CN116207016A - Vertical quartz furnace tube and processing technology thereof - Google Patents
Vertical quartz furnace tube and processing technology thereof Download PDFInfo
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- CN116207016A CN116207016A CN202310284132.0A CN202310284132A CN116207016A CN 116207016 A CN116207016 A CN 116207016A CN 202310284132 A CN202310284132 A CN 202310284132A CN 116207016 A CN116207016 A CN 116207016A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
- F27B1/005—Shaft or like vertical or substantially vertical furnaces wherein no smelting of the charge occurs, e.g. calcining or sintering furnaces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
- F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
- F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
- F27B1/20—Arrangements of devices for charging
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a vertical quartz furnace tube and processing technology thereof belongs to the technical field of furnace tube equipment, a vertical quartz furnace tube includes the body, body one end is sealed and fixedly connected with and the coupling pipe of body intercommunication, and the body is kept away from the one end of coupling pipe is installed the vacuum pump, the vacuum pump is close to the one end of body and is installed the third flange, the vacuum pump with the body can dismantle the connection through the third flange, and the body is close to the one end of vacuum pump and is equipped with the mobile mechanism who is used for installing the wafer boat, mobile mechanism is including setting up at the body tip and to the casing that extends to the direction of keeping away from the body, the one end that the casing is close to the body and body lateral wall butt, just the casing outside is equipped with the fixed subassembly of connecting pipe body, the one end that the body was kept away from to the casing is equipped with the drive wafer boat to be close to the installation subassembly that the inside direction of body was removed. The wafer boat mounting device has the advantages that the wafer boat is convenient to mount in the furnace tube quickly, and the mounting efficiency is improved.
Description
Technical Field
The application relates to the technical field of furnace tube equipment, in particular to a vertical quartz furnace tube and a processing technology thereof.
Background
In the semiconductor heat treatment process, the vertical furnace has the advantages of small occupied area, high treatment efficiency and the like, and is widely applied. Vertical furnaces typically employ vertical boats as carriers for transporting and processing wafers or chips. The furnace tube and the wafer boat are usually made of quartz or silicon carbide materials, and are suitable for heat treatment processes in different temperature areas.
Chinese patent publication No. CN114709134a discloses a semiconductor heat treatment method using a vertical furnace tube and a vertical furnace tube, the semiconductor heat treatment method using a vertical furnace tube comprising: placing a wafer and a baffle in a wafer boat of a vertical furnace tube, wherein the baffle is positioned above and below the wafer; the inlet disc bearing bracket below the wafer boat is internally provided with inlet discs in a staggered manner, and the vertical furnace tube comprises: the wafer boat is internally provided with a wafer and a baffle, and the baffle is positioned above and below the wafer; the inlet disk bearing support is arranged below the wafer boat and internally provided with inlet disks which are arranged in a staggered manner, so that the technical problem of uneven film thickness of semiconductor products is solved, and the product yield is improved.
In the related art, when the wafer boat is installed in the furnace tube, the wafer boat is pushed into the furnace tube after the axis in the vertical direction of the wafer boat is completely aligned with the axis in the vertical direction of the furnace tube, so that a large amount of time is consumed in the process of pushing the wafer boat into the furnace tube, and the working efficiency is affected.
Disclosure of Invention
In order to facilitate rapid installation of the wafer boat in the furnace tube and improve the installation efficiency, the application provides a vertical quartz furnace tube and a processing technology thereof.
In a first aspect, the present application provides a vertical quartz furnace tube, which adopts the following technical scheme:
the utility model provides a vertical quartz furnace tube, includes the body, body one end sealed and fixedly connected with the coupling pipe of body intercommunication, the body is kept away from the one end of coupling pipe is installed the vacuum pump, the vacuum pump is close to the one end of body is installed the third flange, the vacuum pump with the body passes through the third flange and can dismantle the connection, just the body is close to the one end of vacuum pump is equipped with the mobile mechanism who is used for installing the wafer boat, mobile mechanism is including setting up the body tip and to keeping away from the casing that the direction of body extends, the casing is close to the one end of body with body lateral wall butt, just the casing outside is equipped with the connection the fixed subassembly of body, the casing is kept away from the one end of body is equipped with the drive crystal orientation and is close to the inside direction removal of body installation subassembly of body.
Through adopting above-mentioned technical scheme, when using vertical quartz boiler tube, take down the vacuum pump from the body, and install the casing through fixed subassembly in the body one end of keeping away from sealedly, install the wafer boat in the body through installation component this moment, and take down the casing from the body through installation component, install the vacuum pump on the body through the third flange, the wafer boat is with the last lateral wall butt of third flange on the vacuum pump this moment, with the inside evacuation of body through the vacuum pump, let in and make the gas follow coupling pipe length direction to be close to the unsealed one end of body and remove, thereby be convenient for to the wafer top layer coating film on the wafer boat, installation component makes the wafer boat get into in the body along the axis of rotation of body fast this moment, the possibility of need aligning wafer boat and the axis of rotation of body when reducing the installation wafer boat, improve installation efficiency.
Optionally, the installation component is including setting up the slide rail that the casing both sides just set up relatively, two one side that the slide rail is close to each other all is equipped with same perpendicular to slide rail length direction's tray, the wafer boat is placed on the tray, the equal fixedly connected with of tray both sides peg graft in the slide rail and with slide rail sliding connection's sliding block, just be equipped with the drive on the casing the sliding block is close to the inside driving piece that removes of body.
Through adopting above-mentioned technical scheme, install the in-process in the body with the wafer boat, place the wafer boat in the tray upside, the tray supports the wafer boat this moment, and the driving piece drives the sliding block and drives the tray and remove to the direction that is close to the body, and the wafer boat removes along with the tray this moment until getting into in the body, and the slide rail is spacing to the sliding block this moment to make the wafer boat not contact with the body lateral wall all the time, be convenient for install the wafer boat in the boiler tube fast, improve installation effectiveness.
Optionally, the one end that the sliding block kept away from each other passes the slide rail and with slide rail sliding connection, the driving piece is including rotating the connection the sliding block passes the movable pulley of one end of slide rail, the casing lateral wall is close to the both sides of body one end are all rotated and are connected with the fixed pulley, the casing outside be equipped with the corresponding steel cable of fixed pulley, the steel cable all walk around the fixed pulley and pass corresponding movable pulley and with movable pulley fixed connection, the steel cable is close to fixed pulley one end is all installed the hoist engine, the casing is close to the one end of body is equipped with the promotion boat and gets into the impeller in the body.
Through adopting above-mentioned technical scheme, when the drive sliding block drives the crystal boat and removes to the direction that is close to the body, constantly tighten up the steel cable both ends through the hoist engine, the movable pulley drives the sliding block and removes to the direction that is close to the body along the length direction of slide rail under the drive of steel cable this moment, the slide rail is spacing to the crystal boat this moment, reduce the in-process that the crystal boat removed because of the uneven atress of both sides and the possibility that drops, when the sliding block drive crystal boat remove to the crystal boat upper end insert in the body, the impeller continues to drive the tray and drives the crystal boat and remove, until the crystal boat gets into in the body completely, thereby be convenient for install the crystal boat in the boiler tube fast, improve installation effectiveness.
Optionally, the pushing piece include with fixed pulley correspond the setting and with fixed pulley fixed connection's gear, tray both sides all fixedly connected with the rack that the gear suited, the sliding block be close to the one end of rack is all fixedly connected with butt pole, the rack peg graft on the butt pole and with butt pole sliding connection.
Through adopting above-mentioned technical scheme, when the steel rope drive movable pulley drove the wafer boat to remove to rack upper end and corresponding gear butt and meshing, continue to tighten up the steel rope both ends through the hoist engine, the fixed pulley drives the gear rotation this moment to drive the rack and drive the wafer boat and continue to be close to the inside direction removal of body, until the wafer boat gets into in the body completely, thereby be convenient for install the wafer boat in the boiler tube fast, improve installation effectiveness.
Optionally, the body is close to the one end of casing is equipped with the mounting that is used for fixed wafer boat, the mounting includes the perpendicular to body length direction's solid fixed ring, solid fixed ring is elastic material, gu fixed ring internal diameter with the wafer boat diameter equals, just gu be equipped with on the fixed ring with the connecting piece that the body lateral wall is connected.
Through adopting above-mentioned technical scheme, when steel cable drive gear drive rack rotated, the wafer boat upper end was inserted in the solid fixed ring and is continued to be close to the inside direction removal of body, until solid fixed ring and rack butt and get into the body completely along with the wafer boat under the promotion of rack in, the connecting piece is connected solid fixed ring and body inside wall this moment to fix the wafer boat in the body, further reached and be convenient for install the wafer boat in the boiler tube fast, improve the effect of installation effectiveness.
Optionally, the fixed subassembly includes fixed connection the casing is close to the mount of body one end, the mount both ends are located respectively the body both sides and towards the body sets up, the equal sliding connection in mount both ends has the orientation the clamping rod of body, be equipped with the drive on the mount the clamping rod moves to the direction that is close to each other and will the moving part that the body supported tightly.
Through adopting above-mentioned technical scheme, install the in-process on the body with the casing through the installation component, remove the casing to the direction that is close to the body, until casing upper end and body lower extreme lateral wall contact, the joint pole is located the body both sides this moment, move to the direction that is close to each other through moving part drive joint pole, until the one end that the joint pole is close to each other all supports tightly with the body lateral wall, thereby install the casing on the body, be convenient for install the wafer boat in the body, after the wafer boat installation is accomplished, keep away from each other and take off the casing through moving part drive joint pole, thereby be convenient for the vacuum pump to carry out the evacuation processing to the inside pipe, thereby improve installation effectiveness under the circumstances that does not influence the normal use of body.
Optionally, the moving part is including articulating respectively the first articulated rod of one side that the mount kept away from each other, the one end that the articulated end was kept away from to first articulated rod all inclines to the direction that is close to each other and articulates there is the second articulated rod, the second articulated rod other end all with the clamping rod is close to the lateral wall of body one end is articulated, first articulated rod with the junction of second articulated rod all articulates there is same catch bar, the mount is kept away from one side of catch bar installs the cylinder, the telescopic link of cylinder passes the mount and with catch bar fixed connection.
Through adopting above-mentioned technical scheme, when driving the clamping pole and being close to each other, cylinder drive catch bar removes to the one side that is close to the clamping pole, and the first articulated pole of catch bar both ends drive and the one side that the second articulated pole was articulated each other removes to being close to the clamping pole this moment, and the second articulated pole rotates and slides to the direction drive clamping pole that keeps away from first articulated pole this moment, and the one end that is close to each other until the clamping pole all supports tightly with the body lateral wall to it is fixed with casing and body, further be convenient for install the wafer boat in the boiler tube fast, improve the effect of installation effectiveness.
Optionally, the sealed one end fixedly connected with quartz ring of body, even pipe with quartz ring is fixed and communicates the quartz ring is kept away from the one end fixedly connected with roof of body, the sealed one end of body and with a plurality of evenly distributed's sieve mesh has been seted up in the region opposite of roof.
Through adopting above-mentioned technical scheme, the in-process that gas got into the body, gas got into the quartz ring through the coupling pipe, and gas at this moment was first with the sealed one end contact of body to in the body was got into to the sieve mesh evenly dispersed of sealed one end of body after, thereby be convenient for evenly coating film to the wafer on the wafer boat, improve wafer coating film quality.
In a second aspect, the present application provides a processing technology of a vertical quartz furnace tube, which adopts the following technical scheme:
a processing technology of a vertical quartz furnace tube comprises the following steps:
s1, preprocessing, namely soaking a pipe body, a top plate, a quartz ring and a coupling pipe by nitric acid, and cleaning by pure water;
s2, carrying out line drawing laser drilling on the pipe body processed in the step S1, soaking in nitric acid, and cleaning with pure water;
s3, determining the overall length of the pipe body treated by the S2, and cleaning pure water after annealing by an acid washing machine;
s4, polishing and annealing the top plate, the quartz ring, the coupling pipe and the pipe body treated by the S1, treating the pipe body by an acid washing machine, soaking the pipe body by nitric acid, and cleaning the pipe body by pure water;
s5, performing combination welding, namely fully annealing the top plate and the quartz ring after the treatment of S4, keeping the temperature for one hour, cooling along with a furnace, and cleaning with pure water;
s6, welding the quartz ring and the main pipe body treated in the step S4, filling materials, fully annealing after welding, keeping the temperature for 2 hours, turning a welded junction of a top plate, finely grinding, pickling twice, soaking with nitric acid for the first time, cleaning with pure water, soaking with hydrofluoric acid for the second time, and cleaning with pure water;
s7, polishing the top plate, fully annealing, keeping the temperature for one hour, treating by an acid washing machine, and cleaning by pure water;
s8, welding the coupling pipe, fully annealing, keeping the temperature for one hour, treating by an acid washing machine, and cleaning by pure water;
s9, performing fire polishing twice, fully annealing, and keeping the temperature for one hour;
and S10, abutting the upper end of the moving mechanism on the pipe body processed in the step S9, and detachably connecting the moving mechanism with the pipe body.
By adopting the technical scheme, the quartz ring, the top plate and the coupling pipe are welded on the pipe body, and the moving mechanism is arranged at one end of the pipe body far away from the top plate, so that the wafer boat is conveniently and rapidly arranged in the furnace tube, and the installation efficiency is improved.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the vacuum pump is taken down from the pipe body, the shell is arranged at one end of the pipe body far away from the seal through the fixing component, the wafer boat is arranged in the pipe body through the mounting component, the shell is taken down from the pipe body through the mounting component, the vacuum pump is arranged on the pipe body through the third flange, the wafer boat is abutted with the upper side wall of the third flange on the vacuum pump, the vacuum pump is used for vacuumizing the inside of the pipe body, gas is introduced from the coupling pipe at the moment, and the gas is enabled to move towards the end close to the unsealed end of the pipe body along the length direction of the pipe body, so that the film plating of the wafer surface layer on the wafer boat is facilitated, the mounting component enables the wafer boat to rapidly enter the pipe body along the rotation axis of the pipe body, the possibility that the wafer boat is required to be aligned with the rotation axis of the pipe body when the wafer boat is mounted is reduced, and the mounting efficiency is improved;
2. the two ends of the steel rope are continuously tightened through the winch, at the moment, the movable pulley drives the sliding block to move along the length direction of the sliding rail towards the direction close to the pipe body under the driving of the steel rope, the sliding rail limits the wafer boat, the possibility that the wafer boat falls down due to uneven stress on two sides in the moving process of the wafer boat is reduced, when the sliding block drives the wafer boat to move to the upper end of the wafer boat and is inserted into the pipe body, the pushing piece continues to drive the tray to drive the wafer boat to move until the wafer boat completely enters the pipe body, so that the wafer boat can be conveniently and rapidly installed in the furnace tube, and the installation efficiency is improved;
3. when the drive clamping rod is close to each other, the cylinder drives the push rod to move to the side close to the clamping rod, at the moment, the two ends of the push rod drive the first hinging rod and the second hinging rod to move to the side close to the clamping rod, at the moment, the second hinging rod rotates and drives the clamping rod to slide in the direction away from the first hinging rod until the end close to the clamping rod is abutted against the side wall of the pipe body, so that the shell and the pipe body are fixed, the wafer boat is further conveniently and rapidly installed in the furnace tube, and the installation efficiency is improved.
Drawings
Fig. 1 is a schematic view of the overall structure of a pipe body in an embodiment of the present application.
Fig. 2 is a schematic structural diagram showing a positional relationship between a pipe body and a second flange in an embodiment of the present application.
FIG. 3 is a schematic view of the overall structure of a neutral quartz furnace tube in an embodiment of the present application.
Fig. 4 is a schematic structural diagram showing a positional relationship between a tube body and a moving mechanism in the embodiment of the present application.
Fig. 5 is a schematic structural diagram showing a positional relationship between a wafer boat and a housing in an embodiment of the present application. .
Fig. 6 is a schematic structural diagram showing a positional relationship between a moving mechanism and a wafer boat in the embodiment of the present application.
Fig. 7 is an enlarged view of the structure at a in fig. 4.
Reference numerals illustrate: 1. a wafer boat; 11. a heat-preserving barrel; 2. a tube body; 21. a quartz ring; 22. a top plate; 23. a sieve pore; 24. an air inlet pipe; 241. a first flange; 25. a coupling tube; 26. an air outlet pipe; 27. a second flange; 3. a housing; 31. waist-shaped holes; 4. a fixing assembly; 41. a clamping rod; 411. an abutment groove; 42. a fixing frame; 43. a moving member; 431. a first hinge lever; 432. a second hinge lever; 433. a pushing block; 434. a push rod; 435. a cylinder; 5. a mounting assembly; 51. a slide rail; 52. a tray; 53. a sliding block; 54. a driving member; 541. a movable pulley; 542. a fixed pulley; 543. a steel rope; 55. a support plate; 56. a pushing member; 561. a rack; 562. a gear; 563. a butt joint rod; 5631. a plug-in groove; 57. a fixing member; 571. a fixing ring; 5711. a cavity; 5712. a through hole; 572. a limiting plate; 573. a first spring; 574. a fixing plate; 58. a connecting piece; 581. a connecting rod; 582. a second spring; 583. an extension rod.
Detailed Description
The present application is described in further detail below with reference to the accompanying drawings.
The embodiment of the application discloses a vertical quartz furnace tube. Referring to fig. 1, 2 and 3, a vertical quartz furnace tube comprises a tube body 2 for placing a wafer boat 1, wherein the tube body 2 is vertical and cylindrical, and the lower end of the wafer boat 1 is connected with a heat-preserving barrel 11 through a bolt. The upper end of the tube body 2 is sealed, a quartz ring 21 with the diameter smaller than the inner diameter of the tube body 2 is fixedly connected to the outer side wall of the sealed end of the tube body 2, a top plate 22 for sealing the quartz ring 21 is abutted and fixedly connected to the inner side wall of the end, away from the tube body 2, of the quartz ring 21, and a plurality of evenly distributed sieve holes 23 are formed in the area, opposite to the top plate 22, of the sealed end of the tube body 2.
The outer side wall of the tube body 2 far away from one sealed end is fixedly connected with a horizontal air inlet tube 24, the air inlet tube 24 is not communicated with the inner side wall of the tube body 2, the upper side of the air inlet tube 24 is fixedly connected with two coupling tubes 25 communicated with the inside of the air inlet tube 24, the coupling tubes 25 are vertically arranged, the upper ends of the coupling tubes 25 are bent towards the direction close to the quartz ring 21 and are fixedly connected with the side wall of the quartz ring 21, and the coupling tubes 25 are communicated with the inside of the quartz ring 21. The first flange 241 is installed to the one end that intake pipe 24 kept away from body 2, and the one side that body 2 is close to intake pipe 24 one end and keeps away from intake pipe 24 fixedly connected with the inside intercommunication of body 2 outlet duct 26, and the one end that body 2 was kept away from to outlet duct 26 also installs first flange 241, and control valve (not shown in the figure) is all installed to intake pipe 24 and outlet duct 26 department.
The end of the pipe body 2 close to the air inlet pipe 24 is provided with a vacuum pump (not shown in the figure), the end of the pipe body 2 close to the vacuum pump is provided with a second flange 27 for installing the vacuum pump, the end of the vacuum pump close to the second flange 27 is provided with a third flange (not shown in the figure), and the pipe body 2 and the vacuum pump are mutually fixed in a mode of being fixed with the third flange through bolts of the second flange 27. The inner diameter of the third flange is smaller than that of the second flange 27, and when the wafer boat 1 and the heat preservation barrel 11 are installed in the pipe body 2, the lower end of the heat preservation barrel 11 is abutted with the upper side wall of the third flange.
When the vertical quartz furnace tube is used, the wafer boat 1 and the heat preservation barrel 11 are aligned with the rotation axis of the tube body 2 and move towards the direction close to the interior of the tube body 2 until the wafer boat 1 and the heat preservation barrel 11 completely enter the tube body 2, the lower side of the heat preservation barrel 11 is leveled with the lower side of the second flange 27, the third flange is fixed with the second flange 27 through bolts, the air inlet tube 24 and the air outlet tube 26 are closed through the control valve, the tube body 2 is sealed, the interior of the tube body 2 is vacuumized through the vacuum pump, and gas is introduced into the coupling tube 25 from the air inlet tube 24.
The gas enters the quartz ring 21 through the coupling tube 25 and enters the tube body 2 through the sieve holes 23 at one sealed end of the tube body 2, so that the gas is uniformly dispersed and uniformly deposited on the surface of the wafer on the wafer boat 1 to form a film, the gas in the tube body 2 is discharged from the gas outlet tube 26 along with the continuous entering of the gas into the tube body 2, and the vacuum pump always keeps a low-pressure environment in the tube body 2 until the deposition film of the wafer is completed.
Referring to fig. 3, one end of the tube body 2, which is close to the second flange 27, is provided with a moving mechanism for pushing the wafer boat 1 and the heat insulation barrel 11 into the tube body 2, the moving mechanism comprises a shell 3, the upper end side wall of the shell is in butt joint with the lower side wall of the second flange 27, the upper end of the shell 3 is provided with a fixing component 4 connected with the second flange 27, and one end, which is far away from the second flange 27, of the shell 3 is provided with a mounting component 5 for pushing the wafer boat 1 and the heat insulation barrel 11. The installation component 5 includes two vertical slide rail 51 that set up relatively and fixed connection are on casing 3 lateral wall, and one side that slide rail 51 kept away from casing 3 one end and is close to each other is equipped with same horizontally tray 52, and heat preservation bucket 11 lower extreme and tray 52 contact, and tray 52 both sides all are equipped with two levels and towards slide rail 51's sliding block 53, and sliding block 53 all passes slide rail 51 and with slide rail 51 sliding connection, and be equipped with the drive piece 54 that drive sliding block 53 drove tray 52 upward movement boat 1 and heat preservation bucket 11 on the casing 3. The lower end of the sliding rail 51 is fixedly connected with a supporting plate 55 with the same level, and when the heat preservation barrel 11 is placed on the tray 52, the upper side of the supporting plate 55 is abutted with the tray 52 and supported by the tray 52.
When the vertical quartz furnace tube is used, the vacuum pump is taken down from the tube body 2, the shell 3 is arranged at one end, far away from the seal, of the tube body 2 through the fixing component 4, the wafer boat 1 is placed on the upper side of the tray 52, the tray 52 supports the wafer boat 1, the driving piece 54 drives the sliding block 53 to drive the tray 52 to move towards the direction close to the tube body 2, the wafer boat 1 moves along with the tray 52 until the wafer boat enters the tube body 2, the shell 3 is taken down from the tube body 2 through the mounting component 5, the vacuum pump is arranged on the tube body 2 through the third flange, the wafer boat 1 is abutted with the upper side wall of the third flange on the vacuum pump, the interior of the tube body 2 is vacuumized through the vacuum pump, and gas is introduced from the even tube 25 and moves towards one end close to the shell 3 along the length direction of the tube body 2, so that the wafer surface layer on the wafer boat 1 is conveniently plated with a film.
Referring to fig. 3, 4 and 5, the driving member 54 includes a movable pulley 541 rotatably connected to one side of the tray 52, where the two sliding blocks 53 are located at the same side of the tray 52, and are located at one side of the sliding block 53, where the two sliding blocks are located at one side of the sliding block 52, and are close to each other, and one end of the sliding rail 51, which is located at the other side of the sliding block 51, is located at the other side of the sliding block 542, is inserted into and rotatably connected to a fixed pulley 542, and the fixed pulley 542 is located at one end of the fixed pulley 543, where the other end of the steel rope 543 is located at one side of the fixed pulley 542, and the other end of the steel rope is wound around the fixed pulley 542 and is fixedly connected to the movable pulley 541. A winding machine (not shown) for winding the steel rope 543 is mounted at one end of the steel rope 543 on the side of the fixed pulley 542 away from the sliding rail 51, and a pushing member 56 for pushing the boat 1 and the heat insulation barrel 11 to move continuously in a direction approaching the inside of the pipe body 2 is provided in the casing 3.
When the sliding block 53 is driven to move in the direction close to the pipe body 2, the steel rope 543 is continuously tightened by the winch, at this time, the movable pulley 541 is driven by the steel rope 543 to drive the sliding block 53 to move in the direction close to the pipe body 2 along the length direction of the sliding rail 51, at this time, the sliding rail 51 limits the wafer boat 1, the possibility that the wafer boat 1 falls down due to uneven stress on two sides in the moving process of the wafer boat 1 is reduced, when the sliding block 53 drives the wafer boat 1 to move to the upper end of the wafer boat 1 and is inserted into the pipe body 2, the pushing piece 56 continuously drives the tray 52 to drive the wafer boat 1 to move until the wafer boat 1 completely enters the pipe body 2, and the installation of the wafer boat 1 and the heat preservation barrel 11 is completed.
Referring to fig. 3 and 5, the pushing member 56 includes vertical racks 561 fixedly connected to both sides of the tray 52, the upper ends of the racks 561 are higher than the upper ends of the tray 52, gears 562 engaged with the racks 561 are fixedly connected to one side of the movable pulleys 541, the same vertical supporting rods 563 are fixedly connected to one end of the sliding block 53 located on the same side of the tray 52, which is close to the tray 52, on the supporting rods 563, vertical insertion grooves 5631 with upward openings are formed, and the racks 561 are inserted into the insertion grooves 5631 and are abutted against the supporting rods 563.
When the steel rope 543 drives the movable pulley 541 to drive the wafer boat 1 to move to the upper end of the rack 561 to be abutted against and meshed with the corresponding gear 562, the two ends of the steel rope 543 are continuously tightened through the winch, and at the moment, the fixed pulley 542 drives the gear 562 to rotate, so that the rack 561 is driven to drive the wafer boat 1 to continuously move towards the direction close to the inside of the pipe body 2 until the wafer boat 1 completely enters the pipe body 2, and the installation of the wafer boat 1 and the heat preservation barrel 11 is completed.
Referring to fig. 4 and 6, a fixing member 57 for fixing the boat 1 and the thermal insulation tub 11 in the pipe body 2 is provided in the housing 3, and the fixing member 57 includes a horizontal fixing ring 571 provided inside the housing 3 near one end of the pipe body 2. One side of the shell 3 is provided with a V-shaped limiting plate 572, one end of the limiting plate 572 horizontally passes through the side wall of the shell 3 and is in sliding connection with the side wall of the shell 3, a vertical waist-shaped hole 31 for the other end of the limiting plate 572 to pass through is formed in the shell 3, and the other end of the limiting plate 572 is obliquely arranged and passes through the waist-shaped hole 31 and is in sliding connection with the side wall of the shell 3. The opposite side of the shell 3, which is close to one end of the limiting plate 572, is provided with the limiting plate 572 which is arranged oppositely in the same way, and one side, which is far away from each other, of the limiting plate 572 penetrates through the sliding rail 51 and is fixedly connected with a horizontal first spring 573, and the limiting plate 572 is in sliding connection with the sliding rail 51. The second flange 27 is fixedly connected with a vertical fixing plate 574, the other end of the first spring 573 is fixedly connected with the fixing plate 574, and with reference to fig. 4, 5 and 7, the inside of two sides of the fixing ring 571 is provided with a connecting piece 58 connecting the side walls of the pipe body 2.
When the steel rope 543 drives the gear 562 to drive the rack 561 to rotate, the upper end of the wafer boat 1 is inserted into the fixed ring 571 and continuously moves towards the direction close to the inside of the tube body 2, at the moment, the limiting plate 572 limits the movement of the fixed ring 571, so that the fixed ring 571 is gradually sleeved on the upper end of the heat-preserving barrel 11 in the upward movement process of the wafer boat 1, at the moment, the wafer boat 1 and the heat-preserving barrel 11 continue to move upwards, at the moment, the abutting rods 563 on two sides of the tray 52 squeeze the limiting plate 572 and push the limiting plate 572 to slide towards the direction away from each other until the fixed ring 571 abuts against the rack 561 and completely enters the tube body 2 along with the wafer boat 1 under the pushing of the rack 561, at the moment, the connecting piece 58 connects the fixed ring 571 with the inner side wall of the tube body 2, and accordingly the wafer boat 1 is fixed in the tube body 2, and the installation of the wafer boat 1 and the heat-preserving barrel 11 is completed.
Referring to fig. 4, 5 and 7, the fixing ring 571 is provided with a cavity 5711 on both sides, the connecting piece 58 includes a connecting rod 581 horizontally disposed in the cavity 5711 and hinged to each other, a vertical second spring 582 is fixedly connected to the lower side of the connecting rod 581, a horizontal extension rod 583 is hinged to one end of the connecting rod 581, which is far away from each other, and one end of the extension rod 583, which is far away from each other, passes through the fixing ring 571 and is slidably connected with the side wall of the fixing ring 571. The rack 561 upper end all is equipped with the pointed end, and vertical and with cavity 5711 intercommunication's through-hole 5712 all has been seted up to solid fixed ring 571 both sides, and through-hole 5712 is just right with the articulated one end each other of connecting rod 581, and when the rack 561 pointed end inserted in through-hole 5712, the articulated one end each other of connecting rod 581 moves to the side that is close to body 2, and extension rod 583 moves to the direction that is close to each other until get into solid fixed ring 571 completely.
When the fixed ring 571 is installed on the upper side of the heat preservation barrel 11, the tip on the rack 561 is inserted into the through hole 5712, at this time, the tip on the rack 561 is abutted with one end of the connecting rod 581 hinged with each other and pushes the hinged point to move towards the direction close to the pipe body 2, at this time, one end of the extending rod 583 far away from each other is flat with the side wall of the fixed ring 571, and one inclined end of the limiting plate 572 is abutted with the inclined surface of the upper end of the rack 561, the wafer boat 1 and the heat preservation barrel 11 are continuously moved towards the direction close to the pipe body 2, at this time, the fixed ring 571 continuously moves along with the wafer boat 1 and the heat preservation barrel 11 until entering the pipe body 2, and at this time, the lower side of the heat preservation barrel 11 is flat with the lower side of the second flange 27.
The tray 52 is moved downwards, as the tip of the rack 561 is separated from the through hole 5712, the second spring 582 is deformed again and pulls the connecting rod 581 towards the direction approaching to the shell 3, at this time, the extension rod 583 gradually moves towards the direction away from each other until the extension rod 583 located outside the fixing ring 571 is abutted against the side wall of the pipe body 2, the extension rod 583 located inside the fixing ring 571 is abutted against the side wall of the heat preservation barrel 11, at this time, the shell 3 is unfixed with the second flange 27 through the fixing component 4, and the vacuum pump is mounted on the pipe body 2 through the third flange and the second flange 27, at this time, the lower side wall of the heat preservation barrel 11 is abutted against the third flange, and the mounting of the wafer boat 1 and the heat preservation barrel 11 is completed.
Referring to fig. 3, the fixing assembly 4 includes clamping rods 41 oppositely disposed at two sides of the second flange 27, the outer diameter of the second flange 27 is larger than the outer diameter of the pipe body 2, an abutting slot 411 is formed at one end of the clamping rod 41 close to the second flange 27, and the side wall of the second flange 27 is inserted into the abutting slot and abuts against the clamping rod 41. One end of the shell 3, which is close to the pipe body 2, is fixedly connected with a horizontal fixing frame 42, the fixing frame 42 is positioned on one side of the pipe body 2, which is close to the air outlet pipe 26, and is C-shaped, two ends of the fixing frame 42 are opposite to the clamping rod 41 and are positioned on two sides of the second flange 27, two ends of the fixing frame 42 are bent to form right angles in the direction, which is close to the pipe body 2, one ends, which are far away from each other, of the clamping rod 41 are inserted into the end of the fixing frame 42 and are in sliding connection with the fixing frame 42, and a moving part 43 for driving the clamping rod 41 to move in the direction, which is close to each other, is arranged on the fixing frame 42.
The moving member 43 includes first hinge rods 431 disposed at two ends of the fixed frame 42, wherein one end of each first hinge rod 431 is hinged to the fixed frame 42, the other end of each first hinge rod 431 is inclined in a direction approaching to each other, and an inclined second hinge rod 432 is provided, and one end of each second hinge rod 432 approaching to each other is hinged to the lower side of one end of the clamping rod 41 approaching to the pipe body 2. The ends of the first hinging rod 431 and the second hinging rod 432, which are positioned on the same side of the pipe body 2 and are close to each other, are hinged with the same pushing block 433, the pushing blocks 433 on two sides of the pipe body 2 are respectively penetrated and fixedly connected with the pushing rods 434 with the same level, and two ends of the pushing rods 434 are respectively in butt joint with the side wall of the fixed frame 42 and are in sliding connection. A horizontal air cylinder 435 is arranged in the middle of the side wall of the fixed frame 42 on one side of the push rod 434 away from the pipe body 2, and a telescopic rod of the air cylinder 435 penetrates through the fixed frame 42 and is fixedly connected with the middle of the push rod 434.
When the casing 3 is fixed on the second flange 27, the casing 3 is moved towards the direction approaching the pipe body 2 until the upper end of the casing 3 contacts with the side wall of the lower end of the pipe body 2, the clamping connection rods 41 are positioned at two sides of the pipe body 2, the air cylinders 435 drive the pushing rods 434 to move towards the side approaching the clamping connection rods 41, at the moment, the two ends of the pushing rods 434 drive one end of the first hinging rods 431 and one end of the second hinging rods 432 hinged with each other to move towards the side approaching the clamping connection rods 41, at the moment, the second hinging rods 432 rotate and drive the clamping connection rods 41 to slide towards the direction far from the first hinging rods 431 until the end, approaching each other, of the clamping connection rods 41 are abutted against the side wall of the pipe body 2, and therefore the casing 3 is fixed with the pipe body 2.
The implementation principle of the vertical quartz furnace tube in the embodiment of the application is as follows: when the vertical quartz furnace tube is used, the vacuum pump is taken down from the tube body 2, the shell 3 is arranged at one end of the tube body 2 far away from the seal in a mode that the clamping rod 41 is driven by the air cylinder 435 to abut against the second flange 27, the wafer boat 1 is placed on the upper side of the tray 52, the tray 52 supports the wafer boat 1, the steel rope 543 is continuously tightened by the winch, the movable pulley 541 drives the sliding block 53 to move to the direction close to the tube body 2 along the length direction of the steel rope 543 until the upper end of the rack 561 abuts against and is meshed with the corresponding gear 562, the steel rope 543 is continuously tightened, the tip end on the rack 561 is inserted into the through hole 5712, the inclined end of the limiting plate 572 abuts against the inclined surface of the upper end of the rack 561, the wafer boat 1 and the heat preservation barrel 11 are continuously moved towards the direction close to the tube body 2, and the fixing ring 571 continues to move along with the wafer boat 1 and the heat preservation barrel 11 until the wafer boat 1 enters the tube body 2;
the tray 52 is moved downwards, along with the tip of the rack 561 being separated from the through hole 5712, the extension rod 583 gradually moves in the direction away from each other until the extension rod 583 positioned on the outer side of the fixed ring 571 is abutted against the side wall of the pipe body 2, the extension rod 583 positioned on the inner side of the fixed ring 571 is abutted against the side wall of the heat insulation barrel 11, the shell 3 is removed from the pipe body 2 through the air cylinder 435, the vacuum pump is arranged on the pipe body 2 through the third flange, at the moment, the wafer boat 1 is abutted against the upper side wall of the third flange on the vacuum pump, the inside of the pipe body 2 is vacuumized through the vacuum pump, at the moment, gas is introduced from the coupling pipe 25 and is enabled to move towards one end close to the shell 3 along the length direction of the pipe body 2, and the surface layer coating of the wafer is completed.
The embodiment of the application also discloses a processing technology of the vertical quartz furnace tube. The processing technology of the vertical quartz furnace tube comprises the following steps:
s1, preprocessing, namely soaking a pipe body 2, a top plate 22, a quartz ring 21, a coupling pipe 25, an air inlet pipe 24, an air outlet pipe 26, a first flange 241 and a second flange 27 by nitric acid, then soaking by hydrofluoric acid, and cleaning by pure water;
s2, machining, namely aligning the pipe body 2 and the second flange 27 by adopting a lamplight lathe, and marking the concentricity and the verticality of positioning;
s3, heat treatment, full annealing, constant temperature for one hour, and fine grinding the second flange 27 and the interface of the second flange 27 after furnace cooling;
s4, soaking the pipe body 2 processed in the step S3 in nitric acid, cleaning with pure water, and performing line drawing laser drilling;
s5, soaking the pipe body 2 subjected to the laser drilling treatment in the step S4 in nitric acid, and cleaning with pure water;
s6, determining the whole length of the pipe body 2 processed in the step S5, and cleaning pure water after annealing and acid washing;
s7, polishing and annealing the top plate 22, the quartz ring 21, the coupling pipe 25, the air inlet pipe 24, the air outlet pipe 26, the first flange 241 and the pipe body 2 treated by S6, and cleaning by pure water after being treated by an acid washing machine;
s8, performing combination welding, fully annealing after welding a top plate 22 and a quartz ring 21, keeping the temperature for one hour, cooling along with a furnace, adding hydrofluoric acid for soaking through a pickling machine, and cleaning with pure water;
s9, welding the quartz ring 21 and the main pipe body 2, filling materials, fully annealing after welding, keeping the temperature for one hour, turning a welded junction of the top plate 22, finely grinding, pickling twice, soaking with nitric acid for the first time, cleaning with pure water, soaking with hydrofluoric acid for the second time, and cleaning with pure water;
s10, polishing a top plate 22, fully annealing, keeping the temperature for one hour, treating by an acid washing machine, and cleaning by pure water;
s11, welding a coupling pipe 25, an air inlet pipe 24 and an air outlet pipe 26, fully annealing, keeping the temperature for one hour, treating by an acid washing machine, and cleaning by pure water;
s12, welding a first flange 241 at the air inlet pipe 24 and the air outlet pipe 26, fully annealing, keeping the temperature for one hour, treating by an acid washing machine, and cleaning by pure water;
s13, performing fire polishing twice, fully annealing, and keeping the temperature for one hour;
and S14, abutting the shell 3 with the lower side surface of the second flange 27, extending the telescopic rod of the air cylinder 435, pushing the pushing rod 434 to move towards the side close to the clamping connection rod 41, driving the pushing block 433 by the pushing rod 434 to drive one end of the first hinging rod 431 and one end of the second hinging rod 432 hinged with each other to move towards the side close to the clamping connection rod 41, rotating the second hinging rod 432 and driving the clamping connection rod 41 to slide towards the direction far from the first hinging rod 431 until one end of the clamping connection rod 41 close to each other abuts against the side wall of the pipe body 2, and fixing the shell 3 and the pipe body 2 to finish installation.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (9)
1. The utility model provides a vertical quartz furnace tube which characterized in that: including body (2), body (2) one end sealed and fixedly connected with coupling (25) of body (2) intercommunication, body (2) are kept away from the one end of coupling (25) is installed the vacuum pump, the vacuum pump is close to the one end of body (2) is installed the third flange, the vacuum pump with body (2) can dismantle through the third flange and be connected, just body (2) are close to the one end of vacuum pump is equipped with the mobile mechanism who is used for installing boat (1), mobile mechanism is including setting up body (2) tip and to keeping away from body (2) direction extension's casing (3), casing (3) are close to body (2) one end with body (2) lateral wall butt, just casing (3) outside is equipped with the connection body (2) fixed subassembly (4), body (3) are kept away from body (2) one end is equipped with drive boat (1) is close to body (2) direction of moving toward body (5) the inside installation subassembly.
2. The vertical quartz furnace tube of claim 1, wherein: the mounting assembly (5) comprises sliding rails (51) which are arranged on two sides of the shell (3) and are oppositely arranged, one sides, close to each other, of the sliding rails (51) are respectively provided with a tray (52) which is perpendicular to the length direction of the sliding rails (51), the wafer boat (1) is placed on the trays (52), sliding blocks (53) which are inserted into the sliding rails (51) and are in sliding connection with the sliding rails (51) are fixedly connected on two sides of the trays (52), and driving pieces (54) which are used for driving the sliding blocks (53) to move towards the inner portion of the tube body (2) are arranged on the shell (3).
3. The vertical quartz furnace tube of claim 2, wherein: the utility model discloses a crystal boat is characterized by comprising a sliding block (53), a driving piece (54), a fixed pulley (542), a steel rope (543) corresponding to the fixed pulley (542), a driving piece (54), a hoist and a shell (3), wherein one end of the sliding block (53) is far away from each other, the sliding block (53) passes through the sliding rail (51) and is in sliding connection with the sliding rail (51), the driving piece (54) comprises a movable pulley (541) which is connected with the sliding block (53) in a rotating way, two sides of the outer side wall of the shell (3) close to one end of the tube body (2) are respectively connected with the fixed pulley (542) in a rotating way, the outer side of the shell (3) is provided with the steel rope (543) corresponding to the fixed pulley (542), the steel rope (543) bypasses the fixed pulley (542) and passes through the corresponding movable pulley (541) and is fixedly connected with the movable pulley (541), one end of the steel rope (543) is close to the fixed pulley (542) is provided with the hoist, and one end of the shell (3) close to the tube body (2) is provided with a pushing piece (56) which pushes the crystal boat (1) into the tube body (2).
4. A vertical quartz furnace tube according to claim 3, wherein: the pushing piece (56) comprises a gear (562) which is arranged corresponding to the fixed pulley (542) and fixedly connected with the fixed pulley (542), racks (561) which are matched with the gear (562) are fixedly connected to two sides of the tray (52), a supporting rod (563) is fixedly connected to one end, close to the racks (561), of the sliding block (53), and the racks (561) are inserted on the supporting rod (563) and are in sliding connection with the supporting rod (563).
5. The vertical quartz furnace tube of claim 4, wherein: the utility model discloses a wafer boat, including casing (3), body (2), casing (3) are equipped with the one end that is close to be used for fixing wafer boat (1) mounting (57), mounting (57) are perpendicular to body (2) length direction's solid fixed ring (571), gu fixed ring (571) are elastic material, gu fixed ring (571) internal diameter with wafer boat (1) diameter equals, just be equipped with on gu fixed ring (571) with connecting piece (58) that body (2) lateral wall is connected.
6. The vertical quartz furnace tube of claim 5, wherein: the fixing assembly (4) comprises a fixing frame (42) fixedly connected with the shell (3) and close to one end of the pipe body (2), two ends of the fixing frame (42) are respectively located at two sides of the pipe body (2) and face the pipe body (2), clamping rods (41) which face the pipe body (2) are connected to two ends of the fixing frame (42) in a sliding mode, and moving pieces (43) which drive the clamping rods (41) to move towards directions close to each other and enable the pipe body (2) to abut against are arranged on the fixing frame (42).
7. The vertical quartz furnace tube of claim 6, wherein: the movable part (43) comprises first hinging rods (431) hinged to one sides of the fixing frame (42) away from each other, one ends of the first hinging rods (431) away from the hinging ends are inclined towards the direction close to each other and are hinged to second hinging rods (432), the other ends of the second hinging rods (432) are hinged to the side walls of the clamping rods (41) close to one ends of the tube body (2), the same pushing rods (434) are hinged to the connecting positions of the first hinging rods (431) and the second hinging rods (432), air cylinders (435) are arranged on one sides of the fixing frame (42) away from the pushing rods (434), and telescopic rods of the air cylinders (435) penetrate through the fixing frame (42) and are fixedly connected with the pushing rods (434).
8. The vertical quartz furnace tube of claim 1, wherein: the utility model discloses a tube body, including body (2) and sealing, quartz ring (21) is fixedly connected with to the sealed one end of body (2), even pipe (25) with quartz ring (21) are fixed and communicate quartz ring (21) keep away from one end fixedly connected with roof (22) of body (2), body (2) sealed one end and with a plurality of evenly distributed's sieve mesh (23) have been seted up in the region opposite of roof (22).
9. A process for manufacturing a vertical quartz furnace tube according to any of claims 1-8, comprising the steps of:
s1, preprocessing, namely soaking a pipe body (2), a top plate (22), a quartz ring (21) and a coupling pipe (25) by adopting nitric acid, and cleaning by adopting pure water;
s2, carrying out line drawing laser drilling on the pipe body (2) processed in the step S1, soaking in nitric acid, and cleaning with pure water;
s3, determining the whole length of the pipe body (2) treated by the S2, and cleaning the pipe body by using pure water after annealing and acid washing;
s4, polishing and annealing the top plate (22), the quartz ring (21), the coupling tube (25) and the tube body (2) treated by the S1, treating by an acid washing machine, soaking by nitric acid, and cleaning by pure water;
s5, performing combination welding, namely fully annealing the top plate (22) and the quartz ring (21) after the treatment of S4, keeping the temperature for one hour, cooling along with a furnace, and cleaning with pure water;
s6, welding the quartz ring (21) and the main pipe body (2) treated in the step S4, filling materials, fully annealing after welding, keeping the temperature for 2 hours, turning a welded junction of a top plate (22), fine grinding, pickling twice, soaking with nitric acid for the first time, cleaning with pure water, soaking with hydrofluoric acid for the second time, and cleaning with pure water;
s7, polishing a top plate (22), fully annealing, keeping the temperature for one hour, treating by an acid washing machine, and cleaning by pure water;
s8, welding a coupling pipe (25), fully annealing, keeping the temperature for one hour, treating by an acid washing machine, and cleaning by pure water;
s9, performing fire polishing twice, fully annealing, and keeping the temperature for one hour;
and S10, abutting the upper end of the moving mechanism on the pipe body (2) processed in the step S9, and detachably connecting the moving mechanism with the pipe body (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310284132.0A CN116207016A (en) | 2023-03-22 | 2023-03-22 | Vertical quartz furnace tube and processing technology thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310284132.0A CN116207016A (en) | 2023-03-22 | 2023-03-22 | Vertical quartz furnace tube and processing technology thereof |
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| Publication Number | Publication Date |
|---|---|
| CN116207016A true CN116207016A (en) | 2023-06-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310284132.0A Pending CN116207016A (en) | 2023-03-22 | 2023-03-22 | Vertical quartz furnace tube and processing technology thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116903233A (en) * | 2023-09-13 | 2023-10-20 | 江苏圣达石英制品有限公司 | High-temperature vacuum dehydroxylation furnace for quartz furnace tube |
-
2023
- 2023-03-22 CN CN202310284132.0A patent/CN116207016A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116903233A (en) * | 2023-09-13 | 2023-10-20 | 江苏圣达石英制品有限公司 | High-temperature vacuum dehydroxylation furnace for quartz furnace tube |
| CN116903233B (en) * | 2023-09-13 | 2023-11-24 | 江苏圣达石英制品有限公司 | High-temperature vacuum dehydroxylation furnace for quartz furnace tube |
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