CN116083849A - Aircraft and surface flexible anti-icing/deicing composite film thereof and preparation method - Google Patents
Aircraft and surface flexible anti-icing/deicing composite film thereof and preparation method Download PDFInfo
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- CN116083849A CN116083849A CN202310013892.8A CN202310013892A CN116083849A CN 116083849 A CN116083849 A CN 116083849A CN 202310013892 A CN202310013892 A CN 202310013892A CN 116083849 A CN116083849 A CN 116083849A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64D—EQUIPMENT FOR FITTING IN OR TO AIRCRAFT; FLIGHT SUITS; PARACHUTES; ARRANGEMENT OR MOUNTING OF POWER PLANTS OR PROPULSION TRANSMISSIONS IN AIRCRAFT
- B64D15/00—De-icing or preventing icing on exterior surfaces of aircraft
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0084—Producing gradient compositions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5873—Removal of material
- C23C14/588—Removal of material by mechanical treatment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/70—Wind energy
- Y02E10/72—Wind turbines with rotation axis in wind direction
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- Chemical & Material Sciences (AREA)
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- Chemical Kinetics & Catalysis (AREA)
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- Physical Vapour Deposition (AREA)
Abstract
An aircraft and its surface flexible anti-icing/deicing composite film and preparation method, the surface of the part of the aircraft has surface flexible anti-icing/deicing composite film, the film includes: the first insulating film is formed by depositing on the surface of the substrate through thermal spraying, magnetron sputtering, ion beam assisted deposition, chemical vapor deposition or magnetic filtration cathode vacuum arc source; the flexible electrothermal film is positioned on the first insulating film and is arranged according to different working voltages and power requirements of unit area; the second insulating film is positioned on the flexible electrothermal film and is formed on the surface of the flexible electrothermal film through thermal spraying, magnetron sputtering, ion beam auxiliary deposition or chemical vapor deposition; and the super-hydrophobic film is positioned on the second insulating film, and is a CrN-based film with a super-hydrophobic structure formed by depositing a magnetron sputtering, ion beam assisted deposition or magnetic filtration cathode vacuum arc source on the surface of the second insulating film. The invention also discloses a preparation method of the surface flexible anti-icing/deicing composite film.
Description
Technical Field
The invention relates to an aircraft deicing technology, in particular to an aircraft, a surface flexible anti-icing/deicing composite film based on active and passive coupling and a preparation method thereof.
Background
Icing of an aircraft is a phenomenon that ice layers are accumulated on certain parts of the surface of an aircraft fuselage, and easily occurs on protruding parts such as the front edge of a wing tail wing, a windshield, a airspeed tube, an antenna, an engine air inlet and the like. Wind tunnel tests have shown that when the leading edge of the wing has half an inch thick ice build up, 50% lift is reduced and 60% drag is increased. In addition, the windshield icing can influence the visual flight of a pilot, the airspeed tube icing can lead to the fact that important flight data such as flight altitude, speed and the like cannot be accurately displayed, and the antenna icing can influence air-ground communication or cause navigation interruption. Under extreme conditions of low temperature, high humidity, high surface speed flight and the like, the icing thickness can reach 2-3 inches within 5 minutes, and the high-strength deicing operation is needed.
Thermal deicing is one of the active deicing modes that is currently practical. In the process, the starting of the thermal deicing system depends on the visual field of a pilot, if the thermal deicing system freezes at a position which the pilot cannot observe, deicing is difficult to carry out, and the closing of the thermal deicing system after deicing is finished depends on the observation of the pilot, so that more energy consumption is required, and deicing time is longer. In recent years, through intensive researches on the mechanism of icing, functional anti-icing films gradually enter the line of sight of people as a passive anti-icing mode. Numerous researches show that the superhydrophobic surface can delay icing time, reduce ice formation amount and ice adhesion, but the superhydrophobic material is generally an organic material, and the mechanical strength, high temperature resistance and service life of the superhydrophobic material are greatly problematic, and after the superhydrophobic material is subjected to a plurality of high Wen Jiebing-deicing tests, the superhydrophobic material is easy to age and decompose, and the micro-nano structure penetrating into an ice layer is damaged, so that the superhydrophobic characteristic of the material surface is lost due to continuous circulation.
In the prior art, regarding an anti-icing/deicing method combining a superhydrophobic surface with electric heat, such as an active-passive coupling-based anti-icing system, input heat is used for melting ice at the tip of a heating wire, so that the anti-icing/deicing system is efficient, economical and environment-friendly, but bonding strength is required to be improved by adopting a bonding mode between layers, a heat conducting wire penetrates through a superhydrophobic film and an insulating layer, the tip is exposed to air, deformation is easy to occur in a high altitude, circuit safety cannot be guaranteed, and the anti-icing/deicing system is required to be agreed in practicality; the wind speed pipe composite film is formed by sequentially depositing a first transition layer, a conductive layer, a second transition layer, a heat conduction layer, a third transition layer and a hydrophobic layer on the surface of a wind speed pipe substrate, wherein the composite film has comprehensive electric conduction, heat conduction and hydrophobic properties, but the hydrophobic layer is an inorganic hydrophobic layer, the surface is not modified, and the hydrophobic capability is required to be improved; the super-hydrophobic film and the heating film are compounded to form an energy-saving ice preventing and removing film, and the surface of the substrate is sequentially sprayed with a heat insulation film, a waterproof protection film with heat conducting performance and a hydrophobic coating, so that the effects of heating, hydrophobic ice removing can be achieved, but the high temperature resistance is required to be improved; the anti-icing composite film comprises a metal film layer, a metal nitride film layer, a nano rod-shaped zinc oxide layer and a hydrophobic layer which are sequentially deposited, has excellent superhydrophobic performance, can achieve obvious anti-icing effect, and has heating power and insulating performance to be improved.
The method comprises the steps of manufacturing the airplane parts, machining the embedded wire grooves, embedding the heating wires, welding the embedded wire grooves, polishing, and preparing the hydrophobic film on the surface, wherein the defects of air holes, incomplete welding, welding cracks and the like are easily generated in the welding process, the bonding strength of the hydrophobic film on the surface in a high-temperature environment is seriously influenced, and the risks of short circuit, leakage and the like of a heating route exist.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the aircraft and the surface flexible anti-icing/deicing composite film and the preparation method thereof, which are used for overcoming the defects of low embedded welding forming rate of heating wires of aircraft parts, poor anti-icing effect of the film, short service life of the film when the film is used in a high-temperature environment and the like in the prior art and improving the reliability of the aircraft parts in the working process.
In order to achieve the above object, the present invention provides a surface-flexible anti-icing/deicing composite film, comprising:
the first insulating film is arranged on the surface of a substrate needing to prevent/remove ice, and is an inorganic insulating film formed by depositing on the surface of the substrate through thermal spraying, magnetron sputtering, ion beam auxiliary deposition, chemical vapor deposition or magnetic filtration cathode vacuum arc source;
the flexible electrothermal film is positioned on the first insulating film and is arranged according to different working voltages and power requirements of unit area;
the second insulating film is positioned on the flexible electric heating film, and the second insulating film is an inorganic insulating film formed on the surface of the flexible electric heating film through thermal spraying, magnetron sputtering, ion beam auxiliary deposition or chemical vapor deposition; and
the super-hydrophobic film is positioned on the second insulating film, and is deposited on the CrN-based film formed on the surface of the second insulating film through magnetron sputtering, ion beam auxiliary deposition or magnetic filtration cathode vacuum arc source, and the surface of the CrN-based film is provided with a super-hydrophobic structure.
The surface flexible anti-icing/deicing composite film is characterized in that the flexible electrothermal film is arranged into a flexible resistance route meeting the set heating requirement through a template method.
The surface flexible anti-icing/deicing composite film is characterized in that the first insulating film is an inorganic insulating film of silicon oxide, silicon nitride, aluminum oxide or aluminum nitride, and the thickness of the first insulating film is 50-200 mu m.
The surface flexible anti-icing/deicing composite film is characterized in that the flexible electrothermal film is formed on the surface of the first insulating film through magnetron sputtering, ion beam auxiliary deposition or magnetic filtration cathode vacuum arc source deposition.
The surface flexible anti-icing/deicing composite film is characterized in that the flexible electrothermal film is a pure metal film of Ni, cr, cu or Zn or a NiCr alloy film, and the thickness of the flexible electrothermal film is 5-20um.
The surface flexible anti-icing/deicing composite film is characterized in that the second insulating film is an inorganic insulating film of silicon oxide, silicon nitride, aluminum oxide or aluminum nitride, and the thickness of the second inorganic insulating film is 25-100um.
The surface flexible anti-icing/deicing composite film is a CrN, crNiN, crAlN or CrAlSiN film, and the thickness of the super-hydrophobic film is 2-10um.
In order to better achieve the above purpose, the invention also provides a preparation method of the surface flexible anti-icing/deicing composite film, which comprises the following steps:
s100, cleaning the surface of a substrate of a part needing to be prevented/removed, and drying;
s200, preparing a first insulating film, and depositing the first insulating film on the surface of the substrate by using a thermal spraying, magnetron sputtering, ion beam assisted deposition, chemical vapor deposition or magnetic filtration cathode vacuum arc source to form an inorganic insulating film;
s300, preparing a flexible electrothermal film on the first insulating film, wherein the flexible electrothermal film is arranged according to different working voltages and power requirements of unit area;
s400, preparing a second insulating film, and forming an inorganic insulating film on the surface of the flexible electrothermal film through thermal spraying, magnetron sputtering, ion beam auxiliary deposition or chemical vapor deposition;
s500, depositing a CrN-based film on the surface of the second insulating film through magnetron sputtering, ion beam auxiliary deposition or magnetic filtration cathode vacuum arc source; and
s600, preparing a microprotrusion structure on the surface of the CrN-based film, and finally forming the CrN-based film with the superhydrophobic structure.
The preparation method of the surface flexible anti-icing/deicing composite film comprises the following steps of:
s101, placing the substrate in tetrachloroethylene, and soaking for 10-30 min to remove surface grease;
s102, ultrasonically cleaning the substrate for 10-20 min;
s103, placing the substrate in an acetone solution for ultrasonic cleaning for 10-20 min;
s104, placing the substrate in an alcohol solution for ultrasonic cleaning for 10-20 min;
s105, placing the substrate in a deionized beam solution for ultrasonic cleaning for 2-5 times, and 10-20 min each time; and
s106, placing the substrate in a baking oven at 70 ℃ for drying for 10-30 min.
In the step S200, gradient Al is deposited on the surface of the substrate by magnetron sputtering 2 O 3 A film.
The preparation method of the surface flexible anti-icing/deicing composite film, wherein in step S200, further comprises:
s201, placing the substrate into a vacuum coating chamber, opening a vacuum pump unit to vacuumize the vacuum coating chamber, and heating the vacuum coating chamber at the same time;
s202, when the temperature reaches the set value and the vacuum degree is less than 8 multiplied by 10 -4 When Pa, closing the throttle valve, introducing Ar of 1.0-2.0 Pa, switching on a power supply to sputter the Al target, wherein the sputtering power is 0.4-0.6 kw;
s203, introducing O into the vacuum coating chamber while coating 2 Reducing Ar inlet amount, keeping the vacuum coating chamber pressure unchanged, and enabling O to be the same as that of the vacuum coating chamber 2 With ArThe flow ratio reaches 3:1-4:1; and
s204, after coating for 6-10 hours, turning off a power supply and an air source, reducing the temperature to be less than 100 ℃, and opening the vacuum coating cavity to take out the substrate.
In the step S300, the plated material is deposited on the surface of the template by a template method, and then the template is removed to obtain the flexible electrothermal film with the template standard size.
In the step S300, a NiCr alloy film is deposited on the surface of the template disposed on the surface of the first insulating film by magnetron sputtering, the Ar flow is 50-70 sccm, and the vacuum degree of the vacuum chamber is maintained at 1.3x10 -2 ～1.6×10 -2 Pa, sputtering power of 0.4-0.6 kw and coating time of 5-8 hours.
In the above method for preparing a surface flexible anti-icing/deicing composite film, in step S400, the second insulating film is an AlN film, the template disposed on the surface of the first insulating film 2 is removed, and magnetron sputtering is used to deposit the AlN film on the surfaces of the first insulating film and the flexible electrothermal film.
The preparation method of the surface flexible anti-icing/deicing composite film, wherein in step S400, further comprises:
s401, placing the substrate into a vacuum coating chamber, opening a vacuum pump unit to vacuumize the vacuum coating chamber, and heating the vacuum coating chamber at the same time;
s402, when the temperature reaches the set value and the vacuum degree is less than 8 multiplied by 10 -4 When Pa, the throttle valve is closed, and N is introduced 2 With Ar flow, the flow ratio is N 2 ：Ar＝1:1～2:1；
S403, switching on a power supply to sputter an Al target, wherein the sputtering power is 0.4-0.6 kw; and
s404, after coating for 3-4 hours, turning off a power supply and an air source, reducing the temperature to be less than 100 ℃, and opening the vacuum coating cavity to take out the substrate.
The surface flexible anti-icing/deicing composite filmThe preparation method comprises the following steps of depositing a CrNiN film on the surface of the second insulating film by adopting a magnetic filtration cathode vacuum arc source in the step S500, wherein the current of the CrNi target arc source is 60-80A, the nitrogen flow is 50-70 sccm, and the vacuum degree of a vacuum chamber is 1.3X10 -2 ～1.6×10 -2 Pa, the deposition negative bias voltage is 100-300V, the duty ratio is 70-90%, and the deposition time is 2-3 hours.
In the preparation method of the surface flexible anti-icing/deicing composite film, in step S600, the microprotrusion structure is prepared on the surface of the CrNiN film by adopting a wet sand blasting method.
The preparation method of the surface flexible anti-icing/deicing composite film comprises the steps of adopting 2000-5000 mesh white corundum sand by a wet sand blasting method, wherein the sand blasting air pressure is 0.2-0.4Pa, the sand blasting angle is 45-60 degrees, and the sand blasting time is 30-60s.
In order to better achieve the above object, the present invention also provides an aircraft, wherein the surface of a component of the aircraft is provided with the above surface flexible anti-icing/deicing composite film.
The invention has the technical effects that:
the aircraft and the flexible anti-icing/deicing composite film based on the active and passive coupling surfaces and the preparation method thereof combine the advantages of simple active deicing operation, strong controllability and remarkable passive deicing effect, can overcome the defects of low embedded welding forming rate of heating wires of aircraft parts, poor anti-icing effect of the film, short service life of the film when used in a high-temperature environment and the like in the prior art, efficiently prevent and deicing, and improve the reliability of the aircraft parts in the working process.
The invention will now be described in more detail with reference to the drawings and specific examples, which are not intended to limit the invention thereto.
Drawings
FIG. 1 is a schematic view of a composite film structure according to an embodiment of the present invention;
FIG. 2 is a schematic view of the microstructure of a superhydrophobic film according to an embodiment of the invention.
Wherein reference numerals are used to refer to
1 matrix
2 first insulating film
3 flexible electrothermal film
4 second insulating film
5 superhydrophobic films
51 microprotrusions
52 air gap
6 drops of water
Detailed Description
The structural and operational principles of the present invention are described in detail below with reference to the accompanying drawings:
referring to fig. 1, fig. 1 is a schematic view of a composite film structure according to an embodiment of the invention. The invention relates to a flexible anti-icing/deicing composite film for an aircraft surface, comprising: the first insulating film 2 is arranged on the surface of the substrate 1 of the part of the aircraft required to prevent/remove ice, and the first insulating film 2 is an inorganic insulating film formed by thermal spraying, magnetron sputtering, ion beam auxiliary deposition, chemical vapor deposition or magnetic filtration cathode vacuum arc source deposition on the surface of the substrate 1; the flexible electrothermal film 3 is positioned on the first insulating film 2, the flexible electrothermal film 3 is arranged according to different working voltages and power requirements of unit area, and the flexible electrothermal film 3 can also be arranged into a flexible resistance route meeting the set heating requirements by a template method; a second insulating film 4 on the flexible electrothermal film 3, the flexible electrothermal film 3 being sandwiched between the first insulating film 2 and the second insulating film 4; the second insulating film 4 is an inorganic insulating film formed on the surface of the flexible electrothermal film 3 through thermal spraying, magnetron sputtering, ion beam assisted deposition or chemical vapor deposition; the superhydrophobic film 5 is located on the second insulating film 4, and the superhydrophobic film 5 is formed on the surface of the second insulating film 4 through magnetron sputtering, ion beam assisted deposition or magnetic filtration cathode vacuum arc source deposition, and the surface of the CrN-based film has a superhydrophobic structure.
Referring to fig. 2, fig. 2 is a schematic view of the microstructure of the superhydrophobic film 5 according to an embodiment of the invention. The superhydrophobic structure of the CrN-based film surface in this embodiment is a microprotrusion 51 structure prepared on the CrN-based film surface, the microprotrusion 51 structure is a plurality of uniformly and continuously distributed nanoscale microprotrusions, air gaps 52 are formed between the microprotrusions and the microprotrusions, and the structure has a good blocking effect similar to the lotus leaf surface on the water drop 6.
In this embodiment, the first insulating film 2 is an inorganic insulating film of silicon oxide, silicon nitride, aluminum oxide or aluminum nitride, and the thickness of the first insulating film 2 is 50-200um, which plays a role in heat insulation and insulation. When the first insulating film 2 is prepared by magnetron sputtering, a metal Ti injection layer can be prepared first, and the injection dosage is 1000-2000mC, so as to improve the adhesion strength of the first insulating film 2 and the substrate 1.
The flexible electrothermal film 3 is formed on the surface of the first insulating film 2 by magnetron sputtering, ion beam assisted deposition or magnetic filtration cathode vacuum arc source deposition. The flexible electrothermal film 3 is a pure metal film of Ni, cr, cu or Zn or a NiCr alloy film, and the thickness of the flexible electrothermal film 3 is 5-20um, so that the flexible electrothermal film has a strong heat conduction effect. After depositing AlN film on the surfaces of the first insulating film 2 and the flexible electrothermal film 3 by adopting the magnetron sputtering technology, placing the substrate 1 in a vacuum heat treatment furnace, vacuumizing, heating and preserving heat to 600-800 ℃, then introducing oxygen, maintaining the air pressure at 0.01-0.05 MPa, performing thermal oxidation treatment for 2-6 hours, and automatically generating Al on the surfaces of the AlN films in situ 2 O 3 The preparation method is used for reducing the porosity of the AlN film and improving the insulating property of the AlN film.
The second insulating film 4 is an inorganic insulating film of silicon oxide, silicon nitride, aluminum oxide or aluminum nitride, and the thickness of the second inorganic insulating film is 25-100um.
The super-hydrophobic film 5 is a CrN, crNiN, crAlN or CrAlSiN film, and the thickness of the super-hydrophobic film 5 is 2-10um. The surface of the CrN-based film can be modified into a lotus leaf-like superhydrophobic structure by means of sand blasting, shot blasting, laser surface treatment and the like. When the CrN-based film is prepared by a magnetic filtration cathode vacuum arc source deposition mode, the surface of the substrate 1 is cleaned by adopting the magnetic filtration cathode vacuum arc source, so that the adhesion strength between the CrN-based film and the second insulating film 4 is improved.
The preparation method of the flexible anti-icing/deicing composite film for the surface of the aircraft finally forms the high-efficiency anti-icing/deicing film with a multilayer structure and a composite function, and comprises the following steps:
step S100, cleaning the surface of a substrate 1 of a part of the aircraft required to be protected from ice and deicing, and drying;
step 200, preparing a first insulating film 2, and depositing the first insulating film on the surface of the substrate 1 by thermal spraying, magnetron sputtering, ion beam assisted deposition, chemical vapor deposition or magnetic filtration cathode vacuum arc source to form an inorganic insulating film;
step S300, preparing a flexible electrothermal film 3 on the first insulating film 2, wherein the flexible electrothermal film 3 is arranged according to different working voltages and power requirements of unit area;
step S400, preparing a second insulating film 4, and forming an inorganic insulating film on the surface of the flexible electrothermal film 3 through thermal spraying, magnetron sputtering, ion beam assisted deposition or chemical vapor deposition;
s500, depositing a CrN-based film on the surface of the second insulating film 4 through magnetron sputtering, ion beam auxiliary deposition or magnetic filtration cathode vacuum arc source; and
and S600, preparing a microprotrusion 51 structure on the surface of the CrN-based film, and finally forming the CrN-based film with the superhydrophobic structure.
Wherein, the cleaning in step S100 includes:
step S101, placing the substrate 1 in tetrachloroethylene, and soaking for 10-30 min to remove surface grease;
step S102, ultrasonically cleaning the substrate 1 for 10-20 min;
step S103, placing the substrate 1 in an acetone solution for ultrasonic cleaning for 10-20 min;
step S104, placing the substrate 1 in an alcohol solution for ultrasonic cleaning for 10-20 min;
step S105, placing the substrate 1 in a deionized beam solution for ultrasonic cleaning for 2-5 times, and 10-20 min each time; and
and step S106, placing the substrate 1 in a baking oven at the temperature of 70 ℃ for drying for 10-30 min.
In step S200 of this embodiment, magnetron sputtering is adopted to deposit on the surface of the substrate 1Gradient Al 2 O 3 A film. Further comprises:
step S201, placing the substrate 1 into a vacuum coating chamber, opening a vacuum pump unit to vacuumize the vacuum coating chamber, and heating the vacuum coating chamber at the same time;
step S202, when the temperature reaches the set value and the vacuum degree is less than 8×10 -4 When Pa, closing the throttle valve, introducing Ar of 1.0-2.0 Pa, switching on a power supply to sputter the Al target, wherein the sputtering power is 0.4-0.6 kw;
step S203, introducing O into the vacuum coating chamber while coating 2 Reducing Ar inlet amount, keeping the vacuum coating chamber pressure unchanged, and enabling O to be the same as that of the vacuum coating chamber 2 The flow ratio of Ar to Ar reaches 3:1-4:1; and
and S204, after coating for 6-10 hours, turning off a power supply and an air source, reducing the temperature to be less than 100 ℃, and opening the vacuum coating cavity to take out the substrate 1.
In step S300 of this embodiment, the plated material is deposited on the surface of the template by a template method, and then the template is removed, resulting in a flexible electrothermal film 3 having a template specification size. Wherein, a NiCr alloy film is deposited on the surface of a template arranged on the surface of the first insulating film 2 by magnetron sputtering, ar flow is preferably 50-70 sccm, and vacuum degree of a vacuum chamber is maintained at 1.3X10 -2 ～1.6×10 -2 Pa, the sputtering power is preferably 0.4 to 0.6kw, and the coating time is preferably 5 to 8 hours.
In step S400 of this embodiment, the second insulating film 4 is an AlN film, the template disposed on the surface of the first insulating film 2 is removed, and magnetron sputtering is used to deposit the AlN film on the surfaces of the first insulating film 2 and the flexible electrothermal film 3. Further comprises:
step S401, placing the substrate 1 into a vacuum coating chamber, opening a vacuum pump unit to vacuumize the vacuum coating chamber, and heating the vacuum coating chamber at the same time;
step S402, when the temperature reaches the set value and the vacuum degree is less than 8×10 -4 When Pa, the throttle valve is closed, and N is introduced 2 With Ar flow, flow ratio is preferablyIs N 2 ：Ar＝1:1～2:1；
Step S403, switching on a power supply to sputter an Al target, wherein the sputtering power is preferably 0.4-0.6 kw; and
and S404, after coating for 3-4 hours, turning off a power supply and an air source, reducing the temperature to be less than 100 ℃, and opening the vacuum coating chamber to take out the substrate 1.
In step S500 of this embodiment, a CrNiN film is deposited on the surface of the second insulating film 4 by using a magnetic filtration cathode vacuum arc source, the CrNi target arc source current is preferably 60-80A, the nitrogen flow is preferably 50-70 sccm, and the vacuum degree of the vacuum chamber is preferably 1.3x10 -2 ～1.6×10 -2 Pa, the deposition negative bias is preferably 100 to 300V, the duty ratio is preferably 70 to 90%, and the deposition time is preferably 2 to 3 hours.
In step S600 of this embodiment, the microprotrusion 51 structure is prepared on the surface of the CrNiN film by wet sand blasting. The wet sand blasting method adopts 2000-5000 mesh white corundum sand, the sand blasting air pressure is preferably 0.2-0.4Pa, the sand blasting angle is preferably 45-60 degrees, and the sand blasting time is preferably 30-60s.
The surface flexible anti-icing/deicing composite film and the preparation method thereof can be applied to the fields of aerospace, ships, wind power generation and the like, particularly an aircraft such as an aircraft, and the surface flexible anti-icing/deicing composite film of the aircraft can be prepared on the surface of a part of the aircraft such as an aircraft propeller.
The invention combines the advantages of active deicing and passive deicing of the surface of the aircraft, breaks through the problem that the surface of the super-hydrophobic coating fails after ice coating in the prior art, improves the defect of high electrothermal deicing energy consumption, and is an efficient and convenient anti-icing method based on active and passive coupling; the flexible electrothermal film 3 is arranged between the first insulating film 2 and the second insulating film 4 by adopting a layer-by-layer multi-step construction method, and the flexible electrothermal film 3 cannot be oxidized in the heating process, so that the resistance stability is ensured; the CrN super-hydrophobic film 5 which is in direct contact with water is separated from the flexible electrothermal film 3, so that the super-hydrophobic film 5 is prevented from being invalid or broken, and the liquid enters the flexible electrothermal film 3 to cause short circuit, thereby ensuring the safety of a circuit; the preparation work of all the coatings can be completed by using one magnetron sputtering device, and the method has the advantages of simple process, convenience, high efficiency, strong repeatability and certain economic value and safety value; the method can be applied to various different occasions, and the shape, thickness and the like of the prepared coating can be adjusted according to different application fields so as to change the resistance value of the electrothermal film, so as to adapt to different use requirements such as aircraft propellers, wind driven generators, automobile parts and the like.
In addition, the invention effectively solves the problem of short service life of the film when the film is used in a high-temperature environment, and improves the high-temperature resistance of the film. The surface flexible anti-icing/deicing composite film prepared by the invention has inorganic coatings, the self high temperature resistance can reach 600 ℃, the high temperature resistance of the hydrophobic coating in the prior art is not more than 400 ℃, and the heating power is limited; the bonding strength of the first insulating film 2 exceeds 30Gpa, the bonding strength of the flexible electrothermal film 3 exceeds 40N, the bonding strength of the second insulating film 4 exceeds 30Gpa, the bonding strength of the superhydrophobic film 5 exceeds 80N, the hardness exceeds 2000HV, the high bonding strength of each coating ensures that the coating cannot fall off in the heating process, and the high hardness ensures that the surface coating resists wind and sand erosion in the flight process of the aircraft; the high bonding strength and the high hardness ensure the high temperature resistance of the surface flexible anti-icing/deicing composite film together, so that the heating power of the surface flexible anti-icing/deicing composite film is further ensured; the first insulating film 2 and the second insulating film 3 are made of oxide or oxynitride, and compared with nitride, the insulating capability of the first insulating film and the second insulating film is much higher, so that the safety of circuits in the flexible electrothermal film 3 is ensured.
Of course, the present invention is capable of other various embodiments and its several details are capable of modification and variation in light of the present invention, as will be apparent to those skilled in the art, without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (19)
1. A surface-flexible anti-icing/deicing composite film comprising:
the first insulating film is arranged on the surface of a substrate needing to prevent/remove ice, and is an inorganic insulating film formed by depositing on the surface of the substrate through thermal spraying, magnetron sputtering, ion beam auxiliary deposition, chemical vapor deposition or magnetic filtration cathode vacuum arc source;
the flexible electrothermal film is positioned on the first insulating film and is arranged according to different working voltages and power requirements of unit area;
the second insulating film is positioned on the flexible electric heating film, and the second insulating film is an inorganic insulating film formed on the surface of the flexible electric heating film through thermal spraying, magnetron sputtering, ion beam auxiliary deposition or chemical vapor deposition; and
the super-hydrophobic film is positioned on the second insulating film, and is deposited on the CrN-based film formed on the surface of the second insulating film through magnetron sputtering, ion beam auxiliary deposition or magnetic filtration cathode vacuum arc source, and the surface of the CrN-based film is provided with a super-hydrophobic structure.
2. The surface flexible anti-icing/deicing composite film as recited in claim 1, wherein said flexible electrothermal film is templated to provide a flexible resistive path that meets set heating requirements.
3. A surface flexible anti-icing/deicing composite film as claimed in claim 1 or 2, characterized in that said first insulating film is an inorganic insulating film of silicon oxide, silicon nitride, aluminum oxide or aluminum nitride, and the thickness of said first insulating film is 50-200 μm.
4. The surface flexible anti-icing/deicing composite film as recited in claim 1 or 2, wherein said flexible electrothermal film is formed on said first insulating film surface by magnetron sputtering, ion beam assisted deposition, or magnetic filtration cathodic vacuum arc source deposition.
5. A surface flexible anti-icing/deicing composite film as claimed in claim 1 or 2, characterized in that said flexible electrothermal film is a pure metal film of Ni, cr, cu or Zn or NiCr alloy film, and the thickness of said flexible electrothermal film is 5-20um.
6. A surface flexible anti-icing/deicing composite film as claimed in claim 1 or 2, characterized in that said second insulating film is an inorganic insulating film of silicon oxide, silicon nitride, aluminum oxide or aluminum nitride, and the thickness of said second inorganic insulating film is 25-100 μm.
7. A surface flexible anti-icing/deicing composite film as claimed in claim 1 or 2, characterized in that said superhydrophobic film is a CrN, crNiN, crAlN or craalsin film, said superhydrophobic film having a thickness of 2-10um.
8. The preparation method of the surface flexible anti-icing/deicing composite film is characterized by comprising the following steps of:
s100, cleaning the surface of a substrate of a part needing to be prevented/removed, and drying;
s200, preparing a first insulating film, and depositing the first insulating film on the surface of the substrate by using a thermal spraying, magnetron sputtering, ion beam assisted deposition, chemical vapor deposition or magnetic filtration cathode vacuum arc source to form an inorganic insulating film;
s300, preparing a flexible electrothermal film on the first insulating film, wherein the flexible electrothermal film is arranged according to different working voltages and power requirements of unit area;
s400, preparing a second insulating film, and forming an inorganic insulating film on the surface of the flexible electrothermal film through thermal spraying, magnetron sputtering, ion beam auxiliary deposition or chemical vapor deposition;
s500, depositing a CrN-based film on the surface of the second insulating film through magnetron sputtering, ion beam auxiliary deposition or magnetic filtration cathode vacuum arc source; and
s600, preparing a microprotrusion structure on the surface of the CrN-based film, and finally forming the CrN-based film with the superhydrophobic structure.
9. The method of preparing a surface-flexible anti-icing/deicing composite film as recited in claim 8, wherein the cleaning in step S100 comprises:
s101, placing the substrate in tetrachloroethylene, and soaking for 10-30 min to remove surface grease;
s102, ultrasonically cleaning the substrate for 10-20 min;
s103, placing the substrate in an acetone solution for ultrasonic cleaning for 10-20 min;
s104, placing the substrate in an alcohol solution for ultrasonic cleaning for 10-20 min;
s105, placing the substrate in a deionized beam solution for ultrasonic cleaning for 2-5 times, and 10-20 min each time; and
s106, placing the substrate in a baking oven at 70 ℃ for drying for 10-30 min.
10. The method for producing a surface-flexible anti-icing/deicing composite film according to claim 8 or 9, characterized in that in step S200, gradient Al is deposited on the surface of the substrate by magnetron sputtering 2 O 3 A film.
11. The method for preparing a surface-flexible anti-icing/deicing composite film as recited in claim 10, further comprising, in step S200:
s201, placing the substrate into a vacuum coating chamber, opening a vacuum pump unit to vacuumize the vacuum coating chamber, and heating the vacuum coating chamber at the same time;
s202, when the temperature reaches the set value and the vacuum degree is less than 8 multiplied by 10 -4 When Pa, closing the throttle valve, introducing Ar of 1.0-2.0 Pa, switching on a power supply to sputter the Al target, wherein the sputtering power is 0.4-0.6 kw;
s203, introducing O into the vacuum coating chamber while coating 2 Reducing Ar inlet amount, keeping the vacuum coating chamber pressure unchanged, and enabling O to be the same as that of the vacuum coating chamber 2 The flow ratio of Ar to Ar reaches 3:1-4:1; and
s204, after coating for 6-10 hours, turning off a power supply and an air source, reducing the temperature to be less than 100 ℃, and opening the vacuum coating cavity to take out the substrate.
12. A method of producing a flexible anti-icing/deicing composite film as claimed in claim 8 or 9, characterized in that in step S300, the plated material is deposited onto the surface of a template by a template method, and the template is removed, whereby a flexible electrothermal film having a template specification size is obtained.
13. The method for producing a surface-flexible anti-icing/deicing composite film according to claim 12, characterized in that in step S300, a NiCr alloy film is deposited on a template surface placed on the surface of said first insulating film by magnetron sputtering, the Ar flow is 50-70 sccm, and the vacuum degree of the vacuum chamber is maintained at 1.3x10 -2 ～1.6×10 -2 Pa, sputtering power of 0.4-0.6 kw and coating time of 5-8 hours.
14. The method for preparing a surface flexible anti-icing/deicing composite film according to claim 12, wherein in step S400, the second insulating film is an AlN film, the template disposed on the surface of the first insulating film 2 is removed, and magnetron sputtering is used to deposit the AlN film on the surfaces of the first insulating film and the flexible electrothermal film.
15. The method for preparing a surface-flexible anti-icing/deicing composite film as recited in claim 14, further comprising, in step S400:
s401, placing the substrate into a vacuum coating chamber, opening a vacuum pump unit to vacuumize the vacuum coating chamber, and heating the vacuum coating chamber at the same time;
s402, when the temperature reaches the set value and the vacuum degree is less than 8 multiplied by 10 -4 When Pa, the throttle valve is closed, and N is introduced 2 With Ar flow, the flow ratio is N 2 ：Ar＝1:1～2:1；
S403, switching on a power supply to sputter an Al target, wherein the sputtering power is 0.4-0.6 kw; and
s404, after coating for 3-4 hours, turning off a power supply and an air source, reducing the temperature to be less than 100 ℃, and opening the vacuum coating cavity to take out the substrate.
16. As claimed in claim 8 orThe method for preparing the surface flexible anti-icing/deicing composite film as described in 9, characterized in that in step S500, a magnetic filtration cathode vacuum arc source is adopted to deposit a CrNiN film on the surface of the second insulation film, the current of the CrNi target arc source is 60-80A, the nitrogen flow is 50-70 sccm, and the vacuum degree of a vacuum chamber is 1.3X10 -2 ～1.6×10 -2 Pa, the deposition negative bias voltage is 100-300V, the duty ratio is 70-90%, and the deposition time is 2-3 hours.
17. The method for producing a surface-flexible anti-icing/deicing composite film as recited in claim 16, wherein in step S600, the microprotrusion structure is produced on the CrNiN film surface by wet blasting.
18. The method for preparing a surface flexible anti-icing/deicing composite film according to claim 17, wherein the wet sand blasting method adopts 2000-5000 mesh white corundum sand, the sand blasting air pressure is 0.2-0.4Pa, the sand blasting angle is 45-60 degrees, and the sand blasting time is 30-60s.
19. An aircraft, characterized in that the surface of a component of the aircraft has a surface-flexible anti-icing/deicing composite film according to any one of claims 1 to 7.
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| CN104818453A (en) * | 2015-04-17 | 2015-08-05 | 北京机械工业自动化研究所 | Erosion-resisting hydrophobic material and preparation method thereof |
| CN105154879A (en) * | 2015-09-23 | 2015-12-16 | 北京机械工业自动化研究所 | Composite coating for pitot tube, preparation method of composite coating, and pitot tube with composite coating |
| CN109295416A (en) * | 2018-10-29 | 2019-02-01 | 北京机械工业自动化研究所 | A kind of super hydrophobic composite coating and the preparation method and application thereof |
| CN113597032A (en) * | 2021-08-10 | 2021-11-02 | 北京航空航天大学 | Compatible stealth anti-icing material and preparation method and application thereof |
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