CN116164873A - Temperature compensation method and device for six-dimensional force sensor - Google Patents
Temperature compensation method and device for six-dimensional force sensor Download PDFInfo
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- CN116164873A CN116164873A CN202310431435.0A CN202310431435A CN116164873A CN 116164873 A CN116164873 A CN 116164873A CN 202310431435 A CN202310431435 A CN 202310431435A CN 116164873 A CN116164873 A CN 116164873A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
- H05K7/20136—Forced ventilation, e.g. by fans
- H05K7/20172—Fan mounting or fan specifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/54—Heating elements having the shape of rods or tubes flexible
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
The invention discloses a temperature compensation device of a six-dimensional force sensor, which relates to the technical field of sensors and comprises a shell component, a sensor main body, a sealing component and a stress component. The invention also discloses a compensation method of the temperature compensation device of the six-dimensional force sensor, which comprises the following steps: temperature acquisition, temperature rise, temperature control and equipment zeroing. According to the invention, the central shaft of the hollow structure is arranged in the sensor main body, the electric heating wire is arranged in the central shaft, the electric heating wire can improve the temperature in the central shaft and the elastic beam, and the stress plates in the elastic beam are heated to the same temperature so as to ensure that the deformation amounts of the stress plates affected by the temperature are consistent to realize the temperature compensation of the sensor.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a temperature compensation method and device of a six-dimensional force sensor.
Background
A six-dimensional force sensor is a sensor that measures forces and moments in three directions, X, Y, Z. Six-dimensional force sensors are classified into strain type, capacitance type, piezoelectric type, photoelectric type and piezoresistive type according to measurement principles. Among them, resistive six-dimensional force sensors are one of the types that have been developed earliest, have the most mature technology and are currently used most widely. The resistive strain type six-dimensional force sensor is a sensor for acquiring force and moment information by measuring resistance change generated by a strain gauge attached to an elastic body by utilizing the action of force and moment. In the resistive strain type six-dimensional force sensor, strain gauges are often distributed on two sides of a beam, a group of bridges is formed by two pairs, and the sensor outputs after amplifying the output of the bridges.
Because the temperature change can lead to the zero point of sensor to produce drift to lead to the sensor to have the phenomenon of output, so the phenomenon is called the temperature drift of sensor, consequently, need carry out temperature compensation to six-dimensional force transducer, in order to eliminate the error that temperature change brought, moreover, traditional sensor force when using all is direct acting on center pillow block or inner circle, cause the damage to center pillow block or inner circle easily, be irreparable once center pillow block or inner circle damage back, whole sensor is directly scrapped. Moreover, if the six-dimensional force sensor can not timely dissipate heat generated in normal operation, the measurement accuracy can be affected, and the service life of the sensor can be also affected.
Therefore, it is necessary to solve the above problems by providing a temperature compensation method and device for a six-dimensional force sensor.
Disclosure of Invention
The invention aims to provide a temperature compensation method and device for a six-dimensional force sensor, which are used for solving the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions: the temperature compensation device of the six-dimensional force sensor comprises a shell component, a sensor main body, a sealing component and a stress component, wherein the sensor main body, the sealing component and the stress component are sequentially arranged from bottom to top, and the sensor main body, the sealing component and the stress component are all arranged in the shell component;
the housing assembly includes a housing body;
the sensor main body comprises an installation seat with an annular structure, and the installation seat is arranged in the outer shell;
the sealing assembly comprises a sealing plate which is arranged above the mounting seat and is positioned at the top end of the inner part of the outer shell;
the stress component comprises a stress plate, and the stress plate is arranged above the sealing plate.
Preferably, the inside of mount pad is provided with the center pin, and the center pin sets up to hollow structure, the lateral wall middle part of center pin is encircled and is provided with four elastic beams, the elastic beam sets up to hollow structure, and the one end of elastic beam is fixed to be set up in the inner wall of mount pad, four face middle parts in the outside of elastic beam all are provided with the recess of arc structure, four are all fixed to be provided with in inside four faces of elastic beam and become the roof beam, four it has temperature sensor all to inlay in the middle part of becoming the roof beam, the fixed stress piece that is provided with in middle part of deformation roof beam, and the position of stress piece is corresponding with the recess, four face middle parts of elastic beam all run through and are provided with the access window, and the position of access window is corresponding with the stress piece.
Preferably, the outer side wall of the central shaft is surrounded by four through grooves, the four through grooves are respectively corresponding to the four elastic beams, a fixing sleeve is fixedly arranged in the central shaft, and the outer side of the fixing sleeve is surrounded by an electric heating wire with a spiral structure.
Preferably, the inside of center pin is fixed and is provided with four arc structure's baffle, and the both ends of four baffles are fixed respectively and are set up in the notch both sides of four logical grooves, be provided with the conduction oil between baffle and the fixed cover.
Preferably, a plurality of heat conduction copper pipes with annular structures are fixedly arranged in the central shaft, the heat conduction copper pipes are connected with the partition plate in a penetrating manner, a plurality of heat conduction fins are arranged on the outer side wall of the heat conduction copper pipes, the heat conduction fins are arranged in a butterfly-shaped structure, a plurality of heat conduction holes are formed in the outer side wall of the heat conduction fins in a penetrating manner, and the inner diameters of the two ends of the heat conduction holes are larger than the inner diameter of the middle part of the heat conduction holes; the heat conduction copper pipe is provided with a limiting groove, the heat conduction fins are limited in the limiting groove and can freely rotate around the heat conduction copper pipe, the connecting piece is arranged below the heat conduction fins, and the connecting piece is perpendicular to the heat conduction fins.
Preferably, the inside of center pin is fixed and is provided with the axostylus axostyle, the top of axostylus axostyle is fixed and is provided with the top cap, the constant head tank has been seted up at the upper surface middle part of top cap, a plurality of connecting pin holes have been seted up around the upper surface of top cap.
Preferably, the middle part of the lower surface of the stress plate is fixedly provided with a positioning rod, the lower surface of the stress plate is provided with a plurality of mounting pin holes in a surrounding mode, and the middle part of the upper surface of the stress plate is fixedly provided with an input rod.
Preferably, a sealing groove with an annular structure is formed in the middle of the upper surface of the sealing plate, and a limiting ring is arranged in the middle of the bottom of the sealing groove in a penetrating manner;
the outer side wall of the stress plate is fixedly provided with an extension plate with an annular structure, the outer side of the extension plate is fixedly provided with a sealing ring with an annular structure, the sealing ring is arranged in the sealing groove, and a certain gap is arranged between the sealing ring and the groove bottom of the sealing groove.
Preferably, a supporting seat with an annular structure is fixedly arranged at the bottom end of the inner side wall of the outer shell, and a plurality of mounting holes are formed on the upper surface of the supporting seat in a surrounding mode;
the upper surface of the mounting seat is provided with a plurality of positioning holes corresponding to the mounting holes in a surrounding manner;
the upper surface of the sealing plate is provided with a plurality of screw holes corresponding to the mounting holes in a surrounding mode.
A compensation method of a temperature compensation device of a six-dimensional force sensor, comprising the steps of:
step one, acquiring temperature data of positions of a plurality of stress pieces through a temperature sensor on a deformed beam;
step two, temperature is raised, the heat conduction oil in the central shaft is heated through the electric heating wire, so that the temperature of the heat conduction oil is raised, the heat conduction oil transmits heat to the air in the elastic beam through the heat conduction copper pipe, so that the temperature in the elastic beam is raised, and the temperature of the positions where the stress pieces are located is raised;
step three, temperature control, namely acquiring the temperatures of the positions of the stress pieces through a temperature sensor on the deformed beam, and controlling the electric heating wire to continuously heat until the temperatures of the positions of the stress pieces are the same, and controlling the heating efficiency of the electric heating wire at the moment to ensure that the temperatures of the positions of the stress pieces are kept constant;
and fourthly, zeroing the equipment, and zeroing the output value of the equipment after the temperature of the positions of the stress pieces is kept constant, wherein the deformation of the stress pieces affected by the temperature is kept consistent at the moment, so that the temperature compensation of the sensor can be realized.
The invention has the technical effects and advantages that:
1. according to the invention, the central shaft of the hollow structure is arranged in the sensor main body, the plurality of elastic beams are arranged on the outer side of the central shaft, the deformation beams are arranged on the four inner surfaces of the plurality of elastic beams, stress plates are arranged on the deformation beams, force and moment information is acquired by detecting resistance changes generated by the stress plates, the electric heating wire is arranged in the central shaft, the temperature in the central shaft and the elastic beams can be improved by the electric heating wire, the temperature compensation of the sensor is realized by heating the plurality of stress plates in the elastic beams to the same temperature, so that the deformation amount of the plurality of stress plates influenced by the temperature is consistent, and the temperature compensation of the stress plates in the application is realized by controlling the temperature in the space of the stress plates, so that the influence of the external temperature on the sensor can be effectively reduced, and the detection precision of the sensor can be further ensured.
2. According to the invention, before zeroing, the heat conduction oil in the central shaft is heated by the electric heating wire, so that the temperature of the heat conduction oil rises, the heat conduction oil transmits heat to the heat conduction fins and the connecting pieces through the heat conduction copper pipe, and then the sensor main body is driven to swing back and forth by the device, so that the heat conduction fins and the connecting pieces swing relative to the heat conduction copper pipe, the reciprocating motion of the connecting pieces plays a role of fanning, the flow of air nearby the connecting pieces can be promoted, and the heat can be quickly transmitted into the elastic beam, so that the temperature of the positions of the stress pieces can be quickly risen, the heat conduction time is saved, and the zeroing speed is improved; the uniformity of heat conduction and dispersion can be guaranteed, so that the temperature of the positions where the stress pieces are located is kept constant, and the zeroing accuracy is improved.
3. When the device is zeroed and normally used, the heat fins can freely rotate relative to the heat conduction copper pipe in the synchronous and repeated swinging motion of the sensor main body along with the measured device, and the heat conduction fins can drive the connecting sheets below the heat fins to reciprocate in the motion process, so that the fan wind effect is achieved, the air flow in and around the elastic beam can be promoted, the heat on the elastic beam is taken away, the heat exchanging effect with the outside in the following air flow process is promoted, the heat dissipation effect is further achieved, and the service life of the elastic beam and the accuracy of stress sheet detection on the elastic beam are improved.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present invention.
Fig. 2 is an exploded view of the overall structure of the present invention.
Fig. 3 is a schematic diagram of a sensor body structure according to the present invention.
Fig. 4 is a schematic view of the inside of the central shaft structure of the present invention.
Fig. 5 is a schematic view of a central shaft structure in a top-down section.
Fig. 6 is an internal schematic view of the spring beam structure of the present invention.
Fig. 7 is a schematic view of the structure of the heat conduction copper pipe of the present invention.
Fig. 8 is a schematic view of the housing assembly structure of the present invention.
FIG. 9 is a schematic view of a seal assembly according to the present invention.
FIG. 10 is a schematic diagram of a stress assembly according to the present invention.
FIG. 11 is a schematic cross-sectional view of a seal assembly and a force bearing assembly of the present invention.
Fig. 12 is a schematic view of the structure of the heat conductive fin and the connecting sheet of the present invention.
In the figure: 1. a housing assembly; 2. a sensor body; 3. a seal assembly; 4. a force-bearing component; 101. an outer housing; 102. a support base; 103. a mounting hole; 201. a mounting base; 202. a central shaft; 203. an elastic beam; 204. a groove; 205. a deformed beam; 206. stress pieces; 207. an access panel; 208. a through groove; 209. a fixed sleeve; 210. heating wires; 211. a partition plate; 212. a heat conducting copper pipe; 213. a heat conduction fin; 214. a heat conduction hole; 215. a shaft lever; 216. a top cover; 217. a positioning groove; 218. a connecting pin hole; 219. positioning holes; 220. a connecting sheet; 301. a sealing plate; 302. sealing grooves; 303. a limiting ring; 304. a screw hole; 401. a force-bearing plate; 402. a positioning rod; 403. mounting pin holes; 404. an extension plate; 405. a seal ring; 406. an input lever.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides a temperature compensation device of a six-dimensional force sensor as shown in fig. 1 to 12, which comprises a shell component 1, a sensor main body 2, a sealing component 3 and a stress component 4, wherein the sensor main body 2, the sealing component 3 and the stress component 4 are sequentially arranged from bottom to top, and the sensor main body 2, the sealing component 3 and the stress component 4 are all arranged in the shell component 1.
The housing assembly 1 comprises a housing body 101; the supporting seat 102 with an annular structure is fixedly arranged at the bottom end of the inner side wall of the outer shell 101, and a plurality of mounting holes 103 are formed in the upper surface of the supporting seat 102 in a surrounding mode.
The sensor body 2 comprises a mounting seat 201 with an annular structure, and the mounting seat 201 is arranged in the outer shell 101; specifically, the inside of mount pad 201 is provided with center pin 202, and center pin 202 sets up to hollow structure, the lateral wall middle part of center pin 202 encircles and is provided with four elastic beams 203, elastic beams 203 sets up to hollow structure, and the one end of elastic beams 203 is fixed to be set up in the inner wall of mount pad 201, four face middle parts in the outside of elastic beams 203 all are provided with arc structure's recess 204, four inside faces of elastic beams 203 all are fixed to be provided with the beam 205 that becomes, temperature sensor has all been inlayed at the middle part of four beam 205 that becomes, temperature sensor's setting can realize the detection to the position temperature of a plurality of stress pieces 206.
More specifically, the middle part of the deformed beam 205 is fixedly provided with a stress plate 206, and the position of the stress plate 206 corresponds to the groove 204, when the elastic beam 203 is deformed, due to the arrangement of the groove 204, the deformation amount of the middle part of the elastic beam 203 is larger, so that the deformation amount of the stress plate 206 is larger, and the detection sensitivity of the stress plate 206 is ensured.
And, all run through in four face middle parts of elastic beam 203 and be provided with access hole 207, and the position of access hole 207 is corresponding with stress piece 206, has made things convenient for the deformation condition of stress piece 206 to overhaul. Moreover, four through grooves 208 are formed around the outer side wall of the central shaft 202, and the four through grooves 208 correspond to the four elastic beams 203, a fixing sleeve 209 is fixedly arranged in the central shaft 202, and a heating wire 210 with a spiral structure is arranged around the outer side of the fixing sleeve 209.
Further, the inside of center pin 202 is fixed and is provided with four arc structure's baffle 211, and the both ends of four baffles 211 are fixed respectively and are set up in four notch both sides of leading to groove 208, are provided with the conduction oil between baffle 211 and the fixed cover 209, and the even transmission to heat copper pipe 212 of heat that the heating wire 210 produced can be with the setting of conduction oil to can avoid center pin 202 to pile up because of inside heat and produce the expansion deformation influence follow-up use.
Further, the heat conducting copper pipes 212 with a plurality of annular structures are fixedly arranged in the central shaft 202, the heat conducting copper pipes 212 are connected with the partition 211 in a penetrating manner, the outer side walls of the heat conducting copper pipes 212 are provided with a plurality of heat conducting fins 213, the heat conducting copper pipes 212 and the heat conducting fins 213 are matched, heat in the heat conducting oil can be absorbed, and the heat is transmitted to the air on one side of the partition 211, so that the temperature of the air in the elastic beam 203 is increased. And, the heat conduction fin 213 sets up to butterfly structure, and the lateral wall of heat conduction fin 213 runs through and has seted up a plurality of heat conduction holes 214, and the internal diameter at heat conduction hole 214 both ends is greater than the internal diameter of its middle part, and the setting of the inside change internal diameter of heat conduction hole 214 makes its inner wall and the area of contact of air obtain promoting to make the area of contact of heat conduction fin 213 and air obtain promoting, and then make the heat conduction effect of heat conduction fin 213 obtain promoting.
The heat conduction copper pipe 212 is provided with a limit groove, the heat conduction fins 213 are limited in the limit groove and can freely rotate around the heat conduction copper pipe 212, and the connecting sheet 220 is arranged below the heat conduction fins 213. Wherein the connection piece 220 is arranged perpendicular to the heat conductive fin 213. In this way, on the one hand, when the sensor main body 2 follows the measured device to perform the repeated swinging motion in the working process, the heat conducting fin 213 can freely rotate relative to the heat conducting copper pipe 212, and in the motion process, the connecting piece 220 below the heat conducting fin 213 can reciprocate, so as to play a role of fanning, promote the flow of air nearby, and facilitate the conduction and uniform distribution of heat. On the other hand, the connection piece 220 is connected with the heat conduction fin 213, so that a heat conduction effect can be achieved; furthermore, the connecting piece 220 is arranged below the heat conducting fin 213, so that the counterweight effect can be achieved, the swinging of the heat conducting fin 213 is promoted under the inertia effect, and the connecting piece 220 is driven to swing through the heat conducting fin 213, so that the fanning effect is improved.
The functions of the heat conduction copper pipe 212, the heat conduction fin 213 and the connecting piece 220 are mainly represented in the following two situations: firstly, before the temperature of the positions of the stress pieces 206 is regulated and kept constant to carry out zeroing, heating oil in the central shaft 202 through the electric heating wires 210 to enable the temperature of the heat conduction oil to rise, the heat conduction oil transmits heat to the heat conduction fins 213 and the connecting pieces 220 through the heat conduction copper pipes 212, then the sensor main body 2 is driven to swing back and forth through the device, further the heat conduction fins 213 and the connecting pieces 220 swing relative to the heat conduction copper pipes 212, the reciprocating motion of the connecting pieces 220 plays a role of fanning, the flow of air nearby the connecting pieces can be promoted, and the heat can be quickly transmitted into the elastic beams 203, so that the temperature of the positions of the stress pieces 206 can be quickly risen, the heat conduction time is saved, and the zeroing speed is improved; second, since the connection piece 220 promotes the air flow, the uniformity of heat conduction and dispersion can be ensured, so that the temperature at the positions of the stress pieces 206 is kept constant, and the zeroing accuracy is improved. Secondly, when the device is zeroed and used normally, if the sensor main body 2 follows the device to be measured to synchronously and repeatedly swing, the elastic beam 203 connected with the sensor main body 2 can be repeatedly extruded and released, when the elastic beam 203 is repeatedly extruded and released at high frequency, the temperature of the elastic beam 203 can rise, if heat cannot be timely dissipated, the service life of the elastic beam 203 can be influenced, and the accuracy of detection of the stress plate 206 on the elastic beam 203 can be influenced. In the synchronous and repeated swinging motion of the sensor main body 2 (in which the electric heating wire 210 is in a stopped state) following the measured device, the heat conducting fin 213 can freely rotate relative to the heat conducting copper pipe 212, and the heat conducting fin 213 can drive the connecting piece 220 below the heat conducting fin 213 to reciprocate in the motion process, so that the effect of fanning wind is achieved, the air flow in and around the elastic beam 203 can be promoted, the heat on the elastic beam 203 is taken away, the heat exchanging effect with the outside in the following air flow process is promoted, the heat dissipation effect is further achieved, and the service life of the elastic beam 203 and the accuracy of the detection of the stress piece 206 on the elastic beam 203 are improved.
The inside of center pin 202 is fixed and is provided with axostylus axostyle 215, and the top of axostylus axostyle 215 is fixed and is provided with top cap 216, and the constant head tank 217 has been seted up at the upper surface middle part of top cap 216, and a plurality of connecting pin holes 218 have been seted up around the upper surface of top cap 216.
The upper surface of the mounting seat 201 is circumferentially provided with a plurality of positioning holes 219 corresponding to the mounting holes 103.
Specifically, the seal assembly 3 includes a seal plate 301, the seal plate 301 is disposed above the mount 201, and the seal plate 301 is located at an inner top end of the outer case 101.
More specifically, a sealing groove 302 with an annular structure is formed in the middle of the upper surface of the sealing plate 301, a limiting ring 303 is arranged in the middle of the bottom of the sealing groove 302 in a penetrating manner, and the limiting ring 303 is used for limiting the movement range of the sealing ring 405; and, a plurality of screw holes 304 corresponding to the mounting holes 103 are formed on the upper surface of the sealing plate 301 in a surrounding manner, and screws can be inserted into the screw holes 304 to realize connection among the sealing plate 301, the mounting seat 201 and the supporting seat 102.
The stress assembly 4 comprises a stress plate 401, and the stress plate 401 is arranged above the sealing plate 301; specifically, the middle part of the lower surface of the stress plate 401 is fixedly provided with a positioning rod 402, the lower surface of the stress plate 401 is surrounded by a plurality of mounting pin holes 403, and the mounting pin holes 403 can be connected with the connecting pin holes 218 through pin rods, so that the connection between the stress assembly 4 and the sensor main body 2 can be realized.
More specifically, an input rod 406 is fixedly arranged in the middle of the upper surface of the stress plate 401, and the input rod 406 is used for receiving external force and moment; moreover, the extension board 404 of annular structure is fixedly arranged on the outer side wall of the stress board 401, the sealing ring 405 of annular structure is fixedly arranged on the outer side of the extension board 404, the sealing ring 405 is arranged in the sealing groove 302, a certain gap is arranged between the sealing ring 405 and the groove bottom of the sealing groove 302, the sealing ring 405 can slide in the sealing groove 302, the gap is arranged so that the sliding between the sealing ring 405 and the sealing groove 302 is free of resistance, the sealing ring 405 is positioned in the sealing groove 302, a certain sealing effect can be achieved, and the movement between the sealing ring 405 and the sealing groove 302 is limited by the size of the sealing groove 302, so that the limitation of the detection range of the sensor main body 2 can be achieved, and the excessive stress damage of the sensor main body 2 can be avoided.
When the invention is actually applied, the shell component 1 is arranged on the equipment base, the stress component 4 receives external force and moment, the stress component 4 transmits the force and moment to the central shaft 202 in the sensor main body 2, so that the central shaft 202 is deviated, one end of the elastic beam 203 is fixedly arranged on the mounting seat 201, and the mounting seat 201 is fixed in the shell component 1, therefore, when the central shaft 202 is deviated, one end of the elastic beam 203 is deviated along with the central shaft 202, the elastic beam 203 is deformed, and when the elastic beam 203 is deformed, the deformation beam 205 in the elastic beam is moved along with the two ends of the elastic beam, so that the deformation beam 205 is deformed in an equal proportion, and when the stress piece 206 on the deformation beam 205 is deformed, the force and moment information can be obtained by detecting the resistance change generated by the stress piece 206.
The invention also discloses a compensation method of the temperature compensation device of the six-dimensional force sensor, which comprises the following steps:
step one, acquiring temperature, namely acquiring temperature data of positions of a plurality of stress pieces 206 through a temperature sensor on a deformed beam 205;
step two, the temperature is raised, the heat conduction oil in the central shaft 202 is heated by the electric heating wire 210, so that the temperature of the heat conduction oil is raised, and the heat conduction oil transmits heat to the air in the elastic beam 203 through the heat conduction copper pipe 212, so that the temperature in the elastic beam 203 is raised, and the temperature of the positions where the stress pieces 206 are located is raised;
step three, temperature control, namely acquiring the temperatures of the positions of the stress pieces 206 through a temperature sensor on the deformed beam 205, and controlling the electric heating wire 210 to continuously heat until the temperatures of the positions of the stress pieces 206 are the same, and controlling the heating efficiency of the electric heating wire 210 at the moment to ensure that the temperatures of the positions of the stress pieces 206 are kept constant;
and fourthly, zeroing the device, wherein after the temperature of the positions of the stress plates 206 is kept constant, zeroing the output value of the device, and at the moment, the deformation of the stress plates 206 caused by the influence of the temperature is kept consistent, so that the temperature compensation of the sensor can be realized.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present invention, and although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present invention.
Claims (9)
1. The temperature compensation device of the six-dimensional force sensor is characterized by comprising a shell component (1), a sensor main body (2), a sealing component (3) and a stress component (4);
the housing assembly (1) comprises a housing body (101);
the sensor main body (2) comprises a mounting seat (201) with an annular structure, and the mounting seat (201) is arranged in the outer shell (101);
the inside of mount pad (201) is provided with center pin (202), and center pin (202) set up to hollow structure, the lateral wall middle part of center pin (202) encircles and is provided with four elastic beams (203), elastic beams (203) set up to hollow structure, and the fixed inner wall that sets up in mount pad (201) of one end of elastic beams (203), four face middle parts in the outside of elastic beams (203) all are provided with recess (204) of arc structure, four face in the inside of elastic beams (203) all are fixed and are provided with flexible roof beam (205), four the middle part of flexible roof beam (205) all is inlayed and is had temperature sensor, the fixed stress piece (206) that is provided with in middle part of flexible roof beam (205), and the position of stress piece (206) corresponds with recess (204), four face middle parts of elastic beams (203) all are run through and are provided with access window (207), and the position of access window (207) corresponds with stress piece (206).
Four through grooves (208) are formed in the outer side wall of the central shaft (202) in a surrounding mode, the four through grooves (208) correspond to the four elastic beams (203) respectively, a fixing sleeve (209) is fixedly arranged in the central shaft (202), and an electric heating wire (210) with a spiral structure is arranged in the outer side of the fixing sleeve (209) in a surrounding mode;
the sealing assembly (3) comprises a sealing plate (301), wherein the sealing plate (301) is arranged above the mounting seat (201), and the sealing plate (301) is positioned at the top end of the inner part of the outer shell (101);
the stress assembly (4) comprises a stress plate (401), and the stress plate (401) is arranged above the sealing plate (301).
2. A temperature compensation device for a six-dimensional force sensor according to claim 1, wherein: the sensor body (2), the sealing assembly (3) and the stress assembly (4) are sequentially arranged from bottom to top, and the sensor body (2), the sealing assembly (3) and the stress assembly (4) are arranged in the shell assembly (1).
3. A temperature compensation device for a six-dimensional force sensor according to claim 1, wherein: the inside of center pin (202) is fixed and is provided with baffle (211) of four arc structures, and the both ends of four baffle (211) are fixed respectively and are set up in the notch both sides of four logical groove (208), be provided with the conduction oil between baffle (211) and fixed cover (209).
4. A temperature compensation device for a six-dimensional force sensor according to claim 3, characterized in that: a plurality of heat conduction copper pipes (212) with annular structures are fixedly arranged in the central shaft (202), the heat conduction copper pipes (212) are in penetrating connection with the partition plates (211), a plurality of heat conduction fins (213) are arranged on the outer side walls of the heat conduction copper pipes (212), the heat conduction fins (213) are of butterfly structures, a plurality of heat conduction holes (214) are formed in the outer side walls of the heat conduction fins (213) in penetrating mode, and the inner diameters of two ends of the heat conduction holes (214) are larger than the inner diameter of the middle portion of the heat conduction holes; be equipped with the spacing groove on heat conduction copper pipe (212), heat conduction fin (213) are spacing in the spacing inslot and can rotate around heat conduction copper pipe (212) freedom, the below of heat conduction fin (213) is equipped with connection piece (220), connection piece (220) perpendicular to heat conduction fin (213) set up.
5. The temperature compensation device of a six-dimensional force sensor of claim 4, wherein: the inside of center pin (202) is fixed and is provided with axostylus axostyle (215), the top of axostylus axostyle (215) is fixed and is provided with top cap (216), constant head tank (217) have been seted up at the upper surface middle part of top cap (216), a plurality of connecting pin holes (218) have been seted up around the upper surface of top cap (216).
6. A temperature compensation device for a six-dimensional force sensor according to claim 1, wherein: the lower surface middle part of atress board (401) is fixed and is provided with locating lever (402), a plurality of mounting pinhole (403) are walked around to the lower surface of atress board (401), the upper surface middle part of atress board (401) is fixed and is provided with input rod (406).
7. A temperature compensation device for a six-dimensional force sensor according to claim 1, wherein: a sealing groove (302) with an annular structure is formed in the middle of the upper surface of the sealing plate (301), and a limiting ring (303) is arranged in the middle of the bottom of the sealing groove (302) in a penetrating manner;
the sealing device is characterized in that an extension plate (404) with an annular structure is fixedly arranged on the outer side wall of the stress plate (401), a sealing ring (405) with an annular structure is fixedly arranged on the outer side of the extension plate (404), the sealing ring (405) is arranged in the sealing groove (302), and a certain gap is formed between the sealing ring (405) and the groove bottom of the sealing groove (302).
8. A temperature compensation device for a six-dimensional force sensor according to claim 1, wherein: a supporting seat (102) with an annular structure is fixedly arranged at the bottom end of the inner side wall of the outer shell (101), and a plurality of mounting holes (103) are formed in the upper surface of the supporting seat (102) in a surrounding mode;
the upper surface of the mounting seat (201) is provided with a plurality of positioning holes (219) corresponding to the mounting holes (103) in a surrounding mode;
the upper surface of the sealing plate (301) is circumferentially provided with a plurality of screw holes (304) corresponding to the mounting holes (103).
9. A compensation method of a temperature compensation device of a six-dimensional force sensor, the compensation method adopting a temperature compensation device of a six-dimensional force sensor according to any one of claims 1-8 to compensate temperature, comprising the steps of:
step one, acquiring temperature, namely acquiring temperature data of positions of a plurality of stress pieces (206) through a temperature sensor on a deformed beam (205);
step two, temperature is raised, the heat conduction oil in the central shaft (202) is heated through the electric heating wire (210) to raise the temperature of the heat conduction oil, and the heat conduction oil transmits heat to the air in the elastic beam (203) through the heat conduction copper pipe (212) to raise the temperature in the elastic beam (203), so that the temperature of the positions where the stress pieces (206) are located is raised;
step three, temperature control, namely acquiring the temperatures of the positions of the stress pieces (206) through a temperature sensor on the deformed beam (205), and controlling the heating wire (210) to continuously heat until the temperatures of the positions of the stress pieces (206) are the same, and controlling the heating efficiency of the heating wire (210) at the moment to ensure that the temperatures of the positions of the stress pieces (206) are kept constant;
and fourthly, zeroing the equipment, and zeroing the output value of the equipment after the temperature of the positions of the stress pieces (206) is kept constant, wherein the deformation of the stress pieces (206) affected by the temperature is kept consistent, so that the temperature compensation of the sensor is realized.
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