CN115993482A - Accurate zeroing circuit and power detector - Google Patents
Accurate zeroing circuit and power detector Download PDFInfo
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Abstract
The utility model belongs to the technical field of the electron, a accurate zeroing circuit and power detector is disclosed, accurate zeroing circuit is through setting up first resistance, second resistance, third resistance, first integrated operational amplifier, second integrated operational amplifier and voltage regulation module, zeroing process is before power detector detects microwave power's power, by voltage regulation module adjusts the voltage of the homophase input of second integrated operational amplifier so that the output voltage of first integrated operational amplifier's output is zero, thereby eliminate the interference signal that exists in the circuit, with the detection precision of improvement power detector.
Description
Technical Field
The application relates to the technical field of electronics, in particular to an accurate zeroing circuit and a power detector.
Background
The microwave power supply is a device capable of providing stable and accurate microwave energy output, provides a high-frequency and high-power excitation source for semiconductor manufacturing equipment, and is a core component of a plasma cleaning machine, an etching machine and a thin film deposition device. In the operation of microwave power supply with load, need accurate detection microwave power supply's power to the operation of control and monitoring microwave power supply better, current power detector has signal acquisition module, signal processing module and signal output module, but lacks accurate circuit module of zeroing, because the circuit temperature drift or the noise of signal acquisition module lead to the acquisition signal to have the error, need realize the calibration of acquisition signal through zeroing, consequently, the output voltage that current power detector detected is inaccurate, has interference signals such as temperature drift, noise.
In view of the above problems, no effective technical solution is currently available.
Disclosure of Invention
An object of the present application is to provide a precise zeroing circuit and a power detector, through which an interference signal can be eliminated to improve the detection precision of the power detector.
In a first aspect, the present application provides an accurate zeroing circuit for use in a power detector, comprising: the first resistor, the second resistor, the third resistor, the first integrated operational amplifier, the second integrated operational amplifier and the voltage regulating module;
the inverting input end of the first integrated operational amplifier is connected with one end of the first resistor, the other end of the first resistor is used for receiving an input signal, the output end of the first integrated operational amplifier is connected with one end of the second resistor and is used for outputting a signal, and the other end of the second resistor is connected between the inverting input end of the first integrated operational amplifier and the first resistor;
the output end of the second integrated operational amplifier is connected with one end of the third resistor, the other end of the third resistor is grounded, the non-inverting input end of the first integrated operational amplifier and the inverting input end of the second integrated operational amplifier are both connected between the third resistor and the output end of the second integrated operational amplifier, the voltage regulating module is connected with the non-inverting input end of the second integrated operational amplifier, and the voltage regulating module is used for regulating the voltage of the non-inverting input end of the second integrated operational amplifier before the power detector detects the power of the microwave power supply so that the output voltage of the output end of the first integrated operational amplifier is zero.
According to the power detection circuit, the first resistor, the second resistor, the third resistor, the first integrated operational amplifier, the second integrated operational amplifier and the voltage regulation module are arranged, the voltage of the in-phase input end of the second integrated operational amplifier is regulated by the voltage regulation module before the power detector detects the power of the microwave power supply, so that the output voltage of the output end of the first integrated operational amplifier is zero, interference signals existing in a circuit are eliminated, and the detection precision of the power detector is improved.
Preferably, the first resistance and the second resistance are the same.
According to the zero-setting circuit, the first resistor and the second resistor are the same, so that the calculation formula of zero setting is simplified, and the difficulty of zero setting is reduced.
Preferably, the voltage regulating module comprises a resistance regulating module and a current regulating module, the non-inverting input end of the second integrated operational amplifier and the current regulating module are both connected with one end of the resistance regulating module, the other end of the resistance regulating module is grounded, and the current regulating module is used for providing constant current for the resistance regulating module.
Preferably, the resistance adjusting module includes a plurality of fourth resistors, each fourth resistor is connected in series in turn, and each fourth resistor is connected in parallel with a switch, the switch shorts out the corresponding fourth resistor when closed, and the resistance value of the fourth resistor satisfies:
；
in the method, in the process of the invention,
is->
Resistance value of fourth resistor, +.>
Is a preset constant.
Preferably, the number of the fourth resistors is 7, and the resistance values of the fourth resistors are respectively: 1 omega, 2 omega, 4 omega, 8 omega, 16 omega, 32 omega, 64 omega.
Preferably, the current regulation module comprises a constant current source.
Preferably, the current regulation module includes a plurality of constant current sources, each for providing a current of a different current value to the resistance regulation module.
Preferably, the number of the constant current sources is 4, and the current value of each constant current source is 1mA, -1mA, 10mA and-10 mA respectively.
According to the voltage regulation device, 4 constant current sources with different current values are arranged, so that voltage regulation of different orders of magnitude of the voltage regulation module can be met, and the accuracy of output voltage zeroing is improved.
In a second aspect, the application provides a power detector for detecting the power of a microwave power supply, including signal acquisition module, data processing module and signal output module, still include signal calibration module, signal calibration module includes the accurate zero setting circuit of arbitrary above-mentioned, signal acquisition module signal calibration module data processing module with signal output module connects gradually, signal acquisition module is used for gathering microwave signal and will microwave signal turns into voltage signal output to signal calibration module, signal calibration module is used for the calibration voltage signal, data processing module is used for carrying out square proportion processing to the voltage signal after the calibration and by signal output module output.
Preferably, the signal acquisition module comprises a sampling circuit, a first capacitor, an RF detector, a fifth resistor and a first amplifier which are sequentially connected.
The beneficial effects are that:
according to the accurate zero setting circuit and the power detector, the inverting input end of the first integrated operational amplifier is connected with one end of the first resistor, the other end of the first resistor is used for receiving an input signal, the output end of the first integrated operational amplifier is connected with one end of the second resistor and is used for outputting a signal, and the other end of the second resistor is connected between the inverting input end of the first integrated operational amplifier and the first resistor; the output end of the second integrated operational amplifier is connected with one end of the third resistor, the other end of the third resistor is grounded, the non-inverting input end of the first integrated operational amplifier and the inverting input end of the second integrated operational amplifier are both connected between the third resistor and the output end of the second integrated operational amplifier, the voltage regulating module is connected with the non-inverting input end of the second integrated operational amplifier, and the voltage regulating module is used for regulating the voltage of the non-inverting input end of the second integrated operational amplifier before the power detector detects the power of the microwave power supply so that the output voltage of the output end of the first integrated operational amplifier is zero, thereby eliminating interference signals and improving the detection precision of the power detector.
Drawings
Fig. 1 is a schematic diagram of a precise zeroing circuit provided in the present application.
Fig. 2 is a schematic structural diagram of a power detector provided in the present application.
The reference numerals indicate R10 and a first resistor; r20, second resistance; r30, third resistor; u1, a first integrated operational amplifier; u2, a second integrated operational amplifier; r40, fourth resistor; s1, a switch; 700. a constant current source; 701. a change-over switch; 800. a microwave power supply; 801. a signal acquisition module; 802. a signal calibration module; 8021. an accurate zeroing circuit; 803. a data processing module; 804. a signal output module; 8011. a sampling circuit; c1, a first capacitor; 8012. an RF detector; r50, fifth resistance; r60, sixth resistance; r70, seventh resistance; 8013. a first amplifier; 8031. an AD converter; 8032. an MCU; 8033. a DA converter; 8041. and stabilizing the output circuit.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, fig. 1 is a schematic diagram of an accurate zeroing circuit for a power detector, which includes: the first resistor R10, the second resistor R20, the third resistor R30, the first integrated operational amplifier U1, the second integrated operational amplifier U2 and the voltage regulating module;
the inverting input end of the first integrated operational amplifier U1 is connected with one end of a first resistor R10, the other end of the first resistor R10 is used for receiving an input signal, the output end of the first integrated operational amplifier U1 is connected with one end of a second resistor R20 and is used for outputting a signal, and the other end of the second resistor R20 is connected between the inverting input end of the first integrated operational amplifier U1 and the first resistor R10;
the output end of the second integrated operational amplifier U2 is connected with one end of the third resistor R30, the other end of the third resistor R30 is grounded, the non-inverting input end of the first integrated operational amplifier U1 and the inverting input end of the second integrated operational amplifier U2 are both connected between the third resistor R30 and the output end of the second integrated operational amplifier U2, the voltage regulating module is connected with the non-inverting input end of the second integrated operational amplifier U2, and the voltage regulating module is used for regulating the voltage of the non-inverting input end of the second integrated operational amplifier U2 before the power detector detects the power of the microwave power supply 800 so that the output voltage of the output end of the first integrated operational amplifier U1 is zero.
Specifically, the voltage signal in the circuit of the power detector is the useful signal V representing the microwave before reaching the MCU8032, but in actual work, there is an interference signal Δv superimposed on the useful signal, i.e. the signal actually reaching the MCU8032 is v+Δv, so the function of the accurate zeroing circuit 8021 provided in the present application is to eliminate the interference signal Δv, i.e. to provide a- Δv signal superimposed on the original signal, so that the signal after passing through the accurate zeroing circuit 8021 is ensured to be the useful signal (i.e. v+Δv- Δv=v); the actual zeroing process of the accurate zeroing circuit 8021 is: before the power detector detects the power of the microwave power supply 800, that is, when the actual output power of the microwave power supply 800 is zero, the accurate zeroing circuit 8021 detects the interference signal Δv (that is, when the input signal at the inverting input end of the first integrated operational amplifier U1 is Δv), the voltage at the non-inverting input end of the second integrated operational amplifier U2 is adjusted to make the output voltage at the output end of the first integrated operational amplifier U1 be zero (that is, the signal of- Δv is set out by the accurate zeroing circuit 8021), and then when the microwave power supply 800 has power output, the accurate zeroing circuit 8021 of the power detector keeps the working state before the state of the voltage regulating module is kept unchanged, so that the interference signal is eliminated, and the detection precision of the power detector is improved.
From the accurate zeroing circuit 8021, it is possible to obtain:
;wherein (1)>
Is the input voltage of the fine zeroing circuit 8021, < >>
Is the output voltage of the fine zeroing circuit 8021, < >>
Is the voltage at the inverting input of the first integrated operational amplifier U1, < >>
Is the resistance value of the first resistor R10, < >>
Is the resistance value of the second resistor R20, reduced +.>
Let->
I.e.
Simplify->
And because of
I.e. +.>
By setting->
The value of (2) can make the output voltage after passing through the accurate zero setting circuit 8021 be zero, < ->
Is the voltage at the non-inverting input of the second integrated operational amplifier U2.
The third resistor R30 is a current limiting resistor, and from the perspective of protecting the precise wither circuit and reducing the introduced noise, the resistance value of the third resistor R30 should be selected as far as possible: the voltage at the non-inverting input of the second integrated operational amplifier U2 is transmitted to the non-inverting input of the first integrated operational amplifier U1 without distortion.
In some embodiments, the first resistor R10 and the second resistor R20 are the same.
Specifically, the first resistor R10 and the second resistor R20 are set to be the same, so that a zeroing calculation formula is simplified, and zeroing difficulty is reduced. For example, formula
Can be simplified as: />
Therefore, as long as the voltage at the inverting input terminal of the first integrated operational amplifier U1 is known, the +.>
Is not required to be calculated in a complex manner,thereby improving the calculation efficiency.
In some embodiments, the voltage adjusting module includes a resistance adjusting module and a current adjusting module, the non-inverting input end of the second integrated operational amplifier U2 and the current adjusting module are both connected with one end of the resistance adjusting module, the other end of the resistance adjusting module is grounded, and the current adjusting module is used for providing constant current for the resistance adjusting module.
Specifically, the current adjusting module provides constant current for the resistance adjusting module, and according to the resistance provided by the resistance adjusting module, the voltage of the voltage adjusting module can be obtained and used as the voltage of the non-inverting input end of the second integrated operational amplifier U2, so that the output voltage of the output end of the first integrated operational amplifier U1 is zero.
In some embodiments, the resistance adjustment module includes a plurality of fourth resistors R40, each of the fourth resistors R40 is serially connected in sequence, and each of the fourth resistors R40 is connected in parallel with a switch S1, the switch S1 shorts the corresponding fourth resistor R40 when closed, and the resistance value of the fourth resistor R40 satisfies:
；
in the method, in the process of the invention,
is->
Resistance value of fourth resistor R40, < >>
Is a preset constant.
Specifically, as shown in fig. 1, by providing a plurality of fourth resistors R40 and connecting each of the fourth resistors R40 in parallel with a switch S1, the total resistance of the resistance adjustment module can be changed by opening or closing the switch S1, wherein
Is a preset constant, and can be specifically selected according to practical needs, without limitation.
According to
For the case of n fourth resistors R40, by controlling the on-off of each switch S1, the total resistance of the resistance adjustment module can be realized from +.>
Is changed by a step length of +.>
For example, a +>
If 1 Ω and n=4, the total resistance of the resistance adjustment module can be any one of 0 Ω, 1 Ω, 2 Ω, and 3 Ω … Ω by adjusting the on/off state of each switch S1, where if all the switches S1 are closed, the total resistance is 0 Ω; if only the switch S1 corresponding to the first fourth resistor is disconnected, the total resistor is 1 omega; if only the switch S1 corresponding to the second resistor and the fourth resistor is disconnected, the total resistor is 2 omega; if the switch S1 corresponding to the first fourth resistor and the second fourth resistor is disconnected, the total resistance is 3 omega; if only the switch S1 corresponding to the third resistor and the fourth resistor is disconnected, the total resistor is 4Ω; if only the switch S1 corresponding to the first fourth resistor and the third fourth resistor is disconnected, the total resistance is 5 omega; if only the switches S1 corresponding to the first fourth resistor, the second fourth resistor and the third fourth resistor are all disconnected, the total resistance is 7Ω; and so on. It can be seen that the above structure can realize the resistance adjusting module to +.>
The equidistant adjustment of the resistance for the step size, in combination with the constant current, can be achieved for the voltage at the non-inverting input of the second integrated operational amplifier U2 (the step size depends on +.>
And constant current) by selecting the appropriate +.>
And constant current, canHigh-precision regulation of the voltage at the non-inverting input of the second integrated operational amplifier U2 is achieved.
In some embodiments, the number of the fourth resistors R40 is 7, and the resistance values of the fourth resistors R40 are respectively: 1 omega, 2 omega, 4 omega, 8 omega, 16 omega, 32 omega, 64 omega.
Specifically, as shown in fig. 1, when the switches S1 corresponding to the respective fourth resistors R40 are all turned off, the number of the fourth resistors R40 is 7, and
and if the resistance is 1 omega, the resistance values of the first fourth resistor R40 to the seventh fourth resistor R40 are 1 omega, 2 omega, 4 omega, 8 omega, 16 omega, 32 omega and 64 omega respectively, so that the total resistance of the resistance adjusting module can be adjusted in the range of 0 omega-127 omega.
In some embodiments, the current regulation module includes a constant current source 700.
Specifically, by providing a constant current source 700, the formula is
Wherein->
Is the total resistance of the resistance adjustment module, +.>
Is the current supplied by the constant current source 700, so that the voltage level at the non-inverting input terminal of the second integrated operational amplifier U2 can be calculated to make the output voltage at the output terminal of the first integrated operational amplifier U1 zero.
In some embodiments, the current regulation module includes a plurality of constant current sources 700, each constant current source 700 for providing current of a different current value to the resistance regulation module.
Specifically, by providing a plurality of constant current sources 700, the voltage range of the non-inverting input terminal of the second integrated operational amplifier U2 can be satisfied, wherein as shown in fig. 1, a changeover switch 701 can be provided, and the required constant current sources 700 are connected through the changeover switch 701, thereby supplying the resistance adjustment module with a current of a required current value.
In some embodiments, the number of constant current sources 700 is 4, and the current values of each constant current source 700 are 1mA, -1mA, 10mA, and-10 mA, respectively.
Specifically, by setting the constant current source 700 of 4 different current values, according to
If the total resistance of the resistance-adjusting module is in the range of 0 omega-127 omega, if a constant current source 700 of 1mA is selected, then +.>
The voltage regulation range of (2) is 0mV-127 mV, if a constant current source 700 of-1 mA is selected>
The voltage regulation range of (-127 mV) -0mV, thereby realizing voltage trimming with the variation of 1 mV; if a constant current source 700 of 10mA is selected, +.>
The voltage regulation range of (2) is 0mV-1270 mV, if a constant current source 700 of-10 mA is selected>
The voltage regulation range of the voltage regulation module is (-1270 mV) -0mV, so that the voltage coarse regulation is realized by the variation of 10mV, and therefore, the voltage regulation of different orders of the voltage regulation module can be satisfied, and the output voltage zero setting accuracy is improved.
The number of constant current sources 700 and the specific current value are not limited thereto, and may be set according to actual adjustment accuracy requirements.
From the above, the accurate zeroing circuit 8021 provided in the present application, through setting the first resistor R10, the second resistor R20, the third resistor R30, the first integrated operational amplifier U1, the second integrated operational amplifier U2 and the voltage adjusting module, the zeroing process is to adjust the voltage of the non-inverting input end of the second integrated operational amplifier U2 by the voltage adjusting module before the power detector detects the power of the microwave power supply 800, so that the output voltage of the output end of the first integrated operational amplifier U1 is zero, thereby eliminating the interference signal existing in the circuit, and improving the detection accuracy of the power detector.
Referring to fig. 2, the present application provides a power detector for detecting power of a microwave power supply 800, including a signal acquisition module 801, a data processing module 803 and a signal output module 804, and further including a signal calibration module 802, where the signal calibration module 802 includes any one of the above-mentioned accurate zeroing circuits 8021, and the signal acquisition module 801, the signal calibration module 802, the data processing module 803 and the signal output module 804 are sequentially connected, and the signal acquisition module 801 is used for acquiring a microwave signal and converting the microwave signal into a voltage signal and outputting the voltage signal to the signal calibration module 802, and the signal calibration module 802 is used for calibrating the voltage signal, and the data processing module 803 is used for square-scale processing the calibrated voltage signal and outputting the voltage signal by the signal output module 804.
The working principle of the power detector is that three probes are used for respectively detecting electric field intensities of three points (representing standing wave information formed by microwaves in the waveguide) at equal intervals in a wavelength range of the microwaves in the waveguide, and the electric field intensities are converted into three voltage values to be output (fed back to a main control system of the microwave power supply 800 for subsequent calculation of microwave signal parameters) through processing of each module of the power detector.
Specifically, since the square of power and voltage is a linear relationship, the voltage signal collected initially is transformed into a voltage signal in a linear range corresponding to the output power range of the microwave power supply 800 through square proportion processing, and the functions thereof mainly have two aspects: 1. the purpose of collecting three voltage signals is to calculate power parameters, the three voltage signals are output by a power detector and then transmitted to a main control system of the microwave power supply 800, the main control system of the microwave power supply 800 further calculates by an algorithm, the three voltage signals participate in calculation in a square mode in the algorithm, and square proportion processing can simplify calculation of the main control system; 2. when the microwave power supply 800 works, the calibration and calibration of the output power of the microwave power supply 800 are facilitated.
In some embodiments, the signal acquisition module 801 includes a sampling circuit 8011, a first capacitor C1, an RF detector 8012, a fifth resistor R50, and a first amplifier 8013, connected in sequence.
Specifically, by setting the sampling circuit 8011, the first capacitor C1, the RF detector 8012, the fifth resistor R50 and the first amplifier 8013 which are sequentially connected, wherein the sampling circuit 8011 detects a first voltage signal output by the microwave power supply 800, and the sampling circuit 8011 attenuates the first voltage signal to a certain range, so that a second voltage signal range value output by the sampling circuit 8011 is within an operating interval of the RF detector 8012; the RF detector 8012 converts the effective value of the input second voltage signal into a direct current voltage signal and outputs the direct current voltage signal; the first amplifier 8013 scales the dc voltage signal in order to bring the output voltage of the signal acquisition module 801 within a desired range. For three voltage signals, the signal acquisition modules 801 are correspondingly provided with three signal acquisition modules 801, and each signal acquisition module 801 comprises a sampling circuit 8011, a first capacitor C1, an RF detector 8012, a fifth resistor R50 and a first amplifier 8013. Correspondingly, the signal calibration module 802 includes three fine zeroing circuits 8021.
In some embodiments, the data processing module 803 includes an AD converter 8031, an MCU8032, and a DA converter 8033 connected in sequence for square-scale processing of the calibrated voltage signal.
The signal output module 804 includes a stable output circuit 8041, which is conventional in the art and is not particularly limited herein. For three voltage signals, the signal output module 804 is correspondingly provided with three stable output circuits 8041.
In some embodiments, a sixth resistor R60 is disposed between the signal acquisition module 801 and the signal calibration module 802 (a sixth resistor R60 is disposed between each signal acquisition module 801 and the corresponding accurate zeroing circuit 8021), a seventh resistor R70 is disposed between the signal calibration module 802 and the data processing module 803 (a seventh resistor R70 is disposed between each accurate zeroing circuit 8021 and the data processing module 803), and the sixth resistor R60 and the seventh resistor R70 are all current limiting functions for protecting circuit chips in the signal calibration module 802 and the data processing module 803, respectively.
From the above, in the power detector provided by the present application, by setting the signal calibration module 802, the accurate zeroing circuit 8021 in the signal calibration module 802 eliminates the interference signal generated in the circuit, so as to improve the detection precision of the power detector, and the power detector performs closed loop feedback to the microwave power supply 800, so that the stability of the output power of the microwave power supply 800 is improved.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
Further, the units described as separate units may or may not be physically separate, and units displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
Furthermore, functional modules in various embodiments of the present application may be integrated together to form a single portion, or each module may exist alone, or two or more modules may be integrated to form a single portion.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above is only an example of the present application, and is not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims (10)
1. An accurate zeroing circuit for a power detector, comprising: the first resistor R10, the second resistor R20, the third resistor R30, the first integrated operational amplifier U1, the second integrated operational amplifier U2 and the voltage regulating module;
the inverting input end of the first integrated operational amplifier U1 is connected with one end of the first resistor R10, the other end of the first resistor R10 is used for receiving an input signal, the output end of the first integrated operational amplifier U1 is connected with one end of the second resistor R20 and is used for outputting a signal, and the other end of the second resistor R20 is connected between the inverting input end of the first integrated operational amplifier U1 and the first resistor R10;
the output end of the second integrated operational amplifier U2 is connected with one end of the third resistor R30, the other end of the third resistor R30 is grounded, the non-inverting input end of the first integrated operational amplifier U1 and the inverting input end of the second integrated operational amplifier U2 are both connected between the third resistor R30 and the output end of the second integrated operational amplifier U2, the voltage regulating module is connected with the non-inverting input end of the second integrated operational amplifier U2, and the voltage regulating module is used for regulating the voltage of the non-inverting input end of the second integrated operational amplifier U2 before the power detector detects the power of the microwave power supply 800 so that the output voltage of the output end of the first integrated operational amplifier U1 is zero.
2. The precision zeroing circuit of claim 1, wherein the first resistor R10 and the second resistor R20 are the same.
3. The precise zeroing circuit according to claim 1, wherein the voltage regulating module comprises a resistance regulating module and a current regulating module, the non-inverting input end of the second integrated operational amplifier U2 and the current regulating module are both connected with one end of the resistance regulating module, the other end of the resistance regulating module is grounded, and the current regulating module is used for providing constant current for the resistance regulating module.
4. The precise zero setting circuit according to claim 3, wherein the resistance adjustment module comprises a plurality of fourth resistors R40, each of the fourth resistors R40 is serially connected in sequence, each of the fourth resistors R40 is connected in parallel with a switch S1, the switch S1 shorts the corresponding fourth resistor R40 when closed, and the resistance value of the fourth resistor R40 satisfies:
；
in the method, in the process of the invention,
is->
Resistance value of fourth resistor R40, < >>
Is a preset constant.
5. The precise zeroing circuit according to claim 4, wherein the number of the fourth resistors R40 is 7, and the resistance values of the fourth resistors R40 are respectively: 1 omega, 2 omega, 4 omega, 8 omega, 16 omega, 32 omega, 64 omega.
6. A precision zeroing circuit according to claim 3, characterized in that the current regulation module comprises a constant current source (700).
7. The precision zeroing circuit of claim 3, wherein the current adjustment module comprises a plurality of constant current sources (700), each constant current source (700) for providing a current of a different current value to the resistance adjustment module.
8. The precise zeroing circuit according to claim 7, wherein the number of the constant current sources (700) is 4, and the current values of the constant current sources (700) are respectively 1mA, -1mA, 10mA and-10 mA.
9. A power detector for detecting the power of a microwave power supply (800), comprising a signal acquisition module (801), a data processing module (803) and a signal output module (804), characterized in that the power detector further comprises a signal calibration module (802), the signal calibration module (802) comprises the accurate zeroing circuit (8021) according to any one of claims 1-8, the signal acquisition module (801), the signal calibration module (802), the data processing module (803) and the signal output module (804) are sequentially connected, the signal acquisition module (801) is used for acquiring a microwave signal and converting the microwave signal into a voltage signal for outputting to the signal calibration module (802), the signal calibration module (802) is used for calibrating the voltage signal, and the data processing module (803) is used for square-scale processing the calibrated voltage signal and outputting by the signal output module (804).
10. The power detector of claim 9, wherein the signal acquisition module (801) comprises a sampling circuit (8011), a first capacitor C1, an RF detector (8012), a fifth resistor R50, and a first amplifier (8013) connected in sequence.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310283982.9A CN115993482A (en) | 2023-03-22 | 2023-03-22 | Accurate zeroing circuit and power detector |
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| CN202310283982.9A CN115993482A (en) | 2023-03-22 | 2023-03-22 | Accurate zeroing circuit and power detector |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104502688A (en) * | 2015-01-04 | 2015-04-08 | 上海交通大学 | DC (direct current) variable low-frequency envelope digital detector |
| CN205248099U (en) * | 2015-12-31 | 2016-05-18 | 常熟开关制造有限公司(原常熟开关厂） | After -current transformer |
| CN205333664U (en) * | 2016-01-08 | 2016-06-22 | 苏州长光华医生物医学工程有限公司 | Plug -hole monitoring devices of chemiluminiscence tester ware |
| CN206023713U (en) * | 2016-09-05 | 2017-03-15 | 深圳市金威源科技股份有限公司 | A kind of single supply op zeroing circuit and amplifying circuit |
-
2023
- 2023-03-22 CN CN202310283982.9A patent/CN115993482A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104502688A (en) * | 2015-01-04 | 2015-04-08 | 上海交通大学 | DC (direct current) variable low-frequency envelope digital detector |
| CN205248099U (en) * | 2015-12-31 | 2016-05-18 | 常熟开关制造有限公司(原常熟开关厂） | After -current transformer |
| CN205333664U (en) * | 2016-01-08 | 2016-06-22 | 苏州长光华医生物医学工程有限公司 | Plug -hole monitoring devices of chemiluminiscence tester ware |
| CN206023713U (en) * | 2016-09-05 | 2017-03-15 | 深圳市金威源科技股份有限公司 | A kind of single supply op zeroing circuit and amplifying circuit |
Non-Patent Citations (1)
| Title |
|---|
| 马忠丽 等: "《单片机&DSP外围数字IC技术手册 第2版》", 北京航空航天大学出版社》, pages: 211 - 212 * |
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