CN115950624A - Broadband achromatic phase retarder delay calibration system and calibration method - Google Patents

Broadband achromatic phase retarder delay calibration system and calibration method Download PDF

Info

Publication number
CN115950624A
CN115950624A CN202310222020.2A CN202310222020A CN115950624A CN 115950624 A CN115950624 A CN 115950624A CN 202310222020 A CN202310222020 A CN 202310222020A CN 115950624 A CN115950624 A CN 115950624A
Authority
CN
China
Prior art keywords
polarizer
light intensity
analyzer
broadband achromatic
phase retarder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202310222020.2A
Other languages
Chinese (zh)
Other versions
CN115950624B (en
Inventor
史冬冬
曹昭斌
李泽
杨国伟
蔡锃宇
杨军
王斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing Astronomical Instruments Co Ltd
Original Assignee
Nanjing Astronomical Instruments Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing Astronomical Instruments Co Ltd filed Critical Nanjing Astronomical Instruments Co Ltd
Priority to CN202310222020.2A priority Critical patent/CN115950624B/en
Publication of CN115950624A publication Critical patent/CN115950624A/en
Application granted granted Critical
Publication of CN115950624B publication Critical patent/CN115950624B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention discloses a calibration system and a calibration method for delay amount of a broadband achromatic phase retarder. The system comprises a light source, an aperture diaphragm, a rotatable polarizer, a rotatable broadband achromatic phase retarder, a rotatable analyzer and an optical power meter, wherein the polarizer and the analyzer both adopt polarizing prisms. The invention deduces the expression of the phase retardation of the retarder containing extinction ratio parameters based on the Mueller matrix of the polarizer, and builds a calibration system of the phase retardation of the broadband achromatic 1/4 wave plate. The system does not need auxiliary light paths such as a reference light path and the like, so that the system has a compact and simple structure and meets the measurement requirement of the phase retarder on the retardation; the method can obtain the relation between the parameters of the polarization device and the phase retardation in a relative angle method, has high rotation precision and accurate calibration result of the retardation, and has certain application value in accurate measurement application.

Description

Broadband achromatic phase retarder delay calibration system and calibration method
Technical Field
The invention belongs to the technical field of optics, particularly relates to measurement of retardation of a broadband achromatic phase retarder on each wavelength in a certain wavelength range, and particularly relates to a calibration method and a calibration system of a broadband achromatic 1/4 wave plate.
Background
The broadband achromatic 1/4 wave plate can enable light to achieve required phase delay in a large wave band range, has very wide application, can be applied to the industrial fields of polarization spectrum, optical communication, astronomical measurement, polarization imaging and the like, and puts higher requirements on the phase delay amount and the precision of a fast axis azimuth angle of the retarder along with the development of a precision manufacturing technology and a modern optical measurement technology, so that the measurement of the phase delay amount of the retarder under a specific environment is particularly important.
In the atmospheric remote sensing polarization detection, in order to make the obtained polarization detection information more accurate, an optical system is required to have high measurement precision and controllability of rotation errors. The current calibration method for the delay amount of the delay piece comprises the following steps: the calibration method is characterized in that a photoelastic modulation method, an electro-optical modulation method, a polarization modulation method, an optical heterodyne phase detection method, a rotation measurement method and the like are relatively complex, for example, an electro-optical modulator and a reference light path are also required to be adopted in an electro-optical modulation phase comparison method, the calibration method has higher requirements on the initial angle of a polarizing device, and the influence of the extinction ratio parameter of the polarizing device on the actual calibration result is not considered.
With the increasing maturity of the calibration theory, the calibration method is more novel, and in order to meet the requirement of high-precision measurement in practical use, a calibration system of the broadband achromatic 1/4 wave plate needs to have the characteristics of high calibration speed, high precision and the like.
Disclosure of Invention
Aiming at the problems of the measurement method and the precision, the invention deduces the expression of the phase retardation of the retarder containing the extinction ratio parameter based on the Mueller matrix of the polarizing prism, and can realize the calibration of each wavelength retardation of the broadband achromatic phase retarder on the measurement wavelength band.
In order to achieve the purpose, the invention provides the following technical scheme:
a broadband achromatic phase retarder delay amount calibration system sequentially comprises a light source, an aperture diaphragm, a rotatable polarizer, a rotatable broadband achromatic phase retarder, a rotatable analyzer and an optical power meter along the direction of a light path, wherein the polarizer and the analyzer both adopt polarizing prisms; the Stokes vector of the emergent light vertically passes through the polarizer, the broadband achromatic phase retarder and the analyzerS out Expressing in the form of product, and expanding the Mueller matrix to obtainS out Is a first light intensity value; rotating a wide band achromatic phase retarder by deltaθ 2 Angle to obtain a second light intensity value, and adding the first light intensity value and the second light intensity value to obtain a third light intensity value
Figure SMS_1
Then rotate the analyzer by deltaθ 3 Angle to obtain a fourth light intensity value->
Figure SMS_2
(ii) a Obtaining the delay amount of the broadband achromatic phase retarder through an expression of a third light intensity value and a fourth light intensity value; according to the expression of the retardation of the broadband achromatic phase retarder, when the relative light intensity values of the polarizer and the analyzer are known, only the relative light intensity is measured>
Figure SMS_3
and />
Figure SMS_4
The phase delay amount of the broadband achromatic phase delay sheet can be obtained, whereinI 0 Is the light intensity value of the light source.
Furthermore, the working wavelength of the wide-band achromatic phase retarder is within the working wavelength bands of the polarizer and the analyzer.
Furthermore, a first positive lens and a second positive lens are sequentially arranged between the aperture diaphragm and the polarizer along the light path direction, wherein the focal length of the first positive lensf 1 Greater than the second positive permeabilityFocal length of mirrorf 2 And the two long and short focal length positive lenses are combined to form a quasi-telecentric light path for further collimating the light path.
Furthermore, an optical filter is arranged between the aperture diaphragms inside the system.
Further, the light source is a halogen lamp light source.
Further, the polarizing prism is arranged on the precise rotary displacement table which can be electrically controlled.
Further, the polarizing prism is a Glan Thompson polarizing prism.
Furthermore, the broadband achromatic phase retarder is arranged on an electrically-operated precise rotary displacement table.
Furthermore, the wide-band achromatic phase retardation plate is a 1/4 wave plate, and the phase retardation of the 1/4 wave plateδComprises the following steps:
Figure SMS_5
wherein ,
Figure SMS_6
wherein ,K i is a relative light intensity value.
A calibration method for the retardation of a broadband achromatic phase retarder based on the system comprises the following steps:
the method comprises the following steps: adjusting the height of each instrument to enable the light beam to vertically enter the optical power meter, blocking the light beam and adjusting the display value of the optical power meter to be 0;
step two: selecting proper measuring range of the optical power meter and recording the light intensity value of the light sourceI 0
Step three: if no extinction ratio is given, the method is as followsK 1 AndK 2 of value and analyzerK 3 AndK 4 a value; installing polarizer or analyzer in front of optical power meter, adjusting height to make light beam perpendicularly irradiate to its center, rotating polarizer to record maximum light intensityI max And minimum light intensityI min Then, we can get:
Figure SMS_7
step four: while maintaining the initial angles of the polarizer and the analyzerθ 1 =θ 3 Under the condition of =0 degrees, the broadband achromatic phase retarder to be detected is arranged between the polarizer and the analyzer, the fast axis angle and the height of the broadband achromatic phase retarder are adjusted to enable the optical path to be coaxial, and the broadband achromatic phase retarder is rotated to enable the angle change delta to be deltaθ 2 Angle, at which the light intensity value is
Figure SMS_8
(ii) a Continued rotation of the analyzer by deltaθ 3 Angle, the light intensity value is->
Figure SMS_9
Step five: calculating to obtain the phase delay amount of the broadband achromatic phase retarderδ
Compared with the prior art, the invention has the beneficial effects that:
1. the invention obtains the expression of the phase retardation of the retarder containing the extinction ratio parameter by deducing the Mueller matrix based on the polarizer, realizes the calibration of each wavelength retardation of the broadband achromatic phase retarder on a measuring waveband, can further popularize and calibrate any phase retarder, and has universality;
2. the system adopts the Glan Thompson polarizing prism and the electric control PRM1Z8 precise rotary displacement table rotary delay plate, and has high calibration result accuracy and good stability due to the ultrahigh extinction ratio of the polarizing prism and the rotary precision of the rotary displacement table;
3. the system has a simple structure, does not have other auxiliary light paths, performs quasi-telecentric light path design, uses two long and short focal length positive lenses in combination, further collimates the light path, and greatly reduces the error of the system;
4. the filter plate is placed in front of the aperture diaphragm, so that stray light entering the system for imaging is reduced to a great extent.
Drawings
FIG. 1 is a schematic structural diagram of a broadband achromatic 1/4 wave plate retardation calibration method and system;
FIG. 2 is a schematic diagram of the angle between the transmission axis direction and the axis of the linear polarizer.
The labels in the figure are: 1-halogen lamp light source; 2-an optical filter; 3-aperture diaphragm; 4-a first positive lens; 5-a second positive lens; 6-a first Glan Thompson polarizing prism; 7-broadband achromatic 1/4 wave plate; 8-a second Glan Thompson polarizing prism; 9-optical power meter.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The embodiment provides a calibration system and a calibration method for retardation of a broadband achromatic phase retarder, wherein the broadband achromatic phase retarder is specifically described by an example of a broadband achromatic 1/4 wave plate.
As shown in fig. 1, a broadband achromatic phase retarder retardation calibration system includes a set of light sources (specifically, a halogen lamp light source 1 in this embodiment), a plurality of wavelength filters 2 with various specifications, an aperture stop 3, a first positive lens 4, a second positive lens 5, a first Glan Thompson polarizing prism 6, a rotatable broadband achromatic 1/4 wave plate 7 to be calibrated and installed on an electrically-controllable PRM1Z8 precision rotary displacement stage, a second Glan Thompson polarizing prism 8, and an optical power meter 9. The halogen lamp light source 1 sequentially passes through the optical filter 2, the aperture diaphragm 3, the first positive lens 4, the second positive lens 5, the first Glan Thompson polarizing prism 6 (polarizer), the broadband achromatic 1/4 wave plate 7, the second Glan Thompson polarizing prism 8 (analyzer) and the optical power meter 9 to obtain a measured light intensity value. Wherein, the rotation of the Glan Thompson polarizing prism and the wide-band achromatic 1/4 wave plate is carried out by a PRM1Z8 precise rotary displacement table.
The halogen lamp light source 1 is arranged in front of the optical system, and emergent light and other wave plates of the system are positioned on the same light path; the optical filter 2 is arranged in the optical system and in front of the aperture diaphragm 3, so that the stray light is greatly reduced for measuring results(ii) an effect; focal length of the first positive lens 4f 1 Is larger than the focal length of the second positive lens 5f 2 In the embodiment, a quasi-telecentric light path is designed, and two long and short focal length positive lenses are used in combination to further collimate the light path, so that the error of the system is greatly reduced; the wide-band achromatic 1/4 wave plate 7 to be calibrated is arranged on an electrically-operated PRM1Z8 precision rotary displacement table, the wide-band achromatic 1/4 wave plate selected in the scheme of the embodiment is formed by aligning a crystal quartz plate with a slow axis of a magnesium fluoride or ultraviolet sapphire plate, the size of the wide-band achromatic 1/4 wave plate is 1/2 inch, and the working wave band is 400-850 nm; the polaroids (the polarizer and the analyzer) are Glan Thompson polarizing prisms, namely, the first Glan Thompson polarizing prism 6 serving as a polarizer and the second Glan Thompson polarizing prism 8 serving as an analyzer are both arranged on an electrically-controllable PRM1Z8 precise rotary displacement table, and the working wavelength of a wide-band achromatic 1/4 wave plate 7 to be calibrated is within the working waveband of the Glan Thompson polarizing prism; in the scheme of the embodiment, the rotation range of the selected rotating device is 0-360 degrees, the maximum rotation speed is 25 degrees/Sec, and the accuracy percentage is 0.1 percent; the Glan Thompson polarizing prism selected in the scheme of the embodiment is prepared by gluing two prisms made of high-grade calcite, the working waveband is 400-2300nm, the extinction ratio is 100000; the optical power meter 9 can select different apertures and a plurality of sensitivity levels.
The linear polarizer transmission axis direction is shown in relation to the axis angle in fig. 2, where, z is the light propagation direction,xis a horizontal axis of rotation of the shaft,θ n the included angle between the transmission axis and the horizontal direction is referred to as a polarizing prism, and the included angle between the fast axis direction and the horizontal direction is referred to as a quarter-wave plate. Assuming the transmission axis direction of the linear polarizer andxincluded angle of axis ofθAnd the counterclockwise direction is defined as the general case under consideration, the Mueller matrix of polarizer P (or analyzer a) is:
Figure SMS_10
(1)
in the above formulaKK * In relation to the extinction coefficient of the device,K(orK * ) Is the ratio of the maximum (or minimum) intensity of linearly polarized light transmitted through the polarizer to the incident intensity, i.e., the relative intensity value.
The Mueller matrix of the retarder W is:
Figure SMS_11
(2)
natural light
Figure SMS_12
The Stokes vector after passing through the polarizer P, the retardation plate W and the analyzer a is represented as:
Figure SMS_13
(3)
after the light source vertically passes through the polarizer P, the delay plate W and the analyzer A, the light intensity received by the optical power meter is as follows:
Figure SMS_14
(4)
wherein δIs the phase retardation of the broadband achromatic 1/4 wave plate W,θ 1θ 2 andθ 3 the transmission axis direction of the polarizer P, the fast axis direction of the retardation plate W and the transmission axis direction and the level of the analyzer AxThe angle of the axes. The polarizers P being used here separatelyK 1K 2 Respectively corresponding to the aboveKAndK * correspondingly, the analyzer A is respectively usedK 3K 4 Respectively corresponding to the aboveKAndK * and correspondingly. When the retardation plate W rotates by deltaθ 2 After that, the formula (4) becomes:
Figure SMS_15
(5)
adding equation (4) to equation (5) yields:
Figure SMS_16
(6)
under the condition of ensuring that the initial angles of the polarizer P and the analyzer A are unchanged, the broadband achromatic 1/4 wave plate W rotates 45 degrees relatively, namely deltaθ 2 = 45 °, by substituting the following equation (6):
Figure SMS_17
(7)
the analyzer A is then rotated by 45, i.e. Δθ 3 = 45 °, by substituting the following equation (7):
Figure SMS_18
(8)
at present, the order is as follows:
Figure SMS_19
(9)
then the phase delay amount is obtainedδComprises the following steps:
Figure SMS_20
(10)
wherein ,I 0 is the value of the light intensity of the light source,K i i= 1-4) are relative light intensity values. As can be seen from equations (9) and (10): if parameters of polarizer and analyzer are measuredK 1K 2K 3K 4 If known, only the relative light intensity is measured
Figure SMS_21
and />
Figure SMS_22
So as to obtain the phase retardation of the broadband achromatic 1/4 wave plateδ
When applied to a wide-band achromatic retarder with arbitrary phase, the above derivation process is summarized as:
(1) Light source vertically passes through polarizer and broadband achromatic phase retarderAnd Stokes vector of emergent light after analyzerS out Expressing in the form of product, and expanding the Mueller matrix to obtainS out Is a first light intensity value;
(2) Rotating a wide band achromatic phase retarder by deltaθ 2 Angle to obtain a second light intensity value, and adding the first light intensity value and the second light intensity value to obtain a third light intensity value
Figure SMS_23
Then rotate the analyzer by deltaθ 3 Angle to obtain a fourth light intensity value->
Figure SMS_24
(3) Obtaining the delay amount of the broadband achromatic phase retarder through an expression of the third light intensity value and the fourth light intensity value;
(4) According to the expression of the retardation of the broadband achromatic phase retarder, when the relative light intensity values of the polarizer and the analyzer are known, only the relative light intensity is measured
Figure SMS_25
and />
Figure SMS_26
The phase delay amount of the broadband achromatic phase delay sheet can be obtained, whereinI 0 Is the light intensity value of the light source.
Since the derivation process is universal, the invention is not limited to the scaling of 1/4 wave plate, and can be extended to scaling the phase retardation of any size phase retardation plate.
The calibration method of the broadband achromatic phase retarder delay calibration system specifically comprises the following steps:
first, the optical power meter is zeroed. Adjusting the height of each instrument to enable the light beam to vertically enter the power meter, blocking the light beam and adjusting the display value of the optical power meter to be 0, wherein the step is to reduce the interference of ambient light and noise;
second, the intensity of the light source is recordedI 0 . Selecting appropriate amount of power meterRecording the light intensity value of the light source;
thirdly, if no extinction ratio is given, the method is as followsK 1 AndK 2 of values and analyzersK 3 AndK 4 the value is obtained. Installing polarizer or analyzer in front of power meter, adjusting height to make light beam vertically enter center, rotating polarizer to record maximum light intensityI max And minimum light intensityI min . Then, it can be found that:
Figure SMS_27
(11)
fourth, record the light intensity value
Figure SMS_28
and />
Figure SMS_29
(ii) a While maintaining the initial angles of the polarizer and the analyzerθ 1 =θ 2 And under the condition of =0 degrees, the retarder to be detected and the control device thereof are arranged between the two polarizers according to the diagram 1, and the fast axis angle and the height of the 1/4 wave plate are adjusted to enable the light path to be coaxial. The KDC101 direct current servo controller is used for rotating the delay sheet in the experiment, the angle is changed by 45 degrees, and the light intensity value is greater or less than the preset value at the moment>
Figure SMS_30
(ii) a Continuously rotating the analyzer to change 45 deg., the light intensity value is->
Figure SMS_31
. Polarizer initial angle in multiple change experimentθ 1 Repeating the experiment to reduce errors, and recording 20 groups of data;
fifthly, calculating the phase delay amount of the retardation plateδ. The phase retardation of the 1/4 wave plate was calculated according to equation (10), the average retardation was 87.784 °, and the average relative error was 0.05%, and the data are shown in table 1.
TABLE 1 summary of phase retardation of achromatic 1/4 wave plate for a wide band
Figure SMS_32
In summary, the invention discloses a calibration system and a calibration method for the retardation of a broadband achromatic phase retarder, aiming at the defect that the relative angle method is used for measuring the retardation of the retarder, the invention deduces the expression of the retardation of the retarder containing extinction ratio parameters based on the Mueller matrix of a polarizer, and builds up the system for the retardation of the broadband achromatic phase retarder. The system does not need auxiliary light paths such as a reference light path and the like, so that the system is compact and simple in structure and meets the measurement requirement of the phase delay piece on the delay amount; the method can obtain the relation between the parameters of the polarization device and the phase retardation in a relative angle method, has high rotation precision and accurate calibration result of the retardation, and has certain application value in accurate measurement application. The system adopts the Glan Thompson polarizing prism as a polarizer and an analyzer, has high extinction ratio, and further improves the accuracy and stability of a calibration result by using the electric controllable PRM1Z8 precise rotary displacement table to rotate the broadband achromatic phase retarder to be calibrated.
Those skilled in the art to which the present invention pertains can also make appropriate alterations and modifications to the above-described embodiments. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and variations of the present invention should fall within the scope of the claims of the present invention. Furthermore, although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.

Claims (10)

1. A broadband achromatic phase retarder delay amount calibration system is characterized by comprising a light source, an aperture diaphragm, a rotatable polarizer, a rotatable broadband achromatic phase retarder, a rotatable analyzer and an optical power meter in sequence along the direction of an optical path, wherein the polarizer and the analyzer both adopt polarizing prisms; the Stokes vector of the emergent light vertically passes through the polarizer, the broadband achromatic phase retarder and the analyzerS out Expressed in the form of product, the Mueller matrix is developed to obtainS out Is a first light intensity value; rotating a wide band achromatic phase retarder by deltaθ 2 Angle to obtain a second light intensity value, and adding the first light intensity value and the second light intensity value to obtain a third light intensity value
Figure QLYQS_1
Then rotate the analyzer by deltaθ 3 Angle to obtain a fourth light intensity value>
Figure QLYQS_2
(ii) a Obtaining the delay amount of the broadband achromatic phase retarder through an expression of the third light intensity value and the fourth light intensity value; according to the expression of the retardation of the broadband achromatic phase retarder, when the relative light intensity values of the polarizer and the analyzer are known, only the relative light intensity is measured>
Figure QLYQS_3
and />
Figure QLYQS_4
The phase delay amount of the broadband achromatic phase delay sheet can be obtained, whereinI 0 Is the light intensity value of the light source.
2. The system of claim 1, wherein the operating wavelength of the broadband achromatic retarder is within the operating wavelength bands of the polarizer and the analyzer.
3. The system for calibrating the retardation of a broadband achromatic phase retarder according to claim 1, wherein a first positive lens and a second positive lens are sequentially arranged between the aperture stop and the polarizer along the optical path direction, and the focal length of the first positive lensf 1 Greater than the focal length of the second positive lensf 2 Two long and short focal length positive lenses are combined to form a quasi-telecentric light pathFor further collimating the light path.
4. The system according to claim 1, wherein an optical filter is further disposed between the aperture stops inside the system.
5. The system of claim 1, wherein the light source is a halogen light source.
6. The system of claim 1, wherein the polarizing prism is mounted on a fine, electrically-steerable rotary displacement stage.
7. The system of claim 1, wherein the polarizer is a Glan Thompson polarizer.
8. The system of claim 1, wherein the broadband achromatic retarder is mounted on an electrically-steerable precision rotary displacement stage.
9. The system of claim 1, wherein the broadband achromatic phase retarder is a 1/4 wave plate, and the 1/4 wave plate has a retardationδComprises the following steps:
Figure QLYQS_5
wherein ,
Figure QLYQS_6
wherein ,K i is relative lightThe intensity of the light beam is strong,i=1-4。
10. a method for scaling the retardation of a broadband achromatic retarder based on the system of any one of claims 1-9, comprising the steps of:
the method comprises the following steps: adjusting the height of each instrument to enable the light beam to vertically enter the optical power meter, blocking the light beam and adjusting the display value of the optical power meter to be 0;
step two: selecting proper measuring range of the optical power meter and recording the light intensity value of the light sourceI 0
Step three: if no extinction ratio is given, the method is as followsK 1 AndK 2 of value and analyzerK 3 AndK 4 a value; installing polarizer or analyzer in front of optical power meter, adjusting height to make light beam vertically irradiate to center, rotating polarizer to record maximum light intensityI max And minimum light intensityI min Then, we can get:
Figure QLYQS_7
step four: while maintaining the initial angles of the polarizer and the analyzerθ 1 =θ 3 Under the condition of =0 degrees, the broadband achromatic phase retarder to be detected is arranged between the polarizer and the analyzer, the fast axis angle and the height of the broadband achromatic phase retarder are adjusted to enable the optical path to be coaxial, and the broadband achromatic phase retarder is rotated to enable the angle change delta to be deltaθ 2 Angle, at which the light intensity value is
Figure QLYQS_8
(ii) a Continued rotation of the analyzer by deltaθ 3 Angle, the light intensity value is->
Figure QLYQS_9
Step five: calculating to obtain the phase delay amount of the broadband achromatic phase retarderδ
CN202310222020.2A 2023-03-09 2023-03-09 Broadband achromatic phase delay piece delay amount calibration system and calibration method Active CN115950624B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310222020.2A CN115950624B (en) 2023-03-09 2023-03-09 Broadband achromatic phase delay piece delay amount calibration system and calibration method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310222020.2A CN115950624B (en) 2023-03-09 2023-03-09 Broadband achromatic phase delay piece delay amount calibration system and calibration method

Publications (2)

Publication Number Publication Date
CN115950624A true CN115950624A (en) 2023-04-11
CN115950624B CN115950624B (en) 2023-06-13

Family

ID=85903289

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310222020.2A Active CN115950624B (en) 2023-03-09 2023-03-09 Broadband achromatic phase delay piece delay amount calibration system and calibration method

Country Status (1)

Country Link
CN (1) CN115950624B (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060139639A1 (en) * 2004-12-29 2006-06-29 Optimax Technology Corporation Apparatus and method for measuring phase retardation
CN101183043A (en) * 2007-12-07 2008-05-21 大恒新纪元科技股份有限公司北京光电技术研究所 Optical phase put-off precision measurement method and system thereof
CN102175430A (en) * 2011-01-25 2011-09-07 中国科学院上海光学精密机械研究所 Device and method for measuring 1/8 wave plate phase retardation and fast axis azimuth angle
CN102589850A (en) * 2012-01-13 2012-07-18 中国科学院国家天文台 System for precisely measuring phase delay of wave plate and implementation method of system
CN106197949A (en) * 2015-04-30 2016-12-07 睿励科学仪器(上海)有限公司 The calibrating method of broadband achromatism composite wave plate
CN108303238A (en) * 2017-01-13 2018-07-20 北京航空航天大学 Liquid crystal variable retarder spectrum phase postpones scaling system
CN110631806A (en) * 2019-09-10 2019-12-31 中国科学院上海技术物理研究所 Device and method for rapidly measuring phase delay amount of broadband wave plate

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060139639A1 (en) * 2004-12-29 2006-06-29 Optimax Technology Corporation Apparatus and method for measuring phase retardation
CN101183043A (en) * 2007-12-07 2008-05-21 大恒新纪元科技股份有限公司北京光电技术研究所 Optical phase put-off precision measurement method and system thereof
CN102175430A (en) * 2011-01-25 2011-09-07 中国科学院上海光学精密机械研究所 Device and method for measuring 1/8 wave plate phase retardation and fast axis azimuth angle
CN102589850A (en) * 2012-01-13 2012-07-18 中国科学院国家天文台 System for precisely measuring phase delay of wave plate and implementation method of system
CN106197949A (en) * 2015-04-30 2016-12-07 睿励科学仪器(上海)有限公司 The calibrating method of broadband achromatism composite wave plate
CN108303238A (en) * 2017-01-13 2018-07-20 北京航空航天大学 Liquid crystal variable retarder spectrum phase postpones scaling system
CN110631806A (en) * 2019-09-10 2019-12-31 中国科学院上海技术物理研究所 Device and method for rapidly measuring phase delay amount of broadband wave plate

Also Published As

Publication number Publication date
CN115950624B (en) 2023-06-13

Similar Documents

Publication Publication Date Title
CN108871579B (en) Calibration method of polarization imaging system
US6515744B2 (en) Small spot ellipsometer
Gu et al. Optimal broadband Mueller matrix ellipsometer using multi-waveplates with flexibly oriented axes
CN110631806B (en) Device and method for rapidly measuring phase delay amount of broadband wave plate
JPS6134442A (en) Ellipsometry measuring method for inspecting physical characteristic of sample surface or surface film layer of sample and device thereof
US20070009010A1 (en) Wafer temperature measuring method and apparatus
CN105628343A (en) Wave-plate detection device and method
JP4566401B2 (en) Optical wavelength measuring device
CN112378860A (en) Calibration method for system parameters of rotary device type Mueller matrix ellipsometer
CN107677370B (en) Polarized radiation calibration system and method of channel type polarized spectrum imager
CN113008833B (en) High-precision optical film transmissivity/reflectivity measurement method and device
TWI815077B (en) Sensor apparatus and method for correcting a processing error of a lithographic apparatus
CN109211528A (en) A kind of parameter calibration system and method for liquid crystal variable retarder
JP2003050185A (en) Method for absolute calibration of interferometer
CN115950624B (en) Broadband achromatic phase delay piece delay amount calibration system and calibration method
RU2590344C1 (en) Device for calibrating dichrograph of circular dichroism
Okabe et al. Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head
WO2021185301A1 (en) Wavelength measurement device and wavelength measurement method
CN112903598B (en) Differential spectrum calibration method for azimuth angle of polarization element in ellipsometry system
Ledsham et al. Dispersive reflection spectroscopy in the far infrared using a polarising interferometer
CN111307722B (en) Calibration method of multifunctional Stokes-Mueller matrix imaging polarimeter
US5357342A (en) Process and apparatus for measuring degree of polarization and angle of major axis of polarized beam of light
CN110006356B (en) Real-time calibration device and method based on SS-OCT (SS-OCT) distance measurement system
CN113654996A (en) Device and method for measuring phase retardation of composite achromatic wave plate
Banerjee et al. Broadband achromatic tunable polarization rotator

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant