CN116149378A - Driving system, visual inspection device and system - Google Patents

Abstract

The application relates to the technical field of visual detection, and particularly discloses a driving system, visual detection equipment and a system. The driving system comprises a main controller, a signal processing module and a motion module, wherein the main controller outputs a target waveform with preset characteristics through a DAC and a timer which are mutually cascaded; the signal processing module is used for outputting an analog driving signal corresponding to the amplified target waveform after performing signal processing on the target waveform; the motion module is used for generating displacement under the driving action of the analog driving signal and sending a feedback signal to the main controller so that the main controller can adjust the preset characteristic of the target waveform according to the feedback signal. The main controller can adjust the preset characteristics of the target waveform according to the feedback signal, so as to adjust the displacement speed and time of the motion module, and meet the actual fly-swatter requirement. Therefore, the target waveform can be flexibly adjusted according to the real-time feedback information of the motion module, so that the real-time adjustment of the analog driving signal is realized, and the displacement of the motion module can be rapidly and accurately controlled.

Description

Driving system, visual inspection device and system

Technical Field

The application relates to the technical field of visual detection, in particular to a driving system, visual detection equipment and a system.

Background

With the continuous development of semiconductor technology, semiconductor devices are increasingly integrated, semiconductor chips are becoming smaller in size, traditional manual visual inspection cannot meet the requirements of detection quality and detection efficiency, and defect detection equipment based on machine vision is generated.

The existing visual detection equipment can comprise a shooting stopping mode and a shooting flying mode, wherein the shooting stopping mode refers to that when each shooting position is reached, the visual detection equipment stops moving to carry out shooting and subsequent image processing, and the efficiency of the mode is low; the fly shooting mode means that the visual detection equipment always keeps moving at a high speed, and the workpiece is shot in the moving process, but the image shot by the mode is blurred, the detection precision is poor, and the follow-up processing is not facilitated.

Therefore, how to ensure the detection accuracy without affecting the detection efficiency is one of the problems that the art is urgent to solve.

Disclosure of Invention

Based on this, it is necessary to provide a driving system, a visual inspection apparatus, and a system in order to solve the above-described problems.

According to a first aspect of embodiments of the present application, there is provided a drive system comprising:

the main controller outputs a target waveform with preset characteristics through a DAC and a timer which are mutually cascaded;

the signal processing module is electrically connected with the master controller and is used for outputting an amplified analog driving signal corresponding to the target waveform after performing signal processing on the target waveform;

and the motion module is electrically connected with the signal processing module and is used for generating displacement under the driving action of the analog driving signal and sending a feedback signal to the main controller so that the main controller adjusts the preset characteristic of the target waveform according to the feedback signal.

In one embodiment, the target waveform comprises a trapezoidal wave.

In one embodiment, the preset features include at least a rising duration of the rising edge, a falling duration of the falling edge, and a pulse width.

In one embodiment, the signal processing module includes:

the power amplifying circuit is electrically connected with the master controller and is used for amplifying the target waveform and converting the target waveform into a pulse signal;

the grid driving circuit is electrically connected with the power amplifying circuit and is used for generating grid driving voltage according to the pulse signal;

the half-bridge circuit comprises a MOS switch tube which is conducted or closed under the drive of the grid driving voltage so that the half-bridge circuit outputs an analog driving signal;

and the low-pass filter circuit is electrically connected with the half-bridge circuit and is used for carrying out filter processing on the driving signal so as to obtain an amplified analog driving signal corresponding to the target waveform.

In one embodiment, the master controller is configured to determine actual travel information of the motion module according to a feedback signal of the motion module, and adjust a preset feature of the target waveform according to the actual travel information.

In one embodiment, the motion module comprises a piezoceramic motor.

In one embodiment, the feedback signal comprises a voltage signal of a resistor internal to the piezoceramic motor.

According to a second aspect of embodiments of the present application, there is provided a visual inspection apparatus comprising:

a base;

a bearing element connected with the base;

the photosensitive element is supported on the bearing element;

the lens is arranged at the bottom of the photosensitive element, and the axis of the lens is perpendicular to the photosensitive element;

the driving system is used for driving the bearing element to drive the photosensitive element to move along the first direction, wherein the bearing element is driven to move when the motion module moves;

and the reset component is used for driving the bearing element to drive the photosensitive element to move along a second direction after the driving system stops driving so as to reset the photosensitive element, and the first direction is opposite to the second direction and is perpendicular to the axis of the lens.

In one embodiment, the return assembly includes a spring member.

According to a third aspect of embodiments of the present application, there is provided a visual inspection system comprising:

a visual inspection apparatus as described above;

the transmission mechanism is used for driving the visual detection equipment to move along the second direction so as to reach each detection position and sequentially detect each to-be-detected product;

before the visual detection equipment reaches each detection position, the driving system drives the bearing element to drive the photosensitive element to move along a first direction opposite to a second direction, so that the photosensitive element and each to-be-detected article are relatively stationary when the visual detection equipment reaches each detection position; and after the driving system stops driving, the reset component drives the bearing element to drive the photosensitive element to move along the second direction so as to reset the photosensitive element.

According to the driving system, the target waveform with the preset characteristic is output through the DAC and the timer which are mutually cascaded, the signal processing module is used for processing the target waveform to obtain the amplified analog driving signal corresponding to the target waveform, the motion module is correspondingly displaced under the driving of the analog driving signal and sends the feedback signal to the main controller, and the main controller can adjust the preset characteristic of the target waveform according to the feedback signal, so that the displacement speed and time of the motion module are adjusted to meet the actual flying shooting requirement. Therefore, the target waveform can be flexibly adjusted according to the real-time feedback information of the motion module, so that the real-time adjustment of the analog driving signal is realized, and the displacement of the motion module can be rapidly and accurately controlled.

When the device is applied to the visual inspection device, the driving system can drive the bearing element to drive the photosensitive element to move along the first direction opposite to the second direction when the whole device moves towards the second direction, so that the photosensitive element and the to-be-inspected object can be kept relatively static when the visual inspection device reaches the inspection position, the acquired image information is clearer, the inspection precision is improved, meanwhile, the driving system can flexibly control and adjust the target waveform, namely, the displacement of the bearing element can be rapidly and accurately controlled, and the reset component can drive the photosensitive element to move along the second direction after the driving system stops driving, so that the photosensitive element is rapidly reset, continuously moves along with the whole visual inspection device and performs the next inspection of the to-be-inspected object, and therefore, the inspection precision is ensured while the inspection efficiency of each to-be-inspected object is not influenced.

Drawings

FIG. 1 is a schematic diagram of a driving system according to an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of a driving system according to another embodiment of the present disclosure;

fig. 3 is a schematic structural diagram of a visual inspection apparatus according to an embodiment of the present application.

Reference numerals illustrate:

100. a master controller; 200. a signal processing module; 210. a power amplifying circuit; 220. a gate driving circuit; 230. a half-bridge circuit; 240. a low pass filter circuit; 300. a motion module; 410. a base; 420. a carrier element; 430. a photosensitive element; 440. a lens; 450. a reset assembly; A. a first direction; B. a second direction.

Detailed Description

In order to facilitate an understanding of the present application, a more complete description of the present application will now be provided with reference to the relevant figures. The drawings illustrate preferred embodiments of the present application. This application may, however, be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless explicitly defined otherwise.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

Current visual inspection devices include stop-and-fly modes. The shooting stopping mode means that when each detection position is reached, the visual detection equipment stops moving and performs shooting and subsequent image processing; the fly shooting mode means that the visual detection equipment always keeps moving at a high speed, and the workpiece is shot in the moving process. Although clear images can be obtained through the shooting stopping mode, shooting is stopped when each detection position is needed, the detection efficiency is low, and the method is not suitable for detecting a large number of workpieces in industry. By the above-mentioned fly shooting mode, although shooting does not need to be stopped, an image obtained in high-speed movement is blurred, and detection accuracy is affected.

Therefore, how to ensure the detection accuracy without affecting the detection efficiency is one of the problems that the art is urgent to solve.

In order to solve the above problems, embodiments of the present application provide a driving system, a visual inspection apparatus, and a visual inspection system.

Referring to fig. 1, in one embodiment, a driving system is provided, including a main controller 100, a signal processing module 200, and a motion module 300.

The main controller 100 outputs a target waveform having a predetermined characteristic through a DAC and a timer that are cascaded with each other. The signal processing module 200 is electrically connected to the main controller 100, and is configured to output an analog driving signal corresponding to the amplified target waveform after performing signal processing on the target waveform. The motion module 300 is electrically connected to the signal processing module 200, and is configured to displace under the driving action of the analog driving signal, and send a feedback signal to the main controller 100, so that the main controller 100 adjusts the preset characteristic of the target waveform according to the feedback signal.

In the driving system, the target waveform with the preset characteristic is output through the DAC and the timer which are mutually cascaded, then the signal processing module 200 processes the target waveform to obtain the amplified analog driving signal corresponding to the target waveform, the motion module 300 is correspondingly displaced under the driving of the analog driving signal, and the feedback signal is sent to the main controller 100, so that the main controller 100 can adjust the preset characteristic of the target waveform according to the feedback signal, and further adjust the displacement speed and time of the motion module 300, so as to meet the actual fly-over requirement. Therefore, the target waveform can be flexibly adjusted according to the real-time feedback information of the motion module 300, so that the real-time adjustment of the analog driving signal is realized, and the displacement of the motion module 300 can be rapidly and accurately controlled.

The driving system provided in this embodiment may be applied to a fly-swatter technology, when the visual detection device moves along each detection position, the photosensitive element 430 may be rapidly and accurately driven by the driving system to move to a position relatively static to the to-be-detected article to photograph the to-be-detected article, and after photographing is finished, the driving of the reset component 450 is rapidly reset, and the whole device is continuously followed to the next detection position, so that the detection accuracy is effectively ensured under the condition that the detection efficiency is not affected.

Specifically, a DAC (digital-to-analog converter) is a circuit module inside a main controller for performing DA conversion (i.e., digital-to-analog conversion), in which an analog voltage can be output by setting an internal register (digital section), and in general, the digital section is proportional to an analog output section, and a desired waveform can be accurately output by precisely controlling time.

The scaled data may be stored in one array in its entirety, for example, 100 sets of data are stored in one array. The analog output section generates a desired waveform by writing each set of data into the internal register (digital section) at a certain time interval. The above-mentioned certain time interval can be implemented by using a timer, and the timer can produce an interrupt at intervals, at the same time, and can transfer the data in the array to internal register (digital portion), so that it can produce an analog output with accurate time interval, and can obtain a waveform with desired shape by means of calculation of waveform.

In one embodiment, the predetermined characteristics include at least a rising duration of the rising edge, a falling duration of the falling edge, and a pulse width. In practical applications, the displacement speed and time displacement information of the motion module 300 need to be controlled rapidly and accurately, so that the position of the motion module 300 can be regulated and controlled accurately, and the displacement speed and time displacement information of the motion module 300 can be controlled by the shape characteristics of the target waveform, such as the characteristics of rising edges and falling edges, pulse width and the like.

The features of the rising edge mainly include the rising duration of the rising edge. Specifically, the longer the rising period of the rising edge, the more gentle the rising edge, and the shorter the rising period of the rising edge, the steeper the rising edge. Assuming that the state of the motion module 300 corresponding to the rising edge is an acceleration state, the longer the rising time of the rising edge is, the fast acceleration state, whereas the shorter the rising time of the rising edge is, the slow acceleration state. Likewise, the longer the falling duration of the falling edge, the more gradual the falling edge, and the shorter the falling duration of the falling edge, the steeper the falling edge. Assuming that the state of the motion module 300 corresponding to the falling edge is a deceleration state, the longer the falling duration of the falling edge is, the fast deceleration state is assumed, whereas the shorter the falling duration of the falling edge is, the slow deceleration state is assumed.

The pulse width of the target waveform determines the duration of time that the motion module 300 maintains a constant motion at a certain speed.

By setting the rising time length of the rising edge, the falling time length of the falling edge and the pulse width, the displacement speed and the displacement time displacement state of the motion module 300 can be controlled.

Through the DAC function and the timing function of the master controller 100, high-speed continuous output can be generated, various waveforms can be generated according to requirements, parameters such as pulse width, rising time length, falling time length and the like can be flexibly adjusted, and software intervention is not needed.

In one embodiment, the target waveform comprises a trapezoidal wave. Namely, the ladder wave can be generated in a stepped manner through the DAC and the timer which are mutually cascaded in a hard triggering manner, the rising time length of the rising edge and the falling time length of the falling edge of the ladder wave can be set to be different, if the motion module 300 needs to be driven to rapidly accelerate to displace, the rising time length of the rising edge is set to be a smaller value, and if the motion module 300 needs to be driven to slowly decelerate to displace, the falling time length of the falling edge is set to be a larger value, and the method can be specifically determined according to actual requirements.

Referring to fig. 2, in one embodiment, the signal processing module 200 includes a power amplifying circuit 210, a gate driving circuit 220, a half-bridge circuit 230, and a low-pass filtering circuit 240. Specifically, the power amplifying circuit 210 is electrically connected to the main controller 100, and is configured to amplify a target waveform and convert the target waveform into a pulse signal; the gate driving circuit 220 is electrically connected to the power amplifying circuit 210, and is configured to generate a gate driving voltage according to the pulse signal; the half-bridge circuit 230 includes a MOS switch tube that is turned on or off under the drive of the gate driving voltage, so that the half-bridge circuit 230 outputs an analog driving signal; the low-pass filter circuit 240 is electrically connected to the half-bridge circuit 230, and is configured to perform filtering processing on the driving signal to obtain an amplified analog driving signal corresponding to the target waveform.

The power amplifying circuit 210 may amplify the small signal, i.e., amplify the target waveform, convert the small signal into a PWM pulse signal, generate a gate driving voltage for driving the MOS switch in the half-bridge circuit 230 according to the pulse signal, further drive the half-bridge circuit 230 to switch, output an analog driving signal, and finally filter the analog driving signal through the low-pass filter circuit 240 to obtain an analog driving signal corresponding to the target waveform, where the analog driving signal is the amplified signal, and the waveform is restored to the target waveform originally generated by the master 100, i.e., the target waveform output by the master 100 through the signal processing module 200 may finally accurately generate an analog signal with the same waveform and amplified for driving the displacement of the motion module 300.

The signal processing module 200 utilizes a class D power amplifier, belongs to a digital power amplifier, and can achieve higher power density relative to class a and class B power amplifiers under the condition of the same volume, thereby achieving high-efficiency power amplification, and finally driving the motion module 300 with higher power, thereby meeting the requirements on high efficiency and high precision in a fly-shooting scene.

In one embodiment, the master controller 100 is configured to determine actual travel information of the motion module 300 according to the feedback signal of the motion module 300, and adjust the preset characteristic of the target waveform according to the actual travel information.

When the motion module 300 is driven by the analog driving signal to displace, it can output a feedback signal to the main controller 100 in real time, where the feedback signal can often represent the travel information generated by the motion module 300, and the feedback signal can be a voltage signal or another kind of signal. The master controller 100 calculates the actual travel information of the motion module 300 according to the feedback signal, compares the actual travel information with a preset travel standard, and if there is a deviation, adjusts the preset characteristics of the target waveform, such as the rising time length of the rising edge, the falling time length of the falling edge, and the pulse width, to form an adjusted target waveform, so as to adjust the displacement state of the motion module 300, thereby meeting the preset travel standard and further achieving accurate control of the position of the motion module 300.

In one embodiment, the motion module 300 includes a piezoceramic motor. The piezoelectric ceramic can mutually convert mechanical energy and electric energy, when an alternating electric field is applied to the piezoelectric ceramic piece, the piezoelectric ceramic can convert the electric field into mechanical strain, namely vibration, and the sensitivity, response speed and precision of the piezoelectric ceramic are high, and the piezoelectric ceramic motor is used as the motion module 300 to meet the high-frequency high-speed high-precision requirement in the fly shooting technology, namely, the piezoelectric ceramic motor can drive other parts to move at high frequency and high speed and high precision, so that the practical requirement is met.

In one embodiment, the feedback signal comprises a voltage signal of a resistor internal to the piezoceramic motor.

Specifically, the resistor is a feedback element in the piezoelectric ceramic motor, the extension of the piezoelectric ceramic motor is different, the resistance value of the resistor is also different, the resistance value and the extension are in a proportional relation, and the proportional relation can be obtained by a manual of the piezoelectric ceramic motor. In practical application, the resistance of the resistor can be calculated according to the obtained voltage signal, and the practical stroke of the piezoelectric ceramic motor can be calculated according to the proportional relation between the resistance and the elongation. If the calculated actual stroke is inconsistent with the set stroke, the output of the DAC can be adjusted so that the stroke of the piezoelectric ceramic meets the requirement. For example, if the calculated actual stroke is too large, the output of the DAC may be reduced, and vice versa.

Based on the same inventive concept, in one embodiment, a visual inspection apparatus is provided. Referring to fig. 3, the visual inspection apparatus provided in this embodiment includes a base 410, a carrying element 420, a photosensitive element 430, a lens 440, a driving system as described above, and a reset component 450.

Specifically, the bearing element 420 is connected to the base 410; the photosensitive element 430 is carried on the carrying element 420; the lens 440 is disposed at the bottom of the photosensitive element 430, and the axis of the lens 440 is perpendicular to the photosensitive element 430; the driving system is used for driving the carrying element 420 to drive the photosensitive element 430 to move along the first direction a, wherein the moving module 300 drives the carrying element 420 to move when moving; after the driving system stops driving, the reset component 450 drives the bearing element 420 to drive the photosensitive element 430 to move along the second direction B, so that the photosensitive element 430 is reset, and the first direction a is opposite to the second direction B and is perpendicular to the axis of the lens 440.

The visual inspection apparatus provided in this embodiment includes a carrying element 420 carrying a photosensitive element 430, and a driving system and a reset assembly 450 for driving the carrying element 420 to move, when the whole visual inspection apparatus moves toward a second direction B, the driving system can drive the carrying element 420 to drive the photosensitive element 430 to move along a first direction a opposite to the second direction B, so that when the visual inspection apparatus reaches a detection position, the photosensitive element 430 can remain stationary, i.e. the photosensitive element 430 and a to-be-inspected object are relatively stationary, at this time, the acquired image information is clearer, and the detection precision is improved. Meanwhile, the driving system can flexibly control and adjust the target waveform, namely, the displacement of the bearing element 420 can be rapidly and accurately controlled, and the reset component 450 can drive the photosensitive element 430 to move along the second direction B after the driving system stops driving, so that the photosensitive element 430 is rapidly reset and continuously moves along with the whole visual detection equipment to detect the next to-be-detected product, thus the overall moving speed of the visual detection equipment is not influenced, the visual detection equipment can acquire clear images of each to-be-detected product in high-speed movement, and the detection efficiency of each to-be-detected product is not influenced while the detection precision is ensured.

In practical applications, the second direction B may be a moving direction of the visual inspection apparatus, and the first direction a is a direction opposite to the moving direction of the visual inspection apparatus. The visual detection equipment can move along the second direction B under the drive of the transmission mechanism, and then sequentially reach each detection position to detect defects of the to-be-detected product under each detection position. In the continuous moving process of the visual inspection device, the driving system can independently drive the bearing element 420 to drive the photosensitive element 430 to move in opposite directions, so that the photosensitive element 430 can be kept in a static state when the to-be-inspected article is inspected, the photosensitive element 430 and the to-be-inspected article are kept in a relatively static state, and the obtained image information is clearer. And after the image information of the current to-be-detected product is obtained, the bearing element 420 can drive the photosensitive element 430 to reset rapidly under the driving of the reset component 450, and then move towards the next detection position along with the vision detection equipment.

In one embodiment, the reset assembly 450 includes a spring member. The reset component 450 adopts a spring member, that is, when the bearing element 420 moves towards the first direction a under the driving of the driving system, the spring member arranged on the other side of the bearing element 420 is pressed, and when the driving system stops driving, the bearing element 420 moves towards the second direction B by using the repulsive force of the spring member, that is, the reset is realized. The spring force of the spring can be utilized to enable the bearing element 420 to be quickly reset, and the cost is low.

Based on the same inventive concept, in one embodiment, a visual inspection system is provided comprising a transmission mechanism and a visual inspection apparatus as described above. The transmission mechanism is used for driving the visual detection equipment to move along the second direction BB so as to reach each detection position to sequentially detect each to-be-detected product.

Before the visual inspection apparatus reaches each inspection position, the driving system drives the bearing element 420 to drive the photosensitive element 430 to move along a first direction a opposite to a second direction B, so that the photosensitive element 430 and each article to be inspected are relatively stationary when the visual inspection apparatus reaches each inspection position; after the driving system stops driving, the reset component 450 drives the bearing element 420 to drive the photosensitive element 430 to move along the second direction B, so as to reset the photosensitive element 430.

In the visual inspection system provided in this embodiment, when the whole visual inspection apparatus moves toward the second direction B, the driving system can drive the bearing element 420 to drive the photosensitive element 430 to move along the first direction a opposite to the second direction B, so that when the visual inspection apparatus reaches the inspection position, the photosensitive element 430 can remain stationary, that is, the photosensitive element 430 and the article to be inspected are relatively stationary, at this time, the acquired image information is relatively clear, and the inspection accuracy is improved. Meanwhile, the driving system can flexibly control and adjust the target waveform, namely, the displacement of the bearing element 420 can be rapidly and accurately controlled, and the reset component 450 can drive the photosensitive element 430 to move along the second direction B after the driving system stops driving, so that the photosensitive element 430 is rapidly reset and continuously moves along with the whole visual detection equipment to detect the next to-be-detected product, thus the overall moving speed of the visual detection equipment is not influenced, the visual detection equipment can acquire clear images of each to-be-detected product in high-speed movement, and the detection efficiency of each to-be-detected product is not influenced while the detection precision is ensured.

For the specific content of the visual inspection apparatus, reference may be made to the specific description in the visual inspection apparatus provided in the foregoing embodiment, and the description is omitted herein.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the patent. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application shall be subject to the appended claims.

Claims (10)

1. A drive system, the drive system comprising:

the main controller outputs a target waveform with preset characteristics through a DAC and a timer which are mutually cascaded;

the signal processing module is electrically connected with the master controller and is used for outputting an amplified analog driving signal corresponding to the target waveform after performing signal processing on the target waveform;

and the motion module is electrically connected with the signal processing module and is used for generating displacement under the driving action of the analog driving signal and sending a feedback signal to the main controller so that the main controller adjusts the preset characteristic of the target waveform according to the feedback signal.

2. The drive system of claim 1, wherein the target waveform comprises a trapezoidal wave.

3. A drive system according to claim 1 or 2, wherein the preset features include at least a rising duration of a rising edge, a falling duration of a falling edge, and a pulse width.

4. The drive system of claim 1, wherein the signal processing module comprises:

the power amplifying circuit is electrically connected with the master controller and is used for amplifying the target waveform and converting the target waveform into a pulse signal;

the grid driving circuit is electrically connected with the power amplifying circuit and is used for generating grid driving voltage according to the pulse signal;

the half-bridge circuit comprises a MOS switch tube which is conducted or closed under the drive of the grid driving voltage so that the half-bridge circuit outputs an analog driving signal;

and the low-pass filter circuit is electrically connected with the half-bridge circuit and is used for carrying out filter processing on the driving signal so as to obtain an amplified analog driving signal corresponding to the target waveform.

5. The drive system of claim 1, wherein the master controller is configured to determine actual trip information of the motion module according to the feedback signal of the motion module, and adjust the preset characteristic of the target waveform according to the actual trip information.

6. The drive system of claim 5, wherein the motion module comprises a piezoceramic motor.

7. The drive system of claim 6, wherein the feedback signal comprises a voltage signal of a resistor internal to the piezoceramic motor.

8. A visual inspection apparatus, the visual inspection apparatus comprising:

a base;

a bearing element connected with the base;

the photosensitive element is supported on the bearing element;

the lens is arranged at the bottom of the photosensitive element, and the axis of the lens is perpendicular to the photosensitive element;

the drive system of any one of claims 1-7, configured to drive the carrier element to move the photosensitive element in a first direction, wherein the movement module displaces the carrier element;

and the reset component is used for driving the bearing element to drive the photosensitive element to move along a second direction after the driving system stops driving so as to reset the photosensitive element, and the first direction is opposite to the second direction and is perpendicular to the axis of the lens.

9. The visual inspection apparatus of claim 8, wherein the reset assembly comprises a spring member.

10. A vision inspection system, the vision inspection system comprising:

the visual inspection apparatus of claim 8 or 9;

the transmission mechanism is used for driving the visual detection equipment to move along the second direction so as to reach each detection position and sequentially detect each to-be-detected product;

before the visual detection equipment reaches each detection position, the driving system drives the bearing element to drive the photosensitive element to move along a first direction opposite to a second direction, so that the photosensitive element and each to-be-detected article are relatively stationary when the visual detection equipment reaches each detection position; and after the driving system stops driving, the reset component drives the bearing element to drive the photosensitive element to move along the second direction so as to reset the photosensitive element.

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