CN115903456B - Magnetic suspension platform displacement mechanism and control method thereof - Google Patents
Magnetic suspension platform displacement mechanism and control method thereof Download PDFInfo
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Abstract
The invention discloses a magnetic suspension platform displacement mechanism, which comprises a magnetic suspension platform and a control module, wherein the magnetic suspension platform comprises a base, and a coil array assembly and a permanent magnet array assembly are sequentially arranged above the base; the invention also discloses a control method of the magnetic suspension platform displacement mechanism, which is mainly based on an analytic solving method of an equivalent current method and a micro-element substitution method, and the stress of the coil in a magnetic field is obtained; then, according to the analysis of the force and the moment, obtaining vector current; and finally, introducing a minimum norm solution method to obtain a unique minimum power current distribution scheme at each moment. The magnetic suspension platform displacement mechanism is of a suspension and displacement separation type structure, and meanwhile, the MFAC-PID controller is adopted to realize displacement control, so that the magnetic suspension platform displacement mechanism has the characteristics of simple integral structure, easiness in manufacturing, strong displacement controllability, high tracking precision and the like, and can be widely applied to the fields of basic scientific space experiments, precise workpiece manufacturing, integrated circuit manufacturing and the like.
Description
Technical Field
The invention belongs to the technical field of magnetic suspension, and particularly relates to a magnetic suspension platform displacement mechanism and a control method of the magnetic suspension platform displacement mechanism.
Background
The magnetic suspension platform is one of core components of ultra-precise systems such as a photoetching machine, and research on a design and control method of a displacement mechanism of the magnetic suspension platform is a key for realizing the magnetic suspension platform.
At present, a magnetic suspension platform generally adopts an integrated design of a displacement mechanism, namely, the suspension and displacement functions of the platform are realized simultaneously by the same set of mechanism, and the integrated structure of the magnetic suspension platform can improve the control difficulty, so that the displacement controllability of the displacement mechanism of the magnetic suspension platform is reduced; in addition, the PID controller is the most commonly used real-time controller in the magnetic suspension displacement platform mechanism, but one set of PID parameters is difficult to adapt to all working platforms, and the PID parameters are adjusted by a great deal of experience, so that the tracking precision of the magnetic suspension displacement platform mechanism is reduced due to improper parameter setting. Therefore, the magnetic suspension displacement platform mechanism with strong displacement controllability and high tracking precision has important significance for the development of magnetic suspension technology.
Disclosure of Invention
The invention aims to provide a magnetic suspension platform displacement mechanism, which solves the problems of low displacement controllability and low tracking precision of the magnetic suspension platform displacement mechanism in the prior art.
Another object of the present invention is to provide a control method of the displacement mechanism of the magnetic levitation platform.
The technical scheme includes that the magnetic suspension platform displacement mechanism comprises a magnetic suspension platform and a control module, wherein the magnetic suspension platform comprises a base, and a coil array assembly and a permanent magnet array assembly are sequentially arranged above the base.
The invention adopts another technical scheme that the control method of the magnetic suspension platform displacement mechanism is implemented according to the following specific steps:
step 1: converting the position information set by the magnetic suspension platform displacement mechanism into corresponding voltage signals through a position sensor;
step 2: the data processing card acquires a voltage signal output by the position sensor, and converts the voltage signal into a current signal, namely an initial control current signal;
step 3: setting position information and current position information as input values of a controller by an MFAC-PID controller; judging whether the position error signal is zero or not; if the position information is zero, acquiring the set position information, and if the position information is not zero, performing the step 4;
step 4: converting the current position information into required force and moment through a force conversion function, and then carrying out current distribution calculation according to a force decomposition function to calculate distribution current;
step 5: multiplying the obtained distributed current with an initial control current signal to obtain a current signal required by a set position;
step 6: supplying power to the current signal obtained in the step 5 through a driving power supply unit, generating corresponding electromagnetic force by the coil array through inflow current and the permanent magnet array, changing the current position, and recovering the error;
step 7: and under the condition that the error information is not zero, the current and the current distribution matrix are adjusted again, and the current distribution matrix are continuously circulated until the error is zero, so that the set position information is obtained.
The present invention is also characterized in that,
the control module comprises an upper computer, a data processing card, a driving power supply group and a position sensor which are connected in sequence; the upper computer is also connected with a real-time controller through a PCI bus, and can display, set and change the motion data of the magnetic suspension platform; the data processing card is used for data acquisition and control quantity output.
The real-time controller is an MFAC-PID controller; the position sensor is a diffuse reflection type laser sensor and is arranged on the base.
The coil array component comprises a plurality of coil brackets fixed on the base, a PCB (printed circuit board) fixed between the coil brackets and a coil array fixed on the PCB.
The permanent magnet array assembly is supported by a ball universal wheel fixed on the base and is arranged above the coil array assembly, and the permanent magnet array assembly comprises a permanent magnet array platform, a permanent magnet array embedded on the bottom surface of the permanent magnet array platform and corresponding to the position of the coil array, and a displacement groove arranged on the bottom surface of the permanent magnet array platform and corresponding to the position of the ball universal wheel, wherein the ball universal wheel is always positioned in the displacement groove.
The coil array completely covers the permanent magnet array, and the number ratio of the coils of the coil array to the permanent magnets of the permanent magnet array is 9:4, a step of; the coil arrays are periodically arranged according to a distributed structure, the permanent magnet arrays are periodically arranged according to a two-dimensional halbach structure, and the two arrays are matched with each other to generate suction force.
The number of coils of the coil array is 36, and the number of permanent magnets of the permanent magnet array is 16.
The position sensor is a loose HG-C1100 miniature laser displacement sensor; the coils of the coil array are coreless driving coils and are formed by winding 507 turns of enamelled copper wires with the inner diameter of 8.1mm and the outer diameter of 14.5 mm; the permanent magnets of the permanent magnet array are sintered rubidium-iron-boron with the brand NNF 50M.
The base, the ball universal wheel, the coil support and the permanent magnet array platform are all made of aluminum alloy without ferrous substances.
The beneficial effects of the invention are as follows:
(1) The magnetic suspension platform displacement mechanism adopts a structure with separated suspension and displacement, has strong displacement controllability, and solves the problems of larger coupling of suspension force and horizontal thrust and limited control force of the suspension displacement integrated displacement mechanism;
(2) The magnetic suspension platform displacement mechanism adopts the model-free self-adaptive MFAC-PID controller, and compared with the traditional PID controller, the magnetic suspension platform displacement mechanism can reduce the drive redundancy, reduce the high complexity of the model and improve the tracking precision;
(3) The magnetic suspension platform displacement mechanism has the advantages of simple integral structure, easy manufacture, strong self-adaptive capacity, high control precision, high response speed and wide application prospect.
Drawings
FIG. 1 is a schematic diagram of a displacement mechanism of a magnetic levitation platform according to the present invention;
FIG. 2 is a schematic diagram of a coil array in a magnetic levitation platform displacement mechanism according to the present invention;
FIG. 3 is a schematic diagram of the structure of a permanent magnet array in a magnetic levitation platform displacement mechanism of the present invention;
FIG. 4 is a control flow diagram of the displacement mechanism of the magnetic levitation platform of the present invention;
FIG. 5 is a graph of the tracking effect of a displacement mechanism of a magnetic levitation platform on a step response using a PID controller of the prior art based on the invention;
FIG. 6 is a graph of the tracking effect of a displacement mechanism of a magnetic levitation platform on sinusoidal signals using a PID controller of the prior art based on the present invention;
FIG. 7 is a graph showing the effect of tracking sinusoidal signal errors using a PID controller of the prior art based on the displacement mechanism of the magnetic levitation platform of the present invention;
FIG. 8 is a graph of the tracking effect of the displacement mechanism of the magnetic levitation platform on the step response of the displacement mechanism of the present invention;
FIG. 9 is a graph of the tracking effect of the displacement mechanism of the magnetic levitation platform on sinusoidal signals;
FIG. 10 is a graph showing the effect of the displacement mechanism of the magnetic levitation platform of the present invention on tracking sinusoidal signal errors.
In the figure, 1, a base, 2, a ball universal wheel, 3, a coil bracket, 4, a PCB board, 5, a coil array, 6, a permanent magnet array platform, 6-1, a displacement groove, 7, a permanent magnet array and 8, a position sensor.
Detailed Description
The invention will be described in detail below with reference to the drawings and the detailed description.
The invention relates to a displacement mechanism of a magnetic suspension platform, which comprises the magnetic suspension platform and a control module, wherein the structure of the magnetic suspension platform is shown in figure 1, the magnetic suspension platform comprises a base 1, and a coil array assembly and a permanent magnet array assembly are sequentially arranged above the base 1.
The coil array assembly comprises a plurality of coil brackets 3, a PCB 4 and a coil array 5, wherein the coil brackets 3 are fixed on the base 1; the PCB 4 is fixedly connected between the coil brackets 3; the coil array 5 is fixed on the PCB board 4.
The coil array 5 has a structure as shown in fig. 2, which adopts a distributed structure periodically arranged, wherein the basic constituent units are single coils with circular cross-sectional shapes, and the coils are closely arranged. The distributed coil single unit has the advantages of simple structure, high replaceability and strong expansibility, so that the universality and the flexibility of the design are greatly enhanced. In addition, the more the number of turns of the coil is, the larger the current density is, but a contradictory relation exists between the diameter of the coil and the selection of the number of turns, and the proper relation between the diameter of the coil and the selection of the number of turns is required to be selected according to the actual use requirement, so that the current carrying capacity of the coil is high.
The permanent magnet array assembly is supported by the ball universal wheel 2 fixed on the base 1 and is arranged above the coil array assembly, the permanent magnet array assembly comprises a permanent magnet array platform 6, a permanent magnet array 7 inlaid on the bottom surface of the permanent magnet array platform 6 and corresponding to the position of the coil array 5, and a displacement groove 6-1 arranged on the bottom surface of the permanent magnet array platform 6 and corresponding to the position of the ball universal wheel 2, and the ball universal wheel 2 is always positioned in the displacement groove 6-1 in the moving process of the permanent magnet array platform 6.
The basic constituent element of the permanent magnet array 7 is a rubidium-iron-boron permanent magnet, which has a higher magnetic force and a more stable magnetic force. The permanent magnet array 7 has a structure shown in fig. 3, a two-dimensional halbach structure is adopted for periodic arrangement, N, S is north and south, and the arrow direction is the magnetizing direction, and the arrangement structure strengthens the magnetic induction intensity of a single face, so that stronger acting force can be generated under the same volume and the same driving magnetic field.
The coil array 5 completely covers the permanent magnet array 7, so that the permanent magnet array 7 can be located in the projection range of the coil array 5 during translation. The number ratio of the coils of the coil array 5 of the present invention to the permanent magnets of the permanent magnet array 7 is 9, depending on the size of the individual coils and the permanent magnets: 4.
in addition, the base 1, the ball universal wheel 2, the coil support 3 and the permanent magnet array platform 6 are all made of aluminum alloy without ferrous substances, and are subjected to surface treatment, burr-free flash treatment measures and the like.
The control module comprises an upper computer, a data processing card, a driving power supply group and a position sensor 8 which are connected in sequence. The upper computer is also connected with a real-time controller through a PCI bus, the position information of the displacement mechanism of the magnetic suspension platform is displayed at the upper computer end in real time, and the upper computer end can also set and change the set position and the motion track of the magnetic suspension platform, so that the functions of data display, control realization and instruction issuing are realized; the data processing card is used for data acquisition and control quantity output; the position sensor 8 is arranged on the base 1, the position sensor 8 adopts a diffuse reflection type laser sensor, and a laser triangulation algorithm is arranged in the position sensor, so that a laser reflector additionally arranged on the magnetic levitation platform is not needed. The real-time controller adopted by the invention is an MFAC-PID controller, namely a model-free adaptive controller.
The control flow of the displacement mechanism of the magnetic suspension platform is shown in fig. 4, and is realized by the following steps:
step 1: converting the position information set by the displacement mechanism of the magnetic suspension platform into corresponding voltage signals through the position sensor 8;
step 2: the data processing card acquires a voltage signal output by the position sensor, and converts the voltage signal into a current signal, namely an initial control current signal;
step 3: setting position information and current position information as input values of a controller by an MFAC-PID controller; judging whether the position error signal is zero or not; if the position information is zero, acquiring the set position information, and if the position information is not zero, performing the step 4;
step 4: converting the current position information into required force and moment through a force conversion function, and then carrying out current distribution calculation according to a force decomposition function to calculate distribution current;
step 5: multiplying the obtained distributed current with an initial control current signal to obtain a current signal required by a set position;
step 6: supplying power to the current signal obtained in the step 5 through a driving power supply unit, generating corresponding electromagnetic force by the coil array 5 and the permanent magnet array 7 through inflow current, changing the current position, and recovering the error;
step 7: and under the condition that the error information is not zero, the current and the current distribution matrix are adjusted again, and the current distribution matrix are continuously circulated until the error is zero, so that the set position information is obtained.
Example 1
The utility model provides a magnetic suspension platform displacement mechanism, includes magnetic suspension platform and control module, and magnetic suspension platform is including being the base 1 that U type set up, and base 1 top has set gradually coil array subassembly and permanent magnet array subassembly.
The coil array assembly is arranged on a middle groove platform of the U-shaped base 1 and comprises a coil bracket 3, a PCB 4 and a coil array 5, wherein the coil bracket 3 is four and is fixed on the base 1; the rectangular PCB 4 is fixedly connected between the four coil brackets 3 through four board corners; the coil array 5 is fixed on the PCB board 4 through the PCB hole.
The permanent magnet array assembly is supported and arranged above the coil array assembly through two groups of ball universal wheels 2 fixed on the protruding platforms at the two ends of the U-shaped base 1, and comprises a permanent magnet array platform 6, a permanent magnet array 7 inlaid on the bottom surface of the permanent magnet array platform 6 and corresponding to the position of the coil array 5, and a displacement groove 6-1 arranged on the bottom surface of the permanent magnet array platform 6 and corresponding to the position of the ball universal wheels 2, wherein the ball universal wheels 2 are always positioned in the displacement groove 6-1 in the moving process of the permanent magnet array platform 6.
In the embodiment, the total number of coils of the coil array 5 is 36, the total number of permanent magnets of the permanent magnet array 7 is 16, and the coil array 5 completely covers the permanent magnet array 7; the coil array 5 adopts a distributed structure for periodic arrangement, the permanent magnet array 7 adopts a two-dimensional halbach structure for periodic arrangement, the two structures are matched with each other to generate suction force, and in the working process, only 16 coils corresponding to the permanent magnet array 7 are electrified. The coil of the coil array 5 is a coreless driving coil and is formed by winding 507 turns of enamelled copper wires with the inner diameter of 8.1mm and the outer diameter of 14.5 mm; the permanent magnet array 7 is a permanent magnet made of sintered rubidium-iron-boron with the brand NNF50M by Siqiang science and technology company.
The base 1, the ball universal wheel 2, the coil support 3 and the permanent magnet array platform 6 of the embodiment are all made of aluminum, and are subjected to surface treatment, burr-free flash treatment measures and the like.
The control module of this embodiment includes upper computer, data processing card, drive power supply group and position sensor 8 that connect gradually. The position sensor 8 is a loose HG-C1100 micro laser displacement sensor 8 and is arranged on a convex platform of the U-shaped base 1; the upper computer is also connected with an MFAC-PID controller through a PCI bus, the position information of the displacement mechanism of the magnetic suspension platform is displayed at the upper computer end in real time, and the upper computer end can also set and change the set position and the motion track of the magnetic suspension platform, so that the functions of data display, control realization and instruction issuing are realized; the data processing card is used for data acquisition and control quantity output, wherein the data acquisition of the displacement platform position information is realized through PCI-1713.
The magnetic suspension platform displacement mechanism of the embodiment is specifically controlled by the following steps:
step 1: converting the position information set by the displacement mechanism of the magnetic suspension platform into corresponding voltage signals through the position sensor 8;
step 2: the data processing card acquires a voltage signal output by the position sensor, and converts the voltage signal into a current signal, namely an initial control current signal;
step 3: setting position information and current position information as input values of a controller by an MFAC-PID controller; judging whether the position error signal is zero or not; if the position information is zero, acquiring the set position information, and if the position information is not zero, performing the step 4;
step 4: converting the current position information into required force and moment through a force conversion function, then carrying out current distribution calculation according to a force decomposition function, and calculating distribution current, wherein the method specifically comprises the following steps of:
step 4.1: the stress of the single coil is calculated as follows:
when the current position information of the displacement mechanism of the magnetic suspension platform is n (x ', y ', z '), the magnetic induction intensity of the permanent magnet array 7 at the point is as follows:
B′＝(B′ x ,B′ y ,B′ z )＝f halbach (x′,y′,z′) (1)
the stress condition of the individual coils is expressed as a function:
F′＝(F′ x ,F′ y ,F′ z )＝F force-l (x,y,z,i,j,l,I,m) (2)
wherein (x, y, z) is the position of the coil in the global coordinate system; (i, j, l) determining the position of the local coordinate system of the coil; i is the magnitude of the current flowing into the coil; m is the number of polygonal sides inscribed and is constant.
Step 4.2: the stress of the whole working coil is calculated, and the method is as follows:
according to the basic parameters of the coil array of the embodiment, each layer of coil is counted according to 12 current loops and 38 current loops, and the stress of the whole coil in the magnetic field generated by the permanent magnet array 7 is expressed as follows:
the coordinates of the coil in the halbach local coordinate system areThe stress condition of the coil can be expressed as follows according to equation (3):
step 4.3: the moment calculation is specifically as follows:
the component forces of the coil array to the permanent magnet array 7 in the three axial directions of the local coordinate system are respectively F x 、F y 、F z Then, the moment is calculated. The coordinates of the coil in the halbach local coordinate system areThe centroid coordinates of the halbach array are +.>The expression of the moment is:
step 4.4: mapping of coil stress is specifically as follows:
vector S n Comprising six elements of force and moment resolved onto three axes:
the moment effect of a coil on the halbach array is a mapping of force to moment, which is related only to the local coordinates of the current coil, expressed asWherein i is n The current value applied to the nth coil, i.e. the current coil, is known to have a mapping vector lambda n Such that:
step 4.5: the effect of the current to generate the force is as follows:
according to the mapping relation, when the current is a reference value 1A, the force rotation vector generated by the coil on the halbach array is:
wherein 16 coils of one working area are connected with current group vectorThe acting force generated during the process;
step 4.6: the current distribution scheme is as follows:
force and moment are calculated according to the current position information to obtain a force rotation vector S a When a set of current solutions i is obtained a The following steps are:
wherein, the liquid crystal display device comprises a liquid crystal display device,for distributing the current, E is the identity matrix, +.>
Step 5: multiplying the obtained distributed current with an initial control current signal to obtain a current signal required by a set position;
step 6: supplying power to the current signal obtained in the step 5 through a driving power supply unit, generating corresponding electromagnetic force by the coil array 5 and the permanent magnet array 7 through inflow current, changing the current position, and recovering the error;
step 7: and under the condition that the error information is not zero, the current and the current distribution matrix are adjusted again, and the current distribution matrix are continuously circulated until the error is zero, so that the set position information is obtained.
In addition, based on the magnetic suspension platform displacement mechanism, simulation verification is carried out on a common PID controller in the prior art and a control method of the MFAC-PID controller adopted by the invention.
1. Parameter setting
PID controller: the P value of the position ring has the greatest influence on the rapidity of the system response, and the larger the response is, the larger the overshoot is, but P=5 is set in consideration of the limitation of the need of tracking the sinusoidal signal and the current amplitude; the I value can influence the adjustment time, namely, the oscillation is greatly influenced, the larger the I value of the integration link is, the faster the error adjustment is, but the system is unstable, and I=1 is set; the system has larger inertia or hysteresis, and D=0.5 is set by considering the D value of the differential link; MFAC-PID controller: the weight is set to be 0.5, the estimated position is obtained to replace a position loop in the PID, and the value of the PI can be randomly adjusted.
Under the above conditions, simulation verification is performed according to the step response signal and the sine signal which are input by setting, wherein the amplitude of the step response signal is 5mm, the amplitude of the sine signal is 5mm, and the frequency is 0.08Hz. Wherein the dashed line represents the response curve for a given input signal and the solid line represents the tracking response curve for the control method.
2. Simulation verification result analysis
Based on the displacement mechanism of the magnetic levitation platform, the tracking effect of the prior art PID controller and the MFAC-PID controller of the invention on the step response is shown in fig. 5 and 8 respectively, and it can be seen from the graph that when the same step response signal is set, the overshoot and the oscillation of the MFAC-PID controller are large in the initial adjustment adaptation stage, because the weighting factor of model-free self-adaptation is set to be small, the system response is fast, the large overshoot is caused, and the PID parameter controller is not accurately adjusted, and the system oscillation is increased under the combined action. Adding the disturbance at 5s, the system also completes attenuation and re-enters stabilization, which indicates that the MFAC-PID controller also has better robustness.
Based on the displacement mechanism of the magnetic suspension platform, the tracking effect of the prior art PID controller and the MFAC-PID controller of the invention on the sinusoidal signals is respectively shown in fig. 6 and 9, and the graph shows that when the same sinusoidal signals are set, compared with the PID controller, the tracking effect of the MFAC-PID controller in the initial stage is poorer, but the tracking performance is better after parameter adaptation is completed.
Based on the displacement mechanism of the magnetic suspension platform, the effects of tracking sinusoidal signal errors by adopting the PID controller in the prior art and the MFAC-PID controller in the invention are respectively shown in fig. 7 and 10, and the graph shows that when the same sinusoidal signal is set, the tracking error of the MFAC-PID controller is within 0.5mm under the steady state condition, which is higher than that of the regulated PID controller, and the model-free self-adaptive control has better adaptability to a system with repeated motion for long-term operation.
In summary, compared with the conventional PID controller in the prior art, the MFAC-PID controller adopted by the invention can reduce multiple redundancy in driving, reduce high complexity of a model and improve tracking precision.
Claims (6)
1. The control method of the magnetic suspension platform displacement mechanism is characterized by comprising a magnetic suspension platform and a control module, wherein the magnetic suspension platform comprises a base (1), and a coil array assembly and a permanent magnet array assembly are sequentially arranged above the base (1);
the control module comprises an upper computer, a data processing card, a driving power supply group and a position sensor (8) which are connected in sequence; the upper computer is also connected with a real-time controller through a PCI bus, and can display, set and change the motion data of the magnetic suspension platform; the data processing card is used for data acquisition and control quantity output;
the permanent magnet array assembly is supported by a ball universal wheel (2) fixed on the base (1) and is arranged above the coil array assembly, the permanent magnet array assembly comprises a permanent magnet array platform (6), a permanent magnet array (7) inlaid on the bottom surface of the permanent magnet array platform (6) and corresponding to the position of the coil array (5), and a displacement groove (6-1) arranged on the bottom surface of the permanent magnet array platform (6) and corresponding to the position of the ball universal wheel (2), and the ball universal wheel (2) is always positioned in the displacement groove (6-1);
the coil array (5) completely covers the permanent magnet array (7), and the number ratio of the coils of the coil array (5) to the permanent magnets of the permanent magnet array (7) is 9:4, a step of; the coil arrays (5) are periodically arranged according to a distributed structure, the permanent magnet arrays (7) are periodically arranged according to a two-dimensional halbach structure, and the two are matched with each other to generate suction force;
the control method is implemented according to the following specific steps:
step 1: position information set by the displacement mechanism of the magnetic suspension platform is converted into corresponding voltage signals through a position sensor (8);
step 2: the data processing card acquires a voltage signal output by the position sensor (8), and converts the voltage signal into a current signal, namely an initial control current signal;
step 3: setting position information and current position information as input values of a controller by an MFAC-PID controller; judging whether the position error signal is zero or not; if the position information is zero, acquiring the set position information, and if the position information is not zero, performing the step 4;
step 4: converting the current position information into required force and moment through a force conversion function, and then carrying out current distribution calculation according to a force decomposition function to calculate distribution current;
step 5: multiplying the obtained distributed current with an initial control current signal to obtain a current signal required by a set position;
step 6: supplying power to the current signal obtained in the step 5 through a driving power supply unit, generating corresponding electromagnetic force by the coil array (5) through inflow current and the permanent magnet array (7), changing the current position, and recovering an error;
step 7: and under the condition that the error information is not zero, the current and the current distribution matrix are adjusted again, and the current distribution matrix are continuously circulated until the error is zero, so that the set position information is obtained.
2. A method of controlling a displacement mechanism of a magnetic levitation platform according to claim 1, wherein the real-time controller is an MFAC-PID controller; the position sensor (8) is a diffuse reflection type laser sensor, and the position sensor (8) is arranged on the base (1).
3. A control method of a magnetic levitation platform displacement mechanism according to claim 1, characterized in that the coil array assembly comprises a number of coil brackets (3) fixed on the base (1), a PCB board (4) fixed between the number of coil brackets (3) and a coil array (5) fixed on the PCB board (4).
4. The control method of a magnetic levitation platform displacement mechanism according to claim 1, wherein the number of coils of the coil array (5) is 36, and the number of permanent magnets of the permanent magnet array (7) is 16.
5. The control method of a magnetic levitation platform displacement mechanism according to claim 4, wherein the position sensor (8) is a loose HG-C1100 micro laser displacement sensor; the coil of the coil array (5) is a coreless driving coil, and is formed by winding 507 turns of enamelled copper wires with the inner diameter of 8.1mm and the outer diameter of 14.5 mm; the permanent magnets of the permanent magnet array (7) are sintered rubidium-iron-boron with the brand NNF 50M.
6. A control method of a magnetic levitation platform displacement mechanism according to claim 5, characterized in that the base (1), the ball-and-socket (2), the coil support (3) and the permanent magnet array platform (6) are all made of an aluminium alloy free of ferrous substances.
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