CN115924539A

CN115924539A - Industrial robot

Info

Publication number: CN115924539A
Application number: CN202211220757.2A
Authority: CN
Inventors: 矢泽隆之; 志村芳树; 伊藤一树
Original assignee: Nidec Sankyo Corp
Current assignee: Nidec Instruments Corp
Priority date: 2021-10-04
Filing date: 2022-10-08
Publication date: 2023-04-07
Also published as: JP2023054397A; KR20230048598A

Abstract

The present invention provides an industrial robot, comprising: a hand for loading the object to be conveyed; an arm connected to the hand; a swing arm rotatably connected to the front end side of the arm; and a main body portion rotatably connected to the base end side of the swing arm, wherein when the industrial robot is brought to an emergency stop, the hand portion linearly moving with respect to the swing arm can be prevented from moving in an unintended direction. In an industrial robot (1), when hands (8, 9) move linearly relative to a swing arm (11) and carry an object (2) to be conveyed into a storage part (5) and when the object (2) to be conveyed is carried out of the storage part (5), a brake mechanism for stopping the rotation of the swing arm (11) relative to a main body part (12) is operated, and the rotation stop state of the swing arm (11) is maintained.

Description

Industrial robot

Technical Field

The present invention relates to an industrial robot for conveying a conveyance target.

Background

Conventionally, an industrial robot for conveying a glass substrate for an organic EL (organic electroluminescence) display is known (for example, see patent document 1). The industrial robot described in patent document 1 is incorporated into a manufacturing system of an organic EL display and used. The manufacturing system of the organic EL display includes a transfer chamber in which a part of an industrial robot is disposed, and a plurality of process chambers disposed so as to surround the transfer chamber.

The industrial robot described in patent document 1 includes: two hands for loading glass substrates; two arms, two hands are respectively connected to the front end sides of the two arms in a rotatable manner; arm support portions to which base end sides of the two arms are rotatably connected; a swing arm having an arm support portion rotatably connected to a front end side thereof; and a main body portion to which a base end side of the swing arm is rotatably connected.

Further, the industrial robot described in patent document 1 includes: an arm driving mechanism for extending and retracting the two arms relative to the arm supporting part; a rotating mechanism for rotating the arm support part relative to the swing arm; and a rotating mechanism for rotating the swing arm relative to the main body. In the industrial robot described in patent document 1, when the glass substrate is carried into and out of the processing chamber, the arm support and the swing arm are stopped, and the arm is extended and contracted so as to linearly move relative to the arm support and the swing arm with the hand facing a certain direction.

Documents of the prior art

Patent literature

Patent document 1: japanese patent laid-open publication No. 2016-207938

Disclosure of Invention

In the industrial robot described in patent document 1, if some trouble occurs when the glass substrate is carried into the processing chamber or when the glass substrate is carried out from the processing chamber, the industrial robot may be stopped suddenly. In the industrial robot described in patent document 1, since the swing arm is rotatably connected to the main body, when the industrial robot is brought into or out of emergency stop when the glass substrate is loaded, the swing arm may rotate relative to the main body due to the influence of the inertia force of the hand or the arm. When the industrial robot is stopped suddenly when the glass substrate is carried in or carried out, if the swing arm is rotated relative to the main body, the hand that moves linearly relative to the swing arm may move in an unexpected direction, but the hand may move in an unexpected direction.

Therefore, an object of the present invention is to provide an industrial robot including: a hand for loading a conveying object; an arm connected to the hand; a swing arm rotatably connected to the front end side of the arm; and a main body portion rotatably connected to the base end side of the swing arm, wherein when the industrial robot is brought to an emergency stop, the hand portion linearly moving with respect to the swing arm can be prevented from moving in an unintended direction.

In order to solve the above problem, an industrial robot according to the present invention includes: a hand for loading a conveying object; an arm connected to the hand; a swing arm rotatably connecting the arm to the front end side in an axial direction in which the vertical direction is rotational; a main body portion rotatably connecting the base end sides of the swing arms in the vertical direction as the axial direction of rotation; an arm drive mechanism that linearly moves the hand relative to the swing arm in a horizontal direction and rotates the arm relative to the swing arm; a swing arm drive mechanism for rotating the swing arm relative to the main body; and a brake mechanism for stopping rotation of the swing arm relative to the main body, wherein when the object to be conveyed is carried into the storage portion for storing the object to be conveyed and when the object to be conveyed is carried out from the storage portion, the hand moves linearly relative to the swing arm in a state where the swing arm is stopped relative to the main body, and the brake mechanism operates during carrying-in and carrying-out to maintain the rotation stopped state of the swing arm.

In the present invention, the brake mechanism is, for example, an electromagnetic brake of a non-excited operation type.

In the industrial robot according to the present invention, the brake mechanism for stopping the rotation of the swing arm with respect to the main body operates to maintain the rotation-stopped state of the swing arm when the hand linearly moves with respect to the swing arm and when the object is carried into and out of the storage section. Therefore, in the present invention, even if the industrial robot is stopped suddenly when the hand is moved linearly with respect to the swing arm to carry in or carry out the object to be conveyed, the swing arm can be maintained in the rotation stopped state by the brake mechanism. Therefore, in the present invention, when the industrial robot is brought to an emergency stop, the hand that moves linearly with respect to the swing arm can be suppressed from moving in an unintended direction.

In the present invention, for example, the hand is connected to the tip end side of the arm so as to be rotatable in the vertical direction as the axial direction of rotation, the base end side of the arm is connected to the tip end side of the swing arm so as to be rotatable in the vertical direction as the axial direction of rotation, and the arm drive mechanism linearly moves the hand in the horizontal direction with respect to the swing arm by extending and contracting the arm.

In the present invention, for example, an industrial robot includes two hands each rotatably connected to a tip side of each of two tip side arms, and a common arm rotatably connected to base ends of the two tip side arms and rotatably connected to a tip side of a swing arm, and when one of the two hands is a first hand, the other hand is a second hand, the tip side arm connected to the first hand is a first tip side arm, and the tip side arm connected to the second hand is a second tip side arm, the arm driving mechanism includes: a first drive mechanism that rotates the first distal arm portion with respect to the common arm portion and rotates the first hand portion with respect to the first distal arm portion; a second drive mechanism that rotates the second distal-side arm portion with respect to the common arm portion and rotates the second hand portion with respect to the second distal-side arm portion; and a third drive mechanism that rotates the common arm portion with respect to the swing arm.

Effects of the invention

As described above, in the present invention, in an industrial robot including a hand on which a conveyance target object is loaded, an arm connected to the hand, a swing arm rotatably connected to a distal end side of the arm, and a main body rotatably connected to a proximal end side of the swing arm, when the industrial robot is brought to an emergency stop, the hand linearly moving with respect to the swing arm can be suppressed from moving in an unintended direction.

Drawings

Fig. 1 is a plan view showing a state in which an industrial robot according to an embodiment of the present invention is incorporated into a manufacturing system.

Fig. 2 is a sectional view for explaining the internal structure of the arm and the swing arm shown in fig. 1.

Fig. 3 is a sectional view for explaining an internal structure of the main body shown in fig. 1.

Fig. 4 is a plan view for explaining a state in which the swing arm of the industrial robot shown in fig. 1 is rotated.

Fig. 5 is a plan view for explaining a state in which a swing arm of the industrial robot shown in fig. 1 is rotated.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(construction of Industrial robot and manufacturing System)

Fig. 1 is a plan view showing a state in which an industrial robot 1 according to an embodiment of the present invention is incorporated into a manufacturing system 3. Fig. 2 is a sectional view for explaining the internal structure of the arm 10 and the swing arm 11 shown in fig. 1. Fig. 3 is a sectional view for explaining the internal structure of the main body 12 shown in fig. 1.

The industrial robot 1 (hereinafter referred to as "robot 1") according to the present embodiment is a robot for conveying, for example, a glass substrate 2 for an organic EL display or a glass substrate 2 for a liquid crystal display (hereinafter referred to as "substrate 2") as a conveyance target. The robot 1 is a horizontal articulated robot incorporated in a display manufacturing system 3. The robot 1 transports the substrate 2 in vacuum.

The manufacturing system 3 includes a transfer chamber 4 (hereinafter, referred to as "chamber 4") and a plurality of process chambers 5 and 6 (hereinafter, referred to as "

chambers

5 and 6") disposed around the chamber 4. The manufacturing system 3 has, for example, two chambers 5 and two chambers 6. The chambers 4 to 6 are vacuum chambers, and the insides of the chambers 4 to 6 are vacuum chambers. A part of the robot 1 is disposed inside the chamber 4. The robot 1 transfers the substrate 2 between the

chambers

5 and 6 by entering the

chambers

5 and 6 through a fork 19 described later which constitutes a part of the robot 1. Various devices are disposed in the

chambers

5 and 6, and the substrate 2 conveyed by the robot 1 is stored therein. In the

chambers

5 and 6, various processes are performed on the substrate 2. The

chambers

5 and 6 of the present embodiment are storage sections for storing the substrate 2 as a transport target.

The chamber 4 is formed in a substantially rectangular box shape having a square shape when viewed from the vertical direction, for example. In the following description, one of two directions (X direction in fig. 1) parallel to the outer peripheral surface of the square chamber 4 when viewed from the vertical direction is referred to as "front-rear direction", and the other direction (Y direction in fig. 1) orthogonal to the vertical direction and the front-rear direction is referred to as "left-right direction". In addition, one side in the front-back direction (the X1 direction side in fig. 1) is referred to as a "front" side, the opposite side to the front side (the X2 direction side in fig. 1) is referred to as a "rear side," one side in the left-right direction (the Y1 direction side in fig. 1) is referred to as a "right" side, and the opposite side to the right side (the Y2 direction side in fig. 1) is referred to as a "left" side.

Two chambers 5 are arranged on the rear side of the chamber 4. The two chambers 5 are disposed adjacent to each other in the left-right direction. Two chambers 6 are arranged on the front side of the chamber 4. The two chambers 6 are disposed adjacent to each other in the left-right direction. A gate is provided at a connecting portion of the chamber 4 and the chamber 5 and a connecting portion of the chamber 4 and the chamber 6.

The robot 1 includes: hands 8, 9 for mounting the substrate 2; an arm 10 connecting the hands 8, 9; a swing arm 11 connecting the arm 10; and a main body 12 connected to the swing arm 11. The robot 1 of the present embodiment includes two hands 8 and 9. The hands 8, 9 are rotatably connected to an arm 10. Specifically, the hands 8 and 9 are pivotably connected to the distal end side of the arm 10. The arm 10 is rotatably connected to a front end side of the swing arm 11. Specifically, the base end side of the arm 10 is rotatably connected to the tip end side of the swing arm 11. The base end side of the swing arm 11 is rotatably connected to the main body 12.

The arm 10 includes: two front-end

side arm portions

13, 14, the two hands 8, 9 being rotatably connected to the front ends of the two front-end

side arm portions

13, 14, respectively; and a common arm portion 15, base end sides of the two leading end

side arm portions

13, 14 being rotatably connected to the common arm portion 15, and the common arm portion 15 being rotatably connected to a leading end side of the swing arm 11. The arm 10 of the present embodiment is configured by two distal-end-

side arm portions

13 and 14 and one common arm portion 15.

The hand 8 is rotatably connected to the tip side of the tip side arm portion 13. The hand 9 is rotatably connected to the distal end side of the distal end side arm portion 14. The hand 8 of the present embodiment is a first hand, and the hand 9 is a second hand. The distal-side arm portion 13 in the present embodiment is a first distal-side arm portion, and the distal-side arm portion 14 is a second distal-side arm portion.

The hand 8 is rotatable in the axial direction in which the tip-side arm portion 13 rotates in the vertical direction. The hand 9 is rotatable in an axial direction in which the tip-side arm portion 14 rotates in the vertical direction. The distal-

side arm portions

13 and 14 are rotatable in the axial direction in which the common arm portion 15 rotates in the vertical direction. The common arm portion 15 is rotatable in the vertical direction as the axial direction of rotation with respect to the swing arm 11. That is, the arm 10 can rotate in the axial direction in which the swing arm 11 rotates in the vertical direction. The swing arm 11 is rotatable in the vertical direction as the axial direction of rotation with respect to the main body 12.

The hand 8 is disposed above the hand 9. The distal arm portion 13 is disposed above the hand portion 8. The distal arm portion 14 is disposed below the hand portion 9. The common arm portion 15 is disposed below the distal-side arm portion 14. That is, the distal-

side arm portions

13 and 14 are arranged above the common arm portion 15. The common arm portion 15 is disposed above the swing arm 11. That is, the arm 10 is disposed above the swing arm 11. The swing arm 11 is disposed above the main body 12.

The body portion 12 is composed of a case 16 (see fig. 3) formed in a bottomed cylindrical shape and a lid 17 covering an opening at the upper end of the case 16. The outer diameter of the cover 17 is larger than the outer diameter of the housing 16. The outer peripheral portion of the lid 17 is a flange portion 17a that extends radially outward of the case 16. When the rotation center of the swing arm 11 with respect to the main body 12 is defined as an arm rotation center C, the center of the chamber 4 coincides with the arm rotation center C when viewed in the vertical direction. That is, the main body 12 is provided so that the center of the chamber 4 coincides with the arm rotation center C.

In the present embodiment, the upper side of the lower surface of the flange portion 17a of the robot 1 is disposed in the chamber 4, and the hands 8 and 9, the arm 10, and the swing arm 11 are disposed in the chamber 4. That is, the portion of the robot 1 above the lower surface of the flange 17a is disposed in the vacuum region VR (in vacuum) (see fig. 3). On the other hand, a portion of the robot 1 below the lower surface of the flange 17a is disposed in the atmosphere area AR (in the atmosphere).

The hands 8 and 9 include a base 18 connected to the arm 10 and a fork 19 on which the substrate 2 is mounted. The base 18 of the hand 8 is rotatably connected to the tip side of the tip side arm 13, and the base 18 of the hand 9 is rotatably connected to the tip side of the tip side arm 14. The fork 19 is fixed to the base 18 so as to protrude horizontally from the base 18. The substrate 2 is mounted on the front end side portion of the fork 19. In the present embodiment, the depth of the

chambers

5 and 6 is increased, and the length of the fork 19 is increased. That is, the length of the hand portions 8 and 9 becomes long.

The distal-

side arm portions

13 and 14 are formed in a block shape that is elongated and long in the vertical direction and has a relatively small vertical thickness. The common arm portion 15 is formed into a block shape having a substantially V shape. A center portion (apex portion) of the common arm portion 15 formed in a substantially V shape is rotatably connected to a front end side of the swing arm 11. Further, a base end side of the tip-side arm portion 13 is rotatably connected to one tip end side of the common arm portion 15 formed in a substantially V shape, and a base end side of the tip-side arm portion 14 is rotatably connected to the other tip end side of the common arm portion 15. The swing arm 11 is formed in a block shape having a long and thin rectangular shape when viewed from the vertical direction and having a relatively thin thickness in the vertical direction.

The distal-

side arm portions

13 and 14 and the common arm portion 15 are formed in a hollow shape. That is, the arm 10 is formed in a hollow shape. The swing arm 11 is formed in a hollow shape. The hollow front-end

side arm portions

13 and 14 are evacuated. On the other hand, the insides of the common arm portion 15 and the swing arm 11 formed in a hollow shape are at atmospheric pressure.

In the horizontal direction, the distance between the center of rotation of the common arm portion 15 with respect to the swing arm 11 and the center of rotation of the leading-end-side arm portion 13 with respect to the common arm portion 15 is equal to the distance between the center of rotation of the leading-end-side arm portion 13 with respect to the common arm portion 15 and the center of rotation of the hand 8 with respect to the leading-end-side arm portion 13, and the distance between the center of rotation of the common arm portion 15 with respect to the swing arm 11 and the center of rotation of the leading-end-side arm portion 14 with respect to the common arm portion 15 is equal to the distance between the center of rotation of the leading-end-side arm portion 14 with respect to the common arm portion 15 and the center of rotation of the hand 9 with respect to the leading-end-side arm portion 14. In addition, in the horizontal direction, the distance between the center of rotation of the common arm portion 15 with respect to the swing arm 11 and the center of rotation of the leading-end-side arm portion 13 with respect to the common arm portion 15 is equal to the distance between the center of rotation of the common arm portion 15 with respect to the swing arm 11 and the center of rotation of the leading-end-side arm portion 14 with respect to the common arm portion 15.

The arm 10 is capable of extending and contracting with respect to the swing arm 11 between a position where the tips of the hands 8 and 9 (specifically, the tips of the forks 19) extend so as to be spaced apart from the joint 20, which is a connection portion between the swing arm 11 and the common arm 15, and a position where the tips of the hands 8 and 9 contract so as to approach the joint 20. In the present embodiment, when the portion of the arm 10 on the distal-side arm portion 13 side is extended so that the distal end of the hand 8 is separated from the joint 20, the portion of the arm 10 on the distal-side arm portion 14 side is contracted, and when the portion of the arm 10 on the distal-side arm portion 14 side is extended so that the distal end of the hand 9 is separated from the joint 20, the portion of the arm 10 on the distal-side arm portion 13 side is contracted. When the arm 10 extends and contracts with respect to the swing arm 11, the hands 8 and 9 linearly move in the horizontal direction in a state of being oriented in a certain direction with respect to the swing arm 11.

(construction of arm drive mechanism, swing arm drive mechanism, brake mechanism, etc.)

As shown in fig. 2 and 3, the robot 1 includes: an arm drive mechanism 24 that linearly moves the hands 8 and 9 in the horizontal direction with respect to the swing arm 11 and rotates the arm 10 with respect to the swing arm 11; a swing arm drive mechanism 25 that rotates the swing arm 11 with respect to the main body 12; a brake mechanism 26 for stopping rotation of the swing arm 11 with respect to the main body 12; and a swing arm lifting mechanism 27 that lifts and lowers the swing arm 11 relative to the main body 12.

The arm drive mechanism 24 extends and contracts the arm 10 relative to the swing arm 11 to linearly move the hands 8 and 9 in the horizontal direction (i.e., extends and contracts the arm 10 to linearly move the hands 8 and 9 relative to the swing arm 11 in the horizontal direction), and rotates the common arm portion 15 relative to the swing arm 11. The arm drive mechanism 24 includes: a first drive mechanism 31 that rotates the distal-side arm portion 13 with respect to the common arm portion 15 and rotates the hand 8 with respect to the distal-side arm portion 13; a second drive mechanism 32 that rotates the distal-side arm portion 14 with respect to the common arm portion 15 and rotates the hand 9 with respect to the distal-side arm portion 14; and a third drive mechanism 33 that rotates the common arm portion 15 relative to the swing arm 11.

The first drive mechanism 31 includes a motor 34 and a speed reducer 35 connected to the motor 34. The speed reducer 35 is a hollow wave gear device, and is disposed at a connection portion between the common arm portion 15 and the distal-side arm portion 13. The first drive mechanism 31 further includes: a pulley 36 fixed to an input shaft of the speed reducer 35; a pulley 37 disposed inside the base end side of the distal end side arm portion 13; and a pulley 38 disposed inside the distal end side of the distal end side arm portion 13. The ratio of the pitch diameter of the pulley 37 to the pitch diameter of the pulley 38 is set to 1: 2.

The motor 34 is a servomotor and includes an encoder for detecting a rotational position of the motor 34. The motor 34 is disposed inside the common arm portion 15. A pulley is fixed to an output shaft of the motor 34. A belt 40 is stretched over the pulley and the pulley 36. A lower end of a rotating shaft 41 formed in a cylindrical shape is fixed to an output shaft of the reduction gear 35. The upper end of the pivot shaft 41 is fixed to the lower surface of the distal end side arm 13 on the proximal end side. A magnetic fluid seal is disposed on the outer peripheral side of the output shaft of the speed reducer 35.

A support shaft that rotatably supports the pulley 37 is provided inside the base end side of the distal end side arm portion 13. The pulley 37 is fixed to one distal end side of the common arm portion 15 via a fixing member 42. The fixing member 42 is disposed outside the distal-side arm portion 13 and the common arm portion 15. A support shaft that rotatably supports the pulley 38 is provided inside the distal end side of the distal end side arm portion 13. The base 18 of the hand 8 is fixed to the lower end of the pulley 38. A belt 43 is provided over the

pulleys

37 and 38.

The second drive mechanism 32 is configured substantially similarly to the first drive mechanism 31, and includes a motor 44 and a speed reducer 45 connected to the motor 44. The reducer 45 is a hollow wave gear device, and is disposed at the connection portion between the common arm portion 15 and the distal-side arm portion 14. The second drive mechanism 32 includes: a pulley 46 fixed to an input shaft of the speed reducer 45; a pulley 47 disposed inside the distal end side of the distal end side arm portion 14; and a pulley 48 disposed inside the distal end side of the distal end side arm portion 13. The ratio of the pitch diameter of the pulley 47 to the pitch diameter of the pulley 48 is set to 1: 2.

The motor 44 is a servo motor, and includes an encoder for detecting a rotational position of the motor 44. The motor 44 is disposed inside the common arm portion 15. A pulley is fixed to an output shaft of the motor 44. A belt 50 is mounted on the pulley and the pulley 46. The output shaft of the speed reducer 45 is fixed to the lower surface of the tip end side arm portion 14 on the base end side. A magnetic fluid seal is disposed on the outer peripheral side of the output shaft of the speed reducer 45.

A support shaft that rotatably supports the pulley 47 is provided inside the base end side of the distal end side arm portion 14. The pulley 47 is fixed to the other distal end side of the common arm portion 15 via a fixing member 52. The fixing member 52 is disposed outside the distal arm portion 14 and the common arm portion 15. A support shaft that rotatably supports the pulley 48 is provided inside the front end side of the front end side arm portion 14. The base 18 of the hand 9 is fixed to the upper end of the pulley 48. A belt 53 is stretched over the pulleys 47 and 48.

The third drive mechanism 33 includes a motor 54, a speed reducer 55 connected to the motor 54, and a pulley 56 fixed to an input shaft of the speed reducer 55. The speed reducer 55 is a hollow wave gear device, and is disposed in the joint portion 20. The motor 54 is a servo motor, and includes an encoder for detecting a rotational position of the motor 54. The motor 54 is disposed inside the swing arm 11. A pulley is fixed to an output shaft of the motor 54. A belt 58 is stretched over the pulley and the pulley 56. The output shaft of the reduction gear 55 is fixed to the lower surface of the base end portion (center portion) of the common arm portion 15. A magnetic fluid seal is disposed on the outer peripheral side of the output shaft of the speed reducer 55.

The swing arm drive mechanism 25 includes a motor 62, a speed reducer 63 connected to the motor 62, and a pulley 64 fixed to an input shaft of the speed reducer 63. The speed reducer 63 is a hollow wave gear device. The motor 62 is a servo motor, and includes an encoder for detecting a rotational position of the motor 62. The motor 62 and the speed reducer 63 are disposed inside the housing 16. A pulley 65 is fixed to an output shaft of the motor 62. A belt 66 is stretched over the

pulleys

64 and 65. A lower end of a rotating shaft 68 formed in a cylindrical shape is fixed to an output shaft of the reduction gear 63. The upper end of the rotating shaft 68 is fixed to the lower surface of the base end side of the swing arm 11. A through hole in which the rotation shaft 68 is disposed is formed in the center of the cover 17. A magnetic fluid seal and a bellows are disposed on the outer peripheral side of the rotating shaft 68.

The brake mechanism 26 is an electromagnetic brake of a non-excited operation type. The brake mechanism 26 includes: a rotating plate fixed to a rotating shaft of the motor 62; a brake plate and an armature disposed with a rotating plate interposed therebetween; a spring member such as a compression coil spring for urging the armature toward the rotating plate; and a yoke around which a coil is wound. In the brake mechanism 26, the braking force is applied when the coil is in the non-excited state, and the braking force is not applied when the coil is in the excited state.

The swing arm lift mechanism 27 lifts and lowers the swing arm 11 together with the swing arm drive mechanism 25. The swing arm lift mechanism 27 is disposed inside the housing 16. The swing arm lift mechanism 27 includes: a motor 70; a ball screw 71 rotated by the power of the motor 70; and a pulley 72 fixed to a screw shaft of the ball screw 71. The motor 70 is a servomotor and is provided with an encoder for detecting the rotational position of the motor 70. The ball screw 71 has a screw shaft rotatably held by the housing 16. The nut member of the ball screw 71 is fixed to a movable frame 73 holding the swing arm drive mechanism 25. A pulley 74 is fixed to an output shaft of the motor 70. A belt 75 is stretched over the

pulleys

72 and 74.

(operation of robot)

Fig. 4 and 5 are plan views for explaining a state in the swing arm 11 turning operation of the robot 1 shown in fig. 1.

When carrying in the substrate 2 of the substrate 2 into the chamber 5 and when carrying out the substrate 2 of the substrate 2 from the chamber 5, the arm 10 is extended and contracted in a state where the front ends of the hands 8, 9 are arranged on the rear side and the base ends of the hands 8, 9 are arranged on the front side. Specifically, when the substrate 2 is carried into the chamber 5 and when the substrate 2 is carried out from the chamber 5, in a state where the tip of the hand 8 is disposed on the rear side and the base end of the hand 8 is disposed on the front side, the portion on the side of the tip-side arm portion 13 of the arm 10 expands and contracts, and the hand 8 moves linearly in the front-rear direction in a state of facing in a certain direction, or in a state where the tip of the hand 9 is disposed on the rear side and the base end of the hand 9 is disposed on the front side, the portion on the side of the tip-side arm portion 14 of the arm 10 expands and contracts, and the hand 9 moves linearly in the front-rear direction in a state of facing in a certain direction.

Similarly, when the substrate 2 is carried into the chamber 6 and the substrate 2 is carried out from the chamber 6, in a state where the tip of the hand 8 is arranged on the front side and the base end of the hand 8 is arranged on the rear side, the portion of the arm 10 on the side of the tip side arm portion 13 expands and contracts, and the hand 8 moves linearly in the front-rear direction in a state of facing in a certain direction, or in a state where the tip of the hand 9 is arranged on the front side and the base end of the hand 9 is arranged on the rear side, the portion of the arm 10 on the side of the tip side arm portion 14 expands and contracts, and the hand 9 moves linearly in the front-rear direction in a state of facing in a certain direction. That is, if the longitudinal direction of the hands 8 and 9 from the base ends of the hands 8 and 9 toward the tip ends of the hands 8 and 9 is set as the hand longitudinal direction, the arm 10 extends and contracts so that the hands 8 and 9 move linearly in the front-rear direction in a state where the hand longitudinal direction coincides with the front-rear direction when the substrate 2 is carried into the

chambers

5 and 6 and when the substrate 2 is carried out of the

chambers

5 and 6.

When the substrate 2 is carried into the

chambers

5 and 6 and when the substrate 2 is carried out from the

chambers

5 and 6, the swing arm 11 is stopped with respect to the main body 12. That is, when the substrate 2 is carried into the

chambers

5 and 6 and when the substrate 2 is carried out from the

chambers

5 and 6, the hands 8 and 9 are linearly moved in the front-rear direction with respect to the swing arm 11 in a state where the swing arm 11 is stopped with respect to the main body 12. When the substrate 2 is carried into the

chambers

5 and 6 and when the substrate 2 is carried out from the

chambers

5 and 6, the coil of the brake mechanism 26 is in a non-excited state. That is, the brake mechanism 26 operates when the substrate 2 is carried into the

chambers

5 and 6 and when the substrate 2 is carried out from the

chambers

5 and 6, and maintains the state where the swing arm 11 is stopped from rotating with respect to the main body 12.

When the swing arm 11 rotates relative to the main body 12, the first drive mechanism 31 and the second drive mechanism 32 stop. That is, when the swing arm 11 rotates relative to the main body 12, the

motors

34 and 44 stop, and the arm 10 does not extend or contract relative to the swing arm 11. When the swing arm 11 is pivoted relative to the main body 12, the arm 10 contracts, and the hand 8 and the hand 9 overlap in the vertical direction. At this time, the fork 19 of the hand 9 is disposed directly below the fork 19 of the hand 8.

For example, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed rearward of the arm rotation center C, the hand length direction is inclined with respect to the front-rear direction as shown in fig. 4 (a) to (C). Specifically, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed rearward of the arm rotation center C, the hand length direction is inclined by 90 ° with respect to the front-rear direction, and the hand length direction coincides with the left-right direction.

When the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed rearward of the arm rotation center C, the third drive mechanism 33 rotates the common arm 15 relative to the swing arm 11 so that the orientations of the hands 8 and 9 are constant. For example, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed rearward of the arm rotation center C, the third drive mechanism 33 rotates the common arm 15 relative to the swing arm 11 so as to maintain the state where the front ends of the hands 8 and 9 are directed to the left side.

For example, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed forward of the arm rotation center C, the hand length direction is inclined with respect to the front-rear direction as shown in fig. 5 (a) to (C). Specifically, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed forward of the arm rotation center C, the hand length direction is inclined by 90 ° with respect to the front-rear direction, and the hand length direction coincides with the left-right direction.

When the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the front side of the arm rotation center C, the third drive mechanism 33 rotates the common arm 15 relative to the swing arm 11 so that the orientations of the hands 8 and 9 are constant. For example, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the front side of the arm rotation center C, the third drive mechanism 33 rotates the common arm 15 with respect to the swing arm 11 so as to maintain the state where the front ends of the hands 8 and 9 are directed to the right side.

When the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the right side of the arm rotation center C, the hand length direction is inclined with respect to the left-right direction as shown in fig. 4 (D) to (F). Specifically, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the right side of the arm rotation center C, the hand length direction is inclined by 90 ° with respect to the left-right direction, and the hand length direction coincides with the front-rear direction.

When the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the right side of the arm rotation center C, the third drive mechanism 33 rotates the common arm 15 relative to the swing arm 11 so that the orientations of the hands 8 and 9 are constant. For example, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the right side of the arm rotation center C, the third drive mechanism 33 rotates the common arm portion 15 with respect to the swing arm 11 to maintain the state where the front ends of the hands 8 and 9 are directed rearward.

When the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the left side of the arm rotation center C, the hand length direction is inclined with respect to the left-right direction as shown in fig. 5 (D) to (F). Specifically, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the left side of the arm rotation center C, the hand length direction is inclined by 90 ° with respect to the left-right direction, and the hand length direction coincides with the front-rear direction.

When the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the left side of the arm rotation center C, the third drive mechanism 33 rotates the common arm 15 relative to the swing arm 11 so that the orientations of the hands 8 and 9 are constant. For example, when the swing arm 11 is rotated in a state where the front end side of the swing arm 11 is disposed on the left side of the arm rotation center C, the third drive mechanism 33 rotates the common arm portion 15 with respect to the swing arm 11 to maintain the state where the front ends of the hands 8 and 9 are directed to the front side.

(main effects of the present embodiment)

As described above, in the present embodiment, when the hands 8 and 9 move linearly with respect to the swing arm 11 and the substrate 2 is carried into the

chambers

5 and 6 and the substrate 2 is carried out from the

chambers

5 and 6, the brake mechanism 26, which is a non-excited operation type electromagnetic brake, operates to maintain the rotation stop state of the swing arm 11. Therefore, in the present embodiment, even if the robot 1 is stopped suddenly at the time of carrying in or carrying out the substrate 2 in which the hands 8 and 9 move linearly with respect to the swing arm 11, the rotation stop state of the swing arm 11 can be maintained by the brake mechanism 26. Therefore, in the present embodiment, when the robot 1 is brought to an emergency stop, the hands 8 and 9 that move linearly with respect to the swing arm 11 can be prevented from moving in unintended directions.

(modification 1 of robot)

In the above embodiment, as in the industrial robot described in patent document 1, the robot 1 may include an arm including a first arm, a second arm, and an arm support portion to which base end sides of the first arm and the second arm are rotatably connected, instead of the arm 10. That is, the robot 1 may be a so-called double-arm robot. In this case, the first arm and the second arm are constituted by a tip-side arm portion to which the hands 8 and 9 are rotatably connected on the tip side, and a base-side arm portion to which the base end side of the tip-side arm portion is rotatably connected on the tip side and which is rotatably connected on the base end side to the arm support portion. The arm support portion is connected to the front end side of the swing arm 11 so as to be rotatable.

In this modification, the arm drive mechanism that linearly moves the hands 8 and 9 in the horizontal direction with respect to the swing arm 11 and rotates the arm with respect to the swing arm 11 includes: a drive mechanism that extends and contracts the first arm with respect to the arm support (specifically, a drive mechanism that rotates the base-end-side arm with respect to the arm support, rotates the tip-side arm with respect to the base-end-side arm, and rotates the hand 8 with respect to the tip-side arm); a drive mechanism that extends and contracts the second arm with respect to the arm support (specifically, a drive mechanism that rotates the base-end-side arm with respect to the arm support, rotates the tip-side arm with respect to the base-end-side arm, and rotates the hand 9 with respect to the tip-side arm); and a drive mechanism that rotates the arm support portion with respect to the swing arm 11. The arm drive mechanism moves the hands 8 and 9 linearly in the horizontal direction with respect to the swing arm 11 by extending and contracting the arm.

(modification 2 of robot)

In the above embodiment, the robot 1 may have only one hand 8. In this case, the robot 1 includes, instead of the arm 10, an arm including a distal-side arm portion to which the hand 8 is rotatably connected on the distal side and a proximal-side arm portion to which the proximal side of the distal-side arm portion is rotatably connected on the distal side and which is rotatably connected on the proximal side to the distal side of the swing arm 11. That is, the robot 1 may be a so-called one-armed robot.

In this modification, the arm drive mechanism that linearly moves the hand 8 in the horizontal direction with respect to the swing arm 11 and rotates the arm with respect to the swing arm 11 includes: a drive mechanism that rotates the distal-side arm portion with respect to the proximal-side arm portion and rotates the hand 8 with respect to the distal-side arm portion; and a drive mechanism that rotates the base end side arm portion with respect to the swing arm 11. The arm drive mechanism moves the hands 8 and 9 linearly in the horizontal direction with respect to the swing arm 11 by extending and contracting the arms.

(modification 3 of robot)

In the above embodiment, the robot 1 may include, instead of the arm 10, an elongated substantially rectangular parallelepiped arm that holds the hands 8 and 9 so that the hands 8 and 9 can linearly reciprocate in the horizontal direction, as in the arm of an industrial robot disclosed in japanese patent application laid-open No. 2019-25585, for example. That is, the robot 1 may be a so-called linear robot in which the hands 8 and 9 are connected to arms so as to be slidable in the horizontal direction.

In this modification, for example, a center portion of an arm formed in a long and thin substantially rectangular parallelepiped shape is rotatably connected to a tip end side of the swing arm 11. In this modification, the arm drive mechanism that linearly moves the hands 8 and 9 in the horizontal direction with respect to the swing arm 11 and rotates the arm with respect to the swing arm 11 includes: a drive mechanism for linearly reciprocating the hand 8 relative to the arm; a drive mechanism for linearly reciprocating the hand 9 relative to the arm; and a drive mechanism that rotates the arm relative to the swing arm 11.

In this modification, the robot 1 may include only one hand 8.

In this case, the arm driving mechanism that linearly moves the hand 8 in the horizontal direction with respect to the swing arm 11 and rotates the arm with respect to the swing arm 11 includes a driving mechanism that linearly reciprocates the hand 8 with respect to the arm and a driving mechanism that rotates the arm with respect to the swing arm 11.

(other embodiments)

The above-described embodiment and modification are examples of preferred embodiments of the present invention, but the present invention is not limited thereto, and various modifications can be made without changing the gist of the present invention.

In the above embodiment, the rotating plate of the brake mechanism 26 may be fixed to a portion other than the rotating shaft of the motor 62. For example, the rotating plate of the brake mechanism 26 may be fixed to the input shaft of the reduction gear 63. The rotating plate of the brake mechanism 26 may be fixed to the output shaft of the reduction gear 63 or may be fixed to the rotating shaft 68. In the above embodiment, the chamber 4 may be formed in a substantially rectangular box shape when viewed in the vertical direction.

In the above embodiment, the distance in the horizontal direction between the center of rotation of the common arm portion 15 with respect to the swing arm 11 and the center of rotation of the leading-end side arm portion 13 with respect to the common arm portion 15 may not be equal to the distance in the horizontal direction between the center of rotation of the common arm portion 15 with respect to the swing arm 11 and the center of rotation of the leading-end side arm portion 14 with respect to the common arm portion 15. In the above embodiment, the length of the distal arm portion 13 may be different from the length of the distal arm portion 14. For example, the distal arm portion 13 may be longer than the distal arm portion 14.

In the above embodiment, the common arm portion 15 is formed in a block shape having a substantially V-shape, but the common arm portion 15 may be formed in a block shape having an elongated oblong shape or a rectangular shape when viewed from the vertical direction and having a relatively thin thickness in the vertical direction. In the above embodiment, the object to be conveyed by the robot 1 may be an object other than a glass substrate. For example, the object to be transported by the robot 1 may be a semiconductor wafer or the like. In the above embodiment, the robot 1 may transport the transport target object in the atmosphere.

Description of the symbols

1. Robot (Industrial robot)

2. Substrate (glass substrate, object to be conveyed)

5. Chamber (processing chamber, storage part)

8. Hand (first hand)

9. Hand (second hand)

10. Arm(s)

11. Swing arm

12. Main body part

13. Front end side arm part (first front end side arm part)

14. Front end side arm (second front end side arm)

15. Common arm part

24. An arm drive mechanism.

25. Swing arm driving mechanism

26. Brake mechanism

31. First driving mechanism

32. Second driving mechanism

33. And a third drive mechanism.

Claims

1. An industrial robot, comprising:

a hand for loading a conveying object;

an arm connected to the hand;

a swing arm rotatably connecting the arm to a tip end side in an axial direction in which the vertical direction is rotational;

a main body portion rotatably connecting the base end sides of the swing arms in an axial direction in which the vertical direction is rotational;

an arm drive mechanism that linearly moves the hand relative to the swing arm in a horizontal direction and rotates the arm relative to the swing arm;

a swing arm drive mechanism that rotates the swing arm relative to the main body; and

a brake mechanism for stopping rotation of the swing arm with respect to the main body,

the hand is linearly moved with respect to the swing arm in a state where the swing arm is stopped with respect to the main body portion at the time of carrying in the transport object into a storage portion that stores the transport object and at the time of carrying out the transport object from the storage portion,

the brake mechanism operates at the time of the carrying-in and the carrying-out, and maintains a rotation stop state of the swing arm.

2. The industrial robot according to claim 1,

the brake mechanism is a non-excitation operation type electromagnetic brake.

3. The industrial robot according to claim 1 or 2,

the hand is rotatably connected to the tip end side of the arm in an axial direction in which the hand is rotatable in the vertical direction,

the base end side of the arm is rotatably connected to the tip end side of the swing arm in an axial direction in which the arm rotates in the vertical direction,

the arm drive mechanism moves the hand linearly in a horizontal direction with respect to the swing arm by extending and contracting the arm.

4. The industrial robot of claim 3,

the hand-shaped body is provided with two hands,

the arm is provided with: two distal-side arm portions to which the two hands are rotatably connected, respectively; and a common arm portion to which base end sides of the two tip-side arm portions are rotatably connected and which is rotatably connected to a tip side of the swing arm,

one of the two hands is a first hand, the other hand is a second hand, the distal arm connected to the first hand is a first distal arm, and the distal arm connected to the second hand is a second distal arm,

the arm drive mechanism includes: a first drive mechanism that rotates the first distal-side arm portion with respect to the common arm portion and rotates the first hand portion with respect to the first distal-side arm portion; a second drive mechanism that rotates the second distal-side arm portion with respect to the common arm portion and rotates the second hand portion with respect to the second distal-side arm portion; and a third drive mechanism that rotates the common arm portion with respect to the swing arm.