CN115930607A - Aluminum nitride ceramic continuous sintering furnace - Google Patents

Abstract

The utility model relates to an aluminium nitride pottery continuous sintering stove, stove outer covering outside-in is outer shell and inner shell in proper order, both ends sealing connection between outer shell and the inner shell forms the water-cooling cavity, high temperature section outside-in is ceramic fiber board layer, first corundum brick layer and first graphite felt layer in proper order, it has the glass fiber layer to fill between inner shell and the ceramic fiber board layer, it has first asbestos felt layer to fill between ceramic fiber board layer and the first corundum brick layer, first graphite felt layer encloses to establish and forms high temperature furnace. The temperature that reduces shell and inner shell through water cooling and thermal-insulated two kinds of modes avoids shell and inner shell is higher to can prevent that shell and inner shell from appearing burning loss, deformation, fracture scheduling problem easily. Meanwhile, the heat insulation performance of the heat preservation furnace lining is good, the temperature of the hearth of the continuous sintering furnace can meet the working requirement without increasing the power of the continuous sintering furnace, so that the heat loss is avoided to be more serious, the resource waste is prevented, and the related problems in the prior art can be solved.

Description

Aluminum nitride ceramic continuous sintering furnace

Technical Field

The application relates to the technical field of continuous sintering furnaces, in particular to an aluminum nitride ceramic continuous sintering furnace.

Background

The aluminum nitride ceramic has high thermal conductivity, relatively low dielectric constant and dielectric loss, and a series of excellent performances of thermal expansion coefficient matched with silicon, no toxicity, insulation and the like, and is considered as a first choice material of a new generation of high-performance ceramic substrate, electronic packaging and other heat dissipation devices. The aluminum nitride powder is a raw material for preparing the aluminum nitride ceramic, and the properties of the aluminum nitride powder, such as purity, granularity, oxygen content and other impurity content, have important influence on the thermal conductivity of the prepared aluminum nitride ceramic and subsequent sintering and forming processes. In order to obtain an aluminum nitride ceramic material with excellent properties, it is necessary to prepare an aluminum nitride powder with high purity, fine particle size, narrow particle size distribution and stable properties.

The preparation method of the aluminum nitride powder mainly comprises a carbothermic reduction method. The aluminum nitride powder prepared by the carbothermic method has the characteristics of high purity, fine granularity, narrow granularity distribution and the like, and is suitable for molding processes such as tape casting, injection molding and the like. The most critical part of the aluminum nitride ceramic manufacturing process is sintering and forming of the multilayer co-fired ceramic substrate, which is characterized in that green ceramic sheets are placed in an oxidation-reduction atmosphere for sintering after wiring, lamination and lamination, and the green ceramic is matured and metal powder is metalized in high-temperature sintering, so the process is called co-firing.

In the prior art, the preparation of aluminum nitride powder by carbothermic reduction method and the preparation of aluminum nitride ceramic by cofiring are all sintered by a graphite furnace or a continuous sintering furnace (the continuous sintering furnace is also called a push plate furnace). The heat preservation furnace lining of the existing continuous sintering furnace is built by volcanic rocks, the preparation temperature of the aluminum nitride powder and the aluminum nitride ceramics needs to reach more than 2000 ℃, the heat preservation performance of the heat preservation furnace lining built by the volcanic rocks is poor, on one hand, the heat loss is serious, the temperature of a hearth of the continuous sintering furnace cannot meet the requirement, the preparation quality of the aluminum nitride powder and the aluminum nitride ceramics is not favorably improved, in order to ensure that the temperature of the hearth of the continuous sintering furnace reaches more than 2000 ℃, the power of the continuous sintering furnace is generally increased, so that although the temperature of the hearth of the continuous sintering furnace can reach more than 2000 ℃, the heat loss is more serious, the resource waste is caused, and the power consumption of the continuous sintering furnace is larger. On the other hand, heat in the hearth is dissipated and transmitted to the furnace shell made of metal materials, so that the temperature of the furnace shell is high, the problems of burning loss, deformation, cracking and the like of the furnace shell are caused easily, the service life of the furnace shell is shortened, frequent maintenance is needed, normal production operation is influenced, and the production cost is increased.

Disclosure of Invention

Based on this, it is necessary to solve the problems that in the prior art, the thermal insulation performance of a heat preservation furnace lining built by vesuvianite is poor, the heat loss is serious, the temperature of a hearth of a continuous sintering furnace cannot meet the requirement, the power of the continuous sintering furnace is increased, the heat loss is more serious, the resource waste is caused, the power consumption of the continuous sintering furnace is large, meanwhile, the heat loss in the hearth causes the temperature of the furnace shell to be high, the problems of burning loss, deformation, cracking and the like of the furnace shell easily occur, the service life of the furnace shell is shortened, frequent maintenance is needed, normal production operation is affected, and the production cost is increased. The application provides an aluminium nitride pottery continuous sintering stove, the temperature of avoiding shell and inner shell through water-cooling and thermal-insulated dual mode reduction shell and inner shell is higher to can prevent that shell and inner shell from appearing burning loss, deformation, fracture scheduling problem easily, the life of extension shell and inner shell avoids needing frequent maintenance, and then avoids influencing normal production operation, reduction in production cost. Meanwhile, the heat insulation performance of the heat preservation furnace lining is good, the temperature of the hearth of the continuous sintering furnace can meet the working requirement without increasing the power of the continuous sintering furnace, so that the heat loss is avoided to be more serious, the resource waste is prevented, the problem that the power consumption of the continuous sintering furnace is large is solved, and the related problems in the prior art can be solved.

The utility model provides an aluminium nitride pottery continuous sintering stove, includes stove outer covering and heat preservation furnace wall, the stove outer covering outside-in is shell and inner shell in proper order, the shell with both ends sealing connection between the inner shell, and form the water-cooling chamber between the two, the shell be connected with all with inlet channel and outlet conduit of water-cooling chamber intercommunication, the heat preservation furnace wall set up in the inner wall of inner shell, the heat preservation furnace wall has the high temperature section, the high temperature section has high temperature furnace, the high temperature section outside-in is ceramic fiber board layer, first corundum brick layer and first graphite felt layer in proper order, the inner shell with it has the glass fiber layer to fill between the ceramic fiber board layer, ceramic fiber board layer with it has first asbestos felt layer to fill between the first corundum brick layer, just first graphite felt layer bond in the inner wall on first corundum brick layer, first graphite felt layer encloses to establish and forms high temperature furnace.

Preferably, in the continuous sintering furnace for aluminum nitride ceramics, a graphite plate is bonded to the inner wall of the first graphite felt layer on the side away from the first corundum brick layer.

Preferably, in the continuous sintering furnace for aluminum nitride ceramics, a reflective heat insulation film is bonded to an inner wall of the graphite plate on a side away from the first graphite felt layer.

Preferably, in the above aluminum nitride ceramic continuous sintering furnace, the reflective heat insulation film is graphite paper.

Preferably, in the above aluminum nitride ceramic continuous sintering furnace, the heat preservation furnace lining further has a heat preservation section, the heat preservation section has a heat preservation furnace chamber, the high temperature section with the heat preservation section is connected, just the high temperature furnace chamber with the heat preservation furnace chamber is linked together, the heat preservation section is second corundum brick layer and second graphite felt layer from outside to inside in proper order, the inner shell with it has second asbestos felt layer to fill between the second corundum brick layer, just second graphite felt layer bond in the inner wall on second corundum brick layer, second graphite felt layer encloses to establish and forms the heat preservation furnace chamber.

Preferably, in the above aluminum nitride ceramic continuous sintering furnace, the inner wall of the inner shell is provided with a plurality of first fins in a surrounding manner, the first fins deviate from the outer end edge of the inner shell and the distance between the inner shell is smaller than the thickness of the water cooling chamber, and the outer wall of the outer shell is provided with a plurality of second fins.

Preferably, in the above continuous sintering furnace for aluminum nitride ceramics, a distance between an outer end edge of the first fin, which is away from the inner shell, and the inner shell is a first distance, and the thickness of the water-cooling chamber is greater than 2 times of the first distance.

Preferably, in the above continuous sintering furnace for aluminum nitride ceramics, the water inlet pipe is arranged at the bottom of the outer shell, and the water outlet pipe is arranged at the top of the outer shell.

Preferably, in the above continuous sintering furnace for aluminum nitride ceramics, the pipe diameter of the water outlet pipe is larger than that of the water inlet pipe.

Preferably, in the continuous sintering furnace for aluminum nitride ceramics, the water inlet pipeline is provided with a high-pressure water pump.

The technical scheme who this application adopted can reach following beneficial effect:

the embodiment of the application discloses an in aluminium nitride pottery continuous sintering stove, on the one hand, cool down shell and inner shell through this kind of water-cooled mode, the temperature of avoiding shell and inner shell is higher, on the other hand, through setting up a novel heat preservation furnace wall, replace the heat preservation furnace wall of building by vesuvianite among the prior art and building by laying bricks or stones and form, this kind of novel heat preservation furnace wall thermal-insulated thermal insulation performance is good, can prevent the heat loss furthest, it is serious to avoid calorific loss, reduce the heat and scatter to the stove outer covering, combine water-cooled mode to cool down shell and inner shell, can further reduce the temperature of shell and inner shell, it is higher to avoid the temperature of shell and inner shell through the water-cooling with the temperature that separates heat type and reduce shell and inner shell, thereby can prevent that shell and inner shell from appearing the scaling loss easily, the deformation, the fracture scheduling problem, prolong the life of shell and inner shell, avoid needing frequent maintenance, and then avoid influencing normal production operation, and production cost is reduced. Meanwhile, the heat insulation performance of the heat preservation furnace lining is good, the temperature of the hearth of the continuous sintering furnace can meet the working requirement without increasing the power of the continuous sintering furnace, so that the heat loss is avoided to be more serious, the resource waste is prevented, the problem that the power consumption of the continuous sintering furnace is large is solved, and the related problems in the prior art can be solved.

Drawings

FIG. 1 is a schematic view of a continuous sintering furnace for aluminum nitride ceramics according to an embodiment of the present disclosure;

FIG. 2 is a schematic cross-sectional view of a continuous sintering furnace for aluminum nitride ceramics according to an embodiment of the present disclosure;

FIG. 3 is a second schematic cross-sectional view of a continuous sintering furnace for aluminum nitride ceramics according to an embodiment of the present disclosure;

FIG. 4 is a third schematic sectional view of a continuous sintering furnace for aluminum nitride ceramics according to an embodiment of the present application.

Wherein: the furnace comprises a furnace shell 100, an outer shell 110, an inner shell 120, a water cooling chamber 130, a water inlet pipe 140, a water outlet pipe 150, a first fin 160, a second fin 170, a heat preservation furnace lining 200, a high-temperature section 210, a ceramic fiber board layer 211, a first corundum brick layer 212, a first graphite felt layer 213, a glass fiber layer 214, a first asbestos felt layer 215, a graphite plate 216, a high-temperature hearth 220, a heat preservation section 230, a second corundum brick layer 231, a second graphite felt layer 232, a second asbestos felt layer 233, a heat preservation hearth 240, a feeding mechanism 300, a discharging mechanism 400 and a control electric cabinet 500.

Detailed Description

To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present application are given in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "left," "right," "top," "bottom," "top," and the like are for purposes of illustration only and do not represent the only embodiment.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 to 4, an embodiment of the present application discloses an aluminum nitride ceramic continuous sintering furnace, which includes a furnace shell 100 and a heat preservation furnace lining 200, and further includes a feeding mechanism 300, a discharging mechanism 400, and a control electrical cabinet 500, wherein the feeding mechanism 300 is disposed at one end of the furnace shell 100, the discharging mechanism 400 is disposed at the other end of the furnace shell 100, and the control electrical cabinet 500 is electrically connected to both the feeding mechanism 300 and the discharging mechanism 400. Wherein:

the furnace shell 100 comprises an outer shell 110 and an inner shell 120 in sequence from outside to inside, the outer shell 110 is arranged around the inner shell 120, and two ends between the outer shell 110 and the inner shell 120 are hermetically connected, so that a water-cooling chamber 130 is formed between the outer shell 110 and the inner shell 120, the outer shell 110 is connected with a water inlet pipe 140 and a water outlet pipe 150 which are both communicated with the water-cooling chamber 130, the outer shell 110 is connected with the water inlet pipe 140 and the water outlet pipe 150, both the water inlet pipe 140 and the water outlet pipe 150 are communicated with the water-cooling chamber 130,

when heat is dissipated to the outer shell 110 and the inner shell 120 due to poor heat preservation effect of the heat preservation furnace lining 200 of the outer shell 110 and the inner shell 120, when the temperature of the outer shell 110 and the inner shell 120 is high, cooling water is introduced into the water cooling chamber 130 through the water inlet pipeline 140, the cooling water entering the water cooling chamber 130 absorbs the heat on the outer shell 110 and the inner shell 120, and then the cooling water is discharged from the water outlet pipeline 150 to take away the heat on the outer shell 110 and the inner shell 120, so that the temperature of the outer shell 110 and the temperature of the inner shell 120 are reduced, the outer shell 110 and the inner shell 120 are cooled through the water cooling method, the temperature of the outer shell 110 and the temperature of the inner shell 120 are prevented from being high, the problems of burning loss, deformation, cracking and the like of the outer shell 110 and the inner shell 120 can be prevented, the service lives of the outer shell 110 and the inner shell 120 are prolonged, frequent maintenance is avoided, the influence on normal production operation is avoided, and the production cost is reduced.

In particular, the housing 110 may be a metal housing, such as a stainless steel housing. The inner shell 120 can be a fiber ceramic inner shell, and because the inner shell 120 made of a fiber ceramic material has certain heat insulation performance, a part of heat can be isolated from being transferred to the outer shell 110, so that the temperature of the outer shell 110 is reduced, and the outer shell 110 is prevented from being burnt and damaged, and meanwhile, the inner shell 120 made of a fiber ceramic material has higher heat resistance, and cannot be easily burnt and damaged by heat dissipated by a hearth, so that the problems of burning, deformation, cracking and the like of the outer shell 110 and the inner shell 120 can be further prevented.

The heat preservation furnace lining 200 is arranged on the inner wall of the inner shell 120, the heat preservation furnace lining 200 is provided with a high-temperature section 210, the high-temperature section 210 is provided with a high-temperature hearth 220, the high-temperature section 210 sequentially comprises a ceramic fiberboard layer 211, a first corundum brick layer 212 and a first graphite felt layer 213 from outside to inside, a glass fiber layer 214 is filled between the inner shell 120 and the ceramic fiberboard layer 211, a first asbestos felt layer 215 is filled between the ceramic fiberboard layer 211 and the first corundum brick layer 212, the first graphite felt layer 213 is bonded on the inner wall of the first corundum brick layer 212, and the first graphite felt layer 213 surrounds the high-temperature hearth 220. Set up multilayer thermal-insulated heat preservation between inner shell 120 and high temperature furnace 220, the high temperature resistance of each layer thermal-insulated heat preservation increases gradually from outside to inside, prevent the heat loss on the one hand furthest, make the temperature in the high temperature furnace 220 more stable, improve the preparation quality of aluminium nitride powder and aluminium nitride pottery, on the other hand the thermal-insulated heat preservation high temperature resistance of inlayer is good, can satisfy the requirement of high temperature furnace 220 high temperature sintering, after the thermal-insulated heat preservation of inlayer insulates against heat, outer temperature reduces to some extent, consequently, the outer thermal-insulated heat preservation high temperature resistance requirement of outer reduces, the high temperature section 210 of this kind of structure is more scientific, reasonable, be favorable to reducing equipment cost.

Simultaneously, the inner shell 120, ceramic fiber board layer 211 and first corundum brick layer 212 form the thermal-insulated heat preservation of stereoplasm, glass fiber layer 214 and first asbestos felt layer 215 form flexible thermal-insulated heat preservation, and the thermal-insulated heat preservation of stereoplasm and the mutual range upon range of setting up of flexible thermal-insulated heat preservation, it has flexible thermal-insulated heat preservation to fill between every layer of adjacent stereoplasm thermal-insulated heat preservation promptly, it can guarantee that flexible thermal-insulated heat preservation fills comparatively porcelain really to set up like this, it is inseparable, closely knit, thereby also can improve thermal-insulated heat preservation performance, and can avoid all adopting flexible thermal-insulated heat preservation and lead to high temperature section 210's furnace body structural stability relatively poor, thereby can guarantee high temperature section 210's furnace body structural stability.

The embodiment of the application discloses an aluminium nitride pottery in sintering furnace in succession, on the one hand, cool down shell 110 and inner shell 120 through this kind of water-cooled mode, avoid shell 110 and inner shell 120's temperature higher, on the other hand, through setting up a novel heat preservation furnace lining 200, replace the heat preservation furnace lining that is built by laying bricks or stones among the prior art, this kind of novel heat preservation furnace lining 200 thermal-insulated thermal insulation performance is good, can prevent the heat loss furthest, avoid calorific loss serious, reduce heat and scatter to stove outer shell 100, combine water-cooled mode to cool down shell 110 and inner shell 120, can further reduce shell 110 and inner shell 120's temperature, it is higher to avoid shell 110 and inner shell 120's temperature through water-cooling and thermal-insulated dual mode reduction shell 110 and inner shell 120's temperature, thereby can prevent that shell 110 and inner shell 120 appear burning loss easily, warp, fracture scheduling problem, prolong shell 110 and inner shell 120's life, avoid needing frequent maintenance, and then avoid influencing normal production operation, and reduce production cost. Meanwhile, the heat insulation performance of the heat preservation furnace lining 200 is good, the temperature of the hearth can meet the working requirement without increasing the power of the continuous sintering furnace, so that the heat loss is avoided to be more serious, the resource waste is prevented, the problem of large power consumption of the continuous sintering furnace is solved, and the related problems in the prior art can be solved.

Preferably, a graphite plate 216 may be bonded to the inner wall of the first graphite felt layer 213 facing away from the first corundum brick layer 212. The high temperature resistance of the graphite plate 216 is better than that of the first graphite felt layer 213, so that the requirement of high temperature sintering of the high temperature hearth 220 can be met, the graphite plate 216 can also play a role in heat insulation, the heat preservation performance of the heat preservation furnace lining 200 can be further improved, and the graphite plate 216 has a dual-purpose effect.

Further, a reflective heat-insulating film may be bonded to an inner wall of graphite sheet 216 facing away from first graphite felt layer 213. The reflective heat insulation film achieves the purpose of heat insulation by reflecting infrared heat, so that heat is prevented from being transferred to the graphite plate 216, heat transfer loss is reduced from the source, and the heat insulation performance of the heat insulation furnace lining 200 can be further improved.

Specifically, the reflective heat insulation film can be graphite paper, the graphite paper is good in high temperature resistance, the surface of the graphite paper is smooth and is a mirror surface, and infrared heat can be reflected to achieve the purpose of heat insulation.

As described above, the thermal insulation furnace lining 200 has the high temperature section 210, the high temperature section 210 has the high temperature furnace 220, the thermal insulation furnace lining 200 disclosed in the present application further has the thermal insulation section 230, the thermal insulation section 230 has the thermal insulation furnace 240, and although the temperature in the thermal insulation furnace 240 is not as high as the temperature in the high temperature furnace 220, the thermal insulation and the heat preservation are also required, so as to avoid the heat loss and the waste. In an alternative embodiment, the high-temperature section 210 is connected to the insulating section 230, and the high-temperature furnace 220 is connected to the insulating furnace 240, the insulating section 230 sequentially includes a second corundum brick layer 231 and a second graphite felt layer 232 from outside to inside, a second asbestos felt layer 233 is filled between the inner shell 120 and the second corundum brick layer 231, the second graphite felt layer 232 is adhered to the inner wall of the second corundum brick layer 231, and the second graphite felt layer 232 surrounds the insulating furnace 240. Similar to the heat preservation principle of the high-temperature section 210, the arrangement mode can ensure that the heat insulation performance of the heat preservation section 230 is good, can prevent heat loss to the maximum extent, avoids serious heat loss, prevents resource waste, and has good heat preservation effect, thereby improving the preparation quality of aluminum nitride powder and aluminum nitride ceramic and reducing the power consumption of a continuous sintering furnace.

Preferably, the plurality of first fins 160 are provided around the inner wall of the inner case 120, and after the cooling water is introduced into the water-cooling chamber 130, the cooling water can be sufficiently contacted with the plurality of first fins 160, and the plurality of first fins 160 can increase the heat absorption area of the cooling water, so that more heat on the inner case 120 can be absorbed and taken away, and the water-cooling effect can be increased, which contributes to further reducing the temperatures of the outer case 110 and the inner case 120. In order to avoid the influence on the normal flow of the cooling water due to the arrangement of the plurality of first fins 160 on the inner wall of the inner shell 120, the distance between the outer end edge of the first fin 160 departing from the inner shell 120 and the inner shell 120 is smaller than the thickness of the water-cooling chamber 130, and the distance between the outer end edge of the first fin 160 departing from the inner shell 120 and the inner shell 120 can be regarded as the height of the first fin 160, that is, the height of the first fin 160 is smaller than the thickness of the water-cooling chamber 130, which means that a gap for the flow of the cooling water is formed between the outer end edge of the first fin 160 departing from the inner shell 120 and the outer shell 110, so that the outer shell 110 and the inner shell 120 can be cooled by the water.

As described above, in order to avoid the influence on the normal flow of the cooling water due to the arrangement of the plurality of first fins 160 on the inner wall of the inner shell 120, the distance between the outer end edge of the first fin 160 departing from the inner shell 120 and the inner shell 120 is smaller than the thickness of the water-cooling chamber 130, further, the distance between the outer end edge of the first fin 160 departing from the inner shell 120 and the inner shell 120 is a first distance, the thickness of the water-cooling chamber 130 is greater than 2 times the first distance, that is, the thickness of the water-cooling chamber 130 is greater than 2 times the height of the first fin 160, that is, the gap between the outer end edge of the first fin 160 departing from the inner shell 120 and the outer shell 110 is greater than the first distance, such an arrangement can ensure that the cooling water flows sufficiently, and avoid the problem that the cooling water flows slowly due to the small gap, and the water-cooling effect is poor, thereby ensuring the water-cooling effect.

In order to further reduce the temperature of the outer shell 110, optionally, the outer wall of the outer shell 110 is provided with a plurality of second fins 170, and by providing the plurality of second fins 170, the heat exchange area between the outer shell 110 and the air is increased, so that the heat dissipation efficiency of the outer shell 110 is improved, the temperature of the outer shell 110 can be further reduced, and the burning loss of the outer shell is avoided.

Further, the inlet conduit 140 may be disposed at the bottom of the outer shell 110, and the outlet conduit 150 may be disposed at the top of the outer shell 110. The cooling water gets into from water-cooling chamber 130 bottom, and the top is discharged, can make the cooling water be full of water-cooling chamber 130 to make the cooling water fully contact with shell 110 and inner shell 120, thereby can absorb more heat on shell 110 and the inner shell 120 and take away, and then can increase water-cooling effect, help further reducing the temperature of shell 110 and inner shell 120, and then can further prevent that shell 110 and inner shell 120 from appearing burning loss, deformation, fracture scheduling problem easily.

Furthermore, the pipe diameter of the water outlet pipe 150 is greater than the pipe diameter of the water inlet pipe 140, so that the cooling water discharge rate can be increased, the problem that cooling water with higher temperature is accumulated in the water cooling chamber 130 after heat exchange due to the fact that the pipe diameter of the water outlet pipe 150 is smaller than the pipe diameter of the water inlet pipe 140, and the problem that the water cooling effect is poor is avoided, and the problem that the water cooling chamber 130 is low in water inlet rate after being filled with water due to the fact that the pipe diameter of the water outlet pipe 150 is smaller than the pipe diameter of the water inlet pipe 140, and the water cooling effect is poor is avoided, and therefore the water cooling effect can be further improved.

Further, the water inlet pipe 140 is provided with a high pressure water pump, so that more cooling water flows through the water cooling chamber 130 per unit time by increasing the flow rate of the cooling water, and more heat can be taken away, thereby further improving the water cooling effect.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several implementation modes of the present application, and the description thereof is specific and detailed, but not construed as limiting the scope of the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. The utility model provides an aluminium nitride ceramic continuous sintering stove, characterized in that, includes stove outer shell (100) and heat preservation furnace lining (200), stove outer shell (100) outside-in is outer shell (110) and inner shell (120) in proper order, both ends sealing connection between outer shell (110) and inner shell (120), and form water-cooling chamber (130) between the two, outer shell (110) be connected with all with inlet channel (140) and outlet conduit (150) of water-cooling chamber (130) intercommunication, heat preservation furnace lining (200) set up in the inner wall of inner shell (120), heat preservation furnace lining (200) have high temperature section (210), high temperature section (210) have high temperature furnace (220), high temperature section (210) are ceramic fiber board layer (211), first corundum brick layer (212) and first corundum graphite layer (213) in proper order outside-in, inner shell (120) with it has glass fiber layer (214) to fill between ceramic fiber board layer (211) and the first corundum brick layer (212), the asbestos layer (215) is filled with first corundum brick layer (215) and graphite layer (213) the graphite felt layer (213) is in the high temperature section (213) and the felt layer (213) forms first corundum layer, the asbestos felt layer (213) that bonds, the asbestos felt layer (213) is located the high temperature section (220) that the brick layer (211) forms.

2. The continuous sintering furnace for aluminum nitride ceramics according to claim 1, characterized in that the inner wall of the first graphite felt layer (213) facing away from the first corundum brick layer (212) is bonded with a graphite plate (216).

3. The furnace for the continuous sintering of aluminum nitride ceramics according to claim 2, characterized in that the inner wall of the side of the graphite plate (216) facing away from the first graphite felt layer (213) is bonded with a reflective heat insulation film.

4. The continuous sintering furnace for aluminum nitride ceramics according to claim 3, wherein the reflective heat insulation film is graphite paper.

5. The aluminum nitride ceramic continuous sintering furnace according to claim 1, wherein the heat preservation lining (200) further comprises a heat preservation section (230), the heat preservation section (230) comprises a heat preservation hearth (240), the high-temperature section (210) is connected with the heat preservation section (230), the high-temperature hearth (220) is communicated with the heat preservation hearth (240), the heat preservation section (230) comprises a second corundum brick layer (231) and a second graphite felt layer (232) from outside to inside in sequence, a second asbestos felt layer (233) is filled between the inner shell (120) and the second corundum brick layer (231), the second graphite felt layer (232) is bonded to the inner wall of the second corundum brick layer (231), and the second graphite layer (232) is surrounded to form the heat preservation hearth (240).

6. The furnace as claimed in claim 1, wherein a plurality of first fins (160) are arranged around the inner wall of the inner shell (120), the distance between the outer end edge of the first fins (160) facing away from the inner shell (120) and the inner shell (120) is less than the thickness of the water cooling chamber (130), and a plurality of second fins (170) are arranged on the outer wall of the outer shell (110).

7. An aluminium nitride ceramic continuous sintering furnace according to claim 6, characterized in that the distance between the outer end edge of the first fin (160) facing away from the inner shell (120) and the inner shell (120) is a first distance, and the thickness of the water-cooled chamber (130) is more than 2 times the first distance.

8. The continuous sintering furnace for aluminum nitride ceramics according to claim 1, characterized in that the water inlet pipe (140) is arranged at the bottom of the outer shell (110), and the water outlet pipe (150) is arranged at the top of the outer shell (110).

9. The continuous sintering furnace of aluminum nitride ceramics according to claim 8, characterized in that the pipe diameter of the water outlet pipe (150) is larger than that of the water inlet pipe (140).

10. Aluminium nitride ceramic continuous sintering furnace according to claim 9, characterized in that the water inlet pipe (140) is provided with a high pressure water pump.

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