CN115855347A - Flexible sensor capable of measuring stretching and torsion - Google Patents
Flexible sensor capable of measuring stretching and torsion Download PDFInfo
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- CN115855347A CN115855347A CN202211486564.1A CN202211486564A CN115855347A CN 115855347 A CN115855347 A CN 115855347A CN 202211486564 A CN202211486564 A CN 202211486564A CN 115855347 A CN115855347 A CN 115855347A
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Abstract
The application relates to the technical field of flexible strain sensor design, in particular to a flexible sensor capable of measuring stretching and torsion, which comprises a substrate and a sensing unit, wherein the sensing unit is arranged on the surface of the substrate; the sensing unit comprises a first sub-sensing unit and a second sub-sensing unit, the first sub-sensing unit and the second sub-sensing unit are symmetrically arranged along the central axis of the substrate, and the first sub-sensing unit and the second sub-sensing unit are arranged along the included angle of the central axis of the substrate at a preset angle. When torsional force is applied to the sensor, two measurement signals are generated by measuring the detection quantity of the sensing unit, and the two measurement signals are processed, so that the magnitude and the direction of the two forces at the current moment can be realized, and the method has the advantages of simultaneously measuring multi-dimensional strain, improving the measurement precision and reducing the interference. The sensor is environment-friendly in material, simple in manufacturing process and high in sensitivity, quick in response, ultra-wide in sensing range and excellent in stability and durability.
Description
Technical Field
The application relates to the technical field of flexible strain sensor design, in particular to a flexible sensor capable of measuring stretching and torsion.
Background
With the development of wearable electronic devices and soft body robotics, high-performance flexible strain sensors have been widely studied. In order to study various multidimensional movements of the soft robot, such as stretching, twisting, and twisting, a sensor capable of recognizing a change in multidimensional strain is required. However, the conventional sensor has only the capability of single-direction strain detection, and lacks the capability of complex multi-dimensional strain detection, especially the detection of stretching and twisting directions, which severely limits the wide application of the sensor.
Multi-modal sensing is crucial for environmental interaction and closed-loop control of soft robots. The phenomenon of signal coupling is not uncommon in soft robotic sensing, where proprioception and haptic perception through internal and external perception are sometimes interwoven. Sensing mechanical and thermal stimuli by differentiation is also a challenging problem, with various mechanical deformations being difficult to distinguish and the sensing signals for different types of mechanical deformations being often difficult to distinguish, such as tensile, torsional and bending, etc
The measurement of the human motion posture has important application in the fields of medical treatment, military, security protection, film production and the like, and the use of a measurement system for accurately and conveniently acquiring motion parameters in the human motion process is a hot point of research in recent years. The current measurement methods for measuring the motion posture of the human body can be divided into visual sensing measurement and non-visual sensing measurement. The visual sensing measurement method is characterized in that reflective mark points are attached to human joints, and the positions of the mark points are recorded by a camera to obtain the motion information of a testee, but the visual sensing measurement can only be carried out in a certain specific test area, so that the motion space and the motion mode are greatly limited. Non-visual sensory measurement non-visual sensors are placed on the body of the measurer to eliminate the limitations of the test area and test mode. Currently, non-visual sensors such as an electrical angle measuring instrument, a gyroscope, an optical fiber sensor and the like are adopted, but the sensors are all made of rigid materials, so that the adaptability to a human body is poor, the contact problem exists, and a large measurement error can be caused.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, it is an object of the present invention to provide a measurable stretch and torsional flexibility sensor that enables measurement of the torsional angle and the multi-dimensional strain of the stretch.
To achieve the above and other related objects, the present application provides a flexible sensor for measuring tension and torsion, comprising:
the substrate is made of a flexible insulating material;
the sensing unit is arranged on the surface of the substrate;
the sensing unit comprises a first sub-sensing unit and a second sub-sensing unit, the first sub-sensing unit and the second sub-sensing unit are symmetrically arranged along the central axis of the substrate, and the included angle of the first sub-sensing unit and the included angle of the second sub-sensing unit along the central axis of the substrate are arranged at a preset angle.
In an embodiment of the present application, the elastic modulus of the flexible insulating material is less than or equal to 10 9 Pa。
In an embodiment of the present application, said predetermined angle is comprised between 15 ° and 75 °.
In an embodiment of the present application, the first sub-sensing units and the second sub-sensing units are symmetrically arranged along two sides of the central axis of the substrate and symmetrically arranged along the central axis of the substrate in a cross-overlapping manner.
In an embodiment of the present application, the first sub sensing unit and the second sub sensing unit respectively include two electrodes and a strain unit, and two ends of each strain unit are respectively provided with one of the electrodes.
In an embodiment of the present application, the strain unit includes a resistive sensing unit and/or a capacitive sensing unit, and the strain unit is made of a flexible material.
In an embodiment of the present application, each of the strain units includes a plurality of sub-strain units arranged in parallel, and the sub-strain units are connected to each other by a connection section.
In an embodiment of the present application, the connection segments may be arranged in a horizontal direction or a vertical direction.
In an embodiment of the present application, a plurality of the sub strain resistor units may be connected in series or connected through the connection segment.
In an embodiment of the present application, a resistance value of the connection segment is less than or equal to one thousandth of a resistance value of the sub-strain unit.
In an embodiment of the application, the sensing unit includes two strain units, a tensile strain unit and four electrodes, the tensile strain unit is located first sub-sensing unit reaches between the second sub-sensing unit and follow the substrate axis direction is arranged, one has respectively been arranged at tensile strain unit both ends the electrode, tensile strain unit one end with first sub-sensing unit reaches the second sub-sensing unit links to each other, first sub-sensing unit reaches the second sub-sensing unit is not connected with one respectively the electrode with the one end that tensile strain unit is connected.
The technical effects of this application lie in:
compare with traditional strain sensor, the flexible sensor of this application both can follow the plane arrangement in symmetry axis both sides, also can follow the crossing overlapping arrangement of symmetry axis, and the array of being convenient for arranges, has improved measurement of efficiency greatly. When acting force is applied to the sensor, two measurement signals are generated by measuring the detection quantity of the two strain units (when the strain units are resistance strain units, the detection quantity is resistance, and when the strain units are capacitance strain units, the detection quantity is capacitance), and the two measurement signals are processed, so that the magnitude and the direction of two forces can be measured at the current moment, and the sensor has the advantages of being capable of simultaneously measuring multi-dimensional strain, improving measurement precision and reducing interference.
Compared with the traditional strain sensor, the sensing unit of the application is composed of at least two sub-sensing units, the sub-sensing units are connected in various forms, the sub-sensing units can be connected in series or in parallel, and the measuring error can be reduced according to the requirement of a better measuring environment.
Compared with the traditional strain sensor, the flexible sensor can measure the tension, the pressure and the torsion moment at the same position, can also measure the whole part, and can reflect the local measurement result by using the whole measurement result, so that the measurement precision is improved, the measurement error is reduced, and the problem that the local measurement result is not ideal is solved.
Compare with traditional strain sensor, the flexible sensor of this application has good adaptability to measurand when measuring flexible object, has reduced the influence to measurand motion greatly.
Compare with traditional strain sensor, the flexible sensor of this application preparation is convenient, and manufacturing process is comparatively simple, can realize large-scale production, and when carrying out array arrangement production, required manufacturing cost is lower.
Drawings
Fig. 1 is a schematic diagram of a structure in which first sub-sensing units and second sub-sensing units of a sensor are symmetrically arranged along two sides of a central axis of a substrate.
Fig. 2 is a schematic diagram of a structure in which a first sub-sensing unit and a second sub-sensing unit of the sensor are arranged in a crossed and overlapped manner along a central axis of a substrate.
Fig. 3 is a schematic diagram of a coupling structure of a first sub-sensing unit and a second sub-sensing unit of the sensor.
Fig. 4 is a schematic diagram of a linear arrangement structure of sensing units of the sensor.
Fig. 5 is a schematic diagram of the arrangement direction of the sensor unit similar to a cylinder.
Fig. 6a is a schematic diagram of a sensor for global measurement of the degree of bending of an actuator.
Fig. 6b is a schematic view of a sensor for local measurement of the degree of bending of an actuator.
FIG. 7 is a schematic diagram of the strain units of the sub-sensor units connected in parallel through connecting segments.
Detailed Description
The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application.
It should be noted that the flexible sensor refers to a sensor made of a flexible material, and has good flexibility, ductility, bendability, and the like. In the specific implementation, a resistance layer, a short-circuit layer, a flexible contact and an electrode capable of collecting sensing information are generally placed on a substrate of the flexible resistive sensor, for example, the flexible resistive pressure sensor generally overlaps the short-circuit layer and the resistance layer under the action of pressure, so that the resistance value of a system circuit is changed, and then a pressure value is obtained.
The flexible resistance sensor has the advantages of high sensitivity, simple structure and wearable function. Different from a flexible resistance-type sensor which obtains measurement data by changing the resistance value through the size of a contact surface, a flexible capacitance-type sensor generally adopts a device based on the parallel plate capacitance principle, and the capacitance of the sensor is changed by changing the distance between plate capacitors. Still take pressure sensor as an example, exert pressure through the external world, the distance between the plate capacitor diminishes, and then reachs measured data. The flexible capacitive sensor has the advantages of high sensitivity, quick response, wide dynamic range and the like. Although "flexible" is added, the nature of the flexible sensor is still the sensor, and what makes it unusual is the choice of materials. Firstly, the substrate is adopted, the flexible sensor adopts the flexible substrate, the materials are generally required to have the characteristics of lightness, thinness, transparency, stretchability, flexibility, corrosion resistance and the like, and Polydimethylsiloxane (PDMS) is a common flexible substrate material, has the characteristics, is easy to obtain and has stable chemical properties. Then, the conductive material, that is, the metal material, is mainly used for manufacturing the electrode and the lead, generally, the flexible sensor does not use common metal, but uses metal nano particles or nano wires, and the material has better conductivity and is easy to be realized into a thin film. Flexible sensors also use carbon materials, most of which are graphene and carbon nanotubes. The flexible sensor is one of important applications of falling to the ground of graphite alkene material, and graphite alkene is frivolous transparent and electrically conductive good, and can perfect cooperation with the flexible sensor. In addition, there are inorganic semiconductor materials and organic materials, which are mainly used to realize the characteristic functions of the sensor, and in this respect, the piezoelectric properties of the materials are an important index.
Please refer to fig. 1-6. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present application, and the drawings only show the components related to the present application rather than the number, shape and size of the components in actual implementation, and the type, quantity and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.
The embodiment provides a flexible sensor capable of measuring stretching and torsion, which is a flexible sensor capable of realizing multi-dimensional strain measurement of a torsion angle and stretching and has the characteristics of high availability, high precision, easiness in operation and the like. The flexible sensor capable of measuring tension and torsion comprises a substrate 101 and a sensing unit.
Referring to fig. 1 to 7, in the present embodiment, the substrate 101 serves as a base for carrying the sensing unit, and the substrate 101 may be, for example, a flexible insulating material. When the material of the object under test satisfies the requirements of the substrate 101, the object under test itself may serve as the substrate 101 (see fig. 6a, 6 b). By way of example, the flexible insulating material may be, for example, polyvinyl alcohol (PVA), polyester (PET), polyimide (PI), polyethylene naphthalate (PEN), paper sheets, textile fabricsMaterials, etc., the elastic modulus of the flexible insulating material is 10 or less 9 Pa。
Referring to fig. 1 to 7, in the present embodiment, the sensing unit at least includes a first sub-sensing unit and a second sub-sensing unit, the first sub-sensing unit and the second sub-sensing unit are symmetrically arranged along a central axis of the substrate 101, and an included angle between the first sub-sensing unit and the second sub-sensing unit along the central axis of the substrate 101 forms a predetermined angle. By way of example, the predetermined angle is 15 ° to 75 °, such as 15 °, 30 °, 45 °, 60 ° and 75 °. It will be appreciated that the sensing unit may also comprise, for example, 4 or more even sub-sensing units.
The first sub-sensing unit and the second sub-sensing unit respectively include two electrodes 104 and a strain unit, and two ends of each strain unit are respectively provided with one electrode 104. The strain cell comprises a resistive sensing cell and/or a capacitive sensing cell, which may be a flexible material. As an example, the flexible material may be, for example, a metal material, an inorganic semiconductor material, a carbon material, or the like.
Each strain unit comprises a plurality of sub-strain units 102 arranged in parallel, the sub-strain units 102 are uniformly arranged at intervals along a direction parallel to the central axis of the substrate 101, and the sub-strain units 102 are connected through a connecting section 103. In a specific embodiment, each strain cell may also include only one sub-strain cell 102.
The connecting section 103 can be arranged in a horizontal direction or a vertical direction, and a plurality of sub-strain units can be connected in series (fig. 1-6) or in parallel (see fig. 7) through the connecting section 103, so that the measurement error can be reduced by better adapting to the requirement of the measurement environment. The resistance value of the connection segment 103 is equal to or less than one thousandth of the resistance value of the sub strain element 102.
As shown in fig. 1, in a specific embodiment, the first sub sensing unit and the second sub sensing unit are symmetrically arranged along two sides of a central axis of the substrate 101, the first sub sensing unit and the second sub sensing unit respectively include two electrodes 104 and a strain unit, two ends of each strain unit are respectively provided with one electrode 104, each strain unit includes a plurality of sub strain units 102 arranged in parallel, the plurality of sub strain units 102 are evenly spaced along a direction parallel to the central axis of the substrate 101, and the plurality of sub strain units 102 are connected in series through a connection segment 103, or, as shown in fig. 7, connected in parallel. The whole sensing unit is in a sheet shape and has high stability.
As shown in fig. 2, in an embodiment, the first sub-sensing units and the second sub-sensing units are symmetrically arranged along the central axis of the substrate 101 in a crossed and overlapped manner, so that an upper limit of a torsional force of the sensor is increased, the torsional force that the sensor can bear is increased, and an influence caused by torsional rigidity is effectively reduced. Referring to fig. 1 and fig. 2, the first sub-sensing units and the second sub-sensing units may be symmetrically arranged along both sides of the central axis of the substrate 101, or symmetrically arranged along the central axis of the substrate 101 in a crossed, overlapped and symmetrical manner.
As shown in fig. 3, in an embodiment, the sensing unit includes two strain units, a tensile strain unit 305 and four electrodes 104, the tensile strain unit 305 is located between the first sub sensing unit and the second sub sensing unit and is arranged along the central axis direction of the substrate 101, two ends of the tensile strain unit 305 are respectively arranged with one of the electrodes 104, one end of the tensile strain unit 305 is connected to the first sub sensing unit and the second sub sensing unit, and one end of the first sub sensing unit and one end of the second sub sensing unit, which are not connected to the tensile strain unit 305, are respectively connected to one of the electrodes 104.
The sensor is configured by coupling the first sub-sensing unit and the second sub-sensing unit such that the electrode 104 is disposed between the first sub-sensing unit and the second sub-sensing unit. Because the measurement of the torsion also generates the stretching, the stretching amount B signal can be obtained by measuring the first electrode 301 and the third electrode 303 in the graph, the composite signal of the tangential force A1 and the normal force B1 can be measured by measuring the first electrode 301 and the second electrode 302, and the composite signal of the tangential force A2 and the normal force B2 can be measured by measuring the first electrode 301 and the fourth electrode 304. The first sub-sensing unit and the second sub-sensing unit are coupled to quickly measure the tensile force and the composite signal of each sensing sub-unit, so that the measuring process is more convenient and quicker.
As shown in fig. 4 and 5, in a specific embodiment, the sensor includes a substrate 101 and a sensing unit, the sensing unit includes a first sub sensing unit and a second sub sensing unit, the first sub sensing unit and the second sub sensing unit are symmetrically arranged along two sides of a central axis of the substrate 101, the first sub sensing unit and the second sub sensing unit respectively include two electrodes 104 and a strain unit, two ends of each strain unit are respectively provided with one electrode 104, each strain unit includes a plurality of sub strain units 102 arranged in parallel, the plurality of sub strain units 102 are arranged at equal intervals along two parallel lines, the plurality of sub strain units 102 are connected by a connecting section 103, wherein an arrangement direction of the sub strain units 102 is consistent with a direction of the two parallel lines, so that the sensing unit presents a linear structure, and can measure a cylinder-like structure as shown in fig. 5, and the sensing unit is arranged along a surface of a measured object in a spiral line, so that a measurement result is more accurate.
As shown in fig. 6a and 6b, in a specific embodiment, the sensors are disposed on the surface of the actuator 601 for measuring the bending degree (tension, compression) of the actuator 601, and either the sensors are distributed on the surface of the actuator 601 to obtain a global sensor 602 for overall measurement or the sensors are disposed on a part of the surface of the actuator 601 to obtain a local sensor 603 for local measurement.
Taking a strain unit of the flexible sensor capable of measuring tension and torsion as an example of a resistance type sensing unit, when the flexible sensor is used, the flexible sensor capable of measuring tension and torsion is arranged on the surface of the actuator 601, flexible electrodes of the first sub-sensing unit and the second sub-sensing unit are respectively connected to an electric bridge measuring circuit through conducting wires and measure the initial resistance of the sensor, when the sensor is acted by force, the resistance of the first sub-sensing unit and the resistance of the second sub-sensing unit can be changed, the variation of the electric bridge is measured, the variation of the resistance is calculated through the variation of the electric bridge, and the relationship between the applied force and the variation of the resistance is measured. When the sensor is under the action of the torsional moment, the effect of the force applied to the first sub-sensing unit and the second sub-sensing unit can be regarded as the superposition of the effect of the tangential force and the normal force on the force of the first sub-sensing unit and the second sub-sensing unit; when the sensing unit is acted by the torsional moment, the first sub sensing unit and the second sub sensing unit generate tangential strain and normal strain, and the direction, the size, the distribution and the self bending deformation of the torsional moment received by the sensor are obtained according to the resistance value change of the first sub sensing unit and the second sub sensing unit; when the sensor is under the action of tensile force, the structure of the sensing unit deforms, and the direction, the size, the distribution and the self bending deformation of the tensile force applied to the sensor are obtained according to the resistance value changes of the first sub-sensing unit and the second sub-sensing unit.
In summary, the flexible sensor capable of measuring tension and torsion of the present application is composed of a substrate and a sensing unit, wherein the sensing unit includes a first sub-sensing unit and a second sub-sensing unit which are symmetrically arranged. The sub-sensing units are arranged according to the set array, so that the prepared sensor has good capacity of instantaneous detection and accurate identification of multi-dimensional strain. Compare with traditional strain sensor, the flexible sensor of this application both can follow the plane arrangement in symmetry axis both sides, also can follow the crossing overlapping arrangement of symmetry axis, and the array of being convenient for is arranged, has improved measurement of efficiency greatly. When acting force is applied to the sensor, two measurement signals are generated by measuring the detection quantity of the two strain units (when the strain units are resistance strain units, the detection quantity is resistance, and when the strain units are capacitance strain units, the detection quantity is capacitance), and the two measurement signals are processed, so that the magnitude and the direction of two forces can be measured at the current moment, and the sensor has the advantages of being capable of simultaneously measuring multi-dimensional strain, improving measurement precision and reducing interference. Compared with the traditional strain sensor, the sensing unit of the application is composed of at least two sub-sensing units, the sub-sensing units are connected in various forms, the sub-sensing units can be connected in series or in parallel, and the measuring error can be reduced according to the requirement of a better measuring environment. Compared with the traditional strain sensor, the flexible sensor can measure the tension, the pressure and the torsion moment at the same position, can also measure the whole part, and can reflect the local measurement result by using the whole measurement result, so that the measurement precision is improved, the measurement error is reduced, and the problem that the local measurement result is not ideal is solved. Compare with traditional strain sensor, the flexible sensor of this application has good adaptability to measurand when measuring flexible object, has reduced the influence to measurand motion greatly. Compare with traditional strain sensor, the flexible sensor preparation of this application is convenient, and manufacturing process is comparatively simple, can realize large-scale production, and when carrying out array arrangement production, required manufacturing cost is lower.
The array can be arranged along planes on two sides of the symmetry axis, and can also be arranged along the symmetry axis in a crossed and overlapped mode, and therefore the influence caused by torsional rigidity is greatly reduced. When torsional force is applied to the sensor, two measurement signals are generated by measuring the change of the detection quantity of the two strain units (when the strain units are resistance strain units, the detection quantity is resistance, and when the strain units are capacitance strain units, the detection quantity is capacitance), and the two measurement signals are processed, so that the magnitude and the direction of the two forces at the current moment can be obtained, and the sensor has the advantages of being capable of simultaneously measuring multi-dimensional strain, improving the measurement precision and reducing interference. The sensor is environment-friendly in material, simple in manufacturing process, high in sensitivity, quick in response, ultra-wide in sensing range, and excellent in stability and durability
In the description herein, numerous specific details are provided, such as examples of components and/or methods, to provide a thorough understanding of embodiments of the application. One skilled in the relevant art will recognize, however, that an embodiment of the application can be practiced without one or more of the specific details, or with other apparatus, systems, assemblies, methods, components, materials, parts, and/or the like. In other instances, well-known structures, materials, or operations are not specifically shown or described in detail to avoid obscuring aspects of embodiments of the application.
It will also be appreciated that one or more of the elements shown in the figures can also be implemented in a more separated or integrated manner, or even removed for inoperability in some circumstances or provided for usefulness in accordance with a particular application.
Additionally, any reference arrows in the drawings/figures should be considered only as exemplary, and not limiting, unless otherwise expressly specified. Further, as used herein, the term "or" is generally intended to mean "and/or" unless otherwise indicated. Combinations of components or steps will also be considered as being noted where terminology is foreseen as rendering the ability to separate or combine is unclear.
The above description of illustrated embodiments of the present application, including what is described in the abstract of the specification, is not intended to be exhaustive or to limit the application to the precise forms disclosed herein. While specific embodiments of, and examples for, the application are described herein for illustrative purposes only, various equivalent modifications are possible within the spirit and scope of the present application, as those skilled in the relevant art will recognize and appreciate. As noted, these modifications can be made to the present application in light of the foregoing description of illustrated embodiments of the present application and are to be included within the spirit and scope of the present application.
The systems and methods have been described herein in general terms as being useful for understanding the details of the present application. Furthermore, various specific details have been given to provide a general understanding of the embodiments of the application. One skilled in the relevant art will recognize, however, that an embodiment of the application can be practiced without one or more of the specific details, or with other apparatus, systems, assemblies, methods, components, materials, parts, and/or the like. In other instances, well-known structures, materials, and/or operations are not specifically shown or described in detail to avoid obscuring aspects of the embodiments of the application.
Thus, although the present application has been described herein with reference to particular embodiments thereof, freedom of modification, various changes and substitutions are also within the foregoing disclosure, and it should be understood that in some instances some features of the present application will be employed without a corresponding use of other features without departing from the scope and spirit of the claimed invention. Accordingly, many modifications may be made to adapt a particular situation or material to the essential scope and spirit of the present application. It is intended that the present application not be limited to the particular terms used in following claims and/or to the particular embodiment disclosed as the best mode contemplated for carrying out the present application, but that the present application will include any and all embodiments and equivalents falling within the scope of the appended claims. Accordingly, the scope of the present application is to be determined solely by the appended claims.
Claims (10)
1. A flexible sensor for measuring tension and torsion, comprising:
the substrate is made of a flexible insulating material;
the sensing unit is arranged on the surface of the substrate;
the sensing unit comprises a first sub-sensing unit and a second sub-sensing unit, the first sub-sensing unit and the second sub-sensing unit are symmetrically arranged along the central axis of the substrate, and the included angle of the first sub-sensing unit and the included angle of the second sub-sensing unit along the central axis of the substrate are arranged at a preset angle.
2. A sensor as claimed in claim 1, wherein the flexible insulating material has a modulus of elasticity of 10 or less 9 Pa。
3. A sensor of measurable stretch and twist flexibility as claimed in claim 1 wherein said predetermined angle is in the range of 15 ° to 75 °.
4. The sensor of claim 1, wherein the first sub-sensing unit and the second sub-sensing unit are symmetrically arranged along both sides of the central axis of the substrate and symmetrically arranged along the central axis of the substrate in a crossed and overlapped manner.
5. A sensor as claimed in claim 1, wherein the first sub-sensing unit and the second sub-sensing unit respectively comprise two electrodes and a strain unit, and each strain unit is provided with one electrode at each end.
6. The sensor of claim 5, wherein the strain gauge comprises a resistive and/or capacitive sensor cell, and the strain gauge is made of a flexible material.
7. A sensor as claimed in claim 5, wherein each strain cell comprises a plurality of sub-strain cells arranged in parallel, the sub-strain cells being connected by connecting sections.
8. A sensor of measurable stretch and torsional flexibility as claimed in claim 7 wherein said connecting sections are disposed horizontally or vertically.
9. The sensor of claim 7, wherein a plurality of said sub strain units are connected in series or in series by said connecting segments.
10. The sensor according to claim 1, wherein the sensing unit comprises two strain units, a tensile strain unit and four electrodes, the tensile strain unit is located between the first sub sensing unit and the second sub sensing unit and arranged along the central axis direction of the substrate, two ends of the tensile strain unit are respectively provided with one of the electrodes, one end of the tensile strain unit is connected with the first sub sensing unit and the second sub sensing unit, and one end of the first sub sensing unit and one end of the second sub sensing unit, which are not connected with the tensile strain unit, are respectively connected with one of the electrodes.
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