CN116067281A - Small-caliber axisymmetric spectrum confocal measuring head - Google Patents
Small-caliber axisymmetric spectrum confocal measuring head Download PDFInfo
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- CN116067281A CN116067281A CN202310185991.4A CN202310185991A CN116067281A CN 116067281 A CN116067281 A CN 116067281A CN 202310185991 A CN202310185991 A CN 202310185991A CN 116067281 A CN116067281 A CN 116067281A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
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Abstract
The invention relates to a small-caliber axisymmetric spectral confocal measuring head, which comprises a lens barrel, wherein an axisymmetric optical fiber emission integrated module is arranged in the lens barrel, one end of the lens barrel is introduced into an optical fiber and is communicated into the axisymmetric optical fiber emission integrated module, a dispersion lens group is arranged on an output light path of the axisymmetric optical fiber emission integrated module in the lens barrel, so that the axisymmetric optical fiber emission integrated module emits complex-color light introduced by the optical fiber to the dispersion lens group, after light beams with different wavelengths are subjected to dispersion separation and refraction focusing by the dispersion lens group, focuses of the light beams are distributed on an optical path axis in sequence along with the change of the wavelengths, the wavelength distribution of the complex-color light is mapped with the position information of a measured space, and the spatial position of the measured object is monitored by utilizing the return light wavelength detection of the measured object. The structure of the invention can ensure the high measurement accuracy of the measuring head, simultaneously ensure that the measuring head is arranged in an axisymmetric way and has smaller caliber, and improve the integrability of the measuring head.
Description
Technical Field
The invention relates to the technical field of detection, in particular to a small-caliber axisymmetric spectrum confocal measuring head.
Background
Aiming at increasingly wide high-precision non-contact precise measurement demands, a spectrum confocal measurement mode which utilizes a dispersion objective lens to correlate the wavelength distribution of the multi-color light waves with the space position mapping is favored by various precise measurement industries from 1955, and is widely applied to the fields of biological tissue detection, chemical raw material precise control, cultural relic shape mapping, semiconductor process monitoring and the like. With the gradual rise of the semiconductor and mobile phone computer 3C industries, the size measurement requirements of small miniature parts are more and more strong, and the spectral confocal measurement probe with small caliber and good integration is gradually becoming a hot spot for precise measurement research.
The traditional confocal measuring head generally adopts an optical fiber as a mode of detecting the introduction of a multi-color light source, and the optical fiber mainly has two standards of vertical and inclined according to different shapes of the emitting end face of the optical fiber. The optical fiber with the vertical end face can enable the optical fiber connector to be overlapped with the axis of the confocal measurement probe, so that the radial dimension of the probe is controllable, but the mode can lead to higher measurement background signal due to direct reflection of the optical fiber core and the air interface. The mode of the inclined end face can obviously reduce the direct reflection of the end face, but the inclined installation is needed, and the radial dimension of the measuring head is inevitably increased by the asymmetrical mode between the inherent volume of the optical fiber connector, so that the effective integration of the measuring head in an application scene is not facilitated.
In order to meet the miniaturization design of the probe, the internal lens group of the probe also tends to be small in size, and at the present stage of lens processing technology and lens barrel processing level, an inherent fit gap inevitably exists in the assembly of each lens, and as the size of the lens becomes smaller, the relative proportion of the fit gap to the lens size becomes larger, so that the accumulated aberration deviation caused by the fit gap and the lens size becomes more obvious.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provide a small-caliber axisymmetric spectrum confocal measuring head, which ensures high measurement accuracy of the measuring head, ensures axisymmetric arrangement of the measuring head, has smaller caliber and improves the integrability of the measuring head.
In order to achieve the technical purpose and the technical effect, the invention is realized by the following technical scheme:
the utility model provides a small-bore axisymmetric spectral confocal gauge head, includes the lens cone, be equipped with axisymmetric optical fiber emission integrated module in the lens cone, the one end of lens cone is introduced optic fibre and is linked together to axisymmetric optical fiber emission integrated module in the lens cone and be located axisymmetric optical fiber emission integrated module's output light path is equipped with dispersion lens group for axisymmetric optical fiber emission integrated module is with the compound color light emission that optic fibre introduced to dispersion lens group, and the light beam of different wavelength is after dispersion lens group chromatic dispersion separation and refraction focus, and its focus distributes in proper order along with the change of wavelength on the light path axis, maps together the wavelength distribution of compound color light with the positional information in measured space, utilizes the detection of measured object return light wavelength to realize its spatial position's monitoring.
Further, the dispersion lens group comprises a fixed dispersion lens group and an aberration compensation dispersion lens group, wherein the fixed dispersion lens group and the aberration compensation dispersion lens group are positioned in the lens cone and are sequentially arranged on an output light path of the axisymmetric optical fiber emission integrated module and are respectively used for dispersion separation and refraction focusing so as to reduce the aberration sum of the whole lens group.
Further, the fixed dispersion lens group and the aberration compensation dispersion lens group are composed of a plurality of single lenses, and the fixed dispersion lens group and the aberration compensation dispersion lens group are both in symmetrical structures.
Further, the axisymmetric optical fiber emission integrated module comprises a light beam diffusion head, a diffusion head fixing sleeve and a screwing diaphragm, wherein the light beam diffusion head is arranged in the diffusion head fixing sleeve, an optical fiber pore canal is arranged in the diffusion head fixing sleeve, an optical fiber penetrates into the optical fiber pore canal to be connected with one end of the light beam diffusion head, and the screwing diaphragm is positioned at the other end of the light beam diffusion head and screwed with the diffusion head fixing sleeve through threads and is used for compressing the light beam diffusion head and limiting the caliber of the light beam.
Furthermore, the light beam diffusion head and the fiber core material of the optical fiber are the same in quality, and the two are connected through high-energy laser melting, so that the light led in by the optical fiber is transmitted into the light beam diffusion head from the end face of the light beam diffusion head in a lossless manner, and direct reflection caused by the end face of a device is greatly reduced after the light beam is diffused by the light beam diffusion head.
Further, the middle part of the screwed diaphragm is provided with a diaphragm through hole with an outward opening, and the screwed diaphragm is used for shielding edge light of the light beam diffusion head through light, and is used for restraining the aperture of the light beam.
Further, a multi-layer dielectric antireflection film is evaporated on the end face of the beam diffusion head, which is opposite to the screwing diaphragm, and is used for further reducing end face reflection.
Further, the light beam diffusion head is integrally formed by a circular table section and a cylindrical section, the cylindrical section is connected to the lower bottom surface of the circular table section, the upper bottom surface of the circular table section is connected with an optical fiber, and the diameter of the cylindrical section is larger than that of the lower bottom surface of the circular table section, so that a diffusion type emission end surface is formed.
The beneficial effects of the invention are as follows:
the invention adopts the diffusion structure of the emitting end face, expands the reflecting area of the optical fiber end face, and simultaneously supports the optical fiber end face by being assisted by the multi-layer medium anti-reflection film, thereby effectively reducing the direct reflection of the optical fiber end face, ensuring the coaxial configuration of the emitting optical fiber, reducing the whole caliber of the measuring head and enhancing the applicability of the spectral confocal measuring head.
The invention adds the aberration compensation dispersion lens group on the basis of fixing the dispersion lens group, reduces the aberration sum of the whole lens group and improves the measuring performance of the measuring head while guaranteeing the dispersion range of the spectrum confocal measuring head.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a block diagram of an axisymmetric fiber optic launch integration module according to the present invention;
fig. 3 is an aberration diagram of a fixed dispersion lens group and an aberration compensating dispersion lens group in the present invention.
The reference numerals in the figures illustrate: 1. an axisymmetric optical fiber emission integrated module, 11, a beam diffusion head, 12, a diffusion head fixing sleeve, 13 and a screwing diaphragm, 2, a fixed dispersion lens group, 3, an aberration compensation dispersion lens group, 4, an optical fiber, 5 and a lens cone.
Detailed Description
The invention will be described in detail below with reference to the drawings in combination with embodiments.
As shown in fig. 1, a small-caliber axisymmetric spectral confocal probe comprises a lens barrel 5, an axisymmetric optical fiber emission integrated module 1 is arranged in the lens barrel 5, one end of the lens barrel 5 is introduced into an optical fiber 4 and is communicated into the axisymmetric optical fiber emission integrated module 1, a dispersion lens group is arranged on an output optical path which is positioned in the lens barrel 5 and is positioned in the axisymmetric optical fiber emission integrated module 1, so that the axisymmetric optical fiber emission integrated module 1 emits complex-color light introduced by the optical fiber 4 to the dispersion lens group, after light beams with different wavelengths are subjected to dispersion separation and refraction focusing by the dispersion lens group, focuses of the light beams are distributed on an optical path axis in sequence along with the change of the wavelength, the wavelength distribution of the complex-color light is mapped with the position information of a measured space, and the monitoring of the spatial position of the complex-color light is realized by utilizing the return wavelength detection of a measured object.
The dispersion lens group comprises a fixed dispersion lens group 2 and an aberration compensation dispersion lens group 3, wherein the fixed dispersion lens group 2 and the aberration compensation dispersion lens group 3 are positioned in a lens barrel 5 and are sequentially arranged on an output light path of the axisymmetric optical fiber emission integrated module 1 and are respectively used for dispersion separation and refraction focusing so as to reduce the aberration sum of the whole lens group.
The fixed dispersion lens group 2 and the aberration compensation dispersion lens group 3 are composed of a plurality of single lenses, and the fixed dispersion lens group 2 and the aberration compensation dispersion lens group 3 are both in symmetrical structures.
In the embodiment, the selected size of the dispersion lens group is restricted, the inner diameter D of the lens barrel 5 of the spectral confocal measuring head is 8mm, and the working wave band [ lambda ] thereof 1 ，λ 2 ]In, lambda 1 、λ 2 Short wave and long wave limits of the working wave band are respectively adopted, so that the dispersion lens group meets the following conditions:
wherein 1-n are serial numbers of single lenses through which initial rays of object plane emitted by the probe light source sequentially pass, D i Effective aperture for the ith single lens,/->
Is the focal power of the ith single lens, v' i The relative Abbe number of the ith single lens in the working band of the spectral confocal measuring head, and the MR is the measuring range of the spectral confocal measuring head;
wherein the Abbe number v' i The calculation formula of (2) is as follows:
wherein n is iF 、n iC 、/>
The corresponding refractive indexes of the ith single lens at the wavelength limit of the working wave band of the spectral confocal measuring head are respectively F, C light;
spectral confocal measuring head in working wave band [ lambda ] 1 ，…，λ 0 ，…，λ 2 ]Internal specific wavelength lambda 0 Where it corresponds to the back intercept
Short wave limit lambda 1 Limit lambda of long wave 2 The absolute value of the corresponding back intercept and the difference value are 1.5mm, namely:
-Δ 1 ＝Δ 2 ＝1.5；
spectral confocal probe at wavelength lambda 0 At the focal point of the outgoing light, see fig. 1, the angle between the maximum aperture light and the optical axis is:
as shown in fig. 2, the axisymmetric optical fiber emission integrated module 1 includes a light beam diffusion head 11, a diffusion head fixing sleeve 12 and a screwing diaphragm 13, the light beam diffusion head 11 is disposed in the diffusion head fixing sleeve 12, an optical fiber duct is disposed in the diffusion head fixing sleeve 12, the optical fiber 4 penetrates into the optical fiber duct to be connected with one end of the light beam diffusion head 11, the screwing diaphragm 13 is disposed at the other end of the light beam diffusion head 11 and screwed with the diffusion head fixing sleeve 12 through threads, and then the screwing diaphragm is integrally fixed by dispensing and is used for compressing the light beam diffusion head 11 and limiting the caliber of the light beam.
In this embodiment, the quartz material is selected for the beam diffusing head 11 and the core material of the optical fiber 4, the numerical aperture of the optical fiber 4 is 0.22mm, and the quartz material and the optical fiber are fused and connected by high-energy laser to ensure smooth and continuous space, so that the light led in by the optical fiber 4 is transmitted to the beam diffusing head 11 from the end face of the optical fiber without damage, the light is diffused to the end face S of the beam diffusing head 11 for partial reflection, the reflected light continues to be back-diffused, and as the proportion of the end face of the optical fiber relative to the back-diffused surface is extremely small, only a very small amount of light is directly returned to the optical fiber 4, and the direct reflection caused by the end face of the device is greatly reduced. If the end face of the optical fiber 4 directly emits in the free space, the quartz material of the fiber core and the air will generate partial reflection on the end face of the optical fiber due to the difference of refractive indexes of different materials, and the partial reflection light is bound by the fiber cladding so as to be totally returned, thereby enhancing the background signal.
The middle part of the screwed diaphragm 13 is provided with a diaphragm through hole with an outward opening for passing light, the light is continuously transmitted to the end face S in FIG. 2 through the beam diffusion head 11, and the edge of the screwed diaphragm 13 is screwed on the beam diffusion head 11Is blocked by the marginal ray of (a) to give the initial numerical aperture na=n of the beam 1 sinθ 0 Constraint of =0.22 to na=n 1 sinθ 1 ＝0.1。
In the working band [ lambda ] of the spectral confocal probe 1 ，λ 2 ]In the process, a multi-layer medium antireflection film is evaporated on the end surface (the end surface S in fig. 2) of the beam diffusion head 11 opposite to the screwing diaphragm 13, so that the partial reflection degree is reduced, the intensity of the light which can be received by the optical fiber 4 is nearly zero, the background signal is extremely low, and the signal to noise ratio is good.
The beam diffusion head 11 is integrally formed by a circular bench section and a cylindrical section, the cylindrical section is connected to the lower bottom surface of the circular bench section, the upper bottom surface of the circular bench section is connected with the optical fiber 4, and the diameter of the cylindrical section is larger than that of the lower bottom surface of the circular bench section, so that a diffusion type emission end surface is formed.
In addition, in the present embodiment, regarding the specification selection of the single lens in the fixed dispersion lens group 2 and the aberration compensating dispersion lens group 3, reference may be made directly to the aberration diagrams of the fixed dispersion lens group 2 and the aberration compensating dispersion lens group 3 in fig. 3; because the fixed dispersion lens group 2 and the aberration compensating dispersion lens group 3 adopt symmetrical structures, according to the symmetrical structural characteristics in the technical field, the fixed dispersion lens group 2 and the aberration compensating dispersion lens group 3 have vertical axis aberration:
coma aberration: sigma S II fix 、∑S II com The method comprises the steps of carrying out a first treatment on the surface of the Distortion: sigma S V fix 、∑S V com The method comprises the steps of carrying out a first treatment on the surface of the Multiplying power chromatic aberration: ΣC II fix 、∑C II com Are all 0;
the correction is optimized such that the spectral confocal gauge head axial total aberrations are as follows:
∑S I sum ＝∑S I fix +∑S I com ＝0
∑s III sum ＝∑s III fix +∑s III com ＝0
∑S IV sum ＝∑s IV fix +∑S IV com ＝0
∑C I sum ＝∑C I fix +∑c I com ＝MR；
when the dispersive lens group 2 is fixed thereinThe machining error causes an axial aberration to be deviated ΣΔ (S I fix )、∑Δ(S III fix )、∑Δ(S IV fix ) In this case, the position on which the light is projected can be changed by adjusting the relative distance between the aberration compensating dispersion lens group 3 and it so as to generate an aberration deviation ΣΔ (S) having the same sign opposite to that of the fixed dispersion lens group 2 I com )、∑Δ(S III com )、∑Δ(S IV com ) To counteract the effect of machining errors on the spectral confocal probe, namely:
∑Δ(S I fix )+∑Δ(S I com )＝0
∑Δ(S III fix )+∑Δ(S III com )＝0
∑Δ(S IV fix )+∑Δ(S IV com ) Because the adjustment displacement is small, the design symmetry state of the two lens groups is not destroyed, and therefore the sum of the vertical aberrations remains at 0. By the symmetrical dispersion grouping structure and the adjusting mode, the influence of processing errors on the aberration of the spectral confocal measuring head can be effectively counteracted, and the perfect measuring performance of the spectral confocal measuring head is ensured.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides a small-bore axisymmetric spectral confocal gauge head, includes lens cone (5), its characterized in that is equipped with axisymmetric optical fiber emission integrated module (1) in lens cone (5), and optic fibre (4) are introduced to one end of lens cone (5) and communicate to axisymmetric optical fiber emission integrated module (1) be equipped with dispersion lens group in lens cone (5) and on the output light path of axisymmetric optical fiber emission integrated module (1), make axisymmetric optical fiber emission integrated module (1) with the multiple chromatic light emission of optic fibre (4) introduction to dispersion lens group, after the light beam of different wavelength is through dispersion lens group chromatic dispersion separation and refraction focus, its focus distributes in proper order along with the change of wavelength on the light path axis, maps together the wavelength distribution of multiple chromatic light with the positional information in measured space, utilizes the monitoring of measured object return wavelength detection realization its spatial position.
2. The small-caliber axisymmetric spectral confocal measurement head according to claim 1, wherein the dispersion lens group comprises a fixed dispersion lens group (2) and an aberration compensation dispersion lens group (3), and the fixed dispersion lens group (2) and the aberration compensation dispersion lens group (3) are positioned in a lens barrel (5) and are sequentially arranged on an output light path of the axisymmetric optical fiber emission integrated module (1) and are respectively used for dispersion separation and refraction focusing so as to reduce the aberration sum of the whole lens group.
3. The small-caliber axisymmetric spectral confocal measurement head according to claim 2, wherein the fixed dispersion lens group (2) and the aberration compensating dispersion lens group (3) are composed of a plurality of single lenses, and the fixed dispersion lens group (2) and the aberration compensating dispersion lens group (3) are both in a symmetric structure.
4. The small-caliber axisymmetric spectral confocal measuring head according to claim 2, wherein the axisymmetric optical fiber emission integrated module (1) comprises a beam diffusion head (11), a diffusion head fixing sleeve (12) and a screwing diaphragm (13), the beam diffusion head (11) is arranged in the diffusion head fixing sleeve (12), an optical fiber pore canal is arranged in the diffusion head fixing sleeve (12), the optical fiber (4) penetrates the optical fiber pore canal to be connected with one end of the beam diffusion head (11), and the screwing diaphragm (13) is positioned at the other end of the beam diffusion head (11) and screwed with the diffusion head fixing sleeve (12) through threads, and is used for compressing the beam diffusion head (11) and limiting the beam caliber.
5. The small-caliber axisymmetric spectral confocal measuring head according to claim 4, wherein the beam diffusion head (11) and the fiber core material of the optical fiber (4) are the same in quality and are connected through high-energy laser fusion, so that light led in by the optical fiber (4) is transmitted into the beam diffusion head (11) from the end face of the light without damage, and direct reflection caused by the end face of a device is greatly reduced after the light is diffused by the beam diffusion head (11).
6. The small-caliber axisymmetric spectral confocal measuring head according to claim 5, wherein an outward opening diaphragm through hole is provided in the middle of the screwed diaphragm (13) for shielding edge light of the beam diffusion head (11) by light, and for restricting the beam aperture.
7. The small-caliber axisymmetric spectral confocal measuring head according to claim 6 wherein a multi-layer dielectric antireflection film is deposited on the end face of said beam diffusing head (11) opposite to the screwed aperture (13) for further reducing end face reflection.
8. The small-caliber axisymmetric spectral confocal measuring head according to claim 7 wherein said beam diffusing head (11) is integrally formed by a circular stage section and a cylindrical section, said cylindrical section is connected to the lower bottom surface of the circular stage section, the upper bottom surface of the circular stage section is connected to an optical fiber (4), and the diameter of the cylindrical section is larger than the diameter of the lower bottom surface of the circular stage section, forming a diffusing transmitting end surface.
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| CN202310185991.4A CN116067281A (en) | 2023-03-01 | 2023-03-01 | Small-caliber axisymmetric spectrum confocal measuring head |
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| CN202310185991.4A CN116067281A (en) | 2023-03-01 | 2023-03-01 | Small-caliber axisymmetric spectrum confocal measuring head |
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