CN113654996A - Device and method for measuring phase retardation of composite achromatic wave plate - Google Patents
Device and method for measuring phase retardation of composite achromatic wave plate Download PDFInfo
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Abstract
The invention relates to a device and a method for measuring the phase retardation of a composite achromatic wave plate, wherein the device comprises: the single-wavelength light source, the collimating lens, the polarizer, the analyzer, the converging lens and the energy detection component are sequentially arranged along a designed light path; a first rotating mechanism is arranged between the polarizer and the analyzer; and during measurement, the composite achromatic wave plate to be measured is fixedly connected with the first rotating mechanism and is arranged on the same optical axis with the designed light path. The method comprises the steps of firstly recording the emergent energy value when the wave plate to be detected is not placed, then placing the wave plate to be detected between the polarizer and the analyzer which are the same in the direction of the light transmission axis, and testing the maximum value and the minimum value of the emergent energy by rotating the wave plate to be detected, thereby deducing the corresponding relation between the phase retardation of the wave plate to be detected and the emergent light intensity when the wave plate to be detected is not placed and the maximum value and the minimum value of the emergent energy after the wave plate is placed, and further accurately and quickly calibrating the phase retardation of the wave plate to be detected.
Description
Technical Field
The invention relates to the technical field of optical measurement, in particular to a device and a method for measuring the phase retardation of a composite achromatic wave plate.
Background
The wave plate is also called as a phase retarder, is an important polarization optical device, can generate a relative phase delay between two mutually perpendicular linearly polarized lights of polarized light, thereby changing the polarization state of the light, can realize the modulation and detection of the polarized light by matching with other polarization devices, and is widely applied to the fields of polarization detection, ellipsometry, optical imaging and the like. Common wave plates are single-wavelength wave plates and visible light band achromatic wave plates, the wave plates can be classified into 1/4 wave plates, 1/2 wave plates and the like according to the phase retardation generated by the wave plates, the single-wavelength wave plates can generate specific phase retardation at the designed wavelength and are usually processed by a single piece of birefringent material, and the visible light band achromatic wave plates are usually designed, processed and combined by two or more birefringent materials such as quartz and magnesium fluoride according to certain thickness and optical axis directions in a matching manner to realize basically consistent phase retardation in the visible light range. With the demands of people on wide spectrum, wide field angle, achromatism and temperature difference elimination in polarization measurement and ellipsometry, the limited phase delay precision of the single-wavelength wave plate and the visible light achromatism wave plate under the conditions of wide spectrum, wide field angle and temperature change can not meet the measurement demands of people, so that a plurality of single wave plates need to be combined according to a certain structure to offset or weaken the influence of wavelength, temperature, field angle and the like on polarization characteristic parameters. Such a plate is called a complex achromatic plate. Although the composite achromatic wave plate has better phase retardation and achromatic effect, the problem of dispersion of an equivalent optical axis azimuth angle and an equivalent optical rotation angle is caused at the same time, so that the comprehensive influence of the equivalent optical axis azimuth angle, the equivalent optical rotation angle and the equivalent phase retardation is considered at the same time when a muller matrix model of the composite achromatic wave plate is established.
In order to detect the retardation accuracy and effect of the composite achromatic wave plate, the phase retardation of the wave plate needs to be accurately measured. At present, a number of composite achromatic wave plate phase retardation measurement technologies are developed, and although these technologies can accurately measure, characterize, or detect and calibrate the phase retardation of some wave plates, the following problems still exist: (1) some existing technologies are generally only used for representing some simple wave plates, such as a single-wavelength wave plate, a small broadband zero-order wave plate and the like, and are difficult to be used for measurement and representation of complex composite wave plates, for example, patent CN201910850239 provides a device and a method for measuring performance of a broadband wave plate by using AOTF monochromatic light, the method can measure phase retardation of the single wave plate or the small broadband zero-order wave plate more quickly and accurately, but the mueller matrix expression of the wave plate only considers azimuth angles and phase retardation of the optical axes of the wave plates, and influence of equivalent optical rotation angles and equivalent optical axis azimuth angles during representation of the composite achromatic wave plates is not involved; (2) some laser correlation techniques can only give the phase delay amount of the wave plate at a certain wavelength point, and then indirectly calculate the phase delay amount of other wavelengths through a dispersion equation, so that the accuracy of a test result is poor; (3) the technologies have high measurement accuracy, but the detection process and the data processing are complex, and the technical requirements on operators are high, for example; CN201610029435 provides a wave plate detection apparatus and method, which can measure parameters including phase retardation, fast axis azimuth angle, optical rotation angle, fast and slow axis transmittance amplitude ratio angle, depolarization index, etc., but the test process and data processing are very complicated.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides a device and a measuring method for representing the states of a polarization device and polarized light in a light path based on a Mueller matrix and a Stokes vector and detecting the phase delay amount of a composite achromatic wave plate by using monochromatic light with different wavelengths. The purpose is to provide a detection instrument with simple structure and convenient operation and a simple, rapid and accurate measurement method for the production, processing and detection of the composite wave plate, and improve the production efficiency, the detection efficiency and the detection accuracy of the composite wave plate.
The testing device and the testing method can be applied to the fields of polarization detection, optical imaging, optical communication, ellipsometry and the like.
The technical scheme for solving the technical problems is as follows:
in one aspect, the present invention provides a device for measuring a phase retardation of a composite achromatic wave plate, comprising: the single-wavelength light source, the collimating lens, the polarizer, the analyzer, the converging lens and the energy detection component are sequentially arranged along a designed light path;
a first rotating mechanism is arranged between the polarizer and the analyzer; during measurement, the composite achromatic wave plate to be measured is fixedly connected with the first rotating mechanism and is arranged along the same optical axis with the designed light path; the angle of the composite achromatic wave plate to be detected relative to the polarizer and the analyzer is driven by the first rotating mechanism to be adjustable in rotation.
Further, measuring device still includes second rotary mechanism and third rotary mechanism, polarizer and analyzer set up respectively on second rotary mechanism and the third rotary mechanism, second rotary mechanism is used for rotating the polarizer makes the emergent light of polarizer is the linear polarization that the polarization direction is the horizontal direction, third rotary mechanism is used for rotating the analyzer makes the light transmission axis direction of analyzer with the emergent light polarization direction of polarizer is unanimous.
Further, the single wavelength light source comprises a broad spectrum light source and a monochromator;
the wavelength range of the wide-spectrum light source covers the design wavelength range of the composite achromatic wave plate to be detected;
the working waveband range of the monochromator and the working waveband range of the energy detection assembly cover the design wavelength range of the composite achromatic wave plate to be detected;
the broad spectrum light source outputs a single wavelength light beam after being modulated by the monochromator.
Furthermore, the design wave band ranges of the collimating lens and the converging lens are adapted to the design wave band of the composite achromatic wave plate to be detected;
the design wave band range of the polarizer and the analyzer covers the design wavelength range of the composite achromatic wave plate to be detected, and the extinction ratio of the polarizer and the analyzer in the design wave band range is larger than 10000: 1.
On the other hand, the present invention provides a method for measuring the phase retardation of a composite achromatic wave plate based on the apparatus for measuring the phase retardation of a composite achromatic wave plate, comprising the steps of:
s1: acquiring a single-wavelength light beam with the wavelength of lambada i, collimating the single-wavelength light beam into parallel light through a collimating lens, then, enabling the parallel light beam to enter a polarizer, and rotating the polarizer to obtain incident linearly polarized light with the polarization direction in the horizontal direction;
s2: rotating the analyzer to enable the light transmission axis direction of the analyzer to be consistent with the polarization direction of the incident linearly polarized light, and enabling the incident linearly polarized light to form a first emergent linearly polarized light after passing through the analyzer;
s3: detecting the light intensity E of the first emergent linearly polarized light through an energy detection assemblyλi；
S4: placing the composite achromatic wave plate on a first rotating mechanism, enabling the incident linearly polarized light to sequentially pass through the composite achromatic wave plate and the analyzer to form second emergent linearly polarized light, rotating the composite achromatic wave plate, and obtaining the maximum value Emax and the minimum value Emin of the light intensity of the second emergent linearly polarized light through the energy detection assembly;
s5: according to the maximum value Emax and the minimum value Emin of the light intensity of the second emergent linearly polarized light and the light intensity E of the incident linearly polarized lightλiAnd calculating the phase retardation of the composite achromatic wave plate.
Further, in step S5, the phase retardation of the composite achromatic wave plate is specifically calculated by a light intensity conversion formula, where the light intensity conversion formula is:
further, the method for obtaining the light intensity conversion formula comprises the following steps:
light intensity E based on the first emergent linearly polarized lightλiObtaining a Stokes vector S of the incident linearly polarized lightλi；
Based on the equivalent phase retardation amount and the optical rotation of the composite achromatic wave plate corresponding to the wavelength lambdaiObtaining a Mueller matrix M of the composite achromatic wave plate through an angle and an equivalent azimuth angle of the composite achromatic wave plate during rotation2；
Obtaining a Mueller matrix M of an analyzer3；
Mueller matrix M based on composite achromatic wave plate2Mueller matrix M of the analyzer3And the Stokes vector S of said incident linearly polarized lightλiObtaining a Stokes vector S 'of the second emergent linearly polarized light'λi，S'λi＝M3*M2*Sλi；
According to stokes vector S 'of the second emergent linearly polarized light'λiAnd calculating the light intensity conversion formula.
Further, the Mueller matrix M of the composite achromatic wave plate2Specifically, it is represented as:
δ is an equivalent phase retardation amount of the composite achromatic wave plate corresponding to a wavelength λ i, ρ is the optical rotation angle, and θ is an equivalent azimuth angle of the composite achromatic wave plate 5 when rotating.
Further, the rotating polarizer in step S1 obtains incident linearly polarized light with a polarization direction in the horizontal direction, and specifically, the polarization analyzer detects the vibration direction of the incident linearly polarized light in real time, so that the incident linearly polarized light with the polarization direction in the horizontal direction is obtained after the rotating polarizer is rotated by a certain angle.
Further, the step S2 includes:
rotating the analyzer, and when the energy detector detects that the light intensity of the first emergent linearly polarized light reaches the minimum, enabling the transmission axis angle of the analyzer to be orthogonal to the polarization direction of the incident linearly polarized light; and then rotating the analyzer by 90 degrees, wherein the transmission axis direction of the analyzer is consistent with the polarization direction of the incident linearly polarized light.
The invention has the beneficial effects that: this methodAdjusting the polarizer in a first step to obtain emergent linear polarized light with the polarization direction in the horizontal direction, adjusting the analyzer to enable the transmission axis direction of the analyzer to be consistent with the polarization direction of the emergent linear polarized light of the polarizer, wherein the energy value detected by the energy detection assembly is the light intensity E of the first emergent linear polarized lightλiAnd secondly, placing the wave plate to be tested between a polarizer and an analyzer which are the same in the direction of the transmission axis, and testing the maximum value Emax and the minimum value Emin of the light intensity of the second emergent linearly polarized light by rotating the wave plate to be tested, and deducing the corresponding relation between the phase delay amount of the wave plate to be tested and the maximum value and the minimum value of the emergent energy when the wave plate to be tested is not placed and the emergent light intensity when the wave plate to be tested is not placed from the three measurement values, thereby accurately and quickly calibrating the phase delay amount of the wave plate to be tested. The method can meet the detection requirements of rapidness, accuracy and easy operability in the actual production, processing and detection processes.
Drawings
Fig. 1 is a structural diagram of a composite achromatic wave plate phase retardation measurement apparatus according to an embodiment of the present invention.
In the drawings, the components represented by the respective reference numerals are listed below:
1. the device comprises a wide spectrum light source, 2, a monochromator, 3, a collimating lens, 4, a polarizer, 5, a composite achromatic wave plate to be detected, 6, an analyzer, 7, a converging lens, 8 and an energy detection assembly.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
The embodiment of the invention provides a device for measuring the phase retardation of a composite achromatic wave plate, which comprises: the single-wavelength light source, the collimating lens 3, the polarizer 4, the analyzer 6, the converging lens 7 and the energy detection component 8 are sequentially arranged along a designed light path;
a first rotating mechanism (not shown in the figure) is arranged between the polarizer 4 and the analyzer 6; during measurement, the composite achromatic wave plate 5 to be measured is placed between the polarizer 4 and the analyzer 6, is fixedly connected with the first rotating mechanism and is arranged along the same optical axis with the designed light path; the angle of the composite achromatic wave plate 5 to be detected relative to the polarizer 4 and the analyzer 6 is driven by the first rotating mechanism to be adjustable in rotation.
The light with single wavelength emitted by the single-wavelength light source is collimated through the collimating lens 3 to obtain parallel light, and then passes through the polarizer 4 to obtain linearly polarized light with the polarization direction in the horizontal direction, and the linearly polarized light irradiates the energy detection component 8 through the composite achromatic wave plate 5 to be detected, the analyzer 6 and the converging lens 7 to perform energy detection.
The measuring device further comprises a second rotating mechanism (not shown in the figure) and a third rotating mechanism (not shown in the figure), the polarizer 4 and the polarization analyzer 6 are respectively arranged on the second rotating mechanism and the third rotating mechanism, and before the phase delay amount is measured, the polarizer 4 is adjusted through the second rotating mechanism, so that the emergent light of the polarizer 4 is linearly polarized light with the polarization direction being the horizontal direction, and the polarization analyzer 6 is adjusted through the third rotating mechanism, so that the light transmission axis direction of the polarization analyzer 6 is consistent with the emergent light polarization direction of the polarizer.
The incident linearly polarized light forms a first emergent linearly polarized light after passing through the analyzer 6, and the first emergent linearly polarized light is finally converged to the energy detection assembly 8 through the converging lens 7, so that the light intensity of the first emergent linearly polarized light is obtained. During measurement, the composite achromatic wave plate 5 to be measured is placed between the polarizer 4 and the analyzer 6, namely the incident linear polarized light sequentially passes through the composite achromatic wave plate 5 to be measured and the analyzer 6 to form second emergent linear polarized light, and the phase delay of the composite achromatic wave plate 5 to be measured at the moment has to influence the light intensity value of the second emergent linear polarized light detected by the energy detection assembly 8.
Preferably, the single-wavelength light source can adopt an independent light source system, and can also adopt a combination of a broad-spectrum light source and a monochromator. The present embodiment adopts a combination mode of a broad spectrum light source 1 and a monochromator 2 to realize the single wavelength light source. The broad spectrum light source 1 outputs a single wavelength light beam after being modulated by the monochromator 2. The monochromator is arranged to output monochromatic light with different wavelengths, and the phase delay amount of any wavelength within the designed wavelength range of the composite achromatic wave plate to be detected is calculated and obtained.
The wavelength range of the wide-spectrum light source 1 covers the design wavelength range of the composite achromatic wave plate 5 to be detected;
the working waveband range of the monochromator 2 and the working waveband range of the energy detection assembly 8 cover the design wavelength range of the composite achromatic wave plate 5 to be detected;
the designed wave band ranges of the collimating lens 3 and the converging lens 7 are adapted to the designed wave band of the composite achromatic wave plate 5 to be detected.
The design wave band range of the polarizer 4 and the analyzer 6 covers the design wavelength range of the composite achromatic wave plate 5 to be detected, and meanwhile, the extinction ratio of the polarizer 4 and the analyzer 6 in the design wave band range is larger than 10000: 1.
Specifically, the main devices used in the embodiments of the present invention are described below:
broad spectrum light source 1: the wide-spectrum light source selected in the embodiment is a 50W xenon lamp light source, and the wavelength range is 180-2500 nm;
monochromator 2: the monochromator selected in the embodiment is a grating spectrometer;
collimator lens 3, converging lens 7: the collimating lens 3 and the converging lens 7 selected in the embodiment are F90mm achromatic lenses, the achromatic wavelength band is 200-1700nm, and the transmittance is more than 80%;
polarizer 4, analyzer 6: the polarizer 4 and the analyzer 6 selected in the embodiment are MgF2 polaroids with the working wave band of 190-1700nm, the extinction ratio of more than 10000:1 and the transmittance of more than 90 percent;
the composite achromatic wave plate 5 to be measured: in the embodiment, the composite achromatic wave plate to be detected is an MgF2 composite wave plate with a working wave band of 200-1700nm and a quartz composite wave plate with a working wave band of 245-1700nm, the transmittance is more than 90 percent, and the central value of the phase retardation is about 128 degrees;
the energy detection assembly 8: the energy detection components selected in the embodiment are a spectrometer with a working wave band of 200-.
Based on the above apparatus for measuring the phase retardation of the composite achromatic wave plate, an embodiment of the present invention provides a method for measuring the phase retardation of the composite achromatic wave plate, which specifically includes the following contents:
the wide-spectrum light source 1 obtains a single-wavelength light beam with the wavelength of lambda i through the monochromator 2, the single-wavelength light beam is collimated into parallel light through the collimating lens 3 and then enters the polarizer 4, the polarizer 4 is rotated, the parallel light is made to exit through the polarizer 4, then incident linearly polarized light with the polarization direction in the horizontal direction is obtained, and the vibration direction of the incident linearly polarized light can be measured through the polarization analyzer.
The analyzer 6 is placed between the polarizer 4 and the energy detection component 8, the incident linearly polarized light penetrates through the analyzer 6 to form a first emergent linearly polarized light, and the first emergent linearly polarized light is converged into the energy detection component 8 through the converging lens 7. At this time, the analyzer 6 is rotated for a circle, the energy detection assembly 8 records the received energy change value in real time, when the detected energy is minimum, the transmission axis angle of the analyzer 6 is orthogonal to the polarization direction of the incident linearly polarized light, then the analyzer 6 is rotated by 90 degrees, and at this time, the transmission axis direction of the analyzer 6 is consistent with the polarization direction of the incident linearly polarized light, namely, the transmission axis direction is parallel to the polarization direction. The energy detection component 8 records the intensity E of the first emergent linearly polarized light at the momentλiI.e. the intensity of the incident linearly polarized light. Light intensity E based on the first emergent linearly polarized lightλiObtaining a Stokes vector representation S of incident linearly polarized lightλi：
And the Mueller matrix M of the analyzer 63Can be expressed as:
placing the composite achromatic wave plate 5 to be measured between the polarizer 4 and the analyzer 6, adjusting the position of the composite achromatic wave plate to be measured in the light path,and enabling the polarized light of the polarizer 4 to normally enter and pass through the composite achromatic wave plate 5 to be detected. Then the Mueller matrix M of the composite achromatic wave plate 5 to be measured at the moment2R (ρ) × R (θ) × M (δ) × R (- θ) may be represented as:
wherein δ is an equivalent phase retardation corresponding to a wavelength λ i of the composite achromatic wave plate 5 to be measured, ρ is an optical rotation angle, θ is an equivalent azimuth angle when the composite achromatic wave plate 5 to be measured rotates, and R (ρ), R (θ), M (δ), and R (- θ) herein are a rotation mueller matrix model, an azimuth rotation mueller matrix model, and a phase retardation mueller matrix model of the optical rotation angle, respectively.
The incident linearly polarized light sequentially passes through the composite achromatic wave plate 5 to be detected and the analyzer 6 to obtain second emergent linearly polarized light, after the second emergent linearly polarized light passes through the convergent lens 7, the energy value of the second emergent linearly polarized light is detected by the energy detection component 8, and the Stokes vector S 'of the second emergent linearly polarized light'λiCan be expressed as:
the value range of cos (4 theta-2 rho) is [ -1,1 [ -1 [ ]]And is therefore based on stokes vector expression S 'of second emergent linearly polarized light'λiIt can be known that, when the composite achromatic wave plate to be detected is rotated, the maximum value Emax and the minimum value Emin of the energy received by the energy detection assembly 8 are respectively:
and (3) obtaining the phase delay amount of the composite achromatic wave plate to be detected by combining the maximum value Emax and the minimum value Emin:
the polarization optical characteristics of the optimally designed composite achromatic wave plate can be represented by characteristic parameters such as phase retardation, optical axis azimuth angle, optical rotation angle, fast and slow axis transmittance amplitude ratio and the like, wherein the phase retardation of the composite wave plate enables polarized light in the optical axis direction and the direction vertical to the optical axis to generate phase difference; the optical axis azimuth determines the global orientation of the equivalent optical axis of the composite wave plate in the optical system; the polarization direction of the polarized light can be changed by the rotation angle; and the fast-axis and slow-axis transmittance amplitudes represent the relative attenuation characteristics of the two polarized lights. The invention fully considers the influence of an equivalent optical rotation angle and an equivalent optical axis azimuth angle when a plurality of single wave plates are compounded when a Mueller matrix is used for representing a composite wave plate, and provides a Mueller matrix and Stokes vector representation method based on the propagation of polarized light in a deviceλiAnd secondly, placing the wave plate to be detected between a polarizer and an analyzer which are the same in the direction of the transmission axis, recording the maximum value and the minimum value of light energy detected by the energy detection assembly by rotating the composite achromatic wave plate to be detected, namely the maximum value Emax and the minimum value Emin of light intensity of second emergent polarized light, and deducing the corresponding relation between the phase retardation of the wave plate to be detected and the emergent light intensity when the wave plate to be detected is not placed and the maximum value and the minimum value of emergent energy after the wave plate is placed from the three measured values, thereby accurately and quickly calibrating the phase retardation of the wave plate to be detected. The method can meet the detection requirements of rapidness, accuracy and easy operability in the actual production, processing and detection processes.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A composite achromatic wave plate phase retardation measurement apparatus, comprising: the single-wavelength light source, the collimating lens (3), the polarizer (4), the analyzer (6), the converging lens (7) and the energy detection component (8) are sequentially arranged along a designed light path;
a first rotating mechanism is arranged between the polarizer (4) and the analyzer (6); during measurement, the composite achromatic wave plate (5) to be measured is fixedly connected with the first rotating mechanism and is arranged along the same optical axis with the designed light path; the angle of the composite achromatic wave plate to be detected relative to the polarizer and the analyzer is driven by the first rotating mechanism to be adjustable in rotation.
2. The apparatus for measuring retardation of composite achromatic wave plate according to claim 1, wherein said apparatus further comprises a second rotating mechanism and a third rotating mechanism, said polarizer (4) and analyzer (6) are respectively disposed on said second rotating mechanism and said third rotating mechanism, said second rotating mechanism is configured to rotate said polarizer (4) so that the outgoing light from said polarizer is linearly polarized light with polarization direction being horizontal direction, said third rotating mechanism is configured to rotate said analyzer (6) so that the direction of the transmission axis of said analyzer (6) is consistent with the polarization direction of the outgoing light from said polarizer.
3. The apparatus for measuring retardation of complex achromatic wave plate according to claim 1 or 2, wherein said single wavelength light source comprises a broad spectrum light source (1) and a monochromator (2);
the wavelength range of the wide-spectrum light source (1) covers the design wavelength range of the composite achromatic wave plate (5) to be detected;
the working waveband range of the monochromator (2) and the working waveband range of the energy detection assembly (8) cover the design wavelength range of the composite achromatic wave plate (5) to be detected;
the broad spectrum light source (1) outputs a single-wavelength light beam after being modulated by the monochromator (2).
4. The apparatus for measuring retardation of complex achromatic wave plate according to claim 1 or 2, wherein the range of the design wave bands of said collimator lens (3) and said convergent lens (7) is adapted to the design wave band of the complex achromatic wave plate (5) to be measured;
the design wave band range of the polarizer (4) and the analyzer (6) covers the design wave band range of the composite achromatic wave plate (5) to be tested, and meanwhile, the extinction ratio of the polarizer (4) and the analyzer (6) in the design wave band range is larger than 10000: 1.
5. A method for measuring the phase retardation of a composite achromatic wave plate, which is implemented based on the apparatus for measuring the phase retardation of a composite achromatic wave plate according to any one of claims 1 to 4, and which comprises the steps of:
s1: acquiring a single-wavelength light beam with the wavelength of lambada i, collimating the single-wavelength light beam into parallel light through a collimating lens, then, enabling the parallel light beam to enter a polarizer, and rotating the polarizer to obtain incident linearly polarized light with the polarization direction in the horizontal direction;
s2: rotating the analyzer to enable the light transmission axis direction of the analyzer to be consistent with the polarization direction of the incident linearly polarized light, and enabling the incident linearly polarized light to form a first emergent linearly polarized light after passing through the analyzer;
s3: detecting the light intensity E of the first emergent linearly polarized light through an energy detection assemblyλi；
S4: placing the composite achromatic wave plate on a first rotating mechanism, enabling the incident linearly polarized light to sequentially pass through the composite achromatic wave plate and the analyzer to form second emergent linearly polarized light, rotating the composite achromatic wave plate, and obtaining the maximum value Emax and the minimum value Emin of the light intensity of the second emergent linearly polarized light through the energy detection assembly;
s5: according to the maximum value Emax and the minimum value Emin of the light intensity of the second emergent linearly polarized light and the light intensity E of the incident linearly polarized lightλiAnd calculating the phase retardation of the composite achromatic wave plate.
6. The method of claim 5, wherein the step S5 specifically calculates the retardation of the complex achromatic wave plate according to a light intensity conversion formula:
7. the method for measuring phase retardation of a composite achromatic wave plate according to claim 6, wherein the method for obtaining the light intensity conversion formula comprises:
light intensity E based on first emergent linearly polarized lightλiObtaining a Stokes vector S of the incident linearly polarized lightλi；
Acquiring a Mueller matrix M of the composite achromatic wave plate based on an equivalent phase retardation amount and an optical rotation angle of the composite achromatic wave plate corresponding to a wavelength lambda i and an equivalent azimuth angle of the composite achromatic wave plate during rotation2；
Obtaining a Mueller matrix M of an analyzer3；
Mueller matrix M based on composite achromatic wave plate2Mueller matrix M of the analyzer3And the Stokes vector S of said incident linearly polarized lightλiObtaining a Stokes vector S 'of the second emergent linearly polarized light'λi，S'λi＝M3*M2*Sλi；
According to stokes vector S 'of the second emergent linearly polarized light'λiAnd calculating the light intensity conversion formula.
8. The method of claim 7, wherein the Mueller matrix M of the composite achromatic wave plate is set to be equal to the Moeller matrix M of the composite achromatic wave plate2Specifically, it is represented as:
δ is an equivalent phase retardation amount of the composite achromatic wave plate corresponding to a wavelength λ i, ρ is the optical rotation angle, and θ is an equivalent azimuth angle of the composite achromatic wave plate 5 when rotating.
9. The method for measuring the phase retardation of the composite achromatic wave plate according to any one of claims 5 to 8, wherein the rotating polarizer obtains incident linearly polarized light with a polarization direction in a horizontal direction in step S1, and specifically, the polarization analyzer detects the vibration direction of the incident linearly polarized light in real time, so that the rotating polarizer obtains the incident linearly polarized light with a polarization direction in a horizontal direction after a certain angle.
10. The method for measuring phase retardation of composite achromatic wave plate according to any of claims 5 to 8, wherein said step S2 includes:
rotating the analyzer, and when the energy detector detects that the light intensity of the first emergent linearly polarized light reaches the minimum, enabling the transmission axis angle of the analyzer to be orthogonal to the polarization direction of the incident linearly polarized light; and then rotating the analyzer by 90 degrees, wherein the transmission axis direction of the analyzer is consistent with the polarization direction of the incident linearly polarized light.
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