CN115900557A - Generation device of approximate diffraction-free white light line light source - Google Patents
Generation device of approximate diffraction-free white light line light source Download PDFInfo
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- CN115900557A CN115900557A CN202211300193.3A CN202211300193A CN115900557A CN 115900557 A CN115900557 A CN 115900557A CN 202211300193 A CN202211300193 A CN 202211300193A CN 115900557 A CN115900557 A CN 115900557A
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Abstract
The invention discloses a generating device of an approximate non-diffraction white light ray source, which comprises a light source, a first lens, a fluorescent sheet, a second lens, a third lens and a slit which are sequentially arranged along the light transmission direction, wherein the light source is used for generating exciting light with preset energy; the first lens is used for focusing the exciting light; the fluorescent sheet is used for generating white light according to incident exciting light; the second lens is used for collimating the white light; the third lens is used for generating approximately diffraction-free white light for the collimated white light; the slit is used for filtering out secondary fringes which approximate diffraction-free white light so as to generate linear white light with the central fringes as the main part. The embodiment of the invention can give consideration to high light intensity utilization rate and good uniformity, and can be widely applied to the technical field of optical devices.
Description
Technical Field
The invention relates to the technical field of optical devices, in particular to a generating device of an approximate non-diffraction white light line light source.
Background
In the field of precise dimension measurement, line scanning measurement is a measurement mode which gives consideration to both precision and efficiency, white light confocal line scanning measurement can reach submicron-level measurement precision and is widely applied to the field of semiconductor and chip sealing measurement, and in addition, the white light confocal principle loses most of optical energy due to ultrahigh signal-to-noise ratio, so that the improvement of the energy utilization rate of an emission line light source in a line spectrum confocal displacement sensor has important significance.
The emission slit of the on-line spectrum confocal displacement sensor is only 5-50 um, so that the light intensity energy of the emission line light source needs to be concentrated in the width range, and the light intensity passing through the slit is basically consistent in the line length range in order to ensure the accuracy and stability in the measurement line length range. Based on the above requirements, the current generation of white line light source has the following disadvantages: 1. the light intensity utilization rate of the whole white linear light source generating device is less than 50 percent, and the uniformity of light rays is poor.
Disclosure of Invention
In view of the above, an object of the embodiments of the present invention is to provide a device for generating an approximate non-diffractive white light source, which has a high light utilization rate and good uniformity.
In a first aspect, an embodiment of the present invention provides a device for generating an approximate non-diffractive white light source, which includes, in order along a light transmission direction, a light source, a first lens, a fluorescent sheet, a second lens, a third lens, and a slit, wherein,
the light source is used for generating exciting light with preset energy;
the first lens is used for focusing the exciting light;
the fluorescent sheet is used for generating white light according to incident exciting light;
the second lens is used for collimating the white light;
the third lens is used for generating approximately diffraction-free white light for the collimated white light;
the slit is used for filtering secondary fringes which approximate diffraction-free white light to generate linear white light with the central fringes as the main part.
Optionally, the light source comprises a laser light source comprising a blue laser light source or a white LED light source.
Optionally, the first lens comprises a plano-convex lens or a biconvex lens.
Optionally, the focal length and the diameter of the first lens satisfy the following relation:
f1＜10mm，d1＜10mm
where f1 denotes a focal length of the first lens, and d1 denotes a diameter of the first lens.
Optionally, a distance between the light source and the first lens satisfies the following relation:
L1≥f1
wherein L1 denotes a distance between the light source and the first lens.
Optionally, the second lens comprises a convex flat lens or a biconvex lens.
Optionally, the focal length and the diameter of the second lens satisfy the following relation:
f2＜30mm，d2＞h
where f2 denotes a focal length of the second lens, d2 denotes a diameter of the second lens, and h denotes a length of the generated linear white light. Optionally, a distance between the fluorescent sheet and the second lens satisfies the following relation:
L2≈f2
wherein L2 represents a distance between the fluorescent sheet and the second lens.
Optionally, the third lens comprises an isosceles triangular prism or a light guide pillar.
Optionally, the fluorescent sheet includes a transparent substrate and a fluorescent powder covered on the surface of the transparent substrate, and the material of the fluorescent powder includes yttrium aluminum garnet crystals.
The implementation of the embodiment of the invention has the following beneficial effects: in the embodiment, after being focused by the first lens, excitation light emitted by the light source is incident to the fluorescent sheet to excite the fluorescent sheet to generate white light, the white light is collimated by the second lens to generate parallel white light, the parallel white light generates approximate diffraction-free white light by the third lens, and the approximate diffraction-free white light filters secondary stripes of the approximate diffraction-free white light through the slit to generate linear white light with the central stripe as the main; the utilization ratio of exciting light can be improved through focusing, white light generated by exciting the fluorescent sheet has good directivity and high energy density, collimated parallel white light generates approximate diffraction-free white light with concentrated energy through the third lens, linear white light with central stripes as main is generated through slit filtering, light intensity is uniform, line width is narrow, energy is concentrated, and the energy utilization ratio of light intensity is improved.
Drawings
FIG. 1 is a block diagram of a device for generating a near-diffraction-free white light source according to an embodiment of the present invention;
fig. 2 is an optical path diagram and a light intensity distribution diagram of a third lens according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and the specific embodiments. The step numbers in the following embodiments are provided only for convenience of illustration, the order between the steps is not limited at all, and the execution order of each step in the embodiments can be adapted according to the understanding of those skilled in the art.
As shown in fig. 1, an embodiment of the present invention provides a device for generating an approximate non-diffractive white light source, which sequentially includes, along a light transmission direction, a light source 1-1, a first lens 1-2, a fluorescent sheet 1-3, a second lens 1-4, a third lens 1-5, and a slit 1-6, wherein,
the light source 1-1 is used for generating exciting light with preset energy;
the first lens 1-2 is used for focusing the exciting light;
the fluorescent sheet 1-3 is used for generating white light according to incident exciting light;
the second lens 1-4 is used for collimating the white light;
the third lens 1-5 is used for generating approximately diffraction-free white light for the collimated white light;
the slits 1-6 are used for filtering secondary fringes of approximate diffraction-free white light to generate linear white light with the central fringes as the main.
The non-diffracted light refers to a characteristic that a field distribution has a form of a zeroth order bessel function of the first kind and does not diverge when propagating, which has a small central spot. The approximately non-diffraction light means that the light field structure and the light intensity distribution of the light has the characteristic of non-diffraction within a certain range and do not change along with the change of the transmission distance.
The light source 1-1 emits exciting light with a value larger than a preset capacity value, the exciting light is focused through the first lens 1-2, the focused exciting light excites the fluorescent sheet 1-3 to generate white light, the white light is collimated through the second lens 1-4 at a certain divergence angle to obtain parallel white light, the parallel white light generates approximate diffraction-free white light in a certain range through the third lens 1-5, the approximate diffraction-free white light filters secondary stripes of the approximate diffraction-free white light through the slit 1-6, and the central stripes are reserved to generate linear white light.
It should be noted that, the parameter design of the first lens, the second lens, the third lens, and the like in the generating device of the approximate non-diffractive white light source is determined according to the practical application, and the distance between the components in the generating device of the approximate non-diffractive white light source is determined according to the practical application, which is not limited in this embodiment.
Optionally, the light source comprises a laser light source comprising a blue laser light source or a white LED light source.
It should be noted that the energy of the light source can generate the required light by the laser fluorescent sheet, the type of the light source is determined according to the practical application, and the embodiment is not limited specifically. The light source includes, but is not limited to, a laser light source including, but not limited to, a blue laser light source, or a white LED light source. When the light source adopts blue laser as an excitation light source, the energy density is high, the blue laser is excited into white light through the fluorescent sheet, and the white light has weaker coherence, but most of the characteristics of the laser are kept, such as good directivity, high energy density and the like; when the light source adopts a single high-power white light LED as a light-emitting element, the subsequent optical collimation is convenient.
Optionally, the first lens comprises a plano-convex lens or a biconvex lens.
The first lens includes, but is not limited to, a plano-convex lens or a biconvex lens, when the first lens is a plano-convex lens, a planar side of the plano-convex lens is adjacent to the light source, and a convex side of the plano-convex lens is adjacent to the fluorescent sheet. The design parameters of the plano-convex lens or the biconvex lens are determined according to practical applications, and the embodiment is not particularly limited.
Optionally, the focal length and the diameter of the first lens satisfy the following relation:
f1＜10mm，d1＜10mm
where f1 denotes a focal length of the first lens, and d1 denotes a diameter of the first lens.
The focal length of the first lens is determined according to the light source, and the blue laser light source is used according to the relation that the focal length and the diameter of the first lens meet.
Optionally, a distance between the light source and the first lens satisfies the following relation:
L1≥f1
wherein L1 denotes a distance between the light source and the first lens.
The distance between the light source and the first lens is larger than or equal to the focal length of the first lens, so that the excitation light beam is focused after passing through the first lens as much as possible, and the utilization rate of the excitation light is improved as much as possible, for example, the distance between the light source and the first lens is 10mm.
It should be noted that the distance between the first lens and the fluorescent sheet is preferably smaller while ensuring mechanical installation.
Optionally, the second lens comprises a convex flat lens or a biconvex lens.
When the second lens is a convex flat lens, the convex side of the convex flat lens is close to the fluorescent sheet.
Optionally, the focal length and the diameter of the second lens satisfy the following relation:
f2＜30mm，d2＞h
where f2 denotes a focal length of the second lens, d2 denotes a diameter of the second lens, and h denotes a length of the generated linear white light.
The diameter of the second lens needs to be larger than the length of the generated linear light, and if the linear white light needs to be generated to be 16mmX25um, the diameter of the second lens needs to be larger than 16mm.
Optionally, a distance between the fluorescent sheet and the second lens satisfies the following relation:
L2≈f2
wherein L2 represents a distance between the fluorescent sheet and the second lens.
The distance between the fluorescent sheet and the second lens is approximately equal to the focal length f2 of the second lens, so that the fluorescent sheet is positioned on the focal point of the second lens, and the white light generated by exciting the fluorescent sheet emits parallel light after passing through the second lens.
Optionally, the third lens comprises an isosceles triangular prism or a light guide pillar.
The third lens includes, but is not limited to, an isosceles triangular prism or a light guide pillar, which is determined according to practical applications, and the embodiment is not particularly limited.
The distance between the second lens and the third lens is smaller as better as possible on the premise of ensuring mechanical installation, and the minimum volume of the whole system can be ensured at the moment.
Optionally, the phosphor plate includes a transparent substrate and a phosphor powder covered on the surface of the transparent substrate, and the material of the phosphor powder includes yttrium aluminum garnet crystals.
The transparent substrate includes, but is not limited to, a glass sheet or a plastic sheet, the phosphor is determined according to the light emitting requirement, the material of the phosphor includes, but is not limited to, yttrium aluminum garnet crystal, which is determined according to the practical application, and the embodiment is not particularly limited. For example, the fluorescent sheet is formed by covering a layer of fluorescent powder on a glass carrier, and the fluorescent powder can be YAG (Yttrium Aluminum Garnet) fluorescent powder, which has stable chemical properties, high brightness when being lighted, and wide emission peak when being excited; the color white light with the color temperature of 3500-10000k can be obtained by changing the chemical composition of the YAG fluorescent powder and adjusting the thickness of the fluorescent powder layer. The main raw materials of the YAG phosphor powder are alumina, yttrium oxide and a small amount of cerium oxide, and a small amount of gadolinium, potassium or the like can be added according to the requirement.
In a specific embodiment, the third lens adopts an isosceles triangular prism, white light enters the isosceles triangular prism after being collimated by the lens to be interfered and diffracted, and approximately non-diffraction white light is generated, and because the approximately non-diffraction white light is synthesized by multiple bands, secondary bright lines are reduced in interference fringes. Referring to fig. 2, fig. 2 (a) shows an optical path diagram of collimated white light passing through an isosceles triangular prism, and fig. 2 (b) shows a light intensity distribution diagram of approximately diffraction-free white light, as can be seen from fig. 2, approximately diffraction-free light generates micron-level main bright lines and multi-level bright lines, wherein most of the energy is concentrated on the main bright lines, the width of the main bright lines is only dozens of microns, which accounts for more than 80% of the total energy, when a slit is placed in the Zmax range, the multi-level bright lines can be filtered, and only the main bright lines can form uniform narrow thin lines through the slit, thereby achieving improvement of the light intensity energy utilization ratio. In addition, according to the actual detection result, the number of the secondary bright lines gradually decreases as the wavelength width increases, and the intensity and the width of the main bright line are basically kept unchanged.
Specifically, referring to fig. 2 (a), when the third lens adopts an isosceles triangular prism having a width D0 and a base angle θ, zmax satisfies the following relation when θ is sufficiently small:
Zmax＝D0/θ(n-1)
where n represents the refractive index of the isosceles triangular prism.
The implementation of the embodiment of the invention has the following beneficial effects: in the embodiment, after being focused by the first lens, excitation light emitted by the light source is incident to the fluorescent sheet to excite the fluorescent sheet to generate white light, the white light is collimated by the second lens to generate parallel white light, the parallel white light generates approximate diffraction-free white light by the third lens, and the approximate diffraction-free white light filters secondary stripes of the approximate diffraction-free white light through the slit to generate linear white light with the central stripe as the main; the utilization ratio of exciting light can be improved through focusing, white light generated by exciting the fluorescent sheet has good directivity and high energy density, collimated parallel white light generates approximate diffraction-free white light with concentrated energy through the third lens, linear white light with central stripes as main is generated through slit filtering, light intensity is uniform, line width is narrow, energy is concentrated, and the energy utilization ratio of light intensity is improved.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The generation device of the approximate diffraction-free white light source is characterized by sequentially comprising a light source, a first lens, a fluorescent sheet, a second lens, a third lens and a slit along the light transmission direction, wherein,
the light source is used for generating exciting light with preset energy;
the first lens is used for focusing the exciting light;
the fluorescent sheet is used for generating white light according to incident exciting light;
the second lens is used for collimating the white light;
the third lens is used for generating approximately diffraction-free white light for the collimated white light;
the slit is used for filtering secondary fringes which approximate diffraction-free white light to generate linear white light with the central fringes as the main part.
2. The generation apparatus according to claim 1, wherein the light source comprises a laser light source or a white light LED light source, the laser light source comprising a blue laser light source.
3. The generating device of claim 1, wherein the first lens comprises a plano-convex lens or a biconvex lens.
4. The generating device of claim 3, wherein the focal length and diameter of the first lens satisfy the following relationship:
f1＜10mm，d1＜10mm
where f1 denotes a focal length of the first lens, and d1 denotes a diameter of the first lens.
5. The generation apparatus according to claim 4, wherein a distance between the light source and the first lens satisfies the following relation:
L1≥f1
wherein L1 denotes a distance between the light source and the first lens.
6. The generating device of claim 1, wherein the second lens comprises a convex flat lens or a double convex lens.
7. The generating device of claim 6, wherein the focal length and diameter of the second lens satisfy the following relationship:
f2＜30mm，d2＞h
where f2 denotes a focal length of the second lens, d2 denotes a diameter of the second lens, and h denotes a length of the generated linear white light.
8. The generating device of claim 7, wherein the distance between the phosphor patch and the second lens satisfies the following relationship:
L2≈f2
wherein L2 represents a distance between the fluorescent sheet and the second lens.
9. The generating device of claim 1, wherein the third lens comprises an isosceles triangular prism or a light guide.
10. The generation apparatus of claim 1, wherein the phosphor plate comprises a transparent substrate and a phosphor powder covered on the surface of the transparent substrate, and the material of the phosphor powder comprises yttrium aluminum garnet crystals.
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| CN202211300193.3A CN115900557A (en) | 2022-10-24 | 2022-10-24 | Generation device of approximate diffraction-free white light line light source |
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