CN110932602A - Six-degree-of-freedom magnetic suspension rotary table, control system and method - Google Patents
Six-degree-of-freedom magnetic suspension rotary table, control system and method Download PDFInfo
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- CN110932602A CN110932602A CN201911327508.1A CN201911327508A CN110932602A CN 110932602 A CN110932602 A CN 110932602A CN 201911327508 A CN201911327508 A CN 201911327508A CN 110932602 A CN110932602 A CN 110932602A
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Abstract
The invention discloses a six-degree-of-freedom magnetic suspension turntable, a control system and a control method. The invention has the characteristics of simple structure, more freedom of movement, high bearing rigidity, high thrust density, high rotation precision and vacuum compatibility, and can be widely applied to the fields of micro-machining, radars, optical antenna tracking systems and the like.
Description
Technical Field
The invention belongs to the technical field of magnetic suspension, and particularly relates to a high-precision six-degree-of-freedom magnetic suspension turntable which can be used for micro-machining, aerospace craft simulation turntables and the like.
Background
The precision turntable has important application value in modern science and production, such as micromachining, spacecraft simulation test platforms, laser communication optical antenna tracking systems and the like. The rotary workbench is high-precision equipment, and is required to have small friction force, high positioning precision, high response speed and high structural rigidity. The existing precision rotary table can only realize the rotation movement with single degree of freedom almost, and the application and application range of the precision rotary table is limited. Particularly in the fields of semiconductor processing, haptic feedback systems, and the like, the positioning platform requires not only a large range of angular rotation, but also a certain range of translational motion. The common multi-axis motion is often synthesized by a plurality of single-degree-of-freedom motion actuators, which not only increases the complexity and the overall inertia of the system design, but also reduces the response frequency and the micro-motion resolution of the system. The integrated device capable of moving in multiple degrees of freedom can be obtained by utilizing the magnetic suspension technology, the defects of a laminated driving structure are overcome, the friction between a rotor and a stator of a traditional mechanical turntable can be eliminated by utilizing the suspension technology, and the integrated device has the characteristics of zero friction, no recoil, vibration isolation, cleanness and compact structure and is very suitable for the field of precision manufacturing and production.
Disclosure of Invention
In order to overcome the defects of complex structure, less freedom of movement, large friction force, low platform rigidity, low thrust density and the like of the conventional rotary working table, the invention provides a neutron symmetric magnetic suspension rotary table which is easy to manufacture and assemble, increases the thrust density and the platform rigidity by dense coil array arrangement, has the capability of multi-freedom-degree movement, and can be widely applied to various fields such as micro-milling, optical antenna tracking systems and the like.
A six-freedom magnetic suspension turntable is characterized in that: comprises a platform base and a circular object stage arranged on the platform base; the top of the circular objective table fixes an elliptical target object to be measured through three threaded holes, so that the center of the elliptical target object is positioned on the central shaft of the objective table, rectangular grooves which are circumferentially arranged around the central shaft are formed in the bottom of the circular objective table, and a plurality of rectangular magnet arrays are embedded in the rectangular grooves; the coil array positioned below the magnet array is fixed on the platform base through the bow-shaped coil bracket; a plurality of upper end face sensor supports and upper end face photoelectric sensors fixed on the upper end face sensor supports are arranged along the circumferential direction of the coil array, and the upper end face sensor supports are fixed on the upper end face of the platform base; a lower end face sensor support and a lower end face photoelectric sensor fixed on the lower end face sensor support are arranged on the lower end face of the platform base and below the coil array; the square base is fixed to the optical vibration isolation platform through the vertical support frame and the horizontal support frame.
In the six-degree-of-freedom magnetic suspension turntable, the arch-shaped coil support is an arch-shaped component with a hollow middle, the arch-shaped component comprises a first rectangular piece and a second rectangular piece, the periphery of the first rectangular piece is polished into an arc-shaped chamfer angle for winding a coil, the first rectangular piece and the second rectangular piece are fixedly connected at two ends of a connecting piece, and the second rectangular piece is fixed on a threaded hole of the platform base.
In the six-degree-of-freedom magnetic suspension turntable, the coil array and the magnet array are arranged in a circumferential structure, so that the large-angle rotation control of the turntable around the vertical direction is realized; the external diameter of circumference type coil array is greater than the external diameter of circumference type magnet array, when guaranteeing objective table translation or rotation, the magnet array homoenergetic is in coil array's inside, and rectangle recess inner wall is equipped with the epoxy layer, and a plurality of rectangle magnet arrays are fixed in the rectangle recess with epoxy layer interference fit.
In the six-degree-of-freedom magnetic suspension turntable, the number of the coils and the number of the magnets are 1: 3; the magnet array is made of a strong magnetic material with the trademark of N48 and sintered rubidium, iron and boron, and is arranged according to a circular Halbach structure; the runner type coil without the iron core is formed by winding 210 turns of enameled copper wires with the diameter of 0.6 mm.
In the six-degree-of-freedom magnetic suspension turntable, the magnet array and the coil array are periodically arranged, and the coils in a similar magnetic field environment are connected in series.
In the six-degree-of-freedom magnetic suspension turntable, a large round hole is formed in the center of the square base, and laser emitted by the photoelectric sensor on the lower end face can penetrate through the large round hole to measure the position of the magnetic suspension turntable; and a threaded hole for mounting the arch-shaped coil support is formed around the central shaft of the base.
In the six-degree-of-freedom magnetic suspension turntable, the thickness of the square platform base is not less than 15 mm; the sensor support below the coil comprises a first rectangular module and a second rectangular module which are perpendicular to each other and fixed, the second rectangular module is an aluminum baffle plate and used for fixing the photoelectric sensor, and the first rectangular module is connected with the aluminum baffle plate and is fixed on the optical vibration isolation platform.
In the six-degree-of-freedom magnetic suspension turntable, the photoelectric sensor is a diffusion reflection type laser sensor, and a laser triangulation algorithm is arranged in the photoelectric sensor, so that an additional laser reflector is not required to be arranged on the magnetic suspension platform.
A control system for a six-degree-of-freedom magnetic suspension turntable is characterized in that: the system comprises a PC (personal computer) end, a real-time controller (DSP or ARM), a digital-to-analog converter, a power amplifier, three upper end surface photoelectric sensors, three lower end surface sensors and a data acquisition card which are connected in sequence, wherein the real-time controller adopts the DSP or ARM;
a control method of a control system, characterized in that: the method comprises the following steps:
step S1, the position information of the magnetic suspension turntable is converted into corresponding voltage signals by the sensing system through the upper end surface and the lower end surface photoelectric sensors;
step S2, acquiring a voltage signal output by the sensing system by the data acquisition card, converting the voltage signal into a digital signal, and transmitting the digital signal to the real-time controller;
step S3, the real-time controller analyzes the signal transmitted by the data acquisition card to obtain the current position information of the turntable, compares the set target position with the current position information to obtain error information, further solves the magnetic force and magnetic moment required by the turntable to reach the target position by PID or other control methods, substitutes the magnetic force and magnetic moment into the current-power transmission matrix to obtain the required voltage regulation signal, and finally transmits the signal to the digital-to-analog converter; the whole control algorithm implementation process can be expressed as the following formula:
v is the voltage control signal calculated by the real-time controller, AsIs transconductance gain of the power amplifier, gamma is a current-power transfer matrix representing the conversion relationship between the driving current in each coil and the magnetic force and the magnetic moment borne by the magnetic suspension turntable, and gamma isT·(Γ·ΓT)-1Is the pseudo-inverse of Γ, wdesireIs a one-dimensional array, contains magnetic force and magnetic moment required by the magnetic suspension turntable to reach a target position, and mg is a magnetic suspension rotorWeight of mover part under no load condition of table;
step S4, the voltage signal from the D/A converter passes through the power amplifying circuit to generate an adjustable constant current source to excite the coil array, and at the moment, electromagnetic force is generated between the magnet array and the coil array to enable the magnetic suspension turntable to generate translation or rotation motion;
step S5, the real-time controller communicates with the PC end through USB or serial port to realize good human-computer interaction function; the attitude information of the magnetic suspension rotary table is displayed at the PC end in real time, and the target position and the motion track of the rotary table can be set and changed at the PC end.
Compared with the prior art, the invention has the advantages that: different from the traditional bearing type rotary table, the magnetic suspension rotary table is constructed by combining the circumferential Halbach magnet array and the coreless circumferential coil array, so that not only can single-shaft high-speed rotation be realized, but also translation motion within a certain range can be carried out. The whole structure is simple, the manufacture is easy, the power density is high, the control precision is high, the response speed is high, the bearing capacity is strong, and the device can adapt to more industrial application environments.
Drawings
Fig. 1 is an exploded view of a magnetic levitation turntable according to the present invention.
Fig. 2 is an exploded view of the stage and magnet array of the present invention.
Fig. 3 is a magnetization direction arrangement of a magnet array according to the present invention.
Fig. 4 is a diagram of a single coreless coil and coil support of the present invention.
Fig. 5 is a top view of a stator portion of a magnetic levitation turntable according to the present invention.
Fig. 6 is a schematic structural diagram of a square base according to the present invention.
Fig. 7 is a structural diagram of a photoelectric sensor and a sensor holder under a coil according to the present invention.
Fig. 8 is a schematic diagram of the overall structure of the magnetic levitation turntable system according to the invention.
Detailed Description
The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings. In the figure, an optical vibration isolation platform 1, a horizontal support frame 2, a vertical support frame 3, a square base 4, an upper end surface sensor support 5, an upper end surface photoelectric sensor 6, a coil support 7, a coil array 8, a permanent magnet array 9, a circular objective table 10, an elliptical target 11, a lower end surface sensor support 12 and a lower end surface photoelectric sensor 13 are arranged.
Example (b):
as shown in fig. 1 and 2, the six-degree-of-freedom magnetic suspension turntable of the invention mainly comprises an elliptical target 11, a circular object stage 10, a permanent magnet array 9, a coil support 7, a coil array 8, a square base 4, an upper end surface sensor support 5, an upper end surface photoelectric sensor 6, a lower end surface sensor support 12, a lower end surface photoelectric sensor 13, a vertical support frame 3, a horizontal support frame 2 and an optical vibration isolation platform 1. The elliptical target 11, the circular object stage 10 and the permanent magnet array 9 which are arranged in a circumferential mode are used as a rotor part of the system, and the coil support 7, the coil array 8, the square base 4, the vertical support frame 3, the horizontal support frame 2 and the optical vibration isolation platform 1 form a stator part of the system. A stable suspension state without mechanical contact is kept between a rotor and a stator of the system through electromagnetic force.
The horizontal support frame 2, the vertical support frame 3, the platform base 4, the coil support 7, the objective table 10 and the elliptical target 11 are all made of aluminum alloy 6061 without ferrous substances, and surface treatment is required, and sand blasting, anodic oxidation-natural color treatment and burr-free flash treatment measures are adopted. The aluminum material can ensure that the magnetic suspension turntable keeps light weight under the condition of high rigidity.
The coil array 8 and the magnet array 9 are arranged in a circumferential structure, and the compact structure with central symmetry is beneficial to the turntable to rotate around the vertical direction at a large angle and enhances the power density of the system.
The outer diameter of the circumferential coil array 8 should be larger than the outer diameter of the circumferential magnet array 9, so that when the objective table 10 translates or rotates, the magnet array 9 can be located inside the coil array 8, and subsequent modeling and control are facilitated.
The number of the coils 8 and the number of the magnets 9 are in a relation of 1:3, so that the following suspension control is facilitated, the magnets provided by the invention are 72 rectangular magnets, and the coils are 24 runway-type coils.
The magnet array 9 adopts sintered rubidium, iron and boron with the grade of N48 or higher to obtain higher magnetic output density.
Specifically, the Halbach magnet array 9 is composed of rectangular magnets, the size and the number of the rectangular magnets need to be designed according to actual application scenes, the magnetization intensity of each rectangular magnet is guaranteed to be consistent, and finally the rectangular magnets are bonded in the grooves in the bottom 10 of the circular objective table through epoxy resin.
As shown in fig. 3, the permanent magnet array 9 is arranged following the Halbach array pattern. X and · both denote the magnetization direction of the magnet, with x pointing inward on the drawing and · outward on the drawing. The magnets are arranged according to the magnetization direction in the figure, so that the magnetic field intensity close to one side of the coil is enhanced, and the magnetic field intensity close to the object carrying plane is weakened, thereby not only improving the output magnetic density of the system, but also reducing the influence of the magnetic field on the object to be carried as much as possible.
As shown in figure 4, the arched coil support 7 is an arched component with a hollow middle, the arched component comprises a first rectangular piece 7-3 and a second rectangular piece 7-1, the periphery of the first rectangular piece 7-3 is polished into an arc-shaped chamfer angle for winding a coil, two ends of a connecting piece 7-2 are used for connecting and fixing the first rectangular piece 7-3 and the second rectangular piece 7-1, and the second rectangular piece 7-1 is fixed on a threaded hole of the platform base.
The coil array 8 is formed by winding 210 turns of enameled copper wires with the diameter of 0.6mm, and the larger the diameter of the copper wire is, the better the current carrying capacity can be obtained. The more turns of the coil, the higher the current density of the system. However, a contradiction relationship exists between the selection of the coil diameter and the number of turns, and finally, the reasonable coil diameter and the number of turns of the coil need to be determined according to actual use requirements, so that the designed coil has larger current carrying capacity and higher current density.
As shown in fig. 5, the coil array 8 is combined in series according to a certain rule, and twenty-four coils can be divided into eight groups: twenty-four coils can be divided into eight groups: group one (coil 1, coil 5, coil 9), group two (coil 13, coil 17, coil 21), group three (coil 3, coil 7, coil 11), group four (coil 15, coil 19, coil 23), group five (coil 2, coil 6, coil 10), group six (coil 14, coil 18, coil 22), group seven (coil 4, coil 8, coil 12), group eight (coil 16, coil 20, coil 24), which grouping may simplify the subsequent magnetic modeling and control process.
As shown in fig. 6, the horizontal support frame 2 is mounted on the optical vibration isolation platform 1 through a positioning hole; the vertical support frame 3 is tightly fixed with the horizontal support frame 2 through a positioning hole; the square base 4 is firmly assembled with the vertical support frame 3 through the positioning hole.
Furthermore, the thickness of the square platform base 4 is not less than 15mm, and the structural rigidity and hardness are required to be kept high.
The center of the platform base 4 is provided with a large round hole, so that the sensor 13 below the coil can conveniently carry out laser ranging. Around the base center pin, be equipped with the screw hole that is used for installing coil support 7, the number and the position of screw hole are selected according to coil support 7's size, guarantee that coil support 7 firmly assembles on base 4.
All screw holes on the platform base 4 need to be processed in place once, and repeated repair can not be carried out for many times. The processing error of the screw hole on the platform base 4 is directly related to the rotation performance of the magnetic suspension turntable.
The height of the vertical support frame 3 is adjusted according to the selected measuring range of the lower end surface photoelectric sensor 13. The side length of the square base 4 needs to be selected according to the measurement index of the upper end surface photoelectric sensor 6.
As shown in fig. 7, the sensor support 12 under the coil includes a first rectangular module 12-1 and a second rectangular module 12-2 fixed perpendicular to each other, the second rectangular module 12-2 is an aluminum baffle plate for fixing the photoelectric sensor, and the first rectangular module 12-1 is connected with the aluminum baffle plate and fixes the aluminum baffle plate to the optical vibration isolation platform.
As shown in fig. 8, the magnetic suspension turntable system is mainly composed of a PC terminal, a real-time controller (DSP or ARM), a digital-to-analog converter, a power amplifier, an exciting coil 8, a Halbach magnet array 9, a sensing system, a data acquisition card, and the like. The sensing system consists of three horizontal photoelectric sensors 6 and three vertical photoelectric sensors 13 and can measure attitude information of the rotary table in six directions. The attitude information is fed back to the real-time controller for processing, and corresponding coil driving signals are output, so that a closed-loop feedback system is formed.
In specific implementation, the control method based on the magnetic suspension turntable comprises the following steps:
and step S1, the sensing system converts the position information of the magnetic suspension turntable into corresponding voltage signals through the upper end surface sensor 6 and the lower end surface photoelectric sensor 13.
And step S2, the data acquisition card acquires the voltage signal output by the sensing system, converts the voltage signal into a digital signal and transmits the digital signal to the real-time controller.
And step S3, the real-time controller analyzes the signal transmitted by the data acquisition card to obtain the current position information of the turntable, compares the set target position with the current position to obtain error information, further solves the magnetic force and magnetic moment required by the turntable to reach the target position by PID or other control methods, substitutes the magnetic force and magnetic moment into the current-power transmission matrix to obtain the required voltage regulation signal, and finally transmits the signal to the digital-to-analog converter. The whole control algorithm implementation process can be expressed as the following formula:
v is the voltage control signal calculated by the real-time controller, AsIs the transconductance of the power amplifier, and gamma is a current-power transfer matrix representing the conversion relationship between the driving current in each coil and the magnetic force and the magnetic moment borne by the magnetic suspension turntableT·(Γ·ΓT)-1Is the pseudo-inverse of Γ, wdesireThe magnetic suspension turntable is a one-dimensional array and comprises magnetic force and magnetic moment required by the magnetic suspension turntable to reach a target position, and mg is the weight of a rotor part under the condition that the magnetic suspension turntable is in no load.
And step S4, the voltage signal from the digital-to-analog converter passes through a power amplifying circuit to generate an adjustable constant current source to excite the coil array 8, and at the moment, electromagnetic force is generated between the magnet array 9 and the coil array 8, so that the magnetic suspension turntable generates translational or rotational motion.
And step S5, the real-time controller is also communicated with the PC end through a USB or a serial port to realize a good human-computer interaction function. The attitude information of the magnetic suspension rotary table is displayed at the PC end in real time, and the target position and the motion track of the rotary table can be set and changed at the PC end.
Those skilled in the art should appreciate that the above-described embodiments are merely exemplary of the present invention, and any embodiment made in accordance with the technical spirit of the present invention falls within the scope of the present invention.
Claims (10)
1. A six-freedom magnetic suspension turntable is characterized in that: comprises a platform base (4) and a circular object stage (10) arranged on the platform base (4); the top of the round object stage (10) fixes an elliptical target object to be measured (11) through three threaded holes, so that the mass center of the elliptical target object (11) is positioned on the central shaft of the object stage (10), rectangular grooves which are circumferentially arranged around the central shaft are formed in the bottom of the round object stage (10), and a plurality of rectangular magnet arrays (9) are embedded in the rectangular grooves; a coil array (8) positioned below the magnet array (9) is fixed on the platform base (4) through an arched coil bracket (7); a plurality of upper end face sensor supports (5) and upper end face photoelectric sensors (6) fixed on the upper end face sensor supports (5) are arranged along the circumferential direction of the coil array (8), and the upper end face sensor supports (5) are fixed on the upper end face of the platform base (4); a lower end face sensor support (12) and a lower end face photoelectric sensor (13) fixed on the lower end face sensor support (12) are arranged below the coil array (8) and on the lower end face of the platform base (4); the square base (4) is fixed on the optical vibration isolation platform (1) through the vertical support frame (3) and the horizontal support frame (2).
2. The six-degree-of-freedom magnetic levitation turntable as claimed in claim 1, wherein: the arched coil support (7) is an arched part with a hollow middle, the arched part comprises a first rectangular part (7-3) and a second rectangular part (7-1), the periphery of the first rectangular part (7-3) is polished into a circular arc chamfer angle and used for winding a coil, the first rectangular part (7-3) and the second rectangular part (7-1) are fixedly connected at two ends of a connecting piece (7-2), and the second rectangular part (7-1) is fixed on a threaded hole of the platform base.
3. The six-degree-of-freedom magnetic levitation turntable as claimed in claim 1, wherein: the coil array (8) and the magnet array (9) are arranged in a circumferential structure, so that the large-angle rotation control of the rotary table around the vertical direction is realized; the external diameter of circumference type coil array (8) is greater than the external diameter of circumference type magnet array (9), when guaranteeing objective table translation or rotation, magnet array (9) homoenergetic is in the inside of coil array (8), and rectangle recess inner wall is equipped with the epoxy layer, and a plurality of rectangle magnet array (9) are fixed in the rectangle recess with epoxy layer interference fit.
4. The six-degree-of-freedom magnetic levitation turntable as claimed in claim 1, wherein: the number of coils and the number of magnets is 1: 3; the magnet array (9) is made of a strong magnetic material with the trademark of N48 sintered rubidium, iron and boron, and the magnet array (9) is arranged according to a circular Halbach structure; the coreless runway type coil (8) is formed by winding 210 turns of enameled copper wires with the diameter of 0.6 mm.
5. The six-degree-of-freedom magnetic levitation turntable as claimed in claim 1, wherein: because the magnet array (9) and the coil array (8) are arranged periodically, the coils in a similar magnetic field environment are in a serial connection mode.
6. The six-degree-of-freedom magnetic levitation turntable as claimed in claim 1, wherein: a large round hole is formed in the center of the square base (4), and laser emitted by the photoelectric sensor (13) on the lower end face can penetrate through the large round hole to measure the position of the magnetic suspension turntable; and a threaded hole for mounting the arch-shaped coil bracket (7) is formed around the central shaft of the base (4).
7. The six-degree-of-freedom magnetic levitation turntable as claimed in claim 1, wherein: the thickness of the square platform base (4) is not less than 15 mm; the sensor support (12) below the coil comprises a first rectangular module (12-1) and a second rectangular module (12-2) which are perpendicular to each other and fixed, the second rectangular module (12-2) is an aluminum baffle plate and used for fixing the photoelectric sensor, and the first rectangular module (12-1) is connected with the aluminum baffle plate and fixed on the optical vibration isolation platform.
8. The six-degree-of-freedom magnetic levitation turntable as claimed in claim 1, wherein: the photoelectric sensors (6) and (13) are diffusion reflection type laser sensors, and a laser triangulation algorithm is arranged in the photoelectric sensors, so that an additional laser reflector is not required to be installed on the magnetic suspension platform.
9. A control system for a six degree of freedom magnetic levitation turntable as recited in claim 1, wherein: the device comprises a PC (personal computer) end, a real-time controller (DSP or ARM), a digital-to-analog converter, a power amplifier, three upper end surface photoelectric sensors (6), three lower end surface sensors (13) and a data acquisition card, wherein the real-time controller adopts the DSP or ARM.
10. A control method of the control system as set forth in claim 9, characterized in that: the method comprises the following steps:
step S1, the position information of the magnetic suspension turntable is converted into corresponding voltage signals by the sensing system through the upper end surface and the lower end surface photoelectric sensors (6) and (13);
step S2, acquiring a voltage signal output by the sensing system by the data acquisition card, converting the voltage signal into a digital signal, and transmitting the digital signal to the real-time controller;
step S3, the real-time controller analyzes the signal transmitted by the data acquisition card to obtain the current position information of the turntable, compares the set target position with the current position information to obtain error information, further solves the magnetic force and magnetic moment required by the turntable to reach the target position by PID or other control methods, substitutes the magnetic force and magnetic moment into the current-power transmission matrix to obtain the required voltage regulation signal, and finally transmits the signal to the digital-to-analog converter; the whole control algorithm implementation process can be expressed as the following formula:
v is the voltage control signal calculated by the real-time controller, AsIs transconductance gain of the power amplifier, gamma is a current-power transfer matrix representing the conversion relationship between the driving current in each coil and the magnetic force and the magnetic moment borne by the magnetic suspension turntable, and gamma isT·(Γ·ΓT)-1Is the pseudo-inverse of Γ, wdesireThe magnetic suspension turntable is a one-dimensional array and comprises magnetic force and magnetic moment required by the magnetic suspension turntable to reach a target position, and mg is the weight of a rotor part under the condition of no load of the magnetic suspension turntable;
step S4, the voltage signal from the D/A converter passes through the power amplifying circuit to generate an adjustable constant current source to excite the coil array (8), and the electromagnetic force generated between the magnet array (9) and the coil array (8) causes the magnetic suspension turntable to generate translation or rotation motion;
step S5, the real-time controller communicates with the PC end through USB or serial port to realize good human-computer interaction function; the attitude information of the magnetic suspension rotary table is displayed at the PC end in real time, and the target position and the motion track of the rotary table can be set and changed at the PC end.
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| CN111551883B (en) * | 2020-04-29 | 2022-05-20 | 中国科学院苏州生物医学工程技术研究所 | Magnetic field compensation method and equipment based on array coil |
| CN113340439A (en) * | 2021-02-08 | 2021-09-03 | 北国之光(深圳)科技有限公司 | Automatic measuring equipment and automatic measuring method for illuminating lamp |
| CN113721482A (en) * | 2021-08-27 | 2021-11-30 | 武汉大学 | Magnetic suspension motion real-time simulation system and method based on analytic model |
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