CN115845942B - Microfluidic chip and molding method thereof - Google Patents
Microfluidic chip and molding method thereof Download PDFInfo
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- CN115845942B CN115845942B CN202211617283.5A CN202211617283A CN115845942B CN 115845942 B CN115845942 B CN 115845942B CN 202211617283 A CN202211617283 A CN 202211617283A CN 115845942 B CN115845942 B CN 115845942B
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- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000000465 moulding Methods 0.000 title claims description 10
- 238000002347 injection Methods 0.000 claims abstract description 45
- 239000007924 injection Substances 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 238000005530 etching Methods 0.000 claims description 64
- 230000004888 barrier function Effects 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 12
- 239000000243 solution Substances 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 19
- 239000003153 chemical reaction reagent Substances 0.000 abstract description 9
- 230000001965 increasing effect Effects 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 description 5
- 238000012123 point-of-care testing Methods 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000338 in vitro Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000002965 ELISA Methods 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 239000012502 diagnostic product Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001917 fluorescence detection Methods 0.000 description 1
- 108090000765 processed proteins & peptides Proteins 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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Abstract
The invention discloses a microfluidic chip and a forming method of the microfluidic chip, the microfluidic chip comprises a substrate, the substrate is provided with a reaction area and a sample injection area, the surface of the reaction area is a concave-convex surface, the concave-convex surface comprises a concave part and at least one convex part, at least the concave part forms a reaction runner for medium reaction, the sample injection area is used for communicating a liquid inlet of the microfluidic chip with the reaction runner, the surface of the reaction area of the microfluidic chip is the concave-convex surface, the specific surface area formed by the structure is larger, so that more reaction substrates can be attached and fixed in the reaction area, the reagent mixing, the reaction and the result detection are facilitated, and the effective detection efficiency is increased. Further reducing the usage amount of the reagent.
Description
Technical Field
The invention relates to the technical field of microfluidic detection chips, in particular to a microfluidic chip and a molding method of the microfluidic chip.
Background
The current microfluidic chip for forming the micro-channel based on glass-based etching can be used as a biochemical detection micro-reactor, has compact design structure, is firm and durable, has the characteristics of good light transmittance, hydrophilicity, high temperature and high pressure resistance, stable surface property, biological inertia and the like, and has been widely applied to the biochemical detection market of IVD (English full name: in vitro diagnostic products, chinese in vitro diagnosis product, hereinafter abbreviated as IVD)/POCT (English full name: point of CARE TESTING, chinese on-site instant detection, hereinafter abbreviated as POCT).
The IVD/POCT instant detection equipment used in the current market basically adopts the modes of test paper color development, test tube reading (32 pore plates, 96 pore plates and the like), micro-channel reaction fluorescence detection and the like to acquire signals, relates to a traditional reagent tube as a reaction container, adopts a micro-magnetic bead technology to separate reaction products from reagents, needs to consume a large amount of test reagents and magnetic beads, and has higher cost because the test tube is used as the reaction container, and the required reagent amount is more.
When the runner structure of the current microfluidic chip performs some enzyme-linked immunosorbent assay, a substrate is needed to be pre-buried for fixing the antigen-antibody complex, and the more the fixed amount of the antigen-antibody complex is, the stronger the corresponding detection signal is.
How to increase the intensity of the detection signal is a technical problem that is always focused on by the person skilled in the art.
Disclosure of Invention
The invention provides a microfluidic chip capable of improving the intensity of detection signals and further improving the detection efficiency and a forming method of the microfluidic chip.
In a first aspect, the present invention provides a microfluidic chip, including a substrate, where the substrate has a reaction area and a sample injection area, the surface of the reaction area is an uneven surface, the uneven surface includes a concave portion and at least one convex portion, at least the concave portion forms a reaction channel for medium reaction, and the sample injection area is used for communicating a liquid inlet of the microfluidic chip with the reaction channel.
Optionally, the maximum depth of the sample injection area is smaller than the maximum depth of the reaction runner.
Optionally, along a first direction, the sample injection area comprises a first section and a second section which are communicated, along a second direction, the width of the first section is smaller than that of the second section, the first section is communicated with the liquid inlet, and the second section is communicated with the reaction runner; wherein the first direction is along a media flow direction and the second direction is perpendicular to the first direction.
Optionally, the bottom wall of the reaction flow channel formed by the concave part is arc-shaped, and the top surface of the convex part is plane.
Alternatively, the specific surface area of all the concave portions is larger than the specific surface area of all the convex portions.
Optionally, the number of the protruding parts is at least two, and each protruding part is distributed in the reaction area at intervals.
Optionally, at least one row of the protruding parts is arranged in a first direction in the reaction zone, and at least one column of the protruding parts is arranged in a second direction, wherein the first direction is along a medium flowing direction, and the second direction is perpendicular to the first direction.
Optionally, the protrusion extends a predetermined length in the first direction to form an elongated shape;
Or the convex part is a columnar body.
Optionally, at least two rows of the protrusions are arranged in the first direction in the reaction zone, and the protrusions of a front row of two adjacent rows are arranged offset from the protrusions of a rear row.
Optionally, an end of each of the convex portions facing the liquid inlet region has a tip portion for reducing a flow resistance of the medium.
Optionally, the outer surface of the convex part is the same as the reference surface of the substrate in height, and the convex part does not form a reaction runner;
or the outer surface of the convex part is lower than the reference surface of the matrix, and the convex part also forms a reaction runner;
wherein the reference surface of the substrate is the surface of the substrate which is not etched.
In a second aspect, the present invention also provides a method for forming a microfluidic chip, where a substrate of the microfluidic chip includes a reaction region, and the reaction region is formed by:
and (3) a covering step: dividing the reaction area into a first area and a second area except the first area, at least covering a first barrier layer on the surface of the first area, wherein the second area is not covered with the first barrier layer, and in the etching step, the second area is directly contacted with an etching medium;
Etching: and etching the reaction region by using an etching medium, wherein the reaction region is provided with a concave-convex surface after the etching process is finished, and the etching depth of at least part of the first region is smaller than that of the second region so as to form a convex part in the first region and a concave part in the second region.
Optionally, the substrate further includes a sample injection area, and the covering step further includes: covering a second barrier layer on the surface of the sample injection area;
the etching step further comprises: etching the sample injection area by using an etching medium at the same time, wherein after the etching process is finished, the sample injection area forms a sample injection flow passage, and the depth of the sample injection flow passage is smaller than the maximum depth of the reaction area;
the blocking capacity of the second blocking layer to the etching liquid is larger than or equal to or smaller than that of the first blocking layer.
Optionally, the etching medium is an acid solution, and the first barrier layer and the second barrier layer are nonmetallic materials dissolved in the acid solution.
Optionally, the substrate includes a non-etched region, and the covering step further includes: covering a third barrier layer on the surface of the non-etching area, wherein the third barrier layer is used for preventing the surface of the non-etching area from being etched by the etching medium;
After the etching step is completed, removing the third barrier layer;
After the etching process, at least part of the surface of the first region is lower than the non-etched region or is not etched.
The surface of the reaction zone of the microfluidic chip provided by the invention is a concave-convex surface, and the specific surface area formed by the structure is relatively large, so that more reaction substrates can be attached and fixed in the reaction zone, reagent mixing, reaction and result detection are facilitated, and the effective detection efficiency is increased. Further reducing the usage amount of the reagent.
Drawings
Fig. 1 is a top view of a specific example of a microfluidic chip provided by the present invention;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
Fig. 3 is a top view of a second specific example of a microfluidic chip provided by the present invention;
fig. 4 is a top view of a third specific example of a microfluidic chip provided by the present invention;
Fig. 5 is a top view of a fourth specific example of a microfluidic chip provided by the present invention;
fig. 6 is a flow chart of a molding process of the microfluidic chip provided by the invention;
Fig. 7 is a flow chart of another molding process of the reaction area in the microfluidic chip provided by the invention.
The reference numerals in fig. 1-7 are illustrated as follows:
1, a matrix; 10 reference surfaces; 101 a surface; 101' a first etched surface; 102 etching the surface in the sample injection area; 103 a second etched surface; 11 non-etched regions; 12 sample injection areas; 121 a first segment; 122 a second section; 13 reaction zone; 131 recess; 132 convex portions; 132a tip portion; 1321 side walls;
2a third barrier layer; 3 a first barrier layer; 4a second barrier layer.
Detailed Description
According to the structure of the current microfluidic chip, a great deal of researches are conducted, and the research discovers that the flow channel of the reaction area in the current microfluidic chip is basically a straight flow channel, the reaction surface formed by the straight flow channel is relatively smaller, the attachment area of the corresponding embedded substrate is smaller, the amount of the embedded substrate is smaller, and the detection signal is smaller.
Based on the findings, the application continues to explore and carry out a great deal of experimental study, and provides a technical scheme capable of increasing detection signals.
The present invention will be further described in detail with reference to the following structures, molding methods, drawings, and specific examples, in order to enable those skilled in the art to better understand the technical solutions of the present invention.
The term "plurality" as used herein refers to a plurality, typically two or more, of indefinite quantities; and when "a number" is used to denote the number of a certain number of components, the number of components is not necessarily related to each other.
The terms "first," "second," and the like, herein are merely used for convenience in describing two or more structures or components that are identical or functionally similar, and do not denote any particular limitation of order and/or importance.
Referring to fig. 1 to 7, fig. 1 is a top view of a specific example of a microfluidic chip provided by the present invention; FIG. 2 is a cross-sectional view A-A of FIG. 1; fig. 3 is a top view of a second specific example of a microfluidic chip provided by the present invention; fig. 4 is a top view of a third specific example of a microfluidic chip provided by the present invention; fig. 5 is a top view of a fourth specific example of a microfluidic chip provided by the present invention; fig. 6 is a flow chart of a molding process of the microfluidic chip provided by the invention; fig. 7 is a flow chart of another molding process of the reaction area in the microfluidic chip provided by the invention.
The invention provides a microfluidic chip comprising a substrate 1, the substrate 1 is usually made of glass, although other materials such as crystalline silicon are not excluded from the substrate 1.
The substrate 1 in the invention is provided with at least a reaction area 13 and a sample introduction area 12, wherein the reaction area 13 and the sample introduction area 12 are all grooves obtained by removing materials at corresponding positions on the reference surface of the substrate 1. Wherein in one specific example the material removal process may be an etching process. According to the invention, the sample injection area 12 is communicated with the reaction area 13, wherein an external flow path is communicated with the sample injection area 12, external fluid firstly enters the sample injection area 12 and then flows from the sample injection area 12 to the reaction area 13, and the sample injection area 12 can play a role in buffering and flow equalization to a certain extent.
The surface of the reaction area 13 of the microfluidic chip provided by the invention is a concave-convex surface, the concave-convex surface comprises a concave part 131 and at least one convex part 132, at least the concave part 131 forms a reaction flow passage for medium reaction, the reaction flow passage of the reaction area 13 can be formed by the concave part 131 only, at the moment, the upper surface of the convex part 132 is a reference surface of the substrate 1, and the convex part 132 is not etched in the processing of the substrate 1; of course, the surfaces of the convex portion 132 and the concave portion 131 may be lower than the reference surface of the substrate 1, that is, the surfaces of the convex portion 132 and the concave portion 131 can form a reaction flow path, and the reference surface refers to the surface of the substrate 1 before being etched.
The surface roughness of the reaction zone 13 in the present invention has different depths, and the number of the protrusions 132 may be one or two or more, and the structures of the protrusions 132 may be the same or different, and several specific examples of the same structures of all the protrusions 132 are given below, which will be described below. It will be appreciated by those skilled in the art that the structures of the protrusions 132 and the recesses 131 herein are not limited to the several examples described herein, as long as the surface roughness of the reaction zone 13 can be achieved.
As described above, the specific shapes of the concave portion 131 and the convex portion 132 may take various forms, for example, the bottom wall of the concave portion 131 may have an arc-shaped structure having a relatively large specific surface area, and may have a planar structure having a relatively simple structure and being easily processed. The sample injection area 12 is used for communicating a liquid inlet of the microfluidic chip with the reaction flow channel, and the liquid inlet of the microfluidic chip is connected with an external flow path.
Specific surface area in this context refers to the total area per mass of material.
Compared with the current microfluidic chip in which the reaction area 13 is a direct current channel, the surface of the reaction area 13 is a concave-convex surface, and the specific surface area of the concave-convex surface is relatively large, so that more chemical modification groups, primers or short peptide sequences can be attached and fixed in the reaction area 13, the signal result of the reaction is more obvious, reagent mixing, reaction and result detection are facilitated, and the effective detection efficiency is improved.
The sample injection area 12 is mainly used for entering a sample medium, and is not used as a reaction area 13 of the sample medium, and in order to reduce the sample medium amount in the sample injection area 12 as much as possible, the microfluidic chip in the invention can be further arranged as follows.
In the microfluidic chip of the present invention, the maximum depth of the sample injection region 12 is smaller than the maximum depth of the reaction flow channel. The sample introduction regions 12 may have the same depth, i.e., the bottom surface of the sample introduction regions 12 may be planar. That is, after removing the material, the substrate 1 forms micro channels with two depths, i.e., H1 and H2, where H1 is smaller than H2, the channel corresponding to H1 may be the sample injection area 12, and the channel corresponding to H2 is the recess of the reaction area 13. The depth of the protrusions 132 of the reaction zone 13 may be higher or lower than or equal to the depth of the sample introduction zone 12.
In this example, the depth of the sample injection region 12 is smaller than the maximum depth of the reaction region 13, so that the sample medium in the sample injection region 12 can be reduced as much as possible, which is beneficial to saving the sample medium and further saving the test cost.
In the microfluidic chip, along a first direction, a sample injection area 12 comprises a first section 121 and a second section 122 which are communicated with each other, and along a second direction, the width of the first section 121 is smaller than that of the second section 122, the first section 121 is communicated with a liquid inlet, and the second section 122 is communicated with a reaction runner; wherein the first direction n is along the flow direction of the medium, and the second direction m is perpendicular to the first direction. The depth of the first and second sections 122 may be the same, both being H1, although the depth of the first and second sections 121, 122 may be slightly different.
In the above embodiment, the width of the sample injection area 12 along the flow direction of the medium is different, the position close to the liquid inlet is narrower, the position close to the reaction area 13 is wider in price, the sample injection area 12 at the wider position can play a role in buffering, the sample medium can uniformly flow into the reaction flow channel of the reaction area 13 at a relatively slower flow speed, the impact on attachments in the reaction flow channel is avoided, and the detection efficiency is improved.
In the present invention, the structure of the concave portion 131 may take various forms, and in a specific example, the bottom wall 101' of the reaction channel formed by the concave portion 131 of the microfluidic core is arc-shaped, please refer to fig. 2, the bottom wall of the concave portion 131 may be arc-shaped, the impact of the arc shape on the fluid is smaller, and the arc shape is favorable for forming a larger specific surface area.
In the present invention, the top surface 103 of the protrusion 132 may be planar, and the specific structure of the protrusion 132 in which the top surface 103 of the protrusion 132 is planar is shown in fig. 2, however, the top surface 103 of the protrusion 132 may also be non-planar, or may be an arc-shaped surface or another curved surface, so as to further increase the specific surface area of the reaction flow channel.
In a specific example, the specific surface area of the concave portion 131 of the microfluidic chip is larger than the specific surface area of all the convex portions 132, and as can be seen from fig. 1, the projection area of the concave portion 131 in the reference plate of the substrate is larger than the projection area of the convex portion 132 in the reference plate, and the sample medium is mostly in the concave portion 131 and partially in the convex portion 132, so that the specific surface area of the reaction flow channel can be increased as much as possible.
Referring to fig. 1, 3 to 5, the number of the protrusions 132 in the microfluidic chip is at least two, and the protrusions 132 are distributed in the reaction area 13 at intervals. A specific example of two protrusions 132 is shown in fig. 1, with the tops of the two protrusions 132 being generally circular top surfaces. In this embodiment, the reaction channel can accommodate a larger volume of sample medium, i.e., the reaction zone 13 can accommodate a larger volume of sample medium.
In fig. 3, there are shown 6 protrusions 132 arranged at intervals, in fig. 4, there are shown a plurality of protrusions 132, the number of protrusions 132 being 24, in four rows and six columns, each protrusion 132 being arranged at intervals, i.e. at least one row of protrusions 132 is arranged in a first direction in the reaction zone 13 and at least one column of protrusions 132 is arranged in a second direction, wherein the first direction is along the medium flow direction and the second direction is perpendicular to the first direction. In this example, the specific surface of the reaction flow channel is relatively large, which is beneficial to enhancing the detection signal.
The projections 132 are shown in fig. 3 as being arranged in columns and rows, although the projections 132 may be staggered, as in fig. 5, where the projections 132 are staggered in the direction of flow of the sample medium, and the projections 132 may be further staggered in a direction perpendicular to the direction of flow of the medium.
In the above embodiments, the protrusion 132 of the microfluidic chip is elongated by a predetermined length along the first direction, as shown in fig. 1, 3 to 5. Each of the protrusions 132 is located at a middle position of the recess 131, and the protrusions 132 are arranged along the first direction, so that the flow resistance of the sample medium is relatively small, the flow stability is relatively high, and the whole reaction flow channel is facilitated to be filled. The connecting side wall of the convex portion 132 and the concave portion 131 may be a smooth curve, and of course, the side wall connected between the bottom wall of the concave portion 131 and the top surface 103 of the convex portion 132 may also be a vertical wall, so that the processing technology is relatively simple.
Of course, the shape of the convex portion 132 is not limited to the above description, but may be other shapes, for example, the figure may be a columnar body protruding from the bottom wall of the convex portion 132.
Referring again to fig. 5, at least two rows of protrusions 132 are arranged along the first direction in the reaction region 13 of the microfluidic chip, and the protrusions 132 of the front row and the protrusions 132 of the rear row are arranged in a staggered manner.
Wherein, each convex part 132 has a tip part for reducing the flow resistance of the medium toward one end of the liquid inlet region. In a specific example, the protrusion 132 includes two connected side walls 1321, which are disposed at an included angle, and form a tip 132a at a position of the protrusion 132 toward the sample introduction region 12. The tip 132a can further serve as a shunt to facilitate filling of the sample medium into the entire reaction channel while reducing the flow resistance to the sample medium.
As described above, the outer surface of the protrusion 132 is the same height as the reference surface of the base 1, and the protrusion 132 does not form a reaction flow path; or the outer surface of the convex part 132 is lower than the reference surface of the substrate 1, and the convex part 132 also forms a reaction flow channel; wherein the reference surface of the substrate 1 is the surface of the substrate 1 which is not etched.
The invention also provides a specific forming method of the micro-fluidic chip, wherein the substrate 1 of the micro-fluidic chip comprises a reaction zone 13, and the reaction zone 13 is formed by the following steps:
S1, covering: dividing the reaction region 13 into a first region and a second region except the first region, wherein the surface of at least the first region is covered with a first barrier layer, the second region is not covered with the first barrier layer, and the second region is directly contacted with an etching medium in the etching step;
The first barrier layer 3 may be a material that is easy to etch, for example, a non-metal material such as SiNx, siO, etc., when the reaction region 13 is etched, the etching solution directly contacts with the second region to etch, and the first region is covered with the first barrier layer 3, the etching solution firstly dissolves and etches the first barrier layer 3, after the first barrier layer is completely dissolved and etched, the first region is etched, and obviously, in the same time, the etching depth of the second region is greater than the etching depth of the first region, the concave portion 131 is formed after the second region is etched, and the convex portion 132 is formed after the first region is etched. Referring to fig. 1, the surface 101 of the second region is etched to form a first etched surface 101', the surface of the first region is etched to form a second etched surface 103, and the second etched surface 103 forms the top surface 103 of the protrusion 132.
Of course, the first barrier layer 3 may be made of a material that is not easily etched by an etching solution such as an acid-base solution, for example, a metal such as Ti, mo, or Al. After the etching process, the surface 101 of the second region is etched to form the recess 131, while the first barrier layer is not etched or only etched to part of the structure, and the surface of the first region is not etched.
S2, etching: the reaction region 13 is etched by using an etching medium, and after the etching process is completed, the reaction region 13 is formed to have a concave-convex surface, wherein the etching depth of at least part of the first region is smaller than that of the second region, so that the convex portion 132 is formed in the first region, and the concave portion 131 is formed in the second region.
In a specific embodiment, for a specific example in which the substrate 1 further includes the sample injection region 12, the covering step of the molding method of the microfluidic chip further includes: covering the surface of the sample injection area 12 with a second barrier layer 4;
The S1 etching step further comprises the following steps: etching the sample injection area 12 by using an etching medium, and forming a sample injection flow passage in the sample injection area 12 after the etching process is finished, wherein the depth of the sample injection flow passage is smaller than the maximum depth of the reaction area 13; as shown in fig. 6, after etching, the sample area surface 102 is formed.
Wherein the blocking capacity of the second blocking layer 4 to the etching liquid is larger than or equal to or smaller than the blocking capacity of the first blocking layer 4 to the etching liquid. The first barrier layer 3 may be made of a material that is easy to etch, such as a non-metal material, e.g., siNx, siO, etc.
In the forming method of the microfluidic chip, the etching medium is an acid solution, and the first barrier layer 3 and the second barrier layer 4 are nonmetallic materials dissolved in the acid solution.
In the above embodiments, the substrate 1 includes the non-etched region 11, and the covering step further includes: covering the surface of the non-etching area 11 with a third barrier layer 2, wherein the third barrier layer 2 is used for preventing the surface of the non-etching area 11 from being etched by etching medium; after the etching step is completed, performing a step S3 to remove the third barrier layer 2; after the etching process, at least part of the surface of the first region is lower than the non-etched region 11 or at least part of the surface of the first region is not etched. The third barrier layer 2 may be a top-down resistant material, which may be a metal.
The micro-fluidic chip and the forming method of the micro-fluidic chip provided by the invention are described in detail. The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present invention and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the invention can be made without departing from the principles of the invention and these modifications and adaptations are intended to be within the scope of the invention as defined in the following claims.
Claims (12)
1. The microfluidic chip is characterized by comprising a substrate, wherein the substrate is provided with a reaction area and a sample injection area, the surface of the reaction area is an uneven surface, the uneven surface comprises a concave part and at least one convex part, at least the concave part forms a reaction flow channel for medium reaction, and the sample injection area is used for communicating a liquid inlet of the microfluidic chip with the reaction flow channel; the bottom wall of the reaction flow channel formed by the concave part is arc-shaped, and the top surface of the convex part is a plane;
one end of each convex part facing the sample injection area is provided with a tip part for reducing the flow resistance of the medium;
the outer surface of the convex part is lower than the reference surface of the matrix, and the convex part also forms a reaction runner;
wherein the reference surface of the substrate is the surface of the substrate which is not etched.
2. The microfluidic chip of claim 1, wherein the maximum depth of the sample injection region is less than the maximum depth of the reaction channel.
3. The microfluidic chip of claim 2, wherein in a first direction, the sample injection region comprises a first section and a second section that are in communication, and in a second direction, the first section has a smaller width than the second section, the first section is in communication with the liquid inlet, and the second section is in communication with the reaction flow channel; wherein the first direction is along a media flow direction and the second direction is perpendicular to the first direction.
4. The microfluidic chip according to claim 1, wherein the specific surface area of all the concave portions is larger than the specific surface area of all the convex portions.
5. The microfluidic chip according to any one of claims 1 to 4, wherein the number of the protrusions is at least two, and each protrusion is spaced apart from the reaction region.
6. The microfluidic chip according to claim 5, wherein at least one row of said protrusions is arranged in a first direction in said reaction zone and at least one column of said protrusions is arranged in a second direction, wherein said first direction is along a medium flow direction, and said second direction is perpendicular to said first direction.
7. The microfluidic chip according to claim 6, wherein the convex portion extends a predetermined length in the first direction to form a long stripe shape;
Or the convex part is a columnar body.
8. The microfluidic chip according to claim 5, wherein at least two rows of said protrusions are arranged in a first direction in said reaction zone, and said protrusions of a preceding row are arranged offset from said protrusions of a succeeding row in adjacent two rows.
9. A molding method for the microfluidic chip according to any one of claims 1 to 8, characterized in that the reaction region is molded by:
and (3) a covering step: dividing the reaction area into a first area and a second area except the first area, at least covering a first barrier layer on the surface of the first area, wherein the second area is not covered with the first barrier layer, and in the etching step, the second area is directly contacted with an etching medium;
Etching: and etching the reaction region by using an etching medium, wherein the reaction region is provided with a concave-convex surface after the etching process is finished, and the etching depth of at least part of the first region is smaller than that of the second region so as to form a convex part in the first region and a concave part in the second region.
10. The method of forming a microfluidic chip according to claim 9, wherein the substrate further comprises a sample introduction region, and the covering step further comprises: covering a second barrier layer on the surface of the sample injection area;
the etching step further comprises: etching the sample injection area by using an etching medium at the same time, wherein after the etching process is finished, the sample injection area forms a sample injection flow passage, and the depth of the sample injection flow passage is smaller than the maximum depth of the reaction area;
the blocking capacity of the second blocking layer to the etching liquid is larger than or equal to or smaller than that of the first blocking layer.
11. The method of claim 10, wherein the etching medium is an acid solution, and the first barrier layer and the second barrier layer are nonmetallic materials dissolved in the acid solution.
12. The method of forming a micro flow channel structure of a micro flow control chip according to claim 11, wherein the substrate includes a non-etched region, and the covering step further includes: covering a third barrier layer on the surface of the non-etching area, wherein the third barrier layer is used for preventing the surface of the non-etching area from being etched by the etching medium;
After the etching step is completed, removing the third barrier layer;
After the etching process, at least part of the surface of the first region is lower than the non-etched region or is not etched.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211617283.5A CN115845942B (en) | 2022-12-15 | 2022-12-15 | Microfluidic chip and molding method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211617283.5A CN115845942B (en) | 2022-12-15 | 2022-12-15 | Microfluidic chip and molding method thereof |
Publications (2)
| Publication Number | Publication Date |
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| CN115845942A CN115845942A (en) | 2023-03-28 |
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| CN111013677A (en) * | 2019-12-23 | 2020-04-17 | 东莞市东阳光诊断产品有限公司 | Microfluidic chip, detection device and detection method |
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| CN211865068U (en) * | 2020-01-17 | 2020-11-06 | 重庆创芯生物科技有限公司 | Multi-channel micro-fluidic chip |
| CN113063831A (en) * | 2021-04-30 | 2021-07-02 | 中国矿业大学(北京) | Micro-fluidic chip and manufacturing method thereof, and method and device for testing biochemical oxygen demand |
| CN215843055U (en) * | 2021-10-19 | 2022-02-18 | 北京芯迈微生物技术有限公司 | Chip is flowed in accuse step by step |
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