CN116169064A - Exhaust device, process chamber and exhaust method - Google Patents
Exhaust device, process chamber and exhaust method Download PDFInfo
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- CN116169064A CN116169064A CN202310171795.1A CN202310171795A CN116169064A CN 116169064 A CN116169064 A CN 116169064A CN 202310171795 A CN202310171795 A CN 202310171795A CN 116169064 A CN116169064 A CN 116169064A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Abstract
The present invention provides an exhaust apparatus comprising: an exhaust duct; the sampling pipeline is arranged on the side wall of the exhaust pipeline at one end and is communicated with the exhaust pipeline; the air blowing system is connected with the sampling pipeline and is used for blowing air into the sampling pipeline; and the detection alarm system is connected with the sampling pipeline and is used for detecting the air pressure value in the sampling pipeline and executing an alarm function according to the air pressure value. Based on the exhaust device, the invention further provides a process chamber and an exhaust method. The exhaust device, the process chamber and the exhaust method provided by the invention can effectively remove the exhaust condensate in the exhaust device by utilizing the air blowing system, thereby solving the problem of false alarm of the exhaust device.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to an exhaust device, a process chamber and an exhaust method.
Background
In semiconductor manufacturing processes, processes such as etching, deposition, ion implantation, and cleaning of wafers are typically performed in corresponding process chambers. The process chamber typically includes an exhaust for exhausting the exhaust from the process chamber (including the harmful gases and/or residual reactant gases generated during the above-described process) to a factory exhaust system for exhaust treatment in the factory exhaust system. In the existing exhaust device or process chamber, the inner side wall of the exhaust pipeline can form a beaded exhaust condensate; and the sampling pipe is communicated with the exhaust pipe through a sampling pipe orifice at one end, and the gas pressure in the sampling pipe can be influenced after the waste gas condensate enters the sampling pipe orifice, so that the fluctuation of the gas pressure in the sampling pipe is caused, and finally, an alarm unit generates false alarm, so that the operation efficiency and the processing efficiency of a process cavity can be reduced.
Disclosure of Invention
The invention provides an exhaust device for solving the problem of false alarm of the existing exhaust device.
The present invention provides an exhaust apparatus, comprising:
an exhaust duct;
the sampling pipeline is arranged on the side wall of the exhaust pipeline at one end and is communicated with the exhaust pipeline;
the air blowing system is connected with the sampling pipeline and is used for blowing air into the sampling pipeline;
and the detection alarm system is connected with the sampling pipeline and is used for detecting the air pressure value in the sampling pipeline and executing an alarm function according to the air pressure value.
Preferably, the detection alarm system comprises an air pressure detection unit and an alarm unit, wherein the air pressure detection unit is arranged on the sampling pipeline and is used for detecting the air pressure value in the sampling pipeline; the alarm unit is electrically connected with the air pressure detection unit and is used for executing an alarm function according to the air pressure value input by the air pressure detection unit
Preferably, the air pressure detection unit comprises a pressure sensor and a digital display electrically connected with the pressure sensor, wherein the pressure sensor is used for detecting an air pressure signal in the exhaust pipeline and converting the air pressure signal into an electric signal, and the digital display can convert the electric signal into an air pressure value and display the air pressure value.
Preferably, the air blowing system comprises an air blowing pipeline and an air supply unit, and one end of the air blowing pipeline is arranged on the side wall of the sampling pipeline and is communicated with the sampling pipeline; the gas supply unit is communicated with the other end of the gas blowing pipeline, and blows gas into the sampling pipeline through the gas blowing pipeline.
Preferably, the gas supply unit comprises a compressed air supply unit that blows compressed air into the sampling pipe through the blowing pipe.
Preferably, the pressure of the compressed air is 1.1 to 1.4 standard atmospheres.
Preferably, one end of the exhaust pipeline is communicated with the working chamber, the other end of the exhaust pipeline is communicated with the factory exhaust system, and the exhaust pipeline is used for exhausting the exhaust gas in the working chamber to the factory exhaust system.
In order to solve the problem of false alarm of the existing process chamber, the invention provides a process chamber, comprising: a working chamber; and the exhaust device is communicated with the working chamber and is used for exhausting the exhaust gas in the working chamber.
In order to solve the problem of false alarm of the existing exhaust device, the invention provides an exhaust method, which comprises the following steps:
providing the exhaust device and keeping the exhaust pipeline in an exhaust state;
the air pressure detection step is executed, and specifically comprises the following steps: detecting the air pressure value in the sampling pipeline by using a detection alarm system while exhausting the exhaust pipeline, and executing an alarm function according to the air pressure value;
the step of removing the exhaust condensate is performed, and specifically comprises: and blowing gas into the sampling pipeline by using a blowing system while exhausting the exhaust pipeline, and blowing off condensate of the exhaust gas in the sampling pipeline.
Preferably, the method of performing an alarm function according to the air pressure value includes: and when the air pressure value is out of the preset air pressure threshold range, the detection alarm system executes alarm.
Compared with the prior art, the exhaust device, the process chamber and the exhaust method provided by the invention have the following advantages:
according to the exhaust device provided by the invention, the blowing system is added on the basis of the existing exhaust device, and the blowing system is utilized to blow gas into the sampling pipeline, so that waste gas condensate in the sampling pipeline can be effectively removed, and the problem of false alarm of the exhaust device is solved. The invention is based on the process chamber provided by the exhaust device, and can also effectively remove the waste gas condensate in the sampling pipeline of the process chamber, thereby solving the problem of false alarm of the process chamber. The invention further provides an exhaust method based on the exhaust device, and after the air pressure detection step is carried out for a preset time, the step of removing the exhaust condensate is carried out, so that the exhaust condensate in the exhaust device can be effectively removed, the problem of false alarm of the exhaust device is solved, and the operation efficiency of equipment is improved.
Drawings
FIG. 1 is a schematic diagram of an exhaust device according to the prior art;
FIG. 2 is a schematic diagram of an exhaust apparatus according to an embodiment;
FIG. 3 is a flow chart illustrating steps of an exhaust method according to an embodiment;
wherein reference numerals are as follows:
in fig. 1, 01-exhaust; 010-exhaust pipe; 011—sampling pipe; 012-exhaust line valve; 013-sampling pipeline valve; 014—an air pressure detecting unit; 015-an alarm unit; 02-a working chamber; 3-a factory exhaust system; 4-exhaust condensate;
in FIG. 2, 1-exhaust, 10-exhaust duct; 11-sampling a pipe; 12-an air blowing pipeline; 13-a first valve; 14-a second valve; 15-an air pressure detection unit; 151-a pressure sensor; 152-a digital display; 16-a gas supply unit; 17-an alarm unit; 18-a third valve; 2-a working chamber; 3-factory exhaust system.
Detailed Description
In order to make the objects, advantages and features of the present invention more apparent, the following more particular description of the invention, a process chamber and a method for exhausting gas, as illustrated in the accompanying drawings, is provided. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
Fig. 1 is a schematic structural diagram of a conventional exhaust device 01, which includes:
an exhaust pipe 010, one end of the exhaust pipe 010 is connected with the working chamber 02, the other end is connected with the factory exhaust system 03, and the exhaust pipe 010 is used for exhausting the exhaust gas in the working chamber 02 to the factory exhaust system 03;
a sampling pipe 011, one end of the sampling pipe 011 is communicated with the exhaust pipe 010, and the other end is connected to a factory exhaust system 03;
an exhaust pipe valve 012 and a sampling pipe valve 013, the exhaust pipe valve 012 being provided on the exhaust pipe 010 for controlling the opening or closing of the exhaust pipe 010, the sampling pipe valve 013 being provided on the sampling pipe 011 for controlling the opening or closing of the sampling pipe 011;
the air pressure detecting unit 014 is disposed on the sampling pipe 011, and is configured to detect an air pressure signal in the sampling pipe 011 and convert the air pressure signal into an air pressure value, the air pressure detecting unit 014 may include a pressure sensor and a digital display, the pressure sensor may detect the air pressure signal in the exhaust pipe and convert the air pressure signal into an electrical signal, and the digital display may convert the electrical signal into the air pressure value and display the air pressure value;
and an alarm unit 015, wherein the alarm unit 015 is electrically connected with the air pressure detecting unit 014, and is configured to perform an alarm function according to the air pressure value input by the air pressure detecting unit 014.
When the exhaust pipe 010 is normally connected to the sampling pipe 011, the air pressure in the exhaust pipe 010 is equal to the air pressure in the sampling pipe 011, so the air pressure in the exhaust pipe 010 can be accurately detected by the air pressure detecting unit 014, and normal alarm can be performed by the alarm unit 015, that is, when the air pressure value inputted by the air pressure detecting unit 014 exceeds a preset pressure threshold value, the alarm unit 015 generates an alarm. The engineer may determine that the exhaust is abnormal based on the alarm, and thus determine that there may be an abnormality in the process performed in the process chamber 02, and inspect the process. However, in the above-described exhaust apparatus 01, during the exhaust of the exhaust gas, the inner side wall of the exhaust pipe 010 forms an exhaust gas condensate 04 such as a bead, and particularly when the exhaust pipe 010 is long, the residence time of the exhaust gas in the exhaust pipe is long, and the exhaust gas condensate 04 is more easily condensed into a large size. The exhaust condensate 04 may affect the gas pressure in the sampling pipe 011 after entering or even blocking the sampling pipe 011, which may cause the gas pressure detecting unit 014 to fail to accurately detect the gas pressure value in the exhaust pipe, and further cause the gas pressure value detected by the gas pressure detecting unit 014 to fluctuate, thereby causing the alarm unit 015 to alarm in error, which may reduce the operation efficiency of the process chamber and the process efficiency.
The inventors have based on the above analysis and have studied to provide a new exhaust device.
Referring to fig. 2, an exhaust apparatus 1 provided in this embodiment includes:
an exhaust duct 10;
a sampling pipe 11, wherein one end of the sampling pipe 11 is arranged on the side wall of the exhaust pipe 10 and is communicated with the exhaust pipe 10;
a blowing system connected to the sampling pipe 11 for blowing gas into the sampling pipe 11;
and the detection alarm system is connected with the sampling pipeline 11 and is used for detecting the air pressure value in the sampling pipeline 11 and executing an alarm function according to the air pressure value.
At the point where the sampling pipe 11 communicates with the exhaust pipe 10, the sampling pipe 11 may preferably extend into the exhaust pipe 10 by a length that does not exceed the pipe diameter of the exhaust pipe 10. By this design, the exhaust gas condensate formed on the inner wall of the exhaust pipe 10 can be effectively prevented from directly flowing into the sampling pipe 11, thereby reducing the exhaust gas condensate accumulated in the sampling pipe 11.
In this embodiment, the exhaust pipe 10 may further be provided with a first valve 13, and the first valve 13 is disposed on the sampling pipe 11 and is used to control the opening or closing of the sampling pipe 11.
In this embodiment, the blowing system includes a blowing pipe 12 and a gas supply unit 16, one end of the blowing pipe 12 is provided on a side wall of the sampling pipe 11 and communicates with the sampling pipe 11; the gas supply unit 16 communicates with the other end of the gas blowing pipe 12, and blows gas into the gas exhaust pipe 10 through the gas blowing pipe 12. The insufflation system may further comprise a second valve 14, said second valve 14 being arranged on the insufflation conduit 12 and being adapted to control the opening or closing of the insufflation conduit 12.
In this embodiment, the detection alarm system includes an air pressure detection unit 15 and an alarm unit 17, where the air pressure detection unit 15 is disposed on the sampling pipe 11 and is configured to detect an air pressure signal in the sampling pipe 11 and convert the air pressure signal into an air pressure value, and the alarm unit 17 is electrically connected to the air pressure detection unit 15 and is configured to perform an alarm function according to the air pressure value input by the air pressure detection unit 15.
In this embodiment, the first valve 13 is disposed on a side of the connection between the sampling pipe 11 and the air blowing pipe 12, which is far away from the air exhaust pipe 10, and as shown in fig. 2, the connection is far away from the air exhaust pipe 10, which is on the right side, and the first valve is disposed on the sampling pipe 11 on the right side of the connection between the sampling pipe 11 and the air blowing pipe 12 in fig. 2, so that the opening or closing of the sampling pipe 11 can be effectively controlled, and meanwhile, the first valve does not block the air blowing pipe 12 from being communicated with the air exhaust pipe 10 through a part of the sampling pipe 11.
In this embodiment, preferably, the air pressure detecting unit 15 includes a pressure sensor 151 and a digital display 152 electrically connected to the pressure sensor 151, where the pressure sensor 151 is configured to detect an air pressure signal in the exhaust pipe 10 and convert the air pressure signal into an electrical signal, and the digital display 152 may convert the electrical signal into an air pressure value and display the air pressure value. Preferably, the air pressure detecting unit 15 is disposed at a side of the first valve 13, which is away from the communication between the sampling pipe 11 and the air blowing pipe 12.
In the present embodiment, preferably, the gas supply unit 16 includes a compressed air supply unit that blows compressed air into the exhaust duct 10 through the blowing duct. Because the pressure of the compressed air exceeds the atmospheric pressure, the exhaust condensate accumulated in the sampling pipe 11 is more easily blown away and removed under the action of the larger air pressure, and further, the exhaust condensate condensed near the communication position of the sampling pipe 11 and the exhaust pipe 10 can be blown away and removed, thereby avoiding the influence of the exhaust condensate on the communication between the sampling pipe 11 and the exhaust pipe 10 and effectively improving the problem of false alarm. Preferably, the pressure of the compressed air is 1.1 to 1.4 standard atmospheres.
In this embodiment, preferably, one end of the exhaust pipe 10 is in communication with the working chamber 2, and the other end is in communication with the factory exhaust system 3, and the exhaust pipe 10 is used for exhausting the exhaust gas in the working chamber 2 to the factory exhaust system 3. Preferably, the other end of the sampling pipe 11 is in communication with the plant exhaust system 3, but is not limited thereto. For example, the other end of the sampling pipe 11 may also be in communication with other gas collection devices. The plant exhaust system 3 may intensively treat the exhaust gas collected from the exhaust pipe 10 and the sampling pipe 11.
In this embodiment, the cross sections of the exhaust pipe 10 and the sampling pipe 11 are preferably circular, and the cross section diameter of the sampling pipe 11 is not more than one fifth of the cross section diameter of the exhaust pipe 10. The cross section of the sampling pipe 11 is much smaller (e.g. no more than one fifth) than the cross section of the exhaust pipe 10 to ensure that the sampling pipe 11 is operated without affecting the normal exhaust in the exhaust pipe 10.
In this embodiment, preferably, the exhaust apparatus further includes a third valve 18, and the third valve 18 is disposed on the exhaust pipe 10 and is used to control opening or closing of the exhaust pipe 10. The third valve 18 is preferably a one-way valve.
In this embodiment, the first valve 13 preferably comprises a one-way valve, i.e. the first valve 13 only allows the gas in the exhaust duct 10 to flow from the inlet end (in this embodiment, the end corresponding to the communication with the working chamber 2) to the outlet end (in this embodiment, the end corresponding to the communication with the plant exhaust system 3) and prevents the gas from flowing back from the outlet end to the inlet end.
In this embodiment, the second valve 14 preferably comprises a one-way valve, i.e. the second valve 14 only allows the gas in the sampling pipe 11 to flow from the inlet end (in this embodiment, the end corresponding to the end communicating with the sampling pipe 11) to the outlet end (in this embodiment, the end corresponding to the end communicating with the plant exhaust system 3) and prevents the gas from flowing back from the outlet end to the inlet end.
In this embodiment, the third valve 18 preferably includes a one-way valve, i.e., the third valve 18 allows only the gas in the gas blowing pipe 12 to flow from the inlet end (corresponding to the end communicating with the gas supply in southeast asia in this embodiment) to the outlet end (corresponding to the end communicating with the sampling pipe 11 in this embodiment), and prevents the gas from flowing back from the outlet end to the inlet end.
The first valve 13, the second valve 14 and/or the third valve 18 are preferably one-way valves, which can better control the flow direction of the gas and prevent the gas from flowing back. The first valve 13, the second valve 14 and/or the third valve 18 are not limited to one-way valves, but may be two-way valves.
In this embodiment, preferably, a flowmeter is disposed on the exhaust pipe 10, and the flowmeter is used for detecting the gas flow in the exhaust pipe 10. In combination with the gas flow rate detected by the flowmeter and the gas pressure value detected by the gas pressure detecting unit 15, an engineer can more accurately judge the gas flow condition in the exhaust pipe 10 and can also more accurately judge the degree of accumulation of the exhaust condensate in the sampling pipe 11. For example, when the gas flow rate is kept stable (maintained within a desired range for a certain period of time) and the gas pressure value fluctuates (exceeds a preset range for a certain period of time), it may be judged that the exhaust gas condensate is seriously accumulated in the sampling pipe 11, and a treatment for removing the exhaust gas condensate in the sampling pipe 11 is required.
Preferably, the outlet end of the exhaust pipe 10 may be further provided with an air extracting device, and the air extracting device may generate a negative pressure at the outlet end of the exhaust pipe 10, so as to further facilitate the flow and discharge of the exhaust gas to the outlet end.
One end of the air blowing pipeline 12 can be directly communicated with the sampling pipeline 11, and can also be communicated with the sampling pipeline 11 through a three-way pipe joint. The gas supply unit 16 blows gas into the exhaust duct 10 through the gas blowing duct 12, and can effectively remove the exhaust condensate accumulated in the exhaust duct 10, so that the problem of false alarm can be effectively solved. The exhaust condensate in the exhaust duct 10 may be in a variable state, for example, may be in the form of a liquid bead, may be in the form of a solid particle, etc., and the method provided by the invention can be used for effectively removing the exhaust condensate.
Based on the exhaust device provided by the invention, the invention further provides a process chamber.
With continued reference to fig. 2, taking the exhaust apparatus 1 as an example, the process chamber provided in this embodiment includes: a working chamber 2; and the exhaust device 1, wherein the exhaust device 1 is communicated with the working chamber 2 and is used for exhausting the exhaust gas in the working chamber 2.
The process chamber can be used in equipment such as etching, film deposition, ion implantation, wafer cleaning and the like in semiconductor manufacturing.
The process chamber can also blow gas into the exhaust pipe 10 by using the blowing system in the same way as the exhaust device 1, so that the exhaust condensate accumulated in the exhaust pipe 10 can be effectively removed, and the problem of false alarm of the process chamber can be effectively solved.
The present invention also provides an exhaust method based on the exhaust device provided by the present invention, and the exhaust method provided by the present invention will be described below by taking the exhaust device 1 as an example.
Referring to fig. 3, and with continued reference to fig. 2, an exhaust method provided in this embodiment includes the following steps:
step S1: providing the above-described exhaust apparatus 1, and maintaining the exhaust duct 10 in an exhaust state;
step S2: the air pressure detection step is executed, and specifically comprises the following steps: detecting the air pressure value in the sampling pipeline 11 by using the detection alarm system while the exhaust pipeline 10 is exhausted, and executing an alarm function according to the air pressure value;
step S3: the step of removing the exhaust condensate is performed, and specifically comprises: while the exhaust pipe 10 is exhausted, the gas is blown into the sampling pipe 11 by the blowing system, and the exhaust condensate in the sampling pipe 11 is blown off and removed.
In the present embodiment, the third valve 18 may be opened while the exhaust of step S1 is performed; when performing the air pressure detecting step, the second valve 14 may be closed and the first valve 13 may be opened; the first valve 13 may be closed and the second valve 14 opened while performing the clear exhaust condensate step; the gas flow direction can be better controlled by the first valve 13, the second valve 14 and the third valve 18.
According to the actual process requirements, the step of removing the exhaust gas condensate can be performed synchronously with the exhaust gas, namely, the step of removing the exhaust gas condensate is performed continuously in real time while the exhaust gas is performed; the step of purging the exhaust condensate for a second predetermined time may also be performed while the exhaust duct 10 is being exhausted after each of the air pressure detecting steps for the first predetermined time. The first and second predetermined times may be dependent on the actual process requirements to ensure timely removal of the exhaust condensate from the sampling pipe 11.
The method for executing the alarm function according to the air pressure value comprises the following steps: the air pressure value in the sampling pipeline 11 is detected by the detection alarm system, and when the air pressure value is out of a preset air pressure threshold range, the detection alarm system executes alarm. In this embodiment, specifically, the detection alarm system includes an air pressure detection unit 15 and an alarm unit 17, the air pressure detection unit 15 transmits an air pressure value to the alarm unit 17, and the alarm unit 17 performs an alarm when the air pressure value is out of a preset air pressure threshold range. In this embodiment, the preset air pressure threshold value ranges from 230Pa to 270Pa.
In this embodiment, the blowing system includes a gas supply unit 16 and a blowing duct 12, and the gas supply unit 16 blows compressed air into the sampling duct 11 through the blowing duct 12, and the pressure of the compressed air is preferably 1.1 to 1.4 standard atmospheres. The blowing time may be dependent on the actual process requirements to ensure that the exhaust gas condensate in the exhaust pipe 10 is purged; for example, in the present embodiment, the blowing time is 10s to 30s.
In the exhaust method, the exhaust condensate in the sampling pipeline can be effectively removed by executing the step of removing the exhaust condensate, so that the problem of false alarm of the exhaust device is solved. In actual process production, when the existing exhaust device is used for exhausting, the number of false alarms per month is more than 10, and when the exhaust method provided by the embodiment is used, the false alarms are generated twice in the last 6 months, so that the novel exhaust device and exhaust method effectively solve the problem of false alarms of the device, and greatly improve the operation efficiency of equipment.
In summary, according to the exhaust device provided by the invention, the air blowing system is added on the basis of the existing exhaust device, and the air blowing system is utilized to blow air into the sampling pipeline, so that exhaust condensate in the sampling pipeline can be effectively removed, and the problem of false alarm of the exhaust device is solved. The invention is based on the process chamber provided by the exhaust device, and can also effectively remove the waste gas condensate in the sampling pipeline of the process chamber, thereby solving the problem of false alarm of the process chamber. The invention further provides an exhaust method based on the exhaust device, and the exhaust condensate in the exhaust device can be effectively removed by executing the step of removing the exhaust condensate, so that the problem of false alarm of the exhaust device is solved, and the operation efficiency of equipment is improved.
In addition, it will be understood that while the invention has been described in terms of preferred embodiments, the above embodiments are not intended to limit the invention. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art without departing from the scope of the technology, or the technology can be modified to be equivalent. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention. It is also to be understood that this invention is not limited to the particular methodology, compounds, materials, manufacturing techniques, uses, and applications described herein, as such may vary. It should also be understood that the terminology described herein is for the purpose of describing particular embodiments only, and is not intended to limit the scope of the present invention. It must be noted that, as used herein and in the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to "a step" means a reference to one or more steps, and may include sub-steps. All conjunctions used should be understood in the broadest sense. Thus, the word "or" should be understood as being provided with a definition of a logical "or" rather than a definition of a logical "exclusive or" unless the context clearly indicates the contrary. Structures described herein will be understood to also refer to the functional equivalents of such structures. Language that may be construed as approximate should be construed unless the context clearly indicates the contrary.
Claims (10)
1. An exhaust apparatus, comprising:
an exhaust duct;
the sampling pipeline is arranged at one end of the sampling pipeline, is arranged on the side wall of the exhaust pipeline and is communicated with the exhaust pipeline;
the air blowing system is connected with the sampling pipeline and used for blowing air into the sampling pipeline;
and the detection alarm system is connected with the sampling pipeline and is used for detecting the air pressure value in the sampling pipeline and executing an alarm function according to the air pressure value.
2. The exhaust apparatus as claimed in claim 1, wherein the detection alarm system includes an air pressure detection unit and an alarm unit, the air pressure detection unit being disposed on the sampling pipe for detecting an air pressure value in the sampling pipe; the alarm unit is electrically connected with the air pressure detection unit and is used for executing an alarm function according to the air pressure value input by the air pressure detection unit.
3. The exhaust device according to claim 2, wherein the air pressure detecting unit comprises a pressure sensor and a digital display electrically connected with the pressure sensor, the pressure sensor is used for detecting an air pressure signal in the exhaust pipeline and converting the air pressure signal into an electric signal, and the digital display can convert the electric signal into an air pressure value and display the air pressure value.
4. The exhaust apparatus of claim 1, wherein the blowing system comprises a blowing pipe and a gas supply unit, one end of the blowing pipe being provided at a side wall of the sampling pipe and communicating with the sampling pipe; the gas supply unit communicates with the other end of the gas blowing pipe through which gas is blown into the sampling pipe.
5. The exhaust apparatus as claimed in claim 4, wherein the gas supply unit includes a compressed air supply unit that blows compressed air into the sampling pipe through the blowing pipe.
6. The exhaust apparatus as claimed in claim 5, wherein the pressure of the compressed air is 1.1 to 1.4 standard atmospheres.
7. The exhaust apparatus of claim 1, wherein one end of the exhaust conduit communicates with a process chamber and the other end communicates with a plant exhaust system, the exhaust conduit being configured to exhaust gases from the process chamber to the plant exhaust system.
8. A process chamber, comprising: a working chamber; and an exhaust device according to any one of claims 1 to 7 in communication with the working chamber for exhausting exhaust gases from the working chamber.
9. An exhaust method, comprising the steps of:
providing an exhaust device according to any one of claims 1 to 7, and maintaining the exhaust duct in an exhaust state;
the air pressure detection step is executed, and specifically comprises the following steps: detecting the air pressure value in the sampling pipeline by utilizing the detection alarm system while exhausting the exhaust pipeline, and executing an alarm function according to the air pressure value;
the step of removing the exhaust condensate is performed, and specifically comprises: and blowing gas into the sampling pipeline by using the blowing system while exhausting the exhaust pipeline, and blowing off and removing waste gas condensate in the sampling pipeline.
10. The exhaust method according to claim 9, wherein the method of performing an alarm function according to the air pressure value includes: and when the air pressure value is out of a preset air pressure threshold range, the detection alarm system executes alarm.
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| CN202310171795.1A CN116169064A (en) | 2023-02-24 | 2023-02-24 | Exhaust device, process chamber and exhaust method |
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| CN202310171795.1A CN116169064A (en) | 2023-02-24 | 2023-02-24 | Exhaust device, process chamber and exhaust method |
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