CN115833749A - Micro-electro-mechanical system oscillator and frequency calibration method - Google Patents
Micro-electro-mechanical system oscillator and frequency calibration method Download PDFInfo
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Abstract
The micro-electro-mechanical system oscillator and the frequency calibration method comprise a resonance module and a frequency calibration module electrically connected with the resonance module; the initial clock signal can be converted into the first voltage signal by the frequency calibration module for calibration to obtain the second voltage signal, and the second voltage signal is converted into the expected clock signal, and the expected clock signal has the expected frequency. In the embodiment of the application, the initial clock signal is converted into the voltage signal for calibration, then the calibrated voltage signal is converted into the expected clock signal, the expected clock signal has the expected frequency, the initial clock signal is not directly calibrated, so that the operation amount can be effectively reduced, the initial clock signal can be accurately calibrated to output the stable expected clock signal, and the user experience is further improved.
Description
Technical Field
The application relates to the technical field of micro electro mechanical systems, in particular to a micro electro mechanical system oscillator and a frequency calibration method.
Background
The quartz resonator is a device manufactured by using the principle that when the frequency of an electric signal is equal to the natural frequency of a quartz wafer, the wafer generates a resonance phenomenon due to a piezoelectric effect, and is a key element of a crystal oscillator, a narrow-band filter and the like. However, with the advance of technology, the MEMS oscillator is gradually replacing the quartz crystal oscillator and becoming an important element of the widely used Micro system because the MEMS oscillator has the advantages of shock resistance and programmability.
In addition, MEMS resonators based on silicon technology are more easily integrated into mainstream semiconductor technology and can be directly connected with their interface driver chip circuitry. However, the MEMS oscillator often cannot directly output a clock signal having a desired frequency due to manufacturing process variations, operating temperature variations, and the like.
Therefore, how to make the MEMS oscillator directly output the clock signal with the desired frequency is a difficult problem that needs to be solved urgently by the manufacturers of the existing MEMS oscillators.
Disclosure of Invention
The application provides a micro electro mechanical system oscillator and a frequency calibration method, which can enable the micro electro mechanical system oscillator to directly output a clock signal with a desired frequency.
In a first aspect, the present application provides a mems oscillator comprising a resonating module and a frequency calibration module electrically connected to the resonating module; the resonance module is configured to obtain an initial clock signal having an initial frequency, and output the initial clock signal to the frequency calibration module, and the frequency calibration module is configured to convert the initial clock signal into a first voltage signal, calibrate the first voltage signal, obtain a second voltage signal, and convert the second voltage signal into an expected clock signal, where the expected clock signal has an expected frequency.
In the mems oscillator provided in the embodiment of the present application, the frequency calibration module includes a first conversion unit, a calibration unit, and a second conversion unit, the first conversion unit is electrically connected to the calibration unit, and the calibration unit is electrically connected to the second conversion unit; the first conversion unit is configured to convert the initial clock signal into a first voltage signal, the calibration unit is configured to calibrate the first voltage signal to obtain a second voltage signal, and the second conversion unit is configured to convert the second voltage signal into a desired clock signal.
In the mems oscillator provided in the embodiment of the present application, the frequency calibration module further includes an encoding unit; the encoding unit is electrically connected with the first conversion unit and the calibration unit, the encoding unit is used for encoding the first voltage signal and acquiring a corresponding initial encoding value, and the calibration unit is further used for calibrating the first voltage signal according to a difference value between the initial encoding value and an expected encoding value so as to acquire a second voltage signal.
In the mems oscillator provided in the embodiment of the present application, the calibration unit includes a digital computation subunit and a voltage generation subunit, the digital computation subunit is electrically connected to the encoding unit, and the voltage generation subunit is electrically connected to both the first conversion unit and the digital computation subunit; the digital calculation subunit is configured to obtain a difference between the initial encoded value and the expected encoded value, and the voltage generation subunit is configured to convert the difference between the initial encoded value and the expected encoded value into a voltage difference, and obtain a second voltage signal according to the first voltage signal and the voltage difference.
In the mems oscillator provided in the embodiment of the present application, the calibration unit further includes a storage subunit, and the storage subunit is electrically connected to the digital computation subunit; wherein the storage subunit is configured to store the expected encoding value.
In the oscillator of the micro electro mechanical system provided by the embodiment of the application, the resonance module comprises a resonance unit and an oscillation unit electrically connected with the resonance unit; the resonance unit is used for outputting an initial clock signal, and the oscillation unit is used for driving the resonance unit to vibrate so as to obtain the initial clock signal with an initial frequency.
In the mems oscillator provided in the embodiment of the present application, the resonance unit and the oscillation unit are integrated on the same chip.
In a second aspect, the present application further provides a frequency calibration method applied to the mems oscillator, where the frequency calibration method includes:
acquiring an initial clock signal;
converting the initial clock signal into a first voltage signal;
calibrating the first voltage signal to obtain a second voltage signal;
converting the second voltage signal to a desired clock signal, the desired clock signal having a desired frequency.
In the frequency calibration method provided in the embodiment of the present application, the calibrating the first voltage signal to obtain the second voltage signal includes the following specific steps:
encoding the first voltage signal and acquiring a corresponding initial encoding value;
acquiring a difference value between the initial coding value and an expected coding value;
and calibrating the first voltage signal according to the difference value of the initial coding value and the expected coding value to obtain a second voltage signal.
In the frequency calibration method provided in the embodiment of the present application, the calibrating the first voltage signal according to the difference between the initial code value and the expected code value to obtain the second voltage signal includes the following specific steps:
converting the difference between the initial encoded value and the expected encoded value into a voltage difference;
and acquiring a second voltage signal according to the first voltage signal and the voltage difference value.
The application provides a micro electro mechanical system oscillator and a frequency calibration method, wherein the micro electro mechanical system oscillator comprises a resonance module and a frequency calibration module electrically connected with the resonance module; the initial clock signal can be converted into the first voltage signal by the frequency calibration module for calibration to obtain the second voltage signal, and the second voltage signal is converted into the expected clock signal, and the expected clock signal has the expected frequency. In the embodiment of the application, the initial clock signal is converted into the voltage signal for calibration, then the calibrated voltage signal is converted into the expected clock signal, the expected clock signal has the expected frequency, the initial clock signal is not directly calibrated, so that the operation amount can be effectively reduced, the initial clock signal can be accurately calibrated to output the stable expected clock signal, and the user experience is further improved.
Drawings
FIG. 1 is a schematic diagram of a first MEMS oscillator according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a second MEMS oscillator according to an embodiment of the present application;
FIG. 3 is a schematic diagram of a third structure of a MEMS oscillator according to an embodiment of the present application;
FIG. 4 is a diagram illustrating a fourth exemplary MEMS oscillator according to an embodiment of the present disclosure;
FIG. 5 is a schematic diagram of a fifth exemplary MEMS oscillator according to an embodiment of the present disclosure;
fig. 6 is a first flowchart of a frequency calibration method according to an embodiment of the present disclosure;
fig. 7 is a schematic diagram of a first sub-flow of a frequency calibration method according to an embodiment of the present application;
fig. 8 is a schematic diagram of a second sub-flow of a frequency calibration method according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the described embodiments are merely a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Furthermore, the terms "first," "second," and the like in the description and in the claims of the present application are used for distinguishing between different objects and not for describing a particular order. The terms "comprising" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions.
Referring to fig. 1, fig. 1 is a schematic diagram illustrating a first structure of a mems oscillator according to an embodiment of the present disclosure. As shown in fig. 1, a mems oscillator 10 provided in an embodiment of the present application includes a resonant module 101 and a frequency calibration module 102 electrically connected to the resonant module 101.
The resonance module 101 is configured to obtain an initial clock signal CLK1 having an initial frequency, and output the initial clock signal CLK1 to the frequency calibration module 102. The frequency calibration module 102 is configured to convert the initial clock signal CLK1 into a first voltage signal V1, calibrate the first voltage signal V1 to obtain a second voltage signal V2, and convert the second voltage signal V2 into a desired clock signal CLK2, where the desired clock signal CLK2 has a desired frequency.
It should be noted that, in the embodiment of the present application, instead of directly calibrating the initial clock signal CLK1, the initial clock signal CLK1 is converted into a voltage signal for calibration, and then the calibrated voltage signal is converted into the desired clock signal CLK2. The initial clock signal CLK1 has a plurality of parameters, and the initial clock signal CLK1 is directly calibrated, and calibration of the plurality of parameters needs to be considered, so that the calculation amount is large, errors are prone to occur, and a stable desired clock signal CLK2 is not easy to generate. When the voltage signal is calibrated, parameters needing to be considered are few, so that the clock signal is converted into the intermediate transition signal, namely the voltage signal is calibrated, the calculation amount can be effectively reduced, the initial clock signal can be accurately calibrated to output a stable expected clock signal, and the use experience of a user is further improved.
Referring to fig. 2, fig. 2 is a schematic diagram of a second structure of a mems oscillator according to an embodiment of the present disclosure. As shown in fig. 2, in the mems oscillator 10 provided in the embodiment of the present disclosure, the resonant module 101 includes a resonant unit 1011 and an oscillating unit 1012 electrically connected to the resonant unit 1011. The frequency calibration module 102 includes a first conversion unit 1021, a calibration unit 1022, and a second conversion unit 1023, wherein the first conversion unit 1021 and the calibration unit 1022 are electrically connected, and the calibration unit 1022 and the second conversion unit 1023 are electrically connected.
The resonance unit 1011 is configured to output an initial clock signal CLK1, and the oscillation unit 1012 is configured to drive the resonance unit 1011 to vibrate to obtain the initial clock signal CLK1 with an initial frequency. The first conversion unit 1021 is configured to convert the initial clock signal CLK1 into a first voltage signal V1, the calibration unit 1022 is configured to calibrate the first voltage signal V1 to obtain a second voltage signal V2, and the second conversion unit 1023 is configured to convert the second voltage signal V2 into a desired clock signal CLK2.
It should be noted that the first conversion unit 1021 may be a frequency-to-voltage converter (FTVC) which converts an initial clock signal CLK1 with an initial frequency into a first voltage signal V1 in a linear relationship with the initial clock signal CLK1, that is, V1= a × CLK1+ b, where a and b are conversion parameters. The second converting unit 1023 may be a voltage-to-frequency converter (VTFC), and the second converting unit 1023 converts the second voltage signal V2 into a frequency signal in a linear relationship with the second voltage signal V2, and outputs the frequency signal, i.e. the desired clock signal CLK2 with the desired frequency, i.e. CLK2= g × V2+ h, where g and h are conversion parameters.
Note that the resonance unit 1011 and the oscillation unit 1012 are integrated on the same chip. And the resonant unit 1011 and the oscillating unit 1012 are integrated on the same chip, so that the interference on the initial clock signal CLK1 in the transmission process can be reduced. Of course, the resonance unit 1011 and the oscillation unit 1012 may be separately provided, and are not particularly limited herein.
Referring to fig. 3, fig. 3 is a schematic diagram of a third structure of a mems oscillator according to an embodiment of the present disclosure. As shown in fig. 3, in the mems oscillator 10 provided in the embodiment of the present application, the frequency calibration module 102 further includes an encoding unit 1024; the encoding unit 1024 is electrically connected to both the first conversion unit 1021 and the calibration unit 1022.
The encoding unit 1024 is configured to encode the first voltage signal V1 and obtain a corresponding initial encoding value code, and the calibration unit is further configured to calibrate the first voltage signal V1 according to a difference between the initial encoding value code and a desired encoding value Preset _ code to obtain a second voltage signal V2.
It should be noted that, in order to obtain the more accurate desired clock signal CLK2, the clock signal is converted into an intermediate transition signal, i.e., a voltage signal, for calibration. However, the voltage signal may have fluctuation, and therefore, the first voltage signal V1 needs to be encoded to a corresponding initial encoding value code, and then corrected based on the expected encoding value Preset _ code corresponding to the expected clock signal CLK2, i.e., the expected encoding value Preset _ code corresponding to the second voltage signal V2, so that the amount of operation can be effectively reduced, and the initial clock signal can be accurately calibrated to output a stable expected clock signal.
Referring to fig. 4, fig. 4 is a schematic diagram of a fourth structure of a mems oscillator according to an embodiment of the present disclosure. As shown in fig. 4, in the mems oscillator 10 provided in the embodiment of the present disclosure, the calibration unit 1022 includes a digital calculation subunit 10221 and a voltage generation subunit 10222, the digital calculation subunit 10221 is electrically connected to the encoding unit 1024, and the voltage generation subunit 10222 is electrically connected to both the first conversion unit 1021 and the digital calculation subunit 10221.
Wherein the digital calculation subunit 10221 is configured to obtain a difference value Pcode between the initial encoded value Code and the desired encoded value Preset _ Code, and specifically, the digital calculation module 24 is a digital subtractor to perform difference processing on the received encoded value Code and the desired encoded value Preset _ Code, so as to obtain a difference Code value Pcode, i.e., pcode = Code-Preset _ Code. The voltage generation subunit 10222 is configured to convert the difference value Pcode of the initial encoded value code and the desired encoded value Preset _ code into a voltage difference value Δ V, i.e., Δ V = epdode + f, where e and f are conversion parameters. And obtaining a second voltage signal V2 according to the first voltage signal V1 and the voltage difference value delta V. The voltage generating subunit 10222 may be a Programmable Voltage Generator (PVG), which receives the phase difference code value Pcode output by the digital calculating subunit 10221 and converts it into a voltage value Δ V, and adds or removes it from the first voltage signal V1 according to the voltage value Δ V to obtain a calibrated second voltage signal V2, i.e. V2= V1+ Δ V.
It should be noted that, firstly, the encoding unit 1024 is used to encode the first voltage signal V1 and obtain the corresponding initial encoded value code, then the expected encoded value Preset _ code is extracted from the calibration unit 1022, and the digital calculation subunit 10221 is used to obtain the difference value Pcode between the initial encoded value code and the expected encoded value Preset _ code, then the difference value Pcode between the initial encoded value code and the expected encoded value Preset _ code is converted into the voltage difference value Δ V, and the second voltage signal V2 is obtained according to the first voltage signal V1 and the voltage difference value Δ V, and finally the second voltage signal V2 is converted into the expected clock signal CLK2.
From the above formula, CLK2= g × V2+ h = g (V1 + Δ V) + h = g (V1 + ePcode + f) + h = g (a × CLK1+ b + e × Preset _ code-e + f) + h.
The above formula may further be converted into CLK2= a × Pcode + B × V1+ C, where a = g × e, B = g, and C = g × f + h, V1 is the first voltage signal V1 in linear relation to the initial clock signal CLK1, and Pcode is a phase difference value calculated by subtracting the code value code from the desired code value Preset _ code.
Referring to fig. 5, fig. 5 is a schematic diagram illustrating a fifth structure of an mems oscillator according to an embodiment of the present disclosure. As shown in fig. 5, in the mems oscillator 10 provided in the embodiment of the present disclosure, the calibration unit 1022 further includes a storage subunit 10223, and the storage subunit 10223 is electrically connected to the digital calculation subunit 10221.
Wherein the storage subunit 10223 is used to store the desired encoded value Preset _ code.
The oscillator comprises a resonance module and a frequency calibration module electrically connected with the resonance module; the initial clock signal can be converted into the first voltage signal by the frequency calibration module for calibration to obtain the second voltage signal, and the second voltage signal is converted into the expected clock signal, and the expected clock signal has the expected frequency. In the embodiment of the application, the initial clock signal is converted into the voltage signal for calibration, then the calibrated voltage signal is converted into the expected clock signal, the expected clock signal has the expected frequency, the initial clock signal is not directly calibrated, so that the operation amount can be effectively reduced, the initial clock signal can be accurately calibrated to output the stable expected clock signal, and the user experience is further improved.
The embodiment of the application also provides a frequency calibration method. The frequency calibration method is applied to the mems oscillator 10, wherein the mems oscillator 10 can refer to the above description and is not described herein again.
Referring to fig. 6, fig. 6 is a first flowchart of a frequency calibration method according to an embodiment of the present disclosure. As shown in fig. 6, the frequency calibration method provided in the embodiment of the present application includes the following specific steps:
Referring to fig. 7, fig. 7 is a first sub-flowchart of a frequency calibration method according to an embodiment of the present disclosure. As shown in fig. 7, step 203 provided in the embodiment of the present application includes the following specific steps:
Referring to fig. 8, fig. 8 is a second sub-flowchart of a frequency calibration method according to an embodiment of the present disclosure. As shown in fig. 8, step 2033 provided in the embodiment of the present application includes the following specific steps:
In the frequency calibration method provided by the embodiment of the application, the initial clock signal is converted into the first voltage signal for calibration to obtain the second voltage signal, and the second voltage signal is converted into the expected clock signal, where the expected clock signal has an expected frequency. The initial clock signal is converted into the voltage signal to be calibrated, the calibrated voltage signal is converted into the expected clock signal, the expected clock signal has expected frequency, the initial clock signal is not directly calibrated, therefore, the operation amount can be effectively reduced, the initial clock signal can be accurately calibrated to output the stable expected clock signal, and the user experience is further improved.
The mems oscillator and the frequency calibration method provided by the embodiments of the present application are described in detail above, and specific examples are applied herein to explain the principles and embodiments of the present application, and the description of the embodiments is only used to help understand the method and the core idea of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. A micro electro mechanical system oscillator is characterized by comprising a resonance module and a frequency calibration module electrically connected with the resonance module; wherein the content of the first and second substances,
the resonance module is used for acquiring an initial clock signal with an initial frequency and outputting the initial clock signal to the frequency calibration module, the frequency calibration module is used for converting the initial clock signal into a first voltage signal and calibrating the first voltage signal to acquire a second voltage signal and converting the second voltage signal into an expected clock signal, and the expected clock signal has an expected frequency.
2. The mems oscillator of claim 1, wherein the frequency calibration module comprises a first conversion unit, a calibration unit and a second conversion unit, the first conversion unit is electrically connected to the calibration unit, and the calibration unit is electrically connected to the second conversion unit; wherein the content of the first and second substances,
the first conversion unit is configured to convert the initial clock signal into the first voltage signal, the calibration unit is configured to calibrate the first voltage signal to obtain the second voltage signal, and the second conversion unit is configured to convert the second voltage signal into the desired clock signal.
3. The mems oscillator of claim 2, wherein the frequency calibration module further comprises an encoding unit; the encoding unit is electrically connected with the first conversion unit and the calibration unit respectively, the encoding unit is used for encoding the first voltage signal and acquiring a corresponding initial encoding value, and the calibration unit is further used for calibrating the first voltage signal according to a difference value between the initial encoding value and an expected encoding value so as to acquire the second voltage signal.
4. The mems oscillator of claim 3, wherein the calibration unit comprises a digital computation subunit and a voltage generation subunit, the digital computation subunit being electrically connected to the encoding unit, the voltage generation subunit being electrically connected to the first conversion unit and the digital computation subunit, respectively; wherein the content of the first and second substances,
the digital calculation subunit is configured to obtain a difference between the initial encoded value and the expected encoded value, and the voltage generation subunit is configured to convert the difference between the initial encoded value and the expected encoded value into a voltage difference, and obtain the second voltage signal according to the first voltage signal and the voltage difference.
5. The mems oscillator of claim 4, wherein the calibration unit further comprises a storage subunit, the storage subunit being electrically connected to the digital computation subunit; wherein the storage subunit is configured to store the expected encoding value.
6. The mems oscillator of claim 1, wherein the resonance module comprises a resonance unit and an oscillation unit electrically connected to the resonance unit; the resonance unit is used for outputting an initial clock signal, and the oscillation unit is used for driving the resonance unit to vibrate so as to acquire the initial clock signal.
7. The mems oscillator of claim 6, wherein the resonating unit and the oscillating unit are integrated on the same chip.
8. A frequency calibration method applied to the mems oscillator according to any one of claims 1 to 7, wherein the frequency calibration method comprises:
acquiring an initial clock signal;
converting the initial clock signal into a first voltage signal;
calibrating the first voltage signal to obtain a second voltage signal;
converting the second voltage signal to a desired clock signal, the desired clock signal having a desired frequency.
9. The method of claim 8, wherein calibrating the first voltage signal to obtain the second voltage signal comprises:
encoding the first voltage signal and acquiring a corresponding initial encoding value;
acquiring a difference value between the initial coding value and an expected coding value;
and calibrating the first voltage signal according to the difference value of the initial coding value and the expected coding value to obtain the second voltage signal.
10. The method of claim 9, wherein the signal generator is configured to generate the signal according to the signal
Calibrating the first voltage signal according to a difference between the initial code value and the expected code value to obtain the second voltage signal, including:
converting the difference between the initial encoded value and the expected encoded value into a voltage difference;
and acquiring the second voltage signal according to the first voltage signal and the voltage difference value.
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