CN116121734A - Control method of graphite heater for CVD equipment - Google Patents

Control method of graphite heater for CVD equipment Download PDF

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Publication number
CN116121734A
CN116121734A CN202310029108.2A CN202310029108A CN116121734A CN 116121734 A CN116121734 A CN 116121734A CN 202310029108 A CN202310029108 A CN 202310029108A CN 116121734 A CN116121734 A CN 116121734A
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China
Prior art keywords
heater
temperature
voltage
control signal
power supply
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Pending
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CN202310029108.2A
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Chinese (zh)
Inventor
蒲勇
向阳
张勇
贺常乐
施建新
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Core Semiconductor Technology Suzhou Co ltd
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Core Semiconductor Technology Suzhou Co ltd
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Priority to CN202310029108.2A priority Critical patent/CN116121734A/en
Publication of CN116121734A publication Critical patent/CN116121734A/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A control method of a graphite heater for a CVD apparatus is disclosed. The control method comprises the following steps: the second operation unit of the PLC control module is used for carrying out operation based on the first limit parameter transmitted by the received first operation unit and combining the second limit parameter issued by the upper computer and the temperature parameter of the temperature controller to obtain a control signal, the control signal is transmitted to the direct current power supply, and the direct current power supply receives and responds to the control signal to output voltage or current matched with the control signal to the heater. The method aims at the tray heating occasion in the reaction cavity of the CVD equipment, can improve the temperature control precision, obtain a smooth and controllable temperature rise and fall curve, improve the temperature uniformity in the chip and improve the product quality.

Description

Control method of graphite heater for CVD equipment
Technical Field
The present application relates to the field of semiconductor devices, and in particular to a control method for a graphite heater of a CVD apparatus.
Background
Graphite is widely used in industry as a material with high temperature resistance, high heat conductivity, small thermal expansion coefficient and stable performance, and one of the biggest uses is to manufacture a high-temperature heater, and the use temperature is higher than 2000 ℃ and can withstand repeated and rapid thermal shock. In thermal devices such as: graphite is used in large quantities as a heating element in sintering furnaces, annealing furnaces, heat treatment furnaces, etc., and in semiconductor processing equipment such as high temperature CVD, silicon carbide substrate furnaces, silicon carbide epitaxy equipment, etc.
As a general heating product, there are many heating control methods, and hardware aspects: generally, alternating current heating and direct current heating are divided;
in terms of control method: the method comprises voltage control and current control, wherein 1, for the equipment with the precision higher than +/-5 ℃ and no strict requirement on a temperature rising curve, a single-phase or three-phase alternating current power supply is adopted for power supply, and the control is carried out by adopting methods of on-off type of a switch with fixed voltage, voltage stepping and the like; 2. the method is controlled by phase shift triggering, zero crossing triggering and other methods when the required precision reaches more than +/-2 ℃; 3. in the use cases such as silicon carbide epitaxy equipment and the like where high-precision control (within +/-1 ℃) is required, the simple control method cannot be adopted, because the temperature control precision of a tray for placing a substrate is required to reach +/-1 ℃ and the temperature uniformity in the substrate slice is required to reach +/-1 ℃, the requirement on a temperature rising curve is strict, and a direct current power supply is generally required to carry out accurate control based on software assistance. When the graphite heater is used for the silicon carbide epitaxy equipment, the heater is mostly used in a cavity of vacuum, hydrogen or other reaction gases, and the temperature of the heater is high, so that graphite can be slowly lost, such as high-temperature sublimation (or evaporation), chemical reaction to become gaseous state, and the graphite heater is frequently thermally stretched and peeled off, and the service life of the graphite heater is influenced, so that the need of replacement is avoided. Because of the differences in resistivity of graphite provided by different suppliers, the range of resistivity is wide: 10E (E) -6 Ωm-16E -6 Between Ω m, the voltage and current will be more or less different after replacing graphite heater, and a larger current and voltage range power supply is needed to supply power, and the power supply may be addedThe accuracy of the thermal control has a certain influence.
In addition, besides the difference in resistivity between different types of graphite, the resistivity of graphite itself may also change at different temperatures, as shown in fig. 1, in which the resistivity may decrease to about 60-70% of the room temperature in the process of increasing the temperature from room temperature to about 800 ℃, and then, as the temperature increases, the resistivity may start to increase again to 1.1-1.2 times of the room temperature at 1800 ℃. The resistivity of graphite provided by different manufacturers is slightly different, whether the graphite heater is controlled with high precision or low precision, and once the resistance of graphite is changed, the current and the voltage of the heater are inevitably changed. Particularly, an alternating current power supply control mode of fixed voltage or stepped voltage is adopted, the fluctuation range of resistance of the graphite heater is required to be as small as possible, so that the heater of different manufacturers has a certain risk, the temperature rise curves are different and are difficult to control smoothly, and if the resistance difference is too large, the heating power is possibly not reached or the current is too large, so that the hardware loss is caused; when the control is performed by adopting methods such as phase shift triggering, zero crossing triggering or direct current power supply, in order to adapt to a large-range graphite heater, the voltage range of the power supply is often configured to be relatively wide, so that the maximum current during heating is large, and the temperature rising curve is unstable in the temperature rising process. In addition, the heater can sublimate, react and peel off in the using process, the sectional area of the heater can be continuously reduced, the total resistance can be continuously increased, when the resistance value is increased to a certain degree, the heater can not reach the required power or temperature rising curve due to the limitation of the power supply voltage, and the heater can be replaced, so that the service life is influenced
Disclosure of Invention
To overcome the above drawbacks, the object of the present application is: a control method of a graphite heater is provided. The method aims at the high-precision tray heating occasion, can improve the temperature control precision, obtain a smooth and controllable temperature rise and fall curve, improve the temperature uniformity in the tray and improve the product quality, and can adapt to the change of the resistivity in a large range.
In order to achieve the above purpose, the present application adopts the following technical scheme:
a control method of a graphite heater for a CVD apparatus, the control method comprising the steps of:
the second operation unit of the PLC control module performs operation based on the received first limit parameter transmitted by the first operation unit and combines the second limit parameter issued by the upper computer and the temperature parameter of the temperature controller to obtain a control signal, and transmits the control signal to the direct current power supply,
the direct current power supply receives and responds to the control signal to output the voltage or current matched with the control signal to the heater. The method aims at the tray heating occasion, can improve the temperature control precision, obtain a smooth and controllable temperature rise and fall curve, improve the temperature uniformity in the chip and improve the product quality.
In an embodiment, the first operation unit of the PLC control module performs an operation based on the maximum value of the input dc power control signal, the rated voltage value of the dc power and the resistance value R of the heater to obtain a first limiting parameter, and transmits the first limiting parameter to the second operation unit.
In one embodiment, the first limiting parameter is a defined percentage of the voltage or current.
In one embodiment, in the control method of the graphite heater for the CVD equipment, different temperature section temperature controllers give a limiting coefficient r matched with corresponding heating voltage ctl The limiting coefficient value is between 0 and 100%.
In one embodiment, the second limiting parameter is a limiting coefficient r of the maximum output voltage max 。
In one embodiment, the control method of the graphite heater for the CVD apparatus is based on manually re-inputting the resistance value of the heater.
In an embodiment, the second computing unit computes and outputs the control signal based on the first limiting parameter, the second limiting parameter and the temperature parameter of the temperature controller.
In one embodiment, the control signal is a temperature rise voltage limit, a digital signal or an analog signal.
In one embodiment, the control signal is in the range of 0-100% by weight.
In one embodiment, the temperature controller controls the output as a voltage signal.
Advantageous effects
Compared with the prior CVD equipment, the method needs to be carefully calculated again each time the graphite heater is replaced, and then the internal setting parameters of the direct current power supply are modified to adjust the maximum output parameters of the direct current power supply. The process of adjusting the parameters requires a professional to operate, is very complex and is also prone to error. By adopting the control method of the graphite heater, the parameter can be adjusted only by simple operation when the heater is replaced, the method is easy to maintain the consistency of heating power and a heating curve, powerful guarantee is provided for ensuring high-precision temperature control, and the service life of the heater can be greatly prolonged.
Drawings
The accompanying drawings are included to provide an understanding of the technical aspects of the present disclosure, and are incorporated in and constitute a part of this specification, illustrate the technical aspects of the present disclosure and together with the embodiments of the disclosure, not to limit the technical aspects of the present disclosure. The shapes and sizes of the various components in the drawings are not to scale, and are intended to be illustrative only of the present application.
FIG. 1 is a schematic diagram showing the resistivity of a graphite heater itself at different temperatures;
FIG. 2 is a functional block diagram of a graphite heater for a CVD apparatus according to an embodiment of the present application;
fig. 3 is a schematic flow chart of a control method of a graphite heater according to an embodiment of the present application.
Detailed Description
The above-described aspects are further described below in conjunction with specific embodiments. It should be understood that these examples are illustrative of the present application and are not limiting the scope of the present application. The implementation conditions employed in the examples may be further adjusted as in the case of the specific manufacturer, and the implementation conditions not specified are typically those in routine experiments.
A control method of a graphite heater for a CVD apparatus is disclosed. The control method is directed to highly accurate tray temperature control for a CVD apparatus. The method can improve the temperature control precision aiming at the high-precision tray heater, obtain a smooth and controllable temperature rise and fall curve, improve the temperature uniformity in the chip, improve the product quality and lay a good equipment foundation for further improving the process level. The method can adapt to the change of the resistance of the heater, the time that the same heater can be used is increased, and the service life of the heater can be greatly prolonged. The method adopts a direct current power supply which can be externally connected with a control signal to supply power for controlling the graphite heater. Voltage control may be used or current control may be used.
The control method of the graphite heater for the CVD apparatus comprises the following steps:
the second operation unit of the PLC control module performs operation based on the received first limit parameter transmitted by the first operation unit and combines the second limit parameter issued by the upper computer and the temperature parameter of the temperature controller to obtain a control signal, and transmits the control signal to the direct current power supply,
the direct current power supply receives and responds to the control signal to output the voltage or current matched with the control signal to the heater (controlling the heater to heat). The CVD equipment in the method is provided with a reaction cavity, a tray is arranged at the bottom side in the reaction cavity, a graphite heater is arranged below the tray, and the graphite heater is connected to an external direct current power supply.
The CVD equipment is provided with a temperature controller, a PLC control module and an upper computer (industrial personal computer), and the functional topology is shown in figure 2.
The temperature controller is electrically connected with a thermocouple, and the thermocouple is configured on the side of a heater (such as a graphite heater) to detect the temperature of the heater. The temperature controller is electrically connected with the upper computer to feed back the detected temperature information of the heater.
The upper computer is electrically connected with the PLC control module for information interaction, such as percentage setting to adjust temperature control output signals. The PLC control module is electrically connected with the direct current power supply to input a control signal (such as a voltage signal or a current signal), and the direct current power supply receives and responds to the control signal to output voltage or current value information corresponding to the matching control signal so as to heat the heater.
The PLC control module is provided with a first operation unit and a second operation unit;
the first operation unit performs operation based on the maximum value (Urang) of the input DC power supply control signal, the rated voltage value (Umax) of the DC power supply and the resistance value R of the heater to obtain a first limiting parameter, wherein the first limiting parameter is a limiting percentage of voltage or current and is transmitted to the second operation unit,
the second operation unit is used for carrying out operation based on the received first limit parameter and combining the second limit parameter issued by the upper computer and the temperature parameter of the temperature controller to obtain a control signal, and transmitting the control signal to the direct current power supply.
Next, a control method of the graphite heater (hereinafter referred to as a heater) proposed in the present application will be described by taking a voltage control method as an example, and in this embodiment, all operations are performed by a PLC control module, and the control method includes the following steps:
s1, calculating the maximum voltage U of a power supply needed by a heater 0 。
In this step, the electric power of the heater is based on ohm's law: p (P) 0 ＝U 0 2 And R, obtaining the maximum output voltage required by the heater: u (U) 0 ＝(P 0 ·R) 1/2 ，
Wherein: p (P) 0 For maximum power required by the heater, R is the resistance of the heater, U 0 Is the maximum voltage (also referred to as maximum output voltage) of the power supply of the heater.
S2, calculating a limiting coefficient r of the maximum output voltage of the direct current power supply max The numerical range is: 0-100%.
In this step, based on the calculation formula:
r max ＝U 0 /U max， obtaining a limiting coefficient r of the maximum output voltage of the DC power supply max ，
Wherein: r is (r) max Limiting coefficient for maximum output voltage of DC power supply
U max The rated output voltage of the dc power supply can be regarded as the maximum output voltage of the dc power supply.
S3, based on the industrial personal computer in different temperature sections, providing a limiting coefficient r matched with corresponding temperature rising voltage ctl This value range: 0-100%.
Limiting coefficient r of temperature rise voltage in this step ctl Limiting coefficient r with maximum output voltage of DC power supply max Multiplying to obtain a total output limiting coefficient of 0-100%, and the total output limiting coefficient is used for controlling voltage (or current) U output by temp. controller temp Multiplying to obtain an input control signal of the direct current power supply of the heater:
U ctl ＝r max ··r ctl ·U temp ＝(P·R) 1/2 /U max ·r ctl ·U temp
wherein: r is (r) tcl A limiting coefficient of the temperature rise voltage given to the upper computer,
U temp is an analog signal output by the temperature controller, a voltage signal of 0-5V,0-10V or other ranges,
s4, based on the voltage signal obtained in the step S3, inputting the voltage signal into a direct current power supply, and receiving and responding the voltage signal by the direct current power supply to output a matched voltage U out To control the heater heating.
In this step, the voltage U out Based on the calculation formula:
U out ＝U ctl /U rang ·U max ＝(P 0 ·R) 1/2 ·r ctl ·U temp /U rang is obtained.
Wherein: u (U) out U is the voltage output to the heater by the final DC power supply rang Is the maximum value of the control signal of the direct current power supply. In the control method, the resistance value R of the graphite heater and the rated output voltage U of the direct current power supply are required to be preset in actual operation max Maximum value U of control signal rang Maximum heating power P of heater 0 And inputting the same information to the PLC control module. If the DC power supply is switched in the later stage, the U needs to be known in advance max And U rang The PLC control module can calculate the input signal voltage of the direct current power supply to control the direct current according to the methodThe DC power supply receives and responds to the voltage information to output a matched voltage U out Values. When the direct current power supply is fixed, the resistance value R of the heater and the required maximum power P 0 When the output voltage is unchanged, the output voltage only follows the output signal U of the temperature controller temp And a temperature-rising voltage limiting coefficient r given by an upper computer ctl Is proportional to the product of the changes. In the control method, the control output of the temperature controller can only be a voltage signal, and if the control output is a current output, the control output needs to be converted into the voltage signal. The input to the temperature controller may be a thermocouple or other signal.
Relevant parameters need to be input into a PLC control module in the early stage of the operation of the equipment, and for the same direct current power supply, only the equipment is required to be installed and debugged (U is used for the first time max And U rang Value of (v) input U max And U rang And the subsequent input is not required to be repeated, so that the operation process is simplified.
The input of the resistance value of the heater can be a manual input mode, as shown in fig. 2, the resistance value needs to be manually written into the PLC through a host computer or a PLC keyboard and stored.
The automatic input mode may also be adopted, as shown in fig. 3, when the temperature is normal, the PLC control module outputs a smaller control voltage to the dc power supply, and at this time, the voltage value and the current value at the two ends of the heater can be automatically read and output, so that the PLC control module directly calculates the resistance value of the heater: r=u/I and stored. Taking a heater with cold resistance of 0.1 omega as an example, in a normal temperature state, the PLC control module sends a smaller control voltage to the direct-current power supply, so that a voltage value of about 5v is output, meanwhile, the output current of about 50A can be automatically read, and the resistance value of 0.1 omega is calculated based on the PLC control module. Therefore, the automatic recording program of the resistance value of the heater can be automatically operated once after the new heater is replaced each time. This approach may also be set to run periodically to correct for possible variations in the resistance of the heater.
The foregoing embodiments are provided to illustrate the technical concept and features of the present application and are intended to enable those skilled in the art to understand the contents of the present application and implement the same according to the contents, and are not intended to limit the scope of the present application. All such equivalent changes and modifications as come within the spirit of the disclosure are desired to be protected.

Claims (10)

1. A control method of a graphite heater for a CVD apparatus, characterized in that,
the control method comprises the following steps:
the second operation unit of the PLC control module performs operation based on the received first limit parameter transmitted by the first operation unit and combines the second limit parameter issued by the upper computer and the temperature parameter of the temperature controller to obtain a control signal, and transmits the control signal to the direct current power supply,
the direct current power supply receives and responds to the control signal to output the voltage or current matched with the control signal to the heater.
2. The method for controlling a graphite heater for a CVD apparatus according to claim 1,
the first operation unit of the PLC control module performs operation based on the maximum value of the input control signal of the direct current power supply, the rated voltage value of the direct current power supply and the resistance value of the heater to obtain a first limiting parameter, and transmits the first limiting parameter to the second operation unit.
3. A control method for a graphite heater for a CVD apparatus according to claim 2, wherein,
the first limiting parameter is a defined percentage of the voltage or current.
4. A control method for a graphite heater for a CVD apparatus according to claim 2, wherein,
the temperature controller gives out a limiting coefficient r of the temperature rising voltage corresponding to the matching based on the temperature section of the feedback ctl The limiting coefficient value is between 0 and 100%.
5. A control method for a graphite heater for a CVD apparatus according to claim 2, wherein,
the second limiting parameter is the limiting coefficient r of the maximum output voltage max 。
6. A control method for a graphite heater for a CVD apparatus according to claim 2, wherein,
the resistance value of the heater is inputted based on a manual manner.
7. The method for controlling a graphite heater for a CVD apparatus according to claim 1,
the second operation unit calculates and outputs control signals based on a continuous multiplication mode on the first limit parameter, the second limit parameter and the temperature parameter of the temperature controller.
8. The method for controlling a graphite heater for a CVD apparatus according to claim 1,
the control signal is a temperature rise voltage limit value.
9. The method for controlling a graphite heater for a CVD apparatus according to claim 8,
the control signal is in the form of a percentage system, which ranges from 0% to 100%.
10. The method for controlling a graphite heater for a CVD apparatus according to claim 1,
the temperature controller outputs a voltage signal based on the feedback temperature information and according to a preset model.
CN202310029108.2A 2023-01-09 2023-01-09 Control method of graphite heater for CVD equipment Pending CN116121734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310029108.2A CN116121734A (en) 2023-01-09 2023-01-09 Control method of graphite heater for CVD equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310029108.2A CN116121734A (en) 2023-01-09 2023-01-09 Control method of graphite heater for CVD equipment

Publications (1)

Publication Number Publication Date
CN116121734A true CN116121734A (en) 2023-05-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310029108.2A Pending CN116121734A (en) 2023-01-09 2023-01-09 Control method of graphite heater for CVD equipment

Country Status (1)

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