CN116184698A - Multichannel acousto-optic modulation device and method - Google Patents
Multichannel acousto-optic modulation device and method Download PDFInfo
- Publication number
- CN116184698A CN116184698A CN202211658798.XA CN202211658798A CN116184698A CN 116184698 A CN116184698 A CN 116184698A CN 202211658798 A CN202211658798 A CN 202211658798A CN 116184698 A CN116184698 A CN 116184698A
- Authority
- CN
- China
- Prior art keywords
- light
- acousto
- optic modulation
- optic
- splitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/125—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves in an optical waveguide structure
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a multichannel acousto-optic modulation device and a multichannel acousto-optic modulation method, which belong to the field of laser technology application and comprise a laser light source, a light splitting unit, a collimator and an optical fiber acousto-optic modulation system, wherein an optical signal generated by the laser light source outputs a facula through the collimator, and then enters the light splitting unit for splitting and then outputs multiple paths of evenly-split light beams which are respectively coupled to the optical fiber acousto-optic modulation systems through the collimator. The device and the method of the invention lead the output light beam interval of each channel to be large, the duty ratio to be small, greatly reduce the light crosstalk on the basis of realizing the high-efficiency modulation of the amplitude and the phase of the laser of each channel, have the characteristics of full polarization state light splitting, no additional phase difference and low polarization related loss, can realize the rapid parallel processing of the tasks with high complexity and large calculation amount, and meet the requirements of high-end fields such as laser direct writing lithography, quantum computation and the like.
Description
Technical Field
The application relates to a multichannel acousto-optic modulation device and a multichannel acousto-optic modulation method, and belongs to the field of laser technology application.
Background
The multichannel acousto-optic modulation device is a multichannel parallel light modulation device, and the basic principle is that a plurality of mutually independent electrodes are manufactured on an acousto-optic medium, independent driving signals are input, multichannel parallel ultrasonic signals are formed in the acousto-optic medium through a piezoelectric transducer, and on the basis of not lower than the performance of a single-channel acousto-optic modulator, the multichannel acousto-optic modulation device supports simultaneous or independent work of multiple light beams, has high-speed parallel processing capability, and can effectively improve the processing capability of signals. Applications commonly used for laser fine scanning, multi-laser parallel processing, etc., such as: laser direct writing lithography, laser color printers, multichannel acousto-optic spectrometers, micromachining, and photonic computers.
The principle of operation of the multi-channel acousto-optic modulator is the same as that of a typical acousto-optic modulator, but it is fabricated using an array of electrodes on a transducer substrate so that parallel array beams can be simultaneously controlled. A different acoustic wave diffracts each input beam separately to modulate its intensity or deflect a portion of the beam into a first order mode. As the number of channels in a single device increases, so does the crosstalk. There is electrical crosstalk in both the electrical circuit and the electrodes, as well as acoustic crosstalk between the various modulation channels. Thermal crosstalk can also occur when channels are open, creating thermal strain in adjacent channels, changing the acousto-optic effect.
Such as CN112147802a, the technology discloses a multipath parallel signal modulation device. The device comprises a laser light source, an optical fiber coupler, an optical fiber collimator and an acousto-optic modulation system. The acousto-optic modulation system includes an acousto-optic modulator and a radio frequency drive. After the laser source signal is equally divided into N paths of optical signals through the optical fiber coupler, the optical path shaping and collimation are carried out through collimators on all channels, and finally the N paths of parallel modulation signal output can be obtained under the control of the acousto-optic modulator. The optical fiber coupler adopted by the technology is mainly suitable for optical communication wave bands, such as 1310 nm or 1550nm, but the optical fiber coupler cannot be applied to short-wave band lasers, such as 266nm,397nm and the like.
Based on the above, we propose a multi-channel acousto-optic modulation device and method.
Disclosure of Invention
In order to solve the problem that the prior multi-channel acousto-optic modulation device cannot be applied to short-band lasers in the background art, the device and the method for multi-channel acousto-optic modulation are provided, and the device and the method greatly reduce optical crosstalk on the basis of realizing high-efficiency modulation of the amplitude and the phase of each channel of laser.
In a first aspect, the application provides a multichannel acousto-optic modulation device, including laser light source, beam splitting unit, collimator and optic fibre acousto-optic modulation system, the optical signal that the laser light source produced outputs the facula through the collimator, reentrant beam splitting unit beam splitting back output multichannel evenly equally divides the light beam respectively through the collimator coupling to each optic fibre acousto-optic modulation system.
Optionally, the light splitting unit is a light splitting unit for forming corresponding polarization state requirements according to a multi-medium film multi-beam interference principle, and comprises a light splitting sheet and a total reflection mirror.
Optionally, the light splitting unit includes a first light splitting sheet and a second light splitting sheet with different transmittance and reflectance, and a total reflection mirror.
Preferably, the ratio of the transmittance to the reflectance of the first light-splitting sheet and the second light-splitting sheet is 1:1 and 1:2, respectively.
Optionally, after the output light spot of the collimator passes through one of the first light splitting sheets, the projected light path forms an upper layer light path, and the refracted light path forms a lower layer light path.
Optionally, the light splitting unit includes at an upper layer: the second light splitting sheet, the two first light splitting sheets and the total reflection mirror are sequentially arranged along the direction of the collimator;
one total reflection mirror, four first light splitting sheets and one total reflection mirror which are sequentially arranged;
one total reflection mirror, one first light splitting sheet, one total reflection mirror and two first light splitting sheets which are sequentially arranged;
and one of the total reflection mirrors and the first light splitting sheet are sequentially arranged to form an upper-layer light path, and twelve light paths are equally divided to the respective optical fiber acousto-optic modulation systems;
the light splitting units are arranged on the lower layer and the upper layer.
Optionally, the acousto-optic modulation system comprises a fiber optic acousto-optic modulator and a radio frequency drive and a fiber optic output connected thereto.
Optionally, the fiber optic acousto-optic modulator includes a fiber optic coupler, an acousto-optic medium, and a piezoelectric transducer.
Preferably, the acousto-optic medium comprises one or more of quartz, tellurium dioxide, lead molybdate.
Optionally, the light splitting unit includes an optical glass.
Preferably, the optical glass comprises fused silica optical glass or K9 optical glass.
Optionally, the device is disposed on a substrate.
Preferably, the substrate comprises glass-ceramic.
In a second aspect, the present application further provides a multi-channel acousto-optic modulation method, including the steps of:
a laser light source is utilized to emit laser beams with any wavelength, and the laser beams output light spots through a collimator;
the light spots enter the light splitting unit for splitting, then a plurality of paths of uniform and equal-split light beams are output, and the plurality of paths of uniform and equal-split light beams are respectively coupled to the respective optical fiber acousto-optic modulation systems through collimators;
the light splitting unit is used for forming a fixed transmission reflectance light splitting unit with corresponding polarization state requirements according to a multi-medium film multi-beam interference principle at a preset incidence angle.
The beneficial effects that this application can produce include:
1) The multi-channel acousto-optic modulation device provided by the application is flexible in arrangement, can be expanded in multiple layers, has large output beam interval of each channel and small duty ratio, greatly reduces optical crosstalk on the basis of realizing high-efficiency modulation of the amplitude and the phase of each channel laser, and has the characteristics of full polarization state light splitting, no additional phase difference and low polarization correlation loss;
2) The multichannel acousto-optic modulation device provided by the application adopts optical fiber transmission, so that more channels can be further contained in a limited space, the size of a device and the like are further reduced, and the system integration is improved;
3) The multichannel acousto-optic modulation device and the multichannel acousto-optic modulation method are applicable to lasers with various wavelengths, particularly short-wave-band lasers, and the lasers after passing through the high-frequency multichannel acousto-optic modulator have different frequencies, polarization states and phases, respectively represent different data, can realize rapid parallel processing on tasks with high complexity and large calculation amount, and are important components in high-end fields such as laser direct writing photoetching, quantum calculation and the like.
Drawings
Fig. 1 is a perspective view of a multi-channel acousto-optic modulation device 24 according to an embodiment of the present application;
fig. 2 is a top view of a multi-channel acousto-optic modulation device according to an embodiment of the present application.
List of parts and reference numerals: 1. a laser light source; 2. a collimator; 3. a light splitting unit; 31. a first beam splitter; 32. a total reflection mirror; 33. a second light splitting sheet; 4. an optical fiber acousto-optic modulation system; 41. an optical fiber acousto-optic modulator; 42. a radio frequency drive; 43. and an optical fiber output end.
Detailed Description
The present application is described in detail below with reference to examples, but the present application is not limited to these examples.
Example 1
As shown in fig. 1-2, the present embodiment provides a multi-channel acousto-optic modulation device, fig. 1 is a 24-channel perspective view, and fig. 2 is a top view. The laser beam splitting device comprises a laser light source 1, a collimator 2 and a beam splitting unit 3, wherein the laser light source 1 has any wavelength, the collimator 2 is used for shaping and collimating laser beams, and the emergent laser beams enter the beam splitting unit 3 after being collimated by the collimator 2.
The light-splitting unit 3 is a light-splitting unit 3 with a fixed transmittance and reflectance (typically 1:1,1:2, 1:5) required by a corresponding polarization state (typically P-state or S-state or P+S-state) according to a multi-medium film multi-beam interference principle at certain incidence angles (which can be 45 degrees or 13.5 degrees or other specific angles to meet space arrangement and distribution), and then the light-splitting units 3 are combined according to the required light-splitting path number to obtain light splitting with any light-splitting ratio, and meanwhile high consistency of multi-path light splitting is realized. The light-splitting device has the characteristics of any multi-path light splitting, such as 16, 18, 24 paths and the like, can realize any spatial arrangement and direction, has good light splitting consistency of each path, has low additional loss of each path, can control the light splitting loss difference within 1dB, and has the characteristics of full polarization state light splitting, no additional phase difference and low polarization correlation loss. The material can be various optical glass such as fused quartz, K9 and the like according to the wavelength requirement. After passing through the beam splitting unit 3, the single-path laser generates N paths of equally divided laser beams, and each path of laser beam is coupled into the optical fiber acousto-optic modulation system 4 through the optical fiber collimator 2. In the embodiment, microcrystalline glass is used as a substrate structure of the multi-channel acousto-optic modulation device. The device has almost zero thermal expansion and excellent three-dimensional uniformity, and reduces various deformations of an acousto-optic modulation system on the premise of ensuring the reliability of an impact vibration structure.
Specifically, in the present embodiment, the light splitting unit 3 includes a first light splitting sheet 31 with a transmittance to reflectance ratio of 1:1, a second light splitting sheet 33 with a transmittance to reflectance ratio of 1:2, and a 45 degree total reflection mirror 32, the optical fiber acousto-optic modulation system 4 includes an optical fiber acousto-optic modulator 41 and a radio frequency driver 42 for modulating and outputting laser light, each path of optical signal is controlled by an independent acousto-optic modulation system 4, and an optical fiber output end 43.
Specifically, as shown in fig. 1, the arrangement of the light splitting unit 3 in the upper layer of the present embodiment includes: a second beam splitter 33, two first beam splitters 31 and a total reflection mirror 32 arranged in this order along the direction of the collimator 2;
a total reflection mirror 32, four first light splitting sheets 31 and a total reflection mirror 32 arranged in this order;
a total reflection mirror 32, a first light splitting sheet 31, a total reflection mirror 32 and two first light splitting sheets 31 which are sequentially arranged;
and a total reflection mirror 32 and a first beam splitter 31 which are sequentially arranged to form an upper layer optical path, and equally divide twelve paths of optical paths to respective optical fiber acousto-optic modulation systems 4;
the light splitting unit 3 is arranged on the lower layer and the upper layer, and equally splits twelve paths of light paths to the respective optical fiber acousto-optic modulation systems 4.
The process implemented by this embodiment is: the light signal generated by the laser light source 1 passes through the collimator 2 and then outputs a shaped and collimated light spot, and then enters the first light splitting sheet 31 with the ratio of 1:1, and the light beam is split into an upper layer light path and a lower layer light path (see fig. 1). The upper light path beam accounting for 1/2 of the total energy is divided into a transmission light beam and a reflection light beam by a second light splitter 33 with the ratio of 1:2. After each transmission light path with the energy of 1/6 of the total energy passes through two 1:1 first light splitting sheets 31 and one 45-degree total reflection mirror 32, 4 paths of evenly distributed light beams are output, and the energy is 1/24 of that of the laser light source. After each of the reflection light paths with the energy of 1/3 of the total energy passes through three 1:1 first light splitting sheets 31 and one 45-degree total reflection mirror 32, 8 paths of uniformly distributed laser are output, and the energy is 1/24 of that of the laser light source. The lower layer light path is distributed with the upper layer, and the light beam can be turned through the total reflection mirror 32 when reaching the lower layer, and the specific light path is the same as the upper layer and is not described herein.
The 24 paths of laser after passing through the beam splitting unit 3 are respectively coupled into 24 optical fiber acousto-optic modulation systems 4 through the optical fiber collimators 2. Under the control of the radio frequency driver 42, the 24 paths of optical signals realize modulation through the respective acousto-optic modulator 41. The power and angle of the modulated signals can be controlled by the respective radio frequency drive 42, so that the parallel adjustable operation of multiple channels is realized. The light-splitting unit 3 can realize arbitrary spatial arrangement and orientation, each path of light-splitting uniformity is good, different materials and coating processes are adopted according to practical application, all wavelengths can be covered, and each path of additional loss is low, the light-splitting unit has full polarization state light-splitting, no additional phase difference is generated, and the characteristics of low polarization correlation loss are achieved. The optical fiber acousto-optic modulator 41 is mainly composed of an optical fiber coupler, an acousto-optic medium (quartz, tellurium dioxide, lead molybdate, etc.) and a piezoelectric transducer. When a certain specific carrier frequency of the radio frequency drive 42 source drives the transducer, the transducer generates ultrasonic waves with the same frequency and transmits the ultrasonic waves into the acousto-optic medium, refractive index change is formed in the medium, light beams interact when passing through the medium, the propagation direction of the light is changed, diffraction is generated, the deflection direction of emergent light is changed, and the intensity of the emergent light can be controlled by adjusting the power of the radio frequency drive 42 electric signal. Each path of the equally divided optical signal is provided with an acousto-optic modulator 41 and a radio frequency driver 42 which are mutually independent, and each path of the signal can be independently controlled according to the requirement. Each path of laser beam passes through the optical fiber output 43, and the optical fiber arrangement is flexible and changeable. The whole device is compact, crosstalk does not exist among modulated optical signals, the modulation efficiency is high, and the key problems of few channels, high processing complexity, large ultraviolet film loss, serious channel crosstalk and high-speed parallel heat dissipation in the prior art are solved.
Example 2
The present embodiment provides a multi-channel acousto-optic modulation method, which can be modulated by using the modulation device in embodiment 1, and specifically includes the following steps:
a laser light source 1 is utilized to emit laser beams with any wavelength, and the laser beams output light spots through a collimator 2;
the light spots enter the light splitting unit 3 for splitting, then a plurality of paths of uniform and equal-split light beams are output, and the plurality of paths of uniform and equal-split light beams are respectively coupled to the respective optical fiber acousto-optic modulation systems 4 through the collimators 2;
the light splitting unit 3 is a light splitting unit 3 with fixed transmittance and reflectance required by corresponding polarization states, which is designed according to the multi-medium film multi-beam interference principle at a preset incidence angle.
The foregoing is merely an embodiment of the present application, and is not intended to limit the present application, but the present application is disclosed in the preferred embodiment, however, it is not intended to limit the present application, and any person skilled in the art may make some changes or modifications using the disclosed technical content and equivalents to the equivalent embodiments without departing from the scope of the technical solution of the present application.
Claims (10)
1. The multichannel acousto-optic modulation device is characterized by comprising a laser light source, a light splitting unit, a collimator and an optical fiber acousto-optic modulation system, wherein an optical signal generated by the laser light source is output by the collimator to form a light spot, and then enters the light splitting unit to split light, and then a plurality of paths of evenly and equally split light beams are output and respectively coupled to the optical fiber acousto-optic modulation systems through the collimator.
2. The multi-channel acousto-optic modulation device according to claim 1 wherein the light splitting unit is a light splitting unit for forming corresponding polarization state requirements based on multi-medium film multi-beam interference principle, and comprises a light splitting sheet and a total reflection mirror.
3. The multi-channel acousto-optic modulation device according to claim 2 wherein said beam splitting unit comprises a first beam splitting sheet and a second beam splitting sheet having different transmittance-reflectance ratios, and a total reflection mirror;
preferably, the ratio of the transmittance to the reflectance of the first light-splitting sheet and the second light-splitting sheet is 1:1 and 1:2, respectively.
4. A multi-channel acousto-optic modulation device according to claim 3 wherein said collimator output light spot passes through one of said first beam splitters and its projected light path forms an upper light path and the refracted light path forms a lower light path.
5. The multi-channel acousto-optic modulation device according to claim 4 wherein said spectroscopic unit comprises, in an upper layer: the second light splitting sheet, the two first light splitting sheets and the total reflection mirror are sequentially arranged along the direction of the collimator;
one total reflection mirror, four first light splitting sheets and one total reflection mirror which are sequentially arranged;
one total reflection mirror, one first light splitting sheet, one total reflection mirror and two first light splitting sheets which are sequentially arranged;
and one of the total reflection mirrors and the first light splitting sheet are sequentially arranged to form an upper-layer light path, and twelve light paths are equally divided to the respective optical fiber acousto-optic modulation systems;
the light splitting units are arranged on the lower layer and the upper layer.
6. The multi-channel acousto-optic modulation device according to claim 1 wherein said acousto-optic modulation system comprises a fiber acousto-optic modulator and a radio frequency drive and fiber output connected thereto.
7. The multi-channel acousto-optic modulation device according to claim 6 wherein said fiber acousto-optic modulator comprises a fiber coupler, an acousto-optic medium and a piezoelectric transducer;
preferably, the acousto-optic medium comprises one or more of quartz, tellurium dioxide, lead molybdate.
8. The multi-channel acousto-optic modulation device according to claim 1 wherein said spectroscopic unit comprises an optical glass;
preferably, the optical glass comprises fused silica optical glass or K9 optical glass.
9. The multi-channel acousto-optic modulation device according to claim 1 wherein said device is disposed on a substrate;
preferably, the substrate comprises glass-ceramic.
10. A multi-channel acousto-optic modulation method, comprising the steps of:
a laser light source is utilized to emit laser beams with any wavelength, and the laser beams output light spots through a collimator;
the light spots enter the light splitting unit for splitting, then a plurality of paths of uniform and equal-split light beams are output, and the plurality of paths of uniform and equal-split light beams are respectively coupled to the respective optical fiber acousto-optic modulation systems through collimators;
the light splitting unit is used for forming a fixed transmission reflectance light splitting unit with corresponding polarization state requirements according to a multi-medium film multi-beam interference principle at a preset incidence angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211658798.XA CN116184698A (en) | 2022-12-22 | 2022-12-22 | Multichannel acousto-optic modulation device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211658798.XA CN116184698A (en) | 2022-12-22 | 2022-12-22 | Multichannel acousto-optic modulation device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116184698A true CN116184698A (en) | 2023-05-30 |
Family
ID=86445287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211658798.XA Pending CN116184698A (en) | 2022-12-22 | 2022-12-22 | Multichannel acousto-optic modulation device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116184698A (en) |
-
2022
- 2022-12-22 CN CN202211658798.XA patent/CN116184698A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11243450B2 (en) | Saw modulator having optical power component for extended angular redirection of light | |
| US6760512B2 (en) | Electro-optical programmable true-time delay generator | |
| US8310607B2 (en) | Liquid crystal optical modulation element, liquid crystal optical modulation device and method for driving liquid crystal optical modulation element | |
| US5450510A (en) | Wavelength division multiplexed optical modulator and multiplexing method using same | |
| JP2004522986A (en) | Tunable controlled laser array | |
| CN101772721A (en) | Optical arrangement for generating multi-beams | |
| JP2000056146A (en) | Light self-guide optical circuit | |
| WO1996041436A2 (en) | Wavelength division multiplexor for multi and single mode optical carrier | |
| US7307787B2 (en) | Beam splitting prism, method of manufacturing beam splitting prism, and all-optical switching device | |
| JP2004510172A (en) | Apparatus and method for reducing polarization sensitivity with a diffraction grating used in an optical fiber communication device | |
| CN113608305B (en) | Beam controller and beam control method | |
| CN116088244B (en) | Cascade phased array optical scanning system | |
| CN111158173B (en) | Integrated laser scanner based on array waveguide grating and acousto-optic modulation grating | |
| JPH03211529A (en) | Optical multiplexer and demultiplexer integrated at high density | |
| JP2003029168A (en) | Variable wavelength dispersion compensator | |
| JP2005525604A (en) | Method and device for variable optical attenuator | |
| CN112711099A (en) | Multi-layer cascade diffraction vortex light beam multiplexing and demultiplexing device | |
| CN116184698A (en) | Multichannel acousto-optic modulation device and method | |
| JPH0447804B2 (en) | ||
| US20090274409A1 (en) | Selectively Enhancing Angular Beam Deflection | |
| CN111221154B (en) | Multi-wavelength multi-sound-field acousto-optic modulator system | |
| JP4122755B2 (en) | Optical switch and DEMUX device | |
| EP1449403B1 (en) | Optical space-switching matrix | |
| CN112147802A (en) | Multichannel parallel acousto-optic modulation device | |
| JP3936865B2 (en) | Light switch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |