CN116000807A - Polycrystalline diamond clamp for spin-transfer polishing machine and clamping method - Google Patents
Polycrystalline diamond clamp for spin-transfer polishing machine and clamping method Download PDFInfo
- Publication number
- CN116000807A CN116000807A CN202211670628.3A CN202211670628A CN116000807A CN 116000807 A CN116000807 A CN 116000807A CN 202211670628 A CN202211670628 A CN 202211670628A CN 116000807 A CN116000807 A CN 116000807A
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- clamping
- clamping plate
- polycrystalline diamond
- threaded
- boss
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 68
- 239000010432 diamond Substances 0.000 title claims abstract description 68
- 238000005498 polishing Methods 0.000 title claims abstract description 27
- 238000012546 transfer Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 239000000463 material Substances 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- 238000012545 processing Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000004831 Hot glue Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention provides a polycrystalline diamond clamp for a spin transfer polishing machine, which comprises a body, wherein a boss with a threaded hole is arranged on the body, and the polycrystalline diamond clamp further comprises: the clamping assembly comprises a first clamping plate, a second clamping plate and a fixing plate fixed on the body, wherein the first clamping plate, the second clamping plate and the fixing plate enclose a clamping position for placing the polycrystalline diamond wafer substrate slice; the adjusting component comprises a threaded slide rod, an adjusting piece and a fixing piece; the positioning wall is arranged on the body, the boss is arranged at the edge of the positioning wall, the U-shaped sliding block is connected with the threaded sliding rod into a whole, and the threaded sliding rod drives the U-shaped sliding block to move so as to realize the relative movement of the first clamping plate and the second clamping plate, so that the polycrystalline diamond wafer substrate slice is clamped. The invention further provides a clamping method. According to the scheme provided by the invention, the clamping effect of the clamp is improved, the structure is simplified, and the accurate control can be realized.
Description
Technical Field
The invention relates to the technical field of diamond polishing equipment, in particular to a polycrystalline diamond clamp for a spin-transfer polishing machine and a clamping method.
Background
The polycrystalline diamond clamp is used for clamping a substrate slice with larger polycrystalline diamond thickness, a plurality of clamps exist in the prior art, for example, a multifunctional polishing clamp for testing the film thickness of automobile parts is disclosed in China patent database, and is applied to polishing equipment. The opening is at an adjustable clamping face piece, which is designed to clamp samples of different thickness. The clamping surface can be adjusted and can also be used for clamping samples with different sizes. The adjustable clamping surface piece consists of an upper clamping surface piece and a lower clamping surface piece, a space reserved between the upper clamping surface piece and the lower clamping surface piece is a clamping space, and the clamping of a sample is in the clamping space. The upper clamping surface piece plays a role in adjusting the distance, so that samples with different thicknesses can be conveniently clamped. The clamp is characterized in that an elastic structure exists on the lower clamping surface part, the clamp better cooperates with the clamp to complete a sampling action, after the clamp is unlocked, the clamp automatically rebounds to release a sample, sampling is facilitated, the clamp is located at the periphery of the clamping plate and is convenient to cooperate with the lower clamping surface part, the clamp structure is composed of two semicircular rings and a buckle, the two semicircular rings are fixed by pins and have a hook structure, the buckle and the hook are closely connected, and when the clamp moves, the lower clamping surface part releases and clamps the sample. One side of the opening is provided with an adjustable sliding groove, the upper clamping surface piece is provided with a left adjusting screw and a right adjusting screw, the lower clamping surface piece is provided with a spring locking piece, and the spring locking piece consists of a locking groove and a spring. As another example
The polishing machine for the crystal material with the publication number of CN202498423U comprises a first grinding station, a second 5 grinding station, a polishing station and a clamp capable of adhering the crystal material or the crystal material
The polishing device is transported to a first grinding station, a second grinding station and a transfer mechanism for grinding and polishing processing on the polishing station, wherein the first grinding station is provided with a grinding tool taking diamond as an abrasive, the second grinding station is provided with a sandstone grinding tool, and the polishing station is provided with a polishing tool made of rare earth polishing powder.
However, there are some drawbacks to the above-described clamps: 1. the whole structure is complicated and complicated, the clamping steps of the 02 and clamping devices are complicated, and the clamping firmness is poor; 3. clamping upon clamping
The force is not easy to control, and the polycrystalline diamond wafer substrate slice is easy to clamp.
Disclosure of Invention
The invention discloses a polycrystalline diamond clamp for a spin transfer polishing machine, which is simple in structure and convenient to operate, and aims to solve the problems of complex operation and complex structure of the existing clamp.
The invention adopts the following scheme: a polycrystalline diamond clamp for a spin transfer polishing machine,
including the body, be provided with the boss that has the screw hole on the body, still include: the clamping assembly comprises a first clamping plate, a second clamping plate and a fixing plate fixed on the body, wherein the fixing plate is provided with a positioning wall, and the first clamping plate, the second clamping plate and the fixing plate enclose a clamping position for placing the polycrystalline diamond wafer substrate slice;
the 0 adjusting component comprises a threaded slide rod, an adjusting piece and a fixing piece; the two ends of the other two fixing pieces are respectively hinged to the boss and the second clamping plate so as to connect the adjusting component with the clamping component;
the threaded slide bar is suitable for rotating in the boss, the end part of the threaded slide bar extending into the body is hinged to one ends of the two adjusting parts, the two adjusting parts are symmetrically arranged along the threaded slide bar, and the other ends of the two adjusting parts are respectively hinged to the middle parts of the fixing parts adjacent to the threaded slide bar; the threaded slide bar is configured to be rotatable to control the first clamping plate and the second clamping plate to perform a zoom movement at the clamping location.
Further, the boss is arranged in a U shape, and the first clamping plate and the second clamping plate are respectively connected to two U-shaped arms of the boss.
Further, a hole for hinging the fixing piece is formed in the U-shaped arm, and the threaded hole is formed in the middle of the boss.
Further, one end of the threaded sliding rod extending into the body is connected with a U-shaped sliding block, and the U-shaped sliding block is connected with two adjusting pieces.
Further, a round nut is arranged at one end of the threaded sliding rod extending out of the body.
Further, the U-shaped sliding block is provided with a protruding hole, the threaded sliding rod is arranged in a shape with a large middle and small two ends, and one end of the threaded sliding rod is inserted into the protruding hole to form interference fit with the protruding hole.
Further, the first clamping plate and the second clamping plate are respectively provided with a crescent-shaped first clamping wall and a crescent-shaped second clamping wall which are symmetrically arranged, and the lower clamping wall, the second clamping wall and the positioning wall of the boss are used for clamping the polycrystalline diamond wafer substrate slice together; the through holes arranged on the first clamping plate and the second clamping plate and the threaded holes of the lug boss are positioned on a vertical line.
Further, the body is made of target copper material.
Further, the fixing pieces are parallel to each other, the hinge holes arranged at the two ends of the fixing pieces are positioned on the same horizontal height, and the hinge holes at the left side and the right side are symmetrical to each other.
The invention also provides a clamping method, which uses the polycrystalline diamond clamp for the spin transfer polishing machine, and comprises the following clamping steps:
s1, a threaded slide bar is rotated inwards to push a U-shaped slide block to advance, so that the included angle between the adjusting parts at the left end and the right end connected with the threaded slide bar is gradually reduced, and in the process, the adjusting parts drive a first clamping plate and a second clamping plate to expand outwards;
s2, when the two adjusting parts are parallel to each other, the included angle between the adjusting parts is 0 degrees, the U-shaped sliding block stops advancing, and the first clamping plate and the second clamping plate stop expanding; at the moment, the polycrystalline diamond wafer substrate slice is tightly attached to the positioning wall;
s3, rotating the threaded slide bar outwards to enable the U-shaped slide block to move backwards, so that the included angle of the two adjusting pieces is gradually increased, and the first clamping plate and the second clamping plate are used for clamping the polycrystalline diamond wafer substrate inwards and slowly;
and S4, when the two adjusting pieces form a certain angle, the inner walls of the first clamping plate and the second clamping plate tightly clamp the left end and the right end of the polycrystalline diamond wafer substrate slice.
The beneficial effects are that:
according to the invention, the positioning wall is arranged on the body, the lug boss is arranged at the edge, the U-shaped sliding block is connected with the threaded sliding rod into a whole, and the threaded sliding rod drives the U-shaped sliding block to move so as to realize the relative movement of the first clamping plate and the second clamping plate, so that the polycrystalline diamond wafer substrate slice is clamped; the technical effects that it can bring are as follows: firstly, the polycrystalline diamond wafer substrate slice can be firmly clamped, the damage to the substrate slice is reduced in the clamping process, and meanwhile, the shape and the size of polycrystalline diamond on the substrate slice can be changed; secondly, the clamping effect can be better through a circumferential clamping mode; thirdly, the device is convenient to assemble and disassemble, and the processing efficiency is greatly improved; fourth, through two the contained angle between the regulating part changes, realizes the dismouting, and accurate fixed messenger's polycrystalline diamond wafer substrate piece can not produce and rock, and here polycrystalline diamond wafer substrate piece is changeable, therefore the suitability is strong. The body and the polycrystalline diamond wafer substrate slice can be adsorbed on the workbench together, so that the processing is convenient.
Drawings
FIG. 1 is a schematic view of a polycrystalline diamond table for a spin transfer polisher according to an embodiment of the present invention;
icon: the device comprises a body 1, a first clamping plate 21, a first clamping wall 211, a second clamping plate 22, a second clamping wall 221, a second fixing piece 31, a first fixing piece 32, an adjusting piece 4, a boss 5, a threaded sliding rod 6, a round nut 7, a U-shaped sliding block 8, a positioning pin 9, a polycrystalline diamond wafer substrate slice 10, a fixing plate 11, a threaded hole 51, a head 61, a tail 62 and a protruding hole 81.
Detailed Description
Examples
Referring to fig. 1, this embodiment provides a polycrystalline diamond jig for a spin transfer polishing machine, including a body 1, a boss 5 having a threaded hole 51 is provided on the body 1, and further includes: the clamping assembly comprises a first clamping plate 21, a second clamping plate 22 and a fixing plate 11 fixed on the body 1, wherein the fixing plate 11 is provided with a positioning wall, and the first clamping plate 21, the second clamping plate 22 and the fixing plate 11 enclose a clamping position for placing the polycrystalline diamond wafer substrate slice 10;
the adjusting component comprises a threaded slide bar 6, an adjusting piece 4 and a fixing piece; wherein four fixing pieces are arranged, two ends of two fixing pieces are respectively hinged on the boss 5 and the first clamping plate 21, and two ends of the other two fixing pieces are respectively hinged on the boss 5 and the second clamping plate 22 so as to connect the adjusting component with the clamping component;
the threaded slide bar 6 is suitable for rotating in the boss 5, the end part of the threaded slide bar extending into the body 1 is hinged at one end of the two adjusting parts 4, the two adjusting parts 4 are symmetrically arranged along the threaded slide bar 6, and the other end of the threaded slide bar is respectively hinged at the middle part of the fixing part adjacent to the threaded slide bar; the threaded slide 6 is configured to be rotated to control the first clamping plate 21 and the second clamping plate 22 to perform a zooming movement at the clamping location.
In this embodiment, the jig is adapted to be placed into a spin transfer polisher apparatus for use with polycrystalline diamond placed in the jig being polished in the spin transfer polisher.
In this embodiment, the body 1 may be configured to be circular, and may be made of a stainless steel material or a target copper material, a boss 5 and a fixing plate 11 are disposed on the body 1, an arc-shaped positioning wall is formed on the fixing plate 11, so that the polycrystalline diamond wafer substrate slice 10 is convenient for fixing the position, and the boss 5 is disposed at an edge opposite to the positioning wall. The boss 5 may be provided with a trapezoid, a groove is formed in the inner side of the boss 5 to form a U shape, and symmetrical holes are formed in the U-shaped arms on the left and right sides of the boss to connect the first clamping plate 21 and the second clamping plate 22 through fixing members, and the fixing members, the clamping plates and the boss 5 are hinged through insertion pins. A threaded hole 51 is arranged in the middle of the groove of the boss 5 and is used for being inserted by the threaded slide rod 6, and the external thread of the threaded slide rod 6 is matched with the internal thread of the threaded hole 51. The first clamping plate 21 and the second clamping plate 22 are respectively provided with a first clamping wall 211 and a second clamping wall 221 which are crescent or arc-shaped, the first clamping wall 211 and the second clamping wall 221 are matched with a positioning wall arranged on the boss 5 to clamp the polycrystalline diamond wafer substrate slice, the first clamping plate 21 and the second clamping plate 22 are symmetrically arranged, and in addition, through holes arranged on the first clamping plate 21 and the second clamping plate 22 and threaded holes 51 of the boss 5 are positioned on a vertical line.
The threaded slide bar 6 is arranged in a shape with two small ends and large in the middle, the threaded slide bar comprises a head 61 and a tail 62, external threads are arranged at the head 61 and the tail 62, one end of the threaded slide bar, which is positioned in the body 1, is the tail 62, the tail 62 is connected with a U-shaped slide block 8, the opposite end is the head 61, the head 61 is connected with a round nut 7, a protruding hole 81 is formed in the U-shaped slide block 8 and is in threaded connection with the threaded slide bar 6, and a through hole is formed in the middle of the U-shaped slide block 8 and is used for hinging two adjusting pieces 4 through pins or positioning pins 9. In this embodiment, the threaded sliding rod 6 and the protruding hole 81 form an interference fit.
The adjusting piece 4 is arranged in a long strip shape, two ends of the adjusting piece are provided with hinge holes, and one end of the adjusting piece is hinged in the same through hole of the U-shaped sliding block 8. The mounting is provided with four, and equal parallel arrangement, and the hinge hole site that sets up at mounting both ends is located same horizontal height, and the hinge hole of left and right sides is mutual symmetry. The first clamping plate 21 and the second clamping plate 22 are respectively hinged on the boss 5 through two fixing pieces. The fixing members may be defined as a first fixing member 32 and a second fixing member 31, wherein the left fixing member and the right fixing member close to the adjusting member 4 are used as the first fixing member 32, the fixing member far away from the adjusting member 4 is used as the second fixing member 31, and one end of the adjusting member 4 far away from the U-shaped sliding block 8 is hinged to the middle parts of the left fixing member and the right fixing member 32 close to the U-shaped sliding block 8, so that the fixing members can be driven to rotate by the adjusting member 4, and the expansion and the contraction of the first clamping plate 21 and the second clamping plate 22 are controlled, and the second fixing member 31 plays a role in fixing and balancing moment. The adjusting parts 4 are connected with the U-shaped sliding blocks 8 into a whole through a positioning pin shaft 9, and then the two adjusting parts 4 are respectively connected with fixing parts at the left end and the right end through the positioning pin shaft 9, so that the threaded sliding rod 6, the U-shaped sliding blocks 8, the boss 5, the first clamping plate 21 and the second clamping plate 22 are integrated.
In some embodiments, the body 1 is made of a target copper material, the size of the target copper material may be set to be 200mm, the threaded slide bar 6 and the U-shaped slide block 8 are made of stainless steel materials, the polycrystalline diamond wafer substrate sheet 10 is a 2-inch polycrystalline diamond wafer substrate sheet 10, the substrate sheet is made of silicon carbide or sapphire materials, and the adhesive is a thermosetting adhesive such as yellow wax, hot melt adhesive, and the like. Wherein the thickness of the 2 inch polycrystalline diamond wafer substrate sheet 10 is greater than the height of the first clamping plate 21 and the second clamping plate 22, the polycrystalline diamond thickness is about 8mm, the substrate sheet is 2 inch silicon carbide or sapphire hard material, and the height of the first clamping plate 21 and the second clamping plate 22 is 5mm;
the embodiment of the invention also provides a clamping method, which uses the polycrystalline diamond clamp for the spin transfer polishing machine and comprises the following clamping steps:
s1, the threaded slide bar 6 is rotated inwards to push the U-shaped slide block 8 to advance, so that the included angle between the adjusting parts 4 at the left end and the right end connected with the threaded slide bar is gradually reduced, and in the process, the adjusting parts 4 drive the first clamping plate 21 and the second clamping plate 22 to expand outwards;
s2, when the two adjusting parts 4 are parallel to each other, the included angle between the adjusting parts 4 is 0 degrees, the U-shaped sliding block 8 stops advancing, and the first clamping plate 21 and the second clamping plate 22 stop expanding; at this time, the polycrystalline diamond wafer substrate sheet 10 is tightly attached to the positioning wall;
s3, the threaded slide bar 6 is rotated outwards, the U-shaped slide block 8 moves backwards, the included angle between the two adjusting pieces 4 is gradually increased, and therefore the first clamping plate 21 and the second clamping plate 22 clamp the polycrystalline diamond wafer substrate slice 10 inwards and slowly;
and S4, when the two adjusting pieces 4 form a certain angle, the inner walls of the first clamping plate 21 and the second clamping plate 22 tightly clamp the left end and the right end of the polycrystalline diamond wafer substrate slice 10, and form circumferential clamping with the positioning walls.
The movement of the clamping blocks is controlled by rotating the threaded slide bars 6, so that the clamping plates are controlled to clamp the polycrystalline diamond wafer substrate slice 10. The device can be precisely controlled by rotating the threaded slide rod 6 in threaded connection, so that the clamping force can be conveniently controlled, and the problem that the polycrystalline diamond wafer substrate slice 10 is damaged due to overlarge clamping force is effectively prevented. The problem that the 2-inch polycrystalline diamond wafer substrate slice 10 is displaced in the spin transfer polishing machine processing process and cannot be accurately processed is solved.
The polycrystalline diamond clamp for the spin transfer polishing machine can be directly placed into equipment for use after the polycrystalline diamond clamp is installed, the polycrystalline diamond clamp does not need to be installed in the equipment, and the installation efficiency is improved.
The embodiment of the invention has the following technical effects: firstly, the polycrystalline diamond wafer substrate slice 10 can be firmly clamped, the damage to the substrate slice is reduced in the clamping process, and meanwhile, the shape and the size of polycrystalline diamond on the substrate slice can be changed; secondly, the body 1 and the polycrystalline diamond wafer substrate sheet 10 can be integrated, so that direct processing is facilitated; thirdly, the device is convenient to assemble and disassemble, and the processing efficiency is greatly improved; fourth, the angle between the two adjusting parts 4 is changed to realize disassembly and assembly, so that the polycrystalline diamond wafer substrate sheet 10 is accurately fixed without shaking, and the polycrystalline diamond wafer substrate sheet 10 can be changed, so that the universality is strong. The body 1 and the polycrystalline diamond wafer substrate sheet 10 can be adsorbed on a workbench together, so that the processing is convenient.
It should be understood that: the above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention.
The description of the drawings in the embodiments above illustrates only certain embodiments of the invention and should not be taken as limiting the scope, since other related drawings may be made by those of ordinary skill in the art without the benefit of the inventive faculty.
Claims (10)
1. The utility model provides a polycrystalline diamond anchor clamps for spin change grinds machine, includes the body, be provided with the boss that has the screw hole on the body, its characterized in that still includes: a clamping assembly and an adjusting assembly, wherein,
the clamping assembly comprises a first clamping plate, a second clamping plate and a fixing plate fixed on the body, wherein the fixing plate is provided with a positioning wall, and the first clamping plate, the second clamping plate and the fixing plate enclose a clamping position for placing the polycrystalline diamond wafer substrate slice;
the adjusting component comprises a threaded slide rod, an adjusting piece and a fixing piece; wherein,,
the two ends of the other two fixing pieces are respectively hinged on the boss and the second clamping plate so as to connect the adjusting component with the clamping component;
the threaded slide bar is suitable for rotating in the boss, the end part of the threaded slide bar extending into the body is hinged to one ends of the two adjusting parts, the two adjusting parts are symmetrically arranged along the threaded slide bar, and the other ends of the two adjusting parts are respectively hinged to the middle parts of the fixing parts adjacent to the threaded slide bar; the threaded slide bar is configured to be rotatable to control the first clamping plate and the second clamping plate to perform a zoom movement at the clamping location.
2. The polycrystalline diamond jig for a spin transfer polisher according to claim 1 wherein the boss is provided in a U shape and the first and second clamping plates are attached to two U-shaped arms of the boss, respectively.
3. The polycrystalline diamond jig for a spin transfer polisher according to claim 2 wherein the U-shaped arm is provided with a hole for hinging the fixture and the threaded hole is provided in the middle of the boss.
4. The polycrystalline diamond jig for a spin transfer polishing machine according to claim 1, wherein a U-shaped slider is connected to an end of the threaded slide rod extending into the body, the U-shaped slider connecting the two regulating members.
5. The polycrystalline diamond jig for a spin transfer polisher according to claim 4 wherein the threaded slide bar is provided with a round nut at an end extending out of the body.
6. The polycrystalline diamond jig for a spin transfer polishing machine according to claim 5, wherein the U-shaped slider is provided with a protruding hole, the threaded slide bar is provided in a shape with a middle large end and two small ends, and one end thereof is inserted into the protruding hole to form an interference fit with the protruding hole.
7. The polycrystalline diamond clamp for a spin transfer polishing machine according to claim 1, wherein the first clamping plate and the second clamping plate are respectively provided with a crescent-shaped first clamping wall and a crescent-shaped second clamping wall, and are symmetrically arranged, and the lower clamping wall, the second clamping wall and the positioning wall of the boss are used for clamping the polycrystalline diamond wafer substrate slice together; the through holes arranged on the first clamping plate and the second clamping plate and the threaded holes of the lug boss are positioned on a vertical line.
8. The polycrystalline diamond clamp for a spin transfer polisher according to claim 1 wherein the body is of target copper material.
9. The polycrystalline diamond jig for a spin transfer polishing machine according to claim 1, wherein the fixing members are parallel to each other, hinge holes provided at both ends of the fixing members are positioned at the same level, and hinge holes at both left and right sides are symmetrical to each other.
10. A clamping method, characterized in that the polycrystalline diamond clamp for a spin transfer polishing machine according to any one of claims 1 to 9 comprises the clamping steps of:
s1, a threaded slide bar is rotated inwards to push a U-shaped slide block to advance, so that the included angle between the adjusting parts at the left end and the right end connected with the threaded slide bar is gradually reduced, and in the process, the adjusting parts drive a first clamping plate and a second clamping plate to expand outwards;
s2, when the two adjusting parts are parallel to each other, the included angle between the adjusting parts is 0 degrees, the U-shaped sliding block stops advancing, and the first clamping plate and the second clamping plate stop expanding; at the moment, the polycrystalline diamond wafer substrate slice is tightly attached to the positioning wall;
s3, rotating the threaded slide bar outwards to enable the U-shaped slide block to move backwards, so that the included angle of the two adjusting pieces is gradually increased, and the first clamping plate and the second clamping plate are used for clamping the polycrystalline diamond wafer substrate inwards and slowly;
and S4, when the two adjusting pieces form a certain angle, the inner walls of the first clamping plate and the second clamping plate tightly clamp the left end and the right end of the polycrystalline diamond wafer substrate slice.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211670628.3A CN116000807A (en) | 2022-12-26 | 2022-12-26 | Polycrystalline diamond clamp for spin-transfer polishing machine and clamping method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211670628.3A CN116000807A (en) | 2022-12-26 | 2022-12-26 | Polycrystalline diamond clamp for spin-transfer polishing machine and clamping method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116000807A true CN116000807A (en) | 2023-04-25 |
Family
ID=86020343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211670628.3A Pending CN116000807A (en) | 2022-12-26 | 2022-12-26 | Polycrystalline diamond clamp for spin-transfer polishing machine and clamping method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116000807A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3442011A1 (en) * | 1983-11-18 | 1985-05-30 | S.I.L.L.E.M. Società Italiana Lavorazione Legno e Metalli S.p.A., Mailand/Milano | Machine for the grinding machining of workpieces, in particular for the re-machining of tools |
| CN210757158U (en) * | 2019-08-14 | 2020-06-16 | 张家港巨盛数控设备科技有限公司 | Workpiece clamping mechanism of abrasive belt grinding machine |
| CN210997851U (en) * | 2019-11-26 | 2020-07-14 | 浙江青山钢管有限公司 | Steel pipe inner wall grinding device with clamping function |
| CN212043568U (en) * | 2020-02-13 | 2020-12-01 | 江苏金祺高分子材料科技有限公司 | Anchor clamps are used in digit control machine tool processing |
| CN212044174U (en) * | 2020-03-20 | 2020-12-01 | 苏州斯尔特微电子有限公司 | Clamping mechanism for full-automatic wafer grinding machine |
| CN112692729A (en) * | 2020-12-28 | 2021-04-23 | 华侨大学 | Single crystal diamond clamp for self-rotating grinding and polishing machine and clamping method thereof |
| CN217619946U (en) * | 2022-05-31 | 2022-10-21 | 东港市久方铜业有限公司 | Inflating valve clamping device |
| CN217860469U (en) * | 2022-06-09 | 2022-11-22 | 广东玻仕威玻璃制品有限公司 | Glass bottle bottleneck equipment of polishing |
-
2022
- 2022-12-26 CN CN202211670628.3A patent/CN116000807A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3442011A1 (en) * | 1983-11-18 | 1985-05-30 | S.I.L.L.E.M. Società Italiana Lavorazione Legno e Metalli S.p.A., Mailand/Milano | Machine for the grinding machining of workpieces, in particular for the re-machining of tools |
| CN210757158U (en) * | 2019-08-14 | 2020-06-16 | 张家港巨盛数控设备科技有限公司 | Workpiece clamping mechanism of abrasive belt grinding machine |
| CN210997851U (en) * | 2019-11-26 | 2020-07-14 | 浙江青山钢管有限公司 | Steel pipe inner wall grinding device with clamping function |
| CN212043568U (en) * | 2020-02-13 | 2020-12-01 | 江苏金祺高分子材料科技有限公司 | Anchor clamps are used in digit control machine tool processing |
| CN212044174U (en) * | 2020-03-20 | 2020-12-01 | 苏州斯尔特微电子有限公司 | Clamping mechanism for full-automatic wafer grinding machine |
| CN112692729A (en) * | 2020-12-28 | 2021-04-23 | 华侨大学 | Single crystal diamond clamp for self-rotating grinding and polishing machine and clamping method thereof |
| CN217619946U (en) * | 2022-05-31 | 2022-10-21 | 东港市久方铜业有限公司 | Inflating valve clamping device |
| CN217860469U (en) * | 2022-06-09 | 2022-11-22 | 广东玻仕威玻璃制品有限公司 | Glass bottle bottleneck equipment of polishing |
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