CN115976497A - Fault alarm processing method based on MPCVD equipment and related equipment - Google Patents
Fault alarm processing method based on MPCVD equipment and related equipment Download PDFInfo
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Abstract
The invention discloses a fault alarm processing method based on MPCVD equipment and related equipment, relating to the technical field of fault alarm, wherein the method comprises the following steps: acquiring data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters or not, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters; if the data of the emergency shutdown parameters exceed the data range of preset working parameters, alarming and automatic emergency shutdown operation are carried out; and if the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing. The method judges whether the MPCVD equipment is abnormal or not by monitoring the working parameter data of the MPCVD equipment in real time, and correspondingly processes the alarm degrees corresponding to different working parameter data, thereby ensuring that an operator can timely process the abnormal condition of the MPCVD equipment and being beneficial to the normal growth of the diamond.
Description
Technical Field
The invention relates to the technical field of fault alarm, in particular to a fault alarm processing method, a fault alarm processing system, a fault alarm processing terminal and a computer readable storage medium based on MPCVD equipment.
Background
The MPCVD (Microwave Plasma Chemical Vapor Deposition) equipment is called Microwave Plasma Chemical Vapor Deposition equipment, and the MPCVD equipment is used as excellent diamond cultivation equipment. The plasma is formed on the diamond substrate in a spherical shape, and the substrate can be heated to a certain temperature by utilizing the high temperature of the plasma, so that the basic growth environment for the growth of the diamond is created.
The MPCVD apparatus may deposit tool-grade diamond films, heat sink-grade diamond films, optical-grade diamond films, and the like at rates on the order of micrometers per hour. However, in the growth process of diamond, the growth conditions are very harsh, the parameters of the related MPCVD equipment are complicated, and when the MPCVD equipment is in an abnormal condition, equipment operators cannot timely process the diamond, so that the equipment is not beneficial to maintaining a specific growth environment required by the growth of the diamond, and in case of serious conditions, the MPCVD equipment is damaged.
Accordingly, the prior art is yet to be improved and developed.
Disclosure of Invention
The invention mainly aims to provide a fault alarm processing method, a fault alarm processing system, a fault alarm processing terminal and a computer readable storage medium based on MPCVD equipment, and aims to solve the problem that in the prior art, an operator cannot timely know and process an MPCVD equipment after the MPCVD equipment is in an abnormal condition.
In order to achieve the above object, the present invention provides a fault alarm processing method based on an MPCVD apparatus, comprising the steps of:
acquiring data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters or not, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters;
if the data of the emergency shutdown parameters exceed the data range of preset working parameters, alarming and automatic emergency shutdown operation are carried out;
and if the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing.
Optionally, the method for processing a fault alarm based on an MPCVD device, wherein the obtaining data of a current operating parameter of the MPCVD device, and determining whether the data of the current operating parameter exceeds a data range of a preset operating parameter, the current operating parameter includes an emergency shutdown parameter and a manual regulation parameter, and the method includes:
establishing a storage database, wherein the storage database comprises working parameters of preset damage degrees and data ranges of the preset working parameters;
receiving working parameters of the MPCVD equipment acquired by various sensors, and classifying the working parameters according to the damage degree of the working parameters to the MPCVD equipment;
taking the working parameters with the damage degree to the MPCVD equipment exceeding the preset damage degree as emergency shutdown parameters;
and taking the working parameters of which the damage degree to the MPCVD equipment does not exceed the preset damage degree as manual regulation parameters.
Optionally, the method for processing a fault alarm based on an MPCVD device, wherein the obtaining data of a current working parameter of the MPCVD device, and determining whether the data of the current working parameter exceeds a data range of a preset working parameter, the current working parameter includes an emergency shutdown parameter and a manual regulation parameter, and specifically includes:
receiving data of current working parameters of the MPCVD equipment acquired by various sensors, and comparing the data of the current working parameters with a data range of preset working parameters in sequence;
judging whether the data of the emergency stop parameters exceed the data range of preset working parameters or not;
and judging whether the data of the manual regulation and control parameters exceed the data range of preset working parameters.
Optionally, the method for processing a fault alarm based on MPCVD devices, wherein if the data of the emergency stop parameters exceeds the data range of preset working parameters, performing alarm and automatic emergency stop operations specifically includes:
when the data of the emergency shutdown parameters are judged not to exceed the data range of the preset working parameters, continuously detecting whether the data of the next emergency shutdown parameters exceed the data range of the preset working parameters or not until all the emergency shutdown parameters are completely detected, and monitoring whether the data of the detected emergency shutdown parameters exceed the data range of the preset working parameters or not in real time in the whole production process;
and when the data of the emergency stop type parameters exceed the data range of preset working parameters, alarming and controlling the MPCVD equipment to carry out automatic emergency stop operation.
Optionally, the method for processing a fault alarm based on an MPCVD device, wherein if the data of the manual regulation and control parameter exceeds a data range of a preset working parameter, the method for processing a fault alarm based on an MPCVD device performs alarm and prompts an operator to perform manual processing, and specifically includes:
when the data of the manual regulation and control parameters are judged not to exceed the data range of the preset working parameters, continuously detecting whether the data of the next manual regulation and control parameter exceeds the data range of the preset working parameters or not until all the manual regulation and control parameters are completely detected, and monitoring whether the data of the detected manual regulation and control parameters exceed the data range of the preset working parameters or not in real time in the whole production process;
and when the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing.
Optionally, the MPCVD apparatus-based fault alarm processing method, wherein the manual processing by the operator includes: and manually releasing the alarm or adjusting the data range of the preset working parameters or manually stopping the machine.
Optionally, the MPCVD apparatus-based malfunction alert processing method, wherein the plurality of sensors includes a contact sensor, a pressure sensor, and a temperature sensor.
In addition, in order to achieve the above object, the present invention further provides a MPCVD apparatus-based fault alarm processing system, wherein the MPCVD apparatus-based fault alarm processing system includes:
the device comprises a parameter acquisition module, a parameter comparison module and a parameter comparison module, wherein the parameter acquisition module is used for acquiring data of current working parameters of the MPCVD equipment and judging whether the data of the current working parameters exceed a data range of preset working parameters or not, and the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters;
the emergency shutdown module is used for alarming and automatically performing emergency shutdown operation if the data of the emergency shutdown parameters exceed the data range of preset working parameters;
and the manual regulation and control module is used for alarming and prompting an operator to perform manual processing if the data of the manual regulation and control parameters exceed the data range of preset working parameters.
In addition, to achieve the above object, the present invention further provides a terminal, wherein the terminal includes: the fault alarm processing program based on the MPCVD equipment comprises a memory, a processor and a fault alarm processing program based on the MPCVD equipment, wherein the fault alarm processing program based on the MPCVD equipment is stored on the memory and can run on the processor, and when being executed by the processor, the fault alarm processing program based on the MPCVD equipment realizes the steps of the fault alarm processing method based on the MPCVD equipment.
In addition, to achieve the above object, the present invention also provides a computer readable storage medium, wherein the computer readable storage medium stores a MPCVD apparatus-based fault alarm processing program, and the MPCVD apparatus-based fault alarm processing program, when executed by a processor, implements the steps of the MPCVD apparatus-based fault alarm processing method as described above.
Acquiring data of current working parameters of MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters; if the data of the emergency shutdown parameters exceed the data range of preset working parameters, alarming and automatic emergency shutdown operations are carried out; and if the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing. The method judges whether the MPCVD equipment is abnormal or not by monitoring the working parameter data of the MPCVD equipment in real time, and selects to automatically stop the equipment or indicate an operator to manually regulate and control the alarm degree corresponding to different working parameter data so that the operator can timely handle the abnormal condition of the MPCVD equipment, thereby being beneficial to maintaining a specific growth environment required by diamond growth and protecting the MPCVD equipment.
Drawings
FIG. 1 is a flow chart of a preferred embodiment of the fault alarm processing method of the MPCVD based device of the present invention;
FIG. 2 is a schematic diagram of a system parameter setting interface in a preferred embodiment of the MPCVD-based fault alarm processing method of the present invention;
FIG. 3 is a schematic diagram of a system alarm logging interface in the preferred embodiment of the MPCVD-based fault alarm processing method of the present invention;
FIG. 4 is a block diagram of a preferred embodiment of the MPCVD apparatus based fault alarm processing system of the present invention;
fig. 5 is a block diagram of a preferred embodiment of the terminal of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1, the fault alarm processing method based on the MPCVD apparatus according to the preferred embodiment of the present invention includes the following steps:
s10, acquiring data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters.
Wherein, the full-automatic MPCVD chemical vapor deposition equipment is multipurpose, high-stability and high-vacuum microwave plasma comprehensive experiment and processing equipment which is designed and developed according to the specific requirements of users. The MPCVD equipment has the characteristics of advanced performance, complete functions, reasonable structure, convenient use, safety, reliability, beautiful appearance and the like, and is particularly suitable for the high and new technology fields of Chemical Vapor Deposition (CVD) of materials such as diamond and the like, material surface treatment, modification and the like.
The MPCVD equipment is provided with a display screen, a warning light and a loudspeaker.
The display screen has the functions that: the microwave incident and reflected power can be displayed in real time, an operator can operate the screen to control the MPCVD equipment and prompt warning information, and the process flow can be controlled on the display screen in real time.
The warning light function: and flashing when the working parameter data exceeds the data range of the preset working parameters to prompt the MPCVD equipment to have faults.
The horn function is as follows: as a prompt medium for the fact that the MPCVD equipment is not in the sight of an operator, when the MPCVD equipment fails, an alarm is given in a voice mode.
Specifically, a storage database is established, wherein the storage database comprises working parameters of preset damage degrees and data ranges of the preset working parameters.
The preset damage degree refers to an influence degree on the MPCVD equipment when the working parameter data exceeds the data range of the preset working parameter under the normal working condition, and the working parameter of the MPCVD equipment generating damage is taken as the working parameter of the preset damage degree.
As shown in fig. 2, the data range of the preset working parameters means that the normal operation of the MPCVD apparatus is not affected by the working parameter data within the variation range, and the data range of the preset working parameters is established in the early stage through results obtained by continuous experiments, and the normal working range corresponding to each working parameter is recorded.
When the current working parameter data of the MPCVD equipment is detected, the data range of the preset working parameter is extracted from the memory so as to judge whether the current working parameter data exceeds the data range of the preset working parameter.
Receiving various sensors and a microwave source to acquire working parameters of the MPCVD equipment, and classifying the working parameters according to the damage degree of the working parameters to the MPCVD equipment.
The plurality of sensors includes a contact sensor, a pressure sensor, and a temperature sensor.
For example: the microwave frequency and the microwave power and the corresponding parameter data can be directly obtained on the microwave source. The CDA parameter, H, can be detected by a pressure sensor 2 、CH 4 、O 2 、N 2 Isoparametric gas flow.
Wherein, the normal working range corresponding to the following working parameters can be obtained through a plurality of experiments by the sensor: supply voltage: three-phase range AC380 (1 ± 10%) V, frequency 50Hz; the process inlet pressure range is as follows: not less than 0.2MPa; CDA gas supply pressure range: 0.4 to 0.6MPa; cooling water supply pressure range: not less than 5.0kg/cm2; supply water temperature range of cooling water: 20 +/-1 ℃; cooling water flow range:>30L/min；N 2 air supply pressure range: more than or equal to 0.1MPa, vent (N) 2 Air); process gas pipeline cleaning gas supply pressure range: not less than 0.3MPa, and back-flushing and cleaning (N2); the compressed dry air system controls the air supply pressure range: not less than 0.4MPa; operating frequency range of microwave generator: 2450 +/-25 MHZ; output power range: 0.6 KW-6 KW.
And taking the working parameters with the damage degree to the MPCVD equipment exceeding the preset damage degree as emergency shutdown parameters.
Wherein the emergency stop class parameters include: water cooling flow, reflected power, MFC (gas mass flow controller), fireball jump, CDA (compressed air), power anomaly.
For example, when the plasma fireball jumps up, the emergency stop button needs to be pressed down urgently to turn off the microwave output, so as to prevent the damage of the equipment parts.
The solution is as follows: in the process of cooling operation, the change of the fireball form is closely observed, if abnormal conditions such as fireball jumping occur, the key is clicked immediately to turn off the microwave power supply, and then the air pressure is reduced gradually. The emergency treatment under the abnormal condition during the operation is carried out, the normal pressure reduction and temperature reduction process is strictly executed according to the correct steps, and the dangerous operation is carried out without directly turning off the microwave generator so as to avoid damaging the microwave generator.
And taking the working parameters of which the damage degree to the MPCVD equipment does not exceed the preset damage degree as manual regulation parameters.
The manual regulation and control parameters comprise: the interlocking is disconnected, the water inlet flow, the water inlet temperature, no power output, standing waves, the temperature of the plug-in water cooling plate, power abnormity, standing waves, reflected power, the temperature of the plug-in water cooling plate, the water inlet flow and the like.
When an alarm caused by the manual regulation type parameters is received, the data of the manual regulation type parameters is beyond the data range of the preset working parameters, but the manual regulation type parameters do not have high damage degree to the MPCVD equipment, so that the equipment does not need to be stopped urgently, and an operator can be informed to select regulation.
The method comprises the steps of receiving data of current working parameters of the MPCVD equipment acquired by various sensors, and comparing the data of the current working parameters with a data range of preset working parameters in sequence.
And judging whether the data of the emergency stop parameters exceed the data range of preset working parameters.
And judging whether the data of the manual regulation and control parameters exceed the data range of preset working parameters.
When detecting whether the data of the current working parameters exceed the data range of the preset working parameters, judging whether the current working parameters belong to emergency shutdown parameters or manual regulation parameters, and when judging that the current working parameters belong to emergency shutdown parameters, further judging whether the data of the emergency shutdown parameters exceed the data range of the preset working parameters. And when the current working parameter is judged to belong to the manual regulation and control parameter, further judging whether the data of the manual regulation and control parameter exceeds the data range of the preset working parameter.
And S20, if the data of the emergency shutdown parameters exceed the data range of preset working parameters, performing alarm and automatic emergency shutdown operation.
For example, an MPCVD device performs an automatic emergency stop operation when detecting that the reflected power in the emergency stop type parameter exceeds a set stop value, and at this time, the transmitter needs to be checked and the reason for the possible increase of the reflected power is needed, and the solution is to set a limit for increasing the transmitted power or change the reflected power mode. Another example is: when the flow rate of the cooling water is detected to be too low, the MPCVD equipment can carry out automatic emergency shutdown operation, and the solution is to improve a water cooling loop to achieve the required water flow rate.
In a frame in the middle of a screen (ALARM), the states of process parameters such as temperature, air pressure, cooling water, O2/H2 ratio, microwave power supply, MFC, reflected power, substrate table and the like or the states of the positions of components and the like are sequentially displayed.
Clicking the [ alarm reset ] key can reset the system alarm, clicking the [ alarm record ] key, and entering a system alarm log record interface (as shown in fig. 3).
In this interface, the user can view system alarms, fault log times, detailed information, and the like. Clicking the upper left selection box can check the warning log period; clicking a key below (emergency stop record) to check the historical data of the emergency stop; clicking the button (delete) can delete the history record of the alarm log; and clicking the [ return ] key to return to the upper level interface.
Specifically, when the data of the emergency shutdown parameters is judged not to exceed the data range of the preset working parameters, whether the data of the next emergency shutdown parameters exceeds the data range of the preset working parameters is continuously detected until all the emergency shutdown parameters are completely detected, and whether the data of the emergency shutdown parameters which pass the detection exceed the data range of the preset working parameters is monitored in real time in the whole production process.
The detection is carried out according to the sequence of the preset working parameter detection, when the data of the current emergency stop parameters do not exceed the data range of the preset working parameters, the default is passed, the data of the next emergency stop parameters are continuously detected, and before all working parameters are detected, the emergency stop parameters which pass the detection default are continuously detected, so that the emergency stop parameters which pass the detection are prevented from exceeding the range of the preset working parameter data.
And when the data of the emergency stop parameters exceed the data range of preset working parameters, alarming and controlling the MPCVD equipment to carry out automatic emergency stop operation.
Therefore, when the alarm of the emergency shutdown parameters occurs, the MPCVD equipment can carry out automatic emergency shutdown operation within the first time, the MPCVD equipment is prevented from being damaged, and further, the equipment operator checks the shutdown operation of the MPCVD equipment when receiving the alarm information.
And S30, if the data of the manual regulation and control parameters exceed the data range of preset working parameters, alarming and prompting an operator to perform manual processing.
Specifically, when it is determined that the data of the manual control parameters does not exceed the data range of the preset working parameters, it is continuously detected whether the data of the next manual control parameter exceeds the data range of the preset working parameters until all the manual control parameters are completely detected, and whether the data of the detected manual control parameters exceeds the data range of the preset working parameters is monitored in real time in the whole production process.
The detection is carried out according to the sequence of the preset working parameter detection, when the data of the current manual control parameter does not exceed the data range of the preset working parameter, the default is passed, the data of the next manual control parameter is continuously detected, and before the detection of all working parameters is finished, the manual control parameter which passes the detection default is continuously detected, so that the manual control parameter data which passes the detection is prevented from exceeding the range of the preset working parameter data
And when the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing.
The manual handling by the operator comprises: and manually releasing the alarm or adjusting the data range of the preset working parameters or manually stopping the machine.
When the data of the manual regulation and control parameters exceed the data range of the preset working parameters, the MPCVD equipment does not automatically and emergently stop but only alarms to prompt an operator to regulate and control, when the operator receives alarm information, the operator can operate on a display screen of the MPCVD equipment, select to manually release the alarm or adjust the data range of the preset working parameters or manually stop the MPCVD equipment, when the alarm parameters do not substantially influence the cultivation of the diamond or the MPCVD equipment, the alarm button can be selected to be released through the display screen, the alarm is manually released to enable the MPCVD equipment to continue working, when the alarm parameters are manually released and the alarm is repeated, the operator can manually modify the alarm parameter working range through a parameter modification frame on the display screen to release the alarm, when a plurality of manual regulation and control parameters are carried out, the MPCVD equipment can possibly have problems, and needs to be further judged, therefore, in order to avoid the damage of the alarm parameters on the cultivation of the diamond or the MPCVD equipment, the automatic emergency operation can be selected.
When the alarm occurs, the alarm lamp changes from a green lamp or a non-lighting state to a red lamp and flashes all the time, and the alarm lamp can not be restored to the green lamp or the non-lighting state until the alarm is cancelled.
In addition, the alarm sound is divided into two conditions, when the microwave is started in the MPCVD equipment and after the microwave is started, namely the diamond is alarmed when the abnormal working parameters are detected in the cultivation process, the alarm sound can be sounded all the time.
When an alarm is given when an abnormal working parameter is detected in the MPCVD equipment, i.e. the diamond is not yet cultivated, the alarm sound will be beeped 10 times.
Therefore, when the MPCVD equipment is in an abnormal condition, the equipment operators can timely carry out treatment, so that the special environment required by the growth of the diamond can be maintained, and the growth of the diamond with higher quality is facilitated.
As shown in fig. 3, the present invention also records the alarm information, analyzes the MPCVD device according to the alarm information and the actual MPCVD device working requirements, and sets a more suitable normal operating parameter range of the MPCVD device.
Further, as shown in fig. 4, based on the above-mentioned fault alarm processing method based on MPCVD apparatus, the present invention also provides a fault alarm processing system based on MPCVD apparatus, wherein the fault alarm processing system based on MPCVD apparatus includes:
the parameter obtaining module 51 is configured to obtain data of a current working parameter of the MPCVD apparatus, and determine whether the data of the current working parameter exceeds a data range of a preset working parameter, where the current working parameter includes an emergency shutdown parameter and a manual regulation parameter.
The emergency shutdown module 52 is configured to obtain data of current operating parameters of the MPCVD apparatus, and determine whether the data of the current operating parameters exceeds a data range of preset operating parameters, where the current operating parameters include emergency shutdown parameters and manual regulation and control parameters.
And the manual regulation and control module 53 is configured to alarm and prompt an operator to perform manual processing if the data of the manual regulation and control parameters exceeds the data range of preset working parameters.
Further, as shown in fig. 5, based on the above-mentioned fault alarm processing method and system based on MPCVD equipment, the present invention also provides a terminal, which includes a processor 10, a memory 20 and a display 30. Fig. 5 shows only some of the components of the terminal, but it is to be understood that not all of the shown components are required to be implemented, and that more or fewer components may be implemented instead.
The memory 20 may in some embodiments be an internal storage unit of the terminal, such as a hard disk or a memory of the terminal. The memory 20 may also be an external storage device of the terminal in other embodiments, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash memory Card (Flash Card), and the like provided on the terminal. Further, the memory 20 may also include both an internal storage unit and an external storage device of the terminal. The memory 20 is used for storing application software installed in the terminal and various types of data, such as program codes of the installation terminal. The memory 20 may also be used to temporarily store data that has been output or is to be output. In an embodiment, the memory 20 stores a MPCVD apparatus-based malfunction alert processing program 40, and the MPCVD apparatus-based malfunction alert processing program 40 can be executed by the processor 10, so as to implement the MPCVD apparatus-based malfunction alert processing method of the present application.
The processor 10 may be a Central Processing Unit (CPU), microprocessor or other data Processing chip in some embodiments, and is used to run program codes stored in the memory 20 or process data, such as executing the MPCVD apparatus-based fault alarm Processing method.
The display 30 may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, an OLED (Organic Light-Emitting Diode) touch panel, or the like in some embodiments. The display 30 is used for displaying information at the terminal and for displaying a visual user interface. The components 10-30 of the terminal communicate with each other via a system bus.
In one embodiment, the following steps are implemented when processor 10 executes MPCVD device-based fault alert handler 40 in memory 20:
acquiring data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters or not, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters;
if the data of the emergency shutdown parameters exceed the data range of preset working parameters, alarming and automatic emergency shutdown operations are carried out;
and if the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing.
The method comprises the steps of obtaining data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters, and the method comprises the following steps:
establishing a storage database, wherein the storage database comprises working parameters of preset damage degrees and data ranges of the preset working parameters;
receiving working parameters of the MPCVD equipment acquired by various sensors, and classifying the working parameters according to the damage degree of the working parameters to the MPCVD equipment;
taking the working parameters with the damage degree to the MPCVD equipment exceeding the preset damage degree as emergency shutdown parameters;
and taking the working parameters of which the damage degree to the MPCVD equipment does not exceed the preset damage degree as manual regulation parameters.
The method comprises the steps of obtaining data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters, and the method specifically comprises the following steps:
receiving data of current working parameters of the MPCVD equipment acquired by various sensors, and comparing the data of the current working parameters with a data range of preset working parameters in sequence;
judging whether the data of the emergency stop parameters exceed the data range of preset working parameters or not;
and judging whether the data of the manual regulation and control parameters exceed the data range of preset working parameters.
If the data of the emergency stop type parameters exceed the data range of preset working parameters, alarming and automatic emergency stop operation are carried out, and the method specifically comprises the following steps:
when the data of the emergency shutdown parameters are judged not to exceed the data range of the preset working parameters, continuously detecting whether the data of the next emergency shutdown parameters exceed the data range of the preset working parameters or not until all the emergency shutdown parameters are completely detected, and monitoring whether the data of the detected emergency shutdown parameters exceed the data range of the preset working parameters or not in real time in the whole production process;
and when the data of the emergency stop parameters exceed the data range of preset working parameters, alarming and controlling the MPCVD equipment to carry out automatic emergency stop operation.
Wherein, if the data of manual regulation and control class parameter surpass the data range of presetting working parameter, then report to the police and indicate operating personnel manual processing, specifically include:
when the data of the manual regulation and control parameters are judged not to exceed the data range of the preset working parameters, continuously detecting whether the data of the next manual regulation and control parameter exceeds the data range of the preset working parameters or not until all the manual regulation and control parameters are completely detected, and monitoring whether the data of the detected manual regulation and control parameters exceed the data range of the preset working parameters or not in real time in the whole production process;
and when the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing.
Wherein the manual operator handling comprises: and manually releasing the alarm or adjusting the data range of the preset working parameters or manually stopping the machine.
Wherein the plurality of sensors includes a contact sensor, a pressure sensor, and a temperature sensor.
The present invention also provides a computer-readable storage medium, wherein the computer-readable storage medium stores an MPCVD apparatus-based malfunction alert process program, which when executed by a processor implements the steps of the MPCVD apparatus-based malfunction alert process method as described above.
In summary, the present invention provides a fault alarm processing method based on MPCVD equipment and related equipment, the method comprising: acquiring data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters or not, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters; if the data of the emergency shutdown parameters exceed the data range of preset working parameters, alarming and automatic emergency shutdown operation are carried out; and if the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing. The method judges whether the MPCVD equipment is abnormal or not by monitoring the working parameter data of the MPCVD equipment in real time, and selects to automatically stop the equipment or indicate an operator to manually regulate and control according to the alarm degrees corresponding to different working parameter data, so that the operator can timely handle the abnormal condition of the MPCVD equipment, the specific growth environment required by the growth of the diamond is favorably maintained, and the MPCVD equipment is protected at the same time.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrases "comprising a component of' ...does not exclude the presence of additional like elements in the process, method, article, or terminal that comprises the element.
Of course, it will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by instructing relevant hardware (such as a processor, a controller, etc.) through a computer program, and the program can be stored in a computer readable storage medium, and when executed, the program can include the processes of the embodiments of the methods described above. The computer readable storage medium may be a memory, a magnetic disk, an optical disk, etc.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (10)
1. A fault alarm processing method based on MPCVD equipment is characterized by comprising the following steps:
acquiring data of current working parameters of the MPCVD equipment, and judging whether the data of the current working parameters exceed a data range of preset working parameters or not, wherein the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters;
if the data of the emergency shutdown parameters exceed the data range of preset working parameters, alarming and automatic emergency shutdown operation are carried out;
and if the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing.
2. The MPCVD apparatus-based malfunction alert processing method according to claim 1, wherein said acquiring data of current operating parameters of the MPCVD apparatus, determining whether the data of the current operating parameters exceed the data range of preset operating parameters, the current operating parameters include emergency shutdown parameters and manual regulation parameters, and the method previously comprises:
establishing a storage database, wherein the storage database comprises working parameters of preset damage degrees and data ranges of the preset working parameters;
receiving working parameters of the MPCVD equipment acquired by various sensors, and classifying the working parameters according to the damage degree of the working parameters to the MPCVD equipment;
taking the working parameters with the damage degree to the MPCVD equipment exceeding the preset damage degree as emergency shutdown parameters;
and taking the working parameters of which the damage degree to the MPCVD equipment does not exceed the preset damage degree as manual regulation parameters.
3. The MPCVD device-based malfunction alert processing method according to claim 1, wherein the acquiring data of the current operating parameter of the MPCVD device, and determining whether the data of the current operating parameter exceeds a data range of a preset operating parameter, the current operating parameter includes an emergency shutdown parameter and a manual regulation and control parameter, and specifically includes:
receiving data of current working parameters of the MPCVD equipment acquired by various sensors, and comparing the data of the current working parameters with a data range of preset working parameters in sequence;
judging whether the data of the emergency stop parameters exceed the data range of preset working parameters or not;
and judging whether the data of the manual regulation and control parameters exceed the data range of preset working parameters.
4. The MPCVD apparatus-based malfunction alert processing method according to claim 1, wherein if the data of the emergency stop class parameter exceeds the data range of the preset operation parameter, the alert and automatic emergency stop operation are performed, specifically comprising:
when the data of the emergency shutdown parameters are judged not to exceed the data range of the preset working parameters, continuously detecting whether the data of the next emergency shutdown parameters exceed the data range of the preset working parameters or not until all the emergency shutdown parameters are completely detected, and monitoring whether the data of the detected emergency shutdown parameters exceed the data range of the preset working parameters or not in real time in the whole production process;
and when the data of the emergency stop type parameters exceed the data range of preset working parameters, alarming and controlling the MPCVD equipment to carry out automatic emergency stop operation.
5. The MPCVD device-based fault alarm processing method according to claim 1, wherein if the data of the manual control parameters exceeds the data range of the preset working parameters, the method performs alarm and prompts an operator to perform manual processing, specifically comprising:
when the data of the manual regulation and control parameters are judged not to exceed the data range of the preset working parameters, continuously detecting whether the data of the next manual regulation and control parameter exceeds the data range of the preset working parameters or not until all the manual regulation and control parameters are completely detected, and monitoring whether the data of the detected manual regulation and control parameters exceed the data range of the preset working parameters or not in real time in the whole production process;
and when the data of the manual regulation and control parameters exceed the data range of the preset working parameters, alarming and prompting an operator to perform manual processing.
6. The MPCVD apparatus-based malfunction alert processing method according to claim 1 or 5, wherein the operator manual process comprises: and manually releasing the alarm or adjusting the data range of the preset working parameters or manually stopping the machine.
7. The MPCVD apparatus based malfunction alert processing method of claim 2 or 3, wherein the plurality of sensors includes a contact sensor, a pressure sensor and a temperature sensor.
8. A fault alarm processing system based on an MPCVD device is characterized by comprising:
the device comprises a parameter acquisition module, a parameter comparison module and a parameter comparison module, wherein the parameter acquisition module is used for acquiring data of current working parameters of the MPCVD equipment and judging whether the data of the current working parameters exceed a data range of preset working parameters or not, and the current working parameters comprise emergency shutdown parameters and manual regulation and control parameters;
the emergency shutdown module is used for alarming and automatically performing emergency shutdown operation if the data of the emergency shutdown parameters exceed the data range of preset working parameters;
and the manual regulation and control module is used for alarming and prompting an operator to perform manual processing if the data of the manual regulation and control parameters exceeds the data range of the preset working parameters.
9. A terminal, characterized in that the terminal comprises: memory, a processor and an MPCVD apparatus-based malfunction alert processing program stored on the memory and executable on the processor, which when executed by the processor implements the steps of the MPCVD apparatus-based malfunction alert processing method according to any one of claims 1 to 7.
10. A computer-readable storage medium, characterized in that the computer-readable storage medium stores an MPCVD apparatus-based malfunction alert process program, which when executed by a processor, implements the steps of the MPCVD apparatus-based malfunction alert processing method according to any one of claims 1 to 7.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116560329A (en) * | 2023-07-10 | 2023-08-08 | 深圳优普莱等离子体技术有限公司 | Internet of things control method and related equipment for diamond growth process |
| CN117026373A (en) * | 2023-10-10 | 2023-11-10 | 深圳优普莱等离子体技术有限公司 | Abnormal parameter detection method and related equipment in diamond growth process |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116560329A (en) * | 2023-07-10 | 2023-08-08 | 深圳优普莱等离子体技术有限公司 | Internet of things control method and related equipment for diamond growth process |
| CN116560329B (en) * | 2023-07-10 | 2023-09-26 | 深圳优普莱等离子体技术有限公司 | Internet of things control method and related equipment for diamond growth process |
| CN117026373A (en) * | 2023-10-10 | 2023-11-10 | 深圳优普莱等离子体技术有限公司 | Abnormal parameter detection method and related equipment in diamond growth process |
| CN117026373B (en) * | 2023-10-10 | 2023-12-26 | 深圳优普莱等离子体技术有限公司 | Abnormal parameter detection method and related equipment in diamond growth process |
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