CN115958711A - Automatic go up unloading clipper - Google Patents

Automatic go up unloading clipper Download PDF

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Publication number
CN115958711A
CN115958711A CN202211712749.XA CN202211712749A CN115958711A CN 115958711 A CN115958711 A CN 115958711A CN 202211712749 A CN202211712749 A CN 202211712749A CN 115958711 A CN115958711 A CN 115958711A
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CN
China
Prior art keywords
silicon rod
cutting
supporting
adjusting
assembly
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CN202211712749.XA
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Chinese (zh)
Inventor
刘秀坤
李斌全
庄弘扬
靳华福
王尧君
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Linton Technologies Group
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Linton Technologies Group
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Priority to CN202211712749.XA priority Critical patent/CN115958711A/en
Publication of CN115958711A publication Critical patent/CN115958711A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention relates to an automatic feeding and discharging cut-off machine which comprises a silicon rod processing platform, a positioning mechanism and a cut-off mechanism arranged on one side of the positioning mechanism. The cutting mechanism comprises a gantry frame, a cutting head and two detection assemblies. The gantry frame is arranged on the silicon rod processing platform and can do linear reciprocating motion along the length direction of the silicon rod processing platform. The cutting head is arranged at the top of the gantry frame and used for cutting the silicon rod on the silicon rod processing platform. The two detection assemblies are arranged on two sides of the bottom of the gantry frame so as to enable two sides of the bottom of the gantry frame to synchronously walk. The positioning mechanism is used for supporting and fixing the silicon rod so as to enable the axis of the silicon rod to be horizontal. Through setting up the cutting head on portal frame, can ensure the stationarity of cutting head, prevent that the cutting head from inclining. And the detection components are respectively arranged on two sides of the bottom of the gantry frame, and can ensure that the two sides of the gantry frame synchronously move along the silicon rod processing platform, and meanwhile, the moving positioning precision of the gantry frame is improved.

Description

Automatic go up unloading clipper
Technical Field
The invention relates to the technical field of silicon workpiece processing equipment, in particular to an automatic feeding and discharging guillotine shear.
Background
At present, in the process of processing a silicon rod, the silicon rod needs to be horizontally placed on a processing platform, and then is cut along the radial cross section of the silicon rod from top to bottom through a silicon rod cutting mechanism so as to form a cut sample wafer silicon wafer or a silicon rod with a required length.
Current silicon rod truncation mechanism is including setting up in the support frame of processing platform one side, be provided with on the support frame and can be for the gliding tool bit that cuts of support frame from top to bottom, and the support frame is "7" type with cutting the tool bit, consequently, cut the tool bit owing to be provided with a plurality of leading wheels and remove the diamond wire line of cuting, so owing to cut the weight of tool bit, and then lead to cutting the phenomenon that the tool bit slope or skew appears, and then drive the diamond wire skew, so the cross-section that leads to cutting the silicon rod when cutting the silicon rod is oval, so that it is poor to cut the effect.
Moreover, after the silicon rod is placed into the supporting platform by the current cutting machine, the level of the silicon rod needs to be manually adjusted, the silicon rod is cut after adjustment, and the silicon rod which meets the length needs to be manually cut.
Disclosure of Invention
Technical problem to be solved
In view of the above disadvantages and shortcomings of the prior art, the present invention provides an automatic loading and unloading guillotine shear, which solves the technical problem that the cutting blade is inclined or deviated to drive the diamond wire to deviate, so that the silicon rod cutting effect is poor.
(II) technical scheme
In order to achieve the purpose, the invention adopts the main technical scheme that:
an automatic feeding and discharging clipper comprises a silicon rod processing platform, a positioning mechanism and a clipping mechanism arranged on one side of the positioning mechanism;
the cutting mechanism comprises a gantry frame, a cutting head and two detection assemblies;
the gantry frame is arranged on the silicon rod processing platform and can do linear reciprocating motion along the length direction of the silicon rod processing platform;
the cutting head is arranged at the top of the gantry frame and used for cutting the silicon rod on the silicon rod processing platform;
the two detection assemblies are arranged on two sides of the bottom of the gantry frame so as to enable the two sides of the bottom of the gantry frame to synchronously walk;
the positioning mechanism is used for supporting and fixing the silicon rod so as to enable the axis of the silicon rod to be horizontal.
Optionally, the gantry frame comprises a cross beam and two vertical connecting beams arranged in parallel;
the two vertical connecting beams are respectively arranged at two ends of the silicon rod processing platform, the bottom of each vertical connecting beam is provided with a driving structural part, the driving structural part can drive the gantry frame to move along the silicon rod platform, and the driving machine component is in communication connection with the detection assembly;
the crossbeam sets up in two between the vertical tie-beam, the cutting head with crossbeam fixed connection.
Optionally, the detection assembly is a magnetic grid sensing head.
Optionally, the cutting head comprises a connecting seat, an adjusting assembly, a driving assembly and three cutting guide wheels;
the connecting seat is vertically arranged above the silicon rod processing platform;
the three cutting guide wheels are arranged on the connecting seat in a surrounding manner to form a triangular structure so as to allow diamond wires to be routed;
the adjusting assembly and the cutting guide wheel are respectively arranged on two sides of the connecting seat, the driving assembly and the adjusting assembly are arranged on the same side of the connecting seat and are fixedly arranged on the adjusting assembly, and the output end of the driving assembly is connected with any cutting guide wheel and is used for driving the cutting guide wheel to rotate;
the adjusting assembly drives the cutting guide wheel to be close to or far away from the gravity center of the triangular structure through the driving assembly so as to adjust the tension of the diamond wire.
Optionally, the adjusting assembly comprises an adjusting power member and a moving slide plate;
the adjusting power piece is fixedly arranged on one side of the connecting seat, drives the movable sliding plate to do linear reciprocating motion along the guide rail, and the guide rail is arranged on one side, far away from the cutting guide wheel, of the connecting seat;
the driving assembly is fixedly arranged on the movable sliding plate.
Optionally, the positioning mechanism comprises a fixed supporting unit and an adjusting supporting unit which are arranged on the silicon rod processing platform at intervals;
the fixed supporting unit and the adjusting supporting unit are respectively provided with a supporting surface, and the two supporting surfaces are respectively used for supporting two ends of the silicon rod to be processed;
the adjusting and supporting unit lifts and lowers the first end of the silicon rod to make the axis of the silicon rod horizontal.
Optionally, the adjusting and supporting unit comprises a supporting base, a lifting assembly and a supporting main body which are sequentially arranged from bottom to top, and the supporting main body is used for supporting the silicon rod to be processed;
the support base is arranged on the silicon rod processing platform;
the lifting component drives the supporting main body to lift relative to the supporting base, and the supporting main body is used for driving the silicon rod to lift.
Optionally, the lifting assembly comprises an adjusting motor, a transmission structure member and a lifting platform;
the adjusting motor is connected with the lifting platform through the transmission structural part, and the lifting platform is connected with the supporting main body;
the adjusting motor drives the transmission structural part to drive the lifting platform to lift, and the lifting platform is used for driving the supporting main body to lift.
Optionally, the fixed support unit and the adjusting support unit each comprise a clamping assembly for fixing both ends of the silicon rod with a horizontal axis.
Optionally, the number of the cutting mechanisms is two, and the two cutting mechanisms are arranged on two sides of the positioning mechanism.
(III) advantageous effects
The beneficial effects of the invention are: according to the automatic feeding and discharging guillotine shear, the cutting head is arranged on the gantry frame, so that the stability of the cutting head can be ensured, and the cutting head is prevented from inclining. And the detection components are respectively arranged on two sides of the bottom of the gantry frame, and can ensure that the two sides of the gantry frame synchronously walk along the silicon rod processing platform, so that the diamond wires on the cutting head are ensured to be in a straight line, and the phenomenon that the cutting surface is inclined is prevented. Meanwhile, the positioning precision of the walking of the gantry frame is improved. Furthermore, the platform, the cutting mechanism and the blanking mechanism are matched with each other through the positioning mechanism and the silicon rod to complete the automatic feeding and blanking functions, and compared with the existing cutting machine, the full-automatic multifunctional silicon rod cutting machine is realized.
Drawings
FIG. 1 is a schematic structural view of an automatic loading and unloading guillotine cutter in a front view;
FIG. 2 is a perspective view of the cutting mechanism of FIG. 1;
FIG. 3 is a schematic front view of the structure of FIG. 2;
FIG. 4 is a rear view of the structure of FIG. 2;
FIG. 5 is a perspective view of the positioning mechanism of FIG. 1;
FIG. 6 is a left side schematic view of the adjustable supporting unit of FIG. 5;
FIG. 7 is a schematic sectional view of a portion of the shaped head of the sampling device of FIG. 1;
FIG. 8 is a schematic view of the structure of the supporting adsorption structure of the sampling device of FIG. 7;
FIG. 9 is a schematic front view of the sample wafer adsorbed by the sampling device of FIG. 1;
FIG. 10 is a left side view of the sample wafer of the sampling device of FIG. 9.
[ description of reference ]
1: a silicon rod processing platform; 2: a positioning mechanism; 21: a fixed support unit; 22: an adjustment support unit; 221: a support base; 222: a lifting assembly; 2221: adjusting the motor; 2222: a lifting platform; 2223: a lead screw; 2224: a lead screw nut; 2225: a connecting plate; 2226: a sloping block; 2227: a roller; 2228: connecting a bracket; 223: a support body; 2231: a support plate; 2232: positioning a plate; 31: a gantry frame; 311: a cross beam; 312: a vertical connecting beam; 32: a cutting head; 321: a connecting seat; 322: an adjustment assembly; 3221: moving the sliding plate; 3222: a guide rail; 5323: a drive assembly; 324: cutting guide wheels; 33: a detection component; 4: a clamping assembly; 41: a clamping cylinder; 42: mounting a bracket; 43: a rotating structure; 5: a guide structure; 6: a tension sensor; 7: a blanking mechanism; 71: a sampling device; 711: a moving assembly; 712: a support assembly; 7121: supporting the adsorption structure; 71211: a support body; 712111: a support base; 71212: a head support sleeve; 71213: sample wafer suction cups; 7122: a first auxiliary support assembly; 71221: a bottom support block; 71222: an auxiliary support cylinder; 71223: a self-adaptive guide rod; 71224: a spring; 71225: a guide bar stopper; 71226: a supporting block mounting seat; 71227: a connecting plate; 713: a rotating assembly; 7131: rotating the first air cylinder; 7132: a support link; 72: a tail blanking device; a: a silicon rod; b: a diamond wire.
Detailed Description
For a better understanding of the present invention, reference will now be made in detail to the present embodiments of the invention, which are illustrated in the accompanying drawings. Where directional terms such as "upper", "lower", "left", "right", "front" and "rear" are used herein, reference is made to the orientation of fig. 1. The two opposite sides of the two vertical connecting beams 312 in fig. 1 are respectively defined as "left and right", the side of the connecting base 321 opposite to the gantry frame 31 is defined as "upper", and the side of the main cutter guide wheel opposite to the connecting base 321 is defined as "front".
Referring to fig. 1, the automatic loading and unloading guillotine shear provided by the embodiment of the present invention includes a silicon rod processing platform 1, a positioning mechanism 2, a cutting mechanism 3, and a blanking mechanism 7.
Wherein, the top of the silicon rod processing platform 1 is provided with a moving guide rail with the same length as the silicon rod processing platform along the longitudinal direction (the left and right length directions). Moreover, the positioning mechanism 2 and the cutting mechanism 3 can slide left and right along the moving guide rail on the silicon rod processing platform 1.
In the present embodiment, two cutoff mechanisms 3 are provided, and two cutoff mechanisms 3 are provided on both sides of the positioning mechanism 2. The two cutting mechanisms 3 respectively comprise a first cutting tool bit and a second cutting tool bit. The purpose of providing the two cutting mechanisms 3 is to cut the silicon rod a from both sides of the silicon rod a, respectively, to improve cutting efficiency, and not to affect positioning by the positioning mechanism 2.
In this embodiment, the positioning means 2 is arranged in the middle between the first and second cutting head. The positioning mechanism 2 comprises a fixed support unit 21 and an adjusting support unit 22 which are arranged on the silicon rod processing platform 1 at intervals.
It should be noted that the positioning mechanism 2 is provided for the purpose of forming the silicon rod a by drawing, and the outer circle of the silicon rod a is not processed, so that there is a large error in diameter size and geometry of the silicon rod a, that is, if the diameter of the circle where the cross sections of the two ends of the silicon rod a are located may not be completely the same during the drawing process when forming the same silicon rod a, that is, the silicon rod a is in an irregular conical rod non-cylindrical shape. The circle center connecting line of the end surfaces of the two ends of the silicon rod a to be processed, which is arranged at intervals in the length direction of the processing platform, of the two ends of the silicon rod a is inclined, so that the inclination tolerance of the cut end surface of the silicon rod a is large, and the processing quality is reduced.
Further, the fixed supporting unit 21 and the adjusting supporting unit 22 each have a supporting surface for supporting both ends of the silicon rod a to be processed, respectively. The adjusting support unit 22 lifts and lowers the first end of the silicon rod a so that the axis of the silicon rod a is horizontal.
Further, the adjusting and supporting unit 22 includes a supporting base 221, a lifting assembly 222, and a supporting body 223, which are sequentially disposed from bottom to top, and the supporting body 223 is used for supporting the silicon rod a to be processed. The support base 221 is disposed on the silicon rod processing platform 1. The lifting assembly 222 drives the supporting body 223 to lift relative to the supporting base 221, and the supporting body 223 is used for driving the silicon rod a to lift. The axis level of the silicon rod a is adjusted through the lifting of the lifting component 2222, so that the silicon rod a can be quickly adjusted.
Specifically, after the silicon rod a is placed on the positioning mechanism 2 in the horizontal direction and is adjusted and fixed, the silicon rod a is cut from both ends of the silicon rod a through the first cutting tool bit and the second cutting tool bit which are arranged at both ends and can horizontally move left and right along the movable guide rail, so as to form a plurality of silicon rod a units with the length required by subsequent processing.
Further, referring to fig. 6, the lifting assembly 222 includes an adjustment motor 2221, a transmission structure, and a lifting platform 2222. The adjustment motor 2221 is connected to the elevation table 2222 through a transmission structure, and the elevation table 2222 is connected to the support body 223.
Specifically, the adjustment motor 2221 can drive the transmission structure to drive the lifting platform 2222 to move up and down, and the lifting platform 2222 is used for driving the support main body 223 to move up and down. The lifting of the left end of the first end of the silicon rod a is automatically controlled by the adjusting motor 2221 so that the adjustment is more convenient.
Further, the output end of the adjusting motor 2221 is horizontally disposed, and the transmission structure includes a lead screw 2223, a lead screw nut 2224, a connecting plate 2225, two inclined blocks 2226, two rollers 2227, and two connecting brackets 2228.
It should be noted that the purpose of horizontally arranging the adjustment motor 2221 is to improve space utilization and make the structure compact.
Further, the output end of the adjusting motor 2221 is fixedly connected to the lead screw 2223, and the lead screw 2223 extends horizontally. Lead screw 2223 spiro union lead screw nut 2224, lead screw nut 2224's top is fixed mutually with connecting plate 2225, two sloping blocks 2226 fixed mounting on connecting plate 2225, and two sloping blocks 2226 interval settings, and two sloping blocks 2226's incline direction is the same. The two rollers 2227 are respectively fixedly mounted on the lifting platform 2222 through the connecting brackets 2228, and the two rollers 2227 are respectively in contact with the two inclined blocks 2226.
The working process mainly includes that when adjustment is needed, the adjustment motor 2221 is started, the adjustment motor can drive the lead screw 2223 to rotate, and the lead screw 2223 drives the lead screw nut 2224 to do linear reciprocating motion along the axial direction (left and right directions) of the lead screw 2223. The connecting plate 2225 is connected to the screw nut 2224, so that the connecting plate 2225 drives the two inclined blocks 2226 to move synchronously. The connecting plate 2225 and the two inclined blocks 2226 horizontally reciprocate, the two rollers 2227 can reciprocate on the inclined surfaces of the inclined blocks 2226, and the two rollers 2227 drive the lifting table 2222 to lift.
Further, the lifting assembly 222 further includes a plurality of guiding structures 5 disposed between the lifting table 2222 and the supporting base 221, and the guiding structures 5 are used for guiding the lifting table 2222 to move up and down. Specifically, the guide structure 5 is fixed mounting in supporting the guide bar on the base 221 and setting up the uide bushing on elevating platform 2222, and the top of guide bar can stretch into in the uide bushing up, and is provided with the telescopic link of pegging graft mutually with the guide bar in the uide bushing to adapt to elevating platform 2222's lift, play good guide effect simultaneously, and then make elevating platform 2222's lift more steady.
It should be noted that the fixed supporting unit 21 and the adjustable supporting unit 22 have similar structures, and the fixed supporting unit 21 does not have a lifting assembly, and the rest structures are the same. Specifically, the fixed supporting unit 21 also includes a supporting base 221 and a supporting body 223. That is, the fixed support unit 21 is also capable of moving left and right along the moving guide in order that the two support bases 221 of the fixed support unit 21 and the adjusting support unit 22 are mounted on the moving guide of the traveling line on the silicon rod processing platform 1. Through setting up the walking motor drive gear on two support bases 221, can automatically regulated the distance between two supporting seats 21 to adapt to the processing of the silicon rod a of different length, prevent that silicon rod a from toppling.
Further, the support body 223 includes a support plate 2231, and a V-shaped notch is opened at the top of the support plate 2231. Namely, the supporting bodies 223 of the fixed supporting unit 21 and the adjusting supporting unit 22 are both V-shaped notches for supporting the silicon rod a, that is, the double V-fulcrum centering device facilitates the positioning of the silicon rod a, and the positioning effect is better. Moreover, the positioning plates 2232 are disposed on opposite sides of the V-shaped notch. The positioning plate 2232 is arranged to increase the contact area with the silicon rod a, so as to improve the positioning accuracy, prevent the silicon rod a from moving, and achieve a better positioning effect.
In the present embodiment, the fixed support unit 21 and the adjusting support unit 22 each include a clamping assembly 4, and the clamping assembly 4 is used to fix both ends of the silicon rod a having a horizontal axis.
Further, the clamping assembly 4 includes a clamping cylinder 41, a mounting bracket 42, and a swivel structure 43. The fixed end of the clamping cylinder 41 is arranged on the supporting base 221, the extending end of the clamping cylinder 41 is fixedly connected with the mounting bracket 42, the mounting bracket 42 is used for mounting the rotating structural member 43, and the clamping cylinder 41 can drive the rotating structural member 43 to ascend and descend through the mounting bracket 42 so as to press the silicon rod a to be processed.
Wherein, the revolving structural member 43 is vertically arranged on the mounting bracket 42, and the revolving structural member 43 can rotate around its own axis relative to the mounting bracket 42.
Specifically, the rotary structure 43 includes a rotary cylinder, a connecting rod, and a rotary pressing plate. The rotary cylinder is fixedly mounted on the mounting bracket 42, and the output end of the rotary cylinder can be fixedly connected with the connecting rod, and the connecting rod is in a vertical state. And the height of the connecting rod is higher than the top of the silicon rod a. The top of the connecting rod is fixedly connected with the rotary pressing plate.
It should be noted that the revolving cylinder can drive the connecting rod to rotate around its own axis. Before placing silicon rod a, rotate through revolving cylinder control connecting rod, and then drive the gyration and compress tightly the clamp plate and rotate silicon rod a directly over, give way for silicon rod a, again revolving cylinder control connecting rod rotates to silicon rod a's top after adjusting supporting unit 22 and adjusting, then starts clamping cylinder 41, makes it can drive holistic gyration structure spare downstream through installing support 42 to make the gyration compress tightly the clamp plate and compress tightly silicon rod a.
Referring to fig. 2-4, the cutoff mechanism 3 includes a gantry frame 31, a cutting head 32, and two detection assemblies 33. The gantry frame 31 is disposed on the silicon rod processing platform 1 and can reciprocate linearly along the length direction of the silicon rod processing platform 1. The cutting head 32 is disposed on the top of the gantry frame 31, and is used for cutting the silicon rod a on the silicon rod processing platform 1. The two detection assemblies 33 are disposed on two sides of the bottom of the gantry frame 31, so that the two sides of the bottom of the gantry frame 31 can synchronously move.
Further, the gantry frame 31 includes two vertical connecting beams 312 arranged vertically and in parallel and a cross beam 311 for connecting between the two vertical connecting beams 312.
In this case, two vertical guide rails are provided at opposite inner side walls of the two vertical connecting beams 312, so that the cutting head vertically reciprocates up and down along the vertical guide rails thereof to drive the diamond wire b on the cutting guide wheel 324 on the cutting head to move toward or away from the silicon rod a, thereby cutting the silicon rod a on the silicon rod processing platform 1.
In this embodiment, the connecting seat 321 is disposed on the gantry frame 31, and the gantry frame 31 can drive the cutting head to linearly reciprocate along the length direction of the silicon rod a.
Before the silicon rod a is processed, the silicon rod a is horizontally placed on the silicon rod processing platform 1. The silicon rod processing platform 1 is provided with a positioning mechanism 2 for fixedly clamping the silicon rod a so as to fix the silicon rod a to be processed for convenient cutting.
Further, in order to match with the cutting processing of the silicon rod a, moving guide rails are arranged on two sides of the top of the silicon rod processing platform 1 along the axial direction of the silicon rod a, and the moving guide rails are matched with the walking linear moving guide rails on the walking support at the bottom of the vertical connecting beam 312, so that the gantry frame 31 makes linear reciprocating motion on the silicon rod processing platform 1, and the silicon rod a is cut at equal intervals or is sliced for sampling detection.
Further, a magnetic grid sensing head is arranged on the vertical connecting beam 312, and can control the synchronism of the two vertical connecting beams 312 so as to realize accurate control of the walking displacement. The running accuracy of the gantry frame 31 is effectively ensured.
Further, cutting head 32 includes a coupling base 321, an adjustment assembly 322, a drive assembly 323, and three shear rollers 324.
Further, the connecting seat 321 is vertically disposed above the silicon rod processing platform 1 of the silicon rod a. The three cutting guide wheels 324 are surrounded to form a triangular structure and are disposed on the connecting seat 321 for routing the diamond wire b. Specifically, the diamond wire b is a circular wire.
In this embodiment, the connecting base 321 is a plate-shaped structure, and a through groove is formed on a front side wall of the connecting base 321, and the through groove is provided to cooperate with a connecting shaft of the driving assembly 323 of the cutting main wheel 4 to perform an up-and-down movement.
In addition, three guide cutting wheels 324 and an adjusting assembly 322 are respectively disposed at the front and rear sides of the connecting seat 321, specifically, the three guide cutting wheels 324 are disposed at the front side of the adjusting assembly 322, and the adjusting assembly 322 is disposed at the rear side. The driving assembly 323 and the adjusting assembly 322 are disposed on the same side (rear side) and are fixedly mounted on the adjusting assembly 322, and an output end of the driving assembly 323 is connected to any of the rollers 324 for driving the rollers 324 to rotate.
Adjusting assembly 322 drives cutting guide wheel 324 to approach or move away from the center of gravity of the triangle through driving assembly 323, so as to adjust the tension of diamond wire b. It should be noted that the center of gravity of the triangle is the intersection of the three central lines of the triangle.
Further, the adjustment assembly 322 includes an adjustment power member and a moving slide 3221. Specifically, the adjustment power member includes a stationary motor 3222, a lead screw 3223, and a lead screw nut 3224.
Further, an adjusting power member is fixedly installed at the rear side of the connecting seat 321, and the adjusting power member can drive the moving slide plate 3221 to make up-and-down linear reciprocating motion along the guide rail 3222. Specifically, the driving assembly 323 is fixedly mounted on the moving slide 3221. It should be noted that the driving assembly 323 is a driving motor of the main cutter guide wheel, and is an existing driving component, which is not limited herein.
Further, as shown in FIG. 2, three shear rollers 324 surround to form an isosceles triangle configuration. The central axis of the isosceles triangle structure is in the vertical direction. Isosceles triangle's structure can make diamond wire b's line of walking effectual, influences diamond wire b's cutting when avoiding cutting silicon rod a. And three cutting guide wheels 324 are provided on the same vertical plane to ensure cutting of the diamond wire b.
Further, one shear roller 324 is above and two shear rollers 324 are below, all enclosing to form a triangular structure. The top guide cutting wheel 324 is a main guide cutting wheel, the guide cutting wheels 324 on both sides of the central axis are idle wheels, the driving assembly 323 is connected with the main guide cutting wheel, and the through groove is arranged at the position corresponding to the main guide cutting wheel along the vertical direction. The main cutting guide wheel is arranged at the topmost part so as to prevent cutting fluid at the bottom of the silicon rod processing platform 1 from splashing on the driving assembly 323 and the adjusting body 2 when the driving assembly 323 and the adjusting body 2 cut at the diamond wire b, and the driving assembly 323 and the adjusting body 2 are protected from the cutting fluid.
It should be noted that the main cutting guide wheel of the present invention not only functions to drive the diamond wire b and the two idler wheels to rotate, but also can cooperate with the adjusting body 2 to function as tension adjustment. One idle wheel is saved.
In addition, the original weight tension structure is eliminated, the driving assembly 323 is adopted to drive the main cutting guide wheel to move up and down, and then the main cutting guide wheel tensions and releases the annular diamond wire b, so as to achieve the purpose of controlling the tension of the diamond wire b.
Furthermore, the diameter of the main cutting guide wheel is larger than the diameters of the two intermediate wheels, so that the diameter of the main cutting guide wheel can be increased, the integral rotational inertia is reduced, the cutting line speed is increased, the cutting efficiency is improved, and the risk of line breakage is reduced.
Further, the diameter of the main idler cutter is in the range of 300mm-400mm. Preferably, the main cutting guide wheel with the diameter of 350mm is adopted, so that the cutting speed of the diamond wire b can reach the rotating speed of 80m/s for high-speed cutting.
It should be noted that the fixed motor 3222 is fixedly mounted on the support, an output end of the fixed motor 3222 is connected to the lead screw 3223, a lead screw nut 3224 is screwed outside the lead screw 3223, the lead screw nut 3224 is fixedly connected to the movable slider 3221, and two ends of the through slot close to one side of the fixed motor 3222 are provided with a guide rail 3222 for the movable slider 3221 to slide. The fixing motor 3222 is directly and fixedly mounted on the rear side wall of the connecting seat 321, so that the structure is simple and the operation is convenient, and the fixing motor 3222 can receive signals sent by the processor and correspondingly control the rotation and the circling of the fixing motor 3222, thereby controlling the position of the lifting motion of the movable sliding plate 3221, and further controlling the tension of the diamond wire b on the cutting guide wheel 324. That is, the moving slide plate 3221 drives the driving assembly 323 and the main cutting guide wheel to move upward, so that the tension of the diamond wire b is increased, and the loosened diamond wire b can be tightened, thereby improving the cutting effect.
Further, the two idler wheels are detachably mounted on the connecting base 321 through the idler mounting plate 8. The connecting seat 321 is provided with a long strip-shaped hole arranged in the horizontal direction, and the idle wheel mounting plate 8 can slide and be fixed along the long strip-shaped hole. The installation and the disassembly of the idler wheel and the subsequent maintenance are convenient. The size of interval between two idle wheels can be convenient for adjust in the setting in rectangular shape hole, and the interval of two driven idle wheels is adjustable to the processing of the silicon rod a material of adaptation different specification diameters.
Further, a tension sensor 6 is further included, the tension sensor 6 is disposed on one of the idler wheels and is used for detecting tension information of the diamond wire b and sending the tension information to the processor, and the processor controls the adjusting component 322 to move according to the tension information so as to adjust the tension of the diamond wire b. Therefore, the tension can be automatically adjusted, manual work is not needed, time is saved, and cutting efficiency is improved.
Compared, the unable automatic adjustment size of original heavy hammer structure tension when tension is adjusted to needs, needs the manual weight of pulling down, changes the weight and adjusts tension. The structure can automatically adjust the tension according to the tension sensed by the tension sensor, so that a small wire arch is kept stable and unchanged in the cutting process of the silicon rod a, and the cutting quality is improved.
The invention provides an automatic feeding and discharging guillotine shear, which directly drives any one cutting guide wheel 324 through a driving component 323 to be used as a main cutting guide wheel, drives a diamond wire b and other two cutting guide wheels 324 to be used as idle wheels to rotate together, and has good rotation consistency by adopting a direct driving mode. In addition, the main cutting guide wheel and the driving component 323 are fixedly connected with the adjusting component 322 as a whole, the adjusting component 322 drives the main cutting guide wheel and the driving component 323 to slide along the longitudinal direction of the sliding groove, so that the cutting guide wheel 324 connected with the driving component 323 is close to or far away from the gravity center of a triangle, the tension of the diamond wire b is adjusted, compared with the existing gravity hammer adjustment, the adjustment tension of the adjusting component 322 is convenient to change, the tension adjusting time is saved, and the cutting efficiency of the silicon rod a is improved. Moreover, by providing the cutting head 32 on the gantry frame 31, the stability of the cutting head 32 can be ensured, preventing the cutting head 32 from tilting. In addition, the detection components 33 are respectively arranged on two sides of the bottom of the gantry frame 31, and the detection components 33 can ensure that the two sides of the gantry frame 31 synchronously move along the silicon rod processing platform 1, so that the diamond wires b on the cutting head 32 are ensured to be in a straight line, and the phenomenon that the cutting surface is inclined is prevented. Meanwhile, the positioning precision of the walking of the gantry frame 31 is improved. Meanwhile, the positioning precision of the walking of the gantry frame 31 is improved. Furthermore, the platform 1, the cutting mechanism 3 and the blanking mechanism 7 are matched with each other through the positioning mechanism 2 and the silicon rod to complete the automatic feeding and blanking functions, and compared with the existing cutting machine, the automatic multifunctional silicon rod cutting machine realizes full-automatic multifunctional silicon rod cutting.
In this embodiment, the blanking mechanisms 7 are disposed right below the cut-off mechanism 3, that is, two blanking mechanisms 7 are also disposed, so that the silicon rods a can be blanked from two sides, respectively, and the blanking efficiency is improved.
The blanking mechanism 7 comprises two oppositely arranged sampling devices 71 and a tail blanking device 72.
Further, the sampling device 71 is disposed on the silicon rod processing platform 1, and moves towards or away from the head of the silicon rod or the end surface of the sample wafer i along the silicon rod processing platform 1, and the sampling device 71 can support the head of the silicon rod or support and adsorb the sample wafer i, cut the head of the silicon rod and the sample wafer i, and respectively transport the cut head of the silicon rod or the cut sample wafer i to the first blanking position and the second blanking position.
It should be noted that, the cutting and the blanking of the sample i do not need to be carried out manually, and meanwhile, the quality and the accurate blanking of the sample i can be ensured.
It should be noted that the first blanking position and the second blanking position are positions in two different directions. The first blanking position is at the top of the left end of the silicon rod processing platform 1. The second discharge position is located behind the silicon rod processing platform 1, see fig. 7.
As shown in fig. 7 to 10, the sampling device 71 comprises a moving assembly 711, a supporting assembly 712 for cutting off the shaped head of the silicon rod, and a rotating assembly 713.
In the present embodiment, the moving assembly 711 is disposed on the silicon rod processing platform 1, and the moving assembly 711 is capable of relatively sliding along the length direction of the silicon rod processing platform 1.
The supporting component 712 is disposed on the moving component 711, and the supporting component 712 slides relative to the moving component 711 along the length direction of the moving component 711 to be close to the head of the silicon rod or the end surface of the sample wafer i, the supporting component 712 can support the head of the silicon rod or support and adsorb the sample wafer i, the head of the silicon rod or the sample wafer i is cut by the cutting head, and after cutting, the supporting component 712 slides along the length direction of the moving component 711 to be away from the head of the silicon rod, so that the head of the silicon rod falls on the moving component 711.
The moving assembly 711 can drive the head of the silicon rod to be conveyed to the first blanking position, and blanking of the head is performed.
Or the supporting component 712 can drive the sample i to move away from the end face of the silicon rod synchronously, the rotating component 713 is connected with the supporting component 712 and the moving component 711 respectively, and the rotating component 713 can rotate the supporting component 712 adsorbing the sample i to a second blanking position to perform blanking of the sample i. And after the sample i is blanked, detecting the forming result of the silicon rod according to the sample i.
Next, the moving assembly 711 can drive the special-shaped head to be conveyed to the blanking position.
The blanking position is located on the left side of the silicon rod support platform a. And a manipulator is arranged right above the blanking position, so that the blanking clamp manipulator takes the blanking to the conveying roller way, the full-automatic blanking is completed, and the manual work is not needed.
Further, the support assembly 712 includes a support suction structure 7121 and a first auxiliary support assembly 7122. The supporting suction structure 7121 is connected to the moving assembly 711 to support one end of the profile head.
Further, referring to fig. 5-7, the supporting suction structure 7121 includes a supporting body 71211, a head supporting sleeve 1212, and a plurality of sample suction cups 71213. One end face of the support body 71211 is connected to the rotating assembly 713, the other end face of the support body 71211 is connected to the head support sleeve 71212, and the head support sleeve 71212 can support the head of the silicon rod.
The plurality of sample suction cups 71213 are all arranged on one end face of the support main body 71211 close to the head support sleeve 71212, the plurality of sample suction cups 71213 are arranged at intervals along the circumferential direction of the end face of the support main body 71211, the sample suction cups 71213 protrude out of one end of the head support sleeve 71212, and the sample suction cups 71213 can abut against a sample i to adsorb the sample i.
Referring to fig. 5, the support body 71211 has a support base fixed to the lead screw nut of the moving assembly 711 and sliding left and right along with the lead screw nut, the support body 71211 is connected to the head support sleeve 71212 by a support connection rod 132, and the bottom of the head support sleeve 71212 is higher than the top of the first auxiliary support assembly 7122. The head support sleeve 71212 is provided with a conical insertion hole for inserting a conical head, so that the head support sleeve can be better matched with a special-shaped head for supporting and positioning. And the purpose of the head support sleeve 71212 having its bottom portion higher than the top portion of the first auxiliary support component 7122 is to enable support from the contoured head portion at the end and bottom portion, respectively, to ensure support.
Before processing, the axis on the height of the head supporting sleeve 71212 and the axis of the silicon rod need to be ensured to be on the same horizontal line, and the horizontal position of the supporting and positioning device on which the silicon rod is positioned can be adjusted.
In this embodiment, the rotating assembly 713 includes a rotating cylinder 7131 and a support connecting rod 7132. The rotary cylinder one 7131 is connected to the moving assembly 711 through a support body 71211. The output end of the first rotary cylinder 7131 is fixedly connected with the support connecting rod 7132, and the first rotary cylinder 7131 can enable the support connecting rod 7132 to rotate along the axis of the output shaft of the first rotary cylinder 7131 so as to drive the head support sleeve 71212 to rotate. The purpose of adding the first rotary cylinder 7131 is to rotate the support main body 71211 with the sample i by 90 ° in the counterclockwise direction through the first rotary cylinder 7131 during the blanking, and the support adsorption structural member 7121 is rotated and laid down along the axis thereof as a whole, so as to rotate the sample i to the second blanking position. When sampling is not needed, namely when the head needs to be blanked, the purpose of the rotary cylinder I7131 is to give way to the manipulator at the first blanking position when the special-shaped head is blanked.
Referring to fig. 5, a first auxiliary support assembly 7122 is fixedly connected with a support suction structure 7121 to support the bottom end of the shaped head.
Further, the first auxiliary support assembly 7122 comprises a bottom support block 71221 and an auxiliary support cylinder 71222. The auxiliary supporting cylinder 71222 is connected with the bottom supporting block 71221, and the auxiliary supporting cylinder 71222 can drive the bottom supporting block 71221 to lift. The bottom supporting block 71221 can support the bottom end of the head of the silicon rod. The auxiliary support cylinder 71222 can drive the connecting plate 71227 to move up and down, but may be other power members capable of controlling the movement up and down.
It should be noted that the left and right movement of the blanking device on the silicon rod supporting platform a is realized by means of the driving of a walking motor so as to be close to or far away from the special-shaped head in a large direction. When the overall blanking device is close to the special-shaped head, the moving assembly 711 drives the supporting and adsorbing structural member 7121 and the first auxiliary supporting assembly 7122 to further approach the special-shaped head along the sliding rail of the moving assembly 711, so that the special-shaped head is just inserted into the tapered insertion hole, and the bottom supporting block 71221 of the first auxiliary supporting assembly 7122 abuts against the special-shaped head to form good support. In addition, the first auxiliary supporting component 7122 can also move up and down under the support of the auxiliary supporting cylinder 71222 to support the irregular heads with different shapes. It should be noted that the moving component 711 may be any conventional structural component for driving the transverse movement, and will not be described in detail herein.
Further, the first auxiliary support assembly 7122 also comprises an adaptive structural member. The adaptive structural member can generate an elastic force in the transverse direction to make the bottom supporting block 71221 abut against the bottom end of the special-shaped head and fix the bottom supporting block 71221. Through the arrangement of the self-adaptive structural member, the self-adaptive support of the special-shaped heads with different lengths and different taper angles is realized. Meanwhile, the abnormal head can be prevented from generating micro motion in the cutting process, and the phenomenon of edge breakage is reduced. The manual operation is cancelled, after the cutting is finished, the servo motor of the moving assembly 711 drives the cutting machine to a discharging position, and finally the discharging machine is clamped by the discharging manipulator.
Further, the adaptive structural members include adaptive guide rods 71223, springs 71224, guide rod detentors 71225, and support block mounts 71226.
In this embodiment, the connecting plate 71227 is connected to the auxiliary supporting cylinder 71222, the adaptive guide bar 71223 is horizontally disposed on the connecting plate 71227, one end of the adaptive guide bar 71223 close to the bottom supporting block 71221 is fixedly connected to the supporting block mounting base 71226, the spring 71224 is sleeved outside the adaptive guide bar 71223, and two ends of the spring 71224 are respectively abutted to the supporting block mounting base 71226 and the guide bar stopper 71225. The support block mounting receptacle 71226 is used to mount the bottom support block 71221. The bottom supporting block 71221 can realize lifting action under the action of a lifting cylinder of an auxiliary supporting cylinder 71222, can move in the horizontal direction under the action of a spring 71224 and an adaptive guide rod 71223, and can lock and fix the adaptive guide rod 71223 under the action of a guide rod stopper 71225 after the bottom supporting block 71221 is ensured to be in contact with the end part and the bottom inclined plane of the silicon rod, so that the positioning and supporting effects are improved.
Further, the tail blanking device 72 is capable of moving toward or away from the tail of the silicon rod along the silicon rod processing platform 1, so that the tail blanking device 72 supports the tail of the silicon rod and conveys the cut tail to a third blanking position.
In the description of the present invention, it is to be understood that the terms "first", "second" and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium; either as communication within the two elements or as an interactive relationship of the two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, a first feature may be "on" or "under" a second feature, and the first and second features may be in direct contact, or the first and second features may be in indirect contact via an intermediate. Also, a first feature "on," "above," and "over" a second feature may be directly or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lower level than the second feature.
In the description of the present specification, the description of "one embodiment", "some embodiments", "examples", "specific examples" or "some examples", etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are illustrative and not restrictive, and that those skilled in the art may make changes, modifications, substitutions and alterations to the above embodiments without departing from the scope of the present invention.

Claims (10)

1. The utility model provides an automatic go up unloading clipper, includes silicon rod processing platform (1), its characterized in that: the automatic blanking machine is characterized by also comprising a positioning mechanism (2), a cutting mechanism (3) and a blanking mechanism (7), wherein the cutting mechanism (3) and the blanking mechanism are arranged on one side of the positioning mechanism (2);
the cutting mechanism (3) comprises a gantry frame (31), a cutting head (32) and two detection assemblies (33);
the gantry frame (31) is arranged on the silicon rod processing platform (1) and can do linear reciprocating motion along the length direction of the silicon rod processing platform (1);
the cutting head (32) is arranged at the top of the gantry frame (31) and is used for cutting the silicon rod (a) on the silicon rod processing platform (1);
the two detection assemblies (33) are arranged on two sides of the bottom of the gantry frame (31) so as to enable the two sides of the bottom of the gantry frame (31) to synchronously walk;
the positioning mechanism (2) is used for supporting and fixing the silicon rod (a) so as to enable the axis of the silicon rod (a) to be horizontal;
the blanking mechanism (7) can do linear reciprocating motion along the length direction of the silicon rod processing platform (1) so as to be close to the silicon rod (a) and support the cut silicon rod (a), and the cut silicon rod (a) is driven to be far away from the silicon rod (a) on the positioning mechanism (2).
2. The automatic loading and unloading clipper of claim 1, characterized in that: the gantry frame (31) comprises a cross beam (311) and two vertical connecting beams (312) which are arranged in parallel;
the two vertical connecting beams (312) are respectively arranged at two ends of the silicon rod processing platform (1), the bottom of each vertical connecting beam (312) is provided with a driving structural part, the driving structural part can drive the gantry frame (31) to move along the silicon rod (a) platform, and the driving mechanism is in communication connection with the detection component (33);
the cross beam (311) is arranged between the two vertical connecting beams (312), and the cutting head (32) is fixedly connected with the cross beam (311).
3. The automatic loading and unloading clipper of claim 1, characterized in that: the detection assembly (33) is a magnetic grid sensing head.
4. The automatic loading and unloading clipper of claim 3, characterized in that: the cutting head (32) comprises a connecting seat (321), an adjusting assembly (322), a driving assembly (323) and three cutting guide wheels (324);
the connecting seat (321) is vertically arranged above the silicon rod processing platform (1);
the three cutting guide wheels (324) are arranged on the connecting seat (321) in a surrounding manner to form a triangular structure, so that a diamond wire (b) can be routed;
the adjusting assembly (322) and the cutting guide wheel (324) are respectively arranged at two sides of the connecting seat (321), the driving assembly (323) and the adjusting assembly (322) are arranged at the same side of the connecting seat (321) and are fixedly arranged on the adjusting assembly (322), and the output end of the driving assembly (323) is connected with any cutting guide wheel (324) and is used for driving the cutting guide wheel (324) to rotate;
the adjusting assembly (322) drives the guide cutter wheel (324) to approach or move away from the center of gravity of the triangular structure through the driving assembly (323) so as to adjust the tension of the diamond wire (b).
5. The automatic loading and unloading clipper of claim 4, characterized in that: the adjusting assembly (322) comprises an adjusting power part and a movable sliding plate (3221);
the adjusting power part is fixedly arranged on one side of the connecting seat (321), the adjusting power part drives the movable sliding plate (3221) to do linear reciprocating motion along the guide rail (3222), and the guide rail (3222) is arranged on one side, far away from the cutting guide wheel (324), of the connecting seat (321);
the driving component (323) is fixedly arranged on the movable sliding plate (3221).
6. The automatic loading and unloading clipper of claim 1, characterized in that: the positioning mechanism (2) comprises a fixed supporting unit (21) and an adjusting supporting unit (22) which are arranged on the silicon rod processing platform (1) at intervals;
the fixed supporting unit (21) and the adjusting supporting unit (22) are respectively provided with a supporting surface, and the two supporting surfaces are respectively used for supporting two ends of the silicon rod (a) to be processed;
the adjusting and supporting unit (22) lifts and lowers a first end of the silicon rod (a) to level an axis of the silicon rod (a).
7. The automatic loading and unloading clipper of claim 6, characterized in that: the adjusting and supporting unit (22) comprises a supporting base (221), a lifting component (222) and a supporting body (223) which are sequentially arranged from bottom to top, and the supporting body (223) is used for supporting the silicon rod (a) to be processed;
the supporting base (221) is arranged on the silicon rod processing platform (1);
the lifting component (222) drives the supporting body (223) to lift relative to the supporting base (221), and the supporting body (223) is used for driving the silicon rod (a) to lift.
8. The automatic loading and unloading clipper of claim 7, characterized in that: the lifting assembly (222) comprises an adjusting motor (2221), a transmission structural part and a lifting platform (2222);
the adjusting motor (2221) is connected with the lifting table (2222) through the transmission structural part, and the lifting table (2222) is connected with the support main body (223);
the adjusting motor (2221) drives the transmission structure part to drive the lifting platform (2222) to lift, and the lifting platform (2222) is used for driving the support main body (223) to lift.
9. The automatic loading and unloading clipper of claim 6, characterized in that: the fixed support unit (21) and the adjusting support unit (22) each comprise a clamping assembly (4), and the clamping assemblies (4) are used for fixing two ends of the silicon rod (a) with a horizontal axis.
10. The automatic loading and unloading clipper of claim 1, characterized in that: the number of the cutting mechanisms (3) is two, and the two cutting mechanisms (3) are arranged on two sides of the positioning mechanism (2).
CN202211712749.XA 2022-12-29 2022-12-29 Automatic go up unloading clipper Pending CN115958711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211712749.XA CN115958711A (en) 2022-12-29 2022-12-29 Automatic go up unloading clipper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211712749.XA CN115958711A (en) 2022-12-29 2022-12-29 Automatic go up unloading clipper

Publications (1)

Publication Number Publication Date
CN115958711A true CN115958711A (en) 2023-04-14

Family

ID=87359808

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211712749.XA Pending CN115958711A (en) 2022-12-29 2022-12-29 Automatic go up unloading clipper

Country Status (1)

Country Link
CN (1) CN115958711A (en)

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