的浮沫,采用纯水清洗,干燥即得GaOOH晶体;(4) collecting the foam on the upper layer of the liquid, washing it with pure water, and drying it to obtain GaOOH crystals;
本实施例中产物GaOOH的XRD图见图1,产物GaOOH的SEM图见图2;从图1和图2可知,产物GaOOH成功制备,GaOOH为单斜晶体团簇,通过计算,产物GaOOH的产率约88.7%;The XRD pattern of the product GaOOH in this embodiment is shown in FIG1 , and the SEM pattern of the product GaOOH is shown in FIG2 ; it can be seen from FIG1 and FIG2 that the product GaOOH is successfully prepared, and GaOOH is a monoclinic crystal cluster. By calculation, the yield of the product GaOOH is about 88.7%;
(5)GaOOH晶体以6℃/min的升温速率匀速升温至焙烧温度400℃,再恒温焙烧4h得到高纯Ga2O3;(5) The GaOOH crystal was heated at a rate of 6°C/min to a calcination temperature of 400°C, and then calcined at a constant temperature for 4 hours to obtain high-purity Ga 2 O 3 ;
本实施例产物高纯Ga2O3经XRD检测,高纯Ga2O3为α-Ga2O3,α-Ga2O3为单斜晶体;本实施例中产物α-Ga2O3的XRD图见图3,产物α-Ga2O3的SEM图见图4,The high-purity Ga 2 O 3 product of this embodiment is detected by XRD, and the high-purity Ga 2 O 3 is α-Ga 2 O 3 , and α-Ga 2 O 3 is a monoclinic crystal; the XRD diagram of the product α-Ga 2 O 3 in this embodiment is shown in FIG3, and the SEM diagram of the product α-Ga 2 O 3 is shown in FIG4.
本实施例高纯α-Ga2O3的纯度为99.992%。The purity of the high-purity α-Ga 2 O 3 in this embodiment is 99.992%.
实施例3:一种金属镓水解法制备高纯氧化镓的方法,具体步骤如下:Example 3: A method for preparing high-purity gallium oxide by hydrolysis of metallic gallium, the specific steps are as follows:
(1)将金属镓和表面活性剂(PVP)加入到电解还原水中混合均匀得到反应体系;其中电解还原水经质子交换膜电解槽制备而得,电解还原水的pH值为10,金属镓、表面活性剂(PVP)和电解还原水的固液比g:g:mL为50:1:2000;(1) adding metal gallium and surfactant (PVP) to electrolytic reduced water and mixing them uniformly to obtain a reaction system; wherein the electrolytic reduced water is prepared by a proton exchange membrane electrolyzer, the pH value of the electrolytic reduced water is 10, and the solid-liquid ratio of metal gallium, surfactant (PVP) and electrolytic reduced water is 50:1:2000 g:g:mL;
(2)反应体系加热至沸腾产生H2气泡,表面活性剂(PVP)在H2气泡下产生浮沫;(2) The reaction system is heated to boiling to generate H 2 bubbles, and the surfactant (PVP) generates foam under the H 2 bubbles;
(3)在温度98℃、转速8000rpm下,金属镓分散形成直径<1μm的微粒并与电解还原水发生水解反应生成水解产物GaOOH,水解产物GaOOH裹挟于表面活性剂(PVP)产生的浮沫中排至液体上层;(3) At a temperature of 98°C and a rotation speed of 8000 rpm, the metal gallium is dispersed to form particles with a diameter of less than 1 μm and undergoes a hydrolysis reaction with the electrolytic reduced water to generate a hydrolysis product GaOOH, which is entrained in the foam generated by the surfactant (PVP) and discharged to the upper layer of the liquid;
(4)收集液体上层的浮沫,采用纯水清洗,干燥即得GaOOH晶体;(4) collecting the foam on the upper layer of the liquid, washing it with pure water, and drying it to obtain GaOOH crystals;
本实施例中产物GaOOH的XRD图见图1,产物GaOOH的SEM图见图2;从图1和图2可知,产物GaOOH成功制备,GaOOH为单斜晶体团簇,通过计算,产物GaOOH的产率约92.5%;The XRD pattern of the product GaOOH in this embodiment is shown in FIG1 , and the SEM pattern of the product GaOOH is shown in FIG2 ; from FIG1 and FIG2 , it can be seen that the product GaOOH is successfully prepared, and GaOOH is a monoclinic crystal cluster. By calculation, the yield of the product GaOOH is about 92.5%;
(5)GaOOH晶体以2℃/min的升温速率匀速升温至焙烧温度500℃,再恒温焙烧6h得到高纯Ga2O3;(5) The GaOOH crystal was heated uniformly at a heating rate of 2°C/min to a calcination temperature of 500°C, and then calcined at a constant temperature for 6 hours to obtain high-purity Ga 2 O 3 ;
本实施例产物高纯Ga2O3经XRD检测,高纯Ga2O3为α-Ga2O3,α-Ga2O3为单斜晶体;本实施例中产物α-Ga2O3的XRD图见图3,产物α-Ga2O3的SEM图见图4,The high-purity Ga 2 O 3 product of this embodiment is detected by XRD, and the high-purity Ga 2 O 3 is α-Ga 2 O 3 , and α-Ga 2 O 3 is a monoclinic crystal; the XRD diagram of the product α-Ga 2 O 3 in this embodiment is shown in FIG3, and the SEM diagram of the product α-Ga 2 O 3 is shown in FIG4.
本实施例高纯α-Ga2O3的纯度为99.995%。The purity of the high-purity α-Ga 2 O 3 in this embodiment is 99.995%.
实施例4:一种金属镓水解法制备高纯氧化镓的方法,具体步骤如下:Example 4: A method for preparing high-purity gallium oxide by hydrolysis of metallic gallium, the specific steps are as follows:
(1)GaOOH晶体制备:本实施例GaOOH晶体制备方法同实施例1;(1) Preparation of GaOOH crystals: The preparation method of GaOOH crystals in this embodiment is the same as that in Example 1;
(2)GaOOH晶体以8℃/min的升温速率匀速升温至焙烧温度600℃,再恒温焙烧2h得到高纯Ga2O3;(2) The GaOOH crystal was heated at a rate of 8°C/min to a calcination temperature of 600°C, and then calcined at a constant temperature for 2h to obtain high-purity Ga 2 O 3 ;
本实施例中产物β-Ga2O3的XRD图见图5,产物β-Ga2O3的SEM图见图6。从图5和图6可知,高纯Ga2O3为β-Ga2O3,β-Ga2O3为单斜晶体。β-Ga2O3晶体表面有大量孔洞出现,分析孔洞为焙烧过程中GaOOH分解产生的水汽通道,反应式为:2GaOOH→H2O↑+Ga2O3。The XRD pattern of the product β-Ga 2 O 3 in this example is shown in FIG5 , and the SEM pattern of the product β-Ga 2 O 3 is shown in FIG6 . As can be seen from FIG5 and FIG6 , the high-purity Ga 2 O 3 is β-Ga 2 O 3 , and β-Ga 2 O 3 is a monoclinic crystal. A large number of holes appear on the surface of the β-Ga 2 O 3 crystal. The holes are analyzed to be water vapor channels generated by the decomposition of GaOOH during the calcination process, and the reaction formula is: 2GaOOH→H 2 O↑+Ga 2 O 3 .
本实施例高纯β-Ga2O3的纯度为99.992%。The purity of the high-purity β-Ga 2 O 3 in this embodiment is 99.992%.
实施例5:一种金属镓水解法制备高纯氧化镓的方法,具体步骤如下:Example 5: A method for preparing high-purity gallium oxide by hydrolysis of metallic gallium, the specific steps are as follows:
(1)GaOOH晶体制备:本实施例GaOOH晶体制备方法同实施例2;(1) Preparation of GaOOH crystals: The preparation method of GaOOH crystals in this embodiment is the same as that in Example 2;
(2)GaOOH晶体以6℃/min的升温速率匀速升温至焙烧温度800℃,再恒温焙烧4h得到高纯Ga2O3;(2) The GaOOH crystal was heated at a rate of 6°C/min to a calcination temperature of 800°C, and then calcined at a constant temperature for 4 hours to obtain high-purity Ga 2 O 3 ;
本实施例中产物β-Ga2O3的XRD图见图5,产物β-Ga2O3的SEM图见图6。从图5和图6可知,高纯Ga2O3为β-Ga2O3,β-Ga2O3为单斜晶体。β-Ga2O3晶体表面有大量孔洞出现,分析孔洞为焙烧过程中GaOOH分解产生的水汽通道,反应式为:2GaOOH→H2O↑+Ga2O3。The XRD pattern of the product β-Ga 2 O 3 in this example is shown in FIG5 , and the SEM pattern of the product β-Ga 2 O 3 is shown in FIG6 . As can be seen from FIG5 and FIG6 , the high-purity Ga 2 O 3 is β-Ga 2 O 3 , and β-Ga 2 O 3 is a monoclinic crystal. A large number of holes appear on the surface of the β-Ga 2 O 3 crystal. The holes are analyzed to be water vapor channels generated by the decomposition of GaOOH during the calcination process, and the reaction formula is: 2GaOOH→H 2 O↑+Ga 2 O 3 .
本实施例高纯β-Ga2O3的纯度为99.993%。The purity of the high-purity β-Ga 2 O 3 in this embodiment is 99.993%.
实施例6:一种金属镓水解法制备高纯氧化镓的方法,具体步骤如下:Example 6: A method for preparing high-purity gallium oxide by hydrolysis of metallic gallium, the specific steps are as follows:
(1)GaOOH晶体制备:本实施例GaOOH晶体制备方法同实施例2;(1) Preparation of GaOOH crystals: The preparation method of GaOOH crystals in this embodiment is the same as that in Example 2;
(2)GaOOH晶体以2℃/min的升温速率匀速升温至焙烧温度1000℃,再恒温焙烧6h得到高纯Ga2O3;(2) The GaOOH crystal was heated uniformly at a heating rate of 2°C/min to a calcination temperature of 1000°C, and then calcined at a constant temperature for 6 hours to obtain high-purity Ga 2 O 3 ;
本实施例中产物β-Ga2O3的XRD图见图5,产物β-Ga2O3的SEM图见图6。从图5和图6可知,高纯Ga2O3为β-Ga2O3,β-Ga2O3为单斜晶体;β-Ga2O3晶体表面有大量孔洞出现,分析孔洞为焙烧过程中GaOOH分解产生的水汽通道,反应式为:2GaOOH→H2O↑+Ga2O3。The XRD pattern of the product β-Ga 2 O 3 in this example is shown in Figure 5, and the SEM pattern of the product β-Ga 2 O 3 is shown in Figure 6. As can be seen from Figures 5 and 6, the high-purity Ga 2 O 3 is β-Ga 2 O 3 , and β-Ga 2 O 3 is a monoclinic crystal; a large number of holes appear on the surface of the β-Ga 2 O 3 crystal, and the holes are analyzed to be water vapor channels generated by the decomposition of GaOOH during the calcination process, and the reaction formula is: 2GaOOH→H 2 O↑+Ga 2 O 3 .
本实施例高纯β-Ga2O3的纯度为99.996%。The purity of the high-purity β-Ga 2 O 3 in this embodiment is 99.996%.
以上对本发明的具体实施方式作了详细说明,但是本发明并不限于上述实施方式,在本领域普通技术人员所具备的知识范围内,还可以在不脱离本发明宗旨的前提下作出各种变化。The specific implementation modes of the present invention are described in detail above, but the present invention is not limited to the above implementation modes, and various changes can be made within the knowledge scope of ordinary technicians in this field without departing from the purpose of the present invention.
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