CN116200807A - Continuous feeding device of single crystal furnace and use method of continuous feeding device - Google Patents
Continuous feeding device of single crystal furnace and use method of continuous feeding device Download PDFInfo
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- CN116200807A CN116200807A CN202310467131.XA CN202310467131A CN116200807A CN 116200807 A CN116200807 A CN 116200807A CN 202310467131 A CN202310467131 A CN 202310467131A CN 116200807 A CN116200807 A CN 116200807A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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Abstract
The invention belongs to the field of single crystal furnace charging equipment, and particularly relates to a continuous charging device of a single crystal furnace and a use method thereof, comprising a fixed bottom plate and a conveying hose, wherein a device shell is fixedly connected to the top end surface of the fixed bottom plate, a discharging crushing assembly, a high-efficiency grinding assembly and a circulating conveying assembly are arranged in the device shell, the discharging crushing assembly is connected with the high-efficiency grinding assembly through a fixed rod, and the high-efficiency grinding assembly is connected with the circulating conveying assembly.
Description
Technical Field
The invention relates to the field of single crystal furnace charging equipment, in particular to a continuous charging device of a single crystal furnace and a use method thereof.
Background
The rapid development of the semiconductor industry promotes the production of a single crystal furnace to have continuity and high efficiency, and needs to save the cost of crystal pulling production, when the single crystal furnace is charged for the first time, because the silicon material is in solid particles and forms a stacked state in a quartz crucible, but after the silicon material is melted at high temperature, the polysilicon raw material and the doping agent become liquid, the volume is greatly reduced compared with the original solid volume, and the upper part of the quartz crucible also has a large space, so that the length of a pulled crystal rod is not long enough, therefore, the continuous charging device is needed to be matched for carrying out multiple charging work, the silicon material can be continuously added after the silicon material is melted into liquid for multiple times, so that the silicon liquid in the quartz crucible is full as much as possible, and the long silicon rod can be pulled out once by fully utilizing the volume of the quartz crucible, because the single service life of the quartz crucible is about 200 hours, and multiple crystal rods can be pulled out as much as possible in multiple times in the service life;
the existing continuous feeding device of the single crystal furnace can continuously feed in the use process, but can not conveniently and stably feed the polycrystalline silicon raw materials and the doping agents which are required to be used in an intermittent equivalent manner in the feeding process, so that the polycrystalline silicon raw materials and the doping agents which are required to be used can not be stably proportioned in the feeding process, and the internal blockage of the device or the overflow of the raw materials in the quartz crucible caused by one-time massive feeding can not be effectively avoided; in the use process of the conventional continuous feeding device for the single crystal furnace, although continuous feeding can be performed, the continuous feeding device cannot perform comprehensive and efficient crushing and grinding work on the continuously added raw materials, the subsequent melting efficiency is low due to the fact that the particle size of the raw materials is large, and further the continuous and stable working state of the single crystal furnace can be influenced, so that the continuous feeding device for the single crystal furnace and the use method of the continuous feeding device for the single crystal furnace are required to meet the requirements of users.
Disclosure of Invention
The invention is provided in view of the problems existing in the existing continuous feeding device of the single crystal furnace and the using method thereof.
In order to solve the technical problems, according to one aspect of the present invention, the following technical solutions are provided: the utility model provides a continuous feeding device of single crystal furnace, includes PMKD and conveying hose, fixedly connected with device shell on PMKD's the terminal surface, install unloading crushing unit, high-efficient grinding unit and circulation conveying unit in the device shell, unloading crushing unit passes through the dead lever and is connected with high-efficient grinding unit, high-efficient grinding unit is connected with circulation conveying unit, fixedly connected with fixed plate on the conveying hose, rotate on the fixed plate and be connected with first threaded rod, threaded connection has the grip block on the first threaded rod, install and be fixed with the hydraulic stem on PMKD's the terminal surface, the top fixedly connected with limiting plate of hydraulic stem, limiting plate limiting sliding connection is on the device shell, fixedly connected with bracing piece on the limiting plate, threaded connection has the second threaded rod in the bracing piece, the bottom rotation of second threaded rod is connected with the mounting panel, the high-efficient grinding unit is connected with the deflector on the terminal surface, fixedly connected with fixed plate in the device shell, threaded connection has first threaded rod on the deflector, reciprocal motor top, reciprocal motor is connected with the central axis at the same central axis at the position of the reciprocal motor on the vertical center line of the shell, the central axis is located the reciprocal servo motor.
As a preferable scheme of the continuous feeding device of the single crystal furnace, the invention comprises the following steps: the connecting frame is limited and slidingly connected on the guide plate, the side end of the connecting frame is provided with a conveying groove, the device shell is fixedly connected with a storage box, the storage boxes are symmetrically distributed on two sides of the device shell, the side end of the bottom of the storage box is provided with a blanking groove, the inside side terminal surface of linking frame is laminated mutually with the side terminal surface of deflector, the side terminal surface of linking frame is laminated mutually with the side terminal surface of bin, conveyer trough symmetric distribution is in the both sides of linking frame, the slope form is personally submitted to the bottom of conveyer trough, the length of conveyer trough is greater than the length of silo down.
As a preferable scheme of the continuous feeding device of the single crystal furnace, the invention comprises the following steps: the bottom fixedly connected with carousel of reciprocating screw, fixedly connected with smashes the blade on the carousel, fixedly connected with dead lever on the bottom end face of carousel, smash blade equiangular distribution on the carousel, the bottom of dead lever is the slope form.
As a preferable scheme of the continuous feeding device of the single crystal furnace, the invention comprises the following steps: the efficient grinding assembly comprises a grinding ball and a grinding frame, wherein the grinding ball is fixedly connected to the bottom end of a fixed rod, a connecting groove is formed in the grinding ball, a first telescopic sleeve rod is fixedly connected to the connecting groove, a reset spring is fixedly connected to the first telescopic sleeve rod, a connecting plate is fixedly connected to the top end of the first telescopic sleeve rod, the connecting plate is slidably connected to the connecting groove, first grinding blocks are fixedly connected to the connecting plate, the diameter of the grinding ball is smaller than the inner diameter of the grinding frame, two groups of connecting grooves are formed in the connecting groove, five connecting grooves are symmetrically distributed on the upper side and the lower side of the grinding ball, the five connecting grooves are distributed on the grinding ball at equal angles, the connecting grooves correspond to the first grinding blocks one by one through the first telescopic sleeve rod, the first grinding blocks are hemispherical, and the inner side end faces of the connecting grooves are attached to the side end faces of the connecting plate.
As a preferable scheme of the continuous feeding device of the single crystal furnace, the invention comprises the following steps: the grinding frame is fixedly connected to the inner bottom end surface of the device shell, the second grinding block is fixedly connected to the inner side end surface of the grinding frame, the filter screen plate is fixedly connected to the inner bottom end surface of the grinding frame, the inner part of the grinding frame is fixedly connected with the top end of the conveying hose, the second grinding blocks are provided with four groups, the four groups of second grinding blocks are equidistantly distributed in the grinding frame, each group of second grinding blocks are equiangularly distributed in the grinding frame, the shape and the size of the second grinding blocks are the same as those of the first grinding blocks, and the cross section of the filter screen plate is diamond-shaped.
As a preferable scheme of the continuous feeding device of the single crystal furnace, the invention comprises the following steps: the circulating conveying assembly comprises a second telescopic loop rod, the second telescopic loop rod is fixedly connected to the bottom end face of the grinding ball, the bottom end fixedly connected with of the second telescopic loop rod is connected with a push plate, a straight plate is fixedly connected to the inner side end face of the device shell, a second servo motor is fixedly installed on the straight plate, the output end of the second servo motor is connected with a spiral rod, a first circular gear is fixedly connected to the spiral rod, a second circular gear is connected to the first circular gear in a meshed mode, the second circular gear is connected to the grinding frame in a rotating mode through bearings, the connecting push plates are symmetrically distributed on two sides of the bottom of the second telescopic loop rod, and the bottom end face of the connecting push plate is attached to the top end face of the filter screen plate.
As a preferable scheme of the continuous feeding device of the single crystal furnace, the invention comprises the following steps: the screw rod rotates to be connected in the transport section of thick bamboo, be connected with inlet pipe and discharging pipe on the transport section of thick bamboo, the other end of inlet pipe and the other end of discharging pipe are all connected on grinding the frame, the side end face of screw rod is laminated mutually with the inner wall of transport section of thick bamboo, inlet pipe and discharging pipe all are the slope form.
As a preferable scheme of the continuous feeding device of the single crystal furnace, the invention comprises the following steps: the cross section of fixed plate is "L" shape, first threaded rod is connected at the top middle part of grip block, the top face of grip block is laminated mutually with the bottom face of fixed plate, the hydraulic pressure pole symmetry distributes in the both sides of fixed baseplate, bracing piece symmetric distribution is in the left and right sides and the front and back both sides of limiting plate, the length of second threaded rod is greater than the length of bracing piece.
The application method of the continuous feeding device of the single crystal furnace comprises the following steps:
s1: the universal wheels can be driven to move downwards or upwards by the aid of the second threaded rod, the moving state and the placing state of the whole device can be conveniently switched by the aid of the supporting rods, the device can stably work at different single crystal furnaces, and the whole working height of the device can be conveniently and quickly adjusted according to actual conditions by means of the aid of the cooperation of the hydraulic rods and the limiting plates through driving of the supporting rods;
s2: the clamping plate can be driven to move conveniently and stably on the fixed plate by utilizing the rotation of the first threaded rod, at the moment, the clamping plate can be clamped and fixed on the crucible conveniently and stably by being matched with the fixed plate, and then the conveying hose can be clamped and installed on the crucible, so that the stability of the subsequent feeding operation is ensured, and when the crucible needs to be replaced, the conveying hose can be clamped and installed on another crucible again only by utilizing the matching of the clamping plate and the fixed plate;
s3: the polycrystalline silicon raw material and the doping agent which need to be used are added into the blanking crushing assembly, the blanking crushing assembly is utilized to perform automatic stable intermittent equivalent blanking on the polycrystalline silicon raw material and the doping agent respectively, and meanwhile, stable crushing treatment can be performed on the blanking polycrystalline silicon raw material and the doping agent;
s4: the crushed polysilicon raw material and the doping agent can be subjected to comprehensive and efficient grinding treatment through the efficient grinding assembly, and the raw material which is unqualified in grinding treatment can be conveyed to the efficient grinding assembly again by matching with the filter screen plate and the circulating conveying assembly for repeated grinding until the raw material is qualified in grinding;
s5: the raw materials after qualified grinding can be stably conveyed into the crucible through the conveying hose to perform continuous and stable feeding work, and further the stability of the follow-up continuous work of the single crystal furnace can be ensured.
Compared with the prior art, the invention has the beneficial effects that:
1. be provided with unloading crushing component, utilize reciprocating screw's rotation, can drive the linking frame and carry out automatic stable reciprocating motion from top to bottom, the linking frame is carrying out reciprocating motion in-process from top to bottom, utilize the cooperation of conveyer trough and unloading groove, can carry out automatic stable intermittent type equivalent unloading work to polycrystalline silicon raw materials and dopant that both sides storage incasement was deposited, and then can guarantee the stability of polycrystalline silicon raw materials and dopant follow-up crushing grinding work, avoid the unloading in-process to take place to block up, simultaneously can effectively avoid polycrystalline silicon raw materials and dopant to carry unevenly, influence the preparation qualification of follow-up melt, and at reciprocating screw rotation in-process, can drive the carousel and stably rotate, combine each crushing blade to carry out convenient stable crushing processing to intermittent type carried raw materials, guarantee the stability of follow-up grinding work, the use convenience and the high efficiency of device have effectively been improved.
2. Be provided with high-efficient grinding component, the carousel can drive the grinding ball pivoted through the dead lever and carry out reciprocating motion from top to bottom when rotating and reciprocating motion from top to bottom, the grinding ball passes through the first abrasive brick on each first flexible loop bar this moment, each second abrasive brick in the cooperation grinding frame, can carry out comprehensive efficient grinding work to intermittent type equal amount of polycrystalline silicon raw materials and dopant, effectively improve the grinding efficiency of polycrystalline silicon raw materials and dopant, and then can guarantee the stability of follow-up reinforced melting work, avoid polycrystalline silicon raw materials and dopant size great, influence follow-up melting work, lead to the follow-up unable continuous stable work that lasts of single crystal furnace.
3. Be provided with circulation conveying component, grinding ball rotates the in-process, can drive the connection push pedal of both sides through the flexible loop bar of second and steadily rotate, and then can stabilize the propelling movement with filtering the great raw materials of particle diameter at filter screen board top end face, through the combined action of hob and corresponding transport section of thick bamboo of both sides, can carry the great raw materials of particle diameter again to grind in the frame and handle, until the particle diameter of grinding is qualified, and then can guarantee the stability of follow-up reinforced melting work, thereby can guarantee the stability of the follow-up operating condition of single crystal growing furnace, the use diversity and the high efficiency of device have been increased.
4. Be provided with the grip block, utilize the rotation of first threaded rod can drive the grip block and carry out convenient stable motion on the fixed plate, the grip block cooperation fixed plate can be convenient stable centre gripping fix on the crucible this moment, and then can install the conveying hose centre gripping on the crucible, guarantees the stability of follow-up reinforced work, and when the crucible needs to be changed, only need utilize the cooperation of grip block and fixed plate again, alright install the conveying hose centre gripping on another crucible again.
5. Be provided with bracing piece and universal wheel, utilize the second threaded rod to drive the universal wheel and move downwards or upwards, the cooperation bracing piece can carry out convenient switching to holistic mobile state of device and placement state, guarantees that the device can carry out stable work in the single crystal growing furnace department of difference to utilize the cooperation of hydraulic stem and limiting plate, through driving the bracing piece motion, can carry out convenient regulation to holistic working height of device according to actual conditions.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following detailed description will be given with reference to the accompanying drawings and detailed embodiments, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained from these drawings without inventive effort to a person of ordinary skill in the art. Wherein:
FIG. 1 is a schematic overall perspective view of a continuous feeding device of a single crystal furnace;
FIG. 2 is a schematic perspective view of a fixing plate of a continuous feeding device of a single crystal furnace;
FIG. 3 is a schematic perspective view of a screen plate of a continuous feeding device of a single crystal furnace;
FIG. 4 is a schematic diagram of the overall front view structure of a continuous feeding device of a single crystal furnace according to the present invention;
FIG. 5 is a schematic view of the structure of the continuous feeding device of the single crystal furnace shown in FIG. 4A;
FIG. 6 is a schematic view of the structure of the continuous feeding apparatus for single crystal furnace of the present invention at B in FIG. 4;
FIG. 7 is a schematic diagram of the structure of a universal wheel of the continuous feeding device of the single crystal furnace;
FIG. 8 is a schematic top view of a continuous feeder of single crystal furnace according to the present invention;
FIG. 9 is a schematic top view of a turntable of a continuous feeding apparatus of a single crystal furnace according to the present invention;
FIG. 10 is a schematic top view of a continuous feeding apparatus for a single crystal furnace, which is connected with a push plate;
FIG. 11 is a schematic diagram showing the top view structure of a grinding ball of a continuous feeding device of a single crystal furnace;
FIG. 12 is a schematic view of a first telescopic loop bar structure of a continuous feeding apparatus for a single crystal furnace according to the present invention.
Reference numerals in the drawings: 1. a fixed bottom plate; 2. a device housing; 3. a blanking and crushing assembly; 301. a guide plate; 302. a reciprocating screw rod; 303. a first servo motor; 304. a connecting frame; 305. a conveying trough; 306. a storage box; 307. discharging groove; 308. a turntable; 309. a crushing blade; 4. a fixed rod; 5. a high efficiency grinding assembly; 501. grinding balls; 502. a connecting groove; 503. the first telescopic loop bar; 504. a return spring; 505. a connecting plate; 506. a first abrasive block; 507. a grinding frame; 508. a second abrasive block; 6. a circulatory conveying assembly; 601. the second telescopic loop bar; 602. the connecting push plate; 603. a straight plate; 604. a second servo motor; 605. a screw rod; 606. a first circular gear; 607. a second circular gear; 608. a delivery cylinder; 609. a feed pipe; 610. a discharge pipe; 7. a screen plate; 8. a conveying hose; 9. a fixing plate; 10. a first threaded rod; 11. a clamping plate; 12. a hydraulic rod; 13. a limiting plate; 14. a support rod; 15. a second threaded rod; 16. a mounting plate; 17. and a universal wheel.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present invention is not limited to the specific embodiments disclosed below.
Next, the present invention will be described in detail with reference to the drawings, wherein the sectional view of the device structure is not partially enlarged to general scale for the convenience of description, and the drawings are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.
Examples
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
As shown in figures 1-12, the continuous feeding device of the single crystal furnace comprises a fixed bottom plate 1 and a conveying hose 8, wherein a device shell 2 is fixedly connected to the top end surface of the fixed bottom plate 1, a blanking smashing component 3, a high-efficiency grinding component 5 and a circulating conveying component 6 are installed in the device shell 2, the blanking smashing component 3 is connected with the high-efficiency grinding component 5 through a fixed rod 4, the high-efficiency grinding component 5 is connected with the circulating conveying component 6, a fixed plate 9 is fixedly connected to the conveying hose 8, a first threaded rod 10 is rotationally connected to the fixed plate 9, a clamping plate 11 is connected to the first threaded rod 10 in a threaded manner, a hydraulic rod 12 is fixedly installed on the top end surface of the fixed bottom plate 1, a limiting plate 13 is fixedly connected to the top end of the hydraulic rod 12, the limiting plate 13 is in limiting sliding connection with the device shell 2, a supporting rod 14 is fixedly connected to the limiting plate 13, a second threaded rod 15 is connected to the supporting rod 14 in a threaded manner, the bottom end of the second threaded rod 15 is rotationally connected with a mounting plate 16, a universal wheel 17 is fixedly arranged on the bottom end surface of the mounting plate 16, the automatic stable intermittent equivalent blanking work can be carried out on the polysilicon raw material and the doping agent by utilizing the blanking crushing assembly 3, meanwhile, the convenient and stable crushing treatment can be carried out on the polysilicon raw material and the doping agent by utilizing the cooperation of the efficient grinding assembly 5 and the circulating conveying assembly 6, the comprehensive and efficient circulating grinding work can be carried out on the polysilicon raw material and the doping agent which are intermittently and equivalently conveyed until the grinding particle size is qualified, the grinding efficiency of the polysilicon raw material and the doping agent is effectively improved, the stability of the subsequent feeding and melting work can be ensured, the situation that the polysilicon raw material and the doping agent are large in size and the subsequent melting work is influenced is avoided, the subsequent continuous stable work of the single crystal furnace is not carried out, simultaneously, the universal wheel 17 can be driven to move downwards or upwards by utilizing the second threaded rod 15, the moving state and the placing state of the whole device can be conveniently switched by utilizing the supporting rod 14, the stable operation of the device can be ensured at different single crystal furnaces, and the whole working height of the device can be conveniently and quickly adjusted according to actual conditions by utilizing the cooperation of the hydraulic rod 12 and the limiting plate 13 and the movement of the driving supporting rod 14.
In the example, the blanking and crushing assembly 3 comprises a guide plate 301, the guide plate 301 is fixedly connected in a device shell 2, a reciprocating screw rod 302 is connected on the guide plate 301 in a threaded manner, the top end of the reciprocating screw rod 302 is connected with the output end of a first servo motor 303, the first servo motor 303 is fixedly connected with the top end of a connecting frame 304, the guide plate 301 is fixed at the middle part inside the device shell 2, the central axis of the reciprocating screw rod 302 and the central axis of the device shell 2 are positioned on the same vertical central line, the connecting frame 304 is in limiting sliding connection with the guide plate 301, a conveying groove 305 is formed at the side end of the connecting frame 304, a storage box 306 is fixedly connected in the device shell 2 and symmetrically distributed on two sides of the device shell 2, a blanking groove 307 is formed at the bottom side end of the storage box 306 in a penetrating manner, the inner side end surface of the connecting frame 304 is attached to the side end surface of the guide plate 301, the side end face of the connecting frame 304 is attached to the side end face of the storage box 306, the conveying grooves 305 are symmetrically distributed on two sides of the connecting frame 304, the bottom end faces of the conveying grooves 305 are inclined, the length of the conveying grooves 305 is larger than that of the discharging grooves 307, the connecting frame 304 can be driven to automatically and stably reciprocate up and down by means of rotation of the reciprocating screw rod 302, the connecting frame 304 can automatically and stably discharge polycrystalline silicon raw materials and doping agents stored in the storage boxes 306 on two sides in an intermittent equal-quantity manner by means of cooperation of the conveying grooves 305 and the discharging grooves 307, stability of subsequent smashing and grinding operations of the polycrystalline silicon raw materials and the doping agents can be guaranteed, blockage is avoided in the discharging process, uneven conveying of the polycrystalline silicon raw materials and the doping agents can be effectively avoided, and preparation qualification of subsequent molten liquid is affected.
In this example, the bottom fixedly connected with carousel 308 of reciprocating screw 302, fixedly connected with smashes blade 309 on the carousel 308, fixedly connected with dead lever 4 on the bottom surface of carousel 308, smash blade 309 equiangular distribution on carousel 308, the bottom of dead lever 4 is the slope form, in reciprocating screw 302 rotation in-process, can drive carousel 308 and rotate steadily, combine each smash blade 309 to carry out convenient stable crushing processing to intermittent type transported raw materials, guarantee the stability of follow-up grinding work, the convenience of use and the high efficiency of device have effectively been improved.
In the example, the efficient grinding component 5 comprises a grinding ball 501 and a grinding frame 507, the grinding ball 501 is fixedly connected to the bottom end of a fixed rod 4, a connecting groove 502 is formed in the grinding ball 501, a first telescopic sleeve rod 503 is fixedly connected in the connecting groove 502, a return spring 504 is fixedly connected in the first telescopic sleeve rod 503, a connecting plate 505 is fixedly connected to the top end of the first telescopic sleeve rod 503, the connecting plate 505 is slidably connected in the connecting groove 502, a first grinding block 506 is fixedly connected to the connecting plate 505, the diameter of the grinding ball 501 is smaller than the inner diameter of the grinding frame 507, two groups of connecting grooves 502 are arranged, five connecting grooves 502 are uniformly distributed on the upper side and the lower side of the grinding ball 501, the five connecting grooves 502 are uniformly distributed on the grinding ball 501 in a one-to-one correspondence with the first grinding block 506 through the first telescopic sleeve rod 503, the first grinding block 506 is in a semicircle shape, the inner side end surface of the connecting groove 502 is attached to the side end surface of the connecting plate 505, the grinding frame 507 is fixedly connected to the inner bottom end surface of the device shell 2, the second grinding block 508 is fixedly connected to the inner side end surface of the grinding frame 507, the filter screen plate 7 is fixedly connected to the inner bottom end surface of the grinding frame 507, the inner part of the grinding frame 507 is fixedly connected to the top end of the conveying hose 8, the second grinding block 508 is provided with four groups, the four groups of second grinding blocks 508 are equidistantly distributed in the grinding frame 507, each group of second grinding blocks 508 is equiangularly distributed in the grinding frame 507, the shape and the size of the second grinding blocks 508 are the same as those of the first grinding blocks 506, the cross section of the filter screen plate 7 is diamond-shaped, when the turntable 308 rotates and reciprocates up and down, the grinding balls 501 can be driven to rotate through the fixing rods 4 and reciprocate up and down, at the moment, the grinding balls 501 pass through the first grinding blocks 506 on the first telescopic sleeve rods 503, the cooperation grinds each second abrasive piece 508 in the frame 507, can carry out comprehensive high-efficient grinding work to intermittent type equivalent transport's polycrystalline silicon raw materials and dopant, effectively improved the grinding efficiency of polycrystalline silicon raw materials and dopant, and then can guarantee the stability of follow-up reinforced melting work, avoid polycrystalline silicon raw materials and dopant size great, influence follow-up melting work, lead to the single crystal growing furnace follow-up can not carry out continuous stable work.
In this example, circulation conveying component 6 includes flexible loop bar 601 of second, flexible loop bar 601 fixed connection of second is on the bottom end face of grinding ball 501, the bottom fixedly connected with connection push pedal 602 of flexible loop bar of second, fixedly connected with straight board 603 on the inside side terminal surface of device shell 2, install fixedly on the straight board 603 and be equipped with second servo motor 604, the output of second servo motor 604 is connected with hob 605, fixedly connected with first circular gear 606 on the hob 605, meshing is connected with second circular gear 607 on the first circular gear 606, second circular gear 607 is connected on grinding frame 507 through the bearing rotation, connection push pedal 602 symmetric distribution is in the bottom both sides of flexible loop bar of second, the bottom end face of connection push pedal 602 is laminated with the top end face of filter screen plate 7 mutually, grinding ball 501 rotates the in-process, can drive the connection push pedal 602 steady rotation of both sides through flexible loop bar of second, and then can carry out steady push with the great raw materials of particle diameter of filtering at the top end face of filter screen plate 7, and then can guarantee that follow-up circulation conveying work remains in the device.
In this example, the hob 605 is rotated and connected in the transport cylinder 608, be connected with inlet pipe 609 and discharging pipe 610 on the transport cylinder 608, the other end of inlet pipe 609 and the other end of discharging pipe 610 are all connected on grinding frame 507, the side terminal surface of hob 605 is laminated with the inner wall of transport cylinder 608, inlet pipe 609 and discharging pipe 610 all are the slope form, carry the great raw materials of particle diameter into grinding frame 507 again through the combined action of hob 605 and corresponding transport cylinder 608 of both sides, grind the processing, until the particle diameter of grinding is qualified, and then can guarantee the stability of follow-up feeding melting work, thereby can guarantee the stability of the follow-up operating condition of single crystal furnace, the use diversity and the high efficiency of device have been increased.
In this example, the cross section of fixed plate 9 is "L" shape, first threaded rod 10 connects at the top middle part of grip block 11, the top face of grip block 11 is laminated with the bottom face of fixed plate 9 mutually, hydraulic stem 12 symmetric distribution is in the both sides of fixed plate 1, bracing piece 14 symmetric distribution is in the left and right sides and the front and back both sides of limiting plate 13, the length of second threaded rod 15 is greater than the length of bracing piece 14, utilize the rotation of first threaded rod 10 can drive grip block 11 and carry out convenient stable motion on fixed plate 9, grip block 11 cooperation fixed plate 9 can convenient stable centre gripping be fixed on the crucible this moment, and then can install the centre gripping of delivery hose 8 on the crucible, guarantee the stability of follow-up reinforced work, and when the crucible needs to be changed, only need utilize the cooperation of grip block 11 and fixed plate 9 again, alright again install the centre gripping of delivery hose 8 on another crucible.
It should be noted that, the invention is a continuous feeding device of a single crystal furnace and a use method thereof, firstly, a worker can add polysilicon raw materials and dopants to be used into storage boxes 306 at two sides respectively, then the worker can drive universal wheels 17 to move downwards through mounting plates 16 under the action of the screw thread rotation of the second threaded rods 15 until the universal wheels 17 are contacted with the ground, at this time, the device can carry out convenient and stable moving work by utilizing the universal wheels 17, the whole device moves to the single crystal furnace needing continuous feeding, then the worker can hold a fixed plate 9 by hand and lap joint the fixed plate 9 at the edge of a crucible, then the worker can rotate a first threaded rod 10 on the fixed plate 9, at this time, under the action of the rotation of the first threaded rod 10, the clamping plate 11 which can drive the threaded connection moves towards the side end of the fixed plate 9, at the moment, the side of the crucible can be clamped and fixed conveniently and stably by utilizing the combined action of the fixed plate 9 and the clamping plate 11, and then the conveying hose 8 can be clamped and installed at the crucible conveniently and stably, when the crucible needs to be replaced, the convenient disassembly work of the conveying hose 8 can be completed by only reversely rotating the first threaded rod 10, the bottom end of the conveying hose 8 is arranged in the crucible, the stability of the subsequent feeding work is ensured, after the device integrally moves to the single crystal furnace, the staff can drive the universal wheels 17 to move upwards by reversely rotating the second threaded rods 15 on the support rods 14 through the threaded rotation of the second threaded rods 15 until the universal wheels 17 are separated from the ground, at the moment, the device can carry out convenient and stable placing work by utilizing each supporting rod 14, and meanwhile, the limiting plate 13 can be driven to carry out convenient and stable up-and-down movement by utilizing the driving of the hydraulic rods 12 at the two sides, and the whole using height of the device can be conveniently adjusted by utilizing each supporting rod 14;
when the device starts to work, a worker can start the first servo motor 303 and the second servo motor 604 by controlling, at the moment, under the driving action of the first servo motor 303, the reciprocating screw rod 302 can be driven to stably rotate, at the moment, under the rotating action of the reciprocating screw rod 302, the connecting frame 304 can be driven to automatically and stably reciprocate up and down on the guide plate 301 by being connected with threads of the connecting frame 304, at the moment, under the reciprocating action of the connecting frame 304, the conveying grooves 305 on two sides and the blanking grooves 307 on the two side storage boxes 306 can be driven to intermittently coincide, at the moment, the storage boxes 306 on two sides can respectively convey polysilicon raw materials and doping agents in the two side storage boxes 306 to the conveying grooves 305 through the corresponding blanking grooves 307, then when the connecting frame 304 moves down to the lowest end, the polysilicon raw materials and the doping agents can be stably conveyed to the grinding frame 507 through the conveying grooves 305, along with the up-down reciprocating action of the connecting frame 304, the polysilicon raw materials and the doping agents stored in the two side storage boxes 306 can be automatically and stably and intermittently blanking the two side storage boxes 307, and the intermittent blanking operation can be carried out by the automatic and stably grinding blades can be stably processed by the intermittent rotary table 308 under the action of the reciprocating movement of the bottom end of the connecting frame 304, and the intermittent rotary table 308 can be stably processed, and stably grinding the raw materials can be stably processed by the rotary table 309;
the crushed raw materials can be stably conveyed into the grinding frame 507, meanwhile, under the action of rotation and up-and-down reciprocating motion of the turntable 308, the grinding balls 501 can be driven to rotate through the fixed rod 4 and simultaneously reciprocate up and down, in the process of the movement of the grinding balls 501, each first grinding block 506 and each second grinding block 508 in the grinding frame 507 can be driven to intermittently contact and extrude, at the moment, under the extrusion pushing action of the second grinding blocks 508, the first grinding blocks 506 can be automatically pushed through the first telescopic sleeve rod 503, and in addition, the first grinding blocks 506 can be driven to automatically and stably reciprocate in the connecting grooves 502 in cooperation with the reset springs 504 in the first telescopic sleeve rod 503 and the connecting plates 505 at the end parts of the first telescopic sleeve rod 503, at the moment, under the action of the reciprocating telescopic motion of each first grinding block 506 and each first grinding block 506, the intermittent conveying polycrystalline silicon raw materials and doping agents can be comprehensively and efficiently ground in an equal amount by combining each second grinding block 508 in the grinding frame 507;
the grinded raw materials can fall onto the filter screen plate 7, the grinded raw materials can be stably filtered under the action of the filter screen plate 7, the raw materials with small particle size after grinding pass through the filter screen plate 7 and move into the conveying hose 8, continuous and stable feeding work can be carried out on the raw materials through the conveying hose 8, the raw materials with larger particle size after grinding pass through the conveying hose 8, the raw materials can be blocked on the filter screen plate 7 and can roll to the side by utilizing the inclined surface of the filter screen plate 7, meanwhile, under the action of rotation of the grinding ball 501, the connecting push plates 602 at two sides can be driven to stably rotate through the second telescopic sleeve rod 601, the raw materials with larger particle size filtered on the top end surface of the filter screen plate 7 can be stably pushed to the feeding pipe 609 at two sides, the raw materials with unqualified grinding can be conveyed into the conveying cylinder 608 through the inclined guide of the feeding pipe 609, at this time, under the driving action of the second servo motor 604 on the straight plate 603, one side of the spiral rod 605 can be driven to rotate, at this time, one side of the spiral rod 605 can drive the first circular gear 606 to rotate, the second circular gear 607 connected in a meshed manner can drive the first circular gear 606 on the other side to rotate, and then the other side of the spiral rod 605 can be driven to rotate, at this time, under the rotating action of the spiral rods 605 on both sides, the raw materials pushed into the conveying cylinders 608 on both sides can be automatically and stably conveyed by combining with the corresponding conveying cylinders 608, and the unqualified raw materials can be conveyed into the grinding frame 507 again by utilizing the feeding pipe 609 to be subjected to grinding treatment, so reciprocation is performed until the grinding particle size is qualified, and then the raw materials can be conveyed into the crucible to perform rapid and stable melting work in the crucible, and further can ensure the stability of the subsequent working state of the single crystal furnace.
Although the invention has been described hereinabove with reference to embodiments, various modifications thereof may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the features of the disclosed embodiments may be combined with each other in any manner as long as there is no structural conflict, and the exhaustive description of these combinations is not given in this specification merely for the sake of omitting the descriptions and saving resources. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (9)
1. A continuous feeding device of a single crystal furnace, which comprises a fixed bottom plate (1) and a conveying hose (8), and is characterized in that; the utility model discloses a grinding device for the material feeding and crushing device, which comprises a fixed bottom plate (1), a device shell (2) fixedly connected with the top end face of the fixed bottom plate (1), a discharging grinding component (3), a high-efficiency grinding component (5) and a circulating conveying component (6) are installed in the device shell (2), the discharging grinding component (3) is connected with the high-efficiency grinding component (5) through a fixed rod (4), the high-efficiency grinding component (5) is connected with the circulating conveying component (6), a fixed plate (9) is fixedly connected with a conveying hose (8), a first threaded rod (10) is rotationally connected with the fixed plate (9), a clamping plate (11) is connected with the first threaded rod (10) in a threaded manner, a hydraulic rod (12) is installed and fixed on the top end face of the fixed bottom plate (1), a limiting plate (13) is fixedly connected with the top end face of the hydraulic rod (12), the limiting plate (13) is in limiting sliding connection with the device shell (2), a supporting rod (14) is fixedly connected with a second threaded rod (15) in the supporting rod (14), a universal wheel (16) is connected with the bottom end face (16) of the fixed bottom plate (301), the guide plate (301) is fixedly connected in the device shell (2), the guide plate (301) is connected with a reciprocating screw rod (302) in a threaded mode, the top end of the reciprocating screw rod (302) is connected to the output end of the first servo motor (303), the first servo motor (303) is fixedly connected to the top end of the connecting frame (304), the guide plate (301) is fixed to the middle position inside the device shell (2), and the central axis of the reciprocating screw rod (302) and the central axis of the device shell (2) are located on the same vertical central line.
2. The continuous feeding device of a single crystal furnace according to claim 1, wherein: spacing sliding connection of linking frame (304) is on deflector (301), conveyer trough (305) have been seted up to the side of linking frame (304), fixedly connected with storage box (306) in device shell (2), storage box (306) symmetric distribution is in the both sides of device shell (2), silo (307) have been seted up in the bottom side of storage box (306) end penetration, the inside side terminal surface of linking frame (304) is laminated mutually with the side terminal surface of deflector (301), the side terminal surface of linking frame (304) is laminated mutually with the side terminal surface of storage box (306), conveyer trough (305) symmetric distribution is in the both sides of linking frame (304), the slope form is personally submitted to the bottom of conveyer trough (305), the length of conveyer trough (305) is greater than the length of silo (307).
3. The continuous feeding device of the single crystal furnace according to claim 2, wherein: the bottom fixedly connected with carousel (308) of reciprocating screw rod (302), fixedly connected with smashes blade (309) on carousel (308), fixedly connected with dead lever (4) on the bottom terminal surface of carousel (308), smash blade (309) equiangular distribution on carousel (308), the bottom of dead lever (4) is the slope form.
4. The continuous feeding device of a single crystal furnace according to claim 1, wherein: the efficient grinding assembly (5) comprises a grinding ball (501) and a grinding frame (507), the grinding ball (501) is fixedly connected to the bottom end of a fixed rod (4), connecting grooves (502) are formed in the grinding ball (501), first telescopic sleeve rods (503) are fixedly connected to the inside of the connecting grooves (502), reset springs (504) are fixedly connected to the inside of the first telescopic sleeve rods (503), connecting plates (505) are fixedly connected to the top ends of the first telescopic sleeve rods (503), the connecting plates (505) are slidably connected to the inside of the connecting grooves (502), first grinding blocks (506) are fixedly connected to the connecting plates (505), the diameter of the grinding ball (501) is smaller than the inner diameter of the grinding frame (507), two groups of connecting grooves (502) are formed in the mode, five connecting grooves (502) are symmetrically distributed on the upper side and the lower side of the grinding ball (501), the five connecting grooves (502) are distributed on the grinding ball (501), the connecting grooves (505) correspond to the first grinding blocks (506) in an equiangular mode, and the first grinding blocks (506) are in an equal angle mode, and the first grinding blocks (506) are correspondingly connected to the end faces of the first grinding blocks (502).
5. The continuous feeding device of a single crystal furnace according to claim 4, wherein: the utility model discloses a device, including grinding frame (507), filter screen board (7) are connected with filter screen board (508), filter screen board (508) are connected with filter screen board (7), filter screen board (7) are connected with transmission hose (8) top, filter screen board (508) are connected with filter screen board (507) through the first filter screen board, filter screen board (7) are connected with filter screen board through the second filter screen board, filter screen board (508) are connected with filter screen board (507) through the second filter screen board, filter screen board (7) are connected with transmission hose (8) through the second filter screen board, and filter screen board (508) are connected with transmission hose (8) through the first filter screen board.
6. The continuous feeding device of a single crystal furnace according to claim 5, wherein: the utility model provides a circulation conveying assembly (6) is including flexible loop bar (601) of second, flexible loop bar (601) of second is fixedly connected with on the bottom face of grinding ball (501), the bottom fixedly connected with connection push pedal (602) of flexible loop bar (601) of second, fixedly connected with straight board (603) on the inside side terminal surface of device shell (2), install on straight board (603) and be fixed with second servo motor (604), the output of second servo motor (604) is connected with hob (605), fixedly connected with first circular gear (606) on hob (605), meshing is connected with second circular gear (607) on first circular gear (606), second circular gear (607) are connected on grinding frame (507) through the bearing rotation, connection push pedal (602) symmetric distribution is in the bottom both sides of flexible loop bar (601) of second, the bottom face of connection push pedal (602) is laminated with the top face of filter screen board (7).
7. The continuous feeding device of a single crystal furnace according to claim 6, wherein: the screw rod (605) is rotationally connected in the conveying cylinder (608), the conveying cylinder (608) is connected with a feeding pipe (609) and a discharging pipe (610), the other end of the feeding pipe (609) and the other end of the discharging pipe (610) are both connected on the grinding frame (507), the side end face of the screw rod (605) is attached to the inner wall of the conveying cylinder (608), and the feeding pipe (609) and the discharging pipe (610) are all inclined.
8. The continuous feeding device of a single crystal furnace according to claim 1, wherein: the cross section of fixed plate (9) is "L" shape, first threaded rod (10) are connected at the top middle part of grip block (11), the top face of grip block (11) is laminated mutually with the bottom end face of fixed plate (9), hydraulic rod (12) symmetric distribution is in the both sides of fixed baseplate (1), bracing piece (14) symmetric distribution is in the left and right sides and the front and back both sides of limiting plate (13), the length of second threaded rod (15) is greater than the length of bracing piece (14).
9. A method of using a continuous feeding apparatus for a single crystal furnace according to claim 1, comprising the steps of:
s1: the universal wheel (17) can be driven to move downwards or upwards by the aid of the second threaded rod (15), the moving state and the placing state of the whole device can be conveniently switched by the aid of the supporting rods (14), the device can be guaranteed to work stably at different single crystal furnaces, and the whole working height of the device can be conveniently and quickly adjusted according to actual conditions by means of the aid of the cooperation of the hydraulic rods (12) and the limiting plates (13) and the movement of the supporting rods (14);
s2: the clamping plate (11) can be driven to move conveniently and stably on the fixed plate (9) by utilizing the rotation of the first threaded rod (10), at the moment, the clamping plate (11) is matched with the fixed plate (9) to clamp and fix the crucible conveniently and stably, and then the conveying hose (8) can be clamped and installed on the crucible to ensure the stability of the subsequent feeding operation, and when the crucible needs to be replaced, the conveying hose (8) can be clamped and installed on the other crucible again only by utilizing the matching of the clamping plate (11) and the fixed plate (9) again;
s3: the polycrystalline silicon raw material and the doping agent which need to be used are added into the blanking crushing assembly (3), and the blanking crushing assembly (3) can be utilized to perform automatic stable intermittent equivalent blanking on the polycrystalline silicon raw material and the doping agent respectively, and meanwhile, the blanking polycrystalline silicon raw material and the doping agent can be subjected to stable crushing treatment;
s4: the crushed polysilicon raw material and the doping agent can be subjected to comprehensive and efficient grinding treatment through the efficient grinding assembly (5), and the raw material which is unqualified in grinding treatment can be conveyed into the efficient grinding assembly (5) again by matching with the filter screen plate (7) and the circulating conveying assembly (6) for repeated grinding until the raw material is qualified in grinding;
s5: the raw materials after qualified grinding can be stably conveyed into the crucible through the conveying hose (8) to perform continuous and stable feeding work, and further the stability of the follow-up continuous work of the single crystal furnace can be ensured.
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