CN116174317A - AI detection system of encapsulation shell - Google Patents
AI detection system of encapsulation shell Download PDFInfo
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- CN116174317A CN116174317A CN202310451145.2A CN202310451145A CN116174317A CN 116174317 A CN116174317 A CN 116174317A CN 202310451145 A CN202310451145 A CN 202310451145A CN 116174317 A CN116174317 A CN 116174317A
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- 238000001514 detection method Methods 0.000 title claims abstract description 111
- 238000005538 encapsulation Methods 0.000 title claims description 3
- 238000007599 discharging Methods 0.000 claims abstract description 44
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- 238000012546 transfer Methods 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims description 35
- 230000007246 mechanism Effects 0.000 claims description 21
- 238000003860 storage Methods 0.000 claims description 10
- 238000004806 packaging method and process Methods 0.000 abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000007689 inspection Methods 0.000 description 13
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- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/361—Processing or control devices therefor, e.g. escort memory
- B07C5/362—Separating or distributor mechanisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C2501/00—Sorting according to a characteristic or feature of the articles or material to be sorted
- B07C2501/0063—Using robots
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
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Abstract
The utility model discloses an AI detection system of a packaging shell, which comprises an automatic feeding and discharging device, a positioning camera, a material taking device, a manipulator, an appearance detection camera, a conveyor belt, a machine shell, a cross sliding table and a controller, wherein the conveyor belt is horizontally arranged and is respectively provided with the automatic feeding and discharging device which is close to a feeding end and a discharging end and can transfer a chip cartridge clip to an upper position A and an upper position B, the positioning camera shoots the upper position A in real time, the appearance detection camera is respectively arranged between the conveyor belt and the upper position A and above the middle part of the conveyor belt, the shooting directions of the appearance detection camera above the middle part of the conveyor belt are opposite, the appearance detection camera above the middle part of the conveyor belt can be driven by the cross sliding table to move vertically so as to adjust the height or be perpendicular to the conveying direction of the conveyor belt, and the manipulator which is provided with the material taking device is respectively matched between the conveyor belt and the two groups of automatic feeding and discharging devices, so that the whole running water type operation can be effectively improved, and chips are not easy to pollute or damage.
Description
Technical Field
The utility model relates to the technical field of chip detection, in particular to the technical field of an AI detection system of a packaging shell.
Background
Semiconductor chips are silicon wafers containing integrated circuits, which are divided from wafers, and are small in size, typically as part of a computer or other electronic device. The chip cartridge (BUFFER) is a part capable of temporarily storing semiconductor chips, so that the semiconductor chips can be conveniently and safely circulated among various manufacturing procedures, and the production efficiency and the production quality of a production line are improved. The cartridge bin is a carrier of the chip cartridge, for example, a general cartridge bin disclosed in the patent with the publication number of CN 217893605U.
In the manufacturing process of the semiconductor chip, appearance defects may be introduced in different process steps, such as impurities existing in the substrate, incomplete removal of wet-cleaning impurities, incomplete film plating, non-uniform chemical vapor deposition and physical vapor deposition, scattered impurities in ion implantation, abnormal oxidation, cracks caused by non-uniform heat treatment temperature, and the like. In addition, the step of dicing the semiconductor chips on the wafer by the die dicing process may also cause damage to the chips, such as surface scratches. In order to ensure that the quality of the semiconductor chip meets the requirements, the factory needs to perform appearance inspection on the semiconductor chip in advance before leaving the factory.
Currently, the appearance inspection method of the semiconductor chip is mainly an artificial visual inspection method. Specifically, a worker needs to take out the chip cassettes one by one from the chip bin, and then take out the semiconductor chips one by one from the chip cassettes, so that each semiconductor chip is observed one by one with the aid of a microscope. The qualified semiconductor chips are required to be replaced into the chip cartridge and then replaced into the chip bin together with the chip cartridge, and the unqualified semiconductor chips can be directly scrapped or reprocessed. However, this method is likely to cause secondary pollution to the semiconductor chip in the whole process, and it is difficult to ensure the detection quality. Meanwhile, the detection mode has high requirements on experience of IQC microscopic examination personnel, and the detection result is influenced by subjective factors such as the level and emotion of the detection personnel and cannot be guaranteed. In fact, the standard formed by human vision is a non-quantitative, non-constant scale, thus causing fluctuations in quality standards, which in turn directly lead to unstable product quality control. IQC microscopic examination personnel also easily miss the examination due to distraction and the like, so that the critical defects cannot be removed in percentage. In addition, the human eye judging speed is lower than the processing operation speed of the computer on the image, and the large-scale detection cannot be realized, so that the detection efficiency is low, the production cost of a product is increased, and particularly, for a mounted chip with a very small volume, the human eye is difficult to judge rapidly.
Although some of those skilled in the art use machines to perform automatic chip defect detection based on defect characteristics, such as geometric characteristics, color characteristics, texture characteristics, and projection characteristics, an optical chip surface contamination defect detection method is disclosed in the patent publication No. CN111707614 a. However, in the detection method, the detection efficiency is still not improved greatly due to the fact that the two-dimensional motion platform is adopted to convey the workpiece, and meanwhile, back detection is difficult to achieve.
Disclosure of Invention
The utility model aims to solve the problems in the prior art, and provides an AI detection system of a packaging shell, wherein the AI detection system can shoot the back surface of each semiconductor chip at fixed points through one of appearance detection cameras, then the position of the other appearance detection camera is adjusted in real time by utilizing a conveyor belt and a cross sliding table, the front surface of each semiconductor chip is shot, and meanwhile, the AI detection system is matched with two groups of dispensers and a manipulator to finish assembly line operation together, so that chips are not easy to pollute or damage.
In order to achieve the above purpose, the utility model provides an AI detection system of a packaging shell, which comprises a shell, a controller, an automatic feeding and discharging device, a positioning camera, a material taking device, a manipulator, an appearance detection camera, a conveyor belt and a cross sliding table, wherein the automatic feeding and discharging device which is respectively arranged horizontally and close to a feeding end and a discharging end and can move a chip clip to an up-to-position A and an up-to-position B is respectively arranged at the conveyor belt, the positioning camera shoots the up-to-position A in real time, the appearance detection camera is respectively arranged between the conveyor belt and the up-to-position A and above the middle part of the conveyor belt, and the shooting directions of the conveyor belt are opposite up and down, the appearance detection camera located above the middle of the conveyor belt can be driven by the cross sliding table to move vertically so as to adjust the height or move perpendicular to the conveying direction of the conveyor belt, a manipulator provided with a material taking device is respectively matched between the conveyor belt and the two groups of automatic feeding and discharging devices, one manipulator continuously transfers a chip located at the upper position A to the appearance detection camera close to the upper position A through the material taking device to shoot and then transfers the chip to the conveyor belt so as to shoot by the other appearance detection camera, and the other manipulator continuously transfers the chip located on the conveyor belt and shot twice to the upper position B through the material taking device.
Preferably, the automatic feeding and discharging device comprises a storage mechanism and a feeding mechanism, the storage mechanism comprises a supporting seat and a cartridge bin, the cartridge bin is detachably arranged at the top of the supporting seat, the feeding mechanism comprises a transverse driving module, a module supporting frame, a longitudinal driving module and a tray, the module supporting frame is driven by the transverse driving module to horizontally move and approach or keep away from the cartridge bin, the longitudinal driving module is fixed on the module supporting frame and can drive the tray to vertically move so as to adjust the height, and the tray is arranged towards one side of the cartridge bin, which is provided with a feeding and discharging hole.
Preferably, the positioning camera comprises a positioning frame, a positioning camera and a positioning light source, and the positioning camera and the positioning light source are respectively connected with the casing through the positioning frame.
Preferably, the material taking device comprises a material taking support, a vertical driving module, a rotation driving module and a suction pipe, wherein the vertical driving module is connected with the manipulator or the shell through the material taking support, the rotation driving module is driven by the vertical driving module to vertically move so as to adjust the height, and the suction pipe is driven by the rotation driving module to rotate and is simultaneously indirectly connected with the air pump through an air pipe.
Preferably, the appearance detection camera comprises a detection support, a detection camera and a detection light source, and the detection camera and the detection light source are respectively connected with the shell or the cross sliding table through the detection support.
Preferably, the automatic feeding and discharging device comprises a machine shell, a positioning camera, a conveyor belt, a cross sliding table, and various groups of automatic feeding and discharging devices, a material taking device, a manipulator and an appearance detection camera, wherein the positioning camera, the conveyor belt, the cross sliding table, the material taking device, the manipulator and the appearance detection camera are respectively sealed in the inner cavity of the machine shell, and air in the inner cavity of the machine shell is continuously purified by the fresh air fan.
Preferably, a window and an alarm are further arranged at the wall of the shell, and the alarm is electrically connected with the controller.
The detection method of the AI detection system of the packaging shell comprises the following steps:
stp1: the two groups of automatic feeding and discharging devices respectively transfer a chip cartridge clip filled with a chip to be detected and an empty chip cartridge clip to an upper position A and an upper position B;
stp2: the positioning camera shoots the positions of all chips positioned at the up-to-position A in real time;
stp3: the manipulator arranged near the feeding end of the conveyor belt firstly transfers chips positioned at the up-to-position A to an appearance detection camera arranged near the feeding end of the conveyor belt one by one through a material taking device to carry out reverse appearance shooting detection and then transfers the chips onto the conveyor belt one by one;
stp4: the conveyor belt and the cross sliding table are matched with each other so that chips positioned above the conveyor belt are transferred to an appearance detection camera positioned above the middle part of the conveyor belt one by one to carry out front appearance shooting detection;
stp4: the manipulator arranged near the discharge end of the conveyor belt transfers the semiconductor chips with the front and back appearance shooting detection to a chip cartridge clip positioned at the upper position B one by one through a material taking device;
stp5: and the two groups of automatic feeding and discharging devices retract the chip clips arranged at the upper position A and the upper position B respectively.
The utility model has the beneficial effects that:
1) The chip cartridge clips are placed at the upper position A by the automatic feeding and discharging device positioned at the feeding side of the device and are automatically identified by the positioning camera, so that all the semiconductor chips positioned in the chip cartridge clips can be sent to one of the appearance detection cameras one by one through one of the group of the material extractors and the mechanical arm for carrying out reverse appearance shooting detection, then the front appearance shooting detection of all the semiconductor chips is finished through the other appearance detection camera under the mutual matching of the conveyor belt and the cross sliding table, and finally all the semiconductor chips after the detection are placed in the other chip cartridge clip positioned above the upper position B by the other group of the material extractor and the mechanical arm for being recovered by the automatic feeding and discharging device positioned at the discharging side of the device, the whole running water operation can be carried out, the working efficiency can be effectively improved, and the chips are not easy to pollute or damage;
2) The cartridge clip bin is detachably arranged at the top of the supporting seat and forms a storage mechanism together, and then is matched with the feeding mechanism formed by the transverse driving module, the supporting frame, the longitudinal driving module and the tray together, so that the tray can be used for taking out the chip cartridges positioned in the cartridge clip bin one by one and stably feeding the chips, and the feeding can be realized through reverse operation, so that the structure is simple, the logic is clear, the repeated positioning precision is high, the processing efficiency can be effectively improved, the semiconductor chips placed on the top surfaces of the chip cartridges are not easy to damage, and the final quality of products is ensured to meet the requirements;
3) Through making one of them outward appearance detection camera fixed point shoot the reverse side of each semiconductor chip, the position of another outward appearance detection camera of rethread conveyer belt and cross slip table real-time adjustment is shot the front of each semiconductor chip, can enough accomplish the pipelining, still can effectively reduce the quantity of installing of material taking device and manipulator, finally reduce device manufacturing cost and occupation of land space to a certain extent.
The features and advantages of the present utility model will be described in detail by way of example with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic perspective view of an AI detection system of the package housing of the utility model;
FIG. 2 is a front view of the AI detection system of the enclosure of the utility model;
FIG. 3 is a schematic perspective view of an automatic loading and unloading device of the AI detection system of the package housing of the utility model;
FIG. 4 is a schematic perspective view of a storage mechanism of the AI detection system of the enclosure of the utility model;
FIG. 5 is a schematic perspective view of a feeding mechanism of the AI detection system of the package housing of the utility model;
FIG. 6 is a schematic perspective view of a positioning camera of the AI detection system of the utility model housing;
FIG. 7 is a schematic perspective view of a reclaimer of the AI detection system of the enclosure of the utility model;
fig. 8 is a schematic perspective view of an appearance detecting camera of the AI detecting system of the package case of the present utility model.
In the figure: 1-automatic feeding and discharging device, 11-storage mechanism, 111-supporting seat, 112-cartridge bin, 12-feeding mechanism, 121-transverse driving module, 122-module support frame, 123-longitudinal driving module, 124-tray, 2-positioning camera, 21-positioning frame, 22-positioning camera, 23-positioning light source, 3-material taking device, 31-material taking support, 32-vertical driving module, 33-rotation driving module, 34-straw, 4-manipulator, 5-appearance detecting camera, 51-detecting support, 52-detecting camera, 53-detecting light source, 6-conveyor belt, 7-casing, 8-cross sliding table and 9-fresh air machine.
Detailed Description
Referring to fig. 1 to 8, the AI detection system of the package housing of the present utility model includes a casing 7, a controller, and an automatic feeding and discharging device 1, a positioning camera 2, a material taking device 3, a manipulator 4, an appearance detection camera 5, a conveyor belt 6, and a cross sliding table 8, wherein the conveyor belt 6 is horizontally disposed and near a feeding end and a discharging end, the automatic feeding and discharging device 1 capable of moving a chip cartridge to an up-to-position a and an up-to-position B is respectively disposed, the positioning camera 2 photographs the up-to-position a in real time, the appearance detection camera 5 is disposed between the conveyor belt 6 and the up-to-position a and above a middle portion of the conveyor belt 6, and the photographing direction is opposite, the appearance detection camera 5 disposed above the middle portion of the conveyor belt 6 is driven by the cross sliding table 8 to move vertically to adjust the height or be perpendicular to the conveying direction of the conveyor belt 6, the manipulator 4 mounted with the material taking device 3 is disposed between the conveyor belt 6 and the two groups of automatic feeding and discharging devices 1, the manipulator 4 is disposed to photograph the chip cartridge to the up-to-position a through the material taking device 3, and the other appearance detection camera 4 is disposed to the other position 5 above the conveyor belt 6 and the other appearance detection camera 4 is disposed to photograph the chip cartridge to the other position by transferring the chip cartridge to the up-position 5. The automatic feeding and discharging device comprises a machine shell 7, a positioning camera 2, a conveyor belt 6, a cross sliding table 8, and various groups of automatic feeding and discharging devices 1, a material taking device 3, a manipulator 4 and an appearance detection camera 5, wherein the positioning camera, the conveyor belt 6, the cross sliding table 8, the manipulator 4 and the appearance detection camera 5 are respectively sealed in the inner cavity of the machine shell 7, and air in the inner cavity of the machine shell 7 is continuously purified by the machine shell 9. The arrangement of the fresh air fan 9 can ensure that the air cleanliness reaching the standard can be always kept in the inner cavity of the shell 7, and the interference of dust is avoided.
Referring to fig. 3, 4 and 5, the automatic feeding and discharging device 1 comprises a storage mechanism 11 and a feeding mechanism 12, the storage mechanism 11 comprises a supporting seat 111 and a cartridge bin 112, the cartridge bin 112 is detachably mounted at the top of the supporting seat 111, the feeding mechanism 12 comprises a transverse driving module 121, a module supporting frame 122, a longitudinal driving module 123 and a tray 124, the module supporting frame 122 is driven by the transverse driving module 121 to horizontally move and approach or keep away from the cartridge bin 112, the longitudinal driving module 123 is fixed on the module supporting frame 122 and can drive the tray 124 to vertically move to adjust the height, and the tray 124 is arranged towards one side of the cartridge bin 112, which is provided with a feeding and discharging port.
Referring to fig. 6, the positioning camera 2 includes a positioning frame 21, a positioning camera 22, and a positioning light source 23, and the positioning camera 22 and the positioning light source 23 are connected to the housing 7 through the positioning frame 21, respectively. The positioning light source 23 can provide sufficient light for the positioning camera 22, so as to effectively avoid failure of automatic recognition.
Referring to fig. 7, the material taking device 3 includes a material taking bracket 31, a vertical driving module 32, a rotation driving module 33 and a suction pipe 34, the vertical driving module 32 is connected with the manipulator 4 or the casing 7 through the material taking bracket 31, the rotation driving module 33 is driven by the vertical driving module 32 to vertically move to adjust the height, and the suction pipe 34 is driven by the rotation driving module 33 to rotate and is indirectly connected with the air pump through an air pipe. The height and the rotation angle of the suction pipe 34 can be respectively adjusted by the vertical driving module 32 and the rotation driving module 33, and meanwhile, the air pump can also utilize the air pipe to control the suction and the inflation of the suction pipe 34, so that on one hand, the suction pipe 34 can be close to a semiconductor chip and can be sucked and fixed by utilizing the negative pressure effect, and the placement position and the placement angle of the sucked semiconductor chip can be adjusted.
Referring to fig. 8, the appearance inspection camera 5 includes an inspection bracket 51, an inspection camera 52, and an inspection light source 53, and the inspection camera 52 and the inspection light source 53 are connected to the casing 7 or the cross slide table 8 through the inspection bracket 51, respectively. The detection light source 53 can provide sufficient light for the detection camera 52, so as to avoid occurrence of error judgment of defects caused by shadows and the like.
The detection method of the AI detection system of the packaging shell comprises the following steps:
the wall of the shell 7 is also provided with a window and an alarm, and the alarm is electrically connected with the controller.
Stp1: the two groups of automatic feeding and discharging devices 1 respectively transfer a chip cartridge clip filled with a chip to be detected and an empty chip cartridge clip to an upper position A and an upper position B;
stp2: the positioning camera 2 shoots the positions of all chips positioned at the up-to-position A in real time;
stp3: the manipulator 4 arranged near the feeding end of the conveyor belt 6 firstly transfers chips positioned at the upper position A to the appearance detection camera 5 arranged near the feeding end of the conveyor belt 6 one by one through the material taking device 3 so as to carry out reverse appearance shooting detection and then transfers the chips onto the conveyor belt 6 one by one;
stp4: the conveyor belt 6 and the cross sliding table 8 are matched with each other so that chips on the conveyor belt 6 are transferred to the appearance detection camera 5 above the middle part of the conveyor belt 6 one by one to carry out front appearance shooting detection;
stp4: the manipulator 4 arranged near the discharge end of the conveyor belt 6 transfers the semiconductor chips with the front and back appearance shooting detection to a chip cartridge clip positioned at the upper position B one by one through the material taking device 3;
stp5: the two groups of automatic feeding and discharging devices 1 retract the chip clips arranged at the upper position A and the upper position B respectively.
The working process of the utility model comprises the following steps:
before the detection, for the two automatic loading and unloading devices 1, the cartridge bins 112 with the chip cartridges are manually placed in the slots on the top of the supporting seat 111. Wherein, each chip cartridge clip in the automatic feeding and discharging device 1 arranged near the feeding end of the conveyor belt 6 is respectively provided with a plurality of semiconductor chips to be detected, and each chip cartridge clip in the automatic feeding and discharging device 1 arranged near the discharging end of the conveyor belt 6 is in an empty state.
During detection, the feeding mechanism 12 of the automatic feeding and discharging device 1 arranged near the feeding end of the conveyor belt 6 firstly takes out and transfers the first chip cartridge clip positioned in the corresponding cartridge clip bin 112 to the position A, and the positioning camera 2 automatically recognizes the position of each semiconductor chip positioned on the chip cartridge clip. At the same time, the feeding mechanism 12 of the automatic feeding and discharging device 1, which is disposed near the discharging end of the conveyor belt 6, takes out the first chip cartridge located in the corresponding cartridge bin 112 and moves it to the upper position B. Subsequently, the extractor 3 and the robot 4 disposed near the feeding end of the conveyor belt 6 are first engaged with each other and transfer the semiconductor chips in the chip clips located at the upper position a one by one to the appearance inspection camera 5 disposed near the upper position a for reverse appearance photographing inspection, and then transferred to the top surface of the belt body of the conveyor belt 6. Next, the conveyor belt 6 and the cross slide table 8 are mutually matched, and each semiconductor chip positioned on the conveyor belt 6 is in turn made to face the other appearance detection camera 5 to complete the front appearance shooting detection. Then, the extractor 3 and the manipulator 4 arranged near the discharge end of the conveyor belt 6 transfer the semiconductor chips with the front and back appearance shooting detection to the chip cartridge at the upper position B one by one. Finally, the feeding mechanisms 12 of the two groups of automatic feeding and discharging devices 1 respectively retract the chip clips positioned at the up-position A and the up-position B into the corresponding clip storage bins 112. The operation is circulated until all the semiconductor chips loaded in the casing 7 are subjected to the front and back appearance photographing detection. Wherein the detection data is processed and recorded by a calculator in the controller.
After the inspection, the worker takes out the cartridge magazine 112 containing all the semiconductor chips for which the front and back surface appearance photographing inspection is completed from the casing 7, and then manually rejects the unqualified semiconductor chips according to the prompt of the controller. In addition, the unqualified semiconductor chips can be automatically removed by directly utilizing the extractor 3 and the manipulator 4 which are arranged near the discharging end of the conveyor belt 6.
The above embodiments are illustrative of the present utility model, and not limiting, and any simple modifications of the present utility model fall within the scope of the present utility model.
Claims (8)
1. AI detecting system of encapsulation shell, its characterized in that: the automatic feeding and discharging device comprises a shell (7), a controller, and an automatic feeding and discharging device (1), a positioning camera (2), a material taking device (3), a manipulator (4), an appearance detection camera (5), a conveyor belt (6) and a cross sliding table (8), wherein the automatic feeding and discharging device (1) capable of conveying a chip cartridge clip to an upper position A and an upper position B is respectively arranged at a position close to a feeding end and a discharging end of the conveyor belt (6), the positioning camera (2) shoots the upper position A in real time, the appearance detection camera (5) is respectively arranged between the conveyor belt (6) and the upper position A and above the middle part of the conveyor belt (6) and is opposite to each other in the shooting direction, the appearance detection camera (5) above the middle part of the conveyor belt (6) can be driven by the cross sliding table (8) to move vertically so as to adjust the height or move in the conveying direction perpendicular to the conveyor belt (6), the conveyor belt (6) and the two groups of automatic feeding and discharging devices (1) are respectively matched with the automatic feeding and discharging device (1), the appearance detection camera (4) is arranged between the conveyor belt (6) and the upper position A and the upper position B, the appearance detection camera (4) is respectively arranged at the position close to the other position (5) and the upper position (5) is not above the middle position of the conveyor belt (4), the other manipulator (4) continuously transfers the chip which is positioned on the conveyor belt (6) and is shot twice to the upper position B through the material taking device (3).
2. The AI detection system of a package enclosure of claim 1, wherein: automatic unloader (1) includes storage mechanism (11) and feeding mechanism (12), storage mechanism (11) include supporting seat (111) and cartridge holder feed bin (112), the top at supporting seat (111) is detachably installed to cartridge holder feed bin (112), feeding mechanism (12) are including horizontal drive module (121), module support frame (122), vertical drive module (123) and tray (124), module support frame (122) are driven by horizontal drive module (121) and horizontal movement and are close to or keep away from cartridge holder feed bin (112), vertical drive module (123) are fixed on module support frame (122) and can drive tray (124) vertical movement in order to adjust height, tray (124) are equipped with the one side setting of feed and discharge gate towards cartridge holder feed bin (112).
3. The AI detection system of a package enclosure of claim 1, wherein: the positioning camera (2) comprises a positioning rack (21), a positioning camera (22) and a positioning light source (23), wherein the positioning camera (22) and the positioning light source (23) are connected with the shell (7) through the positioning rack (21) respectively.
4. The AI detection system of a package enclosure of claim 1, wherein: the material taking device comprises a material taking support (31), a vertical driving module (32), a rotation driving module (33) and a suction pipe (34), wherein the vertical driving module (32) is connected with a manipulator (4) or a shell (7) through the material taking support (31), the rotation driving module (33) is driven by the vertical driving module (32) to vertically move so as to adjust the height, and the suction pipe (34) is driven by the rotation driving module (33) to rotate and is simultaneously connected with an air pump indirectly through an air pipe.
5. The AI detection system of a package enclosure of claim 1, wherein: the appearance detection camera (5) comprises a detection support (51), a detection camera (52) and a detection light source (53), and the detection camera (52) and the detection light source (53) are connected with the shell (7) or the cross sliding table (8) through the detection support (51) respectively.
6. The AI detection system of a package enclosure of claim 1, wherein: still include new fan (9), location camera (2), conveyer belt (6), cross slip table (8) and each automatic unloader (1), reclaimer (3), manipulator (4) and outward appearance detection camera (5) are closed respectively in the inner chamber of casing (7), are located air in the inner chamber of casing (7) is purified by new fan (9) constantly.
7. The AI detection system of the enclosure of claim 6, wherein: a window and an alarm are further arranged on the shell wall of the shell (7), and the alarm is electrically connected with the controller.
8. The detection method of the AI detection system of the package case according to any one of claims 1 to 7, comprising the steps of:
stp1: the two groups of automatic feeding and discharging devices (1) respectively transfer a chip cartridge clip filled with a chip to be detected and an empty chip cartridge clip to an upper position A and an upper position B;
stp2: the positioning camera (2) shoots the positions of all chips positioned at the up-to-position A in real time;
stp3: the manipulator (4) arranged near the feeding end of the conveyor belt (6) firstly transfers chips positioned at the up-to-position A to the appearance detection camera (5) arranged near the feeding end of the conveyor belt (6) one by one through the material taking device (3) so as to carry out reverse appearance shooting detection and then transfers the chips onto the conveyor belt (6) one by one;
stp4: the conveyor belt (6) and the cross sliding table (8) are matched with each other so that chips on the conveyor belt (6) are transferred to an appearance detection camera (5) above the middle of the conveyor belt (6) one by one to perform front appearance shooting detection;
stp4: a manipulator (4) arranged near the discharge end of the conveyor belt (6) transfers the semiconductor chips with the front and back appearance shooting detection to a chip cartridge clip positioned at the upper position B one by one through a material taking device (3);
stp5: the two groups of automatic feeding and discharging devices (1) respectively retract the chip clips arranged at the upper position A and the upper position B.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310451145.2A CN116174317A (en) | 2023-04-25 | 2023-04-25 | AI detection system of encapsulation shell |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310451145.2A CN116174317A (en) | 2023-04-25 | 2023-04-25 | AI detection system of encapsulation shell |
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| CN202310451145.2A Pending CN116174317A (en) | 2023-04-25 | 2023-04-25 | AI detection system of encapsulation shell |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204107868U (en) * | 2014-09-19 | 2015-01-21 | 嘉兴景焱智能装备技术有限公司 | General-purpose chip visual inspection machine |
| WO2018094678A1 (en) * | 2016-11-25 | 2018-05-31 | 苏州富强科技有限公司 | Clip type automatic feeding mechanism |
| CN109261542A (en) * | 2018-09-30 | 2019-01-25 | 广州超音速自动化科技股份有限公司 | A kind of battery core detection method for sorting |
| CN109712924A (en) * | 2018-12-29 | 2019-05-03 | 哈工大机器人（山东）智能装备研究院 | A kind of infrared focal plane array chip automated test device |
| CN209424089U (en) * | 2018-12-13 | 2019-09-24 | 东莞市乐琪光电科技有限公司 | Dual linear motor lithium battery appearance detecting device |
| CN212639112U (en) * | 2020-05-27 | 2021-03-02 | 昆山中立德智能科技有限公司 | Spraying line feeding device |
| CN215853989U (en) * | 2021-05-26 | 2022-02-18 | 东莞触点智能装备有限公司 | Loading and unloading mechanism of lifting basket |
| CN115069587A (en) * | 2022-06-20 | 2022-09-20 | 博睿自动化设备(广州)有限公司 | Automatic equipment for detecting flatness of chip and using method thereof |
-
2023
- 2023-04-25 CN CN202310451145.2A patent/CN116174317A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204107868U (en) * | 2014-09-19 | 2015-01-21 | 嘉兴景焱智能装备技术有限公司 | General-purpose chip visual inspection machine |
| WO2018094678A1 (en) * | 2016-11-25 | 2018-05-31 | 苏州富强科技有限公司 | Clip type automatic feeding mechanism |
| CN109261542A (en) * | 2018-09-30 | 2019-01-25 | 广州超音速自动化科技股份有限公司 | A kind of battery core detection method for sorting |
| CN209424089U (en) * | 2018-12-13 | 2019-09-24 | 东莞市乐琪光电科技有限公司 | Dual linear motor lithium battery appearance detecting device |
| CN109712924A (en) * | 2018-12-29 | 2019-05-03 | 哈工大机器人（山东）智能装备研究院 | A kind of infrared focal plane array chip automated test device |
| CN212639112U (en) * | 2020-05-27 | 2021-03-02 | 昆山中立德智能科技有限公司 | Spraying line feeding device |
| CN215853989U (en) * | 2021-05-26 | 2022-02-18 | 东莞触点智能装备有限公司 | Loading and unloading mechanism of lifting basket |
| CN115069587A (en) * | 2022-06-20 | 2022-09-20 | 博睿自动化设备(广州)有限公司 | Automatic equipment for detecting flatness of chip and using method thereof |
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