CN116088266A - Nanoimprint apparatus for thin film - Google Patents
Nanoimprint apparatus for thin film Download PDFInfo
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- CN116088266A CN116088266A CN202310291161.XA CN202310291161A CN116088266A CN 116088266 A CN116088266 A CN 116088266A CN 202310291161 A CN202310291161 A CN 202310291161A CN 116088266 A CN116088266 A CN 116088266A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The application relates to the technical field of nanoimprint, and discloses nanoimprint equipment for films, wherein an imprint film unit comprises an imprint film material roll and a pressing roller set; the bearing film unit comprises a bearing film and a second conveying structure, the second conveying structure is used for circularly conveying the bearing film, the pressing roller group presses the bearing film and the pressing film, and the spraying unit is used for spraying one side of the pressing film of the bonded material to form a nano pressing adhesive layer; the pre-curing unit is used for pre-curing the colloid; the embossing unit comprises an embossing roller with a nano structure on the surface and a first pressure roller set; the ultraviolet curing unit is used for curing the liquid nano imprinting adhesive layer; the protective film covering unit is used for forming a combination body; the material receiving unit is used for separating the combined body from the bearing film and rolling the combined body. The method reduces the deformation of the stamping film during stamping, the bearing film can be recycled, the production cost is reduced, the stamping speed is improved, and the rapid batch and repeatable nano stamping process is realized.
Description
Technical Field
The present application relates to the field of nanoimprint technology, for example, to a nanoimprint apparatus for thin films.
Background
With the continuous progress of micro-nano processing technology, the preparation process of the master plate is mature. At present, various micro-nano structures can be prepared on materials such as silicon, quartz and the like by using methods such as electron beam lithography, ion beam lithography, laser direct writing and the like in combination with etching. However, the preparation of the large-breadth micro-nano structure has the advantages of high technical difficulty, high processing cost and long processing period. The commercial products must be inexpensive to produce, easy to operate, mass-producible in commercial quantities, and highly reproducible. For nanoscale products, the accuracy and resolution of all patterns must also be maintained.
In response to this challenge, the U.S. university of minnesota nanostructure laboratory was initially studied since 1995, and a new technique called "nanoimprinting" was proposed. The nanoimprint technology is a novel micro-nano processing technology. The technology achieves ultra-high resolution through a mechanical transfer means, is hopeful to replace the traditional photoetching technology in the future, and becomes an important processing means in the fields of microelectronics and materials.
With the development of science and technology, the application of the film type anti-counterfeit label is more and more in scenes. Such as banknote security, book security, etc. Various colorful functional structures are stamped on the film, so that the ornamental value is improved, and the safety is also improved. However, during the embossing of the functional structure, the film is deformed by a common fixing method, for example, the film is pulled and deformed by a fixture, and the film is deformed near the vacuum groove by vacuum adsorption.
It should be noted that the information disclosed in the foregoing background section is only for enhancing understanding of the background of the present application and thus may include information that does not form the prior art that is already known to those of ordinary skill in the art.
Disclosure of Invention
The following presents a simplified summary in order to provide a basic understanding of some aspects of the disclosed embodiments. This summary is not an extensive overview, and is intended to neither identify key/critical elements nor delineate the scope of such embodiments, but is intended as a prelude to the more detailed description that follows.
The embodiment of the disclosure provides a nano imprinting device for a film, which can reduce deformation of the film during imprinting, realize rapid batch production and realize a repeatable nano imprinting process.
In some embodiments, the nanoimprint apparatus for a thin film includes an imprint thin film unit, a spray coating unit, a pre-curing unit, an imprint unit, an ultraviolet curing unit, a protective film covering unit, a material receiving unit, and a carrier film unit, the imprint thin film unit includes an imprint thin film roll and a first conveying structure, the imprint thin film roll is placed on the imprint thin film roll, and the first conveying structure includes a press-fit roller set; the spraying unit is positioned at the downstream of the embossing film material roll, one end of the spraying unit, which is close to the embossing film, is provided with a glue outlet, and the spraying unit is used for spraying and forming a nano embossing glue layer on one side of the embossing film after the embossing film is attached to the bearing film; the pre-curing unit is positioned at the downstream of the spraying unit and is used for volatilizing redundant solvents in the nano imprinting adhesive layer and pre-curing the colloid; the embossing unit is positioned at the downstream of the pre-curing unit and comprises an embossing roller and a first pressure roller set, the surface of the embossing roller is provided with a nano structure, and the first pressure roller set is arranged below the embossing roller; the ultraviolet curing unit is positioned below the embossing roller and comprises an ultraviolet lamp, wherein the ultraviolet lamp is used for emitting strong ultraviolet light, and the liquid nano embossing adhesive layer is cured through the bearing film and the embossing film; the protective film covering unit is positioned at the downstream of the embossing unit and is used for attaching the protective film to one side of the embossing film, on which the nano embossing adhesive layer is arranged, so as to form a combination of the embossing film, the nano embossing adhesive layer and the protective film; the material receiving unit is positioned at the downstream of the protective film covering unit and is used for separating the combined body from the bearing film and rolling the combined body; the bearing film unit is positioned below the embossing film unit, the spraying unit, the pre-curing unit, the embossing unit, the protective film covering unit and the material receiving unit, and comprises a bearing film and a second conveying structure, wherein the second conveying structure is used for circularly conveying the bearing film, the bearing film is a transparent film layer with a smooth surface, and the pressing roller group presses the bearing film and the embossing film.
Optionally, the first conveying structure further includes a first forward roller set and a first correction roller set; the embossing film is rolled out and then enters the first forward roller set for correction, the pressing roller set is positioned on the inner side of the embossing film and the inner side of the bearing film and used for laminating the embossing film and the bearing film, and the laminated embossing film and bearing film enter the first correction roller set for correction and are further laminated to reduce bubbles.
Optionally, the pressing roller set is provided with a first pressure sensor for detecting pressing pressure of the embossed film and the carrier film, and the first pressure roller set is connected with a second pressure sensor for monitoring the embossing pressure.
Optionally, the protective film covering unit comprises a protective film material roll, a redirecting roll, a second pressure roll set and a film covering correction roll set, the protective film roll is placed on the protective film material roll, and one surface of the protective film roll, which is contacted with the nano imprinting adhesive layer, faces the inner side of the protective film material roll; after the protective film is unreeled, the protective film is redirected by a redirecting roll and then contacts with the nano imprinting adhesive layer; the second pressure roller set is positioned below the redirecting roller and is used for attaching the protective film to the embossing film with the nano embossing adhesive layer and the bearing film; and (5) feeding the material coated with the protective film into a coated correction roller group for position adjustment.
Optionally, the second pressure roller set includes a third pressure sensor, and the second pressure roller set can change and monitor the film laminating pressure to reduce air bubbles between the film layers.
Optionally, the material receiving unit comprises a separating roller, a second correcting roller set and a material receiving roll; the separating roller separates the combined body from the bearing film, the second correcting roller set changes and corrects the direction of the combined body, and the receiving roll winds the combined body.
Optionally, the second transmission structure comprises a steering roller, a forward roller and a power correction roller group; the power correction roller set is used for correcting the direction of the bearing film and providing power for the rotation of the bearing film, the steering roller is used for changing the direction of the bearing film, and the forward roller is used for adjusting the position of the bearing film.
Optionally, the nano imprinting device for the film further comprises a device shell, wherein the device shell is provided with a first observation window at a position corresponding to the imprinting film material roll, and the first observation window is used for observing the working state of the imprinting film material roll; the equipment shell is provided with a second observation window at a position corresponding to the material receiving unit, and the second observation window is used for observing the working state of the material receiving unit.
Optionally, the equipment shell bottom is provided with the lower margin, and the top is provided with warning light and air filter, and air filter blows in nanometer impression equipment with the air after filtering.
Optionally, the front surface of the device housing is provided with an operation screen and a viewing window.
The nano imprinting equipment for the thin film provided by the embodiment of the disclosure can realize the following technical effects:
according to the nano imprinting equipment, the target imprinting film to be imprinted is attached to the flat bearing film, so that deformation of the imprinting film during imprinting is reduced, the bearing film can be recycled, and the production cost is reduced. The roll-to-roll nanoimprint apparatus is realized by adopting the rolling structure of the imprint film roll and the material collecting unit, so that the imprint speed can be improved, and the rapid batch and repeatable nanoimprint process can be realized.
The foregoing general description and the following description are exemplary and explanatory only and are not restrictive of the application.
Drawings
One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which like reference numerals refer to similar elements, and in which:
fig. 1: an external schematic view of a nanoimprint apparatus for a thin film of the present disclosure;
fig. 2: an internal structure schematic diagram of a nanoimprint apparatus for a thin film of the present disclosure;
fig. 3: schematic structural diagrams of the embossed film unit and the carrier film unit of the present disclosure;
fig. 4: the structure schematic diagrams of the embossing unit, the protective film covering unit and the ultraviolet curing unit of the present disclosure;
fig. 5: the structure schematic diagram of the material receiving unit and the bearing film unit;
fig. 6: a nanoimprint apparatus position dot mark map for a thin film of the present disclosure;
fig. 7: the material state structure of the position point shown in fig. 6 of the present disclosure is schematically shown.
Reference numerals:
an embossing film unit 1, an embossing film 11, an embossing film roll 12, a first forward roller set 13, a laminating roller set 14, a first correction roller set 15 and a first observation window 16;
a spraying unit 2, a glue outlet 21 and a nano-imprinting glue layer 22;
a pre-curing unit 3;
an embossing unit 4, an embossing roller 41, a nanostructure 42, a first pressure roller set 43;
an ultraviolet curing unit 5;
a protective film covering unit 6, a protective film 61, a protective film material roll 62, a redirecting roll 63, a second pressure roll set 64, a film covering correction roll set 65;
a receiving unit 7, a separating roller 71, a second correcting roller set 72, a receiving roll 73 and a second observation window 74;
a carrier film unit 8, a carrier film 81, a steering roller 82, a forward roller 83, and a power correction roller group 84;
the equipment comprises an equipment shell 9, a ground leg 91, an operation screen 92, a warning lamp 93, a discharge window 95, an air filtering device 96 and an observation window 98.
Detailed Description
So that the manner in which the features and techniques of the disclosed embodiments can be understood in more detail, a more particular description of the embodiments of the disclosure, briefly summarized below, may be had by reference to the appended drawings, which are not intended to be limiting of the embodiments of the disclosure. In the following description of the technology, for purposes of explanation, numerous details are set forth in order to provide a thorough understanding of the disclosed embodiments. However, one or more embodiments may still be practiced without these details. In other instances, well-known structures and devices may be shown simplified in order to simplify the drawing.
The terms first, second and the like in the description and in the claims of the embodiments of the disclosure and in the above-described figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe embodiments of the present disclosure. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion.
In the embodiments of the present disclosure, the azimuth or positional relationship indicated by the terms "upper", "lower", "inner", "middle", "outer", "front", "rear", etc. is based on the azimuth or positional relationship shown in the drawings. These terms are used primarily to better describe embodiments of the present disclosure and embodiments thereof and are not intended to limit the indicated device, element, or component to a particular orientation or to be constructed and operated in a particular orientation. Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the embodiments of the present disclosure will be understood by those of ordinary skill in the art in view of the specific circumstances.
In addition, the terms "disposed," "connected," and "fixed" are to be construed broadly. For example, "connected" may be in a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the embodiments of the present disclosure may be understood by those of ordinary skill in the art according to specific circumstances.
The term "plurality" means two or more, unless otherwise indicated.
In the embodiment of the present disclosure, the character "/" indicates that the front and rear objects are an or relationship. For example, A/B represents: a or B.
The term "and/or" is an associative relationship that describes an object, meaning that there may be three relationships. For example, a and/or B, represent: a or B, or, A and B.
It should be noted that, without conflict, the embodiments of the present disclosure and features of the embodiments may be combined with each other.
As shown in connection with fig. 1-7, embodiments of the present disclosure provide a nanoimprint apparatus for a thin film, including an imprint thin film 11 unit 1, a spray coating unit 2, a pre-curing unit 3, an imprint unit 4, an ultraviolet curing unit 5, a protective film covering unit 6, a material receiving unit 7, and a carrier film unit 8.
The embossing film 11 unit 1 comprises an embossing film 11 roll, on which the embossing film 11 is placed, and a first transfer structure comprising a stitching roller set 14.
The spraying unit 2 is located at the downstream of the roll of the embossing film 11, a glue outlet 21 is formed at one end of the spraying unit 2 close to the embossing film 11, and the spraying unit 2 is used for spraying and forming a nano embossing glue layer 22 at one side of the embossing film 11 after the embossing film 11 is attached to the carrier film 81.
The pre-curing unit 3 is located downstream of the spraying unit 2, and the pre-curing unit 3 is configured to volatilize the excess solvent in the nanoimprint adhesive layer 22 and perform pre-curing of the colloid.
The embossing unit 4 is located downstream of the pre-curing unit 3, the embossing unit 4 comprising an embossing roller 41 and a first set of pressure rollers 43, the embossing roller 41 surface being provided with nanostructures 42, the first set of pressure rollers 43 being provided below the embossing roller 41.
The ultraviolet curing unit 5 is located below the embossing roller 41, and the ultraviolet curing unit 5 includes an ultraviolet lamp for emitting strong ultraviolet light, and curing the liquid nano-imprinting glue layer through the carrier film 81 and the imprinting film 11.
The protective film covering unit 6 is located downstream of the embossing unit 4, and is used for attaching the protective film 61 to the side of the embossing film 11 where the nano-embossing adhesive layer 22 is located, so as to form a combination of the embossing film 11, the nano-embossing adhesive layer 22 and the protective film 61.
The material receiving unit 7 is located downstream of the protective film covering unit 6, and is used for separating the combined body from the carrier film 81 and winding the combined body.
The bearing film unit 8 is located below the embossing film 11 unit 1, the spraying unit 2, the pre-curing unit 3, the embossing unit 4, the protective film covering unit 6 and the material receiving unit 7, the bearing film unit 8 comprises a bearing film 81 and a second conveying structure, the second conveying structure is used for circularly conveying the bearing film 81, the bearing film 81 is a transparent film layer with a smooth surface, and the pressing roller set 14 presses the bearing film 81 and the embossing film 11.
With the nano-imprinting apparatus for thin films provided in the embodiments of the present disclosure, the nano-imprinting apparatus of the present disclosure reduces deformation of the imprinting thin film 11 occurring during imprinting by attaching the target imprinting thin film 11 to be imprinted on the flat carrier film 81. The carrier film 81 can be recycled, reducing production cost. The roll-to-roll nanoimprinting equipment is realized by adopting the rolling structure of the imprinting film 11 roll and the material collecting unit 7, so that the imprinting speed can be increased, and the rapid batch and repeatable nanoimprinting process can be realized.
As an example, a strong ultraviolet lamp is used as the ultraviolet lamp. Namely, an ultraviolet lamp with an ultraviolet index reaching more than 5 levels is adopted. The ultraviolet rays pass through the transparent carrier film 81 and the embossing film 11 to solidify the liquid nano-embossing glue into the solid nano-embossing glue layer 22.
Optionally, the first conveying structure further includes a first forward roller set 13 and a first correction roller set 15; the embossed film 11 is rolled out and then enters the first forward roller set 13 for correction, the pressing roller set 14 is positioned on the inner side of the embossed film 11 and the bearing film 81 and is used for laminating the embossed film 11 and the bearing film 81, and the laminated embossed film 11 and bearing film 81 enter the first correction roller set 15 for correction and are further laminated to reduce air bubbles.
Optionally, the pressing roller set 14 is provided with a first pressure sensor for detecting and changing the pressing pressure of the embossing film 11 and the carrier film 81, and the first pressure roller set 43 is connected with a second pressure sensor for monitoring the embossing pressure.
Optionally, the protective film covering unit 6 includes a protective film material roll 62, a redirecting roll 63, a second pressure roll set 64 and a film covering correction roll set 65, the protective film 61 is rolled on the protective film material roll 62, and the surface contacting the nano-imprinting adhesive layer 22 faces the inner side of the protective film material roll 62; the protective film 61 is rolled out and then is changed to contact with the nano-imprinting adhesive layer 22 by a direction-changing roller 63; the second pressure roller set 64 is located below the redirecting roller 63 and is used for attaching the protective film 61 to the embossed film 11 with the nano-embossed adhesive layer 22 and the carrier film 81; the material coated with the protective film 61 enters the coating correction roller group 65 to perform position adjustment.
It will be appreciated that the imprinted nanostructures 42 are very fragile and require a protective film 61 on the surface. The surface of the protective film roll 62 to be contacted with the nanostructure 42 faces the inner side of the roll, and the redirecting roll 63 and the second pressure roll set 64 cooperate to attach the protective film 61 to the embossed film 11 to form a combination, so that the position of the combination can be adjusted by the film-coating correction roll set 65.
Optionally, the second pressure roller set 64 includes a third pressure sensor, and the second pressure roller set 64 can vary and monitor the film pressure to reduce air bubbles between the film layers.
It will be appreciated that the second pressure roller set 64 serves to reduce air bubbles between the protective film 61 and the imprint film 11.
Optionally, the receiving unit 7 includes a separating roller 71, a second correcting roller set 72, and a receiving roll 73; the separating roller 71 separates the combined body from the carrier film 81, and the second correction roller group 72 changes and corrects the direction of the combined body, and the take-up roll 73 takes up the combined body.
It will be appreciated that the separating roller 71 can separate the combination of the embossing film 11, the nanoimprint adhesive layer 22, and the protective film 61 from the carrier film 81, and the second correcting roller set 72 can change and correct the direction of the combination, so as to facilitate the winding action of the subsequent receiving roll 73.
Optionally, the second transmission structure includes a steering roller 82, a forward roller 83, and a power correction roller set 84; the power correction roller group 84 is used for correcting the direction of the carrier film 81 and providing power for the rotation of the carrier film 81, the steering roller 82 is used for redirecting the carrier film 81, and the forward roller 83 is used for adjusting the position of the carrier film 81.
It will be appreciated that the turning roller 82 is used to turn the carrier film 81 so as to perform a cyclic rotation, the forward roller 83 is located at a side portion of the carrier film 81 circulation ring, the power correction roller set 84 is located at a lower portion of the carrier film 81 circulation ring, and the power correction roller set 84 is capable of providing power for the carrier film 81 to circulate, and the embossing film 11 unit 1, the spraying unit 2, the pre-curing unit 3, the embossing unit 4, the ultraviolet curing unit 5, the protective film covering unit 6, and the material receiving unit 7 are located at an upper portion of the carrier film 81 circulation ring.
Optionally, the nano-imprinting device for the film further comprises a device housing 9, wherein the device housing 9 is provided with a first observation window 16 at a position corresponding to the material roll of the imprinting film 11, and the first observation window 16 is used for observing the working state of the material roll of the imprinting film 11; the apparatus housing 9 is provided with a second observation window 74 at a position corresponding to the material receiving unit 7, the second observation window 74 being for observing the operation state of the material receiving unit 7.
Optionally, the bottom of the equipment shell 9 is provided with a foot 91, the top is provided with a warning lamp 93 and an air filtering device 96, and the air filtering device 96 blows the filtered air into the nano imprinting equipment.
It will be appreciated that the use of the air filter device 96 can enhance the cleanliness of the interior of the nanoimprint apparatus.
Optionally, the front side of the device housing 9 is provided with an operation screen 92 and a viewing window 98. This facilitates detection of the device operating conditions.
As an example, a loading window is provided at a position corresponding to the unit 1 of the embossing film 11 in the equipment housing 9 to facilitate the replenishment loading of the embossing film 11, and a discharging window 95 is provided at a position corresponding to the receiving unit 7 in the equipment housing 9 to facilitate the receiving of the receiving roll 73.
The above description and the drawings illustrate embodiments of the disclosure sufficiently to enable those skilled in the art to practice them. Other embodiments may include structural and other modifications. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the sequence of operations may vary. Portions and features of some embodiments may be included in, or substituted for, those of others. The embodiments of the present disclosure are not limited to the structures that have been described above and shown in the drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (10)
1. A nanoimprint apparatus for a thin film, comprising:
an embossing film unit (1) comprising an embossing film roll (12) and a first conveying structure, wherein the embossing film (11) is rolled and placed on the embossing film roll (12), and the first conveying structure comprises a pressing roller set (14);
the spraying unit (2) is positioned at the downstream of the embossing film material roll (12), one end of the spraying unit (2) close to the embossing film (11) is provided with a glue outlet (21), and the spraying unit (2) is used for spraying and forming a nano embossing glue layer (22) on one side of the embossing film (11) after the embossing film (11) is attached to the bearing film (81);
the pre-curing unit (3) is positioned at the downstream of the spraying unit (2), and the pre-curing unit (3) is used for volatilizing redundant solvents in the nano imprinting adhesive layer (22) and pre-curing colloid;
the embossing unit (4) is positioned at the downstream of the pre-curing unit (3), the embossing unit (4) comprises an embossing roller (41) and a first pressure roller set (43), the surface of the embossing roller (41) is provided with a nano structure (42), and the first pressure roller set (43) is arranged below the embossing roller (41);
the ultraviolet curing unit (5) is positioned below the embossing roller (41), and the ultraviolet curing unit (5) comprises an ultraviolet lamp which is used for emitting strong ultraviolet light and curing the liquid nano-embossing adhesive layer through the bearing film (81) and the embossing film (11);
a protective film covering unit (6) which is positioned at the downstream of the embossing unit (4) and is used for attaching a protective film (61) to one side of the embossing film (11) where the nano-embossing adhesive layer (22) is arranged to form a combination of the embossing film (11), the nano-embossing adhesive layer (22) and the protective film (61);
the material receiving unit (7) is positioned at the downstream of the protective film covering unit (6) and is used for separating the combined body from the bearing film (81) and rolling the combined body;
bear membrane unit (8), be located impression film unit (1), spraying unit (2), pre-curing unit (3), impression unit (4), protection film covering unit (6), receive material unit (7) below, bear membrane unit (8) including bearing membrane (81) and second conveying structure, second conveying structure is used for the circulation to convey and bears membrane (81), bear membrane (81) are transparent and surperficial smooth rete, pressfitting roller group (14) pressfitting bear membrane (81) with impression film (11).
2. The nanoimprint apparatus for a thin film according to claim 1, wherein the first conveying structure further comprises a first forward roller group (13) and a first correction roller group (15);
the embossing film (11) enters the first forward roller set (13) for correction after being unwound, and the pressing roller set (14) is positioned on the inner sides of the embossing film (11) and the bearing film (81) and used for laminating the embossing film (11) and the bearing film (81), and the laminated embossing film (11) and bearing film (81) enter the first correction roller set (15) for correction and further lamination so as to reduce bubbles.
3. A nanoimprint apparatus for a thin film according to claim 2, wherein,
the pressing roller set (14) is provided with a first pressure sensor for detecting the pressing pressure of the stamping film (11) and the bearing film (81);
the first pressure roller set (43) is connected with a second pressure sensor for monitoring the imprinting pressure.
4. The nanoimprint apparatus for thin film according to claim 1, wherein the protective film covering unit (6) includes a protective film roll (62), a redirecting roller (63), a second pressure roller group (64), and a film-covering correction roller group (65),
the protective film (61) is rolled and placed on the protective film material roll (62), and one surface of the protective film material roll (62) which is contacted with the nano-imprinting adhesive layer (22) faces the inner side of the protective film material roll;
the protective film (61) is rolled out and then is contacted with the nano-imprinting adhesive layer (22) after being redirected by the redirecting roller (63);
the second pressure roller set (64) is positioned below the redirecting roller (63) and is used for attaching the protective film (61) to the embossing film (11) with the nano-embossing adhesive layer (22) and the bearing film (81);
the material coated with the protective film (61) enters a film coating correction roller group (65) for position adjustment.
5. A nanoimprint apparatus for a thin film according to claim 4, wherein,
the second pressure roller set (64) includes a third pressure sensor, and the second pressure roller set (64) is configured to vary and monitor the film pressure to reduce air bubbles between the film layers.
6. The nanoimprint apparatus for a thin film according to claim 1, wherein the receiving unit (7) includes a separation roller (71), a second correction roller group (72), and a receiving roll (73);
the separating roller (71) separates the combined body from the carrier film (81), the second correcting roller group (72) changes and corrects the direction of the combined body, and the material receiving roll (73) rolls the combined body.
7. The nanoimprint apparatus for thin film according to claim 1, wherein the second transmission structure includes a steering roller (82), a forward roller (83), and a power correction roller group (84);
the power correction roller set (84) is used for correcting the direction of the bearing film (81) and providing power for rotating the bearing film (81), the steering roller (82) is used for enabling the bearing film (81) to change the direction, and the forward roller (83) is used for adjusting the position of the bearing film (81).
8. The nanoimprint apparatus for thin film according to any one of claims 1 to 7, further comprising:
a first observation window (16) is arranged at a position corresponding to the imprinting film material roll (12), and the first observation window (16) is used for observing the working state of the imprinting film material roll (12); the equipment shell (9) is provided with a second observation window (74) at a position corresponding to the material receiving unit (7), and the second observation window (74) is used for observing the working state of the material receiving unit (7).
9. A nanoimprint apparatus for a thin film according to claim 8, wherein,
the equipment is characterized in that a foot margin (91) is arranged at the bottom of the equipment shell (9), a warning lamp (93) and an air filtering device (96) are arranged at the top of the equipment shell, and the air filtering device (96) blows filtered air into the nano imprinting equipment.
10. A nanoimprint apparatus for a thin film according to claim 8, wherein,
an operation screen (92) and a viewing window (98) are arranged on the front surface of the equipment shell (9).
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| CN202310291161.XA CN116088266A (en) | 2023-03-23 | 2023-03-23 | Nanoimprint apparatus for thin film |
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| CN202310291161.XA CN116088266A (en) | 2023-03-23 | 2023-03-23 | Nanoimprint apparatus for thin film |
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| CN104608370A (en) * | 2015-02-09 | 2015-05-13 | 上海交通大学 | Roll-to-roll based UV cured polymer film surface microstructure processing system and method |
| CN206306659U (en) * | 2016-07-14 | 2017-07-07 | 昇印光电（昆山）股份有限公司 | Imprinting apparatus, picture and text film and film article |
| CN210954602U (en) * | 2020-01-10 | 2020-07-07 | 青岛天仁微纳科技有限责任公司 | Conveying roll type nano-imprinting equipment |
-
2023
- 2023-03-23 CN CN202310291161.XA patent/CN116088266A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09187975A (en) * | 1996-01-11 | 1997-07-22 | Casio Comput Co Ltd | Thermal transfer image forming device |
| WO2009107294A1 (en) * | 2008-02-27 | 2009-09-03 | シャープ株式会社 | Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method |
| CN104608370A (en) * | 2015-02-09 | 2015-05-13 | 上海交通大学 | Roll-to-roll based UV cured polymer film surface microstructure processing system and method |
| CN206306659U (en) * | 2016-07-14 | 2017-07-07 | 昇印光电（昆山）股份有限公司 | Imprinting apparatus, picture and text film and film article |
| CN210954602U (en) * | 2020-01-10 | 2020-07-07 | 青岛天仁微纳科技有限责任公司 | Conveying roll type nano-imprinting equipment |
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