CN116207927B - Magnetic suspension motor and magnetic suspension equipment of twisted pair outgoing line - Google Patents

Magnetic suspension motor and magnetic suspension equipment of twisted pair outgoing line Download PDF

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Publication number
CN116207927B
CN116207927B CN202310492782.4A CN202310492782A CN116207927B CN 116207927 B CN116207927 B CN 116207927B CN 202310492782 A CN202310492782 A CN 202310492782A CN 116207927 B CN116207927 B CN 116207927B
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winding
magnetic
stator
motor
levitation
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CN116207927A (en
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刘德刚
尹成科
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Suzhou Suci Intelligent Technology Co ltd
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Suzhou Suci Intelligent Technology Co ltd
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/01—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for shielding from electromagnetic fields, i.e. structural association with shields
    • H02K11/014—Shields associated with stationary parts, e.g. stator cores
    • H02K11/0141—Shields associated with casings, enclosures or brackets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/16—Stator cores with slots for windings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/22—Auxiliary parts of casings not covered by groups H02K5/06-H02K5/20, e.g. shaped to form connection boxes or terminal boxes
    • H02K5/225—Terminal boxes or connection arrangements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Linear Motors (AREA)

Abstract

The invention relates to a magnetic levitation motor with twisted wires and magnetic levitation equipment, wherein the magnetic levitation motor comprises a magnetic levitation stator and a sensor system, the magnetic levitation stator comprises a plurality of stator teeth and a plurality of winding coils, at least one winding coil is arranged on each stator tooth, two ends of a single winding coil or two free ends of a phase coil group formed by sequentially connecting at least two winding coils in series are connected with a first switching wire, the two first switching wires are twisted in pairs and then led out to a first area, and the first area is configured to not generate magnetic field interference to the sensor system or generate magnetic field interference to the sensor to be within an anti-magnetic field interference threshold value. The invention solves the problem that the sensor system in the shell of the magnetic suspension motor is interfered by the wiring structure of the winding coil, thereby improving the detection precision of the sensor system and ensuring the operation reliability of the magnetic suspension motor.

Description

Magnetic suspension motor and magnetic suspension equipment of twisted pair outgoing line
Technical Field
The invention relates to the technical field of magnetic levitation motors, in particular to a magnetic levitation motor with double twisted wires and magnetic levitation equipment.
Background
The magnetic suspension motor is also called a magnetic suspension rotary driver or a bearingless sheet motor, realizes the rotation of a rotor and the active suspension in the radial direction by using a bearingless technology, realizes the passive suspension of the other three degrees of freedom except the radial direction and the rotational degree of freedom of the rotor by using a magnetic circuit formed by a mechanical structure, has the characteristics of high cleanliness, no precipitation, no particles, no dynamic seal and excellent performance, and has good application prospect in the field of ultra-clean driving such as biochemistry, medical treatment, semiconductor manufacturing and the like.
Typically, a magnetic levitation motor comprises a magnetic levitation stator and a magnetic levitation rotor, which may be a monolithic rotor, e.g. in the case of a magnetic levitation pump, the magnetic levitation rotor is both the rotor of the magnetic levitation motor and the rotor of the pump, e.g. a permanent magnet rotor or a short-circuit cage rotor or a reluctance rotor. Magnetic levitation stators typically include a stator yoke, a number of stator teeth, and winding coils wound around the stator teeth, such as in magnetic levitation pump applications, the magnetic levitation stator is both a rotationally driven stator and a magnetically levitated stator. The rotating magnetic field can be generated by the winding coils of the stator, which on the one hand exerts a rotation on the rotor, thus achieving its rotation about the desired axis of rotation, and on the other hand exerts a levitation force, which can be applied to the rotor as required, so that its radial position can be actively controlled or adjusted. Thus, three degrees of freedom of the rotor, namely its rotation and its radial position (two degrees of freedom) can be actively adjusted. Regarding the other three degrees of freedom, i.e. its position in the axial direction and its inclination (two degrees of freedom) with respect to a radial plane perpendicular to the desired axis of rotation, the rotor is passively magnetically levitated or stabilized by detent forces.
The magnetic suspension motor mostly adopts a double-winding structure to realize suspension and rotation of a rotor, and is characterized in that two sets of winding coils are overlapped and wound together on a stator tooth: a rotation control winding and a levitation control winding. The winding direction and the lap winding position of the two sets of winding coils are strictly limited, and the structural form increases the complexity of motor design and processing technology; two sets of winding coils are wound in the motor stator, the possibility of short circuit among the winding coils is increased, and the reliability of the motor is reduced; in order to avoid short circuit among winding coils, insulating materials are often added among winding coils, and the insulation requirement is high, so that the slot filling rate is low, the magnetic leakage of the motor is large, and the performance of the motor is influenced. Compared with a double-winding structure, the magnetic suspension motor with the single-winding structure can simultaneously realize the rotation and suspension of the motor rotor by only using one set of winding coil. The design and the processing technology of the motor are similar to those of a common motor, so that the design effort and the processing cost are greatly saved, and the industrialization of the magnetic suspension motor is facilitated; the motor has only one set of winding coil, so that the possibility of turn-to-turn short circuit of windings of the double-winding structure is avoided, and an inter-winding insulating material required by the double-winding structure is not needed to be added, so that the magnetic flux leakage can be reduced, the slot filling rate of the motor is ensured, and the performance of the motor is improved; the motor with the single winding structure is easier to realize fault-tolerant control of windings and more reliable in operation, which is particularly important for ultra-clean driving of the sealing pump.
In another type of application, magnetic levitation motors are used as a contactless rotational drive for semiconductor devices, for example, in the fabrication of wafers, one fabrication step is annealing the wafer after ion implantation doping. Doping imparts strain on the crystal structure, which can lead to undesirable changes in the resistivity of the ion doping if the stress is not released quickly. Currently, rapid Thermal Processing (RTP) is commonly used for annealing. In the case of RTP, it is required that upper and lower regions of the wafer are not covered, and therefore, an annular rotor support table is generally provided. In order to uniformly heat the wafer and meet the high clean requirement, the magnetic levitation motor is configured to generate a magnetic field to drive the rotor support table to rotate and levitate. Patent document CN114221580B discloses a magnetic levitation device and a rotor position adjusting method, wherein the stator and rotor structure has axial adjusting function while realizing rotation and levitation.
The magnetic levitation motor needs to perform more degree of freedom control than the conventional motor using the contact type mechanical bearing. The motor body is required to integrate more sensors, various sensors and signal processing circuits thereof are called a sensor system, the position data of the rotor can be detected in real time through the sensor system to serve as feedback quantity, a control host or a system controller of the magnetic levitation motor calculates and obtains control instructions according to the position data of the rotor and transmits the control instructions to the power amplifier to generate levitation and rotation control currents, active levitation force with corresponding directions and sizes is provided, and real-time and accurate closed-loop control of the position of the rotor is realized. The sensor usually adopts a non-contact type eddy current displacement sensor or a Hall sensor, and a sensor coil of the eddy current displacement sensor or the Hall sensor is usually arranged at a position opposite to the magnetic suspension stator and the magnetic suspension rotor. Because the control accuracy of the magnetic suspension motor depends on the detection accuracy of the sensor to a certain extent, and the detection signal intensity of the sensor is relatively weak, once the sensor is interfered by an electromagnetic field, particularly the magnetic field, the detection accuracy of the sensor is affected, so that the inaccuracy of the position detection is caused, and the operation reliability of the magnetic suspension motor is seriously affected. Therefore, how to solve the magnetic field interference suffered by the sensor system in the magnetic suspension motor shell becomes a great technical problem which needs to be solved urgently at present.
Disclosure of Invention
In order to solve the technical problems, the invention provides the magnetic suspension motor with the twisted pair wires and the magnetic suspension equipment, which can improve the detection precision of a sensor system and ensure the operation reliability of the magnetic suspension motor.
According to an aspect of the present invention, there is provided a magnetic levitation motor with twisted pair wires, comprising a magnetic levitation stator and a sensor system, wherein the magnetic levitation stator comprises a plurality of stator teeth and a plurality of winding coils, at least one winding coil is arranged on each stator tooth, two ends of a single winding coil or two free ends of a phase coil group formed by sequentially connecting at least two winding coils in series are connected with a first switching wire, the two first switching wires are twisted in pairs and led out to a first area, and the first area is configured to not generate magnetic field interference to the sensor system or generate magnetic field interference to the sensor within an anti-magnetic field interference threshold value thereof.
Further, the magnetic levitation motor is of a single winding structure, each stator tooth is provided with one winding coil, one of two ends of each winding coil is a common end, the other end of each winding coil is a leading-out end, one first transfer wire is connected with the common end, the other first transfer wire is connected with the leading-out end, and a plurality of first transfer wires connected with the common ends of the winding coils are interconnected together to form a common end interconnection structure.
Further, the common terminal interconnection structure is configured as a first conductor or an interconnection circuit board with interconnection lines, and a plurality of the first switching lines are electrically connected with the first conductor or the interconnection lines.
Further, the magnetic levitation motor further comprises a housing, the magnetic levitation stator and the sensor are both arranged in the housing, the sensor system comprises a sensor, the sensor is arranged at a position facing a rotor cavity defined by the plurality of stator teeth, the rotor cavity is arranged close to the top end of the housing, the first area is configured as an outlet window in the housing, and the outlet window is arranged at the bottom end of the housing or at the middle part of the side surface of the housing or at the position where the side surface of the housing is close to the bottom end.
Further, a magnet shielding body for shielding the magnetic field generated by the common end interconnection structure is arranged at the outlet window.
Further, the magnetic levitation motor further comprises a housing, the magnetic levitation stator and the sensor system are both arranged in the housing, the first area is configured to be the outside of the housing, the sensor system comprises a sensor, the sensor is arranged at a position facing a rotor cavity defined by the plurality of stator teeth, the rotor cavity is arranged near the top end of the housing, the two twisted pairs of first transfer lines are led out of the outside of the housing from an outlet window, and the outlet window is arranged at the bottom end of the housing or in the middle of the side surface of the housing or in the position where the side surface of the housing is near the bottom end.
Further, a plurality of the first transfer lines connected with the leading-out ends of the winding coils are connected to a power amplifying circuit, and the power amplifying circuit is of a half-bridge power topological structure.
Furthermore, the magnetic suspension motor is of a single winding structure, two first transfer lines of the twisted pair of each winding coil are connected to a power amplifying circuit after being led out, and the power amplifying circuit is of a full-bridge power topological structure.
Further, the magnetic levitation motor is of a double-winding structure, and each stator tooth is provided with a winding coil used for generating an unbalanced field and a winding coil used for generating a balanced field.
Further, the plurality of winding coils configured to generate the balance field or/and the plurality of winding coils configured to not generate the balance field are divided into a plurality of phase coil sets, wherein the phase coil sets comprise at least two winding coils, and each winding coil in the at least two winding coils is led out to the first area through two first transfer wires twisted in pairs and then sequentially connected in series.
Further, the plurality of winding coils configured to generate a balanced field or/and the plurality of winding coils configured to generate an unbalanced field are divided into a plurality of phase coil groups, the phase coil groups comprise at least two winding coils, two adjacent winding coils in the at least two winding coils are connected in series through a second patch cord, and a first patch cord of one winding coil at the outermost side is twisted with the second patch cord and then is twisted with a first patch cord of the other winding coil at the outermost side.
Further, the plurality of winding coils configured to generate the unbalanced field are divided into 3 phase coil groups, the phase coil groups include two winding coils, one end of one winding coil is electrically connected with one end of the other winding coil through the second patch cord, the two winding coils in the phase coil groups are symmetrically arranged along the radial direction of the magnetic suspension stator, and the winding mode of one winding coil is opposite to the winding mode of the other winding coil.
Further, the plurality of winding coils configured to generate the balanced field are divided into 3 phase coil groups, the phase coil groups include two winding coils, one end of one winding coil is electrically connected with one end of the other winding coil through the second patch cord, the two winding coils in the phase coil groups are symmetrically arranged along the radial direction of the magnetic suspension stator, and the winding mode of one winding coil is the same as the winding mode of the other winding coil.
Further, the plurality of stator teeth includes a plurality of first stator teeth and a plurality of second stator teeth, the plurality of winding coils includes a plurality of rotating windings for rotation drive control and a plurality of levitation windings for levitation control, the rotating windings are disposed on the first stator teeth, the levitation windings are disposed on the second stator teeth, the first stator teeth and the rotating windings define a first radial plane, and the second stator teeth and the levitation windings define a second radial plane.
Further, the plurality of rotary winding components are a plurality of phase coil groups, and two first transfer wires connected at two ends of each phase coil group are twisted in pairs and then are routed in a space between the first radial plane and the second radial plane.
Further, after the two first transfer wires connected to the two ends of the suspension winding are twisted, the wires are routed in a space between the first radial plane and the second radial plane.
According to another aspect of the present invention, there is provided a magnetic levitation apparatus comprising the above-described magnetic levitation motor with twisted wire. The magnetic levitation apparatus may be configured as a magnetic levitation pump or a magnetic levitation stirring device, the magnetic levitation pump further comprising a pump head and a rotor impeller provided in the pump head in addition to the above-described magnetic levitation motor, the magnetic levitation stator being configured to generate a magnetic field to drive the rotor impeller to rotate and levitate. The magnetic levitation stirring device further comprises a rotor stirring head, and the magnetic levitation stator is configured to generate a magnetic field to drive the rotor stirring head to rotate and levitate.
Compared with the prior art, the technical scheme of the invention has the following advantages: the invention provides a magnetic suspension motor with double twisted wires, wherein two ends of a single winding coil of a magnetic suspension stator or two free ends of a phase coil group are led out to a first area through double twisted patch cords, and the first area is configured to not generate magnetic field interference to a sensor system or generate magnetic field interference to the sensor system within an anti-magnetic field interference threshold value of the magnetic field interference, so that the problem that the sensor system of the magnetic suspension motor is interfered by a wiring structure of the winding coil is solved, the detection precision of the sensor system is improved, and the running reliability of the magnetic suspension motor is ensured.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings, in which:
FIG. 1 is a schematic diagram of one embodiment of a twisted pair wire in a single-winding magnetic levitation motor of the present invention;
FIG. 2 is a schematic diagram of one embodiment of a single-winding magnetic levitation motor of the present invention having twisted wires;
FIG. 3 is a schematic diagram of another embodiment of a twisted pair wire of the single-winding magnetic levitation motor of the present invention;
FIG. 4 is a perspective view of another embodiment of a single-winding magnetic levitation motor of the present invention having twisted wires;
FIG. 5 is a schematic diagram of another embodiment of a single-winding magnetic levitation motor with twisted pair of wires according to the present invention;
FIG. 6 is a schematic diagram illustrating one embodiment of a dual-winding magnetic levitation motor having twisted pair of wires according to the present invention;
FIG. 7 is a schematic diagram of another embodiment of a dual-winding magnetic levitation motor of the present invention having twisted pair of wires;
FIG. 8 is a schematic diagram of an embodiment of the twisted pair of coil sets of FIG. 7 applied to a rotating magnetic field;
FIG. 9 is a schematic diagram of an embodiment of the phase coil assembly of FIG. 7 with twisted pair wires applied to a levitating magnetic field;
FIG. 10 is a schematic diagram of a further embodiment of a double-winding magnetic levitation motor (rotating field) of the present invention having twisted wires;
FIG. 11 is a perspective view of one embodiment of a magnetic levitation stator of a magnetic levitation motor of the present invention applied to a twisted pair wire of a magnetic levitation turntable;
FIG. 12 is a cross-sectional view of one embodiment of a magnetic levitation motor applied to a twisted pair of wires of a magnetic levitation turntable;
FIG. 13 is a schematic diagram of an embodiment of a twisted pair wire of a levitation winding of a magnetic levitation motor applied to the twisted pair wire of a magnetic levitation turntable.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. The terms "comprises" and "comprising," and any variations thereof, in the description and claims of the invention and in the foregoing drawings, are intended to cover a non-exclusive inclusion, such that a system, article, or apparatus that comprises a list of elements is not necessarily limited to those elements expressly listed but may include other elements not expressly listed or inherent to such article or apparatus.
In the prior art, the control precision of the magnetic levitation motor depends on the detection precision of the sensor to a certain extent, the detection signal intensity of the sensor is relatively weak, and once the sensor is interfered by an electromagnetic field, particularly by the magnetic field, the detection precision of the sensor is affected, so that the inaccuracy of the position detection is caused, and the operation reliability of the magnetic levitation motor is seriously affected. Therefore, how to solve the magnetic field interference suffered by the sensor system in the magnetic suspension motor shell becomes a great technical problem which needs to be solved urgently at present.
The sensor system comprises various sensors and signal processing circuits thereof, for example, a displacement sensor or a rotating speed sensor is usually arranged at the position where the magnetic suspension stator is opposite to the magnetic suspension rotor, a signal circuit board of the signal processing circuit is usually arranged at an outlet window on the shell, the sensors are electrically connected with the signal circuit board through flexible wires, and the signal circuit board is led out of the shell through the flexible wires and is electrically connected with a control system of the control host. The applicant of the present invention further studies to find that the sensor system of the magnetic levitation motor is mainly disturbed by magnetic fields in two aspects during the signal transmission process of the whole sensor system, on the one hand, the sensor is disturbed by the magnetic field generated by the wiring structure of the winding coils of the magnetic levitation stator, for example, the common end interconnection wiring structure of the single-winding magnetic levitation motor, because the common ends of the winding coils are interconnected together, the interconnection structure may form a ring-shaped or C-shaped loop, and during the power-on process of the winding coils, the ring-shaped or C-shaped loop may generate a magnetic field, and magnetic force lines of the magnetic field diffuse to the position of the sensor, so that the magnetic field disturbance is generated to the sensor. On the other hand, the leading-out end of the winding coil of the magnetic suspension stator needs to be led out of the machine shell through the patch cord to be electrically connected with the control system, and when the patch cord passes through the wire outlet window of the machine shell, electromagnetic fields generated by the patch cord due to stray and the like can interfere with a signal circuit board and a signal transmission line of the sensor system.
In order to solve the technical problems, the invention provides a double-twisted wire magnetic suspension motor, wherein two ends of a single winding coil or two ends of a phase coil group of a magnetic suspension stator are led out to a first area through double-twisted patch cords, and the first area is configured to not generate magnetic field interference to a sensor system or generate magnetic field interference to the sensor system within an anti-magnetic field interference threshold value of the magnetic suspension motor, so that the problem that the sensor system of the magnetic suspension motor is interfered by a winding coil wiring structure is solved, the detection precision of the sensor system can be improved, and the operation reliability of the magnetic suspension motor is ensured.
The invention does not limit the winding structure of the magnetic suspension motor, and can be a single winding structure or a double winding structure, namely, at least one winding coil is arranged on each stator tooth. In one embodiment, one winding coil is provided on each stator tooth, the winding coil is a concentrated winding, and the winding coil is used for both rotation control and levitation control to form a single winding structure of the magnetic levitation motor. In another embodiment, two winding coils are arranged on each stator tooth, wherein the two winding coils can be centralized windings, one winding coil can be centralized windings, the other winding coil is distributed windings, the two winding coils on the stator tooth are overlapped, one winding coil is used for rotation control, and the other winding coil is used for suspension control, so that a double-winding structure of the magnetic suspension motor is formed. Because the single-winding magnetic suspension motor only uses one set of winding coil, the rotation and suspension of the motor rotor can be realized at the same time, and the motor rotor has better performance advantage compared with the double-winding magnetic suspension motor.
Referring to fig. 1 and 2, in an embodiment of a single-winding magnetic levitation motor with twisted wires, the single-winding magnetic levitation motor includes a housing 1, a magnetic levitation stator 2 and a sensor system, the magnetic levitation stator 2 includes a plurality of stator teeth 21 and a plurality of winding coils 22, at least one winding coil 22 is disposed on each stator tooth 21, the magnetic levitation stator 2 and the sensor system are all disposed in the housing 1, two ends of the single winding coil are connected with first switching wires 221 and 222, preferably, the switching wires are flexible wires, and the flexible wires are composed of a plurality of thin wires and insulating covers. The two first switching lines 221, 222 are twisted in pairs and led out to a first area, and the first area is configured to not generate magnetic field interference to the sensor system or generate magnetic field interference to the sensor system to be within the threshold value of the magnetic field interference resistance.
In this embodiment, two ends of the single winding coil 22 of the magnetic suspension stator 2 are led out to the first area through the twisted pair of first switching wires 221, 222, on the one hand, since the two ends of the winding coil are led out to the first area, and the first area is configured to not generate magnetic field interference to the sensor system or generate magnetic field interference to the sensor system within the threshold of anti-magnetic field interference, when one end of the single winding coil is interconnected together as a common end to form a ring-shaped or C-shaped loop, the magnetic field generated by the ring-shaped or C-shaped loop will not generate magnetic field interference to the sensor system in the casing, including the sensor, the signal circuit board, the signal transmission line, and the like. On the other hand, because the two first transfer lines of the twisted pair belong to the current input and the current output of the same winding coil, the current directions transmitted in the two first transfer lines are always opposite, and according to the characteristics of the opposite current transmitted by the twisted pair, the magnetic fields of the twisted pair transmitting the current in opposite directions can be approximately offset each other, so that each winding coil cannot generate magnetic field interference on a sensor system (such as a sensor, a signal circuit board and a signal transmission line) in a path led out of a machine shell through the transfer line, the detection precision of the sensor system can be improved, and the operation reliability of the magnetic suspension motor is ensured.
The invention is not limited to the number of winding coils, which is generally the same as the number of magnetic levitation stators. The magnetic suspension stator can be provided with 2N+2 stator teeth, N is a non-zero natural number, each stator tooth of the magnetic suspension stator is provided with a winding coil, and the leading-out ends of the winding coils are respectively connected to the power amplifying circuit; the power amplification circuit configures a superposition current to each winding coil, the superposition current comprises a levitation current component for levitation control and a rotation current component for rotation control, the levitation current component of each winding coil is configured to construct a Ps pole levitation magnetic field, the rotation current component of each winding coil is configured to construct a Pt pole rotation magnetic field, wherein Ps is the pole number of the levitation magnetic field, pt is the pole number of the rotation magnetic field, and ps=pt+2 or ps=pt-2 is satisfied, and the levitation magnetic field and the rotation magnetic field are mutually superposed to generate a radial levitation force for controlling the magnetic levitation rotor. For ease of illustration, n=3 is illustrated in fig. 1, 3 and 4, i.e. the magnetic levitation stator has 8 stator teeth and 8 winding coils. The arrangement mode of the 8 winding coils is only an example, the first transfer wires connected at two ends of the 8 winding coils are twisted in pairs and then are also an example, the arrangement mode does not represent the actual arrangement of the winding coils in the magnetic levitation motor, in an actual product, after the first transfer wires connected at two ends of each winding coil are twisted in pairs, the wires are routed in a preset space gap in a machine shell, and preferably, 8 groups of the first transfer wires of the 8 winding coils are concentrated together.
The invention does not limit the stator structure of the magnetic suspension motor, and the stator structure can be a linear stator tooth structure or an L-shaped stator tooth structure, and the arrangement of winding coils is matched with the structural form of the stator teeth. Referring to fig. 2, to form a magnetic field loop, the magnetic suspension stator 2 generally further includes a magnetic loop 24 connected to the plurality of stator teeth 21, and in one embodiment, the magnetic loop is connected to the outer ends of the plurality of in-line stator teeth, and the winding coil is horizontally sleeved on the corresponding stator teeth to form a magnetic suspension motor with in-line stator tooth structure. In another embodiment, referring to fig. 2, the magnetic conducting loop 24 is connected to the longitudinal arms of the plurality of L-shaped stator teeth 21, and the winding coil 22 is sleeved on the longitudinal arms of the L-shaped stator teeth 21 to form a magnetic suspension motor with an L-shaped stator tooth structure. The magnetic levitation stator exerts on the one hand a rotation on the rotor, thus achieving its rotation about the desired axis of rotation, and on the other hand a levitation force, which is exerted on the rotor, so that its radial position can be actively controlled or adjusted. The magnetic levitation stator can thus actively adjust the three degrees of freedom of the rotor, namely its rotation and its radial position (two degrees of freedom). The other three degrees of freedom, namely its position in the axial direction and its inclination (two degrees of freedom) with respect to a radial plane perpendicular to the desired axis of rotation, the rotor is passively magnetically levitated or stabilized by detent forces.
In this embodiment, the first region is defined as not generating magnetic field interference to the sensor or generating magnetic field interference to the sensor within its anti-magnetic field interference threshold, and the first region may be inside the housing or may be outside the housing.
In one embodiment, as shown in fig. 1,2 and 3, the first region is disposed outside the housing, such that, because the first region is outside the housing and the sensor system is inside the housing, it is only necessary to ensure that the first switching wire of the winding coil does not interfere with the magnetic field of the sensor system during the extraction process. In this embodiment, two ends of each winding coil are led out of the casing through two twisted pair first switching wires, and the two twisted pair first switching wires can not generate magnetic field interference to the sensor system due to mutual cancellation of magnetic fields.
The winding coils of the single-winding magnetic suspension motor can be independently controlled, and also can be controlled by common-end interconnection wiring. In one embodiment, referring to fig. 3, the magnetic levitation motor is a single winding structure, and the two first switching lines 221,222 of each winding coil 22 twisted in pairs are connected to a power amplification circuit after exiting the housing or within the housing, where the power amplification circuit is a full bridge power topology. The full-bridge power topological structure is also called an H-bridge power topological structure and consists of a plurality of H-bridge power amplifiers, each winding coil corresponds to one H-bridge power amplifier, and two ends of each winding coil are led out of the shell through a first switching wire or are connected with the output of the midpoints of two bridge arms of the corresponding H-bridge power amplifier in the shell. Thus, the H-bridge power amplifier is connected as a drive circuit to the winding coil.
In another embodiment, referring to fig. 1 and 2, the magnetic levitation motor is of a single winding structure, each stator tooth 21 is provided with one winding coil 22, one of two ends of the winding coil 22 is a common end, the other end is a leading-out end, one first switching wire 221 is connected to the common end, the other first switching wire 222 is connected to the leading-out end, the plurality of first switching wires 221 connected to the common ends of the plurality of winding coils 22 are interconnected together to form a common end interconnection structure, the plurality of first switching wires 222 connected to the leading-out ends of the plurality of winding coils 22 are connected to a power amplifying circuit, and the power amplifying circuit is of a half bridge power topology structure. The half-bridge power topological structure consists of a plurality of half-bridge power amplifiers, each winding coil corresponds to one half-bridge power amplifier, and the leading-out end of each winding coil is led out of the shell through a first transfer wire and then is connected with the output of the middle point of the bridge arm of the corresponding half-bridge power amplifier. Thus, the half-bridge power amplifier is connected as a drive circuit to the winding coil. Compared with an independently controlled single-winding magnetic suspension motor, the single-winding magnetic suspension motor with the common end connected with the interconnection can reduce the use of half of power devices, and has the advantages of simple hardware structure and lower product cost.
In another embodiment, referring to fig. 4 and 5, the first region is disposed in the housing, which is exemplified by a single-winding magnetic levitation motor of an L-shaped stator tooth structure in this embodiment, but is not limited thereto, wherein the magnetic levitation stator 2 includes a plurality of stator teeth 21 and a plurality of winding coils 22, each stator tooth 21 including a longitudinal arm extending from a first end to a second end in an axial direction and a transverse arm connected to the second end of the longitudinal arm and lying in a radial plane, the transverse arm extending in a radial direction perpendicular to the axial direction; wherein the longitudinal and transverse arms are referenced to the orientation shown in fig. 5. The magnetic levitation stator 2 further includes a magnetically conductive loop 24, and the plurality of stator teeth 21 are each coupled to the magnetically conductive loop 24. A winding coil 22 is provided on the longitudinal arm of each stator tooth 21, one of the two ends of the winding coil 22 being a common end and the other end being a lead-out end. Wherein the single winding magnetic levitation motor further comprises a sensor system comprising a plurality of sensors 3, the sensors 3 being arranged towards a rotor cavity 25 defined by the transverse arms of the plurality of stator teeth 21, the rotor cavity 25 being arranged near the top end of the housing, the first region being arranged at the outlet window 11 in the housing 1. The outlet window 11 may be provided at the bottom end of the cabinet 1 or at the side middle of the cabinet or at a position near the bottom end of the cabinet. In this embodiment, the outlet window is disposed on a side surface of the casing. The plurality of first switching wires 221 connected at the common terminal of the plurality of winding coils 22 are interconnected together to form a common terminal interconnection structure provided at the outlet window 11. Therefore, the common end interconnection structure is arranged at the outlet window 11, the common end and the leading-out end of the winding coil 22 can be connected with the first switching wire, the function of canceling the magnetic field is realized by means of the characteristics of the two twisted pairs, and the distance between the common end interconnection structure and the sensor near the arranged rotor cavity can be enlarged, so that the interference of the magnetic field generated by the common end interconnection structure on the sensor is eliminated.
In one embodiment, the signal circuit board 5 of the sensor system is disposed at the outlet window 11, the signal circuit board 5 is used for receiving the detection signal of the sensor 3 and processing the feedback to the control system, the sensor 3 and the signal circuit board 5 are electrically connected through a signal transmission line, and the signal circuit board is led out of the casing 1 through the signal transmission line. The position data of the rotor can be detected in real time through the signal circuit board 5 to serve as feedback quantity, the control system of the magnetic levitation motor calculates and obtains a control instruction according to the position data of the rotor, and after the control instruction is transmitted to the power amplifier, levitation and rotation control currents are generated, active levitation force in corresponding directions and sizes is provided, and real-time and accurate closed-loop control of the position of the rotor is achieved. In order to reduce the interference of the magnetic field generated by the common terminal interconnection structure arranged at the outlet window on the signal circuit board and the signal transmission line of the sensor system, preferably, referring to fig. 5, a magnet isolation body 4 for shielding the magnetic field generated by the common terminal interconnection structure is arranged at the outlet window 11. In this way, by means of the magnetic conduction and magnetic concentration function of the isolating body 4, the magnetic field generated by the common terminal interconnection structure can be isolated, so that the interference of the magnetic field on the sensor system can be eliminated.
The material of the magnetism isolating body is not limited, and the magnetism isolating body can be made of soft magnetic materials with low coercive force and high magnetic permeability. Preferably, the soft magnetic material may be a ferromagnetic or ferrimagnetic material, such as iron, nickel-iron alloy, cobalt-iron alloy, silicon-iron alloy, ferrite, nanocrystalline, etc.
The shape of the barrier is not limited as long as the common terminal interconnection structure can be shielded.
In this embodiment, the wire outlet window is disposed on a side surface of the casing, and the plurality of first switching wires connected to the common ends of the plurality of winding coils are interconnected together to form a common end interconnection structure, and the common end interconnection structure is disposed at the wire outlet window. In other embodiments, the first area may be configured as an exterior of the casing, the common terminal interconnection structure is disposed on the exterior of the casing, and the signal circuit board of the sensor system is disposed at the outlet window, where, referring to fig. 2, two first twisted pairs of wires 221,222 connected to two ends of the winding coil 22 may be led out of the exterior of the casing 1 from the outlet window 11. Since the two first transfer lines are twisted pairs of wires, no interference is generated to the signal circuit board and the signal transmission line of the sensor system.
In the above embodiments, the common terminal interconnection structure is used to implement interconnection of the common terminals of the winding coils, and the common terminal interconnection structure may directly connect the common terminals of the winding coils together, or indirectly connect the common terminals of the winding coils together through other carriers. Preferably, the common terminal interconnection structure is configured as the first electrical conductor 23, as shown in fig. 1, or the common terminal interconnection structure is configured as an interconnection circuit board 23 with interconnection lines, as shown in fig. 5, and the common terminals of the plurality of winding coils are electrically connected to the first electrical conductor or the interconnection lines of the interconnection circuit board through a corresponding plurality of first switching lines.
In the above embodiments, the implementation manner that the magnetic suspension motor with the twisted pair wire is of a single winding structure is described, and the magnetic suspension motor with the twisted pair wire can also be of a double winding structure. The magnetic levitation motor of the double winding structure has the same or similar features and effects as those of the magnetic levitation motor of the single winding structure, and thus has the same reference numerals, for example, referring to fig. 6, the magnetic levitation motor includes a housing 1, a magnetic levitation stator 2 and a sensor system, the magnetic levitation stator 2 includes a plurality of stator teeth 21 and a plurality of winding coils 22, the magnetic levitation stator 2 and the sensor system are all disposed in the housing 1, etc., and the description of the same or similar features as those of the magnetic levitation motor of the single winding structure is cited in this embodiment, and the description of the features different from those of the magnetic levitation motor of the single winding structure is not repeated herein.
In contrast to the magnetic levitation motor of the single winding structure, referring to fig. 6, each L-shaped stator tooth of the magnetic levitation motor of the double winding structure is provided with a winding coil 2201 for being configured to generate an unbalanced field and a winding coil 2202 for being configured to generate a balanced field. The unbalanced field may be a rotating magnetic field for rotation drive control or a levitation magnetic field for levitation control, and the balanced field may be a rotating magnetic field for rotation drive control or a levitation magnetic field for levitation control. The basic principle of the P+2 or P-2 magnetic levitation motor is satisfied between the unbalanced field and the balanced field or between the rotating magnetic field and the levitation magnetic field. That is, the balanced field is used to construct a balanced magnetic field, and when the unbalanced field is superimposed on the balanced field, the symmetrical distribution of the original magnetic field is broken, for example, after the magnetic field is superimposed, the magnetic field on one side is weakened, and the magnetic pole on the opposite side is strengthened, so that the radial levitation force for controlling the magnetic levitation rotor is generated. For the magnetic suspension motor with a double-winding structure, the structure of the invention is mainly characterized in that two free ends of a phase coil group formed by sequentially connecting at least two winding coils in series are connected with a first switching wire, and the two first switching wires are led out to a first area after being twisted in pairs. The phase coil group is defined as a plurality of winding coils with the same phase sequence in 2N+2 winding coils corresponding to 2N+2 stator teeth, and currents with the same phase sequence are serially connected in sequence.
In one embodiment, referring to fig. 7, taking a magnetic levitation motor with a double-winding structure of n=1, 6 in-line stator teeth as an example, a group of 6 winding coils 2201 corresponding to two groups of 2201,2202,6 stator teeth 21 is provided on each stator tooth, and 3 phase currents are fed into each group of 6 winding coils, each phase is composed of two winding coils connected in series, which is called a phase coil group, and the 6 winding coils are composed of 3 phase coil groups. The phase coil group is similar to a single winding coil, because the two first transfer lines of the double-twisted pair belong to the current input and the current output of the same phase coil group, the directions of the currents transmitted in the two first transfer lines are always opposite, and the magnetic fields of the twisted pair wires for transmitting the currents in opposite directions can be approximately offset each other according to the characteristics of the opposite currents transmitted by the twisted pair wires, so that the 3 phase coil groups can not generate magnetic field interference on a sensor system (such as a sensor, a signal circuit board and a signal transmission line) in a path led out of a machine shell through the transfer lines, thereby improving the detection precision of the sensor system and ensuring the operation reliability of the magnetic suspension motor.
In one embodiment, the plurality of winding coils configured to generate the balanced field or/and the plurality of winding coils configured to generate the unbalanced field are divided into a plurality of phase coil groups, each phase coil group comprises at least two winding coils, two adjacent winding coils in the at least two winding coils are connected in series through a second patch cord, and a first patch cord of one winding coil at the outermost side is twisted with the second patch cord in pair and then is twisted with a first patch cord of another winding coil at the outermost side in pair. For ease of illustration, referring to fig. 8 and 9, a double-winding magnetic levitation motor with 6 in-line stator teeth is still exemplified, wherein 6 winding coils configured to generate a balanced field are designated for rotation drive control, we refer to as rotating windings; the 6 winding coils configured to generate the unbalanced field are designated for levitation control, we call levitation windings. Referring to fig. 8, the 6 rotary windings are divided into 3 phase coil groups, each of which includes two rotary windings 2201',2202', and the two rotary windings 2201',2202' are connected in series through a second patch cord 223 (broken line), and a first patch cord 221 'of one winding coil 2201' is twisted with the second patch cord 223 and then twisted with a first patch cord 222 'of the other winding coil 2202'. Also, referring to fig. 9, 6 levitation windings are divided into 3 phase coil groups, each phase coil group includes two levitation windings 2203',2204', and the two levitation windings 2203',2204' are connected in series through a second patch cord 223, and a first patch cord 221 'of one winding coil 2203' is twisted with the second patch cord 223 and then twisted with a first patch cord 222 'of the other winding coil 2204'. In this way, the magnetic field generated by the patch cords arranged between the two winding coils can be eliminated by the first patch cord 221' and the second patch cord 223 in a twisted pair, so that the interference to the sensor system is eliminated, and the two first patch cords 221',222' are not interfered with the sensor system after being twisted again and led out of the casing.
According to the basic principle of the p+2 or P-2 type magnetic levitation motor, in the above embodiment, the number of poles Pt of the rotating magnetic field generated by the 6 rotating windings and the number of poles Ps of the levitating magnetic field generated by the 6 levitating windings need to satisfy: ps=pt+2 or ps=pt-2. This defines the arrangement of 6 rotating windings on 6 corresponding stator teeth. In one embodiment, referring to fig. 8, two rotating windings 2201' in one phase coil set are symmetrically arranged along the radial direction of the magnetic levitation stator, and the winding pattern of one rotating winding 2201' is the same as the winding pattern of the other rotating winding 2202 '. Thus, when the phase current supplied to one rotating winding 2201' reaches a positive maximum value, the stator teeth 21 surrounded by the rotating winding are magnetic north poles N; since the other rotary winding 2202' of the phase is wound in the same manner as the rotary winding 2201', the stator teeth 21 surrounded by the other rotary winding 2202' are also magnetic north poles N. The winding mode is defined as the same current-in mode of the two rotary windings with respect to the stator teeth 21 in the circumferential direction, and referring to fig. 8, the currents Ia (first phase) of the two rotary windings 2201',2202' all enter from one side of the stator teeth 21 in the clockwise direction. Thus, the magnetic flux generated by the phase coil group flows out from the two magnetic north poles, passes through the air gap between the rotor 6 and the stator teeth 21, then passes through the air gap between the rotor 6 and the other four stator teeth 21, then passes through the magnetic conduction loop 24, and returns to the magnetic south poles of the stator teeth of the phase coil group, so that the four stator teeth corresponding to the other four rotating windings are represented as magnetic south poles, that is, the two stator teeth 21 corresponding to the phase coil group of the first phase are represented as magnetic north poles, the four stator teeth corresponding to the phase coil group of the second phase and the phase coil group of the third phase are represented as magnetic south poles, and since the four magnetic south poles are induced by the two magnetic north poles, the magnetic field strength is weaker than the two magnetic north poles, and therefore, the total four magnetic poles change from the whole periphery of the rotor, which means that the generated magnetic field is quadrupole (pt=4). Meanwhile, two levitation windings 2203',2204' in one phase coil group are symmetrically arranged along the radial direction of the magnetic levitation stator, and the winding mode of one levitation winding 2203 'is opposite to the winding mode of the other levitation winding 2204'. Thus, when the phase current flowing through one levitation winding 2203 'reaches a positive maximum value, the stator tooth 21 surrounded by the levitation winding 2203' is a magnetic north pole N; since the other levitation winding 2204' of the phase is wound in the opposite manner as the levitation winding 2203', the stator tooth 21 surrounded by the other levitation winding 2204' is magnetic south pole S. The winding mode is defined as the opposite current-feeding mode of the two levitation windings 2203',2204' with respect to the stator tooth 21 along the circumferential direction, and referring to fig. 9, the currents Iu of the two levitation windings 2203',2204' enter from one side of the stator tooth 21 in the clockwise direction and enter from the other side of the stator tooth 21 in the counterclockwise direction. Thus, the magnetic flux generated by one stator tooth of the phase coil group flows out from the magnetic north pole N, passes through the air gap between the rotor 6 and the stator tooth 21, then passes through the air gap between the rotor 6 and the adjacent 2 stator teeth 21, then passes through the adjacent 2 stator teeth 21, and then returns to the magnetic south pole of the stator tooth 21 through the magnetic conduction loop 24, and the adjacent 2 stator teeth 21 are represented as magnetic south poles S. Based on the same principle, the magnetic flux generated by the other stator tooth 21 of the phase coil group flows from the magnetic south pole, and the adjacent 2 stator teeth 21 exhibit magnetic north poles N. That is, one of the two stator teeth 21 corresponding to the phase coil group of the first phase appears as a magnetic north pole N, the other one appears as a magnetic south pole S, and the four stator teeth corresponding to the phase coil group of the second phase and the phase coil group of the third phase appear as two magnetic south poles S and two magnetic north poles N, and since the two magnetic south poles S and the two magnetic north poles N are induced, the magnetic field strength is relatively weak, and thus, there are 2 pole changes in total from the entire periphery of the rotor, which means that the generated magnetic field is 2 poles (ps=2). For clarity, only the twisted pair line pattern of the phase coil sets of the first phase is illustrated in fig. 8 and 9, and the twisted pair line pattern of the phase coil sets of the second phase is the same as the twisted pair line pattern of the phase coil sets of the third phase and the phase coil sets of the first phase, and preferably, the line positions of the phase coil sets of each phase on the housing are the same.
In the above embodiment, the winding coils of the same phase coil set are connected through the second patch cord to achieve serial connection in sequence, and in another embodiment, the winding coils of the same phase coil set may be led out through the first patch cord 221 and then serially connected in sequence. At this time, the plurality of winding coils configured to generate the balance field or/and the plurality of winding coils configured to not generate the balance field are divided into a plurality of phase coil sets, each phase coil set comprises at least two winding coils, and each winding coil of the at least two winding coils is led out to a first area through two first transfer lines of twisted pairs and then sequentially connected in series. For ease of explanation, referring to fig. 10, a double-winding magnetic levitation motor of 6 in-line stator teeth is exemplified, in which 6 winding coils configured to generate a balanced field are designated for rotation driving control, we refer to as rotating windings; the 6 winding coils configured to generate the unbalanced field are designated for levitation control, we call levitation windings. The 6 rotating windings are divided into 3 phase coil sets, each phase coil set comprises two rotating windings 2201,2202, and each rotating winding in the two rotating windings is led out to a first area through two first rotating wires 221,222 which are twisted in pairs and then connected in series. The phase coil sets have the same meaning as the phase coil sets in the above embodiments, but different embodiments are named differently. For clarity of illustration, only the twisted pair wire pattern of the phase coil sets of the first phase is illustrated in fig. 10, with the phase coil sets of the second phase being identical to the phase coil sets of the third phase and the twisted pair wire pattern of the phase coil sets of the first phase. The preferred phase coil sets of each phase have the same positions of outgoing lines on the housing. Similarly, the 6 levitation windings are divided into 3 phase coil sets, each phase coil set comprises two levitation windings, and each levitation winding in the two levitation windings is led out to a first area through two first twisting wires which are twisted in pairs and then sequentially connected in series. Therefore, the magnetic field generated by the fact that the switching wire is arranged between the two winding coils independently can be eliminated through the two first switching wire twisted pairs, so that interference to a sensor system is eliminated, the two first switching wire twisted pairs are led out of the casing and then are connected in series, and interference to the sensor system is avoided.
In the magnetic levitation motor of the double winding structure in the above-described embodiment, the rotating winding for rotation driving control and the levitation winding for levitation control share the same stator tooth (stator core), but not limited thereto, in another type of magnetic levitation motor, the rotating winding and the levitation winding may not share the same stator tooth.
Referring to fig. 11, 12 and 13, a magnetic levitation motor includes a sensor mount 1, a magnetic levitation stator 2' and a rotor, the magnetic levitation stator 2' including a plurality of stator teeth and a plurality of winding coils, the magnetic levitation stator 2' further including a permanent magnet stator body 20', a first magnetic stator substrate 241' and a second magnetic stator substrate 242', the permanent magnet stator body 20' being sandwiched between the first magnetic stator substrate 24' and the second magnetic stator substrate 242' in an axial direction, the plurality of stator teeth including a plurality of first stator teeth 211' and a plurality of second stator teeth 212', the plurality of first stator teeth 211' being spaced apart from one side of the first magnetic stator substrate 241' facing the rotor, the plurality of second stator teeth 212' being spaced apart from one side of the second magnetic stator substrate 242' facing the rotor; the plurality of winding coils includes a plurality of rotation windings 221 'for rotation driving control and a plurality of levitation windings 222' for levitation control, the first stator teeth 211 'corresponding to the configuration of the rotation windings 221' and the second stator teeth 212 'corresponding to the levitation windings 222'. Thus, the plurality of rotating windings are used for rotation driving control, and the plurality of levitation windings are used for levitation control, i.e. the rotating windings and the levitation windings are respectively provided with one independent stator tooth, and the rotating windings and the corresponding stator teeth are located in different radial planes with the levitation windings and the corresponding stator teeth, i.e. the first stator tooth 211' and the rotating windings 221' define a first radial plane, and the second stator tooth 212' and the levitation windings define a second radial plane. A magnetic field loop is formed between the stator teeth of two different radial planes by the first magnetic stator substrate 241', the permanent magnet stator body 20' and the second magnetic stator substrate 242', wherein the magnetic field direction of the permanent magnet stator body 20' is in the axial direction to provide a static bias magnetic field. Corresponding to this type of magnetic levitation stator 2', the rotor of the magnetic levitation motor comprises a rotor body 60 and a first flange 61 and a second flange 62 protruding from the rotor body towards the magnetic levitation stator, the first flange 61 corresponding to the first stator teeth 211' and the rotating windings 221' of the first magnetic stator substrate 241', the second flange 62 corresponding to the second stator teeth 212' and the levitation windings 222' of the second magnetic stator substrate 242 '. In this embodiment, the second stator teeth 212 'and the levitation windings 222' are configured to generate a levitation magnetic field to actively adjust the rotor position in a radial direction. In other embodiments, a plurality of third stator teeth 213 'may be disposed on the third radial plane, and the third stator teeth 213' are configured with corresponding levitation windings 223', where the third stator teeth 213' and the second stator teeth 212″ have a height difference in the axial direction, and are alternately arranged in the circumferential direction, and the levitation windings 222 'of the second stator teeth 212' and the levitation windings 223 'of the third stator teeth 213' cooperate with the second flange 62 of the rotor, so as to realize a levitation function of actively adjusting the height of the rotor in the axial direction while realizing active radial adjustment of the rotor position. In another embodiment, the rotor further comprises a third flange, the third stator teeth corresponding to the third flange, and the magnetic fields generated by the levitation windings of the second stator tooth arrangement and the levitation windings of the third stator tooth arrangement may act on the corresponding second flange and third flange on the rotor separately. The magnetic field generated by the suspension winding of the second stator tooth acts on the second flange, and the magnetic field generated by the suspension winding of the third stator tooth acts on the third flange, so that the suspension function of adjusting the height of the rotor in the axial direction can be realized while the position of the rotor is actively adjusted in the radial direction. In still another embodiment, the fourth stator teeth 214' may be formed by hollowing out at a position of the first magnetic stator substrate 241' near the first stator teeth 211', and one fourth stator tooth 214' may correspond to a plurality of first stator teeth 211', for example, 4 first stator teeth may be disposed outside one fourth stator tooth. The number of fourth stator teeth 214 'and the number of first stator teeth 211' may be adjusted as desired. The fourth stator teeth 214' may be provided with levitation windings 224', the levitation windings 224' generating a magnetic field acting on the first flange 61 of the rotor, which may enhance the radial levitation function of the rotor.
In this type of magnetic levitation motor, an inner rotor is generally used and is arranged in a ring shape to meet the processing requirements of semiconductor wafers. However, the present invention is not limited thereto, and the rotor may be provided as an outer rotor according to application requirements. For convenience of explanation, an annular inner rotor is taken as an example below to describe how this type of magnetic levitation motor solves the problem that the sensor system is interfered by the wiring structure.
In this type of magnetic levitation motor, the sensor comprises a plurality of axial sensors and a plurality of radial sensors, typically 3 axial sensors and 3 radial sensors are provided. The sensor fixing piece 1 comprises an inner ring body 11, an outer ring body 13 and a connecting plate 12 for connecting the bottom of the inner ring body 11 and the bottom of the outer ring body 13, wherein a U-shaped space for accommodating a rotor is formed between the inner ring body 11 and the outer ring body 13, and the outer ring body 13 is a thin wall and is used for isolating a magnetic suspension stator and the rotor. The 3 radial sensors are circumferentially arranged on the inner ring body 11, and the 3 axial sensors are circumferentially arranged on the connecting plate 12. The rotating winding and the suspension winding of the magnetic suspension stator corresponding to the rotor are close to the rotor and are arranged on the outer side of the outer ring body 13, and if the arrangement of the patch cords connected with the rotating winding and the suspension winding is unreasonable, electromagnetic field interference can be generated on the radial sensor and the axial sensor, in particular the axial sensor.
In order to solve the problem that the sensor of the magnetic levitation motor is interfered by a wiring structure, in the invention, a plurality of rotary windings for rotary driving control and a plurality of levitation windings for levitation control can be connected with a first switching wire at two ends of a single winding coil or at two free ends of a phase coil group formed by sequentially connecting at least two winding coils in series according to the function realization requirement, and the two first switching wires are led out to a first area after being twisted in pairs, so that the interference on a sensor system can be eliminated.
As a preferred embodiment, the plurality of rotary windings 221' are divided into a plurality of phase coil groups, and two first transfer wires connected at both ends of each phase coil group are twisted in pairs and then routed in a space between the first radial plane and the second radial plane. The phase coil group is formed by sequentially connecting a plurality of winding coils in series, and the same current is introduced. The present embodiment is the same concept as the phase coil group of the double-winding magnetic levitation motor. Preferably, the two first switching wires connected at both ends of the levitation windings 222',223',224' are also routed in the space between the first radial plane and the second radial plane after being twisted. In this way, by arranging the twisted pair of first transfer lines reasonably between the first radial plane and the second radial plane, i.e. in the space between the rotating winding and the levitation winding, a better effect of eliminating disturbances to the sensor system can be achieved.
Referring to fig. 13, 3 levitation windings 222' and 3 levitation windings 223' are illustrated, one end of the levitation windings 222' is a common end, the other end is a terminal, two ends of each levitation winding are connected to a first switching wire, and the two first switching wires are twisted in pairs and led out of the sensor fixing member. Wherein, the corresponding first flexible wires of two ends of 3 suspension windings are interconnected together. Likewise, the phase coil groups of the rotary winding can be wired in a similar manner.
Illustratively, the rotor is formed of a magnetic material, examples of which include, but are not limited to, permanent magnet materials or ferromagnetic materials. Still further, for example, the ferromagnetic material is a soft magnetic material having a permeability much greater than the vacuum permeability, examples of which include, but are not limited to, iron, cobalt, nickel and alloys thereof, carbon steel, silicon steel, electrical pure iron. Examples of permanent magnet materials include, but are not limited to, samarium cobalt, neodymium iron boron, ferrite.
According to the embodiment of the invention, based on the same inventive concept, the invention also provides a magnetic levitation device, which comprises the magnetic levitation motor with the twisted wire pair in each embodiment. As shown in fig. 2, 4, 5 and 11, the magnetic levitation motor can be assembled with assemblies with different functions, so that magnetic levitation devices with different application requirements are formed. Preferably, in one embodiment, the magnetic levitation apparatus is configured as a magnetic levitation pump, the magnetic levitation pump further comprising a pump head and a rotor impeller disposed within the pump head, the magnetic levitation stator configured to generate a magnetic field to drive the rotor impeller to rotate and levitate; in another embodiment, the magnetic levitation apparatus is configured as a magnetic levitation stirring device comprising a rotor stirring head, and the magnetic levitation stator is configured to generate a magnetic field to drive the rotor stirring head to rotate and levitate. In yet another embodiment, the magnetic levitation apparatus is configured as a magnetic levitation turntable (wafer turntable), the magnetic levitation turntable further comprising a rotor support table integral with the rotor of the magnetic levitation motor, the magnetic levitation stator configured to generate a magnetic field to drive the rotor support table to rotate and levitate.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.

Claims (18)

1. The utility model provides a magnetic suspension motor of twisted pair line, includes magnetic suspension stator and sensor system, the magnetic suspension stator includes a plurality of stator teeth and a plurality of winding coil, every set up at least one winding coil on the stator tooth, its characterized in that: the two ends of a single winding coil or two free ends of a phase coil group formed by sequentially connecting at least two winding coils in series are connected with a first switching wire, the two switching wires are twisted in pairs and led out to a first area, and the first area is configured to not generate magnetic field interference on the sensor system or generate magnetic field interference on the sensor within an anti-magnetic field interference threshold value.
2. A magnetic levitation motor of twisted pair wire as defined in claim 1, wherein: the magnetic suspension motor is of a single winding structure, each stator tooth is provided with one winding coil, one of the two ends of each winding coil is a common end, the other end of each winding coil is a leading-out end, one first transfer wire is connected with the common end, the other first transfer wire is connected with the leading-out end, and a plurality of first transfer wires connected with the common ends of the winding coils are interconnected together to form a common end interconnection structure.
3. A magnetic levitation motor of twisted pair wire as defined in claim 2, wherein: the public terminal interconnection structure is configured as a first conductor or an interconnection circuit board with interconnection lines, and a plurality of first switching lines are electrically connected with the first conductor or the interconnection lines.
4. A magnetic levitation motor of twisted pair wire as defined in claim 2, wherein: the magnetic suspension motor further comprises a shell, the magnetic suspension stator and the sensor are arranged in the shell, the sensor system comprises a sensor, the sensor is arranged at a position facing a rotor cavity defined by the plurality of stator teeth, the rotor cavity is arranged close to the top end of the shell, the first area is configured to be an outgoing line window in the shell, and the outgoing line window is arranged at the bottom end of the shell or the middle part of the side surface of the shell or the position of the side surface of the shell close to the bottom end.
5. A magnetic levitation motor of twisted pair wire as defined in claim 4, wherein: and a magnet isolating body for shielding a magnetic field generated by the public end interconnection structure is arranged at the outlet window.
6. A magnetic levitation motor of twisted pair wire as defined in claim 2, wherein: the magnetic suspension motor further comprises a shell, the magnetic suspension stator and the sensor system are arranged in the shell, the first area is configured to be the outside of the shell, the sensor system comprises a sensor, the sensor is arranged at a position facing a rotor cavity defined by the plurality of stator teeth, the rotor cavity is arranged close to the top end of the shell, two twisted pairs of first transfer lines are led out of the outside of the shell from an outgoing line window, and the outgoing line window is arranged at the bottom end of the shell or the middle part of the side surface of the shell or the position of the side surface of the shell close to the bottom end.
7. A magnetic levitation motor of twisted pair wire according to any of claims 2-6, characterized in that: the plurality of first transfer lines connected with the leading-out ends of the winding coils are connected to a power amplifying circuit, and the power amplifying circuit is of a half-bridge power topological structure.
8. A magnetic levitation motor of twisted pair wire as defined in claim 1, wherein: the magnetic suspension motor is of a single winding structure, two first switching wires of each winding coil are connected to a power amplifying circuit after being led out, and the power amplifying circuit is of a full-bridge power topological structure.
9. A magnetic levitation motor of twisted pair wire as defined in claim 1, wherein: the magnetic suspension motor is of a double-winding structure, and each stator tooth is provided with a winding coil used for generating an unbalanced field and a winding coil used for generating a balanced field.
10. A magnetic levitation motor of twisted pair wire as defined in claim 9, wherein: the plurality of winding coils configured to generate the balance field or/and the plurality of winding coils configured to not generate the balance field are divided into a plurality of phase coil sets, wherein each phase coil set comprises at least two winding coils, and each winding coil in the at least two winding coils is led out to the first area through two first transfer wires which are twisted in pairs and then sequentially connected in series.
11. A magnetic levitation motor of twisted pair wire as defined in claim 9, wherein: the plurality of winding coils configured to generate a balanced field or/and the plurality of winding coils configured to generate an unbalanced field are divided into a plurality of phase coil groups, the phase coil groups comprise at least two winding coils, two adjacent winding coils in the at least two winding coils are connected in series through a second adapter wire, and a first adapter wire of one winding coil at the outermost side is twisted with the second adapter wire and then twisted with a first adapter wire of the other winding coil at the outermost side.
12. A magnetic levitation motor of twisted pair wire as defined in claim 11, wherein: the plurality of winding coils configured to generate an unbalanced field are divided into 3 phase coil groups, the phase coil groups comprise two winding coils, one end of one winding coil is electrically connected with one end of the other winding coil through the second patch cord, the two winding coils in the phase coil groups are symmetrically arranged along the radial direction of the magnetic suspension stator, and the winding mode of one winding coil is opposite to the winding mode of the other winding coil.
13. A magnetic levitation motor of twisted pair wire as defined in claim 11, wherein: the plurality of winding coils configured to generate a balance field are divided into 3 phase coil groups, each phase coil group comprises two winding coils, one end of one winding coil is electrically connected with one end of the other winding coil through the second patch cord, the two winding coils in the phase coil groups are symmetrically arranged along the radial direction of the magnetic suspension stator, and the winding mode of one winding coil is the same as the winding mode of the other winding coil.
14. The double-twisted wire magnetic levitation motor of claim 1, wherein the plurality of stator teeth comprises a plurality of first stator teeth and a plurality of second stator teeth, the plurality of winding coils comprises a plurality of rotating windings for rotational drive control and a plurality of levitation windings for levitation control, the rotating windings are disposed on the first stator teeth, the levitation windings are disposed on the second stator teeth, the first stator teeth and the rotating windings define a first radial plane, and the second stator teeth and the levitation windings define a second radial plane.
15. A magnetic levitation motor of twisted pair wire according to claim 14, wherein the plurality of the rotating winding components are a plurality of the phase coil groups, and two of the first rotating wires connected at both ends of each phase coil group are twisted pair and routed in a space between the first radial plane and the second radial plane.
16. A magnetic levitation motor of twisted pair wire according to claim 14, wherein the two first switching wires connected at both ends of the levitation winding are twisted pair and routed in a space between the first radial plane and the second radial plane.
17. A magnetic levitation apparatus comprising a magnetic levitation motor of twisted pair wire as defined in any of claims 1-16.
18. The magnetic levitation apparatus of claim 17, wherein the magnetic levitation apparatus is configured as a magnetic levitation pump further comprising a pump head and a rotor impeller disposed within the pump head, the magnetic levitation stator configured to generate a magnetic field to drive the rotor impeller to rotate and levitate; or the magnetic suspension device is configured as a magnetic suspension stirring device, the magnetic suspension stirring device comprises a rotor stirring head, and the magnetic suspension stator is configured to generate a magnetic field to drive the rotor stirring head to rotate and suspend; alternatively, the magnetic levitation apparatus is configured as a magnetic levitation turntable further comprising a rotor support table, the magnetic levitation stator being configured to generate a magnetic field to drive the rotor support table to rotate and levitate.
CN202310492782.4A 2023-05-05 2023-05-05 Magnetic suspension motor and magnetic suspension equipment of twisted pair outgoing line Active CN116207927B (en)

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CN1658344A (en) * 2005-03-10 2005-08-24 上海Mwb互感器有限公司 Low-power electronic current mutual inductor
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