CN116186308A - Electrical cabinet design method, system, computer readable storage medium and electronic equipment - Google Patents
Electrical cabinet design method, system, computer readable storage medium and electronic equipment Download PDFInfo
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- CN116186308A CN116186308A CN202111435885.4A CN202111435885A CN116186308A CN 116186308 A CN116186308 A CN 116186308A CN 202111435885 A CN202111435885 A CN 202111435885A CN 116186308 A CN116186308 A CN 116186308A
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- G06F16/50—Information retrieval; Database structures therefor; File system structures therefor of still image data
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- G06F16/50—Information retrieval; Database structures therefor; File system structures therefor of still image data
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- G06F16/50—Information retrieval; Database structures therefor; File system structures therefor of still image data
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/20—Design optimisation, verification or simulation
Abstract
A design method of an electrical cabinet comprises an electrical cabinet module, a branch module and a station module, configuration information is selected from a total database through a visual interface to be input, a matching module determines the corresponding relation between each device and the slot position of each device according to the configuration information, electrical parameters of the configuration information are obtained, a plurality of types of devices are matched according to the electrical parameters, and a result output module generates an electrical cabinet design diagram assembled with devices meeting the requirements of a semiconductor system. According to the invention, the design of the electric cabinet is divided into three parts, namely the electric cabinet module, the station module and the branch module by adopting a modularization method, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction between project managers and electric engineers is ensured, the design flow is optimized, and the design efficiency is improved.
Description
Technical Field
The invention relates to an electrical cabinet design method, an electrical cabinet design system, a computer readable storage medium and electronic equipment.
Background
In a semiconductor system, an electrical cabinet is used for controlling components in each reaction cavity of each semiconductor device to operate, the semiconductor devices are configured in various ways, the required electrical cabinets are different, project managers generally hold conferences according to different customer requirements to convey configuration information to engineers, and the engineers are required to feed back matched electrical cabinet information on time. And checking the product configuration requirement by an electrical engineer, determining whether a corresponding matched electrical cabinet exists according to the existing electrical cabinet configuration, if no matching item exists, carrying out schematic diagram design and device list arrangement according to the product configuration, and then purchasing and producing by other departments according to the schematic diagram design and device list arrangement.
The current electrical cabinet configuration process has the following disadvantages:
1. the flow is complex and the uncertainty is large. Project manager conveys customer configuration information, and electrical engineers query and match existing electrical cabinets or make new designs according to the customer configuration information, and understand that certain uncertainty exists because of completely manual operation and understanding to be different from person to person.
2. And (3) material dispersion: the electrical engineer determines whether there is a matching electrical cabinet according to the product requirements. The uncertainty of manual matching leads to numerous material numbers of the electrical cabinet, and the universality and the planeness of the electrical cabinet are poor.
3. The drawing formats are not uniform. Different projects and design styles of the electrical cabinet are different from person to person, and the readability is poor.
The statements herein merely provide background information related to the present disclosure and may not necessarily constitute prior art.
Disclosure of Invention
The invention aims to provide a method and a system for designing an electrical cabinet, which realize automatic and rapid design of the electrical cabinet, ensure timely and accurate information interaction between project managers and electrical engineers, optimize design flow and improve design efficiency.
In order to achieve the above object, the present invention provides a method for designing an electrical cabinet for assembling an electrical cabinet of a semiconductor system, the electrical cabinet including a plurality of slots for assemblable devices, comprising the steps of:
each electric cabinet corresponds to one electric cabinet module, each electric cabinet module comprises a plurality of station modules, each station module comprises a plurality of branch modules, and each slot corresponds to one branch module;
inputting configuration information of the semiconductor system;
determining the corresponding relation between each device and each slot according to configuration information, and acquiring electrical parameters of the configuration information;
matching a plurality of models of the devices according to the electrical parameters;
generating a design drawing of the electrical cabinet assembled with devices meeting the requirements of the semiconductor system.
The electrical cabinet design method further comprises the following steps:
forming a product information base from the types of the products mounted on the semiconductor system and the types of the products, forming a station information base from the reaction cavity type of each product and the position of the product on the semiconductor system, and forming an equipment information base from the equipment type and the equipment model required by each type of product;
the step of inputting configuration information of the semiconductor system includes: and selecting the product type and the product model, the reaction cavity type and the product position, and the equipment type and the equipment model of the semiconductor system from the product information base, the station information base and the equipment information base.
The step of inputting configuration information of the semiconductor system further includes:
when the product type is selected from the product information base, the range of selectable product models is narrowed down to correspond to the selected product type;
when the product type is selected from the product information base, the range of selectable device types is narrowed down to correspond to the selected product type;
when the device type is selected from the device information library, the range of selectable device models is narrowed down to correspond to the selected device type.
The product type at least comprises etching equipment, deposition equipment and polishing equipment; the reaction cavity type comprises a single cavity and a double cavity; the equipment type at least comprises a plasma generator, a radio frequency generator, a heat exchanger, a vacuum pump and a reaction cavity alternating current distribution box.
The electric cabinet module comprises 2 station modules, the number of the branch modules is 32, and each station module comprises 16 branch modules.
Each of the station modules corresponds to one or more reaction chambers on the semiconductor system.
The step of determining the corresponding relation between each device and each slot according to the configuration information comprises the following steps: and determining the position of the electric cabinet module after the product type is selected from the product information base, determining the position of the station module after the reaction cavity type is selected from the station information base, and determining the position of the branch module after the equipment type is selected from the equipment information base.
The equipment information base also comprises equipment electrical parameters, wherein the electrical parameters reflect normal working conditions of the equipment, and each equipment model corresponds to a group of equipment electrical parameters;
the step of obtaining the electrical parameter of the configuration information further comprises: after the equipment model is selected, the electrical parameters corresponding to the equipment model are automatically acquired.
The electrical cabinet design method further comprises the following steps: forming a parameter range library for each working condition applicable to the device;
the step of matching the model numbers of the plurality of devices according to the electrical parameters comprises the following steps: and comparing the electrical parameters corresponding to the selected equipment model with the working conditions of the devices in the parameter range library, and determining the devices corresponding to the working conditions as matching when the electrical parameters are in the working condition range.
The parameter range library further comprises the device model, and the electrical cabinet design drawing comprises: electrical cabinet appearance and device model.
The electrical cabinet design method further comprises the following steps: and (3) establishing an electrical cabinet information base, wherein the electrical cabinet information base contains a plurality of electrical cabinet models with electrical cabinet appearance and device model information, comparing the electrical cabinet design drawing with the electrical cabinet models in the database, acquiring corresponding electrical cabinet models if the electrical cabinet design drawing is the same, and establishing corresponding new electrical cabinet models in the electrical cabinet information base if the electrical cabinet design drawing is different.
The device includes a circuit breaker, a connector, and a wire.
The electrical cabinet design drawing also comprises a nameplate of the device, wherein the nameplate comprises a number and an action instruction;
the electrical cabinet design method further comprises the following steps: and determining the number according to the type of the device and the specific position of the device in the slot position, selecting the position of the product on a semiconductor system from the station information base, and determining the action description after selecting the equipment type from the equipment information base.
The electrical cabinet design method further comprises the step of generating a project variable summary table, wherein the project variable summary table comprises variables which correspond to the product information base, the station information base and the equipment information base and can be edited by a user.
The invention also provides a regulator cubicle design system for realizing the regulator cubicle design method, which is used for the regulator cubicle assembly of a semiconductor system, wherein the regulator cubicle comprises a plurality of slots capable of assembling devices, and the regulator cubicle design system comprises:
the system comprises a semiconductor system, a total database, a station information base and a device information base, wherein the product information base comprises types of products mounted on the semiconductor system and models of the products, the station information base comprises a reaction cavity type of each product and a position of the product on the semiconductor system, and the device information base comprises a device type and a device model required by each type of product;
a visual interface for selecting information retrieved from the total database to input configuration information of the semiconductor system;
the matching module is used for establishing a specific position of each device at the slot position according to the configuration information, acquiring electrical parameters of the configuration information and matching the types of a plurality of devices according to the electrical parameters;
and the result output module is used for generating an electrical cabinet design diagram assembled with devices meeting the requirements of the semiconductor system.
The result output module is cartographic software.
The equipment information base also comprises equipment electrical parameters, wherein the electrical parameters reflect normal working conditions of the equipment, and each equipment model corresponds to a group of equipment electrical parameters.
The total database also stores a parameter range library containing the operating conditions that each of the devices may be adapted to.
The parameter range library also contains the device model.
The electrical cabinet appearance diagram comprises an electrical cabinet appearance and a device model.
The electrical cabinet appearance diagram further comprises a nameplate of the device.
The total database also stores a regulator cubicle information base which contains a plurality of regulator cubicle models with information on the appearance and the model of the device of the regulator cubicle.
The total database also stores an item variable summary table containing variables which correspond to the product information base, the station information base and the equipment information base and are available for editing by a user.
The invention also provides a computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements the electrical cabinet design method.
The invention also provides an electronic device comprising a processor and the computer readable storage medium, wherein the computer readable storage medium is stored with a computer program, and the method for designing the electrical cabinet is realized when the computer program is executed by the processor.
According to the invention, the design of the electric cabinet is divided into three parts, namely the electric cabinet module, the station module and the branch module by adopting a modularization method, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction between project managers and electric engineers is ensured, the design flow is optimized, and the design efficiency is improved.
Drawings
Fig. 1 is a schematic block diagram of an electrical cabinet according to an embodiment of the present invention.
FIGS. 2 and 3 are station diagrams of reaction chambers in various embodiments of the present invention.
FIG. 4 is a station diagram of a reaction chamber in another embodiment of the invention.
Detailed Description
The following describes a preferred embodiment of the present invention with reference to fig. 1 to 4.
The semiconductor products required for manufacturing a silicon wafer are approximately ten in types, namely a single crystal furnace, a gas phase epitaxial furnace, an oxidation furnace, a magnetron sputtering table, a chemical mechanical polishing machine, a photoetching machine, an ion implanter, a wire bonding machine, a wafer dicing machine and a wafer thinning machine, and the semiconductor products form a semiconductor system. The auxiliary equipment to be matched for different semiconductor products is also different, for example, for chemical vapor deposition products, a heater, a vacuum pump, a reaction chamber alternating current distribution box and the like are required to be equipped, for plasma etching products, a plasma generator, a vacuum pump, a heat exchanger, a radio frequency generator, a reaction chamber alternating current distribution box and the like are required to be equipped, all auxiliary equipment is required to be electrically controlled, for example, the pressure of the vacuum pump is regulated, the radio frequency power of the radio frequency generator is selected, the opening and closing and the flow of a gas circuit are controlled, and the like, and all electric parts for controlling all auxiliary equipment are placed in an electric cabinet for unified management and control.
The electrical cabinet has a plurality of slots, each of which can be fitted with a device comprising a circuit breaker or a connector, the circuit breaker and the connector being connected to the auxiliary equipment by wires. In one embodiment of the present invention, as shown in fig. 1, there is provided a method for designing electrical cabinets, wherein each slot is corresponding to one branch module 3, each electrical cabinet is corresponding to one electrical cabinet module 1, each electrical cabinet module 1 comprises a plurality of station modules 2, and each station module 2 comprises a plurality of branch modules 3. Forming a product information base from the types of the products and the types of the products mounted in the semiconductor system, forming a station information base from the reaction cavity types of each product and the positions of the products on the semiconductor system, forming a device information base from the equipment types, the equipment types and the equipment electrical parameters required by each type of product, forming a parameter range base from the working conditions and the device types applicable to each device, and storing the product information base, the station information base, the equipment information base and the parameter range base in a total database. The product types include all semiconductor products required in the wafer manufacturing process, and besides common etching equipment, deposition equipment, polishing equipment, single crystal furnaces, oxidizing furnaces, wire bonding machines, wafer dicing machines, wafer thinning machines, and the like. The semiconductor products produced by different semiconductor equipment manufacturers have different product types, and the proper product types can be selected according to actual requirements. The reaction cavity type comprises a single cavity and a double cavity, the reaction cavity is arranged around the transmission cavity, one side position of the transmission cavity is reserved for wafers to come in and go out, and the reaction cavity of the semiconductor product can be arranged at the other three side positions. If the reaction chamber is a dual chamber as shown in fig. 2, three reaction chambers PMA, PMB and PMC may be placed around the transfer chamber TM, whereas if the reaction chamber is a single chamber, six reaction chambers may be placed around the transfer chamber TM, two reaction chambers side by side each side, PMA1 and PMA2 on the left, PMB1 and PMB2 on the upper side, and PMC1 and PMC2 on the right, as shown in fig. 3. The equipment types include auxiliary equipment required to be matched for all semiconductor products in the semiconductor system, such as plasma generators, radio frequency generators, heat exchangers, vacuum pumps, reaction chamber ac distribution boxes, and the like. Auxiliary equipment produced by different semiconductor equipment manufacturers has different equipment models, and proper equipment models can be selected according to actual requirements. The electrical parameters reflect normal operating conditions of the auxiliary equipment, and each equipment model corresponds to a set of equipment electrical parameters, for example, the electrical parameters of the plasma generator at least comprise current values, frequencies, power values and the like. The product type, the product model, the reaction chamber type, the product position, the equipment type and the equipment model form configuration information of the semiconductor system, required information is selected from the total database through a visual interface to be input into the configuration information of the semiconductor system, the product type and the product model of the semiconductor system are selected from the product information base, the reaction chamber type and the product position of the semiconductor system are selected from the station information base, and the equipment type and the equipment model of the semiconductor system are selected from the equipment information base. The product type and the product type, the equipment type and the equipment type have a corresponding and associated relation, namely, when a certain product type is selected from a product information base, the range of the selectable product type is reduced to correspond to the selected product type, meanwhile, the range of the selectable equipment type is also reduced to correspond to the selected product type, for example, when the product type is a plasma etching equipment, the product type can only be selected from the types of the plasma etching equipment, the type of the deposition equipment or the type of the polishing equipment can not be selected any more, meanwhile, the equipment type can only be selected from the auxiliary equipment of the plasma etching equipment, the auxiliary equipment of the deposition equipment or the polishing equipment can not be selected, and similarly, when a certain equipment type is selected from the equipment information base, the range of the selectable equipment type is reduced to correspond to the selected equipment type, for example, when the equipment type of the plasma etching equipment is a plasma generator, the equipment type can only be selected from the types of the plasma generator. Because the product type has a corresponding matching relationship with the product model and the equipment type, the equipment type has a corresponding matching relationship with the equipment model, the correctness of the selected configuration information can be ensured, and the time spent for selecting the configuration information is saved. And establishing a specific position of each device at the slot position according to the input configuration information through a matching module, acquiring electrical parameters of the configuration information, and matching the types of a plurality of devices according to the electrical parameters. After the product type is selected from the product information base, the position of the electric cabinet module is determined, for example, after the plasma etching equipment is selected, the electric cabinet module with more station modules and branch modules can be automatically matched for the plasma etching equipment because more auxiliary equipment are needed for the plasma etching equipment. After the reaction chamber type is selected from the station information base, the position of the station module is determined, for example, a single-chamber plasma etching device is selected, one station module can be shared with single-chamber reaction chambers of other plasma etching devices, and if a double-chamber plasma etching device is selected, one station module can be used independently. And after the equipment type is selected from the equipment information base, determining the position of the branch module, and after the equipment type is selected, determining the number of the circuit breakers and the connectors required to be used by the equipment, so that the number and the positions of the slots occupied by the circuit breakers and the connectors can be automatically matched, and the position and the number of the branch module are determined. And according to the selected equipment model in the input configuration information, the matching module automatically acquires the electrical parameters corresponding to the equipment model. And the matching module compares the electrical parameters corresponding to the selected equipment model with the working conditions of the devices in the parameter range library, determines the devices corresponding to the working conditions as matching when the electrical parameters corresponding to the selected equipment model fall within the working condition range which can be used by a certain device, and acquires the model of the selected device from the parameter range library. For example, a type B plasma generator is selected, the current value in the electrical parameter is 25A, the rated current of a type C circuit breaker is 30A in the parameter range library, and the proper protection range of the circuit breaker is 24-30A according to the related specification of the semiconductor device, i.e. the circuit breaker can protect the type B plasma generator, and then the type C circuit breaker is selected as a matched circuit breaker of the type B plasma generator. The model numbers of all the devices and the positions of the devices are selected so far, the positions and the number of the electric cabinet modules, the station modules and the branch modules are all determined, and an electric cabinet design diagram assembled with the devices meeting the requirements of the semiconductor system is generated through the result output module, wherein the electric cabinet design diagram comprises the electric cabinet appearance consisting of the electric cabinet modules, the station modules and the branch modules and the model numbers of the devices filled in each branch module. According to the invention, the design of the electric cabinet is divided into three parts, namely the electric cabinet module, the station module and the branch module by adopting a modularization method, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction is ensured, the design flow is optimized, and the design efficiency is improved.
In this embodiment, there is further provided an electrical cabinet design system, including a total database, a visual interface, a matching module and a result output module, where the total database is used to store a product information base, a station information base, an equipment information base and a parameter range base, the visual interface is used to select information called from the total database to input configuration information of the semiconductor system, the matching module is used to establish a specific position of each device at the slot according to the configuration information, obtain electrical parameters of the configuration information, and match models of a plurality of devices according to the electrical parameters, and the result output module is used to generate an electrical cabinet design drawing in which devices meeting the requirements of the semiconductor system are assembled. In this embodiment, the result output module is cartographic software. According to the invention, the design of the electric cabinet is divided into three parts, namely the electric cabinet module, the station module and the branch module by adopting a modularization method, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction is ensured, the design flow is optimized, and the design efficiency is improved.
In another embodiment of the present invention, after the electrical cabinet design drawing is generated, an electrical cabinet appearance, a device model, and an electrical cabinet model corresponding to the electrical cabinet appearance and the device model are formed into an electrical cabinet information base, the electrical cabinet information base is stored in the total database, after a new electrical cabinet design drawing is generated at the result output module each time, the electrical cabinet design drawing and the electrical cabinet appearance and the device model in the electrical cabinet information base are compared, if the electrical cabinet design drawing and the electrical cabinet design drawing are the same, the corresponding electrical cabinet model is obtained, and the electrical cabinet model is directly sent to a purchasing department for purchasing, so that the design efficiency is further improved, the universality of the electrical cabinet is improved, if the electrical cabinet model is different, a new electrical cabinet model corresponding to the new electrical cabinet design drawing is built in the electrical cabinet information base, the data volume of the electrical cabinet information base is expanded, the universality of the electrical cabinet is improved, and the efficiency of the subsequent design is improved.
In this embodiment, the total number library of the electrical cabinet design system further stores an electrical cabinet information library containing a plurality of electrical cabinet models having electrical cabinet appearance and device model information.
According to the embodiment, a modularization method is adopted, the design of the electric cabinet is divided into three parts, namely an electric cabinet module, a station module and a branch module, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction is ensured, the design flow is optimized, and the design efficiency is improved.
In another embodiment of the invention, in order to facilitate marking the devices in the electrical cabinet, a nameplate is added to each device, the nameplate containing the number and description of the operation. The number represents the type of the device and the position of the device, and the position of the device refers to the slot position of the device, namely the serial number of the branch module corresponding to the slot position. The description of the action contains two parts of content, one is the type of device and the other is the product location. The type and the type of the device, the type and the product position of equipment served by the device can be known at a glance according to the nameplate of the device, and the readability of the design drawing of the electrical cabinet is enhanced.
In another embodiment of the present invention, the variables corresponding to the product information base, the station information base and the equipment information base, which can be edited by the user, are further formed into a project variable summary table, and the project variable summary table is stored in a total number base.
In this embodiment, a project variable summary table is further stored in the total number library of the electrical cabinet design system, where the project variable summary table includes variables which correspond to the product information library, the station information library, and the equipment information library and are available for editing by a user.
According to the embodiment, a modularization method is adopted, the design of the electric cabinet is divided into three parts, namely an electric cabinet module, a station module and a branch module, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction is ensured, the design flow is optimized, and the design efficiency is improved.
In another embodiment of the present invention, each slot position corresponds to one branching module, each electrical cabinet corresponds to one electrical cabinet module, so that each electrical cabinet module comprises 2 station modules, each station module comprises 16 branching modules, and then the whole electrical cabinet module has 32 branching modules in total, each station module can correspond to one or more reaction chambers, that is, the branching modules in each station module are used for matching and installing not only devices from auxiliary devices corresponding to the same reaction chamber, but also devices from auxiliary devices corresponding to multiple reaction chambers. And selecting the product type from the product information base as plasma etching equipment, and then selecting the product type of the plasma etching equipment. And selecting the type of the reaction cavity and the position of the product from the station information base, wherein as shown in fig. 4, a single-cavity reaction cavity PMA of the plasma etching equipment is arranged at the left side position of the transmission cavity TM, a single-cavity reaction cavity PMC of the plasma etching equipment is also arranged at the right side of the transmission cavity TM, and double-cavity reaction cavities PMB1 and PMB2 of the plasma etching equipment are arranged at the upper side position of the transmission cavity TM. And selecting the equipment type and the equipment model of auxiliary equipment required by the plasma etching equipment from the equipment information base. After the product type, the product model, the reaction chamber type, the product position, the equipment type and the equipment model are all selected and input, the electric cabinet module, the station module and the branch module matched with the electric cabinet module, the station module and the branch module are also automatically matched and determined, in the embodiment, the branch module in one station module can not be filled by a filling circuit breaker or a connector for the etching product with a single chamber on the left side, a single chamber on the right side and a double chamber on the upper side, and the branch module in the other station module needs to be filled by the circuit breaker or the connector, namely, each station module is provided with a reasonable upper limit of devices which can be accommodated, and in actual use, the idle branch module can be allowed. According to the selected equipment model in the input configuration information, automatically acquiring the electrical parameters corresponding to the equipment model, comparing the electrical parameters corresponding to the selected equipment model with the working conditions of devices in a parameter range library, determining the devices corresponding to the working conditions as matching when the electrical parameters corresponding to the selected equipment model fall within the working condition range which can be used by a certain device, and acquiring the model of the selected device from the parameter range library. And a nameplate is additionally arranged for each device, the nameplate number represents the type of the device and the position of the device, and the nameplate function description indicates the type of equipment and the position of the product. After the electrical cabinet design diagram is generated, comparing the electrical cabinet appearance and the device model in the electrical cabinet design diagram and the electrical cabinet information base, if the electrical cabinet appearance and the device model are the same, acquiring the corresponding electrical cabinet model, directly sending the electrical cabinet model to a purchasing department for purchasing, and if the electrical cabinet model is different, establishing a new electrical cabinet model corresponding to the new electrical cabinet design diagram in the electrical cabinet information base. According to the embodiment, a modularization method is adopted, the design of the electric cabinet is divided into three parts, namely an electric cabinet module, a station module and a branch module, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction is ensured, the design flow is optimized, and the design efficiency is improved.
In another embodiment of the present invention, there is also provided an electronic device including a processor and a computer-readable storage medium having a computer program stored thereon, the computer program, when executed by the processor, implementing the electrical cabinet design method. In this embodiment, the electronic device may be a terminal device such as a computer, a smart phone, or a PAD.
According to the invention, the design of the electric cabinet is divided into three parts, namely the electric cabinet module, the station module and the branch module by adopting a modularization method, and the database is utilized for searching and matching, so that the automatic and rapid design of the electric cabinet is realized, the timely and accurate information interaction is ensured, the design flow is optimized, and the design efficiency is improved.
It should be noted that, in the embodiments of the present invention, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments, and do not indicate or imply that the apparatus or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
While the present invention has been described in detail through the foregoing description of the preferred embodiment, it should be understood that the foregoing description is not to be considered as limiting the invention. Many modifications and substitutions of the present invention will become apparent to those of ordinary skill in the art upon reading the foregoing. Accordingly, the scope of the invention should be limited only by the attached claims.
Claims (25)
1. A method of designing an electrical cabinet for use in the assembly of an electrical cabinet for a semiconductor system, the electrical cabinet including a plurality of slots for a plurality of assemblable components, comprising the steps of:
each electric cabinet corresponds to one electric cabinet module, each electric cabinet module comprises a plurality of station modules, each station module comprises a plurality of branch modules, and each slot corresponds to one branch module;
inputting configuration information of the semiconductor system;
determining the corresponding relation between each device and each slot according to configuration information, and acquiring electrical parameters of the configuration information;
matching a plurality of models of the devices according to the electrical parameters;
generating a design drawing of the electrical cabinet assembled with devices meeting the requirements of the semiconductor system.
2. The electrical cabinet design method according to claim 1, further comprising the steps of:
forming a product information base from the types of the products mounted on the semiconductor system and the types of the products, forming a station information base from the reaction cavity type of each product and the position of the product on the semiconductor system, and forming an equipment information base from the equipment type and the equipment model required by each type of product;
the step of inputting configuration information of the semiconductor system includes: and selecting the product type and the product model, the reaction cavity type and the product position, and the equipment type and the equipment model of the semiconductor system from the product information base, the station information base and the equipment information base.
3. The electrical cabinet design method according to claim 2, wherein the step of inputting configuration information of the semiconductor system further comprises:
when the product type is selected from the product information base, the range of selectable product models is narrowed down to correspond to the selected product type;
when the product type is selected from the product information base, the range of selectable device types is narrowed down to correspond to the selected product type;
when the device type is selected from the device information library, the range of selectable device models is narrowed down to correspond to the selected device type.
4. The electrical cabinet design method according to claim 2, wherein the product type comprises at least an etching apparatus, a deposition apparatus, a polishing apparatus; the reaction cavity type comprises a single cavity and a double cavity; the equipment type at least comprises a plasma generator, a radio frequency generator, a heat exchanger, a vacuum pump and a reaction cavity alternating current distribution box.
5. The electrical cabinet design method according to claim 2, wherein the electrical cabinet module comprises 2 of the station modules, the number of the branch modules is 32, and each of the station modules comprises 16 of the branch modules.
6. The electrical cabinet design method of claim 5, wherein each of the station modules corresponds to one or more reaction chambers on the semiconductor system.
7. The electrical cabinet design method according to claim 2, wherein the step of determining the correspondence of each of the devices to each of the slots according to the configuration information comprises: and determining the position of the electric cabinet module after the product type is selected from the product information base, determining the position of the station module after the reaction cavity type is selected from the station information base, and determining the position of the branch module after the equipment type is selected from the equipment information base.
8. The electrical cabinet design method according to claim 2, wherein the equipment information base further comprises equipment electrical parameters, the electrical parameters reflecting normal operating conditions of the equipment, each equipment model corresponding to a set of equipment electrical parameters;
the step of obtaining the electrical parameter of the configuration information further comprises: after the equipment model is selected, the electrical parameters corresponding to the equipment model are automatically acquired.
9. The electrical cabinet design method according to claim 8, further comprising the steps of: forming a parameter range library for each working condition applicable to the device;
the step of matching the model numbers of the plurality of devices according to the electrical parameters comprises the following steps: and comparing the electrical parameters corresponding to the selected equipment model with the working conditions of the devices in the parameter range library, and determining the devices corresponding to the working conditions as matching when the electrical parameters are in the working condition range.
10. The electrical cabinet design method according to claim 9, wherein the parameter range library further comprises the device model, and the electrical cabinet design drawing comprises: electrical cabinet appearance and device model.
11. The electrical cabinet design method according to claim 10, further comprising: and (3) establishing an electrical cabinet information base, wherein the electrical cabinet information base contains a plurality of electrical cabinet models with electrical cabinet appearance and device model information, comparing the electrical cabinet design drawing with the electrical cabinet models in the database, acquiring corresponding electrical cabinet models if the electrical cabinet design drawing is the same, and establishing corresponding new electrical cabinet models in the electrical cabinet information base if the electrical cabinet design drawing is different.
12. The electrical cabinet design method of claim 9, wherein the device comprises a circuit breaker, a connector, and a wire.
13. The electrical cabinet design method according to claim 2, wherein the electrical cabinet design drawing further comprises a nameplate of the device, the nameplate comprising a number and an action description;
the electrical cabinet design method further comprises the following steps: and determining the number according to the type of the device and the specific position of the device in the slot position, selecting the position of the product on a semiconductor system from the station information base, and determining the action description after selecting the equipment type from the equipment information base.
14. The electrical cabinet design method of claim 1, further comprising generating an item variable summary table comprising user-editable variables corresponding to the product, station, and equipment information bases.
15. A cabinet design system for implementing the cabinet design method of any one of claims 1-14 for cabinet assembly of a semiconductor system, the cabinet comprising a plurality of slots for assemblable components, the cabinet design system comprising:
the system comprises a semiconductor system, a total database, a station information base and a device information base, wherein the product information base comprises types of products mounted on the semiconductor system and models of the products, the station information base comprises a reaction cavity type of each product and a position of the product on the semiconductor system, and the device information base comprises a device type and a device model required by each type of product;
a visual interface for selecting information retrieved from the total database to input configuration information of the semiconductor system;
the matching module is used for establishing a specific position of each device at the slot position according to the configuration information, acquiring electrical parameters of the configuration information and matching the types of a plurality of devices according to the electrical parameters;
and the result output module is used for generating an electrical cabinet design diagram assembled with devices meeting the requirements of the semiconductor system.
16. The electrical cabinet design system of claim 15, wherein the resultant output module is cartographic software.
17. The electrical cabinet design system of claim 15, wherein the equipment information library further comprises equipment electrical parameters that reflect normal operating conditions of the equipment, each of the equipment models corresponding to a set of equipment electrical parameters.
18. The electrical cabinet design system of claim 15, wherein the total database further stores a parameter range library containing operating conditions for which each of the devices may be adapted.
19. The electrical cabinet design system of claim 18, wherein the parameter range library further comprises the device model number.
20. The electrical cabinet design system of claim 15, wherein the electrical cabinet appearance map comprises an electrical cabinet appearance and a device model.
21. The electrical cabinet design system of claim 20, wherein the electrical cabinet appearance map further comprises a nameplate of the device.
22. The electrical cabinet design system of claim 15, wherein the total database further stores an electrical cabinet information library containing a plurality of electrical cabinet models having electrical cabinet appearance and device model information.
23. The electrical cabinet design system of claim 15, wherein the total database further stores an item variable summary table containing user-editable variables corresponding to the product, station, and equipment information bases.
24. A computer-readable storage medium, on which a computer program is stored, characterized in that the computer program, when executed by a processor, implements the electrical cabinet design method according to any one of claims 1 to 14.
25. An electronic device comprising a processor and the computer-readable storage medium of claim 24, having a computer program stored thereon, which when executed by the processor, implements the electrical cabinet design method of any one of claims 1-14.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111435885.4A CN116186308A (en) | 2021-11-29 | 2021-11-29 | Electrical cabinet design method, system, computer readable storage medium and electronic equipment |
| TW111136063A TWI830401B (en) | 2021-11-29 | 2022-09-23 | Electrical cabinet design methods, systems, computer-readable storage media and electronic equipment |
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| CN202111435885.4A CN116186308A (en) | 2021-11-29 | 2021-11-29 | Electrical cabinet design method, system, computer readable storage medium and electronic equipment |
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| TWI311262B (en) * | 2006-04-07 | 2009-06-21 | Hon Hai Prec Ind Co Ltd | System and method for replacing structure |
| TWI501591B (en) * | 2011-09-07 | 2015-09-21 | Chunghwa Telecom Co Ltd | Mechanical equipment room monitoring system |
| CN102915403B (en) * | 2012-09-20 | 2015-12-09 | 株洲南车时代电气股份有限公司 | A kind of computer platform device parameter visualized graphs editor collocation method |
| US9268730B2 (en) * | 2013-02-28 | 2016-02-23 | Oracle International Corporation | Computing rack-based virtual backplane for field replaceable units |
| US9474181B2 (en) * | 2013-12-23 | 2016-10-18 | Dell Products, L.P. | Combined power and management module for use in a rack-configured information handling system |
| CN108388753B (en) * | 2018-03-22 | 2022-02-22 | 杭州和利时自动化有限公司 | Method, device and system for designing SIS cabinet wiring and storage medium |
| CN111177839B (en) * | 2019-12-31 | 2023-08-29 | 河南垂天科技有限公司 | Automatic converging machine room equipment layout system and generating method |
| CN111475970B (en) * | 2020-05-15 | 2024-02-02 | 中国电子科技集团公司第十四研究所 | Structural model deriving system and method |
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