CN116191931A - Hollow rotary piezoelectric motor based on six-phase drive and working method thereof - Google Patents

Hollow rotary piezoelectric motor based on six-phase drive and working method thereof Download PDF

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CN116191931A
CN116191931A CN202310251937.5A CN202310251937A CN116191931A CN 116191931 A CN116191931 A CN 116191931A CN 202310251937 A CN202310251937 A CN 202310251937A CN 116191931 A CN116191931 A CN 116191931A
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driving
piezoelectric
rotor
bearing
feet
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安海涛
申子玉
王亮
金家楣
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/145Large signal circuits, e.g. final stages
    • H02N2/147Multi-phase circuits
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/16Mechanical energy storage, e.g. flywheels or pressurised fluids

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Abstract

The invention discloses a hollow rotary piezoelectric motor based on six-phase driving and a working method thereof, wherein the motor comprises a rotor, a first bearing, a second bearing, a shell, a base, a stator and a piezoelectric driving module; the stator comprises a fixed ring, 3 fixed seats, 3 connecting rods and 3 driving feet; the piezoelectric driving module comprises 6 piezoelectric bimorphs. The invention controls the time sequence and the frequency of 6 piezoelectric bimorphs to enable the rotor to realize the bidirectional ultrahigh-precision positioning rotary motion, and can realize high-torque rotation at low speed and high-precision rotation at high speed. The invention has high reliability, large output torque and high precision, and can be widely applied to the fields of precision optics, aerospace, mechanical manufacturing, medical appliances and the like.

Description

Hollow rotary piezoelectric motor based on six-phase drive and working method thereof
Technical Field
The invention relates to the technical field of piezoelectric precise driving, in particular to a hollow rotary piezoelectric motor based on six-phase driving and a working method thereof.
Background
The rotary ultrasonic motor is a driver based on piezoelectric effect, ultrasonic vibration and friction coupling, and has wide application in the fields of mechanical manufacture and the like due to the characteristics of high response speed, high precision, large mass moment ratio and the like. However, the stator structure cannot pass through the optical beam and the precise mechanical arm, so that the application range of the rotary ultrasonic motor is greatly limited. The hollow ultrasonic motor can be suitable for the fields requiring hollow structures such as precise optics and medical appliances due to the unique hollow structure, but the structure and driving signals of the conventional hollow rotary ultrasonic motor are complex, the frequency band of the input voltage signal wave is limited, and challenges are brought to the simplified design of piezoelectric driving. Therefore, how to solve the problems of complex structure, complex driving signals and the like of the traditional hollow rotary ultrasonic motor, on the basis of simplifying the structure of the hollow rotary ultrasonic motor, the problem that the input voltage frequency is low to high, and the stator realizes the driving of macro-micro driving fusion under the non-resonance mode and the resonance mode becomes a difficult problem to be studied in the industry.
Disclosure of Invention
The invention aims to solve the technical problem of providing a hollow rotary piezoelectric motor based on a six-phase driving mode and a working method thereof aiming at the defects related to the background technology.
The invention adopts the following technical scheme for solving the technical problems:
the hollow rotary piezoelectric motor based on six-phase driving comprises a rotor, a first bearing, a second bearing, a shell, a base, a stator and a piezoelectric driving module;
the rotor is a hollow cylinder with openings at two ends, the first bearing adopts a deep groove ball bearing, and the second bearing adopts a thrust bearing;
the shell is fixed on the base; the outer ring of the first bearing is fixedly connected with the shell, the inner ring of the first bearing is fixedly connected with the outer wall of the rotor in a coaxial manner, the lower ring of the second bearing is fixedly connected with the base, and the upper ring of the second bearing is fixedly connected with the lower end of the bearing in a coaxial manner, so that the rotor can rotate freely relative to the base;
the stator comprises a fixed ring, 3 fixed seats, 3 connecting rods and 3 driving feet;
the fixed ring is a hollow cylinder with two open ends; the 3 fixing seats are circumferentially and uniformly arranged on the outer wall of the fixing ring and fixedly connected with the base, so that the fixing ring is positioned in the rotor and coaxial with the rotor;
the 3 connecting rods are circumferentially and uniformly arranged between the fixed ring and the rotor, one ends of the 3 connecting rods are fixedly connected with the outer wall of the fixed ring, and the other ends of the 3 connecting rods are fixedly connected with the 3 driving feet in a one-to-one correspondence manner; the 3 driving feet are propped against the inner wall of the rotor; the fixing rings are divided into six equal parts by the 3 fixing seats and the 3 connecting rods, and the 1 st fixing seat is positioned between the 1 st connecting rod and the 2 nd connecting rod;
dovetail grooves are formed in two sides of the 3 fixing seats and the 3 driving feet;
the piezoelectric driving module comprises 6 piezoelectric bimorphs which are respectively arranged between a 1 st driving foot and a 1 st fixing seat, a 1 st fixing seat and a 2 nd driving foot, a 2 nd driving foot and a 2 nd fixing seat, a 2 nd fixing seat and a 3 rd driving foot, a 3 rd driving foot and a 3 rd fixing seat, and a 3 rd fixing seat and a 1 st driving foot; one end of the piezoelectric bimorph is propped against the dovetail groove on the corresponding driving foot, and the other end is propped against the dovetail groove on the corresponding fixing seat; the 6 piezoelectric bimorphs simultaneously bulge inwards or outwards;
the 6 piezoelectric bimorphs are coplanar, and the plane of the 6 piezoelectric bimorphs is perpendicular to the rotating shaft of the rotor;
the piezoelectric ceramic plates on two sides of the 6 piezoelectric bimorphs are polarized along the thickness direction, and the polarization directions are inwards or outwards simultaneously.
As a further optimization scheme of the hollow rotary piezoelectric motor based on six-phase driving, the 3 driving feet are all made of flexible materials.
As a further optimization scheme of the hollow rotary piezoelectric motor based on six-phase driving, the outer sides of the 3 driving feet are respectively provided with a friction layer made of ceramic materials, so that the friction performance and the wear resistance are improved.
The invention also discloses a working method of the hollow rotary piezoelectric motor based on six-phase driving, which comprises the following steps:
a) If it is necessary to drive the rotor in forward rotation:
inputting voltage signal waves u with the same signal amplitude and frequency and different phases into the 1 st to 6 th piezoelectric bimorphs 1 、u 2 、u 3 、u 4 、u 5 、u 6 ,u 1 、u 2 、u 3 、u 4 、u 5 、u 6 The electric signals of the three piezoelectric bimorphs are sequentially different in phase by 60 degrees, and longitudinal stretching forces with different time phase differences are generated at the two ends of the three piezoelectric bimorphs, so that the three driving feet generate forward elliptical motion, the driving surface running tracks of the three driving feet are completely consistent with the driving directions, only the time phase differences exist, and under the synergistic effect of the three driving feet, the rotor obtains continuous forward direction output torque;
b) If the rotor needs to be driven to rotate reversely:
inputting voltage signal waves u with the same signal amplitude and frequency and different phases into the 1 st to 6 th piezoelectric bimorphs 1 、u 2 、u 3 、u 4 、u 5 、u 6 ,u 6 、u 5 、u 4 、u 3 、u 2 、u 1 The electric signals of the three piezoelectric bimorphs are sequentially different by 60 degrees, longitudinal stretching forces with different time phase differences are generated at the two ends of the three piezoelectric bimorphs, so that the three driving feet generate reverse elliptical motions, the running tracks of the driving surfaces of the three driving feet are completely consistent with the driving directions, only the time phase differences exist, and the rotor obtains continuous reverse direction output torque under the synergistic effect of the three driving feet.
Compared with the prior art, the technical scheme provided by the invention has the following technical effects:
1. the invention adopts a unique hollow structure, simplifies and designs a hollow rotary piezoelectric motor structure in a six-phase driving mode by combining three piezoelectric driving modules, and can be applied to the fields requiring a hollow structure, such as precision optics, medical appliances and the like;
2. the piezoelectric bimorph is adopted as an excitation source, and the piezoelectric bimorph is in non-fixed fit with the driving foot and is embedded in the dovetail grooves of the driving foot and the positioning foot, so that the piezoelectric bimorph has high response speed and high precision, and can perform performance adjustment by changing input frequency, voltage and driving mode.
3. The invention is provided with three groups of mutually matched piezoelectric driving modules, and the ultrasonic motor can be converted between a resonance mode and a non-resonance mode by adjusting the amplitude and the frequency of the input voltage, so as to realize macro-micro fusion driving.
Drawings
FIG. 1 is a top view of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is a schematic diagram of the stator and piezoelectric drive module of the present invention in combination;
FIG. 4 is a schematic diagram of six-phase drive signals for driving the rotor in forward rotation in accordance with the present invention;
FIG. 5 is a schematic diagram of six-phase drive signals for driving the rotor in reverse rotation in accordance with the present invention;
FIG. 6 is a deformation displacement cloud of the stator upon driving the rotor to rotate in the forward direction in accordance with the present invention;
fig. 7 is a deformation displacement cloud of the stator upon driving the rotor in reverse rotation in accordance with the present invention.
In the figure, 1-shell, 2-rotor, 3-stator, 4-base, 5-first bearing, 6-second bearing, 7-fixed ring, 8-driving foot, 9-fixing base, 10-connecting rod, 11-first piezoelectricity bimorph.
Detailed Description
For better understanding of the technical scheme of the present invention, the following detailed description of the technical scheme of the present invention is provided for those skilled in the art with reference to the accompanying drawings:
this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the components are exaggerated for clarity.
As shown in fig. 1 and 2, the invention discloses a hollow rotary piezoelectric motor based on six-phase driving, which comprises a rotor, a first bearing, a second bearing, a shell, a base, a stator and a piezoelectric driving module;
the rotor is a hollow cylinder with openings at two ends, the first bearing adopts a deep groove ball bearing, and the second bearing adopts a thrust bearing;
the shell is fixed on the base; the outer ring of the first bearing is fixedly connected with the shell, the inner ring of the first bearing is fixedly connected with the outer wall of the rotor in a coaxial manner, the lower ring of the second bearing is fixedly connected with the base, and the upper ring of the second bearing is fixedly connected with the lower end of the bearing in a coaxial manner, so that the rotor can rotate freely relative to the base;
as shown in fig. 3, the stator comprises a fixed ring, 3 fixed seats, 3 connecting rods and 3 driving feet;
the fixed ring is a hollow cylinder with two open ends; the 3 fixing seats are circumferentially and uniformly arranged on the outer wall of the fixing ring and fixedly connected with the base, so that the fixing ring is positioned in the rotor and coaxial with the rotor;
the 3 connecting rods are circumferentially and uniformly arranged between the fixed ring and the rotor, one ends of the 3 connecting rods are fixedly connected with the outer wall of the fixed ring, and the other ends of the 3 connecting rods are fixedly connected with the 3 driving feet in a one-to-one correspondence manner; the 3 driving feet are propped against the inner wall of the rotor; the fixing rings are divided into six equal parts by the 3 fixing seats and the 3 connecting rods, and the 1 st fixing seat is positioned between the 1 st connecting rod and the 2 nd connecting rod;
dovetail grooves are formed in two sides of the 3 fixing seats and the 3 driving feet;
the piezoelectric driving module comprises 6 piezoelectric bimorphs which are respectively arranged between a 1 st driving foot and a 1 st fixing seat, a 1 st fixing seat and a 2 nd driving foot, a 2 nd driving foot and a 2 nd fixing seat, a 2 nd fixing seat and a 3 rd driving foot, a 3 rd driving foot and a 3 rd fixing seat, and a 3 rd fixing seat and a 1 st driving foot; one end of the piezoelectric bimorph is propped against the dovetail groove on the corresponding driving foot, and the other end is propped against the dovetail groove on the corresponding fixing seat; the 6 piezoelectric bimorphs simultaneously bulge inwards or outwards;
the 6 piezoelectric bimorphs are coplanar, and the plane of the 6 piezoelectric bimorphs is perpendicular to the rotating shaft of the rotor;
the piezoelectric ceramic plates on two sides of the 6 piezoelectric bimorphs are polarized along the thickness direction, and the polarization directions are inwards or outwards simultaneously.
The 3 driving feet are made of flexible materials; the outer sides of the 3 driving feet are respectively provided with a friction layer made of ceramic materials so as to improve friction performance and wear resistance.
The invention also discloses a working method of the hollow rotary piezoelectric motor based on six-phase driving, which comprises the following steps:
a) If it is necessary to drive the rotor in forward rotation:
as shown in FIG. 4, voltage signal waves u of the same signal amplitude and frequency and different phases are input to the 1 st to 6 th piezoelectric bimorphs 1 、u 2 、u 3 、u 4 、u 5 、u 6 The formula is expressed in the following form:
u i =V i f i
u 1 、u 2 、u 3 、u 4 、u 5 、u 6 the electrical signals of (a) are sequentially 60 degrees out of phase, expressed as:
Figure BDA0004128116620000041
Figure BDA0004128116620000042
Figure BDA0004128116620000043
Figure BDA0004128116620000044
Figure BDA0004128116620000045
Figure BDA0004128116620000046
the piezoelectric bimorph is applied with forward voltage, so that bending vibration can be generated on the piezoelectric bimorph, and the bending vibration enables the two ends of the piezoelectric bimorph to generate longitudinal stretching force with certain frequency. According to FIG. 6, a piezoelectric bimorph voltage signal wave u is applied to both the left and right ends of the foot 1 、u 2 Is of the phase difference of (2)
Figure BDA0004128116620000057
The two ends of the piezoelectric bimorph generate longitudinal stretching forces with different time phase differences, so that the driving foot generates forward elliptical motion, and the elliptical motion enables the contact state of the driving surface of the driving foot and the rotor to be divided into four states of separation, pre-contact, complete contact and pre-separation according to time steps.
The perimeter of the track of the elliptical motion of the driving surface of the driving foot is x 1 The efficiency of driving the rotation of the rotor is mu according to the friction coefficient of the contact surface and the track size of elliptical motion 1 Each elliptical motion is transmitted to the friction surface of the rotor with an effective step length of mu 1 x 1 Driving the rotor to rotate around the axis in the forward direction for a preset time t 1 After seconds, the driving foot is lambda 1 Elliptical motion, the effective step length of the positive rotation of the rotor is lambda 1 μ 1 x 1
The running track of the driving surfaces of the 3 driving feet are completely consistent with the driving direction, and only the phase difference in time exists, so that under the synergistic effect of the 3 driving feet, the rotor obtains continuous forward direction output torque.
B) If the rotor needs to be driven to rotate reversely:
as shown in FIG. 5, voltage signal waves u of the same signal amplitude and frequency and different phases are input to the 1 st to 6 th piezoelectric bimorphs 1 、u 2 、u 3 、u 4 、u 5 、u 6 The formula is expressed in the following form:
u i =V i f i
u 6 、u 5 、u 4 、u 3 、u 2 、u 1 the electrical signals of (a) differ in sequence by 60 °, expressed respectively as:
Figure BDA0004128116620000051
Figure BDA0004128116620000052
Figure BDA0004128116620000053
/>
Figure BDA0004128116620000054
Figure BDA0004128116620000055
Figure BDA0004128116620000056
the piezoelectric bimorph is applied with forward voltage, so that bending vibration can be generated on the piezoelectric bimorph, and the bending vibration enables the two ends of the piezoelectric bimorph to generate longitudinal stretching force with certain frequency. According to FIG. 7, a piezoelectric bimorph voltage signal wave u is generated at the left and right ends of the foot 1 、u 2 Is of the phase difference of (2)
Figure BDA0004128116620000058
The two ends of the piezoelectric bimorph generate longitudinal stretching forces with different time phase differences, so that the driving foot generates reverse elliptical motion, and the contact state of the driving surface of the driving foot and the rotor is divided into four states of separation, pre-contact, complete contact and pre-separation according to time steps.
The perimeter of the track of the elliptical motion of the driving surface of the driving foot is x 2 The efficiency of driving the rotation of the rotor is mu according to the friction coefficient of the contact surface and the track size of elliptical motion 2 Each elliptical motion is transmitted to the friction surface of the rotor with an effective step length of mu 2 x 2 Driving the rotor to reversely rotate around the axle center for waiting for a preset time t 2 After seconds, the driving foot is lambda 2 Elliptical motion, the effective step length of the reverse rotation of the rotor is lambda 2 μ 2 x 2
The running track of the driving surfaces of the 3 driving feet are completely consistent with the driving direction, and the rotor obtains continuous reverse direction output torque under the synergistic effect of the 3 driving feet only with time phase difference.
By adjusting the amplitude and frequency of the voltage, the step size of each drive foot elliptical motion and the time required to complete an elliptical motion can be varied, thereby varying the speed at which the rotor rotates. The voltage amplitude is adjusted within the allowable range that the used piezoelectric bimorph is not broken, and the voltage amplitude of the experimental embodiment is 0-500 vpp; the adjusted voltage frequency can meet the requirement from low frequency to high frequency, and the voltage frequency of the experimental embodiment is 0-20 KHz, so that the motor works in a non-resonance mode and a resonance mode, and macro-micro fusion driving is realized.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no limitations are intended to the scope of the invention, except insofar as modifications, equivalents, improvements or modifications are within the spirit and principles of the invention.

Claims (4)

1. The hollow rotary piezoelectric motor based on six-phase driving is characterized by comprising a rotor, a first bearing, a second bearing, a shell, a base, a stator and a piezoelectric driving module;
the rotor is a hollow cylinder with openings at two ends, the first bearing adopts a deep groove ball bearing, and the second bearing adopts a thrust bearing;
the shell is fixed on the base; the outer ring of the first bearing is fixedly connected with the shell, the inner ring of the first bearing is fixedly connected with the outer wall of the rotor in a coaxial manner, the lower ring of the second bearing is fixedly connected with the base, and the upper ring of the second bearing is fixedly connected with the lower end of the bearing in a coaxial manner, so that the rotor can rotate freely relative to the base;
the stator comprises a fixed ring, 3 fixed seats, 3 connecting rods and 3 driving feet;
the fixed ring is a hollow cylinder with two open ends; the 3 fixing seats are circumferentially and uniformly arranged on the outer wall of the fixing ring and fixedly connected with the base, so that the fixing ring is positioned in the rotor and coaxial with the rotor;
the 3 connecting rods are circumferentially and uniformly arranged between the fixed ring and the rotor, one ends of the 3 connecting rods are fixedly connected with the outer wall of the fixed ring, and the other ends of the 3 connecting rods are fixedly connected with the 3 driving feet in a one-to-one correspondence manner; the 3 driving feet are propped against the inner wall of the rotor; the fixing rings are divided into six equal parts by the 3 fixing seats and the 3 connecting rods, and the 1 st fixing seat is positioned between the 1 st connecting rod and the 2 nd connecting rod;
dovetail grooves are formed in two sides of the 3 fixing seats and the 3 driving feet;
the piezoelectric driving module comprises 6 piezoelectric bimorphs which are respectively arranged between a 1 st driving foot and a 1 st fixing seat, a 1 st fixing seat and a 2 nd driving foot, a 2 nd driving foot and a 2 nd fixing seat, a 2 nd fixing seat and a 3 rd driving foot, a 3 rd driving foot and a 3 rd fixing seat, and a 3 rd fixing seat and a 1 st driving foot; one end of the piezoelectric bimorph is propped against the dovetail groove on the corresponding driving foot, and the other end is propped against the dovetail groove on the corresponding fixing seat; the 6 piezoelectric bimorphs simultaneously bulge inwards or outwards;
the 6 piezoelectric bimorphs are coplanar, and the plane of the 6 piezoelectric bimorphs is perpendicular to the rotating shaft of the rotor;
the piezoelectric ceramic plates on two sides of the 6 piezoelectric bimorphs are polarized along the thickness direction, and the polarization directions are inwards or outwards simultaneously.
2. The hollow rotary piezoelectric motor based on six phase driving according to claim 1, wherein each of the 3 driving feet is made of flexible material.
3. The hollow rotary piezoelectric motor based on six-phase driving according to claim 1, wherein the outer sides of the 3 driving feet are provided with a friction layer made of ceramic material to improve friction performance and wear resistance.
4. A method of operating a hollow rotary piezoelectric motor based on six-phase drive according to claim 1, comprising the steps of:
a) If it is necessary to drive the rotor in forward rotation:
inputting voltage signal waves u with the same signal amplitude and frequency and different phases into the 1 st to 6 th piezoelectric bimorphs 1 、u 2 、u 3 、u 4 、u 5 、u 6 ,u 1 、u 2 、u 3 、u 4 、u 5 、u 6 The electric signals of the three piezoelectric bimorphs are sequentially different in phase by 60 degrees, and longitudinal stretching forces with different time phase differences are generated at the two ends of the three piezoelectric bimorphs, so that the three driving feet generate forward elliptical motion, the driving surface running tracks of the three driving feet are completely consistent with the driving directions, only the time phase differences exist, and under the synergistic effect of the three driving feet, the rotor obtains continuous forward direction output torque;
b) If the rotor needs to be driven to rotate reversely:
inputting voltages with the same signal amplitude and frequency and different phases to the 1 st to 6 th piezoelectric bimorphsSignal wave u 1 、u 2 、u 3 、u 4 、u 5 、u 6 ,u 6 、u 5 、u 4 、u 3 、u 2 、u 1 The electric signals of the three piezoelectric bimorphs are sequentially different by 60 degrees, longitudinal stretching forces with different time phase differences are generated at the two ends of the three piezoelectric bimorphs, so that the three driving feet generate reverse elliptical motions, the running tracks of the driving surfaces of the three driving feet are completely consistent with the driving directions, only the time phase differences exist, and the rotor obtains continuous reverse direction output torque under the synergistic effect of the three driving feet.
CN202310251937.5A 2023-03-16 2023-03-16 Hollow rotary piezoelectric motor based on six-phase drive and working method thereof Pending CN116191931A (en)

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