CN115823310A - Gas circuit base block - Google Patents

Gas circuit base block Download PDF

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Publication number
CN115823310A
CN115823310A CN202211457133.2A CN202211457133A CN115823310A CN 115823310 A CN115823310 A CN 115823310A CN 202211457133 A CN202211457133 A CN 202211457133A CN 115823310 A CN115823310 A CN 115823310A
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CN
China
Prior art keywords
channel
base block
air outlet
gas
valve body
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Pending
Application number
CN202211457133.2A
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Chinese (zh)
Inventor
张雷
耿德占
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Zhongke Aier Beijing Technology Co Ltd
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Zhongke Aier Beijing Technology Co Ltd
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Application filed by Zhongke Aier Beijing Technology Co Ltd filed Critical Zhongke Aier Beijing Technology Co Ltd
Priority to CN202211457133.2A priority Critical patent/CN115823310A/en
Publication of CN115823310A publication Critical patent/CN115823310A/en
Pending legal-status Critical Current

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00Road transport of goods or passengers
    • Y02T10/10Internal combustion engine [ICE] based vehicles
    • Y02T10/30Use of alternative fuels, e.g. biofuels

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Abstract

The invention discloses a gas circuit base block, relates to the technical field of special gas cabinets, and aims to solve the problems that when the number of base blocks and valve bodies of the existing special gas cabinet is large, the connection structure is complicated, and the workload is large during connection. The gas circuit base block includes: the valve body comprises a base block body, wherein a plurality of mounting holes are formed in the base block body and are used for connecting the valve body; an air inlet channel and an air outlet channel are arranged in the base block body, and the air inlet channel is provided with a first air inlet and a first air outlet; the air outlet channel is provided with a second air inlet and a second air outlet, and the first air outlet is communicated with the air inlet of the valve body; the second air inlet is communicated with the air outlet of the valve body. The gas circuit base block provided by the invention is used for connecting the valve body of the special gas cabinet, when the number of the base blocks and the valve body of the special gas cabinet is large, the connecting structure of the base blocks and the valve body of the special gas cabinet is simplified, and the workload is small during connection.

Description

Gas circuit base block
Technical Field
The invention relates to the technical field of special gas cabinets, in particular to a gas circuit base block.
Background
The special gas cabinet is mainly used for supplying inflammable, explosive and extremely toxic special gases and is mainly used for emerging industries such as semiconductors and LEDs.
The conventional installation and connection mode of the gas circuit of the semiconductor integrated special gas cabinet is complicated, the workload is large, a plurality of leakage points are easy to occur, and the safety factor is low. For example, the connection structure of the special gas cabinet base block and the valve body shown in fig. 1 includes: the valve comprises a valve body 1, an internal thread joint 2, a UCR joint 3, a gasket 4 and a valve body bracket 5. The valve body 1 is arranged on the valve body support 5, and the input end and the output end of the valve body 1 are both connected with an internal thread joint 2. The end of each female adapter 2 is in turn connected to a UCR adapter 3. Wherein, the inner screwed joint 2 and the UCR joint 3 are sealed by a gasket 4; the connection structure of the special gas holder base block and the valve body as shown in fig. 2 comprises: a plurality of valve bodies 1 and each valve body 1 correspondingly enter and exit two female thread joints 2, the female thread joints 2 are connected with EP pipes 6, and the EP pipes 6 are connected with each other through right-angle joints 7 and three-way joints 8. The connection mode of the joint and the pipeline in the connection structure of the special gas cabinet base block and the valve body is complicated, and particularly when the number of the special gas cabinet base blocks and the valve body is large, the connection structure of the special gas cabinet base block and the valve body is complicated, and the workload is large during connection.
Disclosure of Invention
The invention aims to provide a gas circuit base block for connecting a valve body of a special gas cabinet, which simplifies the connection structure of the base block and the valve body of the special gas cabinet and has small workload during connection when the number of the base block and the valve body of the special gas cabinet is large.
In order to achieve the above purpose, the invention provides the following technical scheme:
a gas circuit substrate block comprising: the valve body comprises a base block body, wherein a plurality of mounting holes are formed in the base block body and are used for connecting the valve body; an air inlet channel and an air outlet channel are arranged in the base block body, and the air inlet channel is provided with a first air inlet and a first air outlet; the air outlet channel is provided with a second air inlet and a second air outlet, and the first air outlet is communicated with the air inlet of the valve body; the second air inlet is communicated with the air outlet of the valve body.
In one implementation, the air inlet channel is provided with one first air inlet, and the air outlet channel is provided with one or more second air outlets.
In one implementation, the base block body includes:
the air inlet base block is internally provided with the air inlet channel;
and the air outlet base block is arranged opposite to the air inlet base block, and the air outlet channel is arranged in the air outlet base block.
In one implementation, when one valve body is arranged, the air inlet channel is an L-shaped channel; when the valve body is provided in plurality, the air inlet channel comprises an air inlet main channel and a plurality of air inlet branch channels connected with the air inlet main channel; when the valve body is provided with one, the air outlet channel is an L-shaped channel, and when the valve body is provided with a plurality of air outlet channels, the air outlet channel comprises an air outlet main channel and a plurality of air outlet branch channels connected with the air outlet main channel.
In one implementation, the air inlet base block and the air outlet base block are of a split structure or an integrated structure.
In one implementation mode, the air inlet channel is provided with a first linear channel penetrating through the air inlet base block, and two ends of the first linear channel are provided with first fabrication hole plugging caps respectively for sealing the first linear channel; the air outlet channel is provided with a second linear channel penetrating through the air outlet base block, and two ends of the second linear channel are provided with second process plugging caps used for sealing the second linear channel.
In one implementation, a C-shaped ring is arranged between the first air outlet of the air inlet channel and the air inlet of the valve body; and a C-shaped ring is arranged between the second air inlet of the air outlet channel and the air outlet of the valve body and is used for pressing and sealing.
In one implementation, the gas circuit base block further includes: the base, still be provided with a plurality of fixed orificess on the base block body, the fixed orifices be used for with the base block body is spacing to be fixed in the base.
In one implementation manner, two sides of the base block body, which are located at the first air outlet, are respectively provided with one mounting hole; the two sides of the base block body, which are positioned at the second air inlet, are respectively provided with one mounting hole.
In one implementation manner, the first air inlet and the first air outlet of the air inlet channel are arranged on the same surface of the base block body, and the air inlet channel is a C-shaped channel; and a second air inlet and a second air outlet of the air outlet channel are arranged on the same surface of the base block body, and the air outlet channel is a C-shaped channel.
Compared with the prior art, the gas circuit base block provided by the invention has the advantages that the gas inlet channel and the gas outlet channel are arranged in the base block body, and then the gas inlet channel and the gas outlet channel are connected with the valve body. When the pipeline is connected, a large number of right-angle joints, tee joints and the like are not needed, so that the pipeline connection mode is simplified; effectively avoided connecting a plurality of joints during the connecting line, work load reduces greatly, and safe and reliable.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of a connection structure of a single valve body and a base block in the prior art;
FIG. 2 is a schematic view of a connection structure of a plurality of valve bodies and a base block in the prior art;
FIG. 3 is a schematic perspective view of a connection between a gas circuit base block and a valve body according to an embodiment of the present invention; ,
FIG. 4 is a schematic perspective view of an intake base block according to an embodiment of the present invention;
FIG. 5 isbase:Sub>A cross-sectional view A-A of FIG. 4;
FIG. 6 is a schematic perspective view of an exemplary gas outlet block according to the present invention;
FIG. 7 is a cross-sectional view of FIG. 6;
fig. 8 is a cross-sectional view of a single valve body coupled to a single base block body in an embodiment of the present invention.
Reference numerals:
1-a valve body; 2-an internal thread joint; a 3-UCR linker; 4-a gasket; 5-a valve body support; 6-EP tube; 7-right-angle joints; 8-a three-way joint; 9-a base block body; 901-mounting holes; 902-an intake passage; 903-an air outlet channel; 904 — first air inlet; 905-a first air outlet; 906-a second air inlet; 907-second air outlet; 908-an intake base block; 909-outgassing foundation block; 910-main intake passage; 911-an intake branch passage; 912-main air outlet channel; 913-an outlet branch channel; 914-first fabrication hole plugging cap; 915-a second process plugging cap; 916-C type ring; 917-a fixation hole; 10-a valve body; 11-base.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Referring to fig. 3 to 6, an embodiment of the invention provides a gas circuit base block, including: the valve body 10 is provided with a base block body 9, the base block body 9 is of a rectangular structure, and with reference to fig. 4, a plurality of mounting holes 901 are formed in the top of the base block body 9, and the mounting holes 901 are used for connecting the valve body 10; the mounting hole 901 can be a threaded hole, and the valve body 10 is connected to the base block body 9 through a bolt; in another embodiment, the mounting hole 901 may be a through hole, and the valve body 10 is connected to the base block body 9 by a plug. An air inlet channel 902 and an air outlet channel 903 are arranged in the base block body 9, and the air inlet channel 902 is provided with a first air inlet 904 and a first air outlet 905; the air outlet channel 903 is provided with a second air inlet 906 and a second air outlet 907, and the first air outlet 905 is communicated with the air inlet of the valve body 10; the second air inlet 906 is communicated with the air outlet of the valve body 10, and with reference to fig. 4, the first air inlet 904 may be disposed on the side surface of the base block body 9, or may be disposed on the top of the base block body 9, which is determined according to actual conditions; with reference to fig. 6, the second air inlet 906 is disposed at the top of the base block body 9, and the second air outlet 907 is disposed at the side of the base block body 9.
In the specific implementation: the valve body 10 is connected to the top of the base block body 9, gas enters the gas inlet passage 902 in the base block body 9 from the first gas inlet 904, the gas entering the gas inlet passage 902 can enter the gas outlet passage 903 after passing through the valve body 10, the valve body 10 is closed and opened to control the circulation of the gas, and the gas entering the gas outlet passage 903 can be discharged from the second gas outlet 907.
As can be seen from the structure and the specific implementation process of the gas circuit base block, the gas inlet channel 902 and the gas outlet channel 903 are disposed in the base block body 9, and then the gas inlet channel 902 and the gas outlet channel 903 are connected to the valve body 10. When the pipeline is connected, a large number of right-angle joints, tee joints and the like are not needed, so that the pipeline connection mode is simplified; effectively avoided connecting a plurality of joints during the connecting line, work load reduces greatly, and safe and reliable.
Referring to fig. 3 to 5, as a possible embodiment, the inlet channel 902 is provided with a first inlet 904, and the outlet channel 903 is provided with one or more second outlets 907. The intake passage 902 may also be provided with a plurality of first intake ports 904, according to actual needs; the method can also be as follows: inlet channel 902 is provided with one or more first inlets 904 and outlet channel 903 is provided with a second outlet 907.
In the specific implementation: when there is one valve body 10, gas enters the gas inlet channel 902 from the first gas inlet 904 of the gas inlet channel 902, then passes through the valve body 10, the on and off of the gas is controlled by the valve body 10, the gas passing through the valve body 10 directly enters the gas outlet channel 903 through the second gas inlet 906, and then is discharged from the second gas outlet 907 on the gas outlet channel 903; when the valve body 10 is provided with a plurality of valve bodies, gas also enters the gas inlet passage 902 from the first gas inlet 904 of the gas inlet passage 902, the gas entering the gas inlet passage 902 passes through the plurality of valve bodies 10, the on and off of the gas is independently controlled by the single valve body 10, and the gas passing through the plurality of valve bodies 10 enters the gas outlet passage 903 through the plurality of second gas inlets 906 and is then discharged from the second gas outlet 907 of the gas outlet passage 903.
As can be known through the structure and the specific implementation process of the gas circuit base block, the first gas inlet 904 is arranged on the gas inlet channel 902, the valve body 10 and the base block can be connected through only one connector in the installation process, a complex pipeline is not needed to connect the valve body, the use of a right-angle connector, a three-way pipe and other connecting structures is avoided, the connecting structure of the gas circuit base block and the valve body is greatly simplified, and the connecting point is not easy to leak during connection, and the gas circuit base block is safe and reliable.
Referring to fig. 3 to 7, as a possible implementation, the base block body 9 includes: an inlet base block 908 and an outlet base block 909. An inlet passage 902 is provided in the inlet base block 908. Gas outlet channel 903 is provided in gas outlet base block 909. In some embodiments, inlet base block 908 and outlet base block 909 are separate or integral structures. When the inlet base block 908 and the outlet base block 909 are in a split structure, the outlet base block 909 and the inlet base block 908 are arranged oppositely, and a certain distance is formed between the outlet base block 909 and the inlet base block 908; the distance between the two is adjusted to adapt to the connection of different valve bodies 10, and the air inlet base block 908 and the air outlet base block 909 are integrated, so that the carrying and the installation are convenient.
In the specific implementation: the gas passes through inlet channel 902 in inlet base block 908 and then through outlet channel 903 in outlet base block 909, and valve body 10 is located between inlet base block 908 and outlet base block 909 to control the gas flow between inlet channel 902 and outlet channel 903.
As can be seen from the structure and the specific implementation process of the gas circuit base block, the base block body 9 is divided into an inlet base block 908 and an outlet base block 909. An intake passage 902 is provided in the intake base block 908; air outlet channel 903 is arranged in air outlet base block 909, and the distance between air inlet base block 908 and air outlet base block 909 can be adjusted to adapt to different types of valve bodies 10.
Referring to fig. 3 to 7, in some embodiments, when one valve body 10 is provided, the intake passage 902 is an L-shaped passage; when the valve body 10 is provided in plurality, the intake passage 902 includes one intake main passage 910 and a plurality of intake branch passages 911 connected to the intake main passage 910; when one valve body 10 is provided, the air outlet passage 903 is an L-shaped passage, and when a plurality of valve bodies 10 are provided, the air outlet passage 903 includes an air outlet main passage 912 and a plurality of air outlet branch passages 913 connected to the air outlet main passage 912; in addition, when one valve body 10 is provided, the intake passage 902 may also be a C-type passage; the air outlet channel 903 may be a C-channel.
In the specific implementation: when one valve body 10 is arranged, a first air inlet 904 and a first air outlet 905 are arranged on an air inlet channel 902 on the base block body 9, and the first air inlet 904 and the first air outlet 905 are arranged on different surfaces to form an L-shaped channel; the air outlet channel 903 is provided with a second air inlet 906 and a second air outlet 907, and the second air inlet 906 and the second air outlet 907 are arranged on different surfaces to form an L-shaped channel; when the valve body 10 is provided in plurality, the air inlet passage 902 is divided into an air inlet main passage 910 and a plurality of air inlet branch passages 911, the gas firstly passes through the air inlet main passage 910 and then enters the plurality of air inlet branch passages 911, the number of the air inlet branch passages 911 is the same as that of the valve body 10, the gas in each air inlet branch passage 911 enters the corresponding valve body 10, and the circulation of the gas is controlled by the valve body 10; the gas passing through the valve body 10 enters the gas outlet channel 903, and the gas first enters the gas outlet main channel 912, then enters the corresponding gas outlet branch channel 913 of each valve body 10, and finally reaches the second gas outlet 907.
As can be seen from the structure and the specific implementation process of the gas circuit base block, when one valve body 10 is provided, the gas inlet channel 902 and the gas outlet channel 903 are both L-shaped channels. It is only necessary to connect one end of the gas pipe to the first gas inlet 904. After the gas comes out of the valve body 10, a gas outlet pipeline is connected to the second gas outlet 907, so that the structure is simple and the installation is convenient; when the valve body 10 is provided in plurality, the intake passage 902 is provided with one intake main passage 910 and a plurality of intake branch passages 911; outlet channel 903 is provided with an outlet main channel 912 and a plurality of outlet branch channels 913. The structure arrangement adopting internal shunting avoids arranging a plurality of pipelines outside the base block body 9, and simultaneously does not need a plurality of right-angle joints or three-way joints for connecting the pipelines, thereby greatly simplifying the connecting structure of the base block body 9 and the valve body 10; when the conventional gas path is in a valve body 10 or a gas path branch path, joints with double number of the valve bodies 10 are needed corresponding to the valve body 10 when three-way (four-way and the like) connection is adopted; not only is the installation complicated, but also the leakage danger of the special gas pipeline is increased; the invention adopts an internal shunting mode according to the pipeline requirement, greatly reduces the shunting danger and increases the stability.
In some embodiments, the inlet channel 902 has a first linear channel through the inlet base block 908, and both ends of the first linear channel are provided with first process hole plugs 914 for sealing the first linear channel; the air outlet channel 903 has a second straight channel penetrating through the air outlet base block 909, and both ends of the second straight channel are provided with second process plugging caps 915 for sealing the second straight channel.
In the specific implementation: two first process hole plugging caps 914 are disposed at two ends of the first linear channel to perform a sealing function. Similarly, the two second process plugging caps 915 are arranged at two ends of the second linear channel, and also play a role in sealing. The first straight-line channel and the second straight-line channel are set to be communicated channels, which is inevitable in the processing process, and the air tightness of the first straight-line channel is ensured only by the first process hole plugging cap 914; and ensuring the air tightness of the second linear channel by the second process plugging cap 915.
Referring to fig. 8, in some embodiments, a C-ring 916 is disposed between the first outlet 905 of the inlet channel 902 and the inlet of the valve body 10; a C-shaped ring 916 is arranged between the second air inlet 906 of the air outlet channel 903 and the air outlet of the valve body 10, and the C-shaped ring 916 is used for pressing and sealing. The first air outlet 905 and the air inlet of the valve body 10 can be sealed by a sealing ring; the second air inlet 906 and the air outlet of the valve body 10 may be sealed by a sealing ring.
In the specific implementation: a C-ring 916 is placed at the first outlet 905 of the inlet passage 902, and then the inlet of the valve body 10 is pressure sealed to the C-ring 916. The C-ring 916 effectively seals the first outlet 905 from the inlet of the valve body 10 and the second inlet 906 from the outlet of the valve body 10.
According to the structure and the specific implementation process of the gas circuit base block, different from the connection mode of a conventional pipeline, the gas circuit base block adopts a C-shaped ring 916 pressing and sealing method as an installation and connection mode, so that the gas circuit base block is convenient to install and stable in sealing effect, and the use area of a gas circuit integrated system is greatly reduced (basically by more than 1/2).
Referring to fig. 8, as a possible implementation manner, the gas circuit base block further includes: base 11, base 11 are platelike structure, still are provided with a plurality of fixed orificess 917 on the base block body 9, and fixed orificess 917 is used for being spacing fixed in base 11 with base block body 9.
In the specific implementation: place basic block body 9 to the suitable position of base 11, a plurality of fixed orificess 917 can be the screw hole, and mode through bolt cooperation screw hole sets up basic block body 9 fixedly on base 11.
Known through the structure and the concrete implementation process of above-mentioned gas circuit base block, be fixed in base 11 through fixed orifices 917 with base block body 9 for whole device is more stable, has improved the factor of safety of device.
Referring to fig. 4, in some embodiments, two mounting holes 901 are respectively formed on the base block body 9 at two sides of the first air outlet 905; two mounting holes 901 are respectively arranged on the two sides of the second air inlet 906 on the base block body 9. In specific implementation, the distances from the mounting holes 901 on the two sides of the first air outlet 905 to the first air outlet 905 are equal; the mounting holes 901 on both sides of the second air inlet 906 have the same distance from the second air inlet 906. This is provided to make the connection between the valve body 10 and the base block body 9 more secure and prevent air leakage.
In some embodiments, the first inlet 904 and the first outlet 905 of the inlet passage 902 are disposed on the same plane of the base block body 9, and the inlet passage 902 is a C-shaped passage; a second air inlet 906 and a second air outlet 907 of the air outlet channel 903 are arranged on the same surface of the base block body 9, and the air outlet channel 903 is a C-shaped channel.
In the specific implementation: the first air inlet 904 and the first air outlet 905 can be disposed on the same surface of the base block body 9 according to the specific size of the base block body 9, and it should be noted that the air inlet channel 902 and the air outlet channel 903 should have good air tightness.
The application relates to an internal flow channel of a gas circuit base block, which adopts a 1/2 inch pipe fitting to correspond to a flow channel, has large flow and meets the flow requirements of various special gas pipelines.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. A gas circuit substrate block, comprising:
the valve body comprises a base block body, wherein a plurality of mounting holes are formed in the base block body and are used for connecting the valve body; an air inlet channel and an air outlet channel are arranged in the base block body, and the air inlet channel is provided with a first air inlet and a first air outlet; the air outlet channel is provided with a second air inlet and a second air outlet, and the first air outlet is communicated with the air inlet of the valve body; the second air inlet is communicated with the air outlet of the valve body.
2. The gas circuit substrate block of claim 1, wherein the inlet channel is provided with one of the first inlet ports, and the outlet channel is provided with one or more of the second outlet ports.
3. The gas circuit substrate block of claim 2, wherein the substrate block body comprises:
the air inlet base block is internally provided with the air inlet channel;
and the air outlet base block is arranged opposite to the air inlet base block, and the air outlet channel is arranged in the air outlet base block.
4. The gas circuit base block according to claim 3, wherein when one of the valve bodies is provided, the gas inlet passage is an L-shaped passage; when the valve body is provided in plurality, the air inlet channel comprises an air inlet main channel and a plurality of air inlet branch channels connected with the air inlet main channel; when the valve body is provided with one, the air outlet channel is an L-shaped channel, and when the valve body is provided with a plurality of air outlet channels, the air outlet channel comprises an air outlet main channel and a plurality of air outlet branch channels connected with the air outlet main channel.
5. The gas circuit substrate block according to claim 3, wherein the gas inlet substrate block and the gas outlet substrate block are of a split structure or an integrated structure.
6. The gas circuit substrate block according to claim 3, wherein the gas inlet channel has a first linear channel penetrating through the gas inlet substrate block, and both ends of the first linear channel are provided with first fabrication hole plugging caps for sealing the first linear channel; the air outlet channel is provided with a second linear channel penetrating through the air outlet base block, and two ends of the second linear channel are provided with second process plugging caps used for sealing the second linear channel.
7. The gas circuit base block according to claim 1, wherein a C-ring is disposed between the first gas outlet of the gas inlet channel and the gas inlet of the valve body; and a C-shaped ring is arranged between the second air inlet of the air outlet channel and the air outlet of the valve body and is used for pressing and sealing.
8. The gas circuit substrate block of claim 1, further comprising: the base, still be provided with a plurality of fixed orificess on the base block body, the fixed orifices be used for with the base block body is spacing to be fixed in the base.
9. The gas circuit base block according to claim 1, wherein the base block body is provided with one of the mounting holes on each of both sides of the first gas outlet; the two sides of the base block body, which are positioned at the second air inlet, are respectively provided with one mounting hole.
10. The gas circuit substrate block of claim 1, wherein the first gas inlet and the first gas outlet of the gas inlet channel are disposed on the same surface of the substrate block body, and the gas inlet channel is a C-shaped channel; and a second air inlet and a second air outlet of the air outlet channel are arranged on the same surface of the base block body, and the air outlet channel is a C-shaped channel.
CN202211457133.2A 2022-11-16 2022-11-16 Gas circuit base block Pending CN115823310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211457133.2A CN115823310A (en) 2022-11-16 2022-11-16 Gas circuit base block

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211457133.2A CN115823310A (en) 2022-11-16 2022-11-16 Gas circuit base block

Publications (1)

Publication Number Publication Date
CN115823310A true CN115823310A (en) 2023-03-21

Family

ID=85529707

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211457133.2A Pending CN115823310A (en) 2022-11-16 2022-11-16 Gas circuit base block

Country Status (1)

Country Link
CN (1) CN115823310A (en)

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