CN116184563B - Method and device for manufacturing resonant cavity of linear cavity fiber laser - Google Patents

Method and device for manufacturing resonant cavity of linear cavity fiber laser Download PDF

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Publication number
CN116184563B
CN116184563B CN202310177879.6A CN202310177879A CN116184563B CN 116184563 B CN116184563 B CN 116184563B CN 202310177879 A CN202310177879 A CN 202310177879A CN 116184563 B CN116184563 B CN 116184563B
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laser
fiber
phase mask
optical fiber
mask plate
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CN116184563A (en
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闫志君
邹萌
肖翔鹏
宋青果
孙琪真
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02147—Point by point fabrication, i.e. grating elements induced one step at a time along the fibre, e.g. by scanning a laser beam, arc discharge scanning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/0675—Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)

Abstract

The invention discloses a method and a device for manufacturing a resonant cavity of a linear cavity fiber laser, which utilize laser to scan along the axial direction of a fiber through a phase mask plate to perform continuous exposure, the period and the refractive index modulation depth of a fiber grating can be flexibly changed by controlling the relative displacement speed and the relative displacement direction of the phase mask plate and scanning laser in the exposure process, and any grating period and any resonant cavity at any interval can be written through one continuous exposure, so that different application requirements of the linear cavity fiber laser are met. Compared with the prior art, the method has the advantages that the two fiber bragg grating periods manufactured by the method are consistent in height, stable output of the linear cavity fiber laser is guaranteed, the fiber bragg grating period, the refractive index modulation depth and the grating interval are flexible and controllable, and the manufacturing efficiency of the resonant cavity is improved.

Description

Method and device for manufacturing resonant cavity of linear cavity fiber laser
Technical Field
The invention belongs to the field of fiber lasers, and particularly relates to a method and a device for manufacturing a resonant cavity of a linear cavity fiber laser.
Background
The linear cavity fiber laser has the characteristics of small volume and narrow linewidth, and is widely applied to the fields of distributed fiber sensing, coherent optical communication and the like. The line cavity fiber lasers are classified into Distributed Bragg Reflection (DBR) fiber lasers and Distributed Feedback (DFB) fiber lasers. As shown in fig. 1, the linear cavity fiber laser uses a first fiber grating 1 and a second fiber grating 2 as reflecting cavity mirrors, and an active fiber 3 as a gain medium to form a resonant cavity, and in particular, when the grating interval L is equal to half of the grating period, the DFB fiber laser is formed. By utilizing the characteristic that the fiber bragg grating only reflects light with a specific wavelength, the narrow linewidth laser can be output from front to back under the excitation of the pump source 4.
The key point of the line cavity fiber laser manufacturing is that the manufacturing of a resonant cavity is to ensure stable narrow linewidth laser output, the central reflection wavelengths of fiber gratings at two ends of the resonant cavity are required to be highly consistent, and the fiber gratings are often required to be apodized, the existing method adopts an amplitude template with a specific function pattern, and the two fiber gratings are inscribed by sequentially carrying out secondary ultraviolet exposure on different positions of the fiber through a phase mask plate. In addition, the period of the fiber grating manufactured by the prior method depends on the period of the phase mask plate, the central reflection wavelength of the fiber grating can only be changed by customizing the phase mask plates with different periods, and the wavelength tuning flexibility is poor.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a novel method and a device for manufacturing a resonant cavity of a linear cavity fiber laser, and aims to solve the problems of inconsistent central reflection wavelength and poor periodic tuning of two fiber gratings in the resonant cavity in the prior art.
In order to achieve the above object, the present invention provides a method for manufacturing a resonant cavity for a wire cavity fiber laser, comprising the steps of:
Scanning along the axial direction of the optical fiber by utilizing laser to penetrate through the phase mask plate, and continuously exposing to write a first optical fiber grating and a second optical fiber grating in sequence; in the exposure process, the period and refractive index modulation depth of the fiber grating are changed by controlling the relative displacement of the phase mask plate and scanning laser, the reflectivity of the fiber grating is changed by controlling the laser scanning speed or exposure energy, and the cavity length of the resonant cavity is tuned by changing the scanning distance of the laser between the centers of the two gratings, so that any grating period and any resonant cavity at any interval can be written at one time by continuous exposure.
Further, when the laser scans between the two fiber gratings, the phase mask plate is shifted back and forth according to the preset frequency, and the shift amplitude is half of the period of the mask plate.
Further, laser is diffracted through the phase mask plate, interference is generated by + -1-order diffracted light, an interference fringe area is formed near the phase mask plate, an optical fiber is placed in the interference area, due to photosensitivity of the optical fiber, periodic refractive index modulation is obtained by the fiber core through interference fringe exposure, an optical fiber grating is formed, and central reflection wavelength lambda B of the optical fiber grating meets the following conditions:
λB＝2neffΛ
Wherein n eff is the effective refractive index of the fiber core, Λ is the grating period, and the size is equal to half of the period of the phase mask plate.
Further, the laser is an ultraviolet laser or a femtosecond laser.
The invention also provides a device for manufacturing the resonant cavity of the wire cavity fiber laser, which comprises: the laser is incident to the reflecting mirror on the displacement table, reflected and focused on the phase mask by the column lens, diffraction occurs, interference is generated by + -1-level diffracted light, an interference fringe area is formed near the phase mask, an optical fiber which is clamped and fixed by the optical fiber clamp is placed in the interference area, the phase mask is close to the optical fiber, the laser continuously scans the optical fiber along the phase mask, and the optical fiber is subjected to interference fringe exposure due to photosensitivity of the optical fiber, so that the fiber core can be modulated by periodic refractive index, and the optical fiber grating is formed; the phase mask plate is fixed on the piezoelectric ceramic module, and the piezoelectric ceramic module can control the phase mask plate to move back and forth along the axial direction of the optical fiber.
Further, the precision of the piezoelectric ceramic module for controlling the axial displacement of the phase mask plate along the optical fiber is in nm level.
Further, in the laser scanning process, the period of the fiber bragg grating can be changed by controlling the displacement speed and the direction of the phase mask plate relative to scanning laser, so that the purpose of tuning the central reflection wavelength of the fiber bragg grating is achieved.
Further, in the laser scanning process, the phase mask plate is controlled to move back and forth according to a certain frequency, and refractive index modulation depths of different positions of the grating can be tuned by changing the displacement amplitude, so that apodization of the fiber grating is realized.
Further, when the laser scans between two fiber gratings, the back-and-forth displacement amplitude of the phase mask plate is controlled to be half of the period of the mask plate, and the interference fringe contrast is 0, which is actually equivalent to white exposure of the laser to the fiber, and the refractive index of the fiber core is not subjected to alternating current modulation to form the gratings, so that the laser transmitted in the fiber core is not influenced.
By the above technical scheme, compared with the prior art, the invention can obtain the following
The beneficial effects are that:
1. The invention provides a method and a device for manufacturing a resonant cavity of a linear cavity fiber laser, which utilize a laser scanning phase mask plate to continuously expose an optical fiber, the period and the refractive index modulation depth of a fiber grating can be flexibly changed by controlling the relative displacement speed and the relative displacement direction of the phase mask plate and scanning laser in the exposure process, and the resonant cavity with any grating period and any interval can be written at one time through one-time continuous exposure, so that different application requirements of the linear cavity fiber laser are met.
2. In the process of writing the fiber grating by laser scanning, the period of the fiber grating can be flexibly changed by controlling the relative displacement speed and direction of the phase mask plate and the laser, so as to achieve the purpose of tuning the output laser wavelength of the laser.
3. Two identical fiber gratings can be written through one-time continuous exposure to form a resonant cavity, and the central reflection wavelengths of the two fiber gratings are consistent in height, so that the output stability of the fiber laser is ensured.
Drawings
Fig. 1 is a schematic diagram of a linear cavity fiber laser.
Fig. 2 is a schematic diagram of a resonant cavity of a fiber laser manufactured by a laser scanning method according to the present invention.
Fig. 3 is a schematic diagram showing displacement of the phase mask plate relative to the laser scanning direction.
Fig. 4 is a schematic diagram showing the displacement of a phase mask plate from laser scanning to the middle of two fiber gratings.
Fig. 5 shows one of the displacement amplitude variation modes of the phase mask plate for writing apodized fiber gratings.
1. A first fiber grating 1; 2. a second fiber bragg grating 2; 3. an optical fiber; 4. a pump source; 5. a wavelength division multiplexer; 6. an isolator; 7. a laser; 8. a reflecting mirror; 9. a precision displacement table; 10. a cylindrical lens; 11. an optical fiber clamp; 12. a phase mask; 13. a piezoelectric ceramic module; 14. a broadband light source; 15. and a spectrometer.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not interfere with each other.
The invention provides a method for manufacturing a resonant cavity of a wire cavity fiber laser, which comprises the following steps:
Scanning along the axial direction of the optical fiber by utilizing laser to penetrate through the phase mask plate, and continuously exposing to write a first optical fiber grating and a second optical fiber grating in sequence; in the exposure process, the period and refractive index modulation depth of the fiber grating are changed by controlling the relative displacement of the phase mask plate and scanning laser, the reflectivity of the fiber grating is changed by controlling the laser scanning speed or exposure energy, and the cavity length of the resonant cavity is tuned by changing the scanning distance of the laser between the centers of the two gratings, so that any grating period and any resonant cavity at any interval can be written at one time by continuous exposure.
Further, when the laser scans between the two fiber gratings, the phase mask plate is shifted back and forth according to the preset frequency, and the shift amplitude is half of the period of the mask plate.
Further, laser is diffracted through the phase mask plate, interference is generated by + -1-order diffracted light, an interference fringe area is formed near the phase mask plate, an optical fiber is placed in the interference area, due to photosensitivity of the optical fiber, periodic refractive index modulation is obtained by the fiber core through interference fringe exposure, an optical fiber grating is formed, and central reflection wavelength lambda B of the optical fiber grating meets the following conditions:
λB＝2neffΛ
Wherein n eff is the effective refractive index of the fiber core, Λ is the grating period, and the size is equal to half of the period of the phase mask plate.
Further, the laser is an ultraviolet laser or a femtosecond laser.
The invention also provides a device for manufacturing the resonant cavity of the wire cavity fiber laser, which comprises: the laser is incident to the reflecting mirror on the displacement table, reflected and focused on the phase mask by the column lens, diffraction occurs, interference is generated by + -1-level diffracted light, an interference fringe area is formed near the phase mask, an optical fiber which is clamped and fixed by the optical fiber clamp is placed in the interference area, the phase mask is close to the optical fiber, the laser continuously scans the optical fiber along the phase mask, and the optical fiber is subjected to interference fringe exposure due to photosensitivity of the optical fiber, so that the fiber core can be modulated by periodic refractive index, and the optical fiber grating is formed; the phase mask plate is fixed on the piezoelectric ceramic module, and the piezoelectric ceramic module can control the phase mask plate to move back and forth along the axial direction of the optical fiber.
The embodiment of the invention provides a manufacturing method of a resonant cavity for a wire cavity fiber laser, as shown in fig. 2, an optical fiber 3 is clamped and fixed by an optical fiber clamp 11, a phase mask plate 12 is close to the optical fiber 3, laser emitted by the laser 7 is focused on the phase mask plate 12 through a reflecting mirror 8 and a cylindrical lens 10 to generate diffraction, interference is generated by + -1-level diffraction light, an interference fringe area is formed near the phase mask plate 12, the optical fiber 3 is placed in the interference area, and due to photosensitivity of the optical fiber, the fiber core is subjected to periodic refractive index modulation through interference fringe exposure, so that a fiber grating is formed. The central reflection wavelength lambda B of the fiber grating satisfies the following conditions:
λB＝2neffΛ (1)
Wherein n eff is the effective refractive index of the fiber core, Λ is the grating period, and the size is equal to half of the period of the phase mask plate. The reflector 8 is fixed on the precise displacement table 9, the precise displacement table 9 can move along the horizontal direction, the writing process controls laser to scan the optical fiber 3 along the phase mask plate 12, the writing length of the fiber grating can be controlled, the phase mask plate 12 is fixed on the precise piezoelectric ceramic module 13, and the piezoelectric ceramic module 13 can control the phase mask plate 12 to move back and forth along the axial direction of the optical fiber 3. During the writing process, the parameters of the fiber bragg grating are monitored through the broadband light source 14 and the spectrometer 15.
As shown in fig. 3, the laser scans the optical fiber 3 along the phase mask plate forward, the scanning speed is Λ, the fiber bragg grating period is Λ when the mask plate is stationary, and the fiber bragg grating period is Λ+ΔΛ/Λ - ΔΛ when the relative scanning laser displacement speed of the mask plate is controlled to be + +ΔΛ/- ΔΛ, according to formula (1), tuning of the central reflection wavelength of the fiber bragg grating can be achieved.
As shown in fig. 4, when the laser scans between two fiber gratings, the phase mask is controlled to displace back and forth at a certain frequency, the displacement amplitude is half of the period of the mask, at this time, the contrast of interference fringes is 0, which is actually equivalent to white exposure of the laser to the fiber, and the refractive index of the fiber core is not modulated by ac to form a grating, so that the laser transmitted in the fiber core is not affected.
FIG. 5 shows one of the ways of changing the displacement amplitude of the phase mask plate during scanning when writing an apodized fiber grating. When laser scans on the left side of the point A and the right side of the point B, the back-and-forth displacement amplitude of the phase mask plate 12 changes linearly according to a Gaussian function, so that the refractive index modulation depth of the fiber bragg grating is modulated in a Gaussian mode, apodization of the fiber bragg grating is realized, multi-longitudinal mode output of the fiber bragg laser is restrained, and frequency noise of the laser is reduced.
In the embodiment, the laser continuously scans and exposes the two fiber gratings at one time, and the two fiber gratings are not stopped in the middle, so that the cycle consistency of the two fiber gratings is extremely high, the central reflection wavelengths of the fiber gratings are basically coincident, and the stable output of the fiber laser is ensured. In addition, the reflectivity of the fiber bragg grating can be controlled by changing the laser scanning speed or the exposure energy, and the length of the resonant cavity can be flexibly changed, so that different resonant cavities can be efficiently manufactured according to different application requirements of the linear cavity fiber laser.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (8)

1. The method for manufacturing the resonant cavity of the linear cavity fiber laser comprises a first fiber grating, a second fiber grating and an optical fiber therebetween, and is characterized by comprising the following steps:
Scanning along the axial direction of the optical fiber by utilizing laser to penetrate through the phase mask plate, and continuously exposing to write a first optical fiber grating and a second optical fiber grating in sequence; in the exposure process, the period and refractive index modulation depth of the fiber grating are changed by controlling the relative displacement of the phase mask plate and scanning laser, the reflectivity of the fiber grating is changed by controlling the laser scanning speed or exposure energy, and the cavity length of the resonant cavity is tuned by changing the scanning distance of the laser between the centers of the two gratings, so that any grating period and any resonant cavity at any interval can be written at one time by continuous exposure.
2. The method of claim 1, wherein the phase mask is displaced back and forth at a predetermined frequency by a half of the mask period when the laser scans between the two fiber gratings.
3. The method of claim 2, wherein the center reflection wavelengths λ B of the two fiber gratings satisfy: and lambda B＝2neff lambda, wherein n eff is the effective refractive index of the fiber core, lambda is the grating period, and the size of lambda is equal to half of the period of the phase mask plate.
4. The method of claim 1, wherein the laser is an ultraviolet laser or a femtosecond laser.
5. A device for fabricating a resonant cavity for a linear cavity fiber laser, comprising: the laser is incident to the reflecting mirror on the displacement table, reflected and focused on the phase mask plate by the column lens, diffraction occurs, interference is generated by + -1-level diffraction light, an interference fringe area is formed near the phase mask plate, an optical fiber clamped and fixed by the optical fiber clamp is placed in the interference area, and due to photosensitivity of the optical fiber, the optical fiber core is subjected to periodic refractive index modulation through interference fringe exposure, so that an optical fiber grating is formed; the phase mask plate is fixed on the piezoelectric ceramic module, and the piezoelectric ceramic module can control the phase mask plate to move back and forth along the axial direction of the optical fiber.
6. The apparatus of claim 5, wherein the phase mask is displaced back and forth at a predetermined frequency by a displacement amplitude that is half of a mask period.
7. The apparatus of claim 6, wherein the piezo-ceramic module controls the accuracy of the displacement of the phase mask plate along the optical fiber axis to the nm level.
8. The apparatus of claim 5, wherein the displacement stage is movable in a horizontal direction to effect scanning of the laser light along the optical fiber.
CN202310177879.6A 2023-02-28 2023-02-28 Method and device for manufacturing resonant cavity of linear cavity fiber laser Active CN116184563B (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110797737A (en) * 2019-10-31 2020-02-14 西安交通大学 Short straight cavity single-polarization single-longitudinal mode optical fiber laser and preparation method thereof
CN110829160A (en) * 2019-09-23 2020-02-21 西安交通大学 High-temperature-resistant ultra-short cavity distributed reflection type single-frequency fiber laser and manufacturing method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005088783A1 (en) * 2002-01-28 2005-09-22 Board Of Trustees Operating Michigan State University Laser system using ultra-short laser pulses

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110829160A (en) * 2019-09-23 2020-02-21 西安交通大学 High-temperature-resistant ultra-short cavity distributed reflection type single-frequency fiber laser and manufacturing method thereof
CN110797737A (en) * 2019-10-31 2020-02-14 西安交通大学 Short straight cavity single-polarization single-longitudinal mode optical fiber laser and preparation method thereof

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