CN115950903A - Nondestructive testing device and method for optical image guided scanning - Google Patents

Nondestructive testing device and method for optical image guided scanning Download PDF

Info

Publication number
CN115950903A
CN115950903A CN202310123607.8A CN202310123607A CN115950903A CN 115950903 A CN115950903 A CN 115950903A CN 202310123607 A CN202310123607 A CN 202310123607A CN 115950903 A CN115950903 A CN 115950903A
Authority
CN
China
Prior art keywords
point
detected
detector
workpiece
roi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310123607.8A
Other languages
Chinese (zh)
Inventor
闫訸
王海鹏
高硕�
孟德龙
李保磊
徐圆飞
刘念
谷柱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Hangxing Machinery Manufacturing Co Ltd
Original Assignee
Beijing Hangxing Machinery Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Hangxing Machinery Manufacturing Co Ltd filed Critical Beijing Hangxing Machinery Manufacturing Co Ltd
Priority to CN202310123607.8A priority Critical patent/CN115950903A/en
Publication of CN115950903A publication Critical patent/CN115950903A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

The invention relates to a nondestructive testing device and a nondestructive testing method for optical image guided scanning, belongs to the technical field of ray nondestructive testing, and solves the problems of complex motion process, long adjustment time and low position precision in the prior art. The nondestructive testing device includes: the system comprises a scanning system, a guide image acquisition system, a display and a controller; the scanning system comprises a ray source, a detector and a workpiece motion system; the guide image acquisition system is used for acquiring an optical image of the workpiece; the controller receives the optical image, selects an ROI guide image and sends the ROI guide image to the display; the system is also used for obtaining a movement vector of the point to be detected based on a preset mapping relation between the point to be detected and the center of the field of view of the detector according to the coordinates of the point to be detected; moving the point to be detected to the center of the detector visual field according to the moving vector; the display is used for displaying the ROI guiding image and sending the coordinates of the point to be detected to the controller. The detection point of the workpiece to be detected is simply, quickly and accurately moved to the center of the view of the detector.

Description

Nondestructive testing device and method for optical image guided scanning
Technical Field
The invention relates to the technical field of ray nondestructive testing, in particular to a nondestructive testing device and method for optical image guided scanning.
Background
Nondestructive testing is an indispensable tool in industrial development, and reflects the industrial development level of a country to a certain extent. The X-ray detection technology has been applied to the industrial field for nearly a hundred years as a conventional nondestructive detection method. In the early and some current industrial fields (such as military industry manufacturing field), the X-ray detection usually uses film photography as a main detection method, and the detection method has the problems of long detection period, low detection efficiency, high detection cost, environmental pollution caused by treatment waste liquid in a darkroom and the like, and is not suitable for the non-destructive detection development trend of the information age. At present, the digital ray nondestructive detection technology is widely applied in the industrial field. On the premise of ensuring the detection quality of products, the digital ray nondestructive detection technology has the characteristics of high detection speed, low detection cost, easiness in image storage, easiness in realization of remote analysis and diagnosis and the like, and is the development direction of ray detection. By adopting the digital ray nondestructive testing technology, the image contrast can be improved and the identification power of the defects can be improved through the digital image processing methods such as gray level adjustment, enhancement, sharpening and the like, and the automatic screening, positioning and classification of the defects are further realized by adopting a defect identification algorithm, so that the intelligent film evaluation is realized, and the accuracy of defect identification and the film evaluation efficiency are greatly improved.
At present, in a digital ray detection scheme, a workpiece is usually placed on an object stage, and the object stage is located between a ray tube and a detector, so that transillumination imaging of the workpiece by X-rays is realized. Because the imaging visual field is limited by the size of the detector and the angle of the ray bundle, for large-size workpieces, in order to meet the transillumination requirements of different workpiece positions, the movement of the objective table needs to be controlled, and the part to be detected of the workpiece is moved into the imaging visual field of the detector.
The current common control mode is realized by operating a rocker or a mouse to jog, and is easily influenced by the motion speed, the inertia of a motion mechanism and the personal judgment of an operator in the control process, so that the motion process is complex, the adjustment time is long, and the position precision is not high.
Disclosure of Invention
In view of the foregoing analysis, embodiments of the present invention provide a nondestructive testing apparatus and method for optical image guided scanning, so as to solve the problems of complicated motion process, long adjustment time and low position accuracy caused by controlling the movement of a workpiece by operating a joystick or a mouse in a jog manner in the prior art.
In one aspect, an embodiment of the present invention provides a nondestructive testing apparatus with optical image guided scanning, where the nondestructive testing apparatus includes: the system comprises a scanning system, a guide image acquisition system, a display and a controller;
the scanning system comprises a ray source, a detector and a workpiece motion system;
the workpiece motion system is positioned between the ray source and the detector and used for placing and moving a workpiece;
the guide image acquisition system is used for acquiring an optical image of the workpiece and transmitting the optical image to the controller and the display;
the controller selects an ROI guide image on the received optical image and sends the ROI guide image to the display for displaying; the system is also used for obtaining a movement vector of the point to be detected based on a preset mapping relation between the point to be detected and the center of the field of view of the detector according to the coordinates of the point to be detected; controlling a workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece moves to the center of the view field of the detector;
the display is used for displaying the optical image or the ROI guiding image and sending the coordinates of the point to be detected on the selected ROI guiding image to the controller.
Further, the mapping relation between the preset point to be detected and the center of the detector visual field is obtained in the following mode:
two marker points (X) are selected in the ROI guide image A ,Y A ) And (X) B ,Y B ) The distance between the two marker points is greater than a distance threshold;
marking point (X) A ,Y A ) And (X) B ,Y B ) The detection points on the corresponding workpieces are respectively moved to the center of the visual field of the detector, and the movement vectors (X 'of the two mark points are respectively obtained' A ,Y’ A ) And (X' B ,Y’ B ),
For any point (X, Y) to be detected in the ROI guide image, the obtained mapping relation between the point to be detected and the center of the view field of the detector is as follows:
Figure BDA0004080885950000031
Figure BDA0004080885950000032
wherein (X ', Y') is the motion vector of the point (X, Y) to be detected.
Further, the scanning system further comprises: the device comprises a detector fixing platform, a ray source fixing platform and a vertical moving track;
the detector fixing platform is used for placing and fixing the detector;
the ray source fixing platform is used for placing and fixing the ray source;
the detector fixing platform and the ray source fixing platform can move in the vertical direction along the vertical movement track.
Further, the center of the detector is aligned with the center of the ray source.
Further, the workpiece motion system comprises: an object stage and an object stage motion platform;
the object stage is used for placing a workpiece;
and the object stage motion platform is used for placing the object stage and driving the object stage to move in the horizontal plane.
Further, the guidance image acquisition system comprises an industrial camera and an industrial camera fixing platform;
the industrial camera is used for shooting an optical image of the workpiece;
the industrial camera fixing platform is used for placing and fixing the industrial camera, so that the industrial camera is positioned above the object stage and an imaging plane of the industrial camera is parallel to the object stage.
In another aspect, the method for nondestructive testing by optical image guided scanning is characterized by comprising the following steps:
imaging a workpiece to be detected to obtain an optical image of the workpiece;
selecting an image area containing the workpiece on the optical image of the workpiece as an ROI guide image;
selecting one point on the workpiece in the ROI guiding image as a point to be detected;
obtaining a movement vector of a point to be detected based on a preset mapping relation between the point to be detected and the center of the field of view of the detector;
and controlling a workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece moves to the center of the visual field of the detector.
Further, a mapping relation between a preset point to be detected and the center of the field of view of the detector is obtained in the following mode:
two marker points (X) are selected in the ROI guide image A ,Y A ) And (X) B ,Y B );
Marking point (X) A ,Y A ) And (X) B ,Y B ) The detection points on the corresponding workpieces are respectively moved to the center of the visual field of the detector, and the movement vectors (X 'of the two mark points are respectively obtained' A ,Y’ A ) And (X' B ,Y’ B ),
For any point (X, Y) to be detected in the ROI guide image, the obtained mapping relation between the point to be detected and the center of the view field of the detector is as follows:
Figure BDA0004080885950000041
Figure BDA0004080885950000042
wherein (X ', Y') is the motion vector of the point (X, Y) to be detected.
Further, the distance between the two marker points is greater than a distance threshold.
Furthermore, when the system is used for the first time or the parameters of the ROI guide image change, the mapping relation between the point to be detected in the ROI guide image and the center of the detector visual field needs to be calibrated again, and the mapping parameters are updated.
Compared with the prior art, the invention can realize at least one of the following beneficial effects:
the method comprises the steps of obtaining a movement vector of a point to be detected by establishing a mapping relation between the point to be detected and the center of a detector visual field; the controller controls the workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece can be rapidly and accurately moved to the center of the visual field of the detector.
In the invention, the technical schemes can be combined with each other to realize more preferable combination schemes. Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
The drawings, in which like reference numerals refer to like parts throughout, are for the purpose of illustrating particular embodiments only and are not to be considered limiting of the invention.
FIG. 1 is a schematic view of an optical image nondestructive testing apparatus;
FIG. 2 is a schematic diagram of a selection of ROI-guided images on an optical image;
FIG. 3 is a schematic diagram showing the selection of marker points on the ROI guide image;
fig. 4 is a flow chart of pilot scanning.
Detailed Description
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
In an embodiment of the present invention, a nondestructive testing apparatus with optical image guided scanning is disclosed, as shown in fig. 1, the nondestructive testing apparatus includes: the system comprises a scanning system, a guide image acquisition system, a display and a controller;
the scanning system comprises a ray source, a detector and a workpiece motion system;
the workpiece motion system is positioned between the ray source and the detector and used for placing and moving a workpiece;
the guide image acquisition system is used for acquiring an optical image of the workpiece and transmitting the optical image to the controller and the display;
the controller selects an ROI guide image on the received optical image and sends the ROI guide image to the display for displaying; the system is also used for obtaining a movement vector of the point to be detected based on a preset mapping relation between the point to be detected and the center of the field of view of the detector according to the coordinates of the point to be detected; controlling a workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece moves to the center of the view field of the detector;
the display is used for displaying the optical image or the ROI guiding image and sending the coordinates of the point to be detected on the selected ROI guiding image to the controller.
Further, the scanning system further comprises: the device comprises a detector fixing platform, a ray source fixing platform and a vertical moving track;
the detector fixing platform is used for placing and fixing a detector;
the radiation source fixing platform is used for placing and fixing the radiation source;
the detector fixing platform and the ray source fixing platform can move in the vertical direction along the vertical movement track.
Specifically, the detector is fixed on a detector fixing platform, the ray source is fixed on a ray source fixing platform, and when the detector fixing platform and the ray source fixing platform move in the vertical direction along a vertical moving track, the detector and the ray source move in the vertical direction along with the detector and the ray source, so that the adjustment of an imaging focal length and an amplification ratio is realized; the horizontal positions of the detector and the ray source are adjusted in advance.
Further, the detector center and the source center are aligned.
Further, the workpiece motion system comprises: an object stage and an object stage motion platform;
the object stage is used for placing a workpiece;
and the object stage motion platform is used for placing the object stage and driving the object stage to move in the horizontal plane.
Specifically, the object stage can move in the plane of the object stage motion platform, and the workpiece can move in the plane of the object stage motion platform by moving the object stage.
Further, the guidance image acquisition system comprises an industrial camera and an industrial camera fixing platform;
the industrial camera is used for shooting an optical image of the workpiece;
the industrial camera fixing platform is used for placing and fixing the industrial camera, so that the industrial camera is positioned above the object stage, and an imaging plane of the industrial camera is parallel to the object stage.
Specifically, the position of the industrial camera fixing platform can be selected according to conditions, when the camera fixing position is selected, the industrial camera is required to be positioned above the objective table, and meanwhile, the workpiece part needing to be detected when the objective table is positioned at different positions is ensured to be contained in the optical image area.
Specifically, the size of the optical image depends on the relative position of the industrial camera and the object stage, and after the industrial camera is fixed, the optical image area is also fixed. When the camera position is selected, the part of the workpiece to be detected is contained in the optical image area when the objective table is positioned at different positions, so that the part of the workpiece to be detected cannot be contained when the ROI guide image is extracted; therefore, the optical image range is large, the optical image range comprises the ROI-guided images under various conditions, and only the ROI-guided image which is in accordance with the current condition needs to be extracted when the optical image range is used.
The optical image area has a large range, only a part of the area needs to be used, so that the ROI area needs to be extracted from the optical image area, and the image in the extracted ROI area is used as the ROI guide image in the guide scanning process.
Specifically, the ROI-guided image is a region of interest, that is, the ROI-guided image is selected by selecting a region of interest from the optical image, and the selection process is performed on the controller according to parameters of the ROI-guided image or manually selected on the display when the optical image is displayed on the display; the ROI guide image parameters comprise the length and width of the ROI guide image and the position of the upper left corner of the ROI guide image in the optical image;
specifically, when the ROI guide image is acquired for the first time, the region of interest may be selected as the ROI guide image by using a rectangular frame in the optical image region displayed on the display, the controller obtains the ROI guide image parameters according to the positional relationship between the optical image and the ROI guide image, and the ROI guide image is automatically acquired directly according to the ROI guide image parameters for the next time.
Specifically, as shown in fig. 2, the ROI-guided image in the optical image is selected as a schematic diagram. The optical image area is an area corresponding to an image acquired by the industrial camera, the stage area is included in the optical image area, and the workpiece area is included in the stage area.
In fig. 2, the ROI area example 1 and the ROI area example 2 are examples of selecting two ROI guide images, and in the use process, the ROI guide image can automatically select a region meeting requirements in the optical image area according to requirements.
Specifically, as shown in fig. 3, in order to obtain a mapping relationship between a point to be detected on the ROI guide image and the center of the field of view of the detector, an ROI guide image coordinate system needs to be first constructed, where the ROI guide image coordinate system uses the upper left corner of the ROI guide image as an origin, the horizontal direction is an X axis, and the vertical direction is a Y axis.
Further, the mapping relation between the preset point to be detected and the center of the detector visual field is obtained in the following mode:
two marker points (X) are selected in the ROI guide image A ,Y A ) And (X) B ,Y B ) The distance between the two marker points is greater than a distance threshold;
marking point (X) A ,Y A ) And (X) B ,Y B ) The detection points on the corresponding workpieces are respectively moved to the center of the visual field of the detector to respectively obtain the movement vectors (X ') of the two mark points' A ,Y’ A ) And (X' B ,Y’ B ),
For any point (X, Y) to be detected in the ROI guide image, the obtained mapping relation between the point to be detected and the center of the view field of the detector is as follows:
Figure BDA0004080885950000081
Figure BDA0004080885950000082
wherein (X ', Y') is the motion vector of the point (X, Y) to be detected.
Specifically, the selected marker point (X) is used for calibration A ,Y A ) And (X) B ,Y B ) The distance between the two points is larger than a distance threshold value so as to prevent position measurement errors from influencing the accuracy of the mapping relation between the point to be detected and the center of the view of the detector.
In order to obtain a motion vector of a point to be detected, an objective table motion coordinate system needs to be established; specifically, the controller constructs an objective table motion coordinate system according to objective table parameters;
in order to obtain a motion vector from a point to be detected on a workpiece corresponding to any point to be detected in the ROI guide image to the center of the view field of a detector, the mapping relation between a ROI guide image coordinate system and an objective table motion coordinate system needs to be calibrated; in the calibration process, two marker points are selected and markers are placed at corresponding positions. The coordinates of the index point A and the index point B in the optical image coordinate system are (X) A ,Y A ) And (X) B ,Y B ) Marking point (X) A ,Y A ) And (X) B ,Y B ) The motion vectors of the two markers when moving to the center of the detector field of view are (X' A ,Y’ A ) And (X' B ,Y’ B ) (ii) a Coordinate (X) A ,Y A ) And (X) B ,Y B ) Once the marker point is selected, the coordinates (X ') can be confirmed in the optical image coordinate system' A ,Y’ A ) And (X' B ,Y’ B ) When determining, the markers corresponding to the marker point A and the marker point B need to be respectively moved to the center of the detector visual field, and the current movement vector coordinates are recorded.
In (X) A ,Y A ) And (X) B ,Y B )、(X’ A ,Y’ A ) And (X' B ,Y’ B ) After the coordinates of the four point positions are determined, the coordinate points in the optical image coordinate system can be mapped into the objective table motion coordinate system. For a point with optical image coordinates of (X, Y), the motion vector for moving its corresponding position to the center of the detector field of view is (X ', Y'), the calculation method is as follows:
Figure BDA0004080885950000091
specifically, when the nondestructive testing device is used for the first time and the ROI guide image parameters or the objective table motion coordinate system are changed, the ROI guide image parameters need to be reset, and the mapping relation is reestablished; if the ROI area does not change, only the imageIf the content is changed, for example, a new workpiece is shot, the calibration is not needed again.
Example 2
A method of non-destructive inspection with optical image guided scanning, as shown in fig. 4, comprising the steps of:
imaging a workpiece to be detected to obtain an optical image of the workpiece;
selecting an image area containing the workpiece on the optical image of the workpiece as an ROI guide image;
selecting one point on the workpiece in the ROI guide image as a point to be detected;
obtaining a movement vector of a point to be detected based on a preset mapping relation between the point to be detected and the center of the field of view of the detector;
and controlling a workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece moves to the center of the visual field of the detector.
Further, a mapping relation between a preset point to be detected and the center of the field of view of the detector is obtained in the following mode:
two marker points (X) are selected in the ROI guide image A ,Y A ) And (X) B ,Y B );
Marking point (X) A ,Y A ) And (X) B ,Y B ) The detection points on the corresponding workpieces are respectively moved to the center of the visual field of the detector, and the movement vectors (X 'of the two mark points are respectively obtained' A ,Y’ A ) And (X' B ,Y’ B ),
For any point (X, Y) to be detected in the ROI guide image, the obtained mapping relation between the point to be detected and the center of the view field of the detector is as follows:
Figure BDA0004080885950000101
Figure BDA0004080885950000102
wherein (X ', Y') is the motion vector of the point (X, Y) to be detected.
Further, the distance between the two marker points is greater than a distance threshold.
Furthermore, when the system is used for the first time or the parameters of the ROI guide image change, the mapping relation between the point to be detected in the ROI guide image and the center of the visual field of the detector needs to be calibrated again, and the mapping parameters are updated; if the ROI region does not change, but only the content in the image changes, e.g. a new workpiece is taken, no re-calibration is necessary.
Specifically, when the parameter setting is completed and updating is not needed, only the scanning process of the point to be detected on the ROI guide image needs to be performed, that is, the point to be detected of the workpiece is moved to the center of the view field of the detector.
Compared with the prior art, the nondestructive testing device and method for optical image guided scanning provided by the embodiment obtain the motion vector of the point to be detected by establishing the mapping relation between the point to be detected and the center of the field of view of the detector; the controller controls the workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece can be rapidly and accurately moved to the center of the view field of the detector.
Those skilled in the art will appreciate that all or part of the flow of the method implementing the above embodiments may be implemented by a computer program, which is stored in a computer readable storage medium, to instruct related hardware. The computer readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory, etc.
While the invention has been described with reference to specific preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims.

Claims (10)

1. An optical image guided scanning non-destructive inspection apparatus, comprising: the system comprises a scanning system, a guide image acquisition system, a display and a controller;
the scanning system comprises a ray source, a detector and a workpiece motion system;
the workpiece motion system is positioned between the ray source and the detector and used for placing and moving a workpiece;
the guide image acquisition system is used for acquiring an optical image of the workpiece and transmitting the optical image to the controller and the display;
the controller selects an ROI guide image on the received optical image and sends the ROI guide image to the display for displaying; the system is also used for obtaining a movement vector of the point to be detected based on a preset mapping relation between the point to be detected and the center of the field of view of the detector according to the coordinates of the point to be detected; controlling a workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece moves to the center of the view field of the detector;
the display is used for displaying the optical image or the ROI guiding image and sending the coordinates of the point to be detected on the selected ROI guiding image to the controller.
2. The apparatus of claim 1, wherein the mapping relationship between the predetermined point to be detected and the center of the field of view of the detector is obtained as follows:
two marker points (X) are selected in the ROI guide image A ,Y A ) And (X) B ,Y B ) The distance between the two marker points is greater than a distance threshold;
marking point (X) A ,Y A ) And (X) B ,Y B ) The detection points on the corresponding workpieces are respectively moved to the center of the visual field of the detector to respectively obtain the movement vectors (X ') of the two mark points' A ,Y’ A ) And (X' B ,Y’ B ),
For any point (X, Y) to be detected in the ROI guide image, the obtained mapping relation between the point to be detected and the center of the view field of the detector is as follows:
Figure FDA0004080885930000011
Figure FDA0004080885930000012
wherein (X ', Y') is the motion vector of the point (X, Y) to be detected.
3. An optical image-guided scanning nondestructive inspection apparatus according to claim 2 wherein the scanning system further comprises: the device comprises a detector fixing platform, a ray source fixing platform and a vertical moving track;
the detector fixing platform is used for placing and fixing a detector;
the radiation source fixing platform is used for placing and fixing the radiation source;
the detector fixing platform and the ray source fixing platform can move in the vertical direction along the vertical movement track.
4. The apparatus of claim 3, wherein the detector center and the source center are aligned.
5. An optical image-guided scanning non-destructive inspection device according to claim 4, wherein said workpiece motion system comprises: an object stage and an object stage motion platform;
the object stage is used for placing a workpiece;
and the object stage motion platform is used for placing the object stage and driving the object stage to move in the horizontal plane.
6. The apparatus of claim 5, wherein the guided image acquisition system comprises an industrial camera and an industrial camera mounting platform;
the industrial camera is used for shooting an optical image of the workpiece;
the industrial camera fixing platform is used for placing and fixing the industrial camera, so that the industrial camera is positioned above the object stage and an imaging plane of the industrial camera is parallel to the object stage.
7. A method of non-destructive inspection with optical image-guided scanning, comprising the steps of:
imaging a workpiece to be detected to obtain an optical image of the workpiece;
selecting an image area containing the workpiece on the optical image of the workpiece as an ROI guide image;
selecting one point on the workpiece in the ROI guiding image as a point to be detected;
obtaining a movement vector of a point to be detected based on a preset mapping relation between the point to be detected and the center of the field of view of the detector;
and controlling a workpiece motion system to drive the workpiece to move according to the motion vector, so that the point to be detected on the workpiece moves to the center of the visual field of the detector.
8. The nondestructive testing method of optical image guided scanning according to claim 7, wherein the mapping relationship between the preset point to be detected and the center of the field of view of the detector is obtained by:
two marker points (X) are selected in the ROI guide image A ,Y A ) And (X) B ,Y B );
Marking point (X) A ,Y A ) And (X) B ,Y B ) The detection points on the corresponding workpieces are respectively moved to the center of the visual field of the detector to respectively obtain the movement vectors (X ') of the two mark points' A ,Y’ A ) And (X' B ,Y’ B ),
For any point (X, Y) to be detected in the ROI guiding image, the obtained mapping relation between the point to be detected and the center of the visual field of the detector is as follows:
Figure FDA0004080885930000031
Figure FDA0004080885930000032
wherein (X ', Y') is the motion vector of the point (X, Y) to be detected.
9. The method of claim 8, wherein the distance between the two marker points is greater than a distance threshold.
10. The method as claimed in claim 9, wherein when the system is used for the first time or the parameters of the ROI-guided image change, the mapping relationship between the point to be detected in the ROI-guided image and the center of the field of view of the detector needs to be recalibrated to update the mapping parameters.
CN202310123607.8A 2023-02-16 2023-02-16 Nondestructive testing device and method for optical image guided scanning Pending CN115950903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310123607.8A CN115950903A (en) 2023-02-16 2023-02-16 Nondestructive testing device and method for optical image guided scanning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310123607.8A CN115950903A (en) 2023-02-16 2023-02-16 Nondestructive testing device and method for optical image guided scanning

Publications (1)

Publication Number Publication Date
CN115950903A true CN115950903A (en) 2023-04-11

Family

ID=87289413

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310123607.8A Pending CN115950903A (en) 2023-02-16 2023-02-16 Nondestructive testing device and method for optical image guided scanning

Country Status (1)

Country Link
CN (1) CN115950903A (en)

Similar Documents

Publication Publication Date Title
CN107356608B (en) Rapid dark field detection method for surface microdefects of large-caliber fused quartz optical element
CN103776831B (en) A kind of micro-imaging detecting instrument and automatic focusing method thereof
US8111902B2 (en) Method and apparatus for inspecting defects of circuit patterns
US11189012B2 (en) Arrangement having a coordinate measuring machine or microscope
JP2001338601A (en) Scanning electron microscope
CN111210479B (en) Laser auxiliary calibration device and method for measuring sizes of parts with different heights
JP5296578B2 (en) Automatic specimen tilting device for electron microscope
CN114815210A (en) Method for checking the rotation of a microscope camera and microscope system
JP4928987B2 (en) Charged particle beam adjustment method and charged particle beam apparatus
JP2002168793A (en) Surface defect inspection device and surface defect inspection method
JPWO2017033591A1 (en) Charged particle beam apparatus and sample stage alignment adjustment method
CN115950903A (en) Nondestructive testing device and method for optical image guided scanning
JP7287957B2 (en) Radiation detection device, computer program and positioning method
US6115450A (en) X-ray fluorescence analyzer capable of determining the center of a sample
CN115326844A (en) Automatic ray detection system and method for welding seam
JP2519445B2 (en) Work line tracking method
KR20100034039A (en) Micro-dimension measuring method and measuring device
CN114758346A (en) High-precision image global microscopic printing document identification system
JP4133657B2 (en) X-ray fluoroscope for precision measurement
JPH11283035A (en) Focus adjustment device for image equipment
KR20220062635A (en) Inspection system, and non-transitory computer-readable medium
JPH07225121A (en) Appearance inspection device
JP2003227710A (en) Defect image sensing device and image sensing method
JP5491817B2 (en) Thin film sample position recognition system in electron microscope
JP4596881B2 (en) Transmission electron microscope equipment

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination