CN116024516A - Preparation method of infrared heat absorption composite coating for stainless steel water-cooling heat shield of monocrystalline silicon furnace - Google Patents
Preparation method of infrared heat absorption composite coating for stainless steel water-cooling heat shield of monocrystalline silicon furnace Download PDFInfo
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention belongs to the technical field of surface engineering, and particularly relates to a preparation method of an infrared heat absorption composite coating for a stainless steel water-cooling heat shield of a monocrystalline silicon furnace. The invention uses two kinds of ceramic powder as spraying raw materials after being mechanically mixed in a certain proportion, adopts a thermal spraying technology, and obtains a composite coating by depositing on the surface of the 304 stainless steel which is roughened by sand blasting through process control. Compared with the traditional infrared heat absorption surface which is formed into an oxide film through blackening treatment of stainless steel, the composite coating provided by the invention not only has high infrared heat radiation absorption coefficient (room temperature is more than 0.9 and 400 ℃ is more than 0.85), but also has excellent material and structural stability under the environment of single crystal silicon pulling process (high temperature, low oxygen partial pressure and low pressure), the infrared heat radiation absorption coefficient is not reduced due to decomposition or evaporation in the long-term use process, and the coating and the stainless steel matrix have good thermal expansion matching property, and can still keep good interface combination in the repeated recycling process.
Description
Technical Field
The invention belongs to the technical field of surface engineering, and particularly relates to a preparation method of an infrared heat absorption composite coating for a stainless steel water-cooling heat shield of a monocrystalline silicon furnace.
Background
Growing single crystal silicon using the Czochralski method is an important technique for preparing single crystal silicon at present. With the development of low-cost crystalline silicon solar cells and the electronic chip industry, a high-quality, heavy-weight, large-size and high-pulling-speed monocrystalline silicon growth technology is an important technical direction of current development.
In the process of pulling monocrystalline silicon, the absorption of radiation heat dissipation of the solidified crystal bar through the water-cooling heat shield is one of important links in the current monocrystalline silicon production process, and the process can effectively improve the cooling speed of the crystal bar, so that the pulling rate of the crystal bar is obviously improved, the productivity and the efficiency are increased, and the energy consumption and the cost are reduced. The water-cooling heat shield has a complex structure, severe service conditions and good assembly with a monocrystalline silicon furnace. Therefore, the water-cooling heat shield is mostly manufactured by welding or other processes using a material typified by 304 stainless steel. However, stainless steel has a low infrared heat radiation absorption coefficient (-0.1-0.2, which is related to parameters such as surface finish) and has poor cooling effect by only absorbing heat of the crystal bar through radiation heat exchange if surface is not treated, so that the potential performance of the water-cooling heat shield is difficult to fully develop. Therefore, after the water-cooling heat shield is processed, the surface blackening treatment is usually needed, so that a black oxide film mainly comprising chromium oxide is formed on the surface of the water-cooling heat shield, and the radiation heat exchange coefficient of the water-cooling heat shield is increased to 0.85 so as to realize better radiation heat exchange. However, the technology still has certain using defects and defects, the period of the single crystal silicon pulling process is longer, the water-cooling heat shield is in the protective atmosphere of high temperature, low oxygen partial pressure and low pressure in the crystal furnace for a long time, and the oxide film mainly comprising chromium oxide is damaged due to evaporation, so that the radiation heat exchange capacity of the water-cooling heat shield is continuously reduced in the using process, the pulling speed of the crystal bar is limited, and the potential heat exchange performance of the water-cooling heat shield cannot be fully exerted. At the same time, evaporation of the surface oxide film also presents a potential risk of increasing the impurity content of the ingot. In addition, after the surface of the water-cooling heat shield is damaged due to evaporation, the subsequent surface oxidation blackening treatment is required, so that the service cycle of the single crystal furnace can be prolonged, and the production efficiency is affected.
Therefore, the prior art is necessary to be broken through, and the water-cooling heat shield radiation heat exchange surface with high infrared radiation absorption coefficient, high stability and long service life is developed so as to meet the application requirements of the current monocrystalline silicon high-efficiency production.
Disclosure of Invention
In order to solve the problem that the current silicon single crystal furnace water-cooling heat shield takes a stainless steel oxide film as a heat radiation absorption surface to fail due to evaporation in the service process, the invention provides a preparation method of an infrared heat absorption composite coating.
In order to achieve the above purpose, the present invention is realized by the following technical scheme:
the invention provides a preparation method of an infrared heat absorption composite coating for a stainless steel water-cooling heat shield of a monocrystalline silicon furnace, which comprises the following steps:
s1, mixing a ceramic material with a linear expansion coefficient lower than that of a 304 stainless steel wire with a ceramic material with a linear expansion coefficient higher than that of the 304 stainless steel wire, wherein the mixing mass ratio of the two ceramic materials is 0-100%: 0-100%;
s2, performing sand blasting and roughening treatment on the inner surface of the 304 stainless steel water-cooling heat shield for the monocrystalline silicon furnace, and forming a composite coating on the inner surface by using the ceramic powder in the step S1 as a raw material and adopting a thermal spraying method.
Preferably, the ceramic material having a linear expansion coefficient lower than 304 stainless steel wire is selected from La 1-x Sr x MnO 3 (x: 0.1 to 0.3), or La 1-x Sr x TiO 3 (x: 0.1 to 0.3), or La 1-x Sr x CrO 3 (x: 0.1 to 0.3), or La 1-x Ca x CrO 3 (x:0.1～0.3)。
More preferably, the ceramic material having a linear expansion coefficient lower than 304 stainless steel wire is selected from La 0.8 Sr 0.2 MnO 3 、La 0.7 Sr 0.3 TiO 3 。
Preferably, the ceramic material with a linear expansion coefficient higher than that of 304 stainless steel is selected from Fe 3 O 4 Or SrTi x Fe 1-x O 3 (x: 0.1-0.5), or La 1-x Sr x CoO 3 (x:0.1～0.3)。
More preferably, the ceramic material having a linear expansion coefficient higher than that of 304 stainless steel is selected from SrTi 0.3 Fe 0.7 O 3 、SrTi 0.5 Fe 0.5 O 3 、Fe 3 O 4 。
The composite coating prepared by the method is dark black or gray black, has higher infrared heat radiation absorption coefficient, the infrared heat radiation absorption coefficient under the condition of room temperature is more than or equal to 0.9, the infrared heat radiation absorption coefficient at 400 ℃ is more than or equal to 0.85, and the color and the infrared heat radiation absorption coefficient of the coating are not changed under the low-pressure protective atmosphere (2000 Pa, high-purity argon) with low oxygen partial pressure at high temperature (600 ℃). The porosity of the composite coating can be adjusted within 1-10% according to the technological parameters and the powder structure (the coating structure shown in figure 2 is relatively compact, the porosity is 1.5% measured by a metallographic method), and the coating is well combined with a 304 matrix. Has excellent cold and hot cycle resistance in the range of room temperature to 600 ℃. In general, the composite coating has higher infrared heat radiation absorption coefficient, thereby realizing the efficient radiation heat exchange of the stainless steel water cold and hot screen. The coating is well combined with the matrix, has excellent heat cycle resistance and excellent stability under high-temperature low-oxygen partial pressure, thereby realizing high-efficiency cooling performance and simultaneously having long service life.
Preferably, both ceramic materials have a particle size in the range of 10 to 70 μm. More preferably, both ceramic materials have a particle size in the range of 15 to 60 μm.
Preferably, the thickness of the composite coating is 30 to 200 μm.
Preferably, the mixing mass ratio of the ceramic material with the linear expansion coefficient lower than that of the 304 stainless steel wire to the ceramic material with the linear expansion coefficient higher than that of the 304 stainless steel wire is 1:1-3.
Preferably, the thermal spraying method comprises a plasma spraying method, a normal flame spraying method, a supersonic flame spraying method.
More preferably, the thermal spray method is an atmospheric plasma spray method, or an oxy-acetylene flame spray method. Ar-H when adopting the atmospheric plasma spraying method 2 The power of the plasma gas is 30-40 kW.
The invention also provides the infrared heat absorption composite coating for the stainless steel water-cooling heat shield of the monocrystalline silicon furnace, which is prepared by the preparation method.
The infrared heat absorption composite coating has high infrared heat radiation absorption coefficient (the room temperature is more than 0.9,400 ℃ and is more than 0.85), and the infrared heat radiation absorption coefficient is not reduced due to decomposition or evaporation in the long-term use process; the coating has excellent material and structural stability under the environment of single crystal silicon pulling process (high temperature, low oxygen partial pressure and low pressure), has good thermal expansion matching property with a stainless steel matrix, and can still keep good interface combination in the process of repeated cyclic use.
Compared with the prior art, the invention has the beneficial effects that:
the invention discloses a preparation method of an infrared heat absorption composite coating for a stainless steel water-cooling heat shield of a monocrystalline silicon pulling furnace, which comprises the steps of mechanically mixing two ceramic powders in a certain proportion to be used as a spraying raw material, and depositing the two ceramic powders on the inner surface of the 304 stainless steel water-cooling heat shield subjected to sand blasting roughening treatment by adopting a thermal spraying technology through process control to obtain the composite coating. Compared with the traditional infrared heat absorption surface which is formed into an oxide film through blackening treatment of stainless steel, the composite heat absorption ceramic coating prepared by the invention not only has high infrared heat radiation absorption coefficient (room temperature is more than 0.9 and 400 ℃ is more than 0.85), but also has excellent material and structural stability under the environment of single crystal silicon pulling process (high temperature, low oxygen partial pressure and low pressure), the infrared heat radiation absorption coefficient is not reduced due to decomposition or evaporation in the long-term use process, and the coating and the stainless steel substrate have good thermal expansion matching property, and the coating can still keep good interface combination in the repeated recycling process. The invention provides a new method for preparing the infrared heat absorption coating for the stainless steel water-cooling heat shield of the high-performance long-life monocrystalline silicon furnace, which can effectively improve the crystal pulling speed and reduce the cost.
Drawings
FIG. 1 is a schematic structural view of a stainless steel water cold and hot screen heat absorbing coating and its working principle;
FIG. 2 is La 0.8 Sr 0.2 MnO 3 -SrTi 0.3 Fe 0.7 O 3 The composite coating has a typical section tissue structure after 30 times of cold and hot circulation at room temperature to 600 ℃.
Detailed Description
The following describes the invention in more detail. The description of these embodiments is provided to assist understanding of the present invention, but is not intended to limit the present invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The experimental methods in the following examples, unless otherwise specified, are conventional, and the experimental materials used in the following examples, unless otherwise specified, are commercially available.
The invention provides a preparation method of an infrared heat absorption composite coating for a stainless steel water-cooling heat shield of a monocrystalline silicon furnace, which comprises two ceramic materials with different linear expansion coefficients, wherein the proportion of the two phases is in any range of 0-100%. The two spherical ceramic powders are mixed according to a certain proportion by mechanical mixing and then deposited on the surface of the 304 stainless steel substrate which is roughened by sand blasting by utilizing a thermal spraying process to form the heat absorption coating with the thickness of 30-200 mu m. Wherein the first ceramic material is selected from La 1-x Sr x MnO 3 (x: 0.1 to 0.3), or La 1-x Sr x TiO 3 (x: 0.1 to 0.3), or La 1-x Sr x CrO 3 (x: 0.1 to 0.3), or La 1-x Ca x CrO 3 (x is 0.1-0.3), and the component content is 0-100%. The second ceramic material is selected from Fe 3 O 4 Or SrTi x Fe 1-x O 3 (x: 0.1-0.5), or La 1-x Sr x CoO 3 (x is 0.1-0.3), and the component content is 0-100%. The thermal spraying process comprises plasma spraying, or common flame spraying, or supersonic flame spraying.
The following are specific preparation examples, which are preferred examples of the present invention for understanding the present invention by those skilled in the art, but the present invention is not limited to these examples.
Example 1 preparation method of infrared heat absorption composite coating for stainless steel water-cooled heat shield of monocrystalline silicon furnace
(1) La with particle diameter of 20-50 μm 0.8 Sr 0.2 MnO 3 Ceramic powder and SrTi with particle size of 15-60 μm 0.3 Fe 0.7 O 3 Uniformly mixing the powder according to the mass fraction ratio of 1:1;
(2) The method comprises the steps of taking a 304 stainless steel water cold-hot screen for a monocrystalline silicon furnace shown in fig. 1 as a substrate, roughening the surface of an inner cylinder of the substrate by sand blasting, preparing a coating on the substrate by adopting an atmospheric plasma spraying method, heating ceramic particles by spraying flame flow to be in a completely molten or nearly completely molten state, then spreading the ceramic particles on the substrate by high-speed collision, cooling, solidifying, stacking and accumulating to form the coating, and using Ar-H in the spraying process 2 The ratio of flow rate is 10:1, the power is 32kW, the final thickness of the coating is 150 mu m, and the prepared composite coating is dark black or gray black.
The infrared absorption rate test result of the coating prepared in example 1 shows that the infrared absorption rate of the coating is 0.932 at room temperature in the 8-14 μm band, and the infrared absorption rate is 0.935 after the coating is kept for 200 hours at 400 ℃ in a vacuum furnace under an argon protective atmosphere. The coating bonding strength test results show that the bonding strength between the coating and the substrate is 13.7MPa. Under the encapsulation of a protective atmosphere at low pressure (2000 Pa), the temperature of the coating and the substrate (30 mm multiplied by 40mm multiplied by 2 mm) is raised to 600 ℃ at the speed of 15 ℃/min, the temperature is kept for 0.5h, the coating is cooled to room temperature along with a furnace, and no peeling of the coating is found after repeating the thermal cycle for 30 times. The section tissue structure of the coating after 30 times of thermal cycling is shown in figure 2, the coating presents a typical plasma spraying ceramic coating tissue structure, the coating structure is compact, no large cracks are seen in the coating, the coating is well combined with the matrix, no cracks are seen, the coating has good interface combination with the matrix, and the coating has good thermal expansion matching property with the matrix, so that the coating has excellent thermal cycle life in the use process.
Example 2 preparation method of infrared heat absorption composite coating for stainless steel water-cooling heat shield of monocrystalline silicon furnace
(1) La with particle diameter of 20-50 μm 0.8 Sr 0.2 MnO 3 Ceramic powder and SrTi with particle size of 15-60 μm 0.5 Fe 0.5 O 3 The powder is uniformly mixed according to the mass fraction ratio of 1:3.
(2) The method comprises the steps of taking a 304 stainless steel water cold-hot screen for a monocrystalline silicon furnace shown in fig. 1 as a substrate, roughening the surface of an inner cylinder of the substrate by sand blasting, adopting an atmospheric plasma spraying method to prepare a coating on the substrate, heating ceramic particles by spraying flame flow to be in a completely molten or nearly completely molten state, then spreading the ceramic particles on the substrate by high-speed collision, cooling, solidifying, stacking and accumulating to form the coating, and using Ar-H in the spraying process 2 The power of the plasma gas was 32kW, the final thickness of the coating was 150 μm, and the composite coating was prepared as deep black or gray black.
Similar to example 1, the coating also has a high infrared heat radiation absorption coefficient (room temperature >0.9,400 ℃ C. > 0.85) and does not suffer from a decrease in infrared heat radiation absorption coefficient due to decomposition or evaporation during long-term use; meanwhile, the coating has excellent material and structural stability under the environment of a monocrystalline silicon pulling process (low pressure), has good thermal expansion matching property with a stainless steel matrix, and can still keep good interface bonding property after being recycled for a plurality of times.
Example 3 preparation method of infrared heat absorption composite coating for stainless steel water-cooling heat shield of monocrystalline silicon furnace
(1) La with particle diameter of 15-60 μm 0.7 Sr 0.3 TiO 3 Ceramic powder and SrTi with particle size of 15-60 μm 0.3 Fe 0.7 O 3 Powder according toThe mass fraction ratio of 1:1 is uniformly mixed.
(2) The method comprises the steps of taking a 304 stainless steel water cold-hot screen for a monocrystalline silicon furnace shown in fig. 1 as a substrate, roughening the surface of an inner cylinder of the substrate by sand blasting, adopting an atmospheric plasma spraying method to prepare a coating on the substrate, heating ceramic particles by spraying flame flow to be in a completely molten or nearly completely molten state, then spreading the ceramic particles on the substrate by high-speed collision, cooling, solidifying, stacking and accumulating to form the coating, and using Ar-H in the spraying process 2 The power of the plasma gas was 32kW, the final thickness of the coating was 150 μm, and the composite coating was prepared as deep black or gray black.
Similar to example 1, the coating also has a high infrared heat radiation absorption coefficient (room temperature >0.9,400 ℃ C. > 0.85) and does not suffer from a decrease in infrared heat radiation absorption coefficient due to decomposition or evaporation during long-term use; meanwhile, the coating has excellent material and structural stability under the environment of a monocrystalline silicon pulling process (low pressure), has good thermal expansion matching property with a stainless steel matrix, and can still keep good interface bonding property after being recycled for a plurality of times.
Example 4 preparation method of infrared heat absorption composite coating for stainless steel water-cooled heat shield of monocrystalline silicon furnace
(1) La with particle diameter of 15-60 μm 0.8 Sr 0.2 MnO 3 Ceramic powder and Fe with particle size of 30-50 μm 3 O 4 The powder is uniformly mixed according to the mass fraction ratio of 1:1.
(2) The method comprises the steps of taking a 304 stainless steel water cold-hot screen as a substrate for a monocrystalline silicon furnace shown in fig. 1, roughening the substrate on the surface of an inner cylinder of the substrate by sand blasting, adopting an atmospheric plasma spraying method to prepare a coating on the substrate, heating ceramic particles by spraying flame flow to be in a completely molten or nearly completely molten state, then spreading the ceramic particles on the substrate by high-speed collision, cooling, solidifying, stacking and accumulating to form the coating, and using Ar-H in the spraying process 2 The power of the plasma gas was 32kW, the final thickness of the coating was 150 μm, and the composite coating was prepared as deep black or gray black.
Similar to example 1, the coating also has a high infrared heat radiation absorption coefficient (room temperature >0.9,400 ℃ C. > 0.85) and does not suffer from a decrease in infrared heat radiation absorption coefficient due to decomposition or evaporation during long-term use; meanwhile, the coating has excellent material and structural stability under the environment of a monocrystalline silicon pulling process (low pressure), has good thermal expansion matching property with a stainless steel matrix, and can still keep good interface bonding property after being recycled for a plurality of times.
Example 5 preparation method of infrared heat absorption composite coating for stainless steel water-cooled heat shield of monocrystalline silicon furnace
(1) La with particle diameter of 15-60 μm 0.7 Sr 0.3 TiO 3 Ceramic powder and Fe with particle size of 30-50 μm 3 O 4 The powder is uniformly mixed according to the mass fraction ratio of 1:1.
(2) The method comprises the steps of taking a 304 stainless steel water cold-hot screen as a substrate for a monocrystalline silicon furnace shown in fig. 1, roughening the substrate on the surface of an inner cylinder of the substrate by sand blasting, adopting an atmospheric plasma spraying method to prepare a coating on the substrate, heating ceramic particles by spraying flame flow to be in a completely molten or nearly completely molten state, then spreading the ceramic particles on the substrate by high-speed collision, cooling, solidifying, stacking and accumulating to form the coating, and using Ar-H in the spraying process 2 The power of the plasma gas was 32kW, the final thickness of the coating was 150 μm, and the composite coating was prepared as deep black or gray black.
Similar to example 1, the coating also has a high infrared heat radiation absorption coefficient (room temperature >0.9,400 ℃ C. > 0.85) and does not suffer from a decrease in infrared heat radiation absorption coefficient due to decomposition or evaporation during long-term use; meanwhile, the coating has excellent material and structural stability under the environment of a monocrystalline silicon pulling process (low pressure), has good thermal expansion matching property with a stainless steel matrix, and can still keep good interface bonding property after being recycled for a plurality of times.
Example 6 preparation method of infrared heat absorption composite coating for stainless steel water-cooled heat shield of monocrystalline silicon furnace
(1) La with particle diameter of 20-50 μm 0.8 Sr 0.2 MnO 3 Ceramic powder and SrTi with particle size of 15-60 μm 0.3 Fe 0.7 O 3 The powder is uniformly mixed according to the mass fraction ratio of 1:1.
(2) The method comprises the steps of taking a 304 stainless steel water cold-hot screen as a substrate in a monocrystalline silicon furnace shown in fig. 1, roughening the surface of an inner cylinder of the substrate by sand blasting, adopting an oxygen-acetylene flame spraying method to prepare a coating on the substrate, heating ceramic particles by spraying flame flow, then putting the ceramic particles in a completely melted or nearly completely melted state, then spreading the ceramic particles on the substrate by high-speed collision, cooling, solidifying, stacking and accumulating to form the coating, wherein the final thickness of the coating is 120 mu m, and the prepared composite coating is dark black or gray black.
Similar to example 1, the coating also has a high infrared heat radiation absorption coefficient (room temperature >0.9,400 ℃ C. > 0.85) and does not suffer from a decrease in infrared heat radiation absorption coefficient due to decomposition or evaporation during long-term use; meanwhile, the coating has excellent material and structural stability under the environment of a monocrystalline silicon pulling process (low pressure), has good thermal expansion matching property with a stainless steel matrix, and can still keep good interface bonding property after being recycled for a plurality of times.
The embodiments of the present invention have been described in detail above, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, and yet fall within the scope of the invention.
Claims (10)
1. The preparation method of the infrared heat absorption composite coating for the stainless steel water-cooling heat shield of the monocrystalline silicon furnace is characterized by comprising the following steps of:
s1, mixing a ceramic material with a linear expansion coefficient lower than that of a 304 stainless steel wire with a ceramic material with a linear expansion coefficient higher than that of the 304 stainless steel wire, wherein the mixing mass ratio of the two ceramic materials is 0-100%: 0-100%;
s2, performing sand blasting and roughening treatment on the inner surface of the 304 stainless steel water-cooling heat shield for the monocrystalline silicon furnace, and forming a composite coating on the inner surface by using the ceramic powder in the step S1 as a raw material and adopting a thermal spraying method.
2. The method for preparing the infrared heat absorption composite coating for the water-cooling heat shield of the stainless steel of the monocrystalline silicon furnace according to claim 1, wherein the ceramic material with the linear expansion coefficient lower than 304 stainless steel wires is selected from La 1-x Sr x MnO 3 (x: 0.1 to 0.3), or La 1-x Sr x TiO 3 (x: 0.1 to 0.3), or La 1-x Sr x CrO 3 (x: 0.1 to 0.3), or La 1-x Ca x CrO 3 (x:0.1～0.3)。
3. The method for preparing the infrared heat absorption composite coating for the water-cooling heat shield of the stainless steel of the monocrystalline silicon furnace according to claim 2, wherein the ceramic material with the linear expansion coefficient lower than 304 stainless steel wires is selected from La 0.8 Sr 0.2 MnO 3 、La 0.7 Sr 0.3 TiO 3 。
4. The method for preparing the infrared heat absorption composite coating for the water-cooling heat shield of the stainless steel of the monocrystalline silicon furnace according to claim 1, wherein the ceramic material with the linear expansion coefficient higher than that of 304 stainless steel is selected from Fe 3 O 4 Or SrTi x Fe 1-x O 3 (x: 0.1-0.5), or La 1-x Sr x CoO 3 (x:0.1～0.3)。
5. The method for preparing the infrared heat absorption composite coating for the water-cooling heat shield of the stainless steel of the single crystal silicon furnace according to claim 4, wherein the ceramic material with the linear expansion coefficient higher than that of 304 stainless steel is selected from SrTi 0.3 Fe 0.7 O 3 、SrTi 0.5 Fe 0.5 O 3 、Fe 3 O 4 。
6. The method for preparing the infrared heat absorption composite coating for the stainless steel water-cooling heat shield of the monocrystalline silicon furnace according to claim 1, wherein the granularity range of the two ceramic materials is 10-70 μm.
7. The method for preparing the infrared heat absorption composite coating for the stainless steel water-cooling heat shield of the monocrystalline silicon furnace according to claim 1, wherein the thickness of the composite coating is 30-200 μm.
8. The method for preparing the infrared heat absorption composite coating for the water-cooling heat shield of the stainless steel of the monocrystalline silicon furnace, which is disclosed in claim 1, is characterized in that the mixing mass ratio of the ceramic material with the linear expansion coefficient lower than that of 304 stainless steel wires to the ceramic material with the linear expansion coefficient higher than that of 304 stainless steel wires is 1:1-3.
9. The method for preparing the infrared heat absorption composite coating for the stainless steel water-cooling heat shield of the monocrystalline silicon furnace according to claim 1, wherein the thermal spraying method comprises a plasma spraying method, a common flame spraying method and a supersonic flame spraying method.
10. An infrared heat absorption composite coating for a stainless steel water-cooling heat shield of a monocrystalline silicon furnace, which is prepared by adopting the preparation method of any one of claims 1-9.
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