CN116174742A - Development method of miniature ionic liquid propeller based on 3D printing emission nozzle - Google Patents
Development method of miniature ionic liquid propeller based on 3D printing emission nozzle Download PDFInfo
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- CN116174742A CN116174742A CN202310018622.6A CN202310018622A CN116174742A CN 116174742 A CN116174742 A CN 116174742A CN 202310018622 A CN202310018622 A CN 202310018622A CN 116174742 A CN116174742 A CN 116174742A
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- 238000010146 3D printing Methods 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 32
- 239000002608 ionic liquid Substances 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 26
- 238000005516 engineering process Methods 0.000 claims abstract description 25
- 239000003380 propellant Substances 0.000 claims abstract description 24
- 238000003860 storage Methods 0.000 claims abstract description 23
- 239000000843 powder Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 229920002120 photoresistant polymer Polymers 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 238000005459 micromachining Methods 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000011010 flushing procedure Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 4
- 238000002791 soaking Methods 0.000 claims description 4
- 238000007711 solidification Methods 0.000 claims description 4
- 230000008023 solidification Effects 0.000 claims description 4
- 238000003892 spreading Methods 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000007921 spray Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 241000239290 Araneae Species 0.000 description 2
- 108091092878 Microsatellite Proteins 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03H1/00—Using plasma to produce a reactive propulsive thrust
- F03H1/0087—Electro-dynamic thrusters, e.g. pulsed plasma thrusters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Abstract
The invention discloses a development method of a miniature ionic liquid propeller based on a 3D printing emission nozzle, which is characterized by comprising the steps of integrally preparing the emission nozzle and a liquid propellant storage area by utilizing a 3D printing technology, manufacturing an electrode plate by utilizing an MEMS micro-processing technology, and matching the liquid propellant storage area (comprising the emission nozzle) with the electrode.
Description
Technical Field
The invention relates to the technical field of 3D printing, in particular to a development method of a miniature ionic liquid propeller based on a 3D printing emission nozzle.
Background
The traditional aerospace propulsion technology is a technology for conveying a carrier into a preset space orbit by using chemical energy and realizing on-orbit maneuvering of a spacecraft, and mainly refers to liquid and solid chemical propulsion. The development of the aerospace field greatly promotes the application of the electric propulsion technology in the aspects of spacecraft attitude adjustment, orbit control, accurate positioning, resetting and the like. The electric propulsion system mainly consists of three parts: a power processing system, a propellant storage and supply system and an electric thruster (firing nozzle). For microsatellites and spacecraft, miniaturization and high integration of propeller size, weight, and ability to provide stable low thrust are required, while the propellant efficiency of electric propulsion technology is several times to tens of times that of chemical propulsion technology. Thus, electric propulsion based on miniature ionic liquids is a potential solution.
The ionic liquid electric propulsion system accelerates charged liquid drops or liquid metal ions to generate thrust by utilizing an electrostatic field, and is characterized by higher than impulse, compact structure, light weight and the like.
According to the supply mode of the ionic liquid, the ionic liquid electric propulsion device is generally divided into three types of surface supply, capillary supply and permeation type supply. In either type, the emitter nozzle is difficult to manufacture in a large scale and standardized manner due to its small size, limited by process limitations and manufacturing tolerances in MEMS processing techniques. From the literature we have found that with such a micro-nozzle structure, it is very difficult to control its process parameters using conventional MEMS processes, which are very prone to over-etching or under-etching, resulting in deviations of its shape and size from the intended design, and furthermore the adjustment costs and time costs are very great if nozzles of different sizes are to be produced. If the stability of the thrust, the power scalability and the overall thrust required by the micro-satellite at each launching point is to be realized, the requirements on the launching nozzle are more strict, the requirements are difficult to realize through the traditional manufacturing process, and the production and manufacturing costs are very high even if the requirements can be realized but the secondary yield is also higher.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides: the development method of the miniature ionic liquid propeller based on the 3D printing emission nozzle.
The technical scheme adopted for solving the technical problems is as follows: the development method of the miniature ionic liquid propeller based on the 3D printing emission nozzle comprises the steps of integrally preparing the emission nozzle and a liquid propellant storage area by utilizing a 3D printing technology, manufacturing an electrode plate by utilizing an MEMS micromachining technology, and matching the liquid propellant storage area (comprising the emission nozzle) with the electrode, wherein the integrally preparing the emission nozzle and the liquid propellant storage area by utilizing the 3D printing technology comprises the following steps:
step one, designing a 3D model on a computer according to the specific structure and the size of a liquid propellant storage area and a transmitting nozzle, converting the model into a layered path file and guiding the layered path file into 3D printing equipment;
initializing the 3D printing equipment, setting parameters and preheating;
step three, a coating blade spreads the metal powder in a very thin layer on the substrate;
step four, the high-power laser is selectively melted according to the first layer information of the layered three-dimensional model under the control of a computer, and the melted powder is solidified together to form a solid part of the part after being cooled;
step five, after the solidification of the previous layer of powder is completed, the powder spreading system re-spreads a layer of very thin metal powder, and the laser beam starts to melt a new layer;
and step six, repeating the step three to the step five until the part is completed.
Preferably, a spider structure is provided at the storage area diagonal.
Preferably, the emission nozzle structure comprises a conical shape and a left-right arbitrary angle inclined structure.
Preferably, the metal powder comprises one or more combinations of nickel-based alloys, titanium-based alloys.
Preferably, the manufacturing the electrode plate by using the MEMS micromachining technology comprises the following steps:
step one, processing a through hole on a glass substrate by laser auxiliary etching;
step two, manufacturing a pull-out electrode, coating photoresist on a glass bottom plate with a through hole, aligning a mask plate, exposing, and finally flushing with a developing solution to remove an illumination part; evaporating a layer of Ni on the glass substrate by using an electron beam evaporation device, then soaking the glass substrate by using stripping liquid, and stripping photoresist by using a constant temperature oscillator;
and thirdly, manufacturing an accelerating electrode, wherein the photoetching process is consistent with the manufacturing process of the extraction electrode, and Al or Ni can be evaporated in the evaporation process.
Preferably, in the first step, the through holes have a slope, and the upper layer (accelerating electrode) through hole opening is larger than the lower layer (extraction electrode) through hole.
Preferably, in the first step, a cross-shaped structure is disposed at a diagonal of the electrode.
Preferably, the cooperation of the liquid propellant storage area (containing the emission nozzle) with the electrode comprises the steps of:
step one, aligning an upper part and a lower part by using a cross star;
and step two, bonding the upper part and the lower part together by heating, applying voltage or pressurizing force.
Compared with the prior art, the development method of the miniature ionic liquid propeller based on the 3D printing emission nozzle has the beneficial effects that: compared with the prior art, the invention fully utilizes the advantages of the 3D printing processing technology, creatively proposes to integrally manufacture the emission spray head and the ion propellant storage area by utilizing the 3D printing technology, abandons the traditional integrated forming technology by using a photolithography method, greatly reduces the manufacturing difficulty and cost, simultaneously enhances the flexibility of the emission spray head, realizes the multi-angle and multi-size manufacture of the spray head, and realizes the thrust, the power scalability and the overall thrust stability of each emission point.
Drawings
Fig. 1 is a two-dimensional cross-sectional view of a miniature ionic liquid pusher based on a 3D printing firing nozzle of the present invention.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1, the development method of the miniature ionic liquid propeller based on the 3D printing emission nozzle comprises the steps of integrally preparing the emission nozzle and the liquid propellant storage area by using a 3D printing technology, manufacturing an electrode plate by using an MEMS micromachining technology, and matching the liquid propellant storage area (comprising the emission nozzle) with the electrode, wherein integrally preparing the emission nozzle and the liquid propellant storage area by using the 3D printing technology comprises the following steps:
step one, designing a 3D model on a computer according to the specific structure and the size of a liquid propellant storage area and a transmitting nozzle, converting the model into a layered path file and guiding the layered path file into 3D printing equipment;
initializing the 3D printing equipment, setting parameters and preheating;
step three, a coating blade spreads the metal powder in a very thin layer on the substrate;
step four, the high-power laser is selectively melted according to the first layer information of the layered three-dimensional model under the control of a computer, and the melted powder is solidified together to form a solid part of the part after being cooled;
step five, after the solidification of the previous layer of powder is completed, the powder spreading system re-spreads a layer of very thin metal powder, and the laser beam starts to melt a new layer;
and step six, repeating the step three to the step five until the part is completed.
Preferably, a spider structure is provided at the storage area diagonal.
The emission nozzle structure comprises a conical structure and a structure inclined at any angle left and right.
The metal powder comprises one or more of nickel-based alloy and titanium-based alloy.
Preferably, the manufacturing the electrode plate by using the MEMS micromachining technology comprises the following steps:
step one, processing a through hole on a glass substrate by laser auxiliary etching;
step two, manufacturing a pull-out electrode, coating photoresist on a glass bottom plate with a through hole, aligning a mask plate, exposing, and finally flushing with a developing solution to remove an illumination part; evaporating a layer of Ni on the glass substrate by using an electron beam evaporation device, then soaking the glass substrate by using stripping liquid, and stripping photoresist by using a constant temperature oscillator;
and thirdly, manufacturing an accelerating electrode, wherein the photoetching process is consistent with the manufacturing process of the extraction electrode, and Al or Ni can be evaporated in the evaporation process.
In the first step, the through holes have a certain inclination, and the openings of the upper layer (accelerating electrode) through holes are larger than those of the lower layer (extraction electrode) through holes.
In the first step, a cross sight structure is arranged on the diagonal of the electrode.
The cooperation of the liquid propellant reservoir (containing the emission nozzle) with the electrode comprises the steps of:
step one, aligning an upper part and a lower part by using a cross star;
and step two, bonding the upper part and the lower part together by heating, applying voltage or pressurizing force.
In the first embodiment, the 3D printing emitting nozzle-based miniature ionic liquid propeller adopts a 3D printing processing technology to manufacture the emitting nozzle structure. Etching array through holes on a silicon substrate through a photoetching process to obtain array through holes, forming an ideal nozzle structure on the through holes through a 3D printing processing process, manufacturing double-sided electrodes based on a glass base through an MEMS micro-processing technology, and finally combining to form the miniature ionic liquid propeller system.
The specific processing technology process is as follows:
1) According to the specific structure and size of the liquid propellant storage area and the emission nozzle, a 3D model is designed on a computer, converted into a layered path file and led into 3D printing equipment;
2) Initializing the 3D printing equipment, setting parameters and preheating;
3) The coating blade spreads the titanium-based metal powder in a very thin layer on the substrate;
4) Under the control of a computer, the high-power laser selectively melts according to the first layer information of the layered three-dimensional model, and the melted powder is solidified together to form a solid part of the part after being cooled;
5) After the solidification of the previous layer of powder is completed, the powder spreading system spreads a layer of very thin metal powder again, and the laser beam starts to melt a new layer;
6) Repeating the third step to the fifth step until the part is completed;
7) Processing through holes consistent with the nozzle array on a 45 mu m glass substrate by laser auxiliary etching;
8) And manufacturing a drawing electrode. And coating photoresist on the glass substrate with the etched through holes, aligning the mask plate, exposing, and finally flushing with a developing solution to remove the illumination part. Evaporating a layer of Ni with the thickness of 200nm on the glass substrate by using an electron beam evaporation device, then soaking the glass substrate by using stripping liquid, and stripping photoresist and Ni on the photoresist by using a constant temperature oscillator;
9) And manufacturing an accelerating electrode. The photoetching process is consistent with the manufacturing process of the extraction electrode, the evaporation plating process is used for evaporating Al with the thickness of 200nm, then the glass substrate is immersed with stripping liquid, and the photoresist and the Al on the photoresist are stripped by a constant-temperature oscillator;
10 The electrode plate is aligned with a liquid propellant storage area (comprising a transmitting nozzle) by using a cross star, and the upper part and the lower part are bonded by using a heating and pressurizing mode to form the miniature ionic liquid propellant.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.
Claims (8)
1. The development method of the miniature ionic liquid propeller based on the 3D printing emission nozzle is characterized by comprising the steps of integrally preparing the emission nozzle and a liquid propellant storage area by utilizing a 3D printing technology, manufacturing an electrode plate by utilizing an MEMS micro-machining technology, and matching the liquid propellant storage area (comprising the emission nozzle) with the electrode, wherein the integrally preparing the emission nozzle and the liquid propellant storage area by utilizing the 3D printing technology comprises the following steps of:
step one, designing a 3D model on a computer according to the specific structure and the size of a liquid propellant storage area and a transmitting nozzle, converting the model into a layered path file and guiding the layered path file into 3D printing equipment;
initializing the 3D printing equipment, setting parameters and preheating;
step three, a coating blade spreads the metal powder in a very thin layer on the substrate;
step four, the high-power laser is selectively melted according to the first layer information of the layered three-dimensional model under the control of a computer, and the melted powder is solidified together to form a solid part of the part after being cooled;
step five, after the solidification of the previous layer of powder is completed, the powder spreading system re-spreads a layer of very thin metal powder, and the laser beam starts to melt a new layer;
and step six, repeating the step three to the step five until the part is completed.
2. The development method of the miniature ionic liquid propeller based on the 3D printing emission nozzle according to claim 1, wherein a cross-shaped star structure is arranged at the diagonal of the storage area.
3. The method for developing a 3D printing-based emission nozzle miniature ionic liquid propeller according to claim 1, wherein the emission nozzle structure comprises a conical shape, a left-right arbitrary angle inclination structure.
4. The 3D printing-firing nozzle-based mini-ionic liquid propeller development method of claim 1, wherein the metal powder comprises one or more combinations of nickel-based alloys, titanium-based alloys.
5. The development method of the miniature ionic liquid propeller based on the 3D printing emission nozzle according to claim 1, wherein the manufacturing of the electrode plate by using the MEMS micro-machining technology comprises the following steps:
step one, processing a through hole on a glass substrate by laser auxiliary etching;
step two, manufacturing a pull-out electrode, coating photoresist on a glass bottom plate with a through hole, aligning a mask plate, exposing, and finally flushing with a developing solution to remove an illumination part; evaporating a layer of Ni on the glass substrate by using an electron beam evaporation device, then soaking the glass substrate by using stripping liquid, and stripping photoresist by using a constant temperature oscillator;
and thirdly, manufacturing an accelerating electrode, wherein the photoetching process is consistent with the manufacturing process of the extraction electrode, and Al or Ni can be evaporated in the evaporation process.
6. The development method of miniature ionic liquid propeller based on 3D printing emission nozzle according to claim 5, wherein in the first step, the through holes have a certain inclination, and the through hole opening of the upper layer (accelerating electrode) is larger than the through hole of the lower layer (extraction electrode).
7. The development method of a miniature ionic liquid propeller based on a 3D printing emission nozzle according to claim 5, wherein in the first step, a cross-shaped star structure is arranged at the diagonal of the electrode.
8. The 3D printing-firing nozzle-based mini-ionic liquid propellant development method of claim 1, wherein the cooperation of the liquid propellant storage area (containing the firing nozzle) with the electrode comprises the steps of:
step one, aligning an upper part and a lower part by using a cross star;
and step two, bonding the upper part and the lower part together by heating, applying voltage or pressurizing force.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310018622.6A CN116174742A (en) | 2023-01-06 | 2023-01-06 | Development method of miniature ionic liquid propeller based on 3D printing emission nozzle |
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| CN202310018622.6A CN116174742A (en) | 2023-01-06 | 2023-01-06 | Development method of miniature ionic liquid propeller based on 3D printing emission nozzle |
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