CN116107105A - Micro-ring high-linearity polarization independent electro-optical modulator based on graphene - Google Patents

Micro-ring high-linearity polarization independent electro-optical modulator based on graphene Download PDF

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CN116107105A
CN116107105A CN202310070164.0A CN202310070164A CN116107105A CN 116107105 A CN116107105 A CN 116107105A CN 202310070164 A CN202310070164 A CN 202310070164A CN 116107105 A CN116107105 A CN 116107105A
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modulation
micro
graphene
modulator
ring
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陆荣国
谭孟
王广彪
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University of Electronic Science and Technology of China
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/212—Mach-Zehnder type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure the optical waveguides being made of semiconducting material

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  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

The invention discloses a graphene-based micro-ring high-linearity polarization-independent electro-optic modulator, which comprises a mode converter, an asymmetric directional coupler, a micro-ring waveguide, phase modulation, signal modulation, a modulation coupling structure and an MZ modulator integrated with an adjustable beam splitter. One device integrates the independent modulation of both TE and TM modes of transmission, and the modulation paths selected when different modes enter the modulator are different. The micro-ring waveguide structure is integrated with a phase modulation structure and a signal modulation structure, and the modulation arm of the MZ modulator is integrated with a modulation coupling structure. The modulation coupling structure and the micro-ring waveguide structure are coupled with a certain gap. The phase modulation structure, the modulation coupling structure and the adjustable beam splitter wrap the graphene layer, and the modulation process of the micro-ring auxiliary MZ modulator is regulated and controlled by changing the chemical potential of the graphene layer, so that the required high linearity requirement is achieved, the modulator is irrelevant in polarization and tunable in working wavelength, and the method has important application value for a linearized integrated optoelectronic device.

Description

Micro-ring high-linearity polarization independent electro-optical modulator based on graphene
Technical Field
The invention relates to the technical field of microwave photonics photoelectrons, in particular to a graphene-based micro-ring high-linearity polarization independent electro-optic modulator.
Background
Electro-optic modulators, which are a central component of radio-on-optical (RoF) technology, have linearity and propagation mode polarization that directly impact signal transmission, processing, and spurious-free dynamic range (SFDR) of the system. For electro-optic modulators, the currently dominant modulation scheme is external modulation, but this introduces nonlinear effects that produce nonlinear distortion in the link. The mode in the microwave photon link is also critical, and the transceiver transmitting end can keep working under TE polarization, but when light is transmitted through the optical fiber, the polarization state of the light field reaching the transmitting end has been changed, and part of the light is changed into TM light. In order to solve this problem, various on-chip polarization dependent devices have been proposed.
The polarization independent method mainly utilizes a mode converter and a non-directional coupler to realize mode selection, and the linearity method mainly utilizes the superlinearity of a micro-ring to form complementation with the cosine nonlinearity characteristic of the MZ modulator to achieve high linearity. For the lossless model, the high linearity requirement can be achieved by regulating the direct current bias of the MZM to be at a linear bias point and regulating the coupling coefficient of the micro-ring and the MZM modulator to be 0.928. However, these modes have single functions, low integration, and linearity for a single operating wavelength, which is not well suited for the wdm system. And in practice the microring loss of the model is not negligible, which makes the fixed coupling structure no longer able to meet the high linearity requirements. It is therefore necessary to find an electro-optic modulator solution that achieves integrated high linearity, polarization independent functions, etc.
Disclosure of Invention
The invention aims at: aiming at the technical problems that the linearity, polarization independence and tuning function are not high in integration level in a single device in the prior art, the invention provides a micro-ring high-linearity polarization independence electro-optic modulator based on graphene. The invention provides a new integration thought, which comprises a polarization independent mode modulation and a micro-ring coupling modulation structure, and the micro-ring modulator based on the structure can finely adjust the coupling efficiency of the micro-ring and the MZM modulation arm, so that the micro-ring modulator reaches a certain desired specific value, and has higher precision, thereby meeting the requirement of high linearity of the device. And the working wavelength of the device is tunable, and the device has important application value for linearization integrated devices.
The technical scheme adopted by the invention is as follows:
the micro-ring high-linearity polarization-independent electro-optical modulator based on graphene specifically comprises 2 mode conversion coupling structures 11, 2 micro-ring waveguide structures 5, a phase modulation structure 1, a modulation structure 9, 2 signal modulation structures 2, a modulation coupling structure 3, a modulation coupling structure 10 and an MZ-containing adjustable beam splitter 4, wherein the whole device is arranged on a silicon dioxide substrate.
Further, the micro-ring waveguide structure comprises a silicon waveguide micro-ring, and the signal modulation structure and the phase modulation structure are partially integrated on the micro-ring. And a certain interval is fixed between the lower part and the MZM modulation arm which is in parallel fit.
Further, graphene layers are wrapped in the signal modulation structure, the phase modulation structure and the modulation coupling structure respectively, the graphene layers and the waveguide material are isolated by an isolating medium with a certain thickness, and the graphene layers extend to one side far away from the micro-ring waveguide structure respectively and are connected with corresponding electrodes respectively.
Specifically, the graphene is a honeycomb-shaped two-dimensional hexagonal carbon structure material, is a novel material, and changes chemical potential and conductivity under the action of an external voltage, so that refractive index and absorptivity of the graphene are changed, meanwhile, the graphene has a zero band gap structure, so that the graphene can play a role in a very wide optical wavelength range, a graphene layer is horizontally paved in a traditional SOI waveguide, bias voltage is applied to the graphene layer, complex refractive index of the graphene is changed, and absorption intensity of incident light can be changed to achieve phase or amplitude modulation of the incident light.
Preferably, the micro-ring waveguide structure adopts a strip waveguide with the size of 400X220nm, and the waveguide material is silicon.
Preferably, the material of the substrate is silicon dioxide.
Preferably, the isolation medium is hexagonal boron nitride (hBN), and the thickness of the isolation medium between the graphene and the waveguide material is 5nm.
Preferably, all waveguide structures in the structure are single-mode waveguides, supporting only single-mode transmission in a selected wavelength range, and modulating the incoming TE0 and TM0 modes, respectively. The coupling length of the coupling modulation region is 10 mu m, the coupling pitch is 100nm, the radius of the micro-ring waveguide structure is 20 mu m, and the lengths of the signal modulation structure and the phase modulation structure are 4 mu m.
Compared with the prior art, the invention has the beneficial effects that:
(1) The technical scheme of the invention provides a novel micro-ring coupling modulation structure, and the micro-ring modulator based on the structure can finely adjust the coupling efficiency between the micro-ring and the modulation arm to a certain value which is wanted by us, has higher precision, thereby playing a role in an application scene requiring accurate control of the coupling efficiency, has tunable working wavelength, has important application value for a linearized integrated photon device, and verifies the correctness of the result through simulation;
(2) The invention is based on the principle that graphene can modulate the phase and intensity of a light field, and can realize the tuning of the working wavelength without changing a device structure.
Drawings
Fig. 1 is a schematic diagram of a three-dimensional structure of a graphene-based micro-ring highly linear polarization independent electro-optic modulator (a), a mode converter and a non-directional coupler (b), a schematic diagram of a phase modulation structure and a coupling modulation structure wrapping/embedding graphene (c, e) and a schematic diagram of an adjustable beam splitter wrapping graphene (d);
FIG. 2 is a schematic diagram of mode conversion and mode coupling in a graphene-based micro-ring highly linear polarization independent electro-optic modulator according to the present invention;
FIG. 3 is a diagram showing the micro-ring coupling resonance condition of the phase modulation structure 1 in the graphene-based micro-ring high linearity polarization independent electro-optic modulator under the incident light length of 1.54 μm-1.56 μm mode when the phase modulation structure is respectively in chemical potentials of 0.2eV, 0.4eV, 0.6eV and 0.8 eV;
fig. 4 is a diagram showing the working wavelength of a micro-ring and the change condition of a micro-ring single Zhou Sunhao of the graphene-based micro-ring high-linearity polarization-independent electro-optic modulator under different graphene chemical potentials of a phase modulation structure 1;
FIG. 5 shows the coupling efficiency required for maintaining high linearity of a device under different operating wavelengths for a graphene-based micro-ring polarization independent electro-optic modulator of the present invention;
FIG. 6 shows the variation of coupling efficiency K of a coupling region when chemical potential of graphene in an asymmetric coupling modulation region of embedded graphene is changed under different working wavelengths of a graphene-based micro-ring high-linearity polarization-independent electro-optic modulator;
FIG. 7 shows the spurious free dynamic range of a device when the graphene-based micro-ring polarization independent electro-optic modulator of the present invention has operating wavelengths of 1.5468 μm and 1.5516 μm, a coupling pitch of 100nm, and the device is operating in a high linearity state;
FIG. 8 is a graph showing the relationship between the splitting ratio of the adjustable beam splitter and the chemical potential of graphene in the beam splitter when the working wavelength of the micro-ring high linearity polarization independent electro-optic modulator based on graphene is 1.5516 μm and 1.5468 μm and the coupling distance is 100 nm;
marked in the figure as: 1-phase modulation structure, 2-signal modulation structure, 3-modulation coupling structure, 4-adjustable beam splitter, 5-integrated micro-ring, 6-MZ modulator, 7-substrate, 8-DC bias, 2, 9, 10, 16, 17, 18-electrode, 14-isolation layer, 15-graphene.
Detailed Description
The present invention will be described in further detail in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the particular embodiments described herein are illustrative only and are not intended to limit the invention, i.e., the embodiments described are merely some, but not all, of the embodiments of the invention.
As shown in fig. 1, the graphene-based micro-ring high-linearity polarization-independent electro-optical modulator specifically comprises 2 mode conversion coupling structures 11, 2 micro-ring waveguide structures 5, a phase modulation structure 1, a modulation structure 9, 2 signal modulation structures 2, a modulation coupling structure 3, a modulation coupling structure 10 and an MZ-containing adjustable beam splitter 4, wherein the whole device is integrated on a silicon dioxide substrate.
The micro-ring waveguide structure 5 integrates the phase modulation structure 1 and the signal modulation structure 2 and maintains a fixed spacing from the modulation coupling structure 3.
The phase modulation structure 1 wraps the graphene layer 15, the modulation coupling structure 3 wraps the graphene layer, and the adjustable beam splitter 4 wraps the graphene layer. The graphene layer is isolated from the waveguide material and the cladding material by an isolating medium 14 of a certain thickness, and the graphene layer 15 extends to the side far away from the waveguide and is connected with electrodes 17, 18 and 19 respectively. The signal modulation structure 2 and the dc bias 8 apply an electrical signal and bias through the electrodes.
The waveguides in the structure adopt strip-shaped waveguides, the size is 400X220nm, the waveguide material is silicon, the material of the substrate 7 is silicon dioxide, the material for realizing the modulation function is graphene, the isolation medium 14 between the graphene layer 15 and the waveguide material is hexagonal boron nitride (hBN), all the waveguide structures in the structure are single-mode waveguides, only single-mode transmission is supported in a selected wavelength range, and the modulation is carried out on TM0 modes. The radius of the micro-ring waveguide is 20 mu m, the coupling length of the coupling modulation region is 10 mu m, the coupling distance is 100nm, the lengths of the phase modulation structure 1 and the signal modulation structure 2 are 4 mu m, and a 5nm thick isolation medium 14 is arranged between the graphene and the waveguide material.
The application flow of the micro-ring high-linearity polarization-independent electro-optical modulator based on graphene comprises a mode conversion step, an upper (lower) arm tuning working wavelength step, a graphene fine tuning coupling efficiency step and an MZM (Mach Zehnder) beam splitting ratio adjustment step, and specifically comprises the following steps:
the mode conversion includes the steps of:
1) An optical signal input device port of TE0 or TM0 mode; the input light is TE0 mode, and the light is gated to a TE mode modulation path by a mode converter and a non-directional coupler; the input light is in the TM0 mode and is then transmitted directly through the waveguide to the TM mode modulation path.
2) Through mode conversion and coupling, the optical signal of TE0 mode participates in modulation through an upper modulation path, and the optical signal of TM0 mode participates in modulation through a lower modulation path.
Tuning the operating wavelength comprises the steps of:
1) The input optical signal through mode selection enters a micro-ring coupling modulation structure through a Y branch (MZ adjustable beam splitter 4);
2) Adjusting bias voltages applied to the graphene layers in the phase modulation structure to enable the graphene layers to be in different chemical potentials, and carrying out phase modulation on input optical signals to enable the resonance wavelength of the optical signals in the micro-ring waveguide structure to change along with the applied bias voltages;
3) And determining the position of the optical signal in the micro-ring waveguide structure away from the resonance wavelength under each chemical potential, namely that the corresponding working wavelength is tunable along with the bias voltage.
The graphene fine tuning coupling efficiency comprises the following steps:
1) Inputting an optical signal with the working wavelength into the micro-ring waveguide structure;
2) And adjusting bias voltage applied to a graphene layer in the modulation coupling structure to enable graphene to be in different chemical potentials, changing the optical signal coupling environment of the modulation coupling structure, further changing coupling efficiency, and adjusting bias voltage to enable the coupling efficiency to reach target coupling efficiency.
The (TM mode modulation) MZM adjusting beam splitting ratio comprises the following steps:
1) Determining a modulation arm loss and a required MZ modulator splitting ratio corresponding to the working wavelength by tuning the working wavelength and the coupling efficiency;
2) According to the difference of the loss of the upper arm and the lower arm of the MZ modulator, the bias voltage of a graphene layer in the adjustable beam splitter of the MZ modulator is adjusted to enable the graphene to be in different chemical potentials, and the coupling progress of light in the adjustable beam splitter is changed to enable the beam splitting ratio of the beam splitter to reach a preset value.
According to coupling theory analysis, by introducing a graphene structure into a micro-ring coupling region, the structure size can be designed in advance under the condition that basic bias is added to graphene, the coupling efficiency is regulated and controlled to be near a required value, the coupling environment is finely regulated and controlled by changing the mode of the bias added to the graphene, so that the coupling efficiency is regulated and controlled with higher precision, meanwhile, by introducing the graphene structure into the micro-ring, the optical phase shift of a modulation region can be changed by changing the bias added to the graphene, and the regulation and control of a single Zhou Xiangyi on the micro-ring are realized, so that the tunable working wavelength is realized.
Different bias voltages are added to the graphene 15 in the phase modulation structure 1, so that the graphene 15 is in different chemical potentials, and the resonance characteristic of the micro-ring is changed, as shown in fig. 4. Based on the resonance characteristics, the position of the optical signal in the micro-ring waveguide structure away from the resonance wavelength under each chemical potential is determined, that is, the corresponding operating wavelength and the micro-ring unit Zhou Sunhao are tunable with bias voltage, as shown in fig. 5. And the bias voltage of the graphene in the modulation coupling structure 3 is further regulated to realize high-precision regulation and control of the coupling efficiency. According to the high linearity implementation scheme, the required optimal decoupling efficiency under different wavelengths and corresponding microring single-cycle losses is determined as shown in fig. 6.
Finally, the splitting ratio corresponding to the working wavelength is realized by changing the splitting ratio of the adjustable beam splitter in the MZ modulator, so that the device achieves higher extinction ratio and the performance of the modulator is improved.
Examples
When the graphene 15 on the phase modulation structure 1 selects 0.47eV, the corresponding device working wavelength is 1.5516 μm, the corresponding microring single Zhou Sunhao is 0.804, and the optimal decoupling efficiency required to meet the high linearity requirement is 0.882.
In FIG. 6, the dashed line shows the relationship of the coupling efficiency of the modulation coupling structure 3 with the chemical potential of the graphene 15 when the working wavelength is 1.5516 μm, the coupling pitch is 100nm, and the coupling length is 10 μm. As can be seen from the figure, when the graphene 15 in the modulation coupling structure 3 is at 0.41eV, the coupling efficiency can be regulated and controlled to accurately reach the target value (0.882). The device meets the requirement of high linearity at the working wavelength of 1.5516 mu m.
Fig. 7 (b) shows that when the operating wavelength is 1.5516 μm and 1.5468 μm, the requirement of high linearity is satisfied,the parameter SFDR, which characterizes the linearity characteristics of the device. It can be seen that the SFDR of the device reaches 112.7dB Hz respectively 2/3 、114.1dB·Hz 2 /3 The method comprises the steps of carrying out a first treatment on the surface of the 97dB Hz compared with a common MZ modulator 2/3 15 and 17dB are improved.
The introduction of the micro-ring makes the modulation arm and the reference arm of the MZ modulator have a difference in loss in order to keep the upper and lower arms close to 1:1, and further improves the extinction ratio of the device, and the light splitting ratio of the adjustable beam splitter needs to be adjusted to be 0.62:0.38. fig. 8 is a graph of normalized output intensity of the coupling arm of the tunable beam splitter 4 as a function of chemical potential of graphene 15 on the beam splitter 4. It can be seen that the device operating wavelength is 1.5516 μm and when the chemical potential of the selected graphene 15 is 0.42eV, the splitting ratio of the adjustable beam splitter 4 reaches the desired value.
The foregoing examples merely represent specific embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the present application. It should be noted that, for those skilled in the art, several variations and modifications can be made without departing from the technical solution of the present application, which fall within the protection scope of the present application.

Claims (7)

1. The graphene-based micro-ring high-linearity polarization-independent electro-optic modulator is characterized by being fixed on a substrate 7 and specifically comprising 2 mode conversion coupling structures 11, 2 micro-ring waveguide structures 5, a phase modulation structure 1, a modulation structure 9, 2 signal modulation structures 2, a modulation coupling structure 3, a modulation coupling structure 10 and an MZ-adjustable beam splitter 4.
2. The device of claim 1 wherein the modulator is capable of implementing both TE and TM modes of modulation, the device being divided into a TE mode modulation region and a TM mode modulation region.
3. A device according to claim 3, characterized in that the mode conversion coupling structure 11 comprises a tapered mode converter 12 and an asymmetric directional coupler 13.
4. A device according to claim 3, characterized in that the TE-mode and TM-mode modulation regions each comprise a micro-ring waveguide structure 5, integrating the phase modulation structures 1, 9 and the signal modulation structure 2, and maintaining a fixed spacing from the modulation coupling structure 3.
5. The method according to claim 1, wherein the difference between the phase modulation structures 1 and 9 is that the graphene is located in the micro-ring, the graphene of the phase modulation structure 9 is embedded as shown in (c), and the graphene of the phase modulation structure 1 is wrapped as shown in (e).
6. The device according to claim 1, wherein each of the MZ tunable beam splitter 4 and the phase modulation structures 1, 9 has 2 layers of hexagonal boron nitride (hBN) 14 surrounding a graphene layer 15, and the graphene layers 15 extend to a side away from the waveguide and are connected to electrodes 16, 17 and 19, respectively. The signal modulation structure 2 and the dc bias 8 apply an electrical signal and bias through the electrodes.
7. The modulator of claim 1, wherein the waveguide material of the modulator is silicon and the substrate 7 material is silicon dioxide.
CN202310070164.0A 2023-02-07 2023-02-07 Micro-ring high-linearity polarization independent electro-optical modulator based on graphene Pending CN116107105A (en)

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