CN116073219B - A preparation method of an all-inorganic perovskite liquid laser based on a microfluidic channel - Google Patents
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Abstract
Description
技术领域technical field
本发明属于光电信息技术领域,具体涉及一种基于微流通道的全无机钙钛矿液体激光器的制备方法。The invention belongs to the field of optoelectronic information technology, and in particular relates to a preparation method of an all-inorganic perovskite liquid laser based on a microfluidic channel.
背景技术Background technique
光流控激光器是一种集成了微腔、微流通道和液体增益介质的新兴技术。它在新型光子器件中有广泛的应用,如片上可调谐相干光源和生物控制激光器和灵敏分析生物分子。基于半导体胶体量子点(QDs)的光子器件由于其易于处理、宽波长范围的光谱可调性和潜在的低温度不敏感激光阈值而引起了人们的广泛关注。Optofluidic lasers are an emerging technology that integrates microcavities, microfluidic channels, and liquid gain media. It has broad applications in novel photonic devices, such as on-chip tunable coherent light sources and lasers for biological control and sensitive analysis of biomolecules. Photonic devices based on semiconducting colloidal quantum dots (QDs) have attracted considerable attention due to their ease of processing, spectral tunability over a wide wavelength range, and potentially low temperature-insensitive lasing threshold.
相比与由增益材料紧密堆叠而成的固态激光器,液体激光器展示出独特的特性:由于微流技术和光子学的结合,为高度集成的微型光电设备的发展提供了新方案,在光电信息通讯,光加密、激光探测器,等光电信息应用领域有很大的潜力。Compared with solid-state lasers that are tightly stacked with gain materials, liquid lasers exhibit unique characteristics: due to the combination of microfluidic technology and photonics, it provides a new solution for the development of highly integrated micro-optical devices, in optoelectronic information communication , Optical encryption, laser detectors, and other optoelectronic information applications have great potential.
液相增益介质是组成液体激光器的关键元件,其迭代对光流控技术的发展至关重要。最初,将荧光染料作为液体增益介质已被广泛研究。在这些染料液体激光器中,需要复杂的泵浦和操作配置来克服染料增益介质在静止状态下向非荧光分子的不可逆转换。即便如此,染料分子在光激发过程中还会逐渐光降解,导致增益效率降低,需要周期性地更换溶液。近年来,一些报道研究了将基于CdSe的量子点用于液体激光增益介质的可能性,然而,由于增益系数相对较低,这些器件的泵浦阈值过高,无法适用于实际应用。因此,很有必要去寻求新的液相增益介质用于发展高性能的液体激光器。Liquid phase gain medium is a key component of liquid lasers, and its iteration is crucial to the development of optofluidic technology. Initially, fluorescent dyes have been extensively studied as liquid gain media. In these dye liquid lasers, complex pumping and operating configurations are required to overcome the irreversible conversion of the dye gain medium to non-fluorescent molecules in the resting state. Even so, dye molecules are gradually photodegraded during photoexcitation, resulting in lower gain efficiency and requiring periodic solution replacement. In recent years, several reports have investigated the possibility of using CdSe-based quantum dots as liquid laser gain media, however, due to the relatively low gain coefficient, the pumping threshold of these devices is too high for practical applications. Therefore, it is necessary to seek new liquid phase gain media for the development of high-performance liquid lasers.
无机卤化铅钙钛矿纳米晶体是近年来兴起的一类新型激光材料。与传统的基于CdSe的NCs相比,无机卤化铅钙钛矿纳米晶体具有更大的增益系数和更高的缺陷耐受性,这使得无机卤化铅钙钛矿纳米晶体成为一种潜在的液体增益介质。然而在过去几年中,尽管基于无机卤化铅钙钛矿纳米晶体的固体激光器的开发取得了重大进展,但基于无机卤化铅钙钛矿纳米晶体的液体激光器却迟迟未能实现。Inorganic lead halide perovskite nanocrystals are a new class of laser materials emerging in recent years. Compared with conventional CdSe-based NCs, inorganic lead halide perovskite nanocrystals have larger gain coefficients and higher defect tolerance, which makes inorganic lead halide perovskite nanocrystals a potential liquid gain medium. However, despite significant progress in the development of solid-state lasers based on inorganic lead halide perovskite nanocrystals in the past few years, liquid lasers based on inorganic lead halide perovskite nanocrystals have been delayed.
2014年研究提出了一个理想的具有单分子层增益的光流控激光器,但由于当时的半导体时代技术限制,技术上没有取得优异的成果。但提出的固液混合激光器模型可以实现高质量的回廊型激光,且为流控技术提出了新的可能。在作为新型半导体钙钛矿被引入的现今,具有高增益、高重吸收系数、长载流子寿命的钙钛矿材料可以较好的契合该形状模型,制备出高出预期效果的液体激光器。2019年经实验得出使用十二烷基苯磺酸作为配体材料进行钙钛矿量子点的制备可以提高材料的保存时间,以及提高材料的发光性能。In 2014, the research proposed an ideal optofluidic laser with monolayer gain, but due to the technical limitations of the semiconductor era at that time, no excellent technical results were achieved. However, the proposed solid-liquid hybrid laser model can realize high-quality corridor-type lasers, and proposes new possibilities for fluidic technology. Nowadays, when perovskite is introduced as a new type of semiconductor, perovskite materials with high gain, high reabsorption coefficient, and long carrier lifetime can better fit the shape model, and liquid lasers with higher than expected effects can be prepared. In 2019, it was found that the use of dodecylbenzenesulfonic acid as a ligand material for the preparation of perovskite quantum dots can improve the storage time of the material and improve the luminescent performance of the material.
发明内容Contents of the invention
为了解决现有技术的缺陷,本发明提供了一种基于微流通道的全无机钙钛矿液体激光器的制备方法。In order to solve the defects of the prior art, the invention provides a preparation method of an all-inorganic perovskite liquid laser based on a microfluidic channel.
本发明解决了现有技术中液体激光器的激光阈值高,激光模式数多,高功率下工作稳定性低的短板,具体技术方案包括以下步骤:The present invention solves the problems of high laser threshold, large number of laser modes, and low working stability under high power in the prior art, and the specific technical solution includes the following steps:
一种基于微流通道的全无机钙钛矿液体激光器的制备方法,包括以下步骤:A method for preparing an all-inorganic perovskite liquid laser based on a microfluidic channel, comprising the following steps:
步骤1:制备十二烷基苯磺酸配体的全无机卤素钙钛矿CsPbBr3量子点分散液;Step 1: preparing the all-inorganic halogen perovskite CsPbBr 3 quantum dot dispersion of dodecylbenzenesulfonic acid ligand;
步骤2:在PMMA基板上刻出U形流道;Step 2: Engraving a U-shaped flow channel on the PMMA substrate;
步骤3:将基板和键合板进行超声清洗、干燥和N20等离子处理;Step 3: Ultrasonic cleaning, drying and N 2 0 plasma treatment of the substrate and bonding plate;
步骤4:将SiO2纤芯放置到流道之中,用键合板对基板进行真空热压封装,制成带有微流通道的芯片;Step 4: Place the SiO 2 fiber core in the flow channel, and vacuum heat-press the substrate with a bonding plate to make a chip with a microfluidic channel;
步骤5:在微流通道上粘结钢针作为流道出入口,并将量子点分散液注入进微流通道,制备成钙钛矿液体激光器,实现回音壁模式激光。Step 5: Bond steel needles on the microfluidic channel as the inlet and outlet of the flow channel, and inject the quantum dot dispersion liquid into the microfluidic channel to prepare a perovskite liquid laser to realize the whispering gallery mode laser.
进一步的,所述全无机卤素钙钛矿CsPbBr3量子点分散液的浓度不低于133.0mg·mL-1。Further, the concentration of the all-inorganic halogen perovskite CsPbBr 3 quantum dot dispersion is not lower than 133.0 mg·mL -1 .
进一步的,所述U形流道的横截面尺寸不大于250*250 µm2。Further, the cross-sectional size of the U-shaped flow channel is not greater than 250*250 µm 2 .
进一步的,所述步骤3具体为,基板和键合板用去离子水在50 ℃超声清洗3次,每次15分钟;再在真空干燥箱中80 ℃干燥30分钟;后利用Plasma设备N20气体处理180秒,气体流量60 sccm,真空压力30 mTorr,等离子功率170 W。Further, the step 3 is specifically, the substrate and the bonded plate are ultrasonically cleaned with deionized water at 50 ° C for 3 times, each time for 15 minutes; then dried in a vacuum oven at 80 ° C for 30 minutes; and finally using Plasma equipment N 2 0 The gas treatment was 180 seconds, the gas flow rate was 60 sccm, the vacuum pressure was 30 mTorr, and the plasma power was 170 W.
进一步的,所述SiO2纤芯是将SiO2光纤去除包覆层后,用火焰拉伸法制得的表面光滑的SiO2纤芯。Further, the SiO 2 core is a SiO 2 core with a smooth surface obtained by removing the cladding layer from the SiO 2 optical fiber and then using a flame drawing method.
进一步的,所述真空热压封装的升温速率为9 ℃/min,热压温度117 ℃,热压时间33秒,降温速率5 ℃/min,温度降至67 ℃取出。Further, the heating rate of the vacuum hot-press package is 9°C/min, the hot-pressing temperature is 117°C, the hot-pressing time is 33 seconds, the cooling rate is 5°C/min, and the temperature drops to 67°C and taken out.
进一步的,所述全无机卤素钙钛矿是矩形单晶。Further, the all-inorganic halogen perovskite is a rectangular single crystal.
进一步的,所述SiO2纤芯半径为12 µm~44 µm。Further, the SiO 2 core has a radius of 12 µm to 44 µm.
和现有技术相比,1、本发明提供的方法操作简便高效,容易用简单的设备实现;2、本发明制备了一种液体激光器,有效弥补了现有技术中液体激光器的激光阈值高,高功率下工作稳定性低的短板。Compared with the prior art, 1. The method provided by the present invention is simple and efficient in operation, and is easy to implement with simple equipment; 2. The present invention prepares a liquid laser, which effectively compensates for the high laser threshold of the liquid laser in the prior art, Short board with low working stability under high power.
附图说明Description of drawings
图1为本发明利用微控系统在PMMA基板上制备微流芯片的流程示意图。FIG. 1 is a schematic flow diagram of the present invention using a micro-control system to prepare a microfluidic chip on a PMMA substrate.
图2为本发明中注射有十二烷基苯磺酸(DBSA)配体的CsPbBr3量子点分散液的微流芯片的照片。Fig. 2 is a photo of a microfluidic chip injected with a CsPbBr3 quantum dot dispersion liquid of dodecylbenzenesulfonic acid (DBSA) ligand in the present invention.
图3为本发明利用飞秒激光器激发所制备的液体激光器的照片。Fig. 3 is a photo of the prepared liquid laser excited by femtosecond laser in the present invention.
图4为本发明在飞秒激光器激发的激光光谱及该发明在泵浦条件下的激光阈值表征。Fig. 4 is the laser spectrum excited by the femtosecond laser of the present invention and the laser threshold characterization of the present invention under pumping conditions.
图5为本发明在泵浦条件下的激光阈值表征,显示该发明在泵浦为22.7µJ·cm-2时实现激光。Fig. 5 is the laser threshold characterization under the pumping condition of the present invention, showing that the invention realizes lasing when the pumping is 22.7µJ·cm -2 .
图6为本发明通过更换微流芯片中不同尺寸的光纤得到的光谱,图中标注了自由光谱范围和激光模式数的相应变化。分别为光纤半径为44μm时,自由光谱半径为0.67nm。光纤半径为16μm时,自由光谱半径为1.83nm。光纤半径为12μm时,自由光谱半径为2.44nm。Fig. 6 is the spectrum obtained by replacing the optical fibers of different sizes in the microfluidic chip according to the present invention, and the corresponding changes in the free spectral range and the number of laser modes are marked in the figure. When the fiber radius is 44μm, the free spectral radius is 0.67nm. When the fiber radius is 16μm, the free spectral radius is 1.83nm. When the fiber radius is 12μm, the free spectral radius is 2.44nm.
图7为本发明用相同功率的飞秒激光激发制备的液体激光器和普通的固体薄膜光纤激光器得到的发光强度变化图。上方曲线为液体激光器归一化发光强度,下方曲线为固体激光器归一化发光强度。Fig. 7 is a graph showing the variation of luminous intensity obtained by exciting the liquid laser prepared by the femtosecond laser with the same power and the common solid thin-film fiber laser according to the present invention. The upper curve is the normalized luminous intensity of the liquid laser, and the lower curve is the normalized luminous intensity of the solid-state laser.
具体实施方式Detailed ways
下面结合附图和具体实施例,进一步阐明本发明,应理解这些实施例仅用于说明本发明而不用于限制本发明的范围,在阅读了本发明之后,本领域技术人员对本发明的各种等价形式的修改均落于本申请所附权利要求所限定的范围。Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.
如图1所示,一种基于微流通道的全无机钙钛矿液体激光器采用以下方法制备:As shown in Figure 1, an all-inorganic perovskite liquid laser based on microfluidic channels is prepared by the following method:
步骤1:制备十二烷基苯磺酸配体的全无机卤素钙钛矿CsPbBr3量子点分散液;Step 1: preparing the all-inorganic halogen perovskite CsPbBr 3 quantum dot dispersion of dodecylbenzenesulfonic acid ligand;
步骤2:在PMMA基板上刻出U形流道;Step 2: Engraving a U-shaped flow channel on the PMMA substrate;
步骤3:将基板和键合板进行超声清洗、干燥和N20等离子处理;Step 3: Ultrasonic cleaning, drying and N 2 0 plasma treatment of the substrate and bonding plate;
步骤4:将SiO2纤芯放置到流道之中,用键合板对基板进行真空热压封装,制成带有微流通道的芯片;Step 4: Place the SiO 2 fiber core in the flow channel, and vacuum heat-press the substrate with a bonding plate to make a chip with a microfluidic channel;
步骤5:在微流通道上粘结钢针作为流道出入口,并将量子点分散液注入进微流通道,制备成钙钛矿液体激光器,实现回音壁模式激光。Step 5: Bond steel needles on the microfluidic channel as the inlet and outlet of the flow channel, and inject the quantum dot dispersion liquid into the microfluidic channel to prepare a perovskite liquid laser to realize the whispering gallery mode laser.
利用微控系统(LSmicro2020 CNC)在PMMA基板上制备微流芯片,安装合适尺寸的铣刀,设定z轴下切距离即雕刻深度,再设定x,y轴雕刻出合适尺寸的样品,如图2所示。U形流道的横截面尺寸不大于250*250 µm2。Use a micro-control system (LSmicro2020 CNC) to prepare a microfluidic chip on a PMMA substrate, install a milling cutter of a suitable size, set the z-axis cutting distance, which is the engraving depth, and then set the x, y-axis to engrave a sample of a suitable size, as shown in the figure 2. The cross-sectional size of the U-shaped flow channel is not greater than 250*250 µm 2 .
利用热注入法制备十二烷基苯磺酸(DBSA)配体的全无机卤素钙钛矿CsPbBr3量子点分散液,所述全无机卤素钙钛矿是矩形单晶;所述的热注入法如下: Cs2CO3 (0.0593 g,0.182 mmol),Pb(OAc)2(0.206 g,0.54 mmol)ODE(10ml)和十二烷基苯磺酸(1.2045g,3.689mmoL)注入到100mL三颈烧瓶中,并将混合物在120℃下脱气半小时在氩气流下。透明溶液保持在120℃以下再过30分钟,然后预溶解四辛基溴化铵的甲苯溶液(748 mg,1.37mmol,2 mL)迅速注射到上述前体中溶液。5 s后,使用反应混合物冷却水浴。Preparation of all-inorganic halogen perovskite CsPbBr 3 quantum dot dispersion liquid of dodecylbenzenesulfonic acid (DBSA) ligand by hot injection method, said all-inorganic halogen perovskite is a rectangular single crystal; said hot injection method As follows: Cs 2 CO 3 (0.0593 g, 0.182 mmol), Pb(OAc) 2 (0.206 g, 0.54 mmol) ODE (10ml) and dodecylbenzenesulfonic acid (1.2045g, 3.689mmoL) were injected into 100mL three-neck flask, and degas the mixture at 120 °C for half an hour under a stream of argon. The clear solution was kept below 120 °C for another 30 min, and then a toluene solution (748 mg, 1.37 mmol, 2 mL) predissolved tetraoctylammonium bromide was rapidly injected into the above precursor solution. After 5 s, the reaction mixture was cooled in a water bath.
基板和键合板用去离子水在50 ℃超声清洗3次,每次15分钟;再用真空干燥箱在80 ℃干燥30分钟;干燥后利用Plasma设备N20气体处理180秒,气体流量60 sccm,真空压力30 mTorr,等离子功率170 W。真空热压过程升温速率为9 ℃/min,热压温度117 ℃,热压时间33秒,降温速率5 ℃/min,温度降至67 ℃取出。Substrates and bonded plates were ultrasonically cleaned with deionized water at 50 °C for 3 times, each time for 15 minutes; then dried in a vacuum oven at 80 °C for 30 minutes; after drying, they were treated with N 2 0 gas for 180 seconds in a Plasma device with a gas flow rate of 60 sccm ,
SiO2纤芯是将SiO2光纤去除包覆层后,用火焰拉伸法制得的表面光滑的SiO2纤芯。The SiO 2 core is a SiO 2 core with a smooth surface obtained by removing the cladding from the SiO 2 optical fiber by flame drawing.
将十二烷基苯磺酸(DBSA)配体的CsPbBr3量子点分散液注入到微流芯片中,将微流芯片中光滑的光微流纤芯作为回音壁模式微腔,利用飞秒激光器激发所制备的液体激光器,如图3所示。The CsPbBr 3 quantum dot dispersion liquid of dodecylbenzenesulfonic acid (DBSA) ligand was injected into the microfluidic chip, and the smooth optical microfluidic core in the microfluidic chip was used as a whispering gallery mode microcavity, and the femtosecond laser was used to Excite the prepared liquid laser, as shown in Figure 3.
通过由实验室搭建的微区荧光测试系统,在泵浦条件下进行激光性能表征,在一定泵浦强度下出现多个发光峰,并且随着泵浦强度增强本发明的发光强度不断提高,如图4所示。Through the micro-area fluorescence test system built by the laboratory, the laser performance was characterized under pumping conditions, and multiple luminescence peaks appeared at a certain pumping intensity, and the luminous intensity of the present invention continued to increase as the pumping intensity increased, as shown in Figure 4 shows.
通过由实验室搭建的微区荧光测试系统,在泵浦条件下进行激光性能表征,发现微流芯片的发光强度在泵浦为22.7µJ cm-2 的条件下显著提升,证明微流芯片实现了激光,如图5所示。Through the micro-area fluorescence test system built by the laboratory, the laser performance was characterized under pumping conditions, and it was found that the luminous intensity of the microfluidic chip was significantly improved under the condition of pumping at 22.7µJ cm -2 , which proved that the microfluidic chip realized Laser, as shown in Figure 5.
通过更换微流芯片中不同尺寸的光纤得到图6中的光谱,图中标注了自由光谱范围和角模式数的相应变化,分别为光纤半径为44μm时,自由光谱半径为0.67nm。更换光纤半径为16μm时,自由光谱半径为1.83nm。更换光纤半径为12μm时,自由光谱半径为2.44nm。The spectra in Figure 6 are obtained by replacing the optical fibers of different sizes in the microfluidic chip. The corresponding changes in the free spectral range and the number of angular modes are marked in the figure. When the optical fiber radius is 44 μm, the free spectral radius is 0.67 nm. When changing the fiber radius to 16μm, the free spectral radius is 1.83nm. When changing the fiber radius to 12μm, the free spectral radius is 2.44nm.
用相同功率的飞秒激光激发制备的液体激光器和普通的固体薄膜光纤激光器得到的图7中的发光强度变化图。采用两根相同尺寸的光纤分别作为液体激光器和固体薄膜激光器的谐振腔,在室温下连续激发超过4小时(对应于约1.4 × 107次激光照射)。对于液体激光器,在整个测量过程中没有观察到明显的激光强度下降。然而,基于薄膜的固体激光器的激光强度在约30分钟时急剧下降,然后逐渐下降到初始强度的56%左右。The luminous intensity change diagram in Figure 7 is obtained by exciting the prepared liquid laser and the common solid thin-film fiber laser with the same power femtosecond laser. Two optical fibers of the same size were used as the resonant cavity of the liquid laser and the solid thin film laser respectively, and the excitation was continued at room temperature for more than 4 hours (corresponding to about 1.4 × 10 7 laser irradiations). For the liquid laser, no significant laser intensity drop was observed throughout the measurement. However, the lasing intensity of the thin-film-based solid-state laser dropped sharply at about 30 minutes, and then gradually decreased to about 56% of the initial intensity.
实现的液体激光,线宽为0.069nm,品质因子达到7480,激光阈值低至22.7µJ·cm-2,并在不低于173.1 µJ·cm-2的激发光照下可保持输出功率稳定工作最低4小时,是高质量的液体激光。The realized liquid laser has a line width of 0.069nm, a quality factor of 7480, a laser threshold as low as 22.7µJ·cm -2 , and can maintain a stable output power under the excitation light of not less than 173.1 µJ·cm -2 . hours, is a high-quality liquid laser.
光学性能表征:Optical performance characterization:
上述CsPbBr3微流通道芯片荧光光谱由实验室搭建的微区荧光测试系统进行表征,此微区光谱测试系统基于Horiba公司生产的光谱仪iHR320搭建,外部连接显微镜(RX50M)进行样品定位,激发光波长为405 nm,光斑大小10 μm左右。The fluorescence spectrum of the above-mentioned CsPbBr 3 microfluidic channel chip was characterized by a micro-area fluorescence test system built in the laboratory. This micro-area spectrum test system was built based on the spectrometer iHR320 produced by Horiba Company, and an externally connected microscope (RX50M) was used for sample positioning. The excitation light wavelength The wavelength is 405 nm, and the spot size is about 10 μm.
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