CN116009267B

CN116009267B - Light spot shaping device and laser processing equipment

Info

Publication number: CN116009267B
Application number: CN202211581679.9A
Authority: CN
Inventors: 王艳; 种洪涛; 吕毅平; 周凯
Original assignee: Focuslight Technologies Inc
Current assignee: Focuslight Technologies Inc
Priority date: 2022-12-09
Filing date: 2022-12-09
Publication date: 2024-04-26
Anticipated expiration: 2042-12-09
Also published as: CN116009267A

Abstract

The embodiment of the application relates to the technical field of optical devices, in particular to a light spot shaping device and laser processing equipment, wherein the light spot shaping device comprises: the collimating component is internally provided with a collimating channel and is used for carrying out collimating treatment on light beams in the collimating channel; the homogenizing component is detachably connected with the collimating component, is positioned at the other end of the collimating channel, is internally provided with the homogenizing channel and is used for homogenizing the light beams in the homogenizing channel; the focusing assembly is detachably connected with one end of the homogenizing assembly, which is away from the collimating assembly, a focusing channel is arranged in the focusing assembly, the focusing channel is used for allowing the homogenized light beam to enter from one end of the homogenizing channel, which is away from the collimating assembly, and the focusing assembly is used for focusing the light beam in the focusing channel onto a workpiece. Through the mode, the embodiment of the application is convenient for the later maintenance of the light spot shaping device.

Description

Light spot shaping device and laser processing equipment

Technical Field

The embodiment of the application relates to the technical field of optical devices, in particular to a light spot shaping device and laser processing equipment.

Background

In the conventional spot shaping device, a housing is generally in an integral structure, an internal optical element is configured and formed after leaving a factory, and when a part of the optical element is damaged, the corresponding element cannot be maintained or replaced in a targeted manner, but the whole spot shaping device needs to be replaced, so that the use cost is increased.

Disclosure of Invention

In view of the above problems, embodiments of the present application provide a light spot shaping device and a laser processing apparatus, which facilitate the maintenance of the light spot shaping device in the later period.

According to an aspect of an embodiment of the present application, there is provided a spot shaping apparatus including: the collimating component is internally provided with a collimating channel, one end of the collimating channel is used for allowing light beams to enter, and the collimating component is used for collimating the light beams in the collimating channel; the homogenizing component is detachably connected with the collimating component, the homogenizing component is positioned at the other end of the collimating channel, the homogenizing channel is arranged in the homogenizing component and is used for allowing the collimated light beam to enter from the other end of the collimating channel, and the homogenizing component is used for homogenizing the light beam in the homogenizing channel; the focusing assembly is detachably connected with one end of the homogenizing assembly, which is away from the collimating assembly, a focusing channel is arranged in the focusing assembly, the focusing channel is used for allowing the homogenized light beam to enter from one end of the homogenizing channel, which is away from the collimating assembly, and the focusing assembly is used for focusing the light beam in the focusing channel onto a workpiece.

In an alternative way, the spot shaping apparatus further comprises: the beam splitting assembly is detachably connected between the homogenizing assembly and the focusing assembly, a beam splitting channel is arranged in the beam splitting assembly, a beam splitting opening is formed in the side wall of the beam splitting assembly, the beam splitting assembly is used for transmitting a beam entering from the homogenizing channel into the focusing channel in the beam splitting channel, and the beam splitting assembly is also used for reflecting a beam which is radiated by a workpiece and enters from the focusing channel into the beam splitting channel and passing through the beam splitting opening; the reflection assembly is detachably connected to the beam splitting assembly, the reflection assembly is covered on the outer side of the beam splitting opening, a reflection channel is arranged in the reflection assembly, one end of the reflection channel is provided with a beam outlet, and the reflection assembly is used for reflecting a beam entering the reflection channel from the beam splitting opening and penetrating through the beam outlet; the temperature control assembly is detachably connected to the reflecting assembly, is arranged on the outer side of the light beam outlet and is used for measuring the temperature of the light beam passing through the light beam outlet.

In an alternative mode, the light spot shaping device further comprises a switching component, the switching component is detachably connected to one end of the collimating component, which is away from the homogenizing component, and the switching component is used for being connected with the light source device for generating the light beam.

In an alternative mode, a connecting part is arranged on one of two opposite ends between the collimating component and the homogenizing component and/or between the homogenizing component and the focusing component, and a matching part is arranged on the other connecting part and the matching part are fixedly connected with each other through a fastener.

In an alternative way, a seal is sandwiched between the collimating and homogenizing assemblies and/or between the homogenizing assemblies and the focusing assemblies, the seal being used to seal the gap between the collimating and homogenizing channels and/or the gap between the homogenizing and focusing channels.

In an alternative mode, the homogenizing component comprises a shell and a fixed homogenizing lens group, wherein the fixed homogenizing lens group is fixed in the shell and is used for homogenizing the light beam in the homogenizing channel; the focusing assembly includes a housing and a zoom lens for varying the size of a spot focused onto a work piece by adjusting a focal length.

In an alternative, the homogenizing assembly includes a housing and a first homogenizing lens set disposed within the housing; the first homogenizing lens group comprises a first micro-cylindrical array and a second micro-cylindrical array, the surface type directions of the first micro-cylindrical array and the second micro-cylindrical array are all first directions, and the first directions are perpendicular to the axial direction of the homogenizing channel; at least one of the first micro-cylindrical array and the second micro-cylindrical array is in sliding connection with the shell along the axial direction of the homogenizing channel, so that the light spot size of the light beam focused on the workpiece in the first direction is changed when the first micro-cylindrical array and the second micro-cylindrical array relatively move.

In an optional manner, the first homogenizing lens group further comprises a distance adjusting member, the distance adjusting member penetrates through the shell and is connected with the first micro-cylindrical array internally, a force application part is arranged at the part, located outside the shell, of the distance adjusting member, and the force application part is used for driving the first micro-cylindrical array to move along the axial direction of the homogenizing channel through the distance adjusting member.

In an alternative manner, the homogenizing assembly further comprises a second homogenizing lens group, and the second homogenizing lens group and the first homogenizing lens group are arranged in the shell along the axial direction of the homogenizing channel; the second homogenizing lens group comprises a third micro-cylindrical array and a fourth micro-cylindrical array, the surface type directions of the third micro-cylindrical array and the fourth micro-cylindrical array are both second directions, and the second directions are perpendicular to the axial direction of the homogenizing channel and the first directions; at least one of the third micro-cylindrical array and the fourth micro-cylindrical array is in sliding connection with the shell along the axial direction of the homogenizing channel, so that the light beam is focused to the spot size on the workpiece in the second direction when the third micro-cylindrical array and the fourth micro-cylindrical array relatively move.

In an alternative, the first micro-cylindrical array is rotatably disposed within the homogenizing channel along an axis of the homogenizing channel, the first micro-cylindrical array configured to eliminate spikes across the light spot passing through the micro-channel between the first micro-cylindrical array and the second micro-cylindrical array when rotated relative to the second micro-cylindrical array.

In an alternative mode, the periphery of the first micro-cylindrical surface array is provided with a lens frame, the first micro-cylindrical surface array is rotationally connected to the lens frame, and the lens frame is in sliding connection with the shell.

In an alternative mode, a first connecting structure and a second connecting structure are respectively arranged on one side of the mirror frame and the first micro-cylindrical surface array, the first connecting structure and the second connecting structure are mutually connected through an elastic piece, a third connecting structure and a fourth connecting structure are respectively arranged on the opposite side of the mirror frame and the first micro-cylindrical surface array, and the third connecting structure and the fourth connecting structure are mutually connected through an adjusting piece; the adjusting piece is used for adjusting the distance between the third connecting structure and the fourth connecting structure, so that when the distance between the third connecting structure and the fourth connecting structure is increased, the fourth connecting structure drives the first micro-cylindrical array to rotate relative to the second micro-cylindrical array along the first rotation direction; when the elastic piece is in a stretching state and the distance between the third connecting structure and the fourth connecting structure is reduced, the elastic piece contracts and drives the first micro-cylindrical array to rotate relative to the second micro-cylindrical array along a second rotating direction through the second connecting structure, and the second rotating direction is opposite to the first rotating direction.

In an alternative mode, be provided with spacing axle on the picture frame, be provided with the arc slide hole on the first micro-cylindrical surface array, spacing axle wears to locate in the arc slide hole and with arc slide hole sliding fit to guarantee that first micro-cylindrical surface array rotates along homogenizing channel's axis.

In an alternative mode, the inner edge of the mirror frame is provided with a limit groove, the outer edge of the first micro-cylindrical surface array is provided with a bulge, the bulge is located in the limit groove, and two inner walls of the limit groove, which are opposite in the circumferential direction, are used for being abutted with the bulge so as to limit the maximum stroke of rotation of the first micro-cylindrical surface array.

According to another aspect of the embodiment of the present application, there is provided a laser processing apparatus including a light source device, a working platform, and a spot shaping device according to any one of the above, the light source device being disposed in alignment with a collimator assembly, the light source device being configured to generate a light beam and input the light beam into a collimator passage, the working platform being configured to place a workpiece, and the focusing assembly being configured to focus the light beam in the focusing passage onto the workpiece to process the workpiece.

In the light spot shaping device provided by the embodiment of the application, the collimation component, the homogenization component and the focusing component are detachably connected to form the modularized light spot shaping device, so that the collimation component, the homogenization component and the focusing component can be flexibly configured or replaced according to the operation requirement, for example, the corresponding collimation component is replaced according to the light emitting characteristic of the light source device, and the effect of collimation treatment of light beams is improved. Similarly, the homogenizing component and the focusing component can be selectively replaced, so that the homogenizing treatment can be more targeted, and the light spots can be focused on workpieces with different distances according to the operation requirements.

In addition, the light spot shaping device provided by the embodiment of the application has the advantages that the collimating component, the homogenizing component and the focusing component are respectively arranged independently and are sequentially and detachably connected, so that when the components in a part of components are damaged in the use process, the part of components can be detached, the damaged components can be conveniently maintained or replaced, and the use cost is greatly reduced.

The foregoing description is only an overview of the present application, and is intended to be implemented in accordance with the teachings of the present application in order that the same may be more clearly understood and to make the same and other objects, features and advantages of the present application more readily apparent.

Drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the application. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:

Fig. 1 is a schematic perspective view of a spot shaping device according to an embodiment of the present invention;

Fig. 2 is a schematic side structural diagram of a spot shaping device according to an embodiment of the present invention;

FIG. 3 is a schematic cross-sectional view of FIG. 2 taken along line A-A;

fig. 4 is a schematic diagram of an explosion structure of a view angle of a switching assembly and a collimating assembly in the spot shaping apparatus according to the embodiment of the present invention;

fig. 5 is a schematic diagram of an explosion structure of another view angle of the switching assembly and the collimating assembly in the spot shaping device according to the embodiment of the present invention;

FIG. 6 is a schematic diagram of an exploded view of a collimation assembly and a homogenization assembly in a spot-shaping device according to an embodiment of the present invention;

fig. 7 is a schematic diagram of an explosion structure of another view angle of the collimating assembly and the homogenizing assembly in the spot shaping apparatus according to the embodiment of the present invention;

fig. 8 is a schematic perspective view of a homogenizing component in the spot shaping apparatus according to an embodiment of the present invention;

fig. 9 is a schematic structural diagram of a first micro-cylindrical array and a second micro-cylindrical array in the spot shaping device according to the embodiment of the present invention;

fig. 10 is a schematic top view of a first micro-cylindrical array and a mirror frame in the spot shaping device according to the embodiment of the present invention;

Fig. 11 is a schematic structural diagram of a laser processing apparatus according to an embodiment of the present invention.

Reference numerals in the specific embodiments are as follows:

100. A light spot shaping device; 110. a collimation assembly; 111. a collimation channel; 112. a first threaded hole; 113. a connection part; 1131. a second notch; 1132. a second through hole; 114. a fastener; 115. a second plug wall; 116. the second annular limiting groove; 120. a homogenizing component; 121. a homogenizing channel; 122. a mating portion; 123. a housing; 124. a first homogenizing lens group; 1241. a first array of micro-cylinders; 1241a, a second connection structure; 1241b, fourth connection structure; 1241c, arcuate sliding holes; 1241e, bumps; 12411. a frame; 12411a, first connection structure; 12411b, third connection structure; 12411c, limit shaft; 12411d, abutment structure; 12411e, limit groove; 1242. a second array of micro-cylinders; 1243. a distance adjusting member; 1244. a force application part; 1245. an elastic member; 1246. an adjusting member; 130. a focusing assembly; 131. a focusing channel; 140. a light splitting component; 141. a beam-splitting channel; 142. a light splitting port; 143. a one-way light reflecting element; 150. a reflective assembly; 151. a reflection channel; 152. a beam outlet; 153. a light reflecting member; 160. a temperature control assembly; 170. a switching component; 171. a joint body; 172. a joint seat; 1721. a first notch; 1722. a first through hole; 173. a first threaded fastener; 174. an incident beam path; 175. a first plug wall; 176. the first annular limiting groove; 177. a first seal ring;

10. a laser processing device; 200. a light source device; 300. a working platform;

20. And (5) machining a workpiece.

Detailed Description

Embodiments of the technical scheme of the present application will be described in detail below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical aspects of the present application, and thus are merely examples, and are not intended to limit the scope of the present application.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having" and any variations thereof in the description of the application and the claims and the description of the drawings above are intended to cover a non-exclusive inclusion.

In the description of embodiments of the present application, the technical terms "first," "second," and the like are used merely to distinguish between different objects and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, a particular order or a primary or secondary relationship. In the description of the embodiments of the present application, the meaning of "plurality" is two or more unless explicitly defined otherwise.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

In the description of the embodiments of the present application, the term "and/or" is merely an association relationship describing an association object, and indicates that three relationships may exist, for example, a and/or B may indicate: there are three cases, a, B, a and B simultaneously. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.

In the description of the embodiments of the present application, the term "plurality" means two or more (including two), and similarly, "plural sets" means two or more (including two), and "plural sheets" means two or more (including two).

In the description of the embodiments of the present application, the orientation or positional relationship indicated by the technical terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or element referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the embodiments of the present application.

In the description of the embodiments of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured" and the like should be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; or may be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the embodiments of the present application will be understood by those of ordinary skill in the art according to specific circumstances.

Based on this, the embodiment of the application provides a light spot shaping device, which is formed by sequentially and detachably connecting a collimation assembly, a homogenization assembly and a focusing assembly, so that when elements in a part of assemblies are damaged in the use process, the part of assemblies can be detached and the damaged elements can be maintained or replaced, and the use cost is greatly reduced. And the transmission of the light beam among the partial assemblies is realized through the channels which are mutually communicated among the collimation assembly, the homogenization assembly and the focusing assembly, and when the light beam passes through the channels in the partial assemblies, the light beam is correspondingly processed in the channels by the partial assemblies, so that the light beam finally reaching the workpiece forms a uniform light spot.

The spot shaping device provided by the embodiment of the application comprises, but is not limited to, a device used in the field of illumination or laser welding, such as Mini LED massive welding.

Specifically, referring to fig. 1 to 3, a three-dimensional structure of the spot shaping apparatus is shown in fig. 1, a side view structure of the spot shaping apparatus is shown in fig. 2, and a cross-sectional structure along A-A of fig. 2 is shown in fig. 3. As shown in the figure, the spot shaping apparatus 100 comprises a collimation assembly 110, a homogenization assembly 120, and a focusing assembly 130. The collimating assembly 110 is internally provided with a collimating channel 111, one end of the collimating channel 111 is used for allowing a light beam to enter, and the collimating assembly 110 is used for collimating the light beam in the collimating channel 111. The homogenizing component 120 is detachably connected with the collimating component 110, the homogenizing component 120 is located at the other end of the collimating channel 111, a homogenizing channel 121 is arranged in the homogenizing component 120, the homogenizing channel 121 is used for allowing the collimated light beam to enter from the other end of the collimating channel 111, and the homogenizing component 120 is used for homogenizing the light beam in the homogenizing channel 121. The focusing assembly 130 is detachably connected with one end of the homogenizing assembly 120, which is away from the collimating assembly 110, a focusing channel 131 is arranged in the focusing assembly 130, the focusing channel 131 is used for allowing the homogenized light beam to enter from one end of the homogenizing channel 121, which is away from the collimating channel 111, and the focusing assembly 130 is used for focusing the light beam in the focusing channel 131 to the workpiece.

Taking an example of a light source device for generating a light beam as an optical fiber coupled laser, the light source device outputs a light beam with a divergence angle smaller than or equal to 25.4 degrees along the direction indicated by the top arrow in fig. 3, and the light beam enters the collimation channel 111 from the top end and is collimated by the collimation component 110, and then a collimated light beam with a divergence angle smaller than 0.5 degrees is output. The collimated beam enters the homogenizing channel 121, and after being homogenized by the homogenizing component 120, a uniform beam with uniformity greater than 97% can be formed, and then the uniform beam enters the focusing channel 131, and is focused onto a workpiece, for example, the surface of the workpiece by the focusing component 130 for processing.

For the spot shaping device with the integrated shell, the internal optical element is configured and formed after leaving the factory, so that the optical shaping device is limited by the internal optical element and can only be used in a specific application scene, and the product universality is poor. Specifically, for example, after the structural configuration of the focusing assembly in the spot shaping device is shaped, the focal length of the focusing assembly is fixed, so that the spot shaping device can only focus a fixed spot on a workpiece with a fixed distance.

In the spot shaping apparatus 100 provided in the embodiment of the present application, the collimating assembly 110, the homogenizing assembly 120 and the focusing assembly 130 are detachably connected to form the modularized spot shaping apparatus 100, so that the collimating assembly 110, the homogenizing assembly 120 and the focusing assembly 130 can be flexibly configured or replaced according to the operation requirement, for example, according to the light emitting characteristics of the light source device, the collimating assembly 110 corresponding to the light emitting characteristics is replaced, so as to improve the effect of the collimation treatment on the light beam. Similarly, the homogenizing assembly 120 and the focusing assembly 130 can be selectively replaced, so as to more specifically homogenize the light beam and focus the light spot on workpieces with different distances according to the operation requirement.

In addition, in the spot shaping apparatus 100 provided in the embodiment of the present application, the collimating component 110, the homogenizing component 120 and the focusing component 130 are independently provided and are sequentially detachably connected, so that when a component in a part of the component is damaged in the use process, the part of the component can be detached, and the damaged component can be conveniently maintained or replaced, thereby greatly reducing the use cost.

Referring again to fig. 1 and 3, in some embodiments, the spot shaping apparatus 100 further includes a beam splitting component 140, a reflecting component 150, and a temperature control component 160. The beam splitting assembly 140 is detachably connected between the homogenizing assembly 120 and the focusing assembly 130, a beam splitting channel 141 is disposed in the beam splitting assembly 140, a beam splitting port 142 is disposed on a side wall of the beam splitting assembly 140, the beam splitting assembly 140 is configured to transmit a beam entering from the homogenizing channel 121 in the beam splitting channel 141 and enter the focusing channel 131, and the beam splitting assembly 140 is further configured to reflect a beam radiated by a workpiece and entering from the focusing channel 131 into the beam splitting channel 141 and pass through the beam splitting port 142. The reflection assembly 150 is detachably connected to the light splitting assembly 140, and the reflection assembly 150 is covered on the outer side of the light splitting opening 142, a reflection channel 151 is disposed in the reflection assembly 150, a beam outlet 152 is disposed at one end of the reflection channel 151, and the reflection assembly 150 is used for reflecting the beam entering the reflection channel 151 from the light splitting opening 142 and passing through the beam outlet 152. The temperature control assembly 160 is detachably connected to the reflection assembly 150, the temperature control assembly 160 is disposed outside the beam outlet 152, and the temperature control assembly 160 is used for measuring the temperature of the beam passing through the beam outlet 152, i.e. the temperature of the light radiated by the workpiece.

As shown in fig. 3, the reflection assembly 150 includes a one-way reflection element 143 obliquely disposed in the spectroscopic channel 141, and the light beam (arrow is implemented in the spectroscopic channel 141 in the drawing) entering from the homogenizing channel 121 is transmitted through the one-way reflection element 143 into the focusing channel 131. During processing, a beam (dashed arrows in the beam splitting channel 141 and the reflecting channel 151 in the figure) with a certain wavelength band, which is radiated from the surface of the workpiece acted on by the light spot, enters the beam splitting channel 141 through the focusing channel 131, the one-way reflecting element 143 reflects the beam into the reflecting channel 151 through the beam splitting port 142, and then the reflecting component 150 reflects the beam to the temperature control component 160 through the beam outlet 152, so that the temperature of the beam is detected by the temperature control component 160, and temperature measurement of the workpiece is realized.

Further, the temperature control component 160 may be communicatively connected to a controller, where the controller determines a difference between the detected temperature and a target temperature value by comparing the temperature detected by the temperature control component 160 with the set target temperature value, and adjusts the beam power generated by the light source device according to the difference, so as to ensure that the temperature of the surface of the workpiece is stabilized at the target temperature value, thereby realizing automatic temperature control.

In the embodiment shown in fig. 3, the reflecting component 150 includes a reflecting member 153 obliquely disposed in the reflecting channel 151, where the reflecting member 153 and the unidirectional reflecting element 143 are disposed parallel to each other, so that after the light beam is sequentially reflected by the unidirectional reflecting element 143 and the reflecting member 153, the light beam is output along a vertical upward direction, and accordingly, the temperature control component 160 is disposed at an upward end of the reflecting component 150, so as to receive the light beam output from the light beam outlet 152 and perform temperature detection, and meanwhile, the reflecting member 153 and the unidirectional reflecting element 143 are disposed parallel to each other, and the temperature control component 160 is disposed at an upward end of the reflecting component 150, which can effectively reduce the space occupation of the whole light spot shaping device 100 in a horizontal direction, and ensure the compactness of the structure.

By further detachably connecting the beam splitting assembly 140, the reflecting assembly 150 and the temperature control assembly 160, temperature measurement of the workpiece is achieved. Because the beam splitting component 140, the reflecting component 150 and the temperature control component 160 are of independent modular structures, when some parts of the components are damaged, the components can be independently detached for maintenance or replacement, and the use cost is reduced.

In order to facilitate the installation and fixation of the spot shaping apparatus 100, the present application further provides an embodiment, and with continued reference to fig. 1 and 3, as shown in the drawings, the spot shaping apparatus 100 further includes a adapting assembly 170, the adapting assembly 170 is detachably connected to an end of the collimating assembly 110 facing away from the homogenizing assembly 120, and the adapting assembly 170 is used for connecting with a light source device that generates a light beam.

Specifically, for the application scenario of laser welding, the adapter assembly 170 may employ a QBH (Quartz Block Head) connector, and the QBH connector is connected to the optical fiber coupled laser light source device, so as to mount the spot shaping device 100 on the light source device. In operation, laser light output from the fiber coupled laser light source device passes through the QBH connector and enters the collimating channel 111.

It will be appreciated that in other embodiments, the adapter assembly 170 may be configured as a connector or a connection structure of other types according to the application scenario of the spot shaping device and the light source device.

After the adapter assembly 170 is detachably connected to the end of the collimating assembly 110 away from the homogenizing assembly 120, the spot shaping apparatus 100 may be integrally and conveniently assembled to the light source apparatus through the adapter assembly 170. Further, when the light spot shaping device 100 needs to be mounted on light source devices of different types or models, the adapter assembly 170 which can be adaptively connected with a new light source device can be detached and replaced, so that the light spot shaping device 100 can be mounted and fixed on the light source devices of different types or models, and the universality of the light spot shaping device 100 is improved.

For the connection structure between the adapter assembly 170 and the collimating assembly 110, the present application proposes an embodiment, refer to fig. 1 again, and further referring to fig. 4, fig. 4 shows an exploded view of the adapter assembly 170 and the collimating assembly 110. As shown in the drawing, the adaptor assembly 170 includes a connector body 171 and a connector seat 172 fixed to each other, a first notch 1721 is formed at an edge of a side wall of the connector seat 172, a first through hole 1722 is formed on a wall of the connector seat 172 facing the alignment assembly 110 on the side of the first notch 1721, a first threaded hole 112 is formed on a surface of the alignment assembly 110 facing the adaptor assembly 170, and the first notch 1721 is used for allowing a first threaded fastener 173 to pass through the first through hole 1722 and connect with the first threaded hole 112, so as to detachably fix the connector seat 172 and the alignment assembly 110 together. In this way, the adapter assembly 170 and the collimating assembly 110 can be conveniently assembled and disassembled.

In order to ensure the sealing performance of the beam path, the present application further proposes an embodiment, and with continued reference to fig. 4, and further reference to fig. 5, which illustrates an exploded view of the adapter assembly 170 and the collimator assembly 110 from another perspective. As shown in the drawing, an incident beam channel 174 is disposed in the adapter component 170, a first plugging wall 175 is disposed on an outer edge of the incident beam channel 174 facing one end of the collimating component 110 in the adapter component 170, the first plugging wall 175 is inserted into the collimating component 111, a first annular limiting groove 176 is disposed on the adapter component 170 adjacent to the first plugging wall 175, a first sealing ring 177 is disposed in the first annular limiting groove 176, and the first sealing ring 177 is in interference fit with a surface of the collimating component 110 at an edge of the collimating component 111.

When the adapter assembly 170 and the collimation assembly 110 are assembled, the first plug wall 175 can be inserted into the collimation channel 111 to position the adapter assembly 170 and the collimation assembly 110, alignment of the incident beam channel 174 and the collimation channel 111 is guaranteed, and the first sealing ring 177 is clamped on the inner wall of the first annular limiting groove 176 and the surface at the edge of the collimation channel 111 to ensure sealing performance of the collimation channel 111 at the joint of the adapter assembly 170 and the collimation assembly 110.

For the connection structure between the collimating component 110 and the homogenizing component 120, the present application proposes an embodiment, refer to fig. 1 again, and further referring to fig. 6, fig. 6 shows an exploded view of the collimating component 110 and the homogenizing component 120. As shown in the drawing, one of the opposite ends of the alignment assembly 110 and the homogenizing assembly 120 is provided with a connection portion 113, and the other is provided with a mating portion 122, and the connection portion 113 and the mating portion 122 are fixedly connected to each other by a fastener 114.

The connection portion 113 may include a second notch 1131 and a second through hole 1132, where the second notch 1131 and the second through hole 1132 are configured in the same manner as the first notch 1721 and the first through hole 1722 described above. The mating portion 122 may be a second threaded hole disposed on a surface of the homogenizing assembly 120, and the fastener 114 may be a second threaded fastener. The fastener 114 is threadedly coupled to the mating portion 122 through the second through-hole 1132 by a second gap 1131, the second gap 1131 providing space for a tightening operation of the fastener 114, thereby facilitating assembly between the alignment assembly 110 and the homogenization assembly 120.

Further, in order to ensure tightness of the beam path, the present application further proposes an embodiment, referring specifically to fig. 7, which shows an exploded structure of the collimation assembly 110 and the homogenization assembly 120 at another view angle. As shown in the figure, a sealing member is interposed between the alignment member 110 and the homogenizing member 120, and seals a gap between the alignment passage 111 and the homogenizing passage 121.

Specifically, as shown in fig. 7, the collimating component 110 may be provided with a second plugging wall 115 at an outer edge of the collimating channel 111 facing one end of the homogenizing channel 121, the second plugging wall 115 is inserted into the homogenizing channel 121, a second annular limiting groove 116 is provided on the collimating component 110 adjacent to the second plugging wall 115, a sealing member is provided in the second annular limiting groove 116, and the sealing member is in interference fit with a surface of the homogenizing component 120 at the edge of the homogenizing channel 121.

Positioning of the alignment assembly 110 and the homogenization assembly 120 is achieved by inserting the second plug wall 115 into the homogenization passage 121, ensuring alignment between the alignment passage 111 and the homogenization passage 121. By sandwiching a seal between the collimating assembly 110 and the homogenizing assembly 120, the sealing performance of the collimating and homogenizing channels 111, 121 at the junction of the collimating assembly 110 and the homogenizing assembly 120 is ensured.

The detachable connection structures and sealing structures between the homogenizing element 120 and the light splitting element 140, between the light splitting element 140 and the focusing element 130, between the light splitting element 140 and the reflecting element 150, and between the reflecting element 150 and the temperature control element 160 may be set to be the same as the connection structures between the collimating element 110 and the homogenizing element 120, or adaptively adjusted according to the characteristics of the structures or shapes of the elements, so as to form a connection manner as shown in fig. 1, and the specific connection structures are not repeated here.

In order to achieve the adjustment of the size of the spot formed on the workpiece, the present application further proposes an embodiment, specifically, the homogenizing assembly 120 includes a housing and a fixed homogenizing lens set fixed in the housing, the fixed homogenizing lens set is used for homogenizing the light beam in the homogenizing channel, and the focusing assembly 130 includes a housing and a zoom lens for changing the size of the spot focused on the workpiece by adjusting the focal length.

The focal length of the zoom lens is adjusted to adjust the size of the light spot to the size of the target light spot, but it should be noted that, after the focal length is adjusted, in order to ensure the accuracy of the size of the light spot, the distance between the zoom lens and the workpiece needs to be correspondingly changed to ensure that the size of the light spot focused on the surface of the workpiece is accurate and reliable.

In order to flexibly adjust the size of the light spot formed on the workpiece, the present application further proposes an embodiment, and referring specifically to fig. 8, a perspective structure of the homogenizing assembly 120 is shown in fig. 8. As shown in the figure, the homogenizing assembly 120 includes a housing 123 and a first homogenizing lens group 124, and the first homogenizing lens group 124 is disposed in the housing 123. The first homogenizing lens group 124 includes a first micro-cylindrical array 1241 and a second micro-cylindrical array 1242, and the planar directions of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 are all the first directions, and the first directions are perpendicular to the axial direction of the homogenizing channel 121. At least one of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 is slidably coupled to the housing 123 along the axis of the homogenizing channel 121 such that upon relative movement between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242, the spot size of the beam focused on the workpiece in the first direction is changed.

The axial direction of the homogenizing passageways 121 is the direction shown by the z-axis in fig. 8, and the first direction may be the direction shown by the x-axis in fig. 8 or the direction perpendicular to both the z-axis and the x-axis in fig. 8.

The first micro cylindrical array 1241 and the second micro cylindrical array 1242 are micro lenses having a surface with a plurality of convex columns arranged in a planar direction. Only the schematic structure of the first micro cylindrical array 1241 and the second micro cylindrical array 1242 is shown in fig. 8.

Specifically, the length l=tan θ·f _F of the spot formed on the workpiece in the first direction, where θ is the divergence angle of the beam, and f _F is the focal length of the focusing mirror in the focusing assembly 130. And tan θ=h/2 f ', where h is the height of the first and second micro cylindrical arrays 1241, 1242, and f' is the combined focal length of the first and second micro cylindrical arrays 1241, 1242. When the first micro cylindrical array 1241 and the second micro cylindrical array 1242 slide relatively, the distance d between the two changes, so that f' changes. Since tan θ=h/2 f ', θ varies with the change of f' with h unchanged. Since l=tan θ·f _F, L changes after θ changes.

It will also be appreciated that the numerical aperture NA of an optical system is a dimensionless number that is used to measure the angular range of light that the optical system is capable of collecting. The numerical aperture describes the size of the cone angle of acceptance of the lens, which determines the lens' acceptance power and spatial resolution. Na=sin θ·n, where n is the refractive index of the lens, θ is the divergence angle of the beam. When θ changes, NA changes. Thus, essentially, the size of the spot in the first direction is changed, i.e. the numerical aperture NA in the first direction is changed.

Taking the example that the light spot formed on the workpiece is a rectangular light spot, when the distance between the first micro cylindrical array 1241 and the second micro cylindrical array 1242 is changed, the size of the rectangular light spot formed on the workpiece at the same distance in the first direction (the length or width direction of the rectangular light spot) is changed with the focal length unchanged.

By setting the planar directions of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 as the first directions and setting at least one of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 in the housing 123 in a sliding manner, when the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 slide relatively, that is, when the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 changes, the size of the light spot formed on the workpiece in the first direction changes, so that for the application scenario of laser welding, the size of the processing area can be controlled more accurately, and the distance between the workpiece and the focusing assembly 130 does not need to be changed.

With respect to the distance adjusting structure between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242, the application further provides an embodiment, and as shown in fig. 8, the first homogenizing lens set 124 further includes a distance adjusting member 1243, the distance adjusting member 1243 penetrates through the housing 123 and is connected to the first micro-cylindrical array 1241 internally, a force applying portion 1244 is disposed at a portion of the distance adjusting member 1243 located outside the housing 123, and the force applying portion 1244 drives the first micro-cylindrical array 1241 to move along the axial direction (the z-axis direction shown in fig. 8) of the homogenizing channel 121 through the distance adjusting member 1243.

In the embodiment shown in fig. 8, the distance adjusting member 1243 is a screw, the distance adjusting member 1243 is rotatably connected with the housing 123, and the distance adjusting member 1243 is further in threaded connection with the first micro-cylindrical array 1241 to form a screw module. The force application part 1244 is a knob, the force application part 1244 is rotated by a hand to drive the distance adjusting part 1243 to rotate, and when the distance adjusting part 1243 rotates, the first micro-cylindrical array 1241 is driven to move along the direction indicated by the z axis through the threaded fit between the first micro-cylindrical array 1241, so that the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 is adjusted.

It should be understood that fig. 8 is only a specific adjustment structure provided in an embodiment of the present application, in other embodiments, the distance adjusting member 1243 may be a screw that is in threaded engagement with the first micro-cylindrical array 1241, and the force applying portion 1244 may be a motor, so that the distance adjusting member 1243 is driven by the motor to rotate, thereby implementing automatic adjustment of the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242. In still other embodiments, the distance adjusting member 1243 may be a sliding rod slidably connected to the housing 123 along the axial direction of the homogenizing channel 121, and meanwhile, the sliding rod is fixedly connected to the first micro-cylindrical array 1241 in the housing 123, and when the force application portion 1244 drives the sliding rod to slide along the axial direction of the homogenizing channel 121, the first micro-cylindrical array 1241 moves along with the sliding rod, so as to adjust the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242. Further, a clamping structure or a locking structure can be arranged at the connection position between the sliding rod and the housing 123, and when the first micro-cylindrical array 1241 is adjusted to a desired position, the sliding rod and the housing 123 can be mutually fixed through the clamping structure or the locking structure, so that the sliding rod cannot easily slide, and the accuracy of the position of the first micro-cylindrical array 1241 is ensured.

Through penetrating the distance adjusting member 1243 on the casing 123, the distance adjusting member 1243 is connected with the first micro cylindrical array 1241 inside, and the force application part 1244 is arranged at the part of the distance adjusting member 1243 located outside the casing 123, so that the distance between the first micro cylindrical array 1241 and the second micro cylindrical array 1242 can be conveniently adjusted through the force application part 1244 and the distance adjusting member 1243, the on-line adjustment of the light spot size in the first direction is realized, and the light spot size in the first direction is continuously changed in the adjustment process, so that the light spot can be adjusted to any size and then stopped.

Further, in some embodiments, the homogenizing assembly 120 further comprises a second homogenizing lens group (not shown), and the second homogenizing lens group and the first homogenizing lens group 124 are disposed in the housing 123 along the axial direction of the homogenizing channel 121. The second homogenizing lens group comprises a third micro-cylindrical array and a fourth micro-cylindrical array, the surface type directions of the third micro-cylindrical array and the fourth micro-cylindrical array are all second directions, and the second directions are perpendicular to the axial direction and the first direction of the homogenizing channel 121. At least one of the third micro-cylindrical array and the fourth micro-cylindrical array is slidably coupled to the housing 123 along the axis of the homogenizing channel 121 such that upon relative movement between the third micro-cylindrical array and the fourth micro-cylindrical array, the spot size of the beam focused onto the workpiece in the second direction is changed.

Note that, if the first direction is a direction shown by the x-axis in fig. 8, the second direction is a direction perpendicular to both the x-axis and the z-axis, and if the second direction is a direction shown by the x-axis, the first direction is a direction perpendicular to both the x-axis and the z-axis.

It will be appreciated that the third micro-cylindrical array and the fourth micro-cylindrical array in the second homogenizing lens group may have the same structure except for the area shape direction of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 in the first homogenizing lens group 124, and the adjustment principle is the same, but the first homogenizing lens group 124 adjusts the size of the light spot in the first direction, and the second homogenizing lens group adjusts the size of the light spot in the second direction, so detailed description of the second homogenizing lens group will be omitted here.

The first homogenizing lens group 124 adjusts the size of the light spot in the first direction, and the second homogenizing lens group adjusts the size of the light spot in the second direction, so that the size of the light spot can be controlled more flexibly, for example, for rectangular light spots, the aspect ratio of the light spot can be accurately adjusted.

Due to the presence of the first homogenizing lens group 124, the diffraction effect of the light causes peaks at both ends of the light spot output by the light spot shaping device 100. Specifically, due to diffraction, diffraction peaks exist at both ends of the light spot passing through each micro-channel between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242, and the peaks at both ends of the light spot after superposition are larger.

Based on the above-mentioned problems, in order to eliminate the peak at the two ends of the light spot, the present application further proposes an embodiment, and particularly referring to fig. 9, the structures of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 are shown. As shown, the first micro-cylindrical array 1241 is rotatably disposed in the homogenizing channel 121 along the axis (z-axis in the figure), and the first micro-cylindrical array 1241 is used to eliminate spikes at both ends of the light spot passing through the micro-channel between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 when rotated relative to the second micro-cylindrical array 1242.

By rotationally arranging the first micro-cylindrical array 1241 in the homogenizing channel 121 along the axis (i.e. the optical axis) of the homogenizing channel 121, when the first micro-cylindrical array 1241 is rotated along the axis of the homogenizing channel 121, the light spot passing through each micro-channel between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 will change, so that the peak at two ends of the superimposed light spot is reduced, and the uniformity of the light spot in the effective area is improved.

As for the rotation structure of the first micro-cylinder array 1241, the present application further provides an embodiment, referring to fig. 8 to 9, in which, as shown in the drawings, a lens frame 12411 is disposed on the outer periphery of the first micro-cylinder array 1241, the first micro-cylinder array 1241 is rotatably connected to the lens frame 12411, and the lens frame 12411 is slidably connected to the housing 123.

Specifically, the first micro-cylindrical array 1241 may be rotatably coupled to the lens frame 12411 by way of a hole-axis fit.

By rotationally connecting the first micro-cylindrical array 1241 to the mirror frame 12411, rotational adjustment of the first micro-cylindrical array 1241 is achieved, and the mirror frame 12411 protects the first micro-cylindrical array 1241.

Further, as shown in fig. 9, in some embodiments, the frame 12411 and the first micro-cylindrical array 1241 are respectively provided with a first connecting structure 12411a and a second connecting structure 1241a at one side, the first connecting structure 12411a and the second connecting structure 1241a are connected to each other by an elastic member 1245, the frame 12411 and the first micro-cylindrical array 1241 are respectively provided with a third connecting structure 12411b and a fourth connecting structure 1241b at the opposite side, and the third connecting structure 12411b and the fourth connecting structure 1241b are connected to each other by an adjusting member 1246. The adjusting member 1246 is configured to adjust a distance between the third connecting structure 12411b and the fourth connecting structure 1241b, such that when the distance between the third connecting structure 12411b and the fourth connecting structure 1241b increases, the fourth connecting structure 1241b drives the first micro-cylinder array 1241 to rotate relative to the second micro-cylinder array 1242 along the first rotation direction (the rotation direction indicated by the arrow a in the figure). When the elastic member 1245 is in a stretched state and the distance between the third connecting structure 12411b and the fourth connecting structure 1241b is reduced, the elastic member 1245 contracts and drives the first micro-cylindrical array 1241 to rotate relative to the second micro-cylindrical array 1242 along a second rotation direction (a rotation direction indicated by an arrow b in the drawing) through the second connecting structure 1241a, and the second rotation direction is opposite to the first rotation direction.

Specifically, referring to fig. 10, a top view of the first micro-cylinder array 1241 and the mirror frame 12411 is shown. As shown in the drawing, in the initial state, two ends of the elastic member 1245 are fixedly connected to the first connecting structure 12411a and the second connecting structure 1241a, respectively, and the elastic member 1245 is in a stretched state. The adjusting member 1246 may be a screw, and the adjusting member 1246 passes through the third connecting structure 12411b to be in threaded connection with the fourth connecting structure 1241b, and the head of the adjusting member 1246 is used to be matched with a wrench or other tools to apply force, so that when the adjusting member 1246 is rotated, the distance between the fourth connecting structure 1241b and the third connecting structure 12411b is changed by the threaded connection between the fourth connecting structure 1241b and the adjusting member 1246, so that the first micro-cylindrical array 1241 rotates relative to the mirror frame 12411, i.e. the first micro-cylindrical array 1241 rotates relative to the second micro-cylindrical array 1242.

One side of the mirror frame 12411 and one side of the first micro-cylindrical array 1241 are connected with each other through a stretched elastic member 1245, and the opposite side is connected with each other through an adjusting member 1246, so that the rotation of the first micro-cylindrical array 1241 can be conveniently adjusted through operating the adjusting member 1246, and the on-line adjustment of the rotation of the first micro-cylindrical array 1241 is realized.

In order to ensure the rotation precision of the first micro cylindrical array 1241, the present application further proposes an embodiment, and with specific reference to fig. 9 and 10, as shown in the drawings, a limiting shaft 12411c is disposed on the mirror frame 12411, an arc sliding hole 1241c is disposed on the first micro cylindrical array 1241, and the limiting shaft 12411c is disposed through the arc sliding hole 1241c and is in sliding fit with the arc sliding hole 1241c, so as to ensure that the first micro cylindrical array 1241 rotates along the axis (the z axis shown in the drawings) of the homogenizing channel 121.

Specifically, the center of the arc sliding hole 1241c is located on the optical axis, that is, on the axis of the homogenizing channel 121, so that when the first micro-cylindrical array 1241 rotates, the rotation axis of the first micro-cylindrical array 1241 coincides with the optical axis due to the limitation of the sliding fit between the arc sliding hole 1241c and the limiting shaft 12411c, thereby ensuring the rotation accuracy of the first micro-cylindrical array 1241 and preventing the influence on the homogenizing effect of the light beam due to the deviation of the rotation axis of the first micro-cylindrical array 1241.

In order to ensure the stability of the first micro cylindrical array 1241, the present application further provides an embodiment, referring to fig. 9 and 10 again, in which, as shown in the drawings, an abutting structure 12411d is disposed at an end of the limiting shaft 12411c, and the abutting structure 12411d abuts against the arc sliding hole 1241c to limit the first micro cylindrical array 1241 from moving along the axial direction of the homogenizing channel 121.

Specifically, the abutting structure 12411d may be an end portion with an increased cross-sectional area on the limiting shaft 12411c, or may be a spacer clamped between the end portion of the limiting shaft 12411c and the surface of the arc-shaped sliding hole 1241 c.

By abutting the abutting structure 12411d at the end of the limiting shaft 12411c against the arc-shaped sliding hole 1241c, the first micro-cylindrical array 1241 and the mirror frame 12411 are relatively fixed in the axial direction of the homogenizing channel 121, so that the stability of the structure of the first micro-cylindrical array 1241 and the accuracy of the position are ensured, and the homogenizing effect on the light beam is ensured.

In order to eliminate the peak at two ends of the light spot by rotating the first micro-cylindrical array 1241, only fine adjustment of the first micro-cylindrical array 1241 is generally required, so, in order to adjust the first micro-cylindrical array 1241 excessively, the present application further proposes an embodiment, and as shown in fig. 9 and 10, the inner edge of the mirror frame 12411 is provided with a limiting groove 12411e, the outer edge of the first micro-cylindrical array 1241 is provided with a protrusion 1241e, the protrusion 1241e is located in the limiting groove 12411e, and two inner walls of the limiting groove 12411e opposite to each other along the circumferential direction (the rotation direction of the first micro-cylindrical array 1241) are used for abutting against the protrusion 1241e to limit the maximum rotation travel of the first micro-cylindrical array 1241.

Through the cooperation of the spacing groove 12411e of picture frame 12411 inner edge and the protruding 1241e of first micro-cylindrical array 1241 outer edge for the maximum size of spacing groove 12411e along circumference has decided the biggest rotation angle of first micro-cylindrical array 1241, thereby can effectively prevent first micro-cylindrical array 1241 and adjust excessive problem. For example, when the adjusting member 1246 is loosened, the elastic member 1245 drives the first micro-cylindrical array 1241 to rotate substantially during the process of shrinking and recovering the deformation, and in this case, the limitation of the inner wall of the limiting groove 12411e on the protrusion 1241e can effectively prevent the first micro-cylindrical array 1241 from rotating substantially, so as to avoid affecting the accuracy of the first homogenizing lens assembly 124.

It will be appreciated that the embodiments described above for the first homogenizing lens group 124 to eliminate spikes and to ensure accuracy are equally applicable to the second homogenizing lens group.

In accordance with another aspect of an embodiment of the present application, a laser processing apparatus is provided, and referring specifically to fig. 11, a structure of a laser processing apparatus 10 is shown. As shown in the drawing, the laser processing apparatus 10 includes a light source device 200, a work stage 300, and the spot shaping device 100 in any of the above embodiments. The light source device 200 is aligned with the collimation module 110, the light source device 200 is used for generating a light beam to be input into the collimation channel 111, the working platform 300 is used for placing the workpiece 20, and the focusing module 130 is used for focusing the light beam in the focusing channel 131 onto the workpiece 20 so as to process the workpiece 20.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the application, and are intended to be included within the scope of the appended claims and description. In particular, the technical features mentioned in the respective embodiments may be combined in any manner as long as there is no structural conflict. The present application is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions falling within the scope of the claims.

Claims

1. A spot shaping apparatus, comprising:

The collimating component is internally provided with a collimating channel, one end of the collimating channel is used for allowing light beams to enter, and the collimating component is used for collimating the light beams in the collimating channel;

The homogenizing component is detachably connected with the collimating component, the homogenizing component is positioned at the other end of the collimating channel, a homogenizing channel is arranged in the homogenizing component, the homogenizing channel is used for allowing the collimated light beam to enter from the other end of the collimating channel, and the homogenizing component is used for homogenizing the light beam in the homogenizing channel;

The focusing assembly is detachably connected with one end of the homogenizing assembly, which is far away from the collimating assembly, a focusing channel is arranged in the focusing assembly, the focusing channel is used for allowing a homogenized light beam to enter from one end of the homogenizing channel, which is far away from the collimating assembly, and the focusing assembly is used for focusing the light beam in the focusing channel onto a workpiece;

The homogenizing assembly comprises a shell and a first homogenizing lens group, and the first homogenizing lens group is arranged in the shell;

The first homogenizing lens group comprises a first micro-cylindrical array and a second micro-cylindrical array, the surface type directions of the first micro-cylindrical array and the second micro-cylindrical array are all first directions, and the first directions are perpendicular to the axial direction of the homogenizing channel;

The first micro-cylindrical array is rotationally arranged in the homogenizing channel along the axis of the homogenizing channel, and the first micro-cylindrical array is used for eliminating peaks at two ends of light spots passing through a micro-channel between the first micro-cylindrical array and the second micro-cylindrical array when rotating relative to the second micro-cylindrical array;

a mirror frame is arranged on the periphery of the first micro-cylindrical surface array, and the first micro-cylindrical surface array is rotationally connected with the mirror frame;

The mirror frame and the first micro-cylindrical surface array are respectively provided with a first connecting structure and a second connecting structure at one side, the first connecting structure and the second connecting structure are mutually connected through an elastic piece, the mirror frame and the first micro-cylindrical surface array are respectively provided with a third connecting structure and a fourth connecting structure at the opposite side, and the third connecting structure and the fourth connecting structure are mutually connected through an adjusting piece;

The adjusting piece is used for adjusting the distance between the third connecting structure and the fourth connecting structure, so that when the distance between the third connecting structure and the fourth connecting structure is increased, the fourth connecting structure drives the first micro-cylindrical surface array to rotate relative to the second micro-cylindrical surface array along a first rotation direction; when the elastic piece is in a stretching state and the distance between the third connecting structure and the fourth connecting structure is reduced, the elastic piece contracts and drives the first micro-cylindrical array to rotate relative to the second micro-cylindrical array along a second rotating direction through the second connecting structure, and the second rotating direction is opposite to the first rotating direction.

2. The spot shaping device according to claim 1, characterized in that the spot shaping device further comprises:

The beam splitting assembly is detachably connected between the homogenizing assembly and the focusing assembly, a beam splitting channel is arranged in the beam splitting assembly, a beam splitting opening is formed in the side wall of the beam splitting assembly, the beam splitting assembly is used for transmitting a light beam entering from the homogenizing channel in the beam splitting channel into the focusing channel, and the beam splitting assembly is also used for reflecting and passing through the beam splitting opening, wherein the light beam is radiated by the workpiece and enters the beam splitting channel from the focusing channel;

The reflection assembly is detachably connected to the light splitting assembly, the reflection assembly is covered on the outer side of the light splitting opening, a reflection channel is arranged in the reflection assembly, a light beam outlet is formed in one end of the reflection channel, and the reflection assembly is used for reflecting a light beam entering the reflection channel from the light splitting opening and passing through the light beam outlet;

The temperature control assembly is detachably connected to the reflecting assembly, is arranged on the outer side of the light beam outlet and is used for measuring the temperature of a light beam passing through the light beam outlet.

3. The spot shaping device according to claim 1, further comprising a switching assembly detachably connected to an end of the collimating assembly facing away from the homogenizing assembly, the switching assembly being adapted to be connected to a light source device generating a light beam.

4. The spot shaping device according to claim 1, wherein one of the opposite ends between the collimating assembly and the homogenizing assembly and/or between the homogenizing assembly and the focusing assembly is provided with a connecting portion, and the other is provided with a mating portion, and the connecting portion and the mating portion are fixedly connected to each other by a fastener.

5. Spot shaping device according to claim 1, characterized in that a sealing member is sandwiched between the collimator assembly and the homogenizing assembly and/or between the homogenizing assembly and the focusing assembly, the sealing member being adapted to seal a gap between the collimator channel and the homogenizing channel and/or a gap between the homogenizing channel and the focusing channel.

6. The spot shaping device according to any one of claims 1-5, wherein the homogenizing assembly comprises a housing and a fixed homogenizing lens group fixed in the housing, the fixed homogenizing lens group being adapted to homogenize the light beam in the homogenizing channel;

the focus assembly includes a housing and a zoom lens for varying the size of a spot focused onto a work piece by adjusting a focal length.

7. The spot shaping device according to any one of claims 1-5, wherein at least one of the first micro-cylindrical array and the second micro-cylindrical array is slidably coupled to the housing along an axis of the homogenizing channel such that upon relative movement between the first micro-cylindrical array and the second micro-cylindrical array, a spot size of the light beam focused onto the workpiece in the first direction is changed.

8. The spot shaping device according to claim 7, wherein the first homogenizing lens group further comprises a distance adjusting member penetrating through the housing and connected to the first micro-cylindrical array internally, and a force applying portion is provided at a portion of the distance adjusting member located outside the housing, the force applying portion being configured to drive the first micro-cylindrical array to move along an axial direction of the homogenizing channel by the distance adjusting member.

9. The spot shaping device according to claim 7, wherein the homogenizing assembly further comprises a second homogenizing lens group disposed within the housing in an axial alignment of the homogenizing channel with the first homogenizing lens group;

The second homogenizing lens group comprises a third micro-cylindrical array and a fourth micro-cylindrical array, the surface type directions of the third micro-cylindrical array and the fourth micro-cylindrical array are both second directions, and the second directions are perpendicular to the axial direction of the homogenizing channel and the first directions;

And at least one of the third micro-cylindrical array and the fourth micro-cylindrical array is in sliding connection with the shell along the axial direction of the homogenizing channel, so that the light spot size of the light beam focused on the workpiece in the second direction is changed when the third micro-cylindrical array and the fourth micro-cylindrical array relatively move.

10. The spot shaping device according to claim 1, wherein the mirror frame is slidably connected to the housing.

11. The spot shaping device according to claim 1, wherein the mirror frame is provided with a limiting shaft, the first micro-cylindrical array is provided with an arc sliding hole, and the limiting shaft is arranged in the arc sliding hole in a penetrating manner and is in sliding fit with the arc sliding hole, so as to ensure that the first micro-cylindrical array rotates along the axis of the homogenizing channel.

12. The spot shaping device according to claim 1, wherein an inner edge of the mirror frame is provided with a limit groove, an outer edge of the first micro-cylindrical array is provided with a protrusion, the protrusion is located in the limit groove, and two circumferentially opposite inner walls of the limit groove are used for abutting against the protrusion to limit a maximum stroke of rotation of the first micro-cylindrical array.

13. A laser processing apparatus comprising a light source device arranged in alignment with the collimation assembly, a work platform for generating a light beam for input into the collimation channel, and a spot shaping device according to any one of claims 1-12, the work platform for placing a work piece, and a focusing assembly for focusing the light beam in the focusing channel onto the work piece for processing the work piece.