CN116147774A - 一种可移动探测器的微型光谱仪 - Google Patents

一种可移动探测器的微型光谱仪 Download PDF

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CN116147774A
CN116147774A CN202211502398.XA CN202211502398A CN116147774A CN 116147774 A CN116147774 A CN 116147774A CN 202211502398 A CN202211502398 A CN 202211502398A CN 116147774 A CN116147774 A CN 116147774A
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point detector
detector
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张子辉
林冠宇
杨小虎
李博
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block

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Abstract

本发明公开了一种可移动探测器的微型光谱仪，其包括：入射小孔、准直镜、分光聚焦镜、成像小孔和单点探测器，所述准直镜接收通过入射小孔的被测物光、并将被测物光变成准直光；所述分光聚焦镜将接收到的准直光分光并聚焦到光轴上；所述成像小孔设置于分光聚焦镜的焦面处；所述单点探测器能够接收通过成像小孔光线；所述成像小孔和单点探测器均设置于移动箱内。本发明通过移动成像小孔和单点探测器探测不同的光谱的能量，实现光谱信号探测；结构简单、光谱透过率高；通过选取光学材料的不同，可广泛应用于紫外、可见和红外；活动部件少，准确性高。

Description

一种可移动探测器的微型光谱仪
技术领域
本发明涉及光谱仪技术领域，尤其涉及一种可移动探测器的微型光谱仪。
背景技术
近年来由于电子、生化、医学、光电等各领域蓬勃发展，因此使用光谱仪来分析材料的各种光物理、光化学现象的需求日益增加。光谱仪是物理化学分析仪器的一种，依适用的波长可区分为不同种类的光谱仪，如紫外光-可见光谱仪、近红外线光谱仪和红外线光谱仪等。
传统光谱仪器多以实验室仪器和专用仪器的形式出现，优于体积庞大、价格昂贵，而大大地限制了其应用范围。在许多领域，光谱仪器的尺寸缩小比提高其分辨率更为重要。由于沿用传统工艺及设计方法，小型化光谱仪仅仅是体积上简单缩小，但成本高昂，为从根本上解决问题。
微型化已成为光谱仪的一大发展趋势。到目前为止，现有的微型光谱大多分为基于凹面光栅分光型、基于微机械转动光栅型、基于傅里叶变化型、基于波导型和基于渐变滤光片型等几种，都存在制作工艺难度大，透过率低，造价昂贵，难以量产等问题，严重限制微型光谱的产业化和广泛应用。
因此，本领域技术人员提供了一种可移动探测器的微型光谱仪，以解决上述背景技术中提出的问题。
发明内容
本发明提供了一种结构简单、光谱透过率高；通过选取光学材料的不同，可广泛应用于紫外、可见和红外；活动部件少，准确性高；生产难度低，造价低廉的一种可移动探测器的微型光谱仪。
为了实现上述目的，本发明提供如下技术方案：
一种可移动探测器的微型光谱仪，包括：
入射小孔；
准直镜，所述准直镜接收通过入射小孔的被测物光、并将被测物光变成准直光；
分光聚焦镜，所述分光聚焦镜将接收到的准直光分光并聚焦到光轴上；
成像小孔，所述成像小孔设置于分光聚焦镜的焦面处；
单点探测器，所述单点探测器能够接收通过成像小孔光线；
所述成像小孔和单点探测器均设置于移动箱内。
进一步的，所述分光聚焦镜包括位于同一光路上的分光镜和聚焦镜，所述分光镜靠近所述准直镜设置，所述聚焦镜靠近成像小孔设置。
在上述技术方案中，本发明提供的一种可移动探测器的微型光谱仪，具有以下有益效果：
1、本申请能够利用简单的分光聚焦镜、入射小孔和成像小孔、单点探测器和微位移装置实现光谱探测；
2、本申请通过移动成像小孔和单点探测器探测不同的光谱的能量，实现光谱信号探测；
3、本申请结构简单；光谱透过率高；通过选取光学材料的不同，可广泛应用于紫外、可见和红外；活动部件少，准确性高；生产难度低，造价低廉等优点。
附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明中记载的一些实施例，对于本领域普通技术人员来讲，还可以根据这些附图获得其他的附图。
图1为本发明实施例提供的一种可移动探测器的微型光谱仪中移动箱移动对比结构示意图；
图2为本发明实施例提供的一种可移动探测器的微型光谱仪的原理图。
附图标记说明：
10、入射小孔；
20、准直镜；
30、分光聚焦镜；31、分光镜；32、聚焦镜；
40、成像小孔；
50、单点探测器；
60、移动箱。
具体实施方式
为了使本领域的技术人员更好地理解本发明的技术方案，下面将结合附图对本发明作进一步的详细介绍。
参见图1-2所示；
本发明实施例所述的一种可移动探测器的微型光谱仪，包括：
入射小孔10，光线经由入射小孔进入本申请微型光谱仪；
准直镜20，所述准直镜20接收通过入射小孔10的被测物光、并将被测物光变成准直光；
分光聚焦镜30，所述分光聚焦镜30将接收到的准直光分光并聚焦到光轴上；利用光学材料的色散作用，分光聚焦镜30将不同波长的焦点聚焦到沿轴向不同的位置处，使得光谱分开，分光聚焦镜30为球面/非球面透镜组；
成像小孔40，所述成像小孔40设置于分光聚焦镜30的焦面处；
单点探测器50，所述单点探测器50能够接收通过成像小孔40光线；
成像小孔40和单点探测器50均设置于移动箱60内；移动箱60能够实现微移动。
利用移动箱60带动成像小孔40和单点探测器50沿光轴轴向移动，使得不同光谱光线的焦点透过成像小孔40，实现光谱分光。
所述分光聚焦镜30包括位于同一光路上的分光镜31和聚焦镜32，所述分光镜31靠近所述准直镜20设置，所述聚焦镜32靠近成像小孔40设置。
参见图1所示，由入射小孔10进入的光线经过准直镜20进行准直；再经过分光聚焦镜30将实现轴向分光；当移动箱60将成像小孔40和单点探测器50移到λ1波长的聚焦点重合时，单点探测器50的响应信号则主要为λ1波长的信号；参见图2所示，当移动箱60将成像小孔40和单点探测器50移到λ2波长的聚焦点重合时，单点探测器50的响应信号则主要为λ2波长的信号；此时成像小孔40和单点探测器50移动的距离为Δl。虽然单点探测器50得到的不是单色光，仍然夹杂着其它波长的光信号，但通过试验标定和解算算法，可以实现光谱杂光剔除。
参见图3所示，本申请的原理为：利用入射小孔10和准直镜20将被测物光变成准直光；利用分光聚焦镜30将准直光聚焦到光轴上，利用光学材料色散特性，分光聚焦镜30将不同波长的光聚焦到光轴上前后不同的位置，即λ1波长的光聚焦位置是A点，λ2波长的光聚焦位置是B点；在沿光轴放置一个成像孔40和单点探测器50，则可以通过移动成像小孔40和单点探测器50探测不同的光谱的能量，实现光谱信号探测。
以上只通过说明的方式描述了本发明的某些示范性实施例，毋庸置疑，对于本领域的普通技术人员，在不偏离本发明的精神和范围的情况下，可以用各种不同的方式对所描述的实施例进行修正。因此，上述附图和描述在本质上是说明性的，不应理解为对本发明权利要求保护范围的限制。

Claims (2)

1.一种可移动探测器的微型光谱仪，其特征在于，包括：
入射小孔(10)；
准直镜(20)，所述准直镜(20)接收通过入射小孔(10)的被测物光、并将被测物光变成准直光；
分光聚焦镜(30)，所述分光聚焦镜(30)将接收到的准直光分光并聚焦到光轴上；
成像小孔(40)，所述成像小孔(40)设置于分光聚焦镜(30)的焦面处；
单点探测器(50)，所述单点探测器(50)能够接收通过成像小孔(40)光线；
所述成像小孔(40)和单点探测器(50)均设置于移动箱(31)内。
2.根据权利要求1所述的一种可移动探测器的微型光谱仪，其特征在于：所述分光聚焦镜(30)包括位于同一光路上的分光镜(32)和聚焦镜(33)，所述分光镜(32)靠近所述准直镜(20)设置，所述聚焦镜(33)靠近成像小孔(40)设置。
CN202211502398.XA 2022-11-28 2022-11-28 一种可移动探测器的微型光谱仪 Pending CN116147774A (zh)

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